CN109909554B - Cutting device - Google Patents
Cutting device Download PDFInfo
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- CN109909554B CN109909554B CN201811502863.3A CN201811502863A CN109909554B CN 109909554 B CN109909554 B CN 109909554B CN 201811502863 A CN201811502863 A CN 201811502863A CN 109909554 B CN109909554 B CN 109909554B
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- tool
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- fixing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- Mechanical Engineering (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Confectionery (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Provided is a cutting device which is easy to install a cutting tool and has excellent workability. The cutting device has a tool mounting jig (60, 160, 260) mounted on the front end of a boss part (36) of a tool mounting seat (30, 130) mounted on a spindle (12), the whole of the tool mounting jig is formed by resin, and the cutting device has: a mounting guide portion (61) having an outer diameter equal to the outer diameter of the boss portion; and fixing projections (65, 66, 68) formed at one end of the mounting guide portion and fitted into holes (13, 16) formed in the front end of the spindle or holes (49, 72) formed in fixing members (46, 70) fixed to the spindle, wherein the fixing projections are positioned and fixed so that the outer periphery of the mounting guide portion and the outer periphery of the boss portion are flush, and the mounting holes of the cutting tool are slid along the outer periphery of the mounting guide portion to the boss portion so as to mount the cutting tool on the fixing flange (32) in a state in which the tool mounting jig is fixed to the front end of the boss portion of the tool mounting seat by the fixing projections.
Description
Technical Field
The present invention relates to a cutting device.
Background
In a cutting device used for cutting a semiconductor package substrate or the like, a tool mount is attached to a tip of a rotating spindle, and a cutting tool is attached to the tool mount (for example, refer to patent document 1). When the cutting tool is mounted to the tool mount, after the mounting hole formed in the inner peripheral portion of the annular cutting tool is aligned with respect to the front end of the boss portion of the tool mount, the front end of the boss portion is inserted into the mounting hole of the cutting tool. Then, the cutting tool is slid with respect to the outer peripheral surface of the boss portion, and one surface of the cutting tool is brought into contact with the fixing flange of the tool mounting seat. Thereby, the distal end portion of the boss portion protrudes from the cutting tool, and the fixing nut is fastened to the external thread formed on the distal end portion. In this way, the cutting tool is fixed to the tool mount with being sandwiched between the fixing flange and the fixing nut.
Such a work of attaching the cutting tool to the tool mount is manually performed by an operator who operates the cutting device. Peripheral members such as a grinding wheel cover are provided around the tool mounting seat, so that a clearance between the peripheral members and the cutting tool is narrow, and the mounting operation of the cutting tool becomes difficult. For example, when an operator with little experience in work performs a mounting work of the cutting tool, the cutting tool may collide with the peripheral member, and the cutting edge of the cutting tool may be damaged. Therefore, the following tool mounting jig was developed: the cutting tool can be attached to the tool mount without being damaged, regardless of the technique of the operator (see patent document 2).
Patent document 1: japanese patent laid-open No. 11-33907
Patent document 2: japanese patent application laid-open No. 2015-150624
However, in the conventional cutting device, since the tool mounting jig needs to be removed after the cutting tool is mounted, there is a problem in that the work is complicated when the cutting tool is frequently replaced.
Disclosure of Invention
The present invention has been made in view of the above-described problems, and an object thereof is to provide a cutting device that is easy to mount a cutting tool and has excellent workability.
The present invention is a cutting device for cutting by attaching a cutting tool to a tool mount screwed to a spindle, the spindle having a hole formed at a tip thereof for screw-fixing the tool mount, the tool mount including a boss portion and a fixing flange integrally formed with the boss portion, the cutting tool including: a hub-shaped base having a mounting hole in a center portion thereof, the mounting hole being inserted into an outer periphery of the boss portion; and a cutting edge formed on the outer periphery of the hub-shaped base, the cutting device being characterized in that the cutting device has a tool mounting jig mounted on the front end of the boss portion of the tool mounting seat, the entirety of the tool mounting jig being formed of a resin, the tool mounting jig comprising: an installation guide portion which is installed at the front end of the boss portion of the tool mounting seat and has an outer diameter equal to the outer diameter of the boss portion; and a fixing protrusion formed at one end of the mounting guide portion, and fitted into the hole of the front end of the spindle or into a hole provided in a fixing member fixed to the spindle, wherein the fixing protrusion is fixed in a state in which the mounting guide portion is positioned so that an outer periphery of the mounting guide portion and an outer periphery of the boss portion are flush, and the mounting hole of the cutting tool is slid to the boss portion along the outer periphery of the mounting guide portion in a state in which the fixing protrusion of the tool mounting jig is fitted into the hole of the front end of the spindle or into the hole of the fixing member, thereby fixing the tool mounting jig to the front end of the boss portion of the tool mounting seat, thereby enabling mounting of the cutting tool to the fixing flange.
According to the above-described cutting device, since the cutter mounting jig is provided, the entire cutter mounting jig is made of resin and is fixed to the front end portion of the spindle or the fixing member fixed to the spindle via the fixing protrusion, the cutter can be reliably guided during mounting of the cutting tool, and the cutter mounting jig can be efficiently machined without requiring labor for removing the cutter mounting jig.
As the fixing member for attaching the tool attachment jig, a fixing member in a form fixed to a hole at the tip of the spindle can be used.
As described above, according to the cutting device of the present invention, the cutting tool can be easily attached, and even in frequent tool replacement, the handling can be performed without requiring labor, and the workability can be improved.
Drawings
Fig. 1 is an exploded perspective view of a cutting unit constituting a first embodiment of a cutting device.
Fig. 2 is a cross-sectional view showing a process of attaching a tool attachment jig to a tool attachment seat in the cutting unit of the first embodiment.
Fig. 3 is a cross-sectional view showing a process of attaching a cutting tool to the cutting unit of the first embodiment.
Fig. 4 is a cross-sectional view showing a state in which the mounting of the cutting tool is completed in the cutting unit of the first embodiment.
Fig. 5 is a cross-sectional view showing a process of attaching a tool attachment jig to a tool attachment seat in a cutting unit of the second embodiment.
Fig. 6 is a cross-sectional view showing a process of attaching a tool attachment jig to a tool attachment seat in a cutting unit of a third embodiment.
Fig. 7 is a perspective view of a tool mounting jig of the third embodiment.
Description of the reference numerals
10: a cutting unit; 11: a spindle housing; 12: a main shaft; 13: a threaded hole; 16: a fitting hole; 17: an external thread; 20: a cutting tool; 21: a hub-like abutment; 22: a cutting edge; 23: a mounting hole; 30: a cutter mounting seat; 31: a cylindrical portion; 32: a fixing flange; 33: a fitting hole; 34: an abutment surface; 35: an annular concave portion; 36: a boss portion; 37: an outer peripheral surface; 40: a fitting hole; 41: a suction hole; 42: an absorption path; 43: an annular groove; 45: a gasket; 46: a fixing bolt (fixing member); 49: a hole; 50: a rotary joint; 51: a support cylinder; 52: a mounting plate; 55: a cylindrical portion; 56: a communication path; 57: a suction source; 60: a tool mounting jig; 61: a mounting guide portion; 62: an outer peripheral surface; 63: a chamfering part; 64: a mounting surface; 65: a fixing protrusion; 66: a fixing protrusion; 67: a through hole; 68: a fixing protrusion; 70: a fixing nut (fixing member); 71: an outer peripheral surface; 72: a hole; 80: a cutter fixing nut; 110: a cutting unit; 112: a main shaft; 130: a cutter mounting seat; 160: a tool mounting jig; 210: a cutting unit; 212: a main shaft; 230: a cutter mounting seat; 236: a boss portion; 237: an outer peripheral surface; 238: an external thread; 260: a tool mounting jig; p: and a rotation axis.
Detailed Description
Hereinafter, a cutting device according to the present embodiment will be described with reference to the accompanying drawings. Fig. 1 to 4 show a first embodiment of a cutting unit constituting a cutting device, fig. 5 shows a second embodiment of the cutting unit, and fig. 6 and 7 show a third embodiment of the cutting unit.
The cutting unit 10 of the first embodiment shown in fig. 1 to 4 constitutes a cutting device used in cutting a semiconductor package substrate or the like. The entire structure of the cutting device is not shown, and the cutting unit 10 is supported so as to be movable relative to a chuck table holding a workpiece (semiconductor package substrate or the like) to be cut in a machining feed direction (X-axis direction), an indexing feed direction (Y-axis direction), and a lifting direction (Z-axis direction).
As shown in fig. 1, the cutting unit 10 is configured to mount a tool mount 30 on a spindle 12 protruding from a spindle case 11, and to mount a cutting tool 20 via the tool mount 30. A rotary joint 50 is mounted to the spindle housing 11.
The spindle 12 is rotatably supported with respect to the spindle case 11 about a rotation axis P in the Y-axis direction, and the spindle 12 is rotated by a rotation driving mechanism, not shown. The spindle 12 has a tapered shape in which the diameter of the tip portion gradually decreases, and a screw hole 13 is formed in the tip surface of the spindle 12.
When the spindle 12 is rotationally driven in a state where the cutting tool 20 is attached as shown in fig. 4, the cutting tool 20 rotates about the rotation axis P, and cutting processing of a workpiece can be performed. The structure of the cutting tool 20 mounted on the spindle 12 will be described in detail below.
The cutting tool 20 is a hub tool having a substantially disk-shaped hub base 21 and an annular cutting edge 22, and the cutting edge 22 is attached to the outer periphery of one side surface 24 (see fig. 3 and 4) of the hub base 21. A substantially circular mounting hole 23 is formed in the center of the hub base 21.
The tool mount 30 has: a cylindrical portion 31 extending in the Y-axis direction; and a fixing flange 32 protruding radially outward from the cylindrical portion 31. As shown in fig. 2 to 4, a fitting hole 33 extending in the Y-axis direction is formed in the center portion of the tool mount 30. The fitting hole 33 has a tapered inner peripheral surface with an inner diameter that decreases as it goes from the end surface of the cylindrical portion 31 toward the fixing flange 32. The inner peripheral surface shape of the fitting hole 33 corresponds to the outer peripheral surface shape of the main shaft 12, and the main shaft 12 can be fitted into the fitting hole 33.
The fixing flange 32 of the tool mounting seat 30 has an abutment surface 34, an annular recess 35, and a boss 36 formed on a surface opposite to the side from which the cylindrical portion 31 protrudes. The contact surface 34 is located on the outer peripheral side of the fixing flange 32, and is an annular surface perpendicular to the Y-axis direction. The annular recess 35 is located radially inward of the contact surface 34 and is recessed with respect to the contact surface 34. The boss 36 is provided at the center of the fixing flange 32 in the radial direction, and is a cylindrical protruding portion protruding in the Y-axis direction from the annular recess 35 beyond the contact surface 34.
In a state where the tool holder 30 is attached to the spindle 12, the outer peripheral surface 37 of the boss portion 36 is a cylindrical surface centered on the rotation axis P. The boss portion 36 has an outer diameter corresponding to the inner diameter of the mounting hole 23 of the cutting tool 20, and when the boss portion 36 is inserted into the mounting hole 23, the inner peripheral surface of the mounting hole 23 is supported by the outer peripheral surface 37 of the boss portion 36 to determine the position of the cutting tool 20 in the direction perpendicular to the Y-axis direction (see fig. 4). The length of the boss portion 36 in the Y-axis direction is substantially equal to the thickness of the cutting tool 20 in the Y-axis direction (see fig. 4). As shown in fig. 2 to 4, a through hole 38 communicating with the fitting hole 33 is formed inside the boss portion 36. An annular stepped portion 39 is formed in the through hole 38 at a boundary portion with the fitting hole 33.
As shown in fig. 1, a plurality of suction holes 41 are formed in the annular recess 35 of the tool mounting seat 30 so as to be positioned differently in the rotational direction (circumferential direction). As shown in fig. 2 to 4, a plurality of suction passages 42 communicating with the suction holes 41 are formed in the tool mounting seat 30. Each suction passage 42 opens at the bottom surface of an annular groove 43 formed in the outer peripheral surface of the cylindrical portion 31. The annular groove 43 extends in the circumferential direction of the cylindrical portion 31, and is continuously formed along the entire circumference of the cylindrical portion 31.
When the tool mount 30 is attached to the spindle 12, the spindle 12 is fitted into the fitting hole 33. Then, the washer 45 is inserted into the through hole 38 so as to be in contact with the stepped portion 39, and the fixing bolt 46 is screwed into the screw hole 13 at the tip of the spindle 12 by the washer 45, thereby fastening the same. The fixing bolt 46 is screwed in a state where the rotation of the spindle 12 is restricted by a spindle rotation lock mechanism (not shown) provided in the spindle case 11.
The fixing bolt 46 has: an external screw portion 47 screwed with the screw hole 13; and a head 48 having a diameter larger than that of the male screw portion 47, the head 48 abutting the gasket 45. A hexagonal hole 49 coaxial with the male screw portion 47 is formed in the center of the head portion 48, and a tool such as a hexagonal wrench is fitted into the hole 49 to rotate the fixing bolt 46. When the fixing bolt 46 is screwed in by a tool, a force is applied in a direction in which the spindle 12 is pressed into the fitting hole 33, and the tool mount 30 is fixed to the spindle 12. That is, the tool mount 30 is screwed to the spindle 12 by the fixing bolt 46.
A rotary joint 50 is attached to an end of the spindle case 11. The rotary joint 50 has: a cylindrical support cylinder 51; and a mounting plate 52 protruding radially outward from the support cylinder 51. As shown in fig. 1, the rotary joint 50 is fixed to the spindle case 11 by screwing and fastening mounting screws 54 inserted into a plurality of screw insertion holes 53 formed in the mounting plate 52 with screw holes 14 formed in the end portion of the spindle case 11. The support cylinder 51 is provided with a cylindrical portion 55 protruding radially outward, and a communication passage 56 is formed inside the cylindrical portion 55. One end of the communication passage 56 is open to the inner peripheral surface of the support tube 51, and the other end of the communication passage 56 is open to the front end of the cylindrical portion 55.
The rotary joint 50 is mounted to the spindle housing 11 before the tool mount 30 is mounted to the spindle 12. When the tool mounting seat 30 is further to be mounted on the spindle 12, the cylindrical portion 31 is rotatably inserted into the support cylinder 51. As shown in fig. 2 to 4, the annular groove 43 communicates with the communication passage 56 in a state where the cylindrical portion 31 is inserted into the support cylinder 51. The annular groove 43 is formed along the entire circumference of the cylindrical portion 31, and therefore the annular groove 43 and the communication path 56 are always maintained in communication regardless of any position of the tool mount 30 in the rotational direction with respect to the rotary joint 50.
That is, in a state where the tool mounting seat 30 has been mounted on the spindle 12, a suction passage is formed which continues from the suction hole 41 to the communication passage 56 via the suction passage 42 and the annular groove 43. As shown in fig. 2 to 4, the suction line extending from the suction source 57 is connected to the communication passage 56 of the cylindrical portion 55, and when the suction source 57 is driven, air can be sucked from the suction hole 41 through the suction passage. In addition, the portions of the annular groove 43 other than the portions facing the communication passage 56 are sealed by the inner peripheral surface of the support cylinder 51, and no air leakage occurs in the middle of the suction passage, so that the suction efficiency is not impaired.
The cutting tool 20 is mounted to the tool mount 30 mounted on the spindle 12 as described above. The boss portion 36 is inserted into the mounting hole 23 and the side surface 24 of the hub base 21 is brought into contact with the contact surface 34 of the fixing flange 32, whereby the position of the cutting tool 20 with respect to the tool mount 30 is determined.
In the cutting device, peripheral members such as a grinding wheel cover (not shown) covering the outer side of the cutting tool 20 are present around the cutting unit 10, and it is necessary to have skill in attaching the cutting tool 20 to the tool mount 30. For example, when the grinding wheel cover protrudes further toward the front side (left in fig. 2 to 4) than the boss portion 36 of the tool mount 30 in the Y-axis direction, there is a constraint as follows: the mounting hole 23 of the cutting tool 20 must be inserted in alignment with the boss 36 while avoiding the grinding wheel cover. Especially when the clearance between the cutting edge 22 of the cutting tool 20 and the grinding wheel cover is narrow, the cutting edge 22 may collide with the grinding wheel cover. Therefore, in the cutting unit 10, before the cutting tool 20 is mounted on the tool mounting seat 30, the tool mounting jig 60 is mounted on the tip of the boss portion 36 to substantially lengthen the boss portion 36, thereby improving the mounting workability.
The entire tool mounting jig 60 is formed of lightweight resin such as nylon, and the tool mounting jig 60 has a cylindrical mounting guide portion 61, and the mounting guide portion 61 has an outer diameter equivalent to that of the boss portion 36. The outer peripheral surface 62 of the attachment guide portion 61 formed of nylon or the like is a surface excellent in sliding property (small sliding resistance). A chamfer 63 is formed on the mounting guide 61 from one end face to the outer peripheral surface 62 so as to round the corner. Further, a fixing protrusion 65 is provided on the mounting surface 64 as the other end surface of the mounting guide portion 61, and the fixing protrusion 65 is used for fixing in a state in which the mounting guide portion 61 has been positioned with respect to the boss portion 36. The mounting surface 64 is a surface perpendicular to the Y-axis direction.
The fixing boss 65 is a protrusion protruding from the center of the mounting surface 64, and has a hexagonal prism shape corresponding to the hole 49 of the fixing bolt 46. When the tool mounting jig 60 is mounted to the boss portion 36, the fixing boss 65 is inserted into the hole 49. The cross-sectional dimension of the fixing boss 65 before insertion is slightly larger than the cross-sectional dimension of the hole 49, and the tool mounting jig 60 having the fixing boss 65 is made of a soft material (for example, the fixing bolt 46 is made of a metal, and the tool mounting jig 60 is made of a resin such as nylon) as compared with the fixing bolt 46 having the hole 49. Therefore, the fixing protrusion 65 is fitted (press-fitted) into the hole 49 while undergoing compression deformation. When the mounting surface 64 of the mounting guide portion 61 abuts against the front end surface of the boss portion 36, further insertion of the fixing boss portion 65 is restricted.
Thus, the tool attachment jig 60 is fixed to the boss portion 36 by positioning the outer peripheral surface 62 of the attachment guide portion 61 so as to be flush with the outer peripheral surface 37 of the boss portion 36. In addition, by bringing the mounting surface 64 into contact with the distal end surface of the boss portion 36, inclination of the mounting guide portion 61 with respect to the boss portion 36 can be suppressed (coaxiality of the boss portion 36 and the mounting guide portion 61 is ensured), and relative positional accuracy of the outer peripheral surface 37 and the outer peripheral surface 62 can be highly ensured.
In this way, the tool attachment jig 60 having the same diameter is fixed to the boss portion 36 in the positioned state, and the boss portion 36 is substantially extended by the length of the attachment guide portion 61. Since the fixing boss 65 is pressed into the hole 49 of the fixing bolt 46 to fix the fixing bolt 46, and the tool mounting seat 30 is mounted on the spindle 12, the tool mounting jig 60 can be easily mounted without changing the structure of the conventional tool mounting seat 30.
The mounting step of the cutting tool 20 will be described with reference to fig. 2 to 4. First, the following state is set in advance: the rotary joint 50 is attached to the spindle case 11, and the tool mount 30 is attached to the spindle 12 (see fig. 2). In this state, as shown in fig. 2 to 3, the fixing protrusion 65 of the tool attachment jig 60 is fitted (press-fitted) into the hole 49 of the fixing bolt 46, and the attachment surface 64 is brought into contact with the distal end surface of the boss portion 36. Thereby, the tool mounting jig 60 is fixed to the tool mounting seat 30, and the outer peripheral surface 62 of the mounting guide portion 61 is flush with the outer peripheral surface 37 of the boss portion 36.
Next, as shown in fig. 3, the mounting hole 23 of the cutting tool 20 is aligned with respect to the mounting guide 61 of the tool mounting jig 60, and the mounting guide 61 is inserted into the mounting hole 23. At this time, since the tool mounting jig 60 is attached to the boss portion 36, the cutting tool 20 can be aligned with respect to the tool mounting seat 30 on the front side in the mounting direction of the cutting tool 20. Therefore, the cutting tool 20 can be mounted without focusing on collision or interference of the cutting edge 22 with other members (e.g., a grinding wheel cover) around the tool mount 30.
Further, since the chamfer 63 is formed at the corner of the one end side of the mounting guide 61, the inner peripheral surface of the mounting hole 23 of the cutting tool 20 can be smoothly guided to the outer peripheral surface 62 of the tool mounting jig 60. For example, in a state in which the cutting tool 20 is slightly inclined with respect to the boss portion 36 with respect to the Y axis, or in a state in which the cutting tool 20 is slightly eccentric with respect to the boss portion 36 in the X axis direction or the Z axis direction, the chamfer portion 63 can guide the inner peripheral surface of the mounting hole 23 to guide the cutting tool 20 to an appropriate insertion position as shown in fig. 3.
After the mounting hole 23 of the cutting tool 20 is inserted onto the outer peripheral surface 62 of the mounting guide portion 61 as shown in fig. 3, the cutting tool 20 is slid along the outer peripheral surface 62 in the Y-axis direction to the boss portion 36. Since the mounting guide 61 is formed of a material having excellent sliding properties, the inner peripheral surface of the mounting hole 23 can be smoothly moved on the outer peripheral surface 62 of the mounting guide 61. Further, since the outer peripheral surface 62 of the mounting guide portion 61 and the outer peripheral surface 37 of the boss portion 36 are flush, hooking does not occur at the boundary between the mounting guide portion 61 and the boss portion 36 during sliding of the cutting tool 20.
As shown in fig. 4, the cutting tool 20 is inserted in the Y-axis direction to a position where the side surface 24 of the hub base 21 abuts against the abutment surface 34 of the fixing flange 32. The length of the boss portion 36 in the Y-axis direction is substantially equal to the thickness of the cutting tool 20, and the inner peripheral surface of the mounting hole 23 is supported by the outer peripheral surface 37 of the boss portion 36.
In a state where the cutting tool 20 is mounted at the position of fig. 4, the side surface 24 of the hub base 21 faces the annular recess 35 of the tool mount 30. When the suction source 57 is driven in this state, a negative pressure is applied to the annular recess 35 through the communication passage 56, the annular groove 43, the suction passage 42, and the suction hole 41. Then, the hub base 21 of the cutting tool 20 is attracted to the abutment surface 34 of the fixing flange 32, thereby holding the cutting tool 20.
The cutting unit 10 cuts a workpiece in a state where the tool attachment jig 60 is attached as shown in fig. 4. When the spindle 12 is rotationally driven while maintaining the suction and holding of the cutting tool 20, the cutting tool 20 attached to the spindle 12 via the tool attachment 30 rotates about the rotation axis P. The tool mounting fixture 60 rotates with the cutting tool 20 and the tool mount 30. The fixing protrusion 65 of the tool mounting jig 60 is pressed in along the axial direction (Y-axis direction) of the spindle 12, and the resin forming the tool mounting jig 60 is deflected by centrifugal force as the spindle 12 rotates at high speed, so that the tool mounting jig 60 does not come loose or come off from the tool mounting seat 30. In addition, since the tool mounting jig 60 is made of lightweight resin and is rotationally symmetrical in shape fixed to the rotation axis P, the weight balance of the rotating portion of the cutting unit 10 is not damaged or the shaft of the spindle 12 is not vibrated. That is, the tool mounting jig 60 does not adversely affect the rotational drive of the cutting tool 20.
When the cutting tool 20 attached to the tool mount 30 is to be removed, the driving of the suction source 57 is stopped. This releases the suction force that attracts the cutting tool 20 to the fixing flange 32, and the cutting tool 20 can be pulled out from the boss 36 in the Y-axis direction. Since the movement of the cutting tool 20 in the Y-axis direction is guided by the outer peripheral surface 62 of the mounting guide portion 61 of the tool mounting jig 60 mounted on the boss portion 36, the cutting tool 20 can be easily pulled out without colliding with peripheral members (wheel covers or the like) of the tool mount 30.
As described above, in the cutting device of the present embodiment, since the cutting tool 20 is attached or detached in a state in which the tool attachment jig 60 is attached and the guide length in the Y axis direction is extended, the influence of the peripheral members of the tool attachment seat 30 is less likely to be exerted, and excellent attachment/detachment workability can be obtained. The tool mounting jig 60 is fixed by fitting the fixing boss 65 into the hole 49 of the fixing bolt 46 screwed into the screw hole 13 of the spindle 12. The tool attachment jig 60 can be attached simply by inserting the fixing boss 65 into the hole 49 in the Y-axis direction, and thus no special tool is required. Further, since the cutting process can be performed in a state where the tool mounting jig 60 is mounted after the mounting of the cutting tool 20, the labor for removing the tool mounting jig 60 is not spent each time the cutting tool 20 is mounted, and the work is reduced. The tool mounting jig 60, which is kept in a mounted state, is also used for guiding the cutting tool 20 when it is removed. Therefore, the mounting operation of the cutting tool 20 can be easily performed even by an unskilled operator. In addition, since the cutting tool 20 can be easily and quickly attached and detached, the present invention is particularly suitable for cases where the cutting tool 20 is frequently replaced. For example, in the dressing of a tool for dressing the cutting edge 22 of the cutting tool 20, the cutting tool 20 is replaced one by one to continuously perform work, so that the cutting unit 10 having the tool mounting jig 60 is extremely effective.
Fig. 5 shows a cutting unit 110 constituting a second embodiment of the cutting device. In the cutting unit 110, components substantially common to those of the cutting unit 10 of the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted. The spindle 112, the tool mount 130, and the tool mount jig 160 correspond to the spindle 12, the tool mount 30, and the tool mount jig 60, respectively, in the cutting unit 10. The tool mounting jig 160 is formed entirely of lightweight resin such as nylon, as in the tool mounting jig 60.
Regarding the cutting unit 110, the difference is in the configuration of screwing the tool mount 130 to the spindle 112. A fitting hole 16 is formed in the front end surface of the main shaft 112, and a male screw 17 is formed on the outer peripheral surface around the fitting hole 16 near the front end of the main shaft 112. The fitting hole 16 is a square hole having a polygonal (e.g., hexagonal) cross-section perpendicular to the Y-axis direction.
The fitting hole 40 of the tool mounting seat 130 into which the spindle 112 is fitted passes through the boss portion 36 to penetrate the tool mounting seat 130 in the Y-axis direction (the through hole 38 and the stepped portion 39 of the first embodiment are not formed inside the boss portion 36). The fitting hole 40 has a tapered inner peripheral surface with an inner diameter that decreases as it progresses toward the distal end side of the boss portion 36, and the outer peripheral surface of the main shaft 112 has a tapered shape corresponding to the inner peripheral surface of the fitting hole 40. When the spindle 112 is inserted into the fitting hole 40 of the tool mounting seat 130, the front end portion of the spindle 112 protrudes from the fitting hole 40. The fixing nut 70 is screwed into the male screw 17 of the protruding portion of the main shaft 112.
The fixing nut 70 is a ring-shaped member having an internal thread on an inner peripheral surface thereof, which is screwed with the external thread 17, and has a cylindrical outer peripheral surface 71 which is flush with the outer peripheral surface 37 of the boss portion 36 in a state of being screwed with the external thread 17. A plurality of (for example, four) holes 72 are formed in the front end surface of the fixing nut 70 (the end surface on the opposite side to the front end surface of the boss portion 36) so as to be positioned differently in the circumferential direction.
When the tool mounting seat 130 is fixed to the spindle 112, the spindle 112 is inserted into the fitting hole 40, the fixing nut 70 is screwed with respect to the male screw 17 protruding from the fitting hole 40, and the fixing nut 70 is fastened by a predetermined tool fitted into the fitting hole 16 and the hole 72. The tool is fitted into the fitting hole 16 having a non-circular cross section to restrict rotation of the spindle 112, and is engaged with the hole 72 to rotate the fixing nut 70. By screwing the fixing nut 70 in this manner, the fixing nut 70 presses the front end surface of the boss portion 36, and the tool mount 130 is fitted and fixed to the spindle 112.
The tool mounting jig 160 has a fixing protrusion 66, and the fixing protrusion 66 is inserted into the fitting hole 16 formed in the front end surface of the spindle 112. The fixing projection 66 is a prismatic projection of a polygonal cross section (for example, a hexagonal cross section) corresponding to the fitting hole 16. The cross-sectional dimension of the fixing projection 66 is slightly larger than the cross-sectional dimension of the fitting hole 16, and the fixing projection 66 is fitted (press-fitted) into the fitting hole 16 while undergoing compression deformation. The tool attachment jig 160 is pushed until the attachment surface 64 of the attachment guide 61 abuts against the front end surface of the fixing nut 70. In this state, the outer peripheral surface 62 of the attachment guide portion 61, the outer peripheral surface 71 of the fixing nut 70, and the outer peripheral surface 37 of the boss portion 36 are flush with each other, and the boss portion 36 (and the fixing nut 70) is substantially extended by the tool attachment jig 160.
In the cutting unit 110 of the second embodiment, the positioning of the cutting tool 20 is performed from the front side in the Y-axis direction by the tool mounting jig 160, as in the cutting unit 10 of the first embodiment, so that the mounting workability of the cutting tool 20 is improved. The tool mounting jig 160 maintains a state of being mounted to the tool mounting seat 130 even after the mounting of the cutting tool 20, so that excellent workability can be obtained by the guiding of the tool mounting jig 160 even when the cutting tool 20 is removed. In addition, the tool mounting jig 160, which is made of lightweight resin and is fitted into the fitting hole 16 of the spindle 112, does not fall off or generate rotational vibration at the time of rotational driving of the spindle 112, and thus does not adversely affect the operation of the cutting tool 20.
The screw hole 13 in the cutting unit 10 of the first embodiment and the fitting hole 16 in the cutting unit 110 of the second embodiment are holes for screw-fixing the tool mount 30, 130 to the spindle 12, 112. More specifically, the screw hole 13 is a hole through which the fixing bolt 46 for screw fixation is directly screwed. In contrast, the fitting hole 16 is a hole that functions as a rotation inhibitor when the screw fixing nut 70 is screwed to the male screw 17.
In the cutting unit 10 of the first embodiment, the fixing boss 65 of the tool attachment jig 60 is indirectly fixed to the screw hole 13 of the spindle 12 via the hole 49 of the fixing bolt 46, which is a fixing member fixed to the spindle 12. In the cutting unit 110 of the second embodiment, the fixing projection 66 of the tool mounting jig 160 is directly fitted and fixed to the fitting hole 16 of the spindle 112.
Therefore, the cutting unit 10 of the first embodiment and the cutting unit 110 of the second embodiment are identical in that the fixing projections 65, 66 are fitted indirectly or directly into the screw holes 13 and the fitting holes 16 formed at the front ends of the main shafts 12, 112 to mount the tool mounting jigs 60, 160.
The cutting unit 210 of the third embodiment shown in fig. 6 is of the type: the cutting tool 20 is fixed to the tool mount 230 using the tool fixing nut 80 instead of being held by suction. Therefore, no suction path is formed in the tool mount 230. Specifically, the annular recess 35 and the suction hole 41 are not formed on the contact surface 34 of the fixing flange 32, and the annular groove 43 is not formed on the outer peripheral surface of the cylindrical portion 31. In addition, the cutting unit 210 does not have the rotary joint 50. An external thread 238 is formed on the outer peripheral surface 237 near the tip of the boss portion 236 of the tool attachment 230. The fixing nut 70 is similar to the second embodiment, and the tool mount 230 is screwed to the spindle 212 using the fixing nut 70. In this state, the outer peripheral surface 71 of the fixing nut 70 and the outer peripheral surface 237 of the boss portion 236 are flush.
In the cutting unit 210 of the third embodiment, a tool attachment jig 260 that can be attached to the fixing nut 70 is used. The tool mounting jig 260 has a through hole 67 penetrating the center of the mounting guide 61 in the Y-axis direction, and does not have a convex portion at the center portion, which corresponds to the fixing convex portions 65, 66 of the tool mounting jigs 60, 160. Instead, the tool attachment jig 260 projects the plurality of fixing projections 68 from the attachment surface 64 around the through hole 67. The plurality of fixing protrusions 68 are arranged and sized to be capable of being fitted into the plurality of holes 72 of the fixing nut 70. Specifically, as shown in fig. 7, four fixing projections 68 are provided at equal intervals in the circumferential direction on the tool attachment jig 260. Each of the fixing projections 68 is a cylindrical projection, and the tip is formed in a spherical shape. The tool attachment jig 260 is formed of lightweight resin such as nylon as the whole including the fixing projections 68.
The mounting of the cutting tool 20 in the cutting unit 210 proceeds as follows. The tool mounting jig 260 is mounted in a state where the tool mounting seat 230 is fixed to the spindle 212 using the fixing nut 70. When the tool mounting jig 260 is mounted, the fixing projections 68 are fitted (press-fitted) into the holes 72. Thereby, the tool attachment jig 260 is fixed to the fixing nut 70. The outer peripheral surface 62 of the mounting guide 61 of the tool mounting jig 260, the outer peripheral surface 71 of the fixing nut 70, and the outer peripheral surface 237 of the boss 236 are flush with each other.
Further, since the fixing projections 68 of the tool mounting jig 260 are smaller than the fixing projections 65, 66 of the tool mounting jigs 60, 160 of the first and second embodiments, an adhesive or the like may be used as an auxiliary means for fixing the tool mounting jig 260 in order to obtain a sufficient fixing force. Specifically, the adhesive is applied to the mounting surface 64 of the mounting guide 61 of the tool mounting jig 260, and the mounting surface 64 can be adhered to the front end surface of the fixing nut 70 and the front end surface of the spindle 212.
Next, the mounting hole 23 of the cutting tool 20 is aligned with the mounting guide portion 61 of the tool mounting jig 260, and the mounting hole 23 is inserted into the boss portion 236 while being slidably guided by the outer peripheral surface 62 of the mounting guide portion 61. In this case, the same effects as those of the tool mounting jigs 60 and 160 can be obtained by the tool mounting jig 260.
When the cutting tool 20 is inserted into the boss portion 21 and the side surface 24 abuts against the abutment surface 34 of the fixing flange 32, the vicinity of the tip end of the boss portion 236 protrudes from the mounting hole 23 of the cutting tool 20 (protrudes leftward in fig. 6). The tool fixing nut 80 is screwed with the external screw 238 formed at the protruding portion. An internal thread that is screwed with the external thread 238 is formed on the inner peripheral surface of the tool fixing nut 80.
In a state where the tool attachment jig 260 is attached, the through hole 67 is located in the extension direction of the fitting hole 16 at the tip of the spindle 212. That is, even if the tool mounting jig 260 is mounted, the fitting hole 16 is not sealed. Accordingly, the tool fixing nut 80 can be fastened while the tool is fitted into the fitting hole 16 through the through hole 67 to restrict the rotation of the spindle 212. When the fastening of the tool fixing nut 80 is completed, the hub base 21 is clamped by the tool fixing nut 80 and the fixing flange 32, and the cutting tool 20 is fixed to the tool mount 230.
In the cutting unit 210, cutting processing is performed by the cutting tool 20 in a state where the tool attachment jig 260 is attached. In addition, the tool attachment jig 260 guides the cutting tool 20 even when it is removed, and thus excellent workability can be obtained.
In summary, the above embodiments are similar in that the tool mounting jig (60, 160, 260) is directly or indirectly fixed to the spindle (12, 112, 212) via the fixing member, and the cutting tool (20) can be mounted to and removed from the tool mounting seat (30, 130, 230) in a state where the tool mounting jig is mounted.
The cutting unit 10 of the first embodiment is configured such that the fixing protrusion 65 of the tool mounting jig 60 is fitted into a hole (hole 49) provided in a fixing member (fixing bolt 46) fixed (screwed) to a hole (screw hole 13) formed at the front end of the spindle 12.
The cutting unit 110 of the second embodiment is configured such that the fixing protrusion 66 of the tool mounting jig 160 is directly fitted into a hole (fitting hole 16) formed in the front end of the spindle 112.
The cutting unit 210 of the third embodiment is configured such that the fixing protrusion 68 of the tool attachment jig 260 is fitted into a hole (hole 72) provided in a fixing member (fixing nut 70) fixed to the outer periphery of the spindle 212 (screwed with the external screw thread 17).
The tool mounting base for holding the cutting tool and the tool mounting jig used for mounting the cutting tool may be different from the tool mounting bases 30, 130, 230 and the tool mounting jigs 60, 160, 260 of the above embodiments.
For example, in the above-described embodiment, only the tool mounting jigs 60, 160, 260 having one type of length in the Y-axis direction are shown in each cutting unit, but a plurality of tool mounting jigs having different lengths in the Y-axis direction may be prepared in advance, and an operator may arbitrarily select a tool mounting jig having a predetermined length to mount. In this case, the color of the tool attachment jig can be made different according to the length, thereby improving the recognition.
The fixing projections 65, 66 of the tool mounting jig 60, 160 of the above embodiment have a polygonal (hexagonal) cross-sectional shape, and the tool mounting jig 260 has a plurality of fixing projections 68 of a cylindrical shape, but the shape of the fixing projections may be other than these as long as they can be fixed by fitting.
The workpiece to be cut by the cutting tool mounted by applying the present invention may be a workpiece other than the semiconductor package substrate.
Further, although the embodiments of the present invention have been described, the above embodiments and modifications may be combined in whole or in part as other embodiments of the present invention.
The embodiments of the present invention are not limited to the above-described embodiments and modifications, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Further, if the technical idea of the present invention is realized by another method due to the progress of the technology or another technology derived from the technology, the method may be used. Accordingly, the claims cover all embodiments that can be included within the scope of the technical idea of the present invention.
As described above, according to the cutting device of the present invention, the tool attachment jig fixed to the front end portion of the spindle by the engagement of the fixing protrusion improves the workability of attaching the cutting tool, and is particularly useful in cutting devices and the like in which the frequency of attaching and detaching the cutting tool is high.
Claims (3)
1. A cutting device for cutting by attaching a cutting tool to a tool mount screwed to a spindle, the spindle having a screw hole formed at a tip thereof for screw-fixing the tool mount, the tool mount including a boss portion and a fixing flange integrally formed with the boss portion, the cutting tool comprising: a hub-shaped base having a mounting hole in a center portion thereof, the mounting hole being inserted into an outer periphery of the boss portion; and a cutting blade formed on the outer periphery of the hub base,
the cutting device is characterized in that,
the cutting device has a tool mounting jig mounted at the front end of the boss portion of the tool mounting seat,
the whole of the tool mounting jig is formed of resin,
the tool mounting jig comprises:
an installation guide portion which is installed at the front end of the boss portion of the tool mounting seat and has an outer diameter equal to the outer diameter of the boss portion; and
a fixing protrusion formed at one end of the mounting guide portion and fitted into a hole provided in a fixing member for fixing the tool mounting seat to the spindle, the fixing protrusion being fixed in a state in which the mounting guide portion is positioned so that an outer periphery of the mounting guide portion and an outer periphery of the boss portion are flush with each other,
in a state in which the fixing protrusion of the tool mounting jig is fitted into the hole provided in the fixing member to fix the tool mounting jig to the front end of the boss portion of the tool mounting seat, the mounting hole of the cutting tool is slid to the boss portion along the outer periphery of the mounting guide portion, whereby the mounting of the cutting tool to the fixing flange is enabled,
after the cutting tool is mounted, cutting processing can be performed in a state in which the tool mounting jig is mounted.
2. The cutting device according to claim 1, wherein,
the fixing member is fixed to the screw hole at the front end of the spindle.
3. A cutting device for cutting by attaching a cutting tool to a tool mount screwed to a spindle, the spindle having a fitting hole formed in a distal end thereof, the tool mount being fixed to the spindle by screwing a fixing member to an external thread on the distal end of the spindle, the fitting hole functioning as a rotation preventing member when screwing the fixing member to the external thread on the distal end of the spindle, the tool mount including a boss portion and a fixing flange integrally formed with the boss portion, the cutting tool comprising: a hub-shaped base having a mounting hole in a center portion thereof, the mounting hole being inserted into an outer periphery of the boss portion; and a cutting blade formed on the outer periphery of the hub base,
the cutting device is characterized in that,
the cutting device has a tool mounting jig mounted at the front end of the boss portion of the tool mounting seat,
the whole of the tool mounting jig is formed of resin,
the tool mounting jig comprises:
an installation guide portion which is installed at the front end of the boss portion of the tool mounting seat and has an outer diameter equal to the outer diameter of the boss portion; and
a fixing protrusion formed at one end of the installation guide portion and fitted into the fitting hole at the front end of the spindle, the fixing protrusion being fixed in a state in which the installation guide portion is positioned so that the outer periphery of the installation guide portion is flush with the outer periphery of the fixing member and the outer periphery of the boss portion,
in a state in which the fixing projection of the tool mounting jig is fitted into the fitting hole of the front end of the spindle to fix the tool mounting jig to the front end of the boss portion of the tool mounting seat, the mounting hole of the cutting tool is slid to the boss portion along the outer periphery of the mounting guide portion, whereby the mounting of the cutting tool to the fixing flange is enabled,
after the cutting tool is mounted, cutting processing can be performed in a state in which the tool mounting jig is mounted.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017238535A JP7045178B2 (en) | 2017-12-13 | 2017-12-13 | Cutting equipment |
| JP2017-238535 | 2017-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109909554A CN109909554A (en) | 2019-06-21 |
| CN109909554B true CN109909554B (en) | 2023-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811502863.3A Active CN109909554B (en) | 2017-12-13 | 2018-12-10 | Cutting device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7045178B2 (en) |
| KR (1) | KR102630500B1 (en) |
| CN (1) | CN109909554B (en) |
| TW (1) | TWI782153B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7045841B2 (en) * | 2017-12-08 | 2022-04-01 | 株式会社ディスコ | Cutting equipment |
| CN110170910A (en) * | 2019-06-25 | 2019-08-27 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the double positioning of cutterhead |
| JP7373936B2 (en) * | 2019-07-22 | 2023-11-06 | 株式会社ディスコ | Flange mechanism and cutting device |
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| CN101579894A (en) * | 2008-05-15 | 2009-11-18 | 株式会社迪思科 | Cutting device |
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| AUPN268395A0 (en) * | 1995-04-27 | 1995-05-25 | Ziegler, Karl | Improvements in machine tools |
| JP3854687B2 (en) | 1997-07-22 | 2006-12-06 | 株式会社ディスコ | Flange mechanism |
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| JP2002237472A (en) * | 2001-02-07 | 2002-08-23 | Disco Abrasive Syst Ltd | Method of cutting object to be processed |
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| JP2012176448A (en) * | 2011-02-25 | 2012-09-13 | Kanefusa Corp | Combination cutter |
| EP2929967B1 (en) * | 2014-04-11 | 2017-02-01 | Sandvik Intellectual Property AB | A slot milling disc and a rotatable mounting shaft for such a milling disc |
| JP2016132046A (en) * | 2015-01-16 | 2016-07-25 | 株式会社ディスコ | Mount flange |
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- 2017-12-13 JP JP2017238535A patent/JP7045178B2/en active Active
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2018
- 2018-11-29 KR KR1020180150650A patent/KR102630500B1/en active IP Right Grant
- 2018-12-10 CN CN201811502863.3A patent/CN109909554B/en active Active
- 2018-12-11 TW TW107144446A patent/TWI782153B/en active
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| JP2000190155A (en) * | 1998-10-14 | 2000-07-11 | Disco Abrasive Syst Ltd | Hub blade |
| JP2002154054A (en) * | 2000-11-17 | 2002-05-28 | Disco Abrasive Syst Ltd | Attaching mechanism for cutting blade |
| CN101579894A (en) * | 2008-05-15 | 2009-11-18 | 株式会社迪思科 | Cutting device |
| JP2010253600A (en) * | 2009-04-23 | 2010-11-11 | Disco Abrasive Syst Ltd | Method for mounting cutting tool on tool mount and mounting jig used for the same |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2019104086A (en) | 2019-06-27 |
| KR102630500B1 (en) | 2024-01-26 |
| TWI782153B (en) | 2022-11-01 |
| JP7045178B2 (en) | 2022-03-31 |
| KR20190070856A (en) | 2019-06-21 |
| CN109909554A (en) | 2019-06-21 |
| TW201927459A (en) | 2019-07-16 |
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