CN109884097A - One kind can vert transmission mode electron backscatter diffraction experimental provision - Google Patents
One kind can vert transmission mode electron backscatter diffraction experimental provision Download PDFInfo
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- CN109884097A CN109884097A CN201910143821.3A CN201910143821A CN109884097A CN 109884097 A CN109884097 A CN 109884097A CN 201910143821 A CN201910143821 A CN 201910143821A CN 109884097 A CN109884097 A CN 109884097A
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 19
- 238000001887 electron backscatter diffraction Methods 0.000 title claims abstract description 18
- 239000000523 sample Substances 0.000 claims abstract description 83
- 230000001360 synchronised effect Effects 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims abstract description 3
- 238000010168 coupling process Methods 0.000 claims abstract description 3
- 238000005859 coupling reaction Methods 0.000 claims abstract description 3
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 2
- 238000004627 transmission electron microscopy Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
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- 241000018646 Pinus brutia Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
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Abstract
It can vert transmission mode electron backscatter diffraction experimental provision the invention discloses one kind, base including being fixed on scanning electron microscopic observation table top, fluting is offered on the base, the rear side base of fluting is equipped with fixed plate, it is fixed with servo motor in the fixed plate, is fixed with active synchronization belt wheel on the rotor of servo motor；The two sides of the fluting are equipped with trailing arm；It is equipped with axis hole on trailing arm, lever arm is equipped with by shaft on trailing arm；U-type groove is offered on the lever arm, is fixed with driven synchronous pulley in shaft and in lever arm U-type groove；Rotation angle detecting sensor is connected with by shaft coupling in the side of shaft；The front end face of the lever arm is fixed with wedge-shaped probe, is fixed with sample stage in the upper surface of probe, is fixed with the structures such as specimen holder in the two sides of sample stage；The device reduces probe and sample stage collision accident rate, saves experimental period cost, and scanning electron microscope equipment is made to be easier to be upgraded to transmission electron microscopy rank.
Description
Technical field
The present invention relates to scanning electron microscope observation experimental provision fields, are a kind of dresses of novel scanning electron microscope (SEM) experiment
It sets, specially one kind can vert transmission mode electron backscatter diffraction experimental provision.
Background technique
T-EBSD analytical technology in scanning electron microscope is mainly used in crystal structure orientation analysis, oxygen in big shape changing metal
Ultra-fine grain textile analysis, nanoparticles crystal between the analysis of the two dimensional crystal structure of compound film and metal oxide layer, metal
The research such as nanometer phase growth mechanism in structure and matrix.
It needs in experiment according to different thickness of sample, different demands acceleration voltage and different target region atomic mass
To adjust the angle between sample and probe in real time.There are mainly two types of existing adjustings, but has its limitation in experimental implementation.
First way, scanning electron microscope sample table can vert towards probe orientation, may be implemented to adjust by the sample table that verts.Its angle
Degree can be adjusted arbitrarily, seem convenient, but will distance between adjusting sample and detector at any time, because of sample and put in scanning electron microscope
In probe between distance in 10mm or so, transmission electron microscope sample is thin small in addition, during the experiment, easily occur probe and sample
Sample platform collision accident causes huge loss.
Another mode, if scanning electron microscope sample table verts, direction cannot be such that angle between probe and sample changes
Become, can a series of additional preprepared sample tables for having certain angle, further according to different samples, trial exchanges different angles for
Sample table.But prepare the process of experimental bench in advance, it needs largely to attempt, experimental amount is big, and time cost is high, performance difficulty.
Even if observing a kind of sample of material, the transmission electron microscope sample thickness produced every time is inevitable different, and differing may be larger, and real
The sample for repeatedly observing various material is generally required in the experiment on border, with the sample table of fixed angle, necessarily to test result and
Effect is influenced.Therefore, there is an urgent need to a kind of new devices, to solve the above problems.
Summary of the invention
The purpose of the present invention is to provide a kind of for new t-EBSD technological development, reduces probe and sample stage collides thing
Therefore rate, saving experimental period cost, it allows t-EBSD technology to be commercialized as early as possible, scanning electron microscope equipment is made to be easier to be upgraded to transmission electricity
Mirror skill level liberates transmission electron microscope experimental pressure, is allowed to more preferably more intently capture sub-nanometer and micromicron grade problem in science.
One kind can vert transmission mode electron backscatter diffraction experimental provision, which is characterized in that including being fixed on scanning electricity
The base of sem observation table top, offers fluting on the base, and the rear side base of fluting is equipped with fixed plate, in the fixed plate
It is fixed with servo motor, is fixed with active synchronization belt wheel on the rotor of servo motor；The two sides of the fluting are equipped with trailing arm；?
Trailing arm is equipped with axis hole, is equipped with lever arm by shaft on trailing arm；U-type groove is offered on the lever arm, in shaft
And it is located in lever arm U-type groove and is fixed with driven synchronous pulley；Roll angle inspection is connected with by shaft coupling in the side of shaft to pass
Sensor；The front end face of the lever arm is fixed with wedge-shaped probe, sample stage is fixed in the upper surface of probe, the two of sample stage
Side is fixed with specimen holder；The active synchronization belt wheel passes through synchronous band connection with driven synchronous pulley.
Preferably, the shaft is ladder shaft.
Preferably, the probe is removably fixedly connected with lever arm by pin shaft, and probe is set with lever arm interface
For convex surface, it is equipped with pin hole, the lever arm and probe in protrusion and is set as concave surface to connecting, pin hole, and two are equipped on probe
The position consistency of person's pin hole, probe assigns into the concave surface of lever arm, and is fixed by pin shaft.
Preferably, with the perpendicular plane of SEM electron beam for 0 ° of face, the electron beam of any SEM and probe plane can be made to press from both sides
Angle is in -30 ° to 150 ° or -15 ° to 165 ° or -5 ° to 175 ° or 0 ° to 180 ° in any one angular range.
Preferably, the shaft is fixed by bearing and trailing arm, and bearing is ball bearing.
Preferably, the lever arm and shaft are installed by way of keyway cooperates.
Preferably, the active synchronization belt wheel and servo motor are installed by way of keyway cooperates.
Preferably, one layer of rubber pad is equipped between the servo motor and fixed plate.
The beneficial effects of the present invention are EBSD can easily occur to avoid present scanning electron microscope sample table and probe completely
The generation of probe and sample stage collision accident, and the problem of test result and effect can be influenced in another mode；Together
When, any SEM can be suitable for, so that TEM sample obtains X rays topographs and Kikuchi lines information under transmission electron beam.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is configuration schematic diagram of the invention.
Fig. 3 is that probe of the invention docks schematic diagram with lever arm.
Fig. 4 is lever arm structural schematic diagram of the invention.
In figure, base 1, slot 1-1, fixed plate 2, servo motor 3, active synchronization belt wheel 4, trailing arm 5, axis hole 5-1, activity
Arm 6, U-type groove 6-1, driven synchronous pulley 7, rotation angle detecting sensor 8, probe 9, sample stage 10, specimen holder 11, synchronous belt 12,
Shaft 13.
Specific embodiment
As shown, the present invention, which devises one kind, can vert transmission mode electron backscatter diffraction experimental provision, it is main to wrap
The base 1 for being fixed on scanning electron microscopic observation table top is included, fluting 1-1 is offered on the base 1, on the rear side base 1 for the 1-1 that slots
It is welded with fixed plate 2, is fixed with servo motor 3 by four bolts in the fixed plate 2, four bolts can guarantee servo electricity
Machine 3 is stably fixed on base 1, it is contemplated that servo motor 3 may generate vibration at work, and bolt gradually generates pine
It is dynamic, therefore one layer of rubber pad is also set up between servo motor 3 and fixed plate 2, such bolt is not easy to generate during the work time
It loosens, experimental facilities is damaged, and be fixed with synchronous belt 12 on the rotor of servo motor 3；Fluting 1-1 of the invention
Two sides are equipped with trailing arm 5；Axis hole 5-1 is equipped on trailing arm 5, being equipped with internal diameter in an interference fit in axis hole 5-1 is 4mm
Ball bearing；Lever arm 6 is fixedly installed with by ladder shaft 13 (in bearing hole) in the axis hole 5-1 on trailing arm 5, in order to
Shaft 13 and lever arm 6 can be allowed to realize to rotate synchronously, be machined with slot respectively on the mounting surface of shaft 13 and lever arm 6,
Key is installed in slot, the two is installed together by way of keyway cooperates, be so convenient for changing components, damage or
Parts thereof is only needed to change after person's accuracy decline, reduces laboratory cost, two can will facilitate the angle of calibration activities arm 6
Degree, to maintain and safeguarding that the present apparatus provides convenience；The present invention will on lever arm 6 process U-type groove 6-1 structure, in shaft 13 and
It is fixed with driven synchronous pulley 7 in the form of interference fit in lever arm 6U type groove 6-1, passes through connection in the side of shaft 13
Axis device is connected with rotation angle detecting sensor 8, and rotation angle detecting sensor 8 can accurately measure the angle of the rotation of lever arm 6；The work
The front end face of swing arm 6 is removably fixedly connected with lever arm 6 by pin shaft, and probe 9 is set as convex surface with 6 interface of lever arm,
Pin hole is equipped in protrusion, the lever arm 6 connects with 9 Duis of probe and is set as concave surface, and pin hole, and the two pin are equipped on probe 9
The position consistency in hole, probe 9 assigns into the concave surface of lever arm 6, and fixes with pin shaft, in this way, probe 9 and the formation of lever arm 6
One entirety, the angle that lever arm 6 rotates are 9 angles rotated of popping one's head in, according to the different thickness of sample of experiment demand, difference
Demand acceleration voltage and different target region atomic mass to adjust the angle between sample and probe 9 in real time, can either be quick
Accurate adjustment, and can guarantee that probe 9 and sample stage 10 will not collide, the collision of probe 9 and sample stage 10 can damage equipment
It is bad, huge loss；It is equipped with sample stage 10 in the upper side of probe 9, is fixed with sample on the probe 9 of the two sides of sample stage 10
Folder 11；The active synchronization belt wheel 4 is connect with driven synchronous pulley 7 by synchronous belt 12, and accurate along with servo motor 3 turns
Momentum, so that 9 rotation angle accuracies of probe are very high.
The present invention 9 angle of regulation range of probe are more and wide, with the perpendicular plane of SEM electron beam for 0 ° of face, can make any
The electron beam of SEM and 9 plane included angles of probe are any in -30 ° to 150 ° or -15 ° to 165 ° or -5 ° to 175 ° or 0 ° to 180 °
In one angular range, maximum guarantee is provided for the test result and effect of experiment.
In using the present invention, when experimentation needs to adjust the angle of sample stage 10, it is only necessary to control servo motor 3
Amount of spin can be adjusted accurately, since sample stage 10 is placed directly on probe 9, in adjustment sample angle, will not be sent out completely
Raw sample stage 10 crashes with probe 9, and ultrahigh in efficiency will not influence test simultaneously because angle can change
And effect as a result.
Claims (8)
- The transmission mode electron backscatter diffraction experimental provision 1. one kind can vert, which is characterized in that including being fixed on scanning electron microscope The base of table top is observed, fluting is offered on the base, the rear side base of fluting is equipped with fixed plate, consolidates in the fixed plate Surely there is servo motor, be fixed with active synchronization belt wheel on the rotor of servo motor；The two sides of the fluting are equipped with trailing arm；It is holding in the palm Arm is equipped with axis hole, is equipped with lever arm by shaft on trailing arm；Offer U-type groove on the lever arm, in shaft and Driven synchronous pulley is fixed in lever arm U-type groove；Roll angle inspection sensing is connected with by shaft coupling in the side of shaft Device；The front end face of the lever arm is fixed with wedge-shaped probe, sample stage is fixed in the upper surface of probe, in the two sides of sample stage It is fixed with specimen holder；The active synchronization belt wheel passes through synchronous band connection with driven synchronous pulley.
- 2. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: described Shaft is ladder shaft.
- 3. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: described Probe is removably fixedly connected with lever arm by pin shaft, and probe is set as convex surface with lever arm interface, is equipped in protrusion Pin hole, the lever arm and probe are set as concave surface to connecting, and pin hole, and the position consistency of the two pin hole are equipped on probe, is visited Head assigns into the concave surface of lever arm, and is fixed by pin shaft.
- 4. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: with The perpendicular plane of SEM electron beam be 0 ° of face, can make any SEM electron beam and probe plane angle at -30 ° to 150 ° or - In 15 ° to 165 ° or -5 ° to 175 ° or 0 ° to 180 ° in any one angular range.
- 5. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: described Shaft is fixed by bearing and trailing arm, and bearing is ball bearing.
- 6. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: described Lever arm and shaft are installed by way of keyway cooperates.
- 7. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: described Active synchronization belt wheel and servo motor are installed by way of keyway cooperates.
- 8. the transmission mode electron backscatter diffraction experimental provision according to claim 1 that verts, it is characterised in that: described One layer of rubber pad is equipped between servo motor and fixed plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910143821.3A CN109884097A (en) | 2019-02-27 | 2019-02-27 | One kind can vert transmission mode electron backscatter diffraction experimental provision |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910143821.3A CN109884097A (en) | 2019-02-27 | 2019-02-27 | One kind can vert transmission mode electron backscatter diffraction experimental provision |
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| Publication Number | Publication Date |
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| CN109884097A true CN109884097A (en) | 2019-06-14 |
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| CN201910143821.3A Pending CN109884097A (en) | 2019-02-27 | 2019-02-27 | One kind can vert transmission mode electron backscatter diffraction experimental provision |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203345245U (en) * | 2013-06-20 | 2013-12-18 | 四川长虹电器股份有限公司 | Rotating positioning mechanism |
| EP2824448A1 (en) * | 2013-07-08 | 2015-01-14 | Bruker Nano GmbH | Sample holder for electron backscatter diffraction |
| CN106165055A (en) * | 2014-02-11 | 2016-11-23 | 牛津仪器纳米技术工具有限公司 | The method that sample is carried out electron diffraction pattern analysis |
| CN106935464A (en) * | 2017-02-17 | 2017-07-07 | 西北工业大学 | Instrument and diffraction image imaging method for transmitted electron back scattering diffraction |
| CN107053248A (en) * | 2017-04-27 | 2017-08-18 | 浙江长兴平适尔机器人科技有限公司 | Double bracket six-joint robots |
| CN206892007U (en) * | 2017-05-11 | 2018-01-16 | 广东省肇庆市质量计量监督检测所 | A kind of scanning electron microscope electron back scattering diffraction test sample platform |
| CN207281180U (en) * | 2017-09-15 | 2018-04-27 | 成都睿腾万通科技有限公司 | Scanning support elevation mount based on Antenna testing system |
| CN207705979U (en) * | 2017-10-16 | 2018-08-07 | 抚顺市盛业石化煅造厂 | A kind of transmission device of multi-direction adjustment gear angle |
| CN208262148U (en) * | 2018-05-22 | 2018-12-21 | 天津嘉胤机械科技有限公司 | A kind of novel pipe fitting welding manipulator with auto-steering function |
| CN209673682U (en) * | 2019-02-27 | 2019-11-22 | 内蒙古科技大学 | One kind can vert transmission mode electron backscatter diffraction experimental provision |
-
2019
- 2019-02-27 CN CN201910143821.3A patent/CN109884097A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203345245U (en) * | 2013-06-20 | 2013-12-18 | 四川长虹电器股份有限公司 | Rotating positioning mechanism |
| EP2824448A1 (en) * | 2013-07-08 | 2015-01-14 | Bruker Nano GmbH | Sample holder for electron backscatter diffraction |
| CN106165055A (en) * | 2014-02-11 | 2016-11-23 | 牛津仪器纳米技术工具有限公司 | The method that sample is carried out electron diffraction pattern analysis |
| CN106935464A (en) * | 2017-02-17 | 2017-07-07 | 西北工业大学 | Instrument and diffraction image imaging method for transmitted electron back scattering diffraction |
| CN107053248A (en) * | 2017-04-27 | 2017-08-18 | 浙江长兴平适尔机器人科技有限公司 | Double bracket six-joint robots |
| CN206892007U (en) * | 2017-05-11 | 2018-01-16 | 广东省肇庆市质量计量监督检测所 | A kind of scanning electron microscope electron back scattering diffraction test sample platform |
| CN207281180U (en) * | 2017-09-15 | 2018-04-27 | 成都睿腾万通科技有限公司 | Scanning support elevation mount based on Antenna testing system |
| CN207705979U (en) * | 2017-10-16 | 2018-08-07 | 抚顺市盛业石化煅造厂 | A kind of transmission device of multi-direction adjustment gear angle |
| CN208262148U (en) * | 2018-05-22 | 2018-12-21 | 天津嘉胤机械科技有限公司 | A kind of novel pipe fitting welding manipulator with auto-steering function |
| CN209673682U (en) * | 2019-02-27 | 2019-11-22 | 内蒙古科技大学 | One kind can vert transmission mode electron backscatter diffraction experimental provision |
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