CN109884034A - A kind of method and device of femtosecond plasma grating induced breakdown spectroscopy detection - Google Patents
A kind of method and device of femtosecond plasma grating induced breakdown spectroscopy detection Download PDFInfo
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- CN109884034A CN109884034A CN201910097636.5A CN201910097636A CN109884034A CN 109884034 A CN109884034 A CN 109884034A CN 201910097636 A CN201910097636 A CN 201910097636A CN 109884034 A CN109884034 A CN 109884034A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Abstract
The present invention relates to Element detection technical fields, more particularly to a kind of method and device of femtosecond plasma grating induced breakdown spectroscopy detection, the femtosecond pulse of transmitting is successively passed through into beam splitting, Domain Synchronous and focuses the plasma grating for forming space periodic later and modulating, sample to be tested is detected using the plasma grating induced breakdown spectroscopy.Method of the invention combines the plasma grating in ultra-fast optical with laser induced breakdown spectroscopy (LIBS), both the unrivaled advantages such as real-time, quick, the micro- damage of LIBS technology, full elemental analysis had been remained, again in the limitation for overcoming single Shu Feimiao chevilled silk to a certain degree and clamping down on power, improve free electron density, so as to improve elemental signals intensity, detection sensitivity is improved.
Description
Technical field
The present invention relates to Element detection technical fields, and in particular to a kind of femtosecond plasma grating induced breakdown spectroscopy inspection
The method and device of survey.
Background technique
In recent years, the demand to the detection of common sample element is increasing, such as to a huge sum of money in water body and soil
Belong to the detection of element to monitor and administer the pollution of heavy metal, the detection of various elements in the organic matters such as vegetables, tealeaves is commented
Estimate its influence quality to intake human body.
Traditional species analysis detection is carried out after generalling use sampling by the processing of laboratory chemical reagent and spectral instrument
The method of analysis.Although these method accuracy in detection are high, traditional method detection cycle is longer, not can be carried out quickly i.e.
When detect, and in detection process chemical reagent processing be easy to produce secondary pollution.Recently, occur in conjunction with newest research results
A series of new detection technique method such as hyperspectral analysis technology, electrochemical methods, bioanalysis, Terahertz analytic approach
Deng still remaining that pretreatment is complicated, cannot obtain a result real-time, quickly, be easy to cause secondary pollution problems.It can be simple
It pre-processes and quickly analysis heavy metal content in soil is highly important in real time.
Laser induced breakdown spectroscopy (Laser-Induced Breakdown Spectroscopy, LIBS) is new in recent years
Emerging spectrum detection technique, compared with other spectral techniques, because of its damage simple with sample pretreatment, real-time, quick, micro-, entirely
The unrivaled advantage such as elemental analysis, has obtained extensive concern, be also widely used for metallurgical analysis, environmental monitoring,
The fields such as matter exploration, on-line monitoring, national defence.This method for sample monitoring only need to sample carry out simple process even without
Processing can carry out laser induced breakdown spectroscopy analysis, but there is a problem that detection sensitivity is not high.
Traditional laser induced breakdown spectroscopy system is made using single beam ps pulsed laser and ns pulsed laser or femtosecond pulse
Carry out excited species for source.The plasma that ps pulsed laser and ns pulsed laser excitation generates develops, and initial stage, there are very strong inverse bremstrahlens to cause
Fluorescence spectrum has very strong continuous background noise, can cover echo signal spectrum；Delay acquisition signal can solve strongly continuous
The influence of spectrum, it can also cause echo signal spectral reduction, reduces final detectivity；Femtosecond pulse excites nothing
Very strong background spectrum, but Ke Er self-focusing effect and Plasma defocusing effect is flat in pulse laser drawing process
Weighing apparatus, power can be clamped down in the presence of certain by forming chevilled silk, and excitation free electron density can not be effectively improved by focusing on sample surfaces, be led
The number of writing spectral intensity can not be improved effectively with laser intensity and be improved, to limit the raising of detectivity.How to avoid
How strong background spectrum not victim signal spectral intensity again simultaneously, effectively improve the free electron density at laser focusing, thus
Improving Element detection sensitivity is key point.
Summary of the invention
In order to overcome shortcoming and defect existing in the prior art, the purpose of the present invention is to provide a kind of femtosecond plasmas
The method of body grating induced breakdown spectroscopy detection, by the plasma grating and laser induced breakdown spectroscopy in ultra-fast optical
(LIBS) it combines, has not only remained the unrivaled advantages such as real-time, quick, the micro- damage of LIBS technology, full elemental analysis, but also one
Determine degree and overcome the limitation that single Shu Feimiao chevilled silk clamps down on power, free electron density is improved, so as to improve elemental signals
Intensity improves detection sensitivity.
Another object of the present invention is to provide a kind of device of the detection of femtosecond plasma grating induced breakdown spectroscopy excessively,
Femtosecond pulse is converted into plasma grating, acts on sample to be tested, induces stronger plasma fluorescence, to improve inspection
Survey sensitivity.
The purpose of the invention is achieved by the following technical solution: a kind of femtosecond plasma grating induced breakdown spectroscopy detection
Method, by the femtosecond pulse of transmitting successively pass through beam splitting, Domain Synchronous and focus after formed space periodic modulation
Plasma grating detects sample to be tested using the plasma grating induced breakdown spectroscopy.
Preferably, comprising the following steps: (1) laser emitting module issues femtosecond pulse and obtains by the beam splitting of beam splitting module
To beam splitting pulse laser；
(2) the beam splitting pulse laser that the step (1) obtains forms multi beam lock-out pulse after Domain Synchronous module and swashs
Light；
(3) the multi beam lock-out pulse laser that the step (2) obtains forms the synchronous chevilled silk of multi beam after focus module, more
Plasma grating of the synchronous chevilled silk of beam in space crossed formation space periodic modulation；
(4) the plasma grating that the step (3) obtains acts on sample to be tested, formed plasma fluorescence spectrum by
Spectral collection module is acquired and is detected.In method of the invention, the femtosecond pulse of laser emitting module transmitting successively passes through
Beam splitting, Domain Synchronous form the synchronous chevilled silk of multi beam after focusing, the synchronous chevilled silk of multi beam is modulated in space crossed formation space periodic
Plasma grating, this plasma grating is acted on into sample to be tested surface, generates some originals containing substance to be detected
The plasma fluorescence of son, ion or electronics, is acquired and is detected by spectral collection module, and spectral signal is enhanced, thus
Improve detection sensitivity.Femto-second laser pulse peak power breaks through conventional femtosecond chevilled silk peak power and clamps down in plasma grating
Limitation, generate the femto-second laser pulse of the peak power density of space periodic modulation, act on sample to be tested, obtain than normal
The peak power density for advising at least high magnitude of femtosecond chevilled silk, acts on sample to be tested surface, induces stronger plasma
Fluorescence.Method of the invention can overcome the adverse effect of matrix effect plasma spectrum, can be real without standard sample
Existing ion concentration calibration to be measured.In addition, the influence of the fluorescence background of femtosecond plasma grating small (feature of femtosecond light, pulsewidth
It is smaller), the signal-to-noise ratio of femtosecond plasma grating induced breakdown spectroscopy is high.
Through Domain Synchronous chevilled silk synchronous with the multi beam after focusing in space crossed interaction, space periodic modulation is formed
Plasma grating, this is the prior art, is repeated no more again.
Preferably, in the step (1), the quantity of the beam splitting pulse laser through generating after beam splitting is at least two beams.
The plasma grating includes the synchronous chevilled silk of at least two beams, and multiple plasma gratings form plasma grating
Cascade.Beam splitting module can carry out multiple beam splitting to be multiple.Specifically, the femtosecond pulse that laser emitting module emits in the present invention
Laser at least obtains two beam beam splitting pulse lasers through a beam splitting, and two beam beam splitting pulse lasers are by Domain Synchronous and after focusing
Form the synchronous chevilled silk of two beams, plasma grating of the synchronous chevilled silk of two beams in space crossed formation space periodic modulation；Wherein, two
Can also multi beam beam splitting pulse laser can be obtained by multiple beam splitting respectively again in beam beam splitting pulse laser, after line focus module
The synchronous chevilled silk of multi beam is formed, the plasma grating that the synchronous chevilled silk of multi beam is modulated in the space crossed multiple space periodics of formation is more
A plasma grating forms plasma grating and joins grade.
Preferably, in the step (4), plasma grating and sample to be tested contact position are provided with atmosphere.
Auxiliary gas generates highdensity electronics through multiphoton ionization, induction in plasma grating of the present invention, adjusts
Type, flow velocity, the density of gas are assisted, the ionization of regulation gas molecule is to regulate and control the electron density in plasma grating.It is auxiliary
The electronics for helping gas multiphoton ionization to generate, which is driven in plasma grating by high power density femtosecond pulse, to be accelerated, quilt
The electronics of acceleration further induces avalanche type to ionize with the gas molecule collision in plasma grating, improves electron density.Deng
The femtosecond laser of ion body grating and the electronic action wherein accelerated by femtosecond laser intensify sample to be tested in sample to be tested,
Plasma breakdown spectral is obtained, spectral signal is enhanced, to improve detection sensitivity.Peak in plasma grating
It is worth the electronic action of power laser and its acceleration in sample to be tested surface, inducible breakdown conventional laser ablation is difficult to motivate super
Hard material, overstable oxide, ceramic material, etc..
Preferably, the gas is argon gas or/and neon.Select argon gas or neon as atmosphere, it can be greatly
Enhance the spectral signal of sample to be tested, air is as atmosphere, then spectral signal does not have reinforcing effect.
Preferably, the flow velocity of the gas is 2-10L/min.When the flow velocity of gas being selected to be 2-10L/min, sample to be tested
Spectral signal it is stronger, gas flow rate it is too small or too greatly will lead to sample to be tested spectral signal decrease.
Preferably, the sample to be tested is one or more of solid, liquid or gas.
The space periodic modulating action of plasma grating of the invention realizes plasma in liquid surface, in liquid surface
The ablation of the periodic modulation of body grating, in the direct induced breakdown spectroscopy detection of liquid level.
High-peak power laser and its electronic action of acceleration be in sample to be tested surface in plasma grating of the invention,
Can induce superhard material, overstable oxide, ceramic material that breakdown conventional laser ablation is difficult to motivate, etc..
Detection method of the invention is not limited by sample by plasma grating induced breakdown by sample state, especially originally
The advantages of invention also reside in can detecte ionization potential height be difficult to realize ion, inert gas, heavy metal that laser directly intensifies from
Son, molecular ion etc. obtain the characteristic spectrum of emission of ions, detection range broad covered area.
Another object of the present invention is achieved through the following technical solutions: a kind of femtosecond plasma grating induced breakdown spectroscopy
The device of detection, the transmission path along laser successively include laser emitting module, beam splitting module, Domain Synchronous module, focus
Module, loading module and spectral collection module.
The femtosecond pulse of laser emitting module transmitting successively forms space week after beam splitting, Domain Synchronous and focusing
The plasma grating of phase modulation, acts on the sample to be tested at loading module, plasma for obtained plasma grating
The surface of grating induced breakdown sample to be tested produces the plasma of some atoms containing test substance, ion or electronics
Fluorescence, spectral collection module collection and to these fluorescence spectrums obtain testing result.
Preferably, the laser emitting module is pulse laser emission module, and light impulse length is femtosecond magnitude；Described point
Beam module is beam splitting chip；The focus module is the focusing system that monolithic or multi-disc condenser lens are constituted；The spectral collection
Module is made of fluorescence gathering system and spectrometer, and the fluorescence gathering system is single condenser lens or 4f system；It is described
Spectrometer is high resolution spectrometer.
In the present invention, the femtosecond pulse energy of laser emitting module transmitting is set according to actual needs, general to fly
The energy of pulse per second (PPS) laser is 0.3-1.2mJ, Jing Yici beam splitting, Domain Synchronous and the synchronous chevilled silk of two beams that is formed after focusing
Energy 0.8-2mJ, when practical operation, the energy of chevilled silk can reach 7-8mJ.Beam splitting module is beam splitting chip or other beam splitting
Optical element, the Domain Synchronous module by adjusting several Shu Guang light path it is identical realize time domain on pulse synchronization, it is described
Focus module be focusing system that monolithic or multi-disc condenser lens are constituted, for light pulse to be formed chevilled silk, beam splitting module,
Domain Synchronous module and focus module form suitable optical beam splitting focusing system, such as the combination of pyramid water chestnut mirror and lens,
Or beam splitting chip, stepper motor and combination of lens etc., to reach two beams or the synchronous chevilled silk phase mutual coupling at an angle of multi beam
It closes, forms the plasma grating of modulation density cycle.The loading module be article carrying platform, can control thereon to test sample
Product are mobile with desired trajectory, and guarantee persistently excites brand-new sample surfaces.The spectral collection module is by fluorescence gathering system
It is formed with spectrometer, fluorescence gathering system can be single condenser lens or 4f system；Spectrometer is high-resolution spectroscopy
Instrument.
Preferably, auxiliary gas module is provided between the loading module and the focus module.The auxiliary gas
Module can excite sample to be tested to provide assist gas environment, the type of adjustable auxiliary gas for plasma light grid
The parameters such as (such as argon gas, neon), flow velocity, density.
The beneficial effects of the present invention are: femtosecond pulse of the invention is formed after beam splitting, Domain Synchronous, focusing
The synchronous chevilled silk of multi beam intersect interaction, form the plasma optical grating construction of space periodic modulation, obtain than conventional femtosecond
The peak power density of at least high magnitude of chevilled silk, the plasma grating of formation act on sample to be tested, intensify to test sample
Product induce stronger plasma fluorescence, obtain plasma and puncture fluorescent transition spectrum, to realize the inspection of element in sample
It surveys.
The present invention solves the problems, such as that the traditional nanosecond LIBS system detection plasma initial stage background signal that develops is high, wait from
Femto-second laser pulse peak power breaks through the limitation that conventional femtosecond chevilled silk peak power is clamped down in daughter grating, generates space periodic
The femto-second laser pulse of the peak power density of modulation acts on sample to be tested, obtains at least higher by one than conventional femtosecond chevilled silk
The peak power density of a magnitude acts on sample to be tested surface, induces stronger plasma fluorescence, and spectral signal is able to
Enhancing, to improve detection sensitivity.
The plasma grating of space periodic modulated structure is acted on sample to be tested by method of the invention, and matrix is overcome to imitate
Ion concentration calibration to be measured can be realized without standard sample in the adverse effect for coping with plasma spectrometry.Sample to be tested can be with
It is solid, liquid, gas, sample to be tested can detecte ionization potential height and be difficult to realize laser by plasma grating induced breakdown
Ion, inert gas, heavy metal ion, molecular ion for directly intensifying etc. obtain the characteristic spectrum of emission of ions.
Method of the invention combines the plasma grating in ultra-fast optical with laser induced breakdown spectroscopy (LIBS),
Not only the unrivaled advantages such as real-time, quick, the micro- damage of LIBS technology, full elemental analysis had been remained, but also had been overcome to a certain degree
Single Shu Feimiao chevilled silk clamps down on the limitation of power, improves free electron density, so as to improve elemental signals intensity, improves inspection
Survey sensitivity.
It is identical that the femtosecond pulse of the transmitting of the device of the invention laser emitting module through beam splitting module is divided into energy ratio
Multi beam beam splitting pulse laser, the synchronous chevilled silk of multi beam is focused by focus module again after Domain Synchronous module, adjusts multi beam
Synchronous chevilled silk in space intersection, the synchronous chevilled silk of two beams is adjusted by adjusting Domain Synchronous module and interferes to form plasma two-by-two
Grating, plasma grating are applied to the sample to be tested surface being placed in loading module, and sample to be tested surface is excited generation
Plasma transition fluorescence acquired through spectral collection module, realize the analysis to the component element of tested sample.
Detailed description of the invention
The schematic diagram of the position Fig. 1 femtosecond plasma grating induced breakdown spectroscopy；
Fig. 2 is that gas assists femtosecond plasma grating induced breakdown spectroscopy structure of the detecting device schematic diagram；
Fig. 3 is pedotheque testing result of the present invention under argon gas auxiliary；
Fig. 4 is pedotheque testing result of the present invention under neon auxiliary.
Appended drawing reference are as follows: 1, laser emitting module；2, beam splitting module；3, Domain Synchronous module；4, focus module；5, loading
Module；6, gas module is assisted；7, spectral collection module；8, sample to be tested.
Specific embodiment
It is further below with reference to examples and drawings 1~make to the present invention for the ease of the understanding of those skilled in the art
Explanation, the content that embodiment refers to not is limitation of the invention.
Embodiment 1
The femto-second laser pulse of single pulse energy 1.6mJ, repetition rate 1kHz are split through the beam splitting chip of 1:1, so
It adjusts afterwards and forms chevilled silk by same condenser lens after two pulses light path synchronizes, adjust space intersection and form plasma light
Grating is acted on pedotheque wafer surface by grid, and in the zone of action, blowing argon gas is tested, and air environment also carries out test work
For comparison；The light pulse of the same terms is interfered without beam splitting simultaneously, direct list Shu Chengsi acts on progress under air environment
Test is as a comparison.
Fig. 3 is the present invention for the testing result in above-mentioned several situations, identical femtosecond pulse as shown in the figure, beam splitting drawing
The test result that the signal intensity ratio single beam silk effect of challenge test is acted on after silk, synchronous interference is many by force, there is 8 times or so increasings
By force；Test result under the signal intensity ratio air environment of zone of action blowing argon gas test is improved, and has 2-3 times of enhancing.
Embodiment 2
The femto-second laser pulse of single pulse energy 2.3mJ, repetition rate 1kHz are split through the beam splitting chip of 1:1, so
It adjusts afterwards and forms chevilled silk by same condenser lens after two pulses light path synchronizes, adjust space intersection and form plasma light
Grating is acted on pedotheque wafer surface, blows neon in the zone of action and tested by grid, and air environment also carries out test work
For comparison；The light pulse of the same terms is interfered without beam splitting simultaneously, direct list Shu Chengsi acts on progress under air environment
Test is as a comparison.
Fig. 4 is the present invention for the testing result in above-mentioned several situations, identical femtosecond pulse as shown in the figure, beam splitting drawing
The test result that the signal intensity ratio single beam silk effect of challenge test is acted on after silk, synchronous interference is many by force, there is 7 times or so increasings
By force；Test result under the signal intensity ratio air environment of zone of action blowing argon gas test is improved, and has 2 times of enhancing.
Embodiment 3
As described in Figure 2, a kind of femtosecond plasma grating induced breakdown spectroscopy structure of the detecting device includes Laser emission mould
Block 1, beam splitting module 2, Domain Synchronous module 3, focus module 4, loading module 5, auxiliary gas module 6, spectral collection module 7,
The emergent light of laser emitting module 1 is divided into the two beam laser that energy ratio is 1:1 through beam splitting module 2, again by light path synchronization module 3
Silk is focused by focus module 4, two beam laser chevilled silks is adjusted in space intersection, adjusts two by adjusting light path synchronization module 3
Interference forms plasma grating after Shu Jiguang light path is identical, plasma grating be applied to be placed in loading module 5 to
8 surface of sample provides different types of gaseous environment, 8 surface quilt of sample to be tested to the zone of action by auxiliary gas module 6
It excites the plasma transition fluorescence generated to acquire through spectral collection module 7, realizes point to the component element of tested sample
Analysis.
Above-described embodiment is the preferable implementation of the present invention, and in addition to this, the present invention can be realized with other way,
Do not depart under the premise of present inventive concept it is any obviously replace it is within the scope of the present invention.
Claims (10)
1. a kind of method of femtosecond plasma grating induced breakdown spectroscopy detection, it is characterised in that: by the femtosecond pulse of transmitting
Laser successively passes through beam splitting, Domain Synchronous and forms the plasma grating that space periodic is modulated after focusing, using described etc.
Ion body grating induced breakdown spectroscopy detects sample to be tested.
2. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 1, which is characterized in that packet
Include following steps: (1) laser emitting module issues femtosecond pulse and obtains beam splitting pulse laser by the beam splitting of beam splitting module；
(2) the beam splitting pulse laser that the step (1) obtains forms multi beam lock-out pulse laser after Domain Synchronous module；
(3) the multi beam lock-out pulse laser that the step (2) obtains forms the synchronous chevilled silk of multi beam after focus module, and multi beam is same
Chevilled silk is walked in the plasma grating of space crossed formation space periodic modulation；
(4) the plasma grating that the step (3) obtains acts on sample to be tested, forms plasma fluorescence spectrum by spectrum
Collection module is acquired and is detected.
3. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 2, it is characterised in that: institute
It states in step (1), the quantity of the beam splitting pulse laser through generating after beam splitting is at least two beams.
4. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 1 or 2, feature exist
In: in the step (4), plasma grating and sample to be tested contact position are provided with atmosphere.
5. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 4, it is characterised in that: institute
Stating gas is argon gas or/and neon.
6. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 4, it is characterised in that: institute
The flow velocity for stating gas is 2-10L/min.
7. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 1 or 2, feature exist
In: the sample to be tested is one or more of solid, liquid or gas.
8. a kind of device of femtosecond plasma grating induced breakdown spectroscopy detection, it is characterised in that: along the transmitting road of laser
Diameter successively includes laser emitting module, beam splitting module, Domain Synchronous module, focus module, loading module and spectral collection mould.
9. the device of femtosecond plasma grating induced breakdown spectroscopy detection according to claim 8, it is characterised in that: institute
Stating laser emitting module is pulse laser emission module, and light impulse length is femtosecond magnitude；The beam splitting module is beam splitting chip；Institute
Stating focus module is the focusing system that monolithic or multi-disc condenser lens are constituted；The spectral collection module is by fluorescence gathering system
It is formed with spectrometer, the fluorescence gathering system is single condenser lens or 4f system；The spectrometer is high-resolution light
Spectrometer.
10. the method for femtosecond plasma grating induced breakdown spectroscopy detection according to claim 9, it is characterised in that:
Auxiliary gas module is provided between the loading module and the focus module.
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| CN112798574A (en) * | 2020-12-19 | 2021-05-14 | 北京工业大学 | System for remotely detecting atmospheric components in real time by ultrafast laser filamentation |
| CN113687460A (en) * | 2021-07-29 | 2021-11-23 | 中国工程物理研究院激光聚变研究中心 | Method for generating acoustic plasma grating with rapidly-extended boundary |
| CN113960015A (en) * | 2021-09-30 | 2022-01-21 | 华东师范大学重庆研究院 | Multi-pulse induced spectroscopy method and device based on femtosecond plasma grating |
| CN114047174A (en) * | 2021-09-29 | 2022-02-15 | 云南华谱量子材料有限公司 | Two-dimensional plasma lattice grating enhanced laser-induced breakdown spectroscopy detection sensitivity device |
| CN115181942A (en) * | 2022-07-19 | 2022-10-14 | 重庆华谱科学仪器有限公司 | Plasma grating pulse laser deposition coating method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112798574A (en) * | 2020-12-19 | 2021-05-14 | 北京工业大学 | System for remotely detecting atmospheric components in real time by ultrafast laser filamentation |
| CN113687460A (en) * | 2021-07-29 | 2021-11-23 | 中国工程物理研究院激光聚变研究中心 | Method for generating acoustic plasma grating with rapidly-extended boundary |
| CN113687460B (en) * | 2021-07-29 | 2023-06-06 | 中国工程物理研究院激光聚变研究中心 | Acoustic wave plasma grating generation method with fast boundary extension |
| CN114047174A (en) * | 2021-09-29 | 2022-02-15 | 云南华谱量子材料有限公司 | Two-dimensional plasma lattice grating enhanced laser-induced breakdown spectroscopy detection sensitivity device |
| CN113960015A (en) * | 2021-09-30 | 2022-01-21 | 华东师范大学重庆研究院 | Multi-pulse induced spectroscopy method and device based on femtosecond plasma grating |
| CN115181942A (en) * | 2022-07-19 | 2022-10-14 | 重庆华谱科学仪器有限公司 | Plasma grating pulse laser deposition coating method |
| CN115181942B (en) * | 2022-07-19 | 2024-04-02 | 重庆华谱科学仪器有限公司 | Plasma grating pulse laser deposition coating method |
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| CN109884034B (en) | 2021-07-13 |
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