CN109830554A - Thin-film solar cells scoring device and rose method - Google Patents
Thin-film solar cells scoring device and rose method Download PDFInfo
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- CN109830554A CN109830554A CN201811572725.2A CN201811572725A CN109830554A CN 109830554 A CN109830554 A CN 109830554A CN 201811572725 A CN201811572725 A CN 201811572725A CN 109830554 A CN109830554 A CN 109830554A
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- 239000010409 thin film Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 23
- 241000220317 Rosa Species 0.000 title claims abstract description 15
- 230000007246 mechanism Effects 0.000 claims abstract description 57
- 230000031700 light absorption Effects 0.000 claims description 32
- 238000006748 scratching Methods 0.000 claims description 23
- 230000002393 scratching effect Effects 0.000 claims description 23
- 238000005520 cutting process Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 4
- 230000008033 biological extinction Effects 0.000 claims description 2
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The present invention provides the scoring device and rose method of a kind of thin-film solar cells, the scoring device of thin-film solar cells includes at least one delineation mechanism, delineation mechanism includes at least two delineation groups being arranged successively along the length direction of layer to be delineated, and each delineation group includes at least one delineation unit；Layer to be delineated has a plurality of prescoring of the moving direction successively layout serial number along delineation group, and each described one prescoring of delineation cell tracks is delineated；In at least two delineation groups, first prescoring of the corresponding layer to be delineated of head end delineation unit of one of delineation group, a prescoring between the first prescoring and last prescoring of the corresponding layer to be delineated of head end delineation unit of other delineation groups；And the corresponding prescoring serial number of head end delineation unit of latter delineation group, prescoring serial number corresponding greater than the end of previous delineation group delineation unit.The present invention has the advantages that improve delineation efficiency.
Description
Technical field
The present invention relates to technical field of solar batteries, and in particular to a kind of scoring device of thin-film solar cells and quarter
The method of drawing.
Background technique
In order to control and improve the size of output voltage values, solar battery is commonly made to mould group, i.e., by multiple battery strings
Connection gets up.The segmentation on different function layer between sub- battery is realized by method of scoring.
There are many types of thin-film solar cells, and by taking copper indium gallium selenide (CIGS) thin-film solar cells as an example, CIGS is thin
Film solar cell generally comprises substrate, back electrode layer, light-absorption layer and top electrode layer, CIGS thin film solar battery from bottom to top
It needs to introduce in the production process and cross three times.Firstly, after having plated back electrode layer on substrate by laser or machinery in the way of
First time scribing line is carried out on back electrode layer surface, is evenly divided into cell elongated one by one, first time scribing line is denoted as
Pl；Later, continue after having plated light-absorption layer, by laser or machinery in the way of on the right side of Pl nearby and be parallel to Pl carry out second
Scribing line scratches light-absorption layer, and second of scribing line is denoted as P2；Finally, top electrode layer is plated, the top electrode layer of each neighboring community
Connected with back electrode layer, by laser or machinery in the way of on the right side of P2 nearby and be parallel to P2 carry out third time draw
Line scratches top electrode layer, and cuts off the top electrode layer of each neighboring community and the connection of back electrode layer, and third time scribing line is denoted as
P3.By tri- scribing line technique of Pl, P2 and P3, CIGS thin film solar battery is divided into multiple adjacent sub- batteries, and go here and there
It is linked togather and forms solar battery mould group.
In above-mentioned scratching process three times, in order to meet the performance requirement of solar battery, crosses, generally will each time
Up to a hundred even thousands of lines are drawn, are in the prior art usually to be drawn from one end of thin-film solar cells to the other end, scribing line effect
Rate is lower, and dividing precision also can be relatively low.
Summary of the invention
Therefore, the technical problem to be solved in the present invention is that overcoming thin-film solar cells delineation mode in the prior art
Cross efficiency compared with low defect, thus provide it is a kind of can be improved scribing line efficiency thin-film solar cells scoring device and delineation
Method.
One aspect of the present invention provides a kind of scoring device of thin-film solar cells, is used for thin-film solar cells successively
It is at least delineated three times, including at least one delineation mechanism, the delineation mechanism includes the length of at least two edge layers to be delineated
The delineation group that degree direction is arranged successively, each delineation group include at least one delineation unit；
Layer to be delineated has a plurality of prescoring of the moving direction successively layout serial number along delineation group, and each delineation is singly
Member one prescoring of tracking is delineated；
In at least two delineation groups, the head of the corresponding layer to be delineated of head end delineation unit of one of them delineation group
Prescoring, between the first prescoring and last prescoring of the corresponding layer to be delineated of head end delineation unit of other delineation groups
A prescoring；And the corresponding prescoring serial number of head end delineation unit of latter delineation group, greater than the end of previous delineation group
Delineate the corresponding prescoring serial number of unit.
Each delineation group includes multiple delineation units.
The delineation mechanism includes two delineation groups.
The scoring device of the thin-film solar cells include two delineation mechanisms, respectively laser grooving and scribing mechanism and
Mechanical scratching mechanism, the delineation unit in the laser grooving and scribing mechanism are laser beam, the delineation list in the mechanical scratching mechanism
Member is cutting stylus.
Another aspect of the present invention also provides a kind of rose method of thin-film solar cells, using above-mentioned thin film solar
The scoring device of battery crosses to thin-film solar cells, includes the following steps:
First time delineation is carried out to the back electrode layer being set on substrate；
Complete for the first time delineate after back electrode layer on light-absorption layer is set, and track corresponding prescoring to light-absorption layer into
Second of delineation of row；
Top electrode layer is set on the light-absorption layer after completing second to delineate, and tracks corresponding prescoring to top electrode layer
Third time delineation is carried out with light-absorption layer.
When carrying out second of delineation to light-absorption layer, the head end of each delineation group is made to delineate prescoring sequence corresponding to unit
Number, it is identical as prescoring serial number corresponding to the head end delineation unit of corresponding each delineation group in first time delineation.
When carrying out third time delineation to top electrode layer and light-absorption layer, delineate the head end of each delineation group corresponding to unit
Prescoring serial number, with prescoring serial number phase corresponding to the head end delineation unit of corresponding each delineation group in first time delineation
Together.
Three times in delineation, delineated at least once using mechanical scratching mechanism, and/or, laser incising is used at least once
Mechanism is drawn to be delineated.
First time delineation is carried out to back electrode layer using laser grooving and scribing mechanism, light-absorption layer is carried out using mechanical scratching mechanism
Second of delineation carries out third time delineation to light-absorption layer and top electrode layer using mechanical scratching mechanism.
When prescoring item number is 150,
The laser grooving and scribing mechanism of use includes two delineation groups, and each delineation group includes 4 laser beams, first delineation group
In the corresponding prescoring of head end laser beam be the 1st article of prescoring, the head end laser beam in second delineation group is pre- stroke corresponding
Line is the 76th article of prescoring；
The mechanical scratching mechanism of use includes two delineation groups, and each delineation group includes 13 cutting stylus, first delineation group
In the corresponding prescoring of head end cutting stylus be the 1st article of prescoring, the corresponding prescoring of head end cutting stylus in second delineation group is
76th article of prescoring.
Technical solution of the present invention has the advantages that
1. the scoring device of thin-film solar cells provided by the invention, for thin-film solar cells is successively carried out to
It is few to delineate three times, including at least one delineation mechanism, the delineation mechanism include the length direction of at least two edge layers to be delineated
The delineation group being arranged successively, each delineation group include at least one delineation unit；Layer to be delineated has the shifting along delineation group
The a plurality of prescoring of dynamic direction successively layout serial number, each described one prescoring of delineation cell tracks are delineated；Extremely
In few two delineation groups, first prescoring of the corresponding layer to be delineated of head end delineation unit of one of them delineation group,
One between the first prescoring and last prescoring of the corresponding layer to be delineated of head end delineation unit of other delineation groups is pre-
Scribing line；And the corresponding prescoring serial number of head end delineation unit of latter delineation group, unit is delineated in the end greater than previous delineation group
Corresponding prescoring serial number.When being delineated, multiple delineation groups are delineated simultaneously, are carved compared with passing through one in the prior art
It draws group to delineate from the head end of delineation layer to end, substantially reduces the time needed for completing primary delineation, improve delineation efficiency.
2. the scoring device of thin-film solar cells provided by the invention, each delineation group includes multiple delineations
Unit.It can be further improved delineation efficiency in this way.
3. the rose method of thin-film solar cells provided by the invention when carrying out second of delineation to light-absorption layer, makes each
Prescoring serial number corresponding to the head end delineation unit of a delineation group, with the head end of corresponding each delineation group in first time delineation
It is identical to delineate prescoring serial number corresponding to unit.It is right that head end by making each delineation group in second of delineation delineates unit institute
The prescoring serial number answered, with prescoring serial number corresponding to the head end delineation unit of corresponding each delineation group in first time delineation
It is identical, can make second of delineation and for the first time delineation between delineation group movement error, only concentrate on the latter delineation group and
The joining place of previous delineation group, to reduce the mobile mistake generated of delineation group between second of delineation and for the first time delineation
Difference.
4. the rose method of thin-film solar cells provided by the invention carries out third time quarter to top electrode layer and light-absorption layer
When drawing, the head end of each delineation group is made to delineate prescoring serial number corresponding to unit, with corresponding each quarter in first time delineation
It is identical to draw prescoring serial number corresponding to the head end delineation unit of group.By carving the head end of each delineation group in third time delineation
Prescoring serial number corresponding to unit is drawn, is delineated corresponding to unit with the head end of corresponding each delineation group in first time delineation
Prescoring serial number is identical, and third time can be made to delineate the error of the delineation group movement between first time delineation, only concentrated on latter
The joining place of a delineation group and previous delineation group, to reduce third time delineation and delineation group movement between delineation for the first time
The error of generation.
5. the rose method of thin-film solar cells provided by the invention carries out back electrode layer using laser grooving and scribing mechanism
Delineate for the first time, second carried out to light-absorption layer using mechanical scratching mechanism and is delineated, using mechanical scratching mechanism to light-absorption layer and
Top electrode layer carries out third time delineation.In this way delineation difficulty and delineation cost can be reduced while guaranteeing dividing precision.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the scoring device of the thin-film solar cells provided in the embodiment of the present invention 1 to thin-film solar cells
Carry out the schematic diagram of first time delineation；
Fig. 2 is the scoring device of the thin-film solar cells provided in the embodiment of the present invention 1 to thin-film solar cells
Carry out the schematic diagram of second of delineation；
Fig. 3 is the schematic cross-sectional view for completing the thin-film solar cells of delineation；
Fig. 4 is the step schematic diagram of the rose method of the thin-film solar cells provided in the embodiment of the present invention 2；
Description of symbols:
1- mode of laser group, 11- laser beam, 2- cutting stylus mould group, 21- cutting stylus, the 1st article of practical scribing line of 31- delineation for the first time,
The 76th article of practical scribing line of 32- delineation for the first time, 41- delineate the 1st article of practical scribing line, 42- the 76th article of reality of second of delineation for the second time
Border scribing line, the 1st article of the delineation practical scribing line of 51- third time, the 76th article of the delineation practical scribing line of 52- third time, 10- substrate, 20- back electricity
Pole layer, 30- light-absorption layer, 40- top electrode layer.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
As long as in addition, the non-structure each other of technical characteristic involved in invention described below different embodiments
It can be combined with each other at conflict.
Embodiment 1
As depicted in figs. 1 and 2, the present embodiment provides a kind of scoring devices of thin-film solar cells, are used for film too
Positive energy battery is successively at least delineated three times, and delineates mechanism including at least one.
Layers are delineated for delineating to the layer to be delineated of thin-film solar cells, and including at least two edges by delineation mechanism
The delineation group that is arranged successively of length direction, each delineation group includes at least one delineation unit.
Layer to be delineated has a plurality of prescoring of the moving direction successively layout serial number along delineation group, and each delineation is singly
Member one prescoring of tracking is delineated.That is, prescoring is preset lines, the position and road crossed needed for reflecting
Diameter to cross, and finally obtains required practical scribing line by tracking corresponding prescoring in practical scratching process.
In at least two delineation groups, the first item of the corresponding layer to be delineated of head end delineation unit of one of delineation group is drawn in advance
Line, one pre- stroke between the first prescoring and last prescoring of the corresponding layer to be delineated of head end delineation unit of other delineation groups
Line；And the corresponding prescoring serial number of head end delineation unit of latter delineation group, unit pair is delineated in the end greater than previous delineation group
The prescoring serial number answered.
The head end of one delineation group delineates unit, and as, in the delineation group, corresponding prescoring serial number is minimum
Delineation unit；Similarly, unit is delineated in the end of a delineation group, as, in the delineation group, corresponding prescoring
The maximum delineation unit of serial number.
When being delineated, multiple delineation groups are delineated simultaneously, compared with passing through delineation group in the prior art from quarter
The head end for drawing layer is delineated to end, is substantially reduced the time needed for completing primary delineation, is improved delineation efficiency.
Refering to Fig. 3, the film solar battery structure delineated in the present embodiment successively includes substrate 10, back electricity from bottom to top
Pole layer 20, light-absorption layer 30 and top electrode layer 40.Delineation is delineated to back electrode layer 20 for the first time, and second of delineation is to suction
Photosphere 30 is delineated, and third time delineation is to top electrode layer 40 and light-absorption layer 30 while to delineate.The material of substrate 10 can
There are many, the substrate 10 in the present embodiment is preferably transparent material, and specifically, the substrate 10 in the present embodiment is glass material
Matter.
The delineation element number that each delineation group includes is unrestricted, in order to further increase delineation efficiency, the present embodiment
In each delineation group include multiple delineation units.
The delineation mechanism particular number that the scoring device of thin-film solar cells includes can there are many situations, in this implementation
In example, the scoring device of thin-film solar cells includes two delineation mechanisms, respectively laser grooving and scribing mechanism and mechanical scratching machine
Structure.Delineation group in laser grooving and scribing mechanism is mode of laser group 1, and delineation unit is laser beam 11.Delineation in mechanical scratching mechanism
Group is cutting stylus mould group 2, and delineation unit is cutting stylus 21.As disposable embodiment, the scoring device of thin-film solar cells
A delineation mechanism can also be only included, is laser grooving and scribing mechanism or mechanical scratching mechanism.
The particular number for the delineation group for including in each delineation mechanism with no restrictions, if no less than two.At this
In embodiment, each delineation mechanism includes two delineation groups.As disposable embodiment, each delineation mechanism also be can wrap
Include three or four etc. delineation groups.
The scoring device of the thin-film solar cells provided in the present embodiment further includes driving device, for driving delineation group
Length direction along thin-film solar cells moves.
Embodiment 2
The present embodiment provides a kind of rose method of thin-film solar cells, the film sun described in Application Example 1
The scoring device of energy battery crosses to thin-film solar cells, and-Fig. 4, includes the following steps: refering to fig. 1
First time delineation is carried out to the back electrode layer 20 being set on substrate 10；
Light-absorption layer 30 is set on the back electrode layer 20 after completing to delineate for the first time, and tracks corresponding prescoring to extinction
Layer 30 carries out second and delineates；
Top electrode layer 40 is set on the light-absorption layer 30 after completing second to delineate, and tracks corresponding prescoring to top electricity
Pole layer 40 and light-absorption layer 30 carry out third time delineation.
In the present embodiment, when carrying out second of delineation on light-absorption layer 30, the head end of each delineation group is made to delineate unit
Corresponding prescoring serial number, with prescoring corresponding to the head end delineation unit of corresponding each delineation group in first time delineation
Serial number is identical.By making the head end of each delineation group in second of delineation delineate prescoring serial number corresponding to unit, with first
Prescoring serial number corresponding to the head end delineation unit of corresponding each delineation group is identical in secondary delineation, can make second of delineation
The error of delineation group movement, only concentrates on the joining place of the latter delineation group Yu previous delineation group between first time delineation,
To reduce the mobile error generated of delineation group between second of delineation and for the first time delineation.
When carrying out third time delineation in top electrode layer 40 and light-absorption layer 30, the head end of each delineation group is made to delineate unit institute
Corresponding prescoring serial number, with prescoring sequence corresponding to the head end delineation unit of corresponding each delineation group in first time delineation
It is number identical.By making the head end of each delineation group in third time delineation delineate prescoring serial number corresponding to unit, with first time
In delineation corresponding each delineation group head end delineation unit corresponding to prescoring serial number it is identical, can make third time delineate and
The error of delineation group movement, only concentrates on the joining place of the latter delineation group Yu previous delineation group between delineating for the first time, from
And reduce third time delineation and for the first time mobile error generated of delineation group between delineation.
In order to which delineation difficulty and delineation cost can be reduced while guaranteeing dividing precision, in the present embodiment, use
Laser grooving and scribing mechanism carries out first time delineation to back electrode layer 20, carries out second to light-absorption layer 30 using mechanical scratching mechanism and carves
It draws, third time delineation is carried out to light-absorption layer 30 and top electrode layer 40 using mechanical scratching mechanism.As disposable embodiment,
It can also delineate three times and be all made of mechanical scratching mechanism.As disposable embodiment, can also delineate three times be all made of it is sharp
Mechanism is drawn in photoetching.
The specific item number for the prescoring delineated every time with no restrictions, such as can make tens, be also possible to several hundred.Only
Meet the prescoring item number delineated every time in delineation three times to be equal to each other.
In the present embodiment by taking prescoring item number is 150 as an example, when prescoring item number is 150,
The laser grooving and scribing mechanism of use includes two delineation groups, and each delineation group includes 4 laser beams 11, first delineation
The corresponding prescoring of head end laser beam 11 in group is the 1st article of prescoring, and the head end laser beam 11 in second delineation group is corresponding
Prescoring be the 76th article of prescoring；It crosses according to above-mentioned steps, finally can be obtained 150 reality of delineation for the first time
Scribing line.Wherein, the practical scribing line 31 of the 1st article of delineation for the first time and the practical scribing line 32 of the 76th article of delineation for the first time see Fig. 1 and 2,
Other practical scribing line of delineation for the first time are omitted in fig. 1 and 2 not to be drawn.
The mechanical scratching mechanism of use includes two delineation groups, and each delineation group includes 13 cutting stylus 21, first delineation
The corresponding prescoring of head end cutting stylus 21 in group is the 1st article of prescoring, and the head end cutting stylus 21 in second delineation group is corresponding pre-
It is marked as the 76th article of prescoring.It crosses according to above-mentioned steps, finally can be obtained second of delineation and third time delineation
Each 150 practical scribing line.Wherein, the practical scribing line 41 of the 1st article of second delineation, the practical scribing line 42 of the 76th article of second of delineation, the
The 1st article of practical scribing line 51 is delineated three times and the practical scribing line 52 of the 76th article of third time delineation sees Fig. 2, second of delineation and third
Other practical scribing line of secondary delineation are omitted in Fig. 2 not to be drawn.
Second of delineation in this way and third time delineation are delineated relative to first time, and the error of delineation group movement only concentrates on
Between 75th article of prescoring and the 76th article of prescoring, thus reduce second of delineation and be inscribed in scoring process for the third time,
The mobile error generated relative to first time delineation of delineation group.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (10)
1. a kind of scoring device of thin-film solar cells, for successively at least being delineated three times to thin-film solar cells,
It is characterised in that it includes at least one delineation mechanism, the delineation mechanism includes the length direction of at least two edge layers to be delineated
The delineation group being arranged successively, each delineation group include at least one delineation unit；
Layer to be delineated has a plurality of prescoring of the moving direction successively layout serial number along delineation group, and each delineation unit chases after
One prescoring of track is delineated；
In at least two delineation groups, the first item of the corresponding layer to be delineated of head end delineation unit of one of them delineation group is pre-
Scribing line, one between the first prescoring and last prescoring of the corresponding layer to be delineated of head end delineation unit of other delineation groups
Prescoring；And the corresponding prescoring serial number of head end delineation unit of latter delineation group, the end greater than previous delineation group is delineated
The corresponding prescoring serial number of unit.
2. the scoring device of thin-film solar cells according to claim 1, which is characterized in that each delineation group packet
Include multiple delineation units.
3. the scoring device of thin-film solar cells according to claim 1, which is characterized in that the delineation mechanism includes
Two delineation groups.
4. the scoring device of thin-film solar cells according to any one of claim 1-3, which is characterized in that described thin
The scoring device of film solar cell includes two delineation mechanisms, respectively laser grooving and scribing mechanism and mechanical scratching mechanism,
Delineation unit in the laser grooving and scribing mechanism is laser beam (11), and the delineation unit in the mechanical scratching mechanism is cutting stylus
(21)。
5. a kind of rose method of thin-film solar cells, using thin film solar electricity of any of claims 1-4
The scoring device in pond crosses to thin-film solar cells, which comprises the steps of:
First time delineation is carried out to the back electrode layer (20) being set on substrate (10)；
Light-absorption layer (30) are set on the back electrode layer (20) after completing to delineate for the first time, and track corresponding prescoring to extinction
Layer (30) carries out second and delineates；
Top electrode layer (40) are set on the light-absorption layer (30) after completing second to delineate, and track corresponding prescoring to top electricity
Pole layer (40) and light-absorption layer (30) carry out third time delineation.
6. the rose method of thin-film solar cells according to claim 5, which is characterized in that carried out to light-absorption layer (30)
When second of delineation, the head end of each delineation group is made to delineate prescoring serial number corresponding to unit, it is corresponding with first time delineation
Each delineation group head end delineation unit corresponding to prescoring serial number it is identical.
7. the rose method of thin-film solar cells according to claim 5 or 6, which is characterized in that top electrode layer
(40) when and light-absorption layer (30) carries out third time delineation, the head end of each delineation group is made to delineate prescoring sequence corresponding to unit
Number, it is identical as prescoring serial number corresponding to the head end delineation unit of corresponding each delineation group in first time delineation.
8. the rose method of thin-film solar cells according to claim 5, which is characterized in that three times in delineation, at least
Once delineated using mechanical scratching mechanism, and/or, it is delineated at least once using laser grooving and scribing mechanism.
9. the rose method of thin-film solar cells according to claim 5, which is characterized in that use laser grooving and scribing mechanism
First time delineation is carried out to back electrode layer (20), second is carried out to light-absorption layer (30) using mechanical scratching mechanism and is delineated, is used
Mechanical scratching mechanism carries out third time delineation to light-absorption layer (30) and top electrode layer (40).
10. the rose method of thin-film solar cells according to claim 9, which is characterized in that when prescoring item number is
At 150,
The laser grooving and scribing mechanism of use includes two delineation groups, and each delineation group includes 4 laser beams (11), first delineation group
In the corresponding prescoring of head end laser beam (11) be the 1st article of prescoring, the head end laser beam (11) in second delineation group is right
The prescoring answered is the 76th article of prescoring；
The mechanical scratching mechanism of use includes two delineation groups, and each delineation group includes 13 cutting stylus (21), first delineation group
In the corresponding prescoring of head end cutting stylus (21) be the 1st article of prescoring, the head end cutting stylus (21) in second delineation group is corresponding
Prescoring is the 76th article of prescoring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201811572725.2A CN109830554A (en) | 2018-12-21 | 2018-12-21 | Thin-film solar cells scoring device and rose method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811572725.2A CN109830554A (en) | 2018-12-21 | 2018-12-21 | Thin-film solar cells scoring device and rose method |
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| CN109830554A true CN109830554A (en) | 2019-05-31 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101977723A (en) * | 2008-03-24 | 2011-02-16 | 丸文株式会社 | Beam processing apparatus, beam processing method, and beam processed substrate |
| JP2011167724A (en) * | 2010-02-18 | 2011-09-01 | Shibaura Mechatronics Corp | Laser beam machining apparatus |
| JP2013184207A (en) * | 2012-03-09 | 2013-09-19 | Ntn Corp | Laser patterning apparatus and laser patterning method |
| CN106876518A (en) * | 2017-01-10 | 2017-06-20 | 深圳先进技术研究院 | Thin-film solar cells scoring device and method |
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