CN109737237A - Photo-thermal manipulates membrane type microvalve device and application method - Google Patents
Photo-thermal manipulates membrane type microvalve device and application method Download PDFInfo
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- CN109737237A CN109737237A CN201910084530.1A CN201910084530A CN109737237A CN 109737237 A CN109737237 A CN 109737237A CN 201910084530 A CN201910084530 A CN 201910084530A CN 109737237 A CN109737237 A CN 109737237A
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Abstract
The invention discloses a kind of photo-thermal manipulation membrane type microvalve device and application methods；Photo-thermal manipulates membrane type microvalve device, including the microchannel PDMS, it is characterized by: being provided with the transport fluid channel being parallel to each other and distillation aquaporin in the microchannel PDMS, the transport fluid channel is to transport main fluid, the distillation aquaporin circulates to distilled water, to provide steam pressure source；It is provided with partition between transport fluid channel and distillation aquaporin, through-hole is provided in the middle part of the partition, the both ends of the surface of the through-hole are respectively arranged with strain films and hydrophobic permeable membrane, and strain films and hydrophobic permeable membrane and through-hole form steam generating chamber；The strain films are located at transport fluid channel side, and deformation occurs for the strain films stress, form micro-valve；The hydrophobic permeable membrane is located at distillation aquaporin side；Infrared laser is provided on the outside of the distillation aquaporin；The present invention can be widely used in the fields such as fluid transport, chemical analysis, medicine detection.
Description
Technical field
The present invention relates to micro-fluidic fields, manipulate membrane type microvalve device and application method more particularly to a kind of photo-thermal.
Background technique
Microfluidic technology is a kind of to be related to the technology of the processing of flow liquid process in micro-meter scale space and device processing and manufacturing.It
It is the various effects and behavior for studying microfluid using the fluid processing of micromation and detection system under micron scale structures.
Since it has high-throughput microchannel and flow network, efficient fluid processing and testing mechanism, and potentially apply
Low cost has been widely used in pharmacy industry, biotechnology and bioanalysis, medicine, chemical analysis, machinery, IT industry very
To the fields such as national defence and aerospace.
Main element one of of the micro-valve as microfluidic system, effect include Runoff adjustment, ON/OFF conversion and sealing
Biomolecule, micro-nano particle, chemical reagent etc., property includes No leakage, dead volume is small, low in energy consumption, pressure drag is big, to particle flaw
It is dirty it is insensitive, reaction is fast, can linear operation ability etc..According to the difference of driving source, micro-valve can be divided into again piezoelectricity, magnetic, electricity,
Heat, phase transformation, the active micro-valve of bistable state and the active micro-valve by external secondary system such as gas-powered, wherein thermal drivers micro-valve packet
Hot-air, bimetallic and marmem micro-valve are included, phase transformation micro-valve includes hydrogel, sol-gel and paraffin micro-valve etc..Closely
Nian Lai, the research based on micro-fluidic chip expansion have very much.M.Duch et al. proposes a kind of top V-type cantilever beam and lower part silicon
Diaphragm forms, the low-power consumption of one layer of Co-Ni alloy of plating, magnetic micro-valve easy to use on V-type cantilever beam；T.H asegaw a etc.
People proposes one kind by empty gas-powered differential match system, and wherein main element is exactly to realize that direction turns by microsolenoid coil driver
The 10 multidirectional electrostatic drive micro-valves in outlet changed；It is respectively 8 μm and 5 μm of silicon fiml and aluminium by thickness that H.Jerm an, which has developed,
The bimetallic of layer composition drives micro-valve, and the micro-valve of ratio control can be well realized；M.E.Piccini et al. is using diameter
75 μm of nickel-titanium metal line has developed a kind of silicone resin tubulose closed type micro-valve, is opened by applying pulse voltage realization micro-valve
Close control.The commercialization degree of micro-valve is not still high at present, still has many problems to need to solve.Conventional micro-valve device generallys use
The materials such as glass, silicon wafer are substrate, are process using Si micromachining technique (such as photoetching, etching etc.), to process equipment
Height is required with raw material, processing cost is higher；Micro-valve structure is complex at present, usually nonplanar layer stereo structure,
It need to be process using multilayer silicon bonding technique, technique very complicated, the process-cycle is longer.More importantly this non-planar
Micro-valve structure be not easy to be integrated in microfluidic system, increase the integrated difficulty of microfluidic system.Therefore carry out novel micro-
The research of valve simplifies the structure and manufacture craft of micro-valve, reduces cost and integrated difficulty, have to the development of micro-fluidic chip
Important meaning.
Summary of the invention
Technical problem to be solved by the present invention lies in providing a kind of photo-thermal manipulation membrane type microvalve device and its application method,
To improve the response speed and precision of micro-valve.
In order to solve the above-mentioned technical problem, the technical scheme is that
A kind of photo-thermal manipulation membrane type microvalve device, including PDMS micro-flow channels, it is characterised in that: the PDMS microfluidic
The transport fluid channel being parallel to each other and distillation aquaporin are provided in channel, the transport fluid channel is to transport mainstream
Body, the distillation aquaporin circulates to distilled water, to provide steam pressure source；Transport fluid channel and distillation aquaporin it
Between be provided with partition, be provided with through-hole in the middle part of the partition, the both ends of the surface of the through-hole are respectively arranged with strain films and hydrophobic
Ventilated membrane, strain films and hydrophobic permeable membrane and through-hole form steam generating chamber；The strain films are located at transport fluid channel one
Side, and deformation occurs for the strain films stress, forms micro-valve；The hydrophobic permeable membrane is located at distillation aquaporin side；The steaming
Infrared laser is provided on the outside of distilled water channel.
The working principle of the invention is: the infrared laser heats the distilled water in the distillation aquaporin,
Distilled water is produced vapor by thermal evaporation, and the vapor is accumulated to form vapour pressure in steam generating chamber through hydrophobic permeable membrane,
The vapour pressure acts on strain films and brings it about deformation, and strain films block the transport of the main fluid in transport fluid channel.
The preferred embodiment of photo-thermal manipulation membrane type microvalve device according to the present invention, the strain films use poly dimethyl
Siloxanes, rubber or resin elastic-like material are made.
Photo-thermal according to the present invention manipulates membrane type microvalve device preferred embodiment, and the hydrophobic permeable membrane uses polytetrafluoro
Ethylene or Kynoar are made, and can be unable to permeate state water through vapor.
Second technical solution of the invention is:
A kind of application method of photo-thermal manipulation membrane type microvalve device, which includes PDMS micro-flow channels, special
Sign is:
The transport fluid channel being parallel to each other and distillation aquaporin, the transport are provided in the PDMS micro-flow channels
Fluid channel is to transport main fluid, and the distillation aquaporin circulates to distilled water, to provide steam pressure source；In traffic flow
It is provided with partition between body channel and distillation aquaporin, through-hole, the both ends of the surface point of the through-hole are provided in the middle part of the partition
It is not provided with strain films and hydrophobic permeable membrane, strain films and hydrophobic permeable membrane and through-hole form steam generating chamber；The strain
Film is located at transport fluid channel side, and deformation occurs for the strain films stress, forms micro-valve；The hydrophobic permeable membrane, which is located at, to be steamed
Distilled water channel side；Infrared laser is provided on the outside of the distillation aquaporin.
Main fluid is added in the transport fluid channel, distilled water is added in the distillation aquaporin, using described
Infrared laser heats the distilled water in the distillation aquaporin, and distilled water is produced vapor, the water by thermal evaporation
Vapor permeation hydrophobic permeable membrane is accumulated to form vapour pressure in steam generating chamber, and the vapour pressure acts on strain films and brings it about shape
Become, strain films block the transport of the main fluid in transport fluid channel.
The preferred embodiment of the application method of photo-thermal manipulation membrane type microvalve device according to the present invention, the strain films are adopted
It is made of dimethyl silicone polymer, rubber or resin elastic-like material.
The preferred embodiment of the application method of photo-thermal manipulation membrane type microvalve device according to the present invention, the hydrophobic, air-permeability
Film is made of polytetrafluoroethylene (PTFE) or Kynoar, can be unable to permeate state water through vapor.
The beneficial effect of photo-thermal manipulation membrane type microvalve device of the present invention and its application method is: the present invention is utilized and is answered
Becoming film stress, deformation occurs and forms the characteristic of micro-valve, realizes microfluid manipulation, has and carry out essence to fluid in microchannel
Quasi-, quick on/off function, the structure of micro-valve is simple, and manufacture craft simplifies, and controls at low cost, convenient for integrated, can answer extensively
Used in fields such as fluid transport, chemical analysis, medicine detections.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of photo-thermal manipulation membrane type microvalve device of the present invention.
Fig. 2 is the operation principle schematic diagram of photo-thermal manipulation membrane type microvalve device of the present invention.
Specific embodiment
Below with reference to test example and specific embodiment, the present invention is described in further detail.But this should not be understood
It is all that this is belonged to based on the technology that the content of present invention is realized for the scope of the above subject matter of the present invention is limited to the following embodiments
The range of invention.
Referring to Fig. 1 and Fig. 2, embodiment 1: a kind of photo-thermal manipulation membrane type microvalve device, including PDMS micro-flow channels, it is described
The transport fluid channel 2 being parallel to each other and distillation aquaporin 3 are provided in PDMS micro-flow channels, the transport fluid channel is used
To transport main fluid, the distillation aquaporin circulates to distilled water, to provide steam pressure source；In transport fluid channel and steam
Partition 4 is provided between distilled water channel, the middle part of the partition 4 is provided with through-hole 5, and the both ends of the surface of the through-hole 5 are respectively set
There are strain films 6 and hydrophobic permeable membrane 7, strain films 6 and hydrophobic permeable membrane 7 form steam generating chamber；The strain films 6 are located at transport
2 side of fluid channel, and deformation occurs for 6 stress of the strain films, forms micro-valve；The hydrophobic permeable membrane 7 is logical positioned at distilled water
3 side of road；Infrared laser 8 is provided on the outside of the distillation aquaporin 3.
In a particular embodiment, the strain films 6 are using polydimethylsiloxane, rubber or resin elastic-like material
It is made, with a thickness of tens microns to 100 microns.
The hydrophobic permeable membrane 7 is made of polytetrafluoroethylene (PTFE) or Kynoar, vapor can be penetrated and cannot be saturating
Liquid water is crossed, with a thickness of tens microns to 100 microns.
Referring to Fig. 1 and Fig. 2, the application method of a kind of photo-thermal of embodiment 2. manipulation membrane type microvalve device, the microvalve device packet
PDMS micro-flow channels 1 are included, the transport fluid channel 2 being parallel to each other and distillation aquaporin 3 are provided in the microchannel PDMS,
The transport fluid channel is to transport main fluid, and the distillation aquaporin circulates to distilled water, to provide steam pressure source；
It is provided with partition 4 between transport fluid channel and distillation aquaporin, the middle part of the partition 4 is provided with through-hole 5, the through-hole
5 both ends of the surface are respectively arranged with strain films 6 and hydrophobic permeable membrane 7, and strain films 6 and hydrophobic permeable membrane 7 form steam generating chamber；Institute
It states strain films 6 and is located at transport 2 side of fluid channel, and deformation occurs for 6 stress of the strain films, forms micro-valve；It is described hydrophobic
Air film 7 is located at distillation 3 side of aquaporin；Infrared laser 8 is provided on the outside of the distillation aquaporin 3.
Main fluid is added in the transport fluid channel 2, main fluid can be water, solution, chemical reagent, medical
Or gas etc. cannot penetrate the fluid of strain films 6；Distilled water is added in the distillation aquaporin, utilizes the infrared laser
Distilled water in the distillation aquaporin is heated, 1550nm infrared laser can be used in the infrared laser；Distillation
Water is produced vapor by thermal evaporation, and the vapor is accumulated to form vapour pressure in steam generating chamber through hydrophobic permeable membrane 7, described
Vapour pressure acts on strain films 6 and brings it about deformation, and strain films 6 block the transport of the main fluid in transport fluid channel.When need
When main fluid being wanted to circulate, stop heating distilled water.
In a particular embodiment, the strain films 6 are using dimethyl silicone polymer, rubber or resin elastic-like material system
At.With a thickness of tens microns to 100 microns.
The hydrophobic permeable membrane 7 is made of polytetrafluoroethylene (PTFE) or Kynoar, vapor can be penetrated and cannot be saturating
Cross liquid water.With a thickness of tens microns to 100 microns.
The above description is only a preferred embodiment of the present invention, is not intended to restrict the invention, although with reference to the foregoing embodiments
Invention is explained in detail, for those skilled in the art still can be to skill documented by foregoing embodiments
Art scheme is modified or equivalent replacement of some of the technical features.All within the spirits and principles of the present invention,
Any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of photo-thermal manipulates membrane type microvalve device, including the microchannel PDMS (1), it is characterised in that: in the microchannel PDMS
It is provided with the transport fluid channel (2) being parallel to each other and distillation aquaporin (3), the transport fluid channel is to transport mainstream
Body, the distillation aquaporin circulates to distilled water, to provide steam pressure source；Transport fluid channel and distillation aquaporin it
Between be provided with partition (4), be provided with through-hole (5) in the middle part of the partition (4), the both ends of the surface of the through-hole (5) are respectively arranged with
Strain films (6) and hydrophobic permeable membrane (7), strain films (6) and hydrophobic permeable membrane (7) and through-hole (5) form steam generating chamber；Institute
It states strain films (6) and is located at transport fluid channel (2) side, and deformation occurs for the strain films (6) stress, forms micro-valve；It is described
Hydrophobic permeable membrane (7) is located at distillation aquaporin (3) side；Infrared laser is provided on the outside of the distillation aquaporin (3).
2. photo-thermal according to claim 1 manipulates membrane type microvalve device, it is characterised in that: the strain films (6) are using poly-
Dimethyl siloxane, rubber or resin elastic-like material are made.
3. photo-thermal according to claim 1 manipulates membrane type microvalve device, it is characterised in that: the hydrophobic permeable membrane (7) is adopted
It is made of polytetrafluoroethylene (PTFE) or Kynoar, permeate state water can be unable to through vapor.
4. a kind of application method of photo-thermal manipulation membrane type microvalve device, which includes the microchannel PDMS (1), and feature exists
In:
The transport fluid channel (2) being parallel to each other and distillation aquaporin (3), the traffic flow are provided in the microchannel PDMS
Body channel is to transport main fluid, and the distillation aquaporin circulates to distilled water, to provide steam pressure source；In transport fluid
It is provided with partition (4), is provided with through-hole (5) in the middle part of the partition (4), the through-hole (5) between channel and distillation aquaporin
Both ends of the surface be respectively arranged with strain films (6) and hydrophobic permeable membrane (7), strain films (6) and hydrophobic permeable membrane (7) and through-hole
(5) steam generating chamber is formed；The strain films (6) are located at transport fluid channel (2) side, and the strain films (6) stress is sent out
Raw deformation, forms micro-valve；The hydrophobic permeable membrane (7) is located at distillation aquaporin (3) side；On the outside of the distillation aquaporin (3)
It is provided with infrared laser；
Main fluid is added in the transport fluid channel (2), distilled water is added in the distillation aquaporin, using described red
Outer laser heats the distilled water in the distillation aquaporin, and distilled water is produced vapor by thermal evaporation, and the water steams
Gas is accumulated to form vapour pressure in steam generating chamber through hydrophobic permeable membrane (7), and the vapour pressure, which acts on strain films (6), makes its hair
Raw deformation, strain films (6) block the transport of the main fluid in transport fluid channel.
5. the application method of photo-thermal manipulation membrane type microvalve device according to claim 4, it is characterised in that:
The strain films (6) are made of dimethyl silicone polymer, rubber or resin elastic-like material.
6. the application method of photo-thermal manipulation membrane type microvalve device according to claim 4, it is characterised in that:
The hydrophobic permeable membrane (7) is made of polytetrafluoroethylene (PTFE) or Kynoar, can cannot be penetrated through vapor
Liquid water.
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| CN201910084530.1A CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
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| CN201910084530.1A CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
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| CN109737237A true CN109737237A (en) | 2019-05-10 |
| CN109737237B CN109737237B (en) | 2020-05-12 |
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Citations (8)
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| US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| JPH10223795A (en) * | 1997-02-03 | 1998-08-21 | Hitachi Chem Co Ltd | Manufacture of semiconductor package |
| US20040011977A1 (en) * | 2001-08-31 | 2004-01-22 | Hower Robert W | Micro-fluidic valves |
| KR20060063122A (en) * | 2004-12-07 | 2006-06-12 | 삼성전자주식회사 | Micro valve |
| CN101443635A (en) * | 2006-03-10 | 2009-05-27 | 霍尼韦尔国际公司 | Thermal mass gas flow sensor and method of forming same |
| CN103380299A (en) * | 2010-11-24 | 2013-10-30 | 弗兰霍菲尔运输应用研究公司 | Fluidic actuator having a deformable closure arrangement and long shelf life |
| CN104638286A (en) * | 2013-11-14 | 2015-05-20 | 霍尼韦尔国际公司 | Power generator having integrated membrane valve |
| CN104225964B (en) * | 2014-09-17 | 2016-09-28 | 清华大学 | Microfluid removal of bubbles device and preparation method thereof and microfluidic device |
-
2019
- 2019-01-29 CN CN201910084530.1A patent/CN109737237B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| JPH10223795A (en) * | 1997-02-03 | 1998-08-21 | Hitachi Chem Co Ltd | Manufacture of semiconductor package |
| US20040011977A1 (en) * | 2001-08-31 | 2004-01-22 | Hower Robert W | Micro-fluidic valves |
| KR20060063122A (en) * | 2004-12-07 | 2006-06-12 | 삼성전자주식회사 | Micro valve |
| CN101443635A (en) * | 2006-03-10 | 2009-05-27 | 霍尼韦尔国际公司 | Thermal mass gas flow sensor and method of forming same |
| CN103380299A (en) * | 2010-11-24 | 2013-10-30 | 弗兰霍菲尔运输应用研究公司 | Fluidic actuator having a deformable closure arrangement and long shelf life |
| CN104638286A (en) * | 2013-11-14 | 2015-05-20 | 霍尼韦尔国际公司 | Power generator having integrated membrane valve |
| CN104225964B (en) * | 2014-09-17 | 2016-09-28 | 清华大学 | Microfluid removal of bubbles device and preparation method thereof and microfluidic device |
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| CN109737237B (en) | 2020-05-12 |
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