CN109702439A - Sample sample tray and its manufacturing method are passed under ultrahigh vacuum - Google Patents
Sample sample tray and its manufacturing method are passed under ultrahigh vacuum Download PDFInfo
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- CN109702439A CN109702439A CN201910169888.4A CN201910169888A CN109702439A CN 109702439 A CN109702439 A CN 109702439A CN 201910169888 A CN201910169888 A CN 201910169888A CN 109702439 A CN109702439 A CN 109702439A
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Abstract
The present invention discloses and passes sample sample tray and its manufacturing method under a kind of ultrahigh vacuum, is related to passing sample technical field under ultrahigh vacuum, passes sample low efficiency and the technical issues of sample is easy to fall off to solve sample tray under existing ultrahigh vacuum.The manufacturing method that ultrahigh vacuum of the present invention passes down sample sample tray includes the following steps: using 316 stainless steels, 316L stainless steel or 304 stainless steel materials by machining, being stamped or cut out to form disk body, rotary shaft and pillar, and disk body and rotary shaft are integrally formed, the periphery of disk body is uniformly provided with multiple mounting holes；Using oxygenless copper material by machining, being stamped or cut out to form catching plate, and it is connect by mounting hole with disk body；Pillar is connect with catching plate by welding, and weld grinding is smooth, smooth.
Description
Technical field
The present invention relates to sample technical field is passed under ultrahigh vacuum, in particular to sample sample tray is passed under a kind of ultrahigh vacuum
And its manufacturing method.
Background technique
Currently, the structure of the sample tray under ultrahigh vacuum is mostly linear type, two sample carriers can be at most carried simultaneously.
Present inventor's discovery, existing sample tray mainly have having the following defects:
One, two sample carriers can only be at most carried simultaneously, directly limit the efficiency of research；
Two, the transfer mode of sample can only be that simple sample toss is passed, and cannot accomplish whole transport；Specifically, it is first
Sample tray is linear type, is difficult to accomplish to act with the desorption of transfer device, that is, is difficult freely to assemble fixation with transfer device
And unloading, therefore be designed to be combined into one with transfer device mostly, only sample carrier be free to be desorbed；Secondly as
Entirety is when transport, linear structure be very easy to occur sample stage wave or it is unstable, cause falling off for sample.
Three, linear type sample tray be easy to cause obscuring for sample, because of limited view in the duct, multiple samples side by side
Product are easy to obscure.
Therefore, how to provide and pass sample sample tray and its manufacturing method under a kind of ultrahigh vacuum, can carry simultaneously more
A sample effectively improves and passes sample efficiency, and sample is effectively prevent to fall off, it has also become the technology of those skilled in the art's urgent need to resolve
Problem.
Summary of the invention
The purpose of the present invention is to provide sample sample tray and its manufacturing method is passed under a kind of ultrahigh vacuum, to solve now
Sample tray passes the technical issues of sample low efficiency and sample are easy to fall off under some ultrahigh vacuum.
The present invention provides the manufacturing method that a kind of ultrahigh vacuum passes down sample sample tray, and sample use is passed under the ultrahigh vacuum
Sample tray includes: disk body, and the center of the disk body is equipped with rotary shaft, and the edge of the disk body is circumferentially spaced uniformly to be set
There are multiple catching plates, each catching plate is equipped with pillar far from the side of the disk body, and the pillar prolongs along the radial direction of the catching plate
It stretches, and sample carrier can be assembled between the two neighboring catching plate, be placed with sample on the sample carrier；The disk body material is adopted
With 316 stainless steels, 316L stainless steel or 304 stainless steels, the catching plate material selection oxygen-free copper；Sample use is passed under the ultrahigh vacuum
The manufacturing method of sample tray includes the following steps: to pass through machine using 316 stainless steels, 316L stainless steel or 304 stainless steel materials
It processes, be stamped or cut out to form disk body, rotary shaft and pillar, and the disk body and the rotary shaft are integrally formed, the disk body
Periphery be uniformly provided with multiple mounting holes；Using oxygenless copper material by machining, being stamped or cut out to form catching plate, and pass through institute
Mounting hole is stated to connect with the disk body；The pillar is connect with the catching plate by welding.
Compared with the existing technology, the manufacturing method that ultrahigh vacuum of the present invention passes down sample sample tray has following
Advantage:
Ultrahigh vacuum provided by the invention passes down in the manufacturing method of sample sample tray, and sample sample is passed under ultrahigh vacuum
Pallet includes: disk body, and the center of disk body is equipped with rotary shaft, and the edge of disk body is circumferentially spaced to be uniformly provided with multiple catching plates,
A lateral edge catching plate of each catching plate far from disk body is radially extended equipped with pillar, and sample can be assembled between two neighboring catching plate
It holds in the palm, is placed with sample on sample carrier；Disk body material uses 316 stainless steels, 316L stainless steel or 304 stainless steels, the choosing of catching plate material
Use oxygen-free copper；The manufacturing method that ultrahigh vacuum passes down sample sample tray includes the following steps: using 316 stainless steels, 316L not
Rust steel or 304 stainless steel materials are by machining, being stamped or cut out to form disk body, rotary shaft and pillar, and disk body and rotary shaft
It is integrally formed, the periphery of disk body is uniformly provided with multiple mounting holes；It to be formed using oxygenless copper material by machining, being stamped or cut out
Catching plate, and connect by mounting hole with disk body；Pillar is connect with catching plate by welding, and weld grinding is smooth, flat
It is whole.From this analysis, ultrahigh vacuum provided by the invention passes down in the manufacturing method of sample sample tray, due to disk body, rotation
Shaft and pillar are passed through using 316 stainless steels, 316L stainless steel or 304 stainless steel materials to be machined, is stamped or cut out to be formed, and is grabbed
Disk passes through machining using oxygenless copper material, is stamped or cut out to be formed, therefore under UHV condition, above-mentioned material deformation
It is small, elasticity is good, with superelevation machining accuracy and deformation accuracy, so as to guarantee the movement effects of sample tray indirectly；And
And multiple catching plates are uniformly provided with since the edge of disk body is circumferentially spaced, and plug can be passed through between two neighboring catching plate
Mode assembles sample carrier, sample is placed on sample carrier, therefore multiple sample carriers can effectively improve and pass sample efficiency, the company of plug
The mode of connecing can effectively prevent sample to fall off.
The present invention also provides pass sample sample tray under a kind of ultrahigh vacuum, comprising: disk body, the center of the disk body
Equipped with rotary shaft, the edge of the disk body is circumferentially spaced to be uniformly provided with multiple catching plates, and each catching plate is far from the disk body
Side be equipped with pillar, the pillar radially extends along the catching plate, and can be by inserting between the two neighboring catching plate
The mode pulled out assembles sample carrier, is placed with sample on the sample carrier；The disk body material is stainless using 316 stainless steels, 316L
Steel or 304 stainless steels, the catching plate material selection oxygen-free copper.
When practical application, the disk body uses regular polygon structure, and each edge is respectively connected with the catching plate；Multiple samples
After product support and multiple catching plates are fixed, it is in subcircular structure that sample sample tray is passed under the ultrahigh vacuum integrally.
Wherein, the disk body uses regular hexagon structure, and each edge is respectively connected with the catching plate；Six sample carriers with
After six catching plates are fixed, it is in subcircular structure that sample sample tray is passed under the ultrahigh vacuum integrally, and on the disk body
Numeric character has been done for distinguishing each sample position.
Specifically, the two sides that the catching plate is contacted with the sample carrier are respectively equipped with spring leaf, and the sample carrier is inserted into institute
Spring leaf is stated to be detachably fixed with the catching plate.
When practical application, the catching plate uses class triangular structure, and the spring leaf uses rectangular configuration；The pillar is used
It is connect in grasping mechanism, realizes that the ultrahigh vacuum passes down the movement of sample sample tray.
Wherein, the length of the spring leaf accounts for the half of the side length of the catching plate, and the spring leaf is far from the disk body
Setting.
Specifically, the sample carrier uses rectangular configuration, and the sample carrier is equipped with groove, and the sample is placed on institute
It states in groove.
Further, disk body described in a lateral edge of the sample carrier far from the disk body is radially extended equipped with claw.
Further, the disk body is equipped with lightening hole.
The ultrahigh vacuum passes down sample sample tray and above-mentioned ultrahigh vacuum passes down the manufacturing method of sample sample tray
Possessed advantage is identical compared with the existing technology, and details are not described herein.
In addition, pass sample sample tray under ultrahigh vacuum of the present invention, whole is in subcircular structure, thus structure compared with
It is compact, and be rotational symmetry structure in two-dimensional surface, therefore be more advantageous to the transmitting of sample tray, further effectively improve biography
Sample efficiency；Also, pillar can be used in connecting with grasping mechanism, provide multiple crawl points for the rotation and translation of sample tray,
It realizes the movement of sample tray, and guarantees the various dimensions direction of motion of sample tray.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the process signal for the manufacturing method that ultrahigh vacuum provided in an embodiment of the present invention passes down sample sample tray
Figure；
Fig. 2 is the structural schematic diagram that ultrahigh vacuum provided in an embodiment of the present invention passes down sample sample tray.
In figure: 1- disk body；2- rotary shaft；3- catching plate；4- pillar；5- sample carrier；6- sample；7- spring leaf；
8- claw；11- lightening hole.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the system of indication or suggestion meaning or element must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also indirectly connected through an intermediary, it can be with
It is the connection inside two elements.For the ordinary skill in the art, it can understand that above-mentioned term exists with concrete condition
Concrete meaning in the present invention.
Fig. 1 is the process signal for the manufacturing method that ultrahigh vacuum provided in an embodiment of the present invention passes down sample sample tray
Figure；Fig. 2 is the structural schematic diagram that ultrahigh vacuum provided in an embodiment of the present invention passes down sample sample tray.
As shown in connection with fig. 1 such as Fig. 2, the embodiment of the present invention provides the manufacturer that a kind of ultrahigh vacuum passes down sample sample tray
Method, it includes: disk body 1 that sample sample tray is passed under the ultrahigh vacuum, and the center of disk body 1 is equipped with rotary shaft 2, disk body 1
Edge is circumferentially spaced to be uniformly provided with multiple catching plates 3, and each catching plate 3 is equipped with pillar 4 far from the side of disk body 1, and pillar 4 is along catching plate
3 radially extend, and sample carrier 5 can be assembled between two neighboring catching plate 3, are placed with sample 6 on sample carrier 5；1 material of disk body
Using 316 stainless steels, 316L stainless steel or 304 stainless steels, 3 material selection oxygen-free copper of catching plate；Sample use is passed under the ultrahigh vacuum
The manufacturing method of sample tray includes the following steps: step S1, using 316 stainless steels, 316L stainless steel or 304 stainless steel materials
Disk body, rotary shaft and pillar are formed by machining, being stamped or cut out, and disk body and rotary shaft are integrally formed, the periphery of disk body
It is uniformly provided with multiple mounting holes；Step S2, using oxygenless copper material by machining, being stamped or cut out to form catching plate, and pass through
Mounting hole is connect with disk body；Step S3, pillar is connect with catching plate by welding, and weld grinding is smooth, smooth.
Compared with the existing technology, ultrahigh vacuum described in the embodiment of the present invention passes down the manufacturing method tool of sample sample tray
There is following advantage:
Ultrahigh vacuum provided in an embodiment of the present invention passes down in the manufacturing method of sample sample tray, such as Fig. 2 combination Fig. 1 institute
Show, it includes: disk body 1 that sample sample tray is passed under ultrahigh vacuum, and the center of disk body 1 is equipped with rotary shaft 2, the edge of disk body 1
Circumferentially spaced to be uniformly provided with multiple catching plates 3, each catching plate 3 is equipped with pillar 4 far from the side of disk body 1, and pillar 4 is along catching plate 3
It radially extends, and sample carrier 5 can be assembled between two neighboring catching plate 3, sample 6 is placed on sample carrier 5；1 material of disk body is adopted
With 316 stainless steels, 316L stainless steel or 304 stainless steels, 3 material selection oxygen-free copper of catching plate；Sample sample carrier is passed under ultrahigh vacuum
The manufacturing method of disk includes the following steps: step S1, passes through machine using 316 stainless steels, 316L stainless steel or 304 stainless steel materials
It processes, be stamped or cut out to form disk body, rotary shaft and pillar, and disk body and rotary shaft are integrally formed, the periphery of disk body is uniformly set
There are multiple mounting holes；Step S2, using oxygenless copper material by machining, being stamped or cut out to form catching plate, and pass through mounting hole
It is connect with disk body；Step S3, pillar is connect with catching plate by welding, and weld grinding is smooth, smooth.Thus it analyzes
It is found that ultrahigh vacuum provided in an embodiment of the present invention passes down in the manufacturing method of sample sample tray, due to disk body, rotary shaft and
Using 316 stainless steels, 316L stainless steel or 304 stainless steel materials by machining, being stamped or cut out to be formed, catching plate uses pillar
For oxygenless copper material by machining, being stamped or cut out to be formed, therefore under UHV condition, above-mentioned material deformation is small, elastic
It is good, machining accuracy and deformation accuracy with superelevation, so as to guarantee the movement effects of sample tray indirectly；Also, due to
The edge of disk body is circumferentially spaced to be uniformly provided with multiple catching plates, and can be assembled by way of plug between two neighboring catching plate
Sample carrier is placed with sample on sample carrier, therefore multiple sample carriers can effectively improve and pass sample efficiency, the connection type energy of plug
Enough sample is effectively prevent to fall off.
As shown in Fig. 2, the embodiment of the present invention, which also provides, passes sample sample tray under a kind of ultrahigh vacuum, comprising: disk body 1,
The center of disk body 1 is equipped with rotary shaft 2, and the edge of disk body 1 is circumferentially spaced to be uniformly provided with multiple catching plates 3, and each catching plate 3 is remote
The side of separation disc body 1 is equipped with pillar 4, and pillar 4 is radially extended along catching plate 3, and can pass through plug between two neighboring catching plate 3
Mode assemble sample carrier 5, sample 6 is placed on sample carrier 5；1 material of disk body uses 316 stainless steels, 316L stainless steel or 304
Stainless steel, 3 material selection oxygen-free copper of catching plate.
Since disk body 1, rotary shaft 2 and pillar 4 are using 316 stainless steels, 316L stainless steel or 304 stainless steel materials, catching plate
Using oxygenless copper material, therefore under UHV condition, above-mentioned material deformation is small, elasticity is good, the machining accuracy with superelevation
And deformation accuracy, so as to guarantee the movement effects of sample tray indirectly；Also, since the edge of disk body 1 is circumferentially spaced
Multiple catching plates 3 are uniformly provided with, and sample carrier 5 can be assembled between two neighboring catching plate 3 by way of plug, on sample carrier 5
It is placed with sample 6, therefore multiple sample carriers 5 can effectively improve and pass sample efficiency, the connection type of plug can effectively prevent sample
Pint is fallen.
When practical application, as shown in Fig. 2, above-mentioned disk body 1 can use regular polygon structure, each edge is respectively connected with catching plate
3；After multiple sample carriers 5 are fixed with multiple catching plates 3, it is in subcircular structure that sample sample tray is passed under ultrahigh vacuum integrally.
Wherein it is preferred to which each edge, which is respectively connected with, grabs as shown in Fig. 2, above-mentioned disk body 1 can use regular hexagon structure
Disk 3；After six sample carriers 5 and six catching plates 3 are fixed, it is in subcircular structure that sample sample tray is passed under ultrahigh vacuum integrally, and
Numeric character has been done on disk body 1 for distinguishing each sample position.
Subcircular structure can not only carry multiple samples (such as: six) simultaneously, and structure is compact, simultaneously
In rotational symmetry on two-dimensional surface, therefore be conducive to the transmitting of sample tray, pass sample efficiency to further increase.
Specifically, as shown in Fig. 2, the two sides that above-mentioned catching plate 3 is contacted with sample carrier 5 can be respectively equipped with spring leaf 7, thus
Sample carrier 5 is inserted into the spring leaf 7 and is detachably fixed with realizing with catching plate 3.
Being detachably fixed for plug-in is realized by spring leaf 7, can not only realize free disassembly, and can be effective
Prevent falling off for sample.
When practical application, as shown in Fig. 2, above-mentioned catching plate 3 can use class triangular structure, spring leaf 7 can use square
Shape structure；In addition, above-mentioned pillar 4 can be used in connecting with grasping mechanism, to pass sample sample tray under realizing ultrahigh vacuum
Movement.
Pillar 4 can provide multiple crawl points for the rotation and translation of sample tray, to ensure that sample tray has
The direction of motion of various dimensions.
Wherein, as shown in Fig. 2, the length of above-mentioned spring leaf 7 can account for the half of the side length of catching plate 3, and spring leaf 7 is separate
Disk body 1 is arranged.Such setting can not only guarantee that stablizing for sample carrier 5 is fixed, and easy to disassemble, while save material, just
In the manufacturing.
Specifically, above-mentioned sample carrier 5 can use rectangular configuration, and groove can be equipped on sample carrier 5, thus sample 6
It can be stably placed in groove.
Further, as shown in Fig. 2, the radial direction of a lateral edge disk body 1 of the above-mentioned sample carrier 5 far from disk body 1 can extend sets
There is claw 8, to realize plug campaign of the sample carrier 5 relative to catching plate 3 by the cooperation of the claw 8 and mechanical arm.
Further, as shown in Fig. 2, lightening hole 11 can be equipped on above-mentioned disk body 1；Lightening hole 11 can preferably be set
It is equipped with multiple, and multiple lightening holes 11 are uniformly distributed on disk body 1.
Sample sample tray is passed under ultrahigh vacuum provided in an embodiment of the present invention, the sample transmitting predominantly under ultrahigh vacuum
Service.Since experimental channel to be made and cavity reach ultrahigh vacuum, generally requires and vacuumize more than ten hour even 20 hours
More than.The normal process of varying is first to inflate the experimental channel of vacuum and cavity, opens hatch door, exchanges sample for, shut hatch door,
Then vacuum is extracted again.According to such operation, the average time once varied at least needs ten hours.Under the prior art,
The sample number that sample tray can carry is up to two, varies the time and greatly constrains experiment rate.Based on this reason,
The above-mentioned sample tray that can carry multiple (such as: six) sample carriers simultaneously has been invented, about 3 times of experiment rate can be improved.
Sample tray is designed to dodecagon, is the structure of a subcircular, and such shape design can be such that it holds
The sample carrier of load is more, while being conducive to the sample transmitting of whole disk.Since under ultrahigh vacuum, the direction of transfer of sample is only
It can be linear type, the crawl of one direction manipulator is mostly to move forward and backward, that is, is in a dimension.Therefore, the circulation of subcircular
Structure can guarantee that each flag shape sample carrier of pallet carrying and manipulator being capable of close fits by rotary motion.Due to
The limitation of the structure and line size of flag shape sample carrier, the sample carrier number that can be carried on sample tray of the present invention can
Think six.Based on the invention patent technology, when expanding line size, sample tray size can also expand therewith, because
This sample carrier quantity thereon can also take the circumstances into consideration to increase.
Under UHV condition, the rotary motion of components relatively moves along a straight line much more difficult.In order to guarantee vacuum degree, surpass
The most relatively narrower of high vacuum pipe internal diameter does not have the condition for completing corresponding rotary motion spatially；Under UHV condition, heat
Swollen shrinkage effect decline, gas lubrication failure, needs various parts machining precision very high, mutual cooperation degree also very high situation
It is lower to complete such rotary motion.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of ultrahigh vacuum passes down the manufacturing method of sample sample tray, which is characterized in that pass sample use under the ultrahigh vacuum
Sample tray includes: disk body, and the center of the disk body is equipped with rotary shaft, and the edge of the disk body is circumferentially spaced uniformly to be set
There are multiple catching plates, each catching plate is equipped with pillar far from the side of the disk body, and the pillar prolongs along the radial direction of the catching plate
It stretches, and sample carrier can be assembled by way of plug between the two neighboring catching plate, be placed with sample on the sample carrier；
The disk body material uses 316 stainless steels, 316L stainless steel or 304 stainless steels, the catching plate material selection oxygen-free copper；
The manufacturing method that the ultrahigh vacuum passes down sample sample tray includes the following steps:
Disk body, rotation are formed by machining, being stamped or cut out using 316 stainless steels, 316L stainless steel or 304 stainless steel materials
Axis and pillar, and the disk body and the rotary shaft are integrally formed, the periphery of the disk body is uniformly provided with multiple mounting holes；
Using oxygenless copper material by machining, being stamped or cut out to form catching plate, and connected by the mounting hole and the disk body
It connects；
The pillar is connect with the catching plate by welding.
2. passing sample sample tray under a kind of ultrahigh vacuum characterized by comprising the centre bit of disk body, the disk body installs
There is rotary shaft, the edge of the disk body is circumferentially spaced to be uniformly provided with multiple catching plates, and each catching plate is far from the disk body
Side is equipped with pillar, and the pillar is radially extended along the catching plate, and can pass through plug between the two neighboring catching plate
Mode assemble sample carrier, be placed with sample on the sample carrier；
The disk body material uses 316 stainless steels, 316L stainless steel or 304 stainless steels, the catching plate material selection oxygen-free copper.
3. passing sample sample tray under ultrahigh vacuum according to claim 2, which is characterized in that the disk body use is just more
Side shape structure, each edge are respectively connected with the catching plate；
After multiple sample carriers and multiple catching plates are fixed, it is in nearly circle that sample sample tray is passed under the ultrahigh vacuum integrally
Shape structure.
4. passing sample sample tray under ultrahigh vacuum according to claim 3, which is characterized in that the disk body uses positive six
Side shape structure, each edge are respectively connected with the catching plate；
After six sample carriers and six catching plates are fixed, it is in nearly circle that sample sample tray is passed under the ultrahigh vacuum integrally
Shape structure, and numeric character has been done on the disk body for distinguishing each sample position.
5. passing sample sample tray under the ultrahigh vacuum according to any one of claim 2-4, which is characterized in that described
The two sides that catching plate is contacted with the sample carrier are respectively equipped with spring leaf, the sample carrier be inserted into the spring leaf with the catching plate
It is detachably fixed.
6. passing sample sample tray under ultrahigh vacuum according to claim 5, which is characterized in that the catching plate uses class three
Angular structure, the spring leaf use rectangular configuration；
The pillar realizes that the ultrahigh vacuum passes down the movement of sample sample tray for connecting with grasping mechanism.
7. passing sample sample tray under ultrahigh vacuum according to claim 6, which is characterized in that the length of the spring leaf
The half of the side length of the catching plate is accounted for, and the spring leaf is arranged far from the disk body.
8. passing sample sample tray under ultrahigh vacuum according to claim 5, which is characterized in that the sample carrier uses square
Shape structure, and the sample carrier is equipped with groove, the sample is placed in the groove.
9. passing sample sample tray under ultrahigh vacuum according to claim 8, which is characterized in that the sample carrier is far from institute
State radially extending equipped with claw for disk body described in a lateral edge of disk body.
10. passing sample sample tray under ultrahigh vacuum according to claim 2, which is characterized in that the disk body is equipped with
Lightening hole.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910169888.4A CN109702439B (en) | 2019-03-06 | 2019-03-06 | Sample tray for ultra-high vacuum downward sample transfer and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910169888.4A CN109702439B (en) | 2019-03-06 | 2019-03-06 | Sample tray for ultra-high vacuum downward sample transfer and manufacturing method thereof |
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| CN109702439A true CN109702439A (en) | 2019-05-03 |
| CN109702439B CN109702439B (en) | 2020-08-11 |
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| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
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| Publication number | Publication date |
|---|---|
| CN109702439B (en) | 2020-08-11 |
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