CN109590893A - Utilize the grinding method of grinding system, grinding system - Google Patents
Utilize the grinding method of grinding system, grinding system Download PDFInfo
- Publication number
- CN109590893A CN109590893A CN201910006892.9A CN201910006892A CN109590893A CN 109590893 A CN109590893 A CN 109590893A CN 201910006892 A CN201910006892 A CN 201910006892A CN 109590893 A CN109590893 A CN 109590893A
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- China
- Prior art keywords
- abrasive wheel
- grinding
- ground
- grinding groove
- detection unit
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
- B24B9/148—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms electrically, e.g. numerically, controlled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
- B24B9/146—Accessories, e.g. lens mounting devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses grinding method, the grinding systems using grinding system.Specifically, the invention proposes a kind of grinding method using grinding system, comprising: abrasive wheel is mobile to sample stage, and the position of abrasive wheel is recorded as normal place by the slot bottom of grinding groove and when grinding part contact;Abrasive wheel is mobile to position detection unit, and the position of abrasive wheel is recorded as the first reference position when the inspection center of the slot bottom of grinding groove and position detection unit is overlapped;Abrasive wheel is moved back at normal place, abrasive wheel is treated mill part and ground;And the position of abrasive wheel is adjusted: again that abrasive wheel is mobile to position detection unit, the position of abrasive wheel is recorded as the second reference position when the inspection center of the slot bottom of grinding groove and position detection unit is overlapped, based on the second reference position and the first reference position, normal place is adjusted, the position of abrasive wheel is redefined.This method can reduce abrasive wheel replacing construction, improve the operation stability of grinding system.
Description
Technical field
The present invention relates to display panel manufacturing technology fields, and in particular, to using the grinding method of grinding system,
Grinding system.
Background technique
Display panel is the important composition component of display, is widely used in the equipment such as computer, TV and mobile phone.
In the manufacturing process of display panel, the edging chamfering process after cutting action and cutting action be it is essential, should
Cutting action etc. is usually carried out using grinder.For example, in the production of organic light emitting display panel (oled substrate), need by
The large scale oled substrate of array (Array) technique output carries out 1/2 cutting or 1/4 cutting.It is cut at present usually using laser
Technology is cut to cut to large scale oled substrate, laser cutting may insure cut quality, and not generate particle substantially
(Particle).But due to thermal expansion and cold contraction effect, laser cutting can generate small-scale micro-crack region in cutting edge, and
Cutting arris is more sharp after cutting, and cut edge stress is more concentrated.Therefore, it is necessary to by grinding technics to cut edge into
Row polishing, to eliminate the defective workmanships such as micro-crack, stress.
However, still having much room for improvement currently with the grinding method of grinding system, grinding system.
Summary of the invention
The present invention be based on inventor couple on the fact that and problem discovery and understanding make:
Inventors have found that the generally existing grinding quality of grinding method currently with grinding system is unstable, the abrasive wheel longevity
Order the problems such as shorter, abrasive wheel replacing construction is longer and replacement process is complicated, equipment mobility is lower.Currently with abrasive wheel pair
The process that part (such as oled substrate) to be ground is polished, it is necessary first to by the grinding groove exactitude position of part to be ground and abrasive wheel,
To determine the position and amount of grinding to be polished that starting is polished, then polish again.Due to display panel (such as
Oled substrate) need the amount of grinding polished smaller (usually micron level), therefore, mill part and grinding are treated during the grinding process
The contraposition accuracy of slot and the precise requirements of polishing are higher.
But, on the one hand, there are errors, such as each grinding groove for the mechanical precision of abrasive wheel and each grinding groove itself
Cup depth etc. there are nuances, in addition every time after replacement abrasive wheel, the installation site of abrasive wheel there is also little discrimination,
Therefore, after switching grinding groove every time or replacing abrasive wheel every time, if not re-starting contraposition process directly original
Position is polished, then the practical contact position of grinding groove and part to be ground is uncertain when originating polishing, i.e., actual grinding amount is than pre-
If amount of grinding it is bigger than normal or less than normal, negative consequence can be generated, for example, will lead to spark, notch (Chipping), crackle, particle
(Particle), the product quality problems such as fragment;And if actual grinding amount is excessive, excessive grinding be will lead to inside grinding groove
Diamond drop-off, diamond knife edge are easy to block passivation by deeply worried glass, can reduce the use longevity of grinding groove and abrasive wheel
Life.If re-starting multiple debugging process after switching grinding groove or every time replacement abrasive wheel every time, then consuming very much
When, cause the mobility of milling apparatus lower, production efficiency is lower.Position contraposition such as abrasive wheel is inaccurate, then replacement every time
After abrasive wheel, the inaccurate of part polishing amount to be ground will be caused, not only time-consuming but also waste material.
Therefore, if a kind of new grinding method can be proposed, this method can reduce grinding groove switching and abrasive wheel more
The time changed, and the product quality after grinding can be improved and improve the service life of abrasive wheel, it will be largely
It solves the above problems.
The present invention is directed to alleviate or solve the problems, such as at least one in above-mentioned refer at least to some extent.
In one aspect of the invention, the invention proposes a kind of grinding method using grinding system.According to the present invention
Embodiment, the grinding system includes abrasive wheel, and the abrasive wheel has around the abrasive wheel outer edge grinding in one week
Slot, and be configured as to be rotated along rotary shaft to realize polishing, the side of the rotary shaft has for placing part to be ground
Sample stage, the rotation grinding system further comprises position detection unit, and the position detection unit is configured as can detect
Position where the slot bottom of the grinding groove, which comprises the abrasive wheel is mobile to the sample stage, and will be described
The position of the slot bottom of grinding groove and the abrasive wheel described when grinding part contact, is recorded as normal place;By the abrasive wheel to
The position detection unit is mobile, and when the inspection center of the slot bottom of the grinding groove and position detection unit is overlapped described in grind
The position of emery wheel is recorded as the first reference position;The abrasive wheel is moved back at the normal place, the abrasive wheel is utilized
The part to be ground is ground by preset amount of grinding;And the position of the abrasive wheel is adjusted: again will be described
Abrasive wheel is mobile to the position detection unit, and by the inspection center of the slot bottom of the grinding groove and the position detection unit
The position of the abrasive wheel is recorded as the second reference position when coincidence;And based on second reference position and first reference
Position is adjusted the normal place, to redefine the position of the abrasive wheel.This method can replaced as a result,
Abrasive wheel, switching grinding groove or abrasive wheel deform after (such as inside contracting), quickly and accurately redefine abrasive wheel
Using position, and then the mobility of milling apparatus and the product quality of grinding are improved, and improves abrasive wheel and use the longevity
Life.
According to an embodiment of the invention, using the abrasive wheel to after grinding part and grinding, being ground to described described in one
The position of emery wheel is adjusted.One part to be ground of the every grinding of the abrasive wheel as a result, can carry out above-mentioned position adjusting automatically
Operation, therefore, the grinding system can be automatic and use position calibrating abrasive wheel in time, improve the essence of grinding
Exactness and the product quality of grinding, and improve the degree of automation of the grinding system.
According to an embodiment of the invention, after replacing the abrasive wheel or the switching grinding groove, to the position of the abrasive wheel
It sets and is adjusted.This method can be after replacement abrasive wheel or switching grinding groove, based on pre-recorded abrasive wheel mark as a result,
Level is set and the first reference position, is adjusted, adjusts to the use position of the abrasive wheel after replacement or the grinding groove after switching
Section is time-consuming shorter and more accurate, improves the mobility of milling apparatus and the product quality of grinding, and improve grinding
Take turns service life.
According to an embodiment of the invention, the abrasive wheel is moved along first direction, the first direction and the rotary shaft
Vertically;The plane that the detection direction of the position detection unit is constituted perpendicular to the rotary shaft and the first direction.As a result,
By moving the abrasive wheel in a first direction, it can realize the contraposition of the part and grinding groove to be ground on workbench, and should
The contraposition of the slot bottom of position detection unit and grinding groove, it is easy to operate, and abrasive wheel is avoided repeatedly caused by multi-direction movement
Error improves the accuracy and grinding accuracy of contraposition.
According to an embodiment of the invention, the grinding system further comprises grinding groove abrasion detection unit, the grinding
Slot abrasion detection unit is configured as to judge the abrasion condition of the grinding groove by the slot bottom of the observation grinding groove, benefit
After being ground with the abrasive wheel to the part to be ground, the method further includes: utilize grinding groove abrasion inspection
The abrasion condition that survey unit detects the grinding groove judges whether to need to switch according to the abrasion condition of the grinding groove
The grinding groove or the replacement abrasive wheel;After switching the grinding groove or replacing the abrasive wheel, to the abrasive wheel
Position be adjusted.The grinding groove abrasion detection unit can clearly detect the behaviour in service and abrasion of grinding groove as a result,
Situation (the case where i.e. abrasive grains fall off from alloy substrates), this method, which simply and accurately can judge whether to need replacing, grinds
Emery wheel or switching grinding groove.
According to an embodiment of the invention, the normal place through the following steps that determine: in said first direction,
The abrasive wheel is moved to the position of the outer edge of the grinding groove and the EDGE CONTACT of the sample stage, and by the grinding
The position of wheel is recorded as first position;In said first direction, first by the abrasive wheel from edge from the first position
Direction mobile X of the first direction to the separate part to be ground0, then the part to be ground is placed on the workbench,
The edge of the part to be ground exceeds the edge X of the sample stage on the direction towards the abrasive wheel0Distance;In advance
Set the amount of grinding standard value X of the part to be ground in said first direction1, by the abrasive wheel along the first direction to leaning on
The mobile X in direction of the nearly part to be ground1;The cup depth of the grinding groove in said first direction is X2, by the abrasive wheel
To close to the mobile X in the direction of the part to be ground2;By it is described be placed on the sample stage wait grind part when, in the first direction
It is upper that there is position deviation X3, it is based on the position deviation X3, the position of the abrasive wheel is adjusted.This method can be with as a result,
Will part and grinding groove exactitude position be ground, improve the accuracy of polishing, improve grinding after product quality.
According to an embodiment of the invention, the position deviation X3It is to be determined using following steps: exists to the part to be ground
Placement location on the sample stage is corrected, the predetermined position of the placement location of the part to be ground and the part to be ground it is inclined
Difference is the position deviation X3.The error that this method can treat during mill part and grinding groove contraposition as a result, is corrected, into
One step improves the accuracy of part and grinding groove contraposition to be ground, and improves the accuracy of polishing, the product matter after improving grinding
Amount.
According to an embodiment of the invention, the position of the abrasive wheel includes the position coordinates X and on the first direction
Position coordinates Z on two directions, wherein the first direction and the second direction are vertical, and the rotary shaft is along described second
Direction extends, when the position to the abrasive wheel is adjusted, second reference position and first reference position
Difference be reference position variable quantity, the reference position variable quantity include the first direction the first reference position change
Measure XmAnd the second reference position variable quantity Z in the second directionm.Thus, it is possible to be based on the first reference position variable quantity
XmAnd the second reference position variable quantity ZmThe position of abrasive wheel is adjusted.
According to an embodiment of the invention, the operation that the position to the abrasive wheel is adjusted further comprises: will
The abrasive wheel is moved at the normal place;The abrasive wheel is moved from the normal place along the first direction
XmDistance, and the abrasive wheel is moved into Z along the second direction from the normal placemDistance.Thus, it is possible to
Front and back, the variable quantity of the position when slot bottom and position detection unit of grinding groove are overlapped, to determine are adjusted based on abrasive wheel position
The variable quantity of the actual use position of abrasive wheel, also, the variable quantity of reference position and the variable quantity of actual use position have been
Exactly the same, and then can easily determine the position that uses of abrasive wheel, it is time saving and accurate.
According to an embodiment of the invention, the distance X at the edge of the edge of the part to be ground beyond the sample stage0For
6-15mm.As a result, will part and abrasive wheel be ground contraposition during, can be with X according to this distance0Directly to the position of abrasive wheel
It is adjusted, it is relatively simple and time saving.
In another aspect of this invention, the invention proposes a kind of grinding systems.According to an embodiment of the invention, described grind
Grinding system is configured as using the described in any item methods in front.The grinding system has front described in any item as a result,
Whole feature and advantage possessed by grinding method using grinding system, details are not described herein.Generally speaking, the grinding system
The production efficiency of system is higher, and the properties of product produced are good.
In still another aspect of the invention, the invention proposes a kind of grinding systems.According to an embodiment of the invention, the grinding
System includes: abrasive wheel, and the abrasive wheel has around one week grinding groove of abrasive wheel outer edge, and being configured as can edge
Rotary shaft is rotated to realize polishing, and the side of the rotary shaft has the sample stage for placing part to be ground, the grinding
System further comprises position detection unit, and the position detection unit is configured as where the slot bottom that can detect the grinding groove
Position;And position regulating unit, the position regulating unit are configured as using the described in any item methods pair in front
The position of the abrasive wheel is regulated and controled.The grinding system has described in any item the grinding using grinding system in front as a result,
Whole feature and advantage possessed by mill method, details are not described herein.Generally speaking, the production efficiency of the grinding system compared with
Height, and the properties of product produced are good.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 shows the structural schematic diagram of grinding system according to an embodiment of the invention;
Fig. 2 shows the structural schematic diagram of grinding system in accordance with another embodiment of the present invention;
Fig. 3 shows the structural schematic diagram of the grinding system of another embodiment according to the present invention;
Fig. 4 shows the structural schematic diagram of the grinding system of another embodiment according to the present invention;
Fig. 5 shows the flow chart of the grinding method according to an embodiment of the invention using grinding system;
Fig. 6 shows the flow chart of the grinding method in accordance with another embodiment of the present invention using grinding system;
Fig. 7 shows the flow chart of the grinding method using grinding system of another embodiment according to the present invention;
Fig. 8 shows the flow chart of the grinding method using grinding system of another embodiment according to the present invention;
Fig. 9 shows the flow chart of the grinding method using grinding system of another embodiment according to the present invention;
Figure 10 shows the flow chart of the grinding method using grinding system of another embodiment according to the present invention;And
Figure 11 shows the flow chart of the grinding method using grinding system of another embodiment according to the present invention.
Description of symbols:
10: abrasive wheel;20: grinding groove;21: the outer edge of grinding groove;30: rotary shaft;40: sample stage;41: support plate;
42: fixing piece;50: position detection unit;60: part to be ground;70: grinding groove abrasion detection unit.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In one aspect of the invention, the invention proposes a kind of grinding method using grinding system.This method can be with
Abrasive wheel is quickly and accurately determined after replacement abrasive wheel, switching grinding groove or abrasive wheel deform (such as inside contracting)
Use position, and then improve the mobility of milling apparatus and the product quality of grinding, and improve abrasive wheel use
Service life.
In order to make it easy to understand, the structure of grinding system according to an embodiment of the present invention is briefly described first below.
According to an embodiment of the invention, with reference to Fig. 1, which includes abrasive wheel 10, sample stage 40 and position detection unit 50,
Wherein, abrasive wheel 10 has around 10 one week grinding groove of outer edge 20 of abrasive wheel, and the rotation at 10 center of abrasive wheel is arranged in
Shaft 30, abrasive wheel 10 can be rotated along rotary shaft 30 to realize polishing;The side of rotary shaft 30 has for placing wait grind
The sample stage 40 of part (not shown), the grinding system further include position detection unit 50.It should be noted that for the ease of
Understand, abrasive wheel 10 shown in Fig. 1 is the cross section structure schematic diagram of abrasive wheel.
According to an embodiment of the invention, grinding system may further include motor (not shown), which can be
Rotary shaft 30 provides power, and rotary shaft 30 is driven to rotate, and then abrasive wheel 10 can be driven to rotate, and then treats mill part (in figure not
Show) it polishes.Specifically, one or more grinding grooves 20 can be set in the outer edge of abrasive wheel 10, such as with reference in Fig. 1
The edge of shown abrasive wheel 10 is provided with 5 grinding grooves 20, and multiple grinding grooves 20 can be arranged successively along rotary shaft 30
(being arranged successively in Z-direction out i.e. shown in Fig. 1).Abrasive wheel 10 is symmetrical structure, and symmetry axis is rotary shaft 30, more specifically
, symmetry axis is the central axes AA ' of rotary shaft 30.Specifically, abrasive wheel 10 can be disk or circular ring structure, grinding groove 20 is
For surround the abrasive wheel 10 circular ring structure, the abrasive wheel 10 during rotary-grinding, the same grinding groove 20 it is each
Use state and state of wear at position are identical.It should be noted that the grinding groove in the application is usually
Alloy substrates are wrapped in the structure of the abrasive grains such as diamond dust, and during the grinding process, the abrasive grains such as diamond dust connect with part to be ground
It touches and treats mill part and polish, alloy substrates provide support for abrasive grains.The grinding groove being previously mentioned in the application is inside contracted, is ground
Damage, deformation etc. refer to grinding groove in the long-term use, and the alloy substrates of the package abrasive grains are worn or destroy, into
And causing abrasive grains to fall off causes actual grinding effect poor, that is, actual amount of grinding is caused to be less than preset amount of grinding,
Or actual grinding amount is greater than default amount of grinding etc., therefore, in the application is referred to as inside contracting, wear, deforming for grinding groove
Deng.
Specifically, the position for the abrasive wheel 10 being previously mentioned in the application can refer in the center i.e. rotary shaft 30 of abrasive wheel 10
The position of the heart, the i.e. position of the A point with reference to shown in Fig. 1.According to an embodiment of the invention, with reference to Fig. 1, the position of abrasive wheel 10
Set including in first direction (i.e. X-direction shown in Fig. 1) position coordinates X and the second direction (side Z i.e. shown in the drawings
To) on position coordinates Z, wherein first direction and second direction are vertical, and multiple grinding grooves 20 are arranged successively in z-direction, i.e.,
Rotary shaft 30 extends along Z-direction, and during the grinding process, the rotary shaft 30 that abrasive wheel can surround in Z-direction rotates the abrasive wheel
Polishing.
According to an embodiment of the invention, the shape of sample stage 40 and setting position are not particularly limited, as long as grinding groove
20 slot bottom (such as two o'clock B and B ' mutually symmetrical on the slot bottom of grinding groove 20 shown in Fig. 1), can be placed on sample
Part (not shown) to be ground in sample platform 40 is effectively contacted and is polished.
According to an embodiment of the invention, position detection unit 50 may include ccd image sensor (CCD inspection
Survey device), which can shoot the image of object, and convert optical signal into
Electric signal.Specifically, the CCD detector is fixed at a certain position in grinding system, which has detection direction
(direction of taking pictures) and detection zone (range of taking pictures), i.e., when in the detection zone that object is located at the CCD detector, the CCD
Detector could obtain the image information of object, in other words, the position of position detection unit 50 be it is fixed, only work as grinding
When the detection zone (range of taking pictures) of wheel into the CCD detector is interior, CCD detector can obtain the slot bottom figure of abrasive wheel
Picture.
According to an embodiment of the invention, the setting position of position detection unit 50 is not particularly limited, ground as long as can detect
The position at the place of the slot bottom of slot grinding 20.Specifically, with reference to Fig. 1, abrasive wheel 10 in a first direction (i.e. X-direction) to sample
After platform 40 is mobile, slot bottom and the part (not shown) to be ground being placed on workbench 40 contact of grinding groove 20 can be made, and
Record the normal place of abrasive wheel 10.The rotary shaft 30 of abrasive wheel 10 is along second direction (i.e. Z-direction extension), position testing unit
The plane that the detection direction of member 50 can be constituted perpendicular to rotary shaft 30 and first direction (i.e. X-direction), i.e. position detection unit
50 when being CCD detector, and the detection direction (direction of taking pictures) of CCD detector is the direction perpendicular to paper.Those skilled in the art
Member is, it is understood that the detection zone into CCD detector (is taken pictures since abrasive wheel 10 needs to move along a first direction
Range) within, therefore when CCD detector is arranged, CCD detector can not influence the movement of abrasive wheel 10.That is,
The plane that the setting position of CCD detector needs and rotary shaft 30 and first direction (i.e. X-direction) are constituted, be staggered certain distance.
As a result, by moving the abrasive wheel 10 in the first direction (x-direction), it can realize the part to be ground on workbench 40 (in figure
Be not shown) and grinding groove 20 the contraposition and position detection unit 50 and grinding groove 20 slot bottom contraposition (i.e. by
The mobile abrasive wheel 10, the slot bottom of grinding groove 20 can be moved to the detection zone of position detection unit 50 on one direction (X-direction)
In domain, therefore, the image information and location information of the slot bottom of the available grinding groove 20 of position detection unit 50), operation letter
It is single, and error caused by more than 10 multi-direction movements of abrasive wheel is avoided, accuracy and the grinding for improving contraposition are accurate
Degree.
Specifically, with reference to shown in figure 1, when abrasive wheel 10 is along the X direction to the side close to position detection unit 50
When mobile, the outer edge of the abrasive wheel 10 can initially enter the detection zone of the position detection unit 50, and then the position is examined
Outer peripheral image and the position of the abrasive wheel 10 can be obtained first by surveying unit 50, and later, which can continue edge
X-direction it is mobile to the side close to position detection unit 50, until the position of the slot bottom (such as B ' point in figure) of the grinding groove
It sets and is overlapped with the inspection center of detection zone (with reference to illustrated in fig. 2), the position of abrasive wheel 10 is the abrasive wheel 10 at this time
Reference position (the first reference position or the second reference position).It should be noted that referred to herein " by the slot of grinding groove
The inspection center of bottom and position detection unit is overlapped " that is, by the detection zone of the slot bottom of grinding groove and position detection unit
The heart is overlapped.For example, the center of detection zone can taking pictures for CCD detector when position detection unit is CCD detector
The central point at interface.
According to an embodiment of the invention, (being to be moved to abrasive wheel 10 to grind shown in Fig. 2 and Fig. 3 with reference to Fig. 2 and Fig. 3
The structural schematic diagram of grinding system when the slot bottom of slot grinding and the center of position detection unit 50 are overlapped), position detection unit 50
Projection (projection i.e. on paper) in the plane that rotary shaft 30 and first direction (i.e. X-direction) are constituted can be located at work
(with reference to illustrated in fig. 3) between platform 40 and abrasive wheel 10, side of the workbench 40 far from abrasive wheel 10 can be located at (in figure not
Show), side of the abrasive wheel 10 far from workbench 40 can also be located at (with reference to illustrated in fig. 2).Be conducive to grind as a result,
Wheel 10 is moved in a first direction and is located in the detection zone of the position detection unit 50.Specifically, with reference to figure
3, when projection of the position detection unit 50 in the plane that rotary shaft 30 and first direction (i.e. X-direction) are constituted is located at workbench 40
When between abrasive wheel 10, by mobile abrasive wheel 10, it can easily enable abrasive wheel 10 close to the grinding of 40 side of workbench
The center of the detection zone of the slot bottom (B point i.e. shown in the drawings) and position detection unit 50 of slot is overlapped;Specifically, working as position
When side of the workbench 40 far from abrasive wheel 10 is arranged in detection unit 50, can first by workbench 40 along perpendicular to paper simultaneously
The direction of separate location detection unit 50 is mobile, then by abrasive wheel 10 in a first direction to close to position detection unit 50
Direction is mobile, can also enable slot bottom (i.e. shown in the drawings B of the abrasive wheel 10 close to the grinding groove of 40 side of workbench as a result,
Point) and position detection unit 50 detection zone center be overlapped;Specifically, position detection unit 50 is in rotary shaft with reference to Fig. 2
30 and first direction (i.e. X-direction) constitute plane on projection be located at side of the abrasive wheel 10 far from workbench 40, pass through shifting
Dynamic abrasive wheel 10, can easily enable slot bottom of the abrasive wheel 10 far from the grinding groove of 40 side of workbench (i.e. shown in the drawings
B ' point) and position detection unit 50 detection zone center be overlapped.
As previously mentioned, currently with grinding system grinding method that there are grinding quality is unstable, the abrasive wheel service life is shorter,
The problems such as abrasive wheel replacing construction is longer and replacement process is complicated, equipment mobility is lower.And side according to an embodiment of the present invention
Method, after having debugged amount of grinding, before being polished, use position (the i.e. grinding groove for the abrasive wheel that first record debug
The normal place of slot bottom and abrasive wheel when grinding part contact), abrasive wheel is then moved to the slot bottom of grinding groove and position is examined
The position that the inspection center of unit is overlapped is surveyed, the first reference position of abrasive wheel is recorded, then polishes.Later, abrasive wheel
Using a period of time, abrasive wheel rear or after replacing will first be used by perhaps switching grinding groove and perhaps replace after abrasive wheel
The position that (grinding groove) is moved to the slot bottom of grinding groove and the inspection center of position detection unit is overlapped, records the second of abrasive wheel
Reference position, and it is based on second reference position and the first reference position, the normal place of aforementioned abrasive wheel is adjusted, with
Redefine the position of abrasive wheel.
In other words, the abrasive wheel that this method has formerly been debugged by record uses position (obtaining normal place), and
The detection position (obtaining the first reference position) that the abrasive wheel debugged dexterously is determined using position detection unit, i.e., will grind
Emery wheel it is associated using position and detection position, using detection position come to using position to provide reference.Abrasive wheel (grinding
Slot) replacement or abrasive wheel using a period of time deform after, first will replacement after or deformed abrasive wheel (grinding groove) be moved to
The detection position (obtaining the second reference position) of abrasive wheel, based on abrasive wheel twice detect position variation, i.e., it can be inferred that
Abrasive wheel uses variable quantity of the position relative to normal place, thus, it is possible to easily and rapidly use position to abrasive wheel
It is adjusted, it can first abrasive wheel is moved at the normal place of preceding step record, is then become further according to reference position
Change amount is finely adjusted abrasive wheel, that is, can determine the actual use position of abrasive wheel.This method and mentioned-above grinding as a result,
It is compared after wheel replacement without the method after position debugging directly polishing or abrasive wheel replacement by complicated debugging process, tool
Have it is simple, fast and accurately the advantages of, this method can simplify the process of abrasive wheel replacement as a result, reduce abrasive wheel replacement when
Between, improve the mobility and production efficiency of milling apparatus, and this method can be improved grinding quality, and can be to avoid actually grinding
Caused by mill amount is excessive the problems such as abrasive wheel service life reduction.
According to an embodiment of the invention, grinding system may further include grinding groove abrasion detection unit, grinding groove mill
Damage detection unit is configured as to judge the abrasion condition of grinding groove by the slot bottom of observation grinding groove.Specifically, grinding groove is ground
Damage detection unit 70 or charge coupled device imaging sensor (CCD detector).Specifically, grinding groove abrasion detection list
The setting position of member is not particularly limited, as long as the abrasion condition of the slot bottom of grinding groove can be detected clearly.Specifically, ginseng
Fig. 4 is examined, grinding groove abrasion detection unit 70 (X-direction) can also be arranged along a first direction, and grinding groove abrasion detection unit
The slot bottom of 70 detection direction (referring to the direction arrow M shown in the drawings) face grinding groove 20.Grinding groove abrasion inspection as a result,
The picture of slot bottom of grinding groove 20 can be clearly captured by surveying unit 70, the abrasion condition of grinding groove be obtained, so as to subsequent step
The middle abrasion condition according to the grinding groove judges whether to need to switch grinding groove or replacement abrasive wheel etc..It should be noted that should
Grinding groove abrasion detection unit 70 due to facing grinding groove, which can be relatively clear
Candid photograph abrasive wheel real use state and state of wear.In other words, the side of taking pictures of grinding groove abrasion detection unit 70
To can be vertical with the direction of taking pictures of position detection unit 50.Grinding groove abrasion detection unit 70 are responsible for observation slot bottom
Abrasion condition, therefore, the position that grinding groove abrasion detection unit 70 is put are also possible to fixation, as long as available face slot
The pictorial information in bottom direction has no effect on the movement of abrasive wheel 10 in a first direction.
It should be noted that in mentioned-above Fig. 1 to Fig. 4, in order to make it easy to understand, the structure of abrasive wheel 10 is its section
Face schematic diagram.
In summary, in grinding method according to an embodiment of the present invention, position testing unit is moved to by recording abrasive wheel
The reference position of first corresponding position easily can provide reference and relative positioning, subsequent grinding groove using position for abrasive wheel
After deformation, switching grinding groove or replacement abrasive wheel, abrasive wheel first can be adjusted to reference position, be then based on the reference
The variable quantity of position easily redefines the position of abrasive wheel.Therefore, in this method, grinding groove deformation, switching grinding groove or
After person replaces abrasive wheel, without carrying out complicated contraposition and calibration process, making for abrasive wheel can be rapidly redefined
With position, and this is more accurate using position, improves the service performance of abrasive wheel.
According to an embodiment of the invention, with reference to Fig. 5 and Fig. 6, this method comprises:
S110: the slot bottom of grinding groove and part to be ground are contacted, the normal place of abrasive wheel is recorded
In this step, abrasive wheel is mobile to sample stage, and by the slot bottom of grinding groove and abrasive wheel when grinding part contact
Position, be recorded as normal place.Specifically, this method further comprises with reference to Fig. 7 and Fig. 8:
S10: abrasive wheel is moved to the outer edge of grinding groove and the position of sample stage EDGE CONTACT
In this step, abrasive wheel is moved to the position of first side and sample stage EDGE CONTACT, and the position is remembered
Record is the first position of abrasive wheel.Specifically, the shape of sample stage is not particularly limited, it can be with reference to (a) in Fig. 9, sample
Platform 40 may include support plate 41 and fixing piece 42.Specifically, part (such as oled substrate, be not shown in (a) of Fig. 9) to be ground
It can be placed between support plate 41 and fixing piece 42, fixing piece 42 can preferably fix part to be ground, and prevent part to be ground in sample
It is moved in sample platform 40.Specifically, the outer edge 21 of the edge of sample stage 40 and grinding groove 20 can be connect with reference to (a) in Fig. 9
Touching records the position of abrasive wheel 10 at this time, i.e., the position of A point shown in the drawings, i.e. first position.It should be noted that Fig. 9
Shown in X-direction be first direction, the second direction direction (Z) and first direction are vertical, perpendicular to paper in as Fig. 9
Direction.
S20: by abrasive wheel to the mobile X in the direction far from part to be ground0
In this step, first abrasive wheel is moved to the direction far from part to be ground along a first direction from above-mentioned first position
Dynamic X0, then part to be ground is placed on the workbench, also, the edge of part to be ground exceeds sample on the direction towards abrasive wheel
The edge X of sample platform0Distance.Specifically, with reference to (b) in (b) and Fig. 9 in Fig. 8, in order to guarantee grinding groove touch to
Mill part simultaneously treats mill part when being polished, and will not damage to sample stage, it is therefore desirable to make part 60 to be ground towards grinding in advance
On the direction of emery wheel 10, edge a certain distance beyond sample stage 40 (such as X0), it is subsequent again to specific amount of grinding etc. into
Row is adjusted, also, distance X0It is therefore, subsequent during adjusting amount of grinding much larger than preset amount of grinding, part 60 to be ground
On the direction towards abrasive wheel 10, always therefore edge a certain distance beyond workbench 40 it is right to avoid abrasive wheel 10
Workbench 40 causes to grind away.Specifically, the distance X at edge of the edge of part 60 to be ground beyond sample stage 400It can be 6-15mm,
Specifically, can be 10mm.It as a result, in this step, can be with X according to this distance0Position of the range directly to abrasive wheel 10
It is adjusted, then treats mill part 60 and accordingly adjusted, it is relatively simple and time saving.
S30: by abrasive wheel to close to the mobile X in the direction of part to be ground1
In this step, abrasive wheel is moved into X to the direction close to part to be ground along a first direction from above-mentioned position1。
Specifically, presetting the amount of grinding standard value X of part to be ground in a first direction1, therefore, it is necessary to by abrasive wheel along first direction
To close to the mobile X in the direction of part to be ground1。
S40: by abrasive wheel to close to the mobile X in the direction of part to be ground2
In this step, abrasive wheel is moved into X to the direction close to part to be ground along a first direction from above-mentioned position2。
Specifically, the cup depth of grinding groove 20A in the first direction (x-direction) is X with reference to (c) in Fig. 82, therefore, will grind
Wheel 10 is from above-mentioned position to close to the mobile X in the direction of part 60 to be ground2.It should be noted that above-mentioned cup depth is X2As grind
The slot bottom (the B point in such as figure) of slot grinding to grinding groove outer edge 21 vertical range.
S50: by the mobile X of abrasive wheel3, obtain the normal place of abrasive wheel
In this step, abrasive wheel is moved into X from mentioned-above position along a first direction3, obtain abrasive wheel
Normal place.Specifically, there is position when placing in a first direction when will be placed on sample stage wait grind part in preceding step
Set deviation X3, therefore, it is necessary to position deviation X3It compensates.Specifically, part to be ground is placed on sample stage in preceding step
When upper, needed to make the edge of part to be ground on the direction towards abrasive wheel beyond the edge X of sample stage0Distance, so as to wait grind
The edge of part and the outer edge of abrasive wheel just contact, and the position of part to be ground in a first direction is the predetermined of part to be ground at this time
Position.However there can be certain deviation when that will be placed on sample stage wait grind part in reality, it may be assumed that the part to be ground actually put
Edge, the distance at edge on the direction towards abrasive wheel beyond sample stage is not X0.Actually putting when grinding part,
There can be position deviation X when placing in a first direction3, that is, the actual placement of part to be ground and mentioned-above part to be ground
The distance between predetermined position.Specifically, part (such as organic light emitting display panel) to be ground can be pre-designed register guide above
Remember (Mark), and the grinding system further comprises part position detection unit to be ground, should part position detection unit be ground can be with
For CCD detector, and it is configured as available image and location information wait grind the alignment mark on part.Specifically, can be with
It predefines when be in predetermined position wait grind part, in the detection wait grind the alignment mark on part and the part position detection unit to be ground
The distance between heart (i.e. gauged distance), it is subsequent will to detect again part to be ground after grinding part and placing on the table every time
On alignment mark and should part position detection unit be ground inspection center distance (i.e. actual range), by calculating the reality
The difference of distance and gauged distance, it can determine it is mentioned-above when will be placed on sample stage wait grind part, in a first direction
On position deviation X3.Therefore, abrasive wheel is moved into X from above-mentioned position along a first direction3Distance, the position be grind
The normal place of emery wheel.Specifically, position deviation X3It can be positive value or negative value, that is, part putting on sample stage to be ground
Seated position may be biased against nearly grinding groove, it is also possible to it is remote from grinding groove, therefore, it is necessary to according to the actual situation, by abrasive wheel along
First direction, to far from part to be ground or close to the mobile X in the direction of part to be ground3。
In summary, this method can will part and grinding groove exactitude position be ground, improve the accuracy of polishing, improve
Product quality after grinding.Also, the normal place of the abrasive wheel determined in above-mentioned steps can be used as subsequent abrasive wheel deformation
Or after replacement, when using position of abrasive wheel is redefined, the benchmark that abrasive wheel position is adjusted.
S120: the inspection center of the slot bottom of grinding groove and position detection unit is overlapped, and records the first reference of abrasive wheel
Position
In this step, abrasive wheel is moved to from the normal place regulated in above-mentioned steps grinding groove slot bottom and
The position that the inspection center of position detection unit is overlapped, and the position of abrasive wheel is recorded as the first reference position.Specifically,
As previously mentioned, with reference to Fig. 1, it can be by abrasive wheel 10 from the normal place regulated in preceding step, along the X direction to by peri position
The side for setting detection unit 50 is mobile, and in moving process, the outer edge of the abrasive wheel 10 can initially enter the position detection
The detection zone of unit 50, and then the position detection unit 50 can obtain outer peripheral image and the position of the abrasive wheel 10 first
It sets, later, the side which can continue on X-direction to close position detection unit 50 is mobile, until the grinding
The center of the detection zone of the position and position detection unit 50 of the slot bottom (such as B ' point in figure) of slot, which is overlapped, (refers to Fig. 2 institute
Show), the position of abrasive wheel 10 is the first reference position of the abrasive wheel 10 at this time.This method can be accurately as a result,
The first reference position for obtaining abrasive wheel is conducive to accurately being adjusted using position to abrasive wheel in subsequent processes, mentioned
The high quality of the product of this method grinding.
S130: moving back to normal place for abrasive wheel, treats mill part and is ground
In this step, after the first reference position that abrasive wheel has been recorded by preceding step, abrasive wheel is moved back to
At normal place, abrasive wheel is treated mill part and is ground.
According to an embodiment of the invention, the abrasive wheel is during the grinding process, one part to be ground of every processing, which can be with
It is mobile from trend position detection unit, it may be assumed that the abrasive wheel one part to be ground of every grinding, so that it may it is automatic carry out to abrasive wheel position into
The operation that row is adjusted, therefore, this method can be automatic and use position calibrating abrasive wheel in time, improve grinding
Accuracy and grinding product quality, and improve the degree of automation of the grinding system.Implementation according to the present invention
Example can also carry out the operation that the position of abrasive wheel is adjusted, specifically after switching grinding groove or replacement abrasive wheel
, following steps can be entered:
S200: the operation that the position of the abrasive wheel is adjusted
In this step, one part to be ground of every grinding, after perhaps switching grinding groove or replacement abrasive wheel, to grinding
The position of wheel is adjusted.Specifically, this method further includes steps of with reference to Fig. 6
S210: the inspection center of the slot bottom of grinding groove and position detection unit is overlapped again, records the second of abrasive wheel
Reference position
In this step, the inspection center of the slot bottom of grinding groove and position detection unit is overlapped again, and by the position
Record the second reference position of abrasive wheel.Specifically, abrasive wheel long-time service may inside contract, therefore, can grind
Take turns one part to be ground of every grinding and then it is secondary by the center of the slot bottom of grinding groove and the detection zone of position detection unit be overlapped,
At this point, if the slot bottom of grinding groove is inside contracted, again by the inspection center of the slot bottom of grinding groove and position detection unit weight
The position (the second reference position) of abrasive wheel when conjunction, the first reference position compared to preceding step record are also become
Change.Specifically, abrasive wheel can also be first adjusted to the slot bottom of grinding groove and the inspection of position detection unit after replacement abrasive wheel
The position that measured center is overlapped, and the position is recorded as the second reference position.
S220: being adjusted normal place, redefines the position of abrasive wheel
In this step, based on the second reference position and first reference position recorded in preceding step, to front
The normal place of the abrasive wheel recorded in step is adjusted, to redefine the position of abrasive wheel.Specifically, can first calculate
Second reference position of the abrasive wheel recorded in preceding step and the difference of the first reference position, i.e. reference position variable quantity, so
Abrasive wheel is moved to afterwards at the normal place of the abrasive wheel recorded in preceding step, then on the basis of the normal place,
It is adjusted according to position of the reference position variable quantity to abrasive wheel, to determine the use position of final abrasive wheel.Specifically
, reference position variable quantity may include the first reference position variable quantity X in a first directionmAnd the second of second direction
Reference position variable quantity Zm.Specifically, the first reference position variable quantity XmWith positive and negative values, the second reference position variable quantity Zm?
With positive and negative values.According to an embodiment of the invention, the first reference position variable quantity XmWhen for positive value, abrasive wheel is being redefined
When using position, abrasive wheel can be moved to the direction close to part to be ground in a first direction at the normal place of aforementioned abrasive wheel
It is dynamic;As the first reference position variable quantity XmWhen for negative value, abrasive wheel can be moved to the direction far from part to be ground in a first direction
It is dynamic.Similarly, the second reference position variable quantity ZmWith positive and negative values, as the second reference position variable quantity ZmWhen for positive value, Ke Yi
It is at the normal place of aforementioned abrasive wheel that abrasive wheel is mobile to the direction far from part to be ground in second direction;When the second reference position
Variable quantity ZmWhen for negative value, can by abrasive wheel in second direction to mobile close to the direction of part to be ground.Thus, it is possible to according to ginseng
Location variation is examined easily to adjust the actual use position of abrasive wheel.
According to an embodiment of the invention, the first reference position variable quantity on the first direction determined in preceding step is Xm
When, have in a first direction with reference to the position (position of the A point i.e. in figure) of Fig. 1, the i.e. center of the rotary shaft 20 of abrasive wheel 10
Having the first reference position variable quantity is Xm, it is subsequent to redefine when using position of abrasive wheel 10, first abrasive wheel 10 can be moved
It moves to normal place, also, since grinding groove is the circular ring structure for surrounding abrasive wheel, grinding groove is rotation in use
, therefore, use state and state of wear at each position of the same grinding groove be it is identical, therefore, grinding
The variable quantity of the reference position of wheel and the variable quantity of actual use position be it is identical, can be by abrasive wheel from the normal place
X is moved along first directionmDistance, can redefine abrasive wheel 10 use position.Therefore, this method passes through position detection
The location information of any point on the slot bottom of the available grinding groove of unit, and the reference bit based on location information acquisition abrasive wheel
Set, the subsequent abrasion loss etc. that abrasive wheel can be determined based on the variation of reference position twice, so to abrasive wheel using position into
Row is accurate to be adjusted.
Specifically, for example in the X direction, after grinding groove inside contracts, such as 1 μm has been inside contracted, by the slot bottom B of grinding groove
Or after B ' and position detection unit 50 are overlapped, the first reference position variable quantity XmIt can be 1 μm, correspondingly, redefine and grind
When the position of emery wheel 10, need by abrasive wheel on the basis of normal place, to mobile 1 μm of direction close to sample stage 40 away from
From to compensate the neck-in of grinding groove.Specifically, in a second direction, the second reference position variable quantity is ZmWhen, it can will grind
Emery wheel moves Z in a second direction from normal placemDistance.Thus, it is possible to adjust front and back, grinding groove based on abrasive wheel position
Slot bottom and position detection unit be overlapped when position variable quantity, come determine abrasive wheel actual use position variable quantity,
And then can easily determine the position that uses of abrasive wheel, it is time saving and accurate.
As previously mentioned, abrasive wheel used after a period of time, it may occur that deformation, such as grinding groove inside contract, and cause
Actual amount of grinding not enough (i.e. actual grinding amount is less than normal), misses if grinding caused by the grinding groove inside contracts cannot be compensated in time
Difference, then the product amount of grinding after will lead to grinding is unstable (such as amount of grinding is less than normal), and the product quality after leading to grinding is poor.
And according to the method for the embodiment of the present invention, can the amount of grinding automatically to the product after grinding check, such as can be every
The state of grinding groove and position are confirmed before a part to be ground processing, to ensure that grinding groove appears in pre- during actual grinding
Fixed position, to guarantee the amount of grinding of part to be ground.That is one part to be ground of the every grinding of the abrasive wheel, the system can be automatically to grinding
Mill amount is corrected and compensates, perhaps when grinding groove inside contract than it is more serious need to switch grinding groove or replacement abrasive wheel when,
It can be after switching grinding groove or replacement abrasive wheel, according to the comprehensively described side that the position of grinding groove is adjusted
Method, redefine abrasive wheel uses position.The degree of automation for improving milling apparatus as a result, improves the accurate of grinding
Degree, the product quality after improving grinding.
According to an embodiment of the invention, after a period of use, this method further comprises abrasive wheel with reference to Figure 10:
S300: the abrasion condition of grinding groove abrasion detection unit detection grinding groove is utilized
It, can be by grinding groove abrasion detection unit to grinding after abrasive wheel treats mill part grinding a period of time in the step
The abrasion condition of slot grinding is checked.Specifically, as previously mentioned, grinding groove abrasion detection unit may be charge coupled device
Imaging sensor (CCD detector).Specifically, grinding groove abrasion detection unit can be and be fixed in the grinding system,
Can be it is movable, should as long as causing when grinding part broken investigation the abrasion condition that needs to detect grinding groove or production are abnormal
Grinding groove abrasion detection unit can accurately obtain the slot bottom behaviour in service (slot bottom picture) of grinding groove, such as it will be seen that
The degree that falls off of diamond dust in alloy substrates.Specifically, with reference to Fig. 4, when detecting the abrasion condition of grinding groove, grinding
Slot abrasion detection unit 70 can be set in face abrasive wheel 10, and the side far from workbench 40, as a result, grinding groove abrasion inspection
It can be clearly captured the picture of grinding groove slot bottom when surveying unit 70 at this location, obtain the abrasion condition of grinding groove.
Specifically, the abrasive wheel is in the long-term use, the quantity for the part to be ground that grinding groove is ground is in certain numerical value
(such as at 500), which would generally reach the limit in service life, therefore, it is possible to directly ground according to the grinding groove
Part to be ground quantity or grinding groove using time (such as 1 month) etc., judgement needs replacing abrasive wheel or switching grinding
Slot.Specifically, can tentatively judge that the grinding groove reaches lifetime limitation after grinding groove grinds a certain number of parts to be ground,
Then grinding groove abrasion detection unit, the accurate actual wear situation for obtaining grinding groove are recycled, and then may determine whether more
Change abrasive wheel or switching grinding groove.
S200: enter the operation that the position of abrasive wheel is adjusted
It in this step, can according to the abrasion condition of the grinding groove of mentioned-above grinding groove abrasion detection unit detection
To judge whether grinding groove can continue to use, if cannot be used continuously, grinding groove or replacement abrasive wheel can be switched, cut
It changes after grinding groove or replacement abrasive wheel, the method that can be adjusted according to the mentioned-above position to abrasive wheel, to grinding
The position of emery wheel is adjusted.
In summary, this method can actual use situation to grinding groove and abrasion condition detect, Ke Yigen
Abrasion condition according to inspection etc. switches grinding groove or replacement abrasive wheel, more preferably to ensure stable grinding quality.As a result, should
Method improves the accuracy of grinding, the product quality after improving grinding.
As previously mentioned, generally existing replacing construction is longer after replacing at present to abrasive wheel, initial stage grinding quality is poor
The problems such as.It is described in front to treat the behaviour that mill part is ground using abrasive wheel according to an embodiment of the invention, with reference to Figure 11
After work, this method be may further include:
S400: replacement abrasive wheel
In this step, replace abrasive wheel, replace abrasive wheel after, can enter the mentioned-above position to abrasive wheel into
The operation that row is adjusted.As a result, this method can after replacing abrasive wheel, based on pre-recorded abrasive wheel normal place and
First reference position, to being adjusted using position for the abrasive wheel after replacement, adjusting is time-consuming shorter and more accurate, improves
The mobility of milling apparatus and the product quality of grinding, and improve abrasive wheel service life.
According to an embodiment of the invention, mentioned-above abrasive wheel can be aobvious to liquid crystal display panel and organic light emission
Show the abrasive wheel that panel is ground.The abrasive wheel can preferably grind display panel as a result, improve display surface
The product quality of plate.
In summary, the grinding method according to an embodiment of the present invention using grinding system, can replacement abrasive wheel or
Person's abrasive wheel deform quickly and accurately determine abrasive wheel after (such as inside contracting) use position, and then improve grinding
The mobility of equipment and the product quality of grinding, and improve abrasive wheel service life.
In another aspect of this invention, the invention proposes a kind of grinding systems.According to an embodiment of the invention, the grinding
System can be ground using the described in any item methods in front.The grinding system has the described in any item benefits in front as a result,
Whole feature and advantage possessed by grinding method with grinding system, details are not described herein.Generally speaking, the grinding system
Production efficiency it is higher, and produce properties of product it is good.
In still another aspect of the invention, the invention proposes a kind of grinding systems.According to an embodiment of the invention, the grinding
System includes: abrasive wheel, sample stage and position regulating unit.Wherein, abrasive wheel has around abrasive wheel outer edge one week
Grinding groove, abrasive wheel and grinding groove can be rotated along rotary shaft to realize polishing, and the side of rotary shaft has for placing
The sample stage of part to be ground, the grinding system further comprise position detection unit, and the position detection unit is configured as can
The position where the slot bottom of the grinding groove is detected, position regulating unit can be using the described in any item methods in front to abrasive wheel
Position regulated and controled.The grinding system has that front is described in any item is had using the grinding method of grinding system as a result,
The whole features and advantage having, details are not described herein.Generally speaking, the production efficiency of the grinding system is higher, and produce
Properties of product are good.
In the description of the present invention, the orientation or positional relationship of the instructions such as term "outside", "upper", "lower" is based on attached drawing institute
The orientation or positional relationship shown is merely for convenience of the description present invention rather than requires the present invention that must be constructed with specific orientation
And operation, therefore be not considered as limiting the invention.
In the description of this specification, the description of reference term " one embodiment ", " another embodiment " etc. means to tie
The embodiment particular features, structures, materials, or characteristics described are closed to be included at least one embodiment of the present invention.At this
In specification, the schematic representation of the above terms does not necessarily have to refer to the same embodiment or example.Moreover, the tool of description
Body characteristics, structure, material or feature may be combined in any suitable manner in any one or more of the embodiments or examples.This
Outside, without conflicting with each other, those skilled in the art by different embodiments described in this specification or can show
The feature of example and different embodiments or examples is combined.In addition, it is necessary to illustrate, in this specification, term
" first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicate meaning
The quantity of the technical characteristic shown.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, modifies, replacement and variant.
Claims (12)
1. a kind of grinding method using grinding system, which is characterized in that the grinding system includes abrasive wheel, the abrasive wheel
With circular one week grinding groove of abrasive wheel outer edge, and it is configured as to be rotated along rotary shaft to realize polishing,
The side of the rotary shaft has the sample stage for placing part to be ground, and the grinding system further comprises position testing unit
Member, the position detection unit are configured as can detect the position where the slot bottom of the grinding groove, which comprises
The abrasive wheel is mobile to the sample stage, and by the slot bottom of the grinding groove and it is described when grinding part contact described in grind
The position of emery wheel, is recorded as normal place;
The abrasive wheel is mobile to the position detection unit, and by the inspection of the slot bottom of the grinding groove and position detection unit
The position of measured center abrasive wheel when being overlapped, is recorded as the first reference position;
The abrasive wheel is moved back at the normal place, using the abrasive wheel by preset amount of grinding to the part to be ground
It is ground;And
The position of the abrasive wheel is adjusted: it is again that the abrasive wheel is mobile to the position detection unit, and by institute
The position of the abrasive wheel when inspection center of the slot bottom and the position detection unit of stating grinding groove is overlapped is recorded as the
Two reference positions, and it is based on second reference position and first reference position, the normal place is adjusted, with
Redefine the position of the abrasive wheel.
2. the method according to claim 1, wherein being ground using the abrasive wheel to part to be ground described in one
After mill, the position of the abrasive wheel is adjusted.
3. right the method according to claim 1, wherein after replacing the abrasive wheel or the switching grinding groove
The position of the abrasive wheel is adjusted.
4. the method according to claim 1, wherein the abrasive wheel is moved along first direction, the first party
To vertical with the rotary shaft;
The plane that the detection direction of the position detection unit is constituted perpendicular to the rotary shaft and the first direction.
5. according to the method described in claim 4, it is characterized in that, the grinding system further comprises grinding groove abrasion detection
Unit, the grinding groove abrasion detection unit are configured as to judge the grinding groove by the slot bottom of the observation grinding groove
Abrasion condition,
After being ground using the abrasive wheel to the part to be ground, the method further includes:
The abrasion condition of the grinding groove is detected using the grinding groove abrasion detection unit,
According to the abrasion condition of the grinding groove, judge whether to need to switch the grinding groove or the replacement abrasive wheel;
After switching the grinding groove or replacing the abrasive wheel, the position of the abrasive wheel is adjusted.
6. according to the method described in claim 4, it is characterized in that, the normal place through the following steps that determine:
The abrasive wheel is moved to the position of the outer edge of the grinding groove and the EDGE CONTACT of the sample stage, and will be described
The position of abrasive wheel is recorded as first position;
In said first direction, first by the abrasive wheel from the first position along the first direction to far from it is described to
Grind the mobile X in direction of part0, then the part to be ground is placed on the workbench, the edge of the part to be ground is towards institute
State the edge X for exceeding the sample stage on the direction of abrasive wheel0Distance;
Preset the amount of grinding standard value X of the part to be ground in said first direction1, by the abrasive wheel along described first
Direction is to close to the mobile X in the direction of the part to be ground1;
The cup depth of the grinding groove in said first direction is X2, by the abrasive wheel to the side close to the part to be ground
To mobile X2;
By it is described be placed on the sample stage wait grind part when, in said first direction have position deviation X3, it is based on institute's rheme
Set deviation X3, the position of the abrasive wheel is adjusted.
7. according to the method described in claim 6, it is characterized in that, the position deviation X3It is to be determined using following steps:
Placement location of the part to be ground on the sample stage is corrected, the placement location of the part to be ground and it is described to
The deviation for grinding the predetermined position of part is the position deviation X3。
8. according to the method described in claim 4, it is characterized in that, the position of the abrasive wheel includes on the first direction
Position coordinates Z on position coordinates X and second direction, wherein the first direction and the second direction are vertical, the rotation
Axis extends along the second direction, when the position to the abrasive wheel is adjusted, second reference position and described
The difference of first reference position is reference position variable quantity, and the reference position variable quantity includes the first of the first direction
Reference position variable quantity XmAnd the second reference position variable quantity Z in the second directionm。
9. according to the method described in claim 8, it is characterized in that, the position to the abrasive wheel is adjusted further
Include:
The abrasive wheel is moved at the normal place;
The abrasive wheel is moved into X along the first direction from the normal placemDistance, and by the abrasive wheel from
Z is moved along the second direction at the normal placemDistance.
10. according to the method described in claim 6, it is characterized in that, the edge of the part to be ground exceeds the institute of the sample stage
State the distance X at edge0For 6-15mm.
11. a kind of grinding system, which is characterized in that the grinding system is configured as using any one of claim 1-10 institute
The method stated.
12. a kind of grinding system characterized by comprising abrasive wheel, the abrasive wheel have around the abrasive wheel outer edge
One week grinding groove, and be configured as to be rotated along rotary shaft to realize polishing, the side of the rotary shaft, which has, to be used for
The sample stage of part to be ground is placed, the grinding system further comprises position detection unit, and the position detection unit is configured
The position where slot bottom to can detect the grinding groove;And
Position regulating unit, the position regulating unit are configured as using the described in any item methods pair of claim 1-10
The position of the abrasive wheel is regulated and controled.
Priority Applications (2)
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CN201910006892.9A CN109590893B (en) | 2019-01-04 | 2019-01-04 | Grinding method using grinding system and grinding system |
US16/551,845 US20200215656A1 (en) | 2019-01-04 | 2019-08-27 | Grinding method using grinding system and grinding device |
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CN201910006892.9A CN109590893B (en) | 2019-01-04 | 2019-01-04 | Grinding method using grinding system and grinding system |
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CN110281101A (en) * | 2019-07-23 | 2019-09-27 | 西安奕斯伟硅片技术有限公司 | A kind of edge grinding device and method |
CN110653719A (en) * | 2019-10-08 | 2020-01-07 | 彩虹(合肥)液晶玻璃有限公司 | Polishing apparatus and polishing line |
CN111037458A (en) * | 2019-12-17 | 2020-04-21 | 西安奕斯伟硅片技术有限公司 | Monitoring device and silicon wafer processing device |
CN113211235A (en) * | 2021-05-10 | 2021-08-06 | 山西光兴光电科技有限公司 | Polishing apparatus and polishing method |
CN114211328A (en) * | 2021-12-09 | 2022-03-22 | 技感半导体设备(南通)有限公司 | Grinding spindle coordinate measuring method |
CN115431130A (en) * | 2022-08-25 | 2022-12-06 | 山西光兴光电科技有限公司 | Correcting device for glass grinding equipment and glass grinding equipment |
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Also Published As
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US20200215656A1 (en) | 2020-07-09 |
CN109590893B (en) | 2021-01-26 |
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