CN109540798A - A kind of double turntable mounting structures and the micro- Scan Architecture with the mounting structure - Google Patents
A kind of double turntable mounting structures and the micro- Scan Architecture with the mounting structure Download PDFInfo
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- CN109540798A CN109540798A CN201910050692.3A CN201910050692A CN109540798A CN 109540798 A CN109540798 A CN 109540798A CN 201910050692 A CN201910050692 A CN 201910050692A CN 109540798 A CN109540798 A CN 109540798A
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- Prior art keywords
- turntable
- hole
- micro
- slot
- double
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
- G01N2201/024—Modular construction
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- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Friction Gearing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A kind of double turntable mounting structures of the present invention and the micro- Scan Architecture with the mounting structure belong to micrometering technical field；The structure includes the first turntable and the second turntable；First turntable is provided with through slot along radial direction, and the second turntable is provided with spiral-shaped through slot, and the combination of the first turntable through slot and the second turntable through slot forms light hole；Second turntable is rotated relative to the first turntable, can change radial light angle；Second turntable and the first turntable unitary rotation, can change axial light angle；The micro- Scan Architecture of double rotating disc types of the invention, for the special construction of ellipsoid indirect illumination micro-measurement apparatus, a kind of sweep mechanism that can be placed in inside micro-measurement apparatus is provided, the scanning range and axial 360 degree of scanning range of radial 30 to 120 degree are realized.
Description
The application is the divisional application of application for a patent for invention " double micro- Scan Architectures of rotating disc type ".
The original bill applying date: 2017-01-17.
Original bill application number: 2017100361060.
Original bill denomination of invention: double micro- Scan Architectures of rotating disc type.
Technical field
A kind of double turntable mounting structures of the present invention and the micro- Scan Architecture with the mounting structure belong to micrometering skill
Art field.
Background technique
Based on the micro-measurement apparatus of ellipsoidal reflector illumination, using the ellipsoidal reflector of large-numerical aperture, and ellipsoid
The over focus of reflecting mirror is overlapped with the focus of illumination objective lens, lighting source provided herein, and laboratory sample is placed at perifocus
Obtain before to backward large angle illumination.Using ellipsoidal reflector illumination obtain before to backward large angle illumination, can
Efficiently against the deficiency that microscopic system resolving power is limited by numerical aperture, the transverse resolution and axial direction of system are increased substantially
Resolving power has broad application prospects.
In micrometering technical field, the technological means for scanning illumination is widely adopted, ellipsoid indirect illumination micrometering
Device is no exception.Moreover, important component in scanning means or ellipsoid indirect illumination micro-measurement apparatus.Due to
The particularity of ellipsoidal reflector lighting method needs for scanning means to be placed in the inside of micro-measurement apparatus, therefore traditional vibration
The scanning mode outside micro-measurement apparatus, which is arranged in, in mirror or tilting mirror etc. not can be used directly ellipsoid indirect illumination micrometering
In device.
Summary of the invention
Ellipsoid indirect illumination micro-measurement apparatus is not can be used directly in order to solve traditional galvanometer or rotating mirror scanning structure
The problems in, the invention discloses a kind of double micro- Scan Architectures of rotating disc type, for ellipsoid indirect illumination micro-measurement apparatus
Special construction provides a kind of sweep mechanism that can be placed in inside micro-measurement apparatus, realizes sweeping for radial 30 to 120 degree
Retouch range and axial 360 degree of scanning range.
The object of the present invention is achieved like this:
Double micro- Scan Architectures of rotating disc type, including the first turntable and the second turntable；
First turntable is provided with through slot along radial direction, and second turntable is provided with spiral-shaped through slot, the spiral shape
Shape rotates a circle around the center of circle, and beginning and terminal are located at the combination of the first turntable through slot and the second turntable through slot on Radius, shape
At light hole；
First turntable and the second turntable are made by magnetic material, and synonyms pole is oppositely arranged；First turntable and
The opposite direction of two turntables is provided with annular groove, and inside grooves are equipped with ball, and the relative position of the ball is fixed by bracket；
Using the principle that there is a natural attraction between the sexes, ball is clamped among the first turntable and the second turntable；
Second turntable is rotated relative to the first turntable, can change radial light angle；Second turntable and the first turntable integrally turn
It is dynamic, axial light angle can be changed.
The above-mentioned micro- Scan Architecture of double rotating disc types, the second turntable are rotated relative to the first turntable, the second turntable and first turn
Disk unitary rotation, by being realized with flowering structure:
First turntable and the second turntable are placed up and down, and the through-hole that section is inverted trapezoidal is provided among the first turntable, is led to
Internal surface of hole is frosting, polygonal through hole is provided among the second turntable, there are two stretch the setting of the second turntable bottom symmetrical
Contracting bar, telescopic rod bottom install motor, the shaft connecting steering mechanism of the motor, and the lower end of the rotating mechanism is prism
Body, cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is rotary table, matches with the through-hole of the first turntable, the circle
The side of platform is frosting；
When telescopic rod retracts, rotating mechanism is inserted into simultaneously in the through-hole of the first turntable and the second turntable, using under rotating mechanism
End and the matching relationship of the second turntable through-hole and the frictional force of rotating mechanism upper end and the first turntable through-hole inner surface, are realized
The first turntable and the second turntable is driven to rotate jointly；
When telescopic rod stretches out, rotating mechanism upper end is mutually separated with the first turntable through-hole, rotating mechanism and the first turntable without effect,
It realizes and only drives the rotation of the second turntable.
The utility model has the advantages that
The first, the present invention utilizes through slot position on the first turntable and the second turntable by the first turntable of rotation and the second turntable
It combines to change light passing hole site, and then realizes scanning, provide a kind of completely new scanning technique means.
The second, the present invention and core element only include the first turntable and the second turntable, and number of elements is few, at low cost, adjustment
Simply.
Third, in the micro- Scan Architecture of rotating disc type of the invention double, no matter the first turntable or the second turntable, size it is equal
It is suitable with scanning area, therefore can be realized miniaturization, it is placed in inside micro-measurement apparatus, can be realized radial 30 to 120 and spend
With axial 360 degree of scanning range.
4th, in the micro- Scan Architecture of double rotating disc types of the invention, the first turntable and the second turntable pass through motor control
Rotation, parameter can accurately be controlled using computer, light hole high accuracy positioning be realized, so that it is micro- to improve ellipsoid indirect illumination
The resolution ratio of measuring device.
Detailed description of the invention
Fig. 1 is position signal of the double micro- Scan Architectures of rotating disc type of the invention in ellipsoid indirect illumination micro-measurement apparatus
Figure.
Fig. 2 is the structural schematic diagram of the first turntable.
Fig. 3 is the structural schematic diagram of the second turntable.
Fig. 4 is the structural schematic diagram after the first turntable and the second disk combination.
Fig. 5 is the assembling schematic diagram of the first turntable, the second turntable, ball and bracket.
Fig. 6 is the structural schematic diagram of bracket.
Fig. 7 is the matching relationship schematic diagram of rotating mechanism and the first turntable and the second turntable when telescopic rod retracts.
Fig. 8 is the matching relationship schematic diagram of rotating mechanism and the first turntable and the second turntable when telescopic rod stretches out.
In figure: 1 first turntable, 2 second turntables, 3 balls, 4 brackets, 5 telescopic rods, 6 motors, 7 rotating mechanisms.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The micro- Scan Architecture of double rotating disc types of the present embodiment, the position in entire ellipsoid indirect illumination micro-measurement apparatus, such as
Shown in Fig. 1.
Double micro- Scan Architectures of rotating disc type, including the first turntable 1 and the second turntable 2；
First turntable 1 is provided with through slot along radial direction, as shown in Figure 2；Second turntable 2 is provided with spiral-shaped lead to
Slot, it is described it is spiral-shaped rotate a circle around the center of circle, beginning and terminal are located at on Radius, as shown in Figure 3；First turntable 1 is logical
The combination of 2 through slot of slot and the second turntable forms light hole, as shown in Figure 4；
First turntable 1 and the second turntable 2 are made by magnetic material, and synonyms pole is oppositely arranged；First turntable, 1 He
The opposite direction of second turntable 2 is provided with annular groove, and inside grooves are equipped with ball 3, and the relative position of the ball 3 is by bracket
4 is fixed；Using the principle that there is a natural attraction between the sexes, ball 3 is clamped among the first turntable 1 and the second turntable 2；First turntable 1, second
The assembling schematic diagram of turntable 2, ball 3 and bracket 4 is as shown in figure 5, the structural schematic diagram of bracket 4 is as shown in Figure 6；
Second turntable 2 is rotated relative to the first turntable 1, can change radial light angle；Second turntable 2 and the first turntable 1 are whole
Body rotation, can change axial light angle.
Specific embodiment two
The micro- Scan Architecture of double rotating disc types of the present embodiment further limits the second turntable 2 on the basis of specific embodiment one
It is rotated relative to the first turntable 1,1 unitary rotation of the second turntable 2 and the first turntable, by being realized with flowering structure:
First turntable 1 and the second about 2 turntable are placed, and the through-hole that section is inverted trapezoidal is provided among the first turntable 1,
Through-hole inner surface is frosting, and polygonal through hole is provided among the second turntable 2, and 2 bottom symmetrical of the second turntable is provided with two
Motor 6, the shaft connecting steering mechanism 7 of the motor 6, under the rotating mechanism 7 are installed in a telescopic rod 5,5 bottom of telescopic rod
End is prism, and cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is rotary table, is matched with the through-hole of the first turntable 1
It closes, the side of the rotary table is frosting；
When telescopic rod 5 retracts, as shown in fig. 7, rotating mechanism 7 is inserted into simultaneously in the through-hole of the first turntable 1 and the second turntable 2,
Using in the matching relationship and 7 upper end of rotating mechanism and 1 through-hole of the first turntable of 7 lower end of rotating mechanism and 2 through-hole of the second turntable
The frictional force on surface is realized and the first turntable 1 and the second turntable 2 is driven to rotate jointly；
When telescopic rod 5 stretches out, as shown in figure 8,7 upper end of rotating mechanism is mutually separated with 1 through-hole of the first turntable, rotating mechanism 7 and
First turntable 1 is realized without effect and only drives the rotation of the second turntable 2.
It should be noted that when telescopic rod 5 stretches out in the case where the rotation of the second turntable 2, it is ensured that the first turntable 1 is motionless,
It can be realized in such a way that damping is set on the first turntable 1, as long as resistance is greater than the force of rolling friction of ball, the first turntable
1 can be realized and not rotate.Such technical solution very simple to those skilled in the art, the selection of parameter can also be with
It is obtained by limited trials, in this application just without being described in detail.
It should also be noted that, telescopic rod 5, motor 6 and rotating mechanism 7 only occupy intermediate region, scanning is not interfered with
Region.
Claims (4)
1. a kind of double turntable mounting structures, which is characterized in that including the first turntable (1) and the second turntable (2)；First turntable
(1) it is placed up and down with the second turntable (2), the through-hole that section is inverted trapezoidal, through-hole inner surface is provided among the first turntable (1)
For frosting, polygonal through hole is provided among the second turntable (2), there are two flexible for the setting of the second turntable (2) bottom symmetrical
Motor (6) are installed in bar (5), telescopic rod (5) bottom, the shaft connecting steering mechanism (7) of the motor (6), the rotating mechanism
(7) lower end is prism, and cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is rotary table, with the first turntable (1)
Through-hole matches, and the side of the rotary table is frosting.
2. a kind of double turntable mounting structures according to claim 1, which is characterized in that for the micro- scanning knot of double rotating disc types
Structure.
3. a kind of double turntable mounting structures according to claim 2, which is characterized in that sweep double rotating disc types are micro-
It retouches in structure,
First turntable (1) is provided with through slot along radial direction, and second turntable (2) is provided with spiral-shaped through slot, described
Spiral-shaped to rotate a circle around the center of circle, beginning and terminal are located at on Radius, the first turntable (1) through slot and the second turntable (2)
The combination of through slot forms light hole；
First turntable (1) and the second turntable (2) are made by magnetic material, and synonyms pole is oppositely arranged；First turn
The opposite direction of disk (1) and the second turntable (2) is provided with annular groove, and inside grooves are equipped with ball (3), the ball (3)
Relative position is fixed by bracket (4)；Using the principle that there is a natural attraction between the sexes, ball (3) is clamped in the first turntable (1) and the second turntable
(2) intermediate；
Second turntable (2) is rotated relative to the first turntable (1), can change radial light angle；Second turntable (2) and first turn
Disk (1) unitary rotation, can change axial light angle.
4. a kind of micro- Scan Architecture with double turntable mounting structures, which is characterized in that including the first turntable (1) and second turn
Disk (2)；
First turntable (1) is provided with through slot along radial direction, and second turntable (2) is provided with spiral-shaped through slot, described
Spiral-shaped to rotate a circle around the center of circle, beginning and terminal are located at on Radius, the first turntable (1) through slot and the second turntable (2)
The combination of through slot forms light hole；
First turntable (1) and the second turntable (2) are made by magnetic material, and synonyms pole is oppositely arranged；First turn
The opposite direction of disk (1) and the second turntable (2) is provided with annular groove, and inside grooves are equipped with ball (3), the ball (3)
Relative position is fixed by bracket (4)；Using the principle that there is a natural attraction between the sexes, ball (3) is clamped in the first turntable (1) and the second turntable
(2) intermediate；
Second turntable (2) is rotated relative to the first turntable (1), can change radial light angle；Second turntable (2) and first turn
Disk (1) unitary rotation, can change axial light angle；
Second turntable (2) is rotated relative to the first turntable (1), the second turntable (2) and the first turntable (1) unitary rotation, by with
Flowering structure is realized:
First turntable (1) and the second turntable (2) are placed up and down, and it is inverted trapezoidal that section is provided among the first turntable (1)
Through-hole, through-hole inner surface is frosting, is provided with polygonal through hole, the second turntable (2) bottom pair among the second turntable (2)
Claim setting there are two telescopic rod (5), motor (6) are installed in telescopic rod (5) bottom, the shaft connecting steering mechanism of the motor (6)
(7), the lower end of the rotating mechanism (7) is prism, and cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is circle
Platform is matched with the through-hole of the first turntable (1), and the side of the rotary table is frosting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910050692.3A CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910050692.3A CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201710036106.0A CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710036106.0A Division CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109540798A true CN109540798A (en) | 2019-03-29 |
| CN109540798B CN109540798B (en) | 2020-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050692.3A Expired - Fee Related CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201910050691.9A Expired - Fee Related CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
| CN201710036106.0A Expired - Fee Related CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050691.9A Expired - Fee Related CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
| CN201710036106.0A Expired - Fee Related CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
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| Country | Link |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918419B (en) * | 2018-08-20 | 2020-12-18 | 长春理工大学 | Low-irradiance fine adjustment device for solar simulator |
| CN110987468A (en) * | 2019-11-27 | 2020-04-10 | 无为县金顺机动车检测有限公司 | Vehicle chassis central region scanning detector |
| CN112730258A (en) * | 2021-02-03 | 2021-04-30 | 四川广目科技有限公司 | Workpiece thread appearance defect scanning system based on 3D laser scanning and scanning device thereof |
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- 2017-01-17 CN CN201910050692.3A patent/CN109540798B/en not_active Expired - Fee Related
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- 2017-01-17 CN CN201710036106.0A patent/CN106802276B/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| CN109580486A (en) | 2019-04-05 |
| CN109580486B (en) | 2021-01-22 |
| CN106802276A (en) | 2017-06-06 |
| CN106802276B (en) | 2019-04-05 |
| CN109540798B (en) | 2020-12-29 |
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