CN106802276A - Double micro- Scan Architectures of rotating disc type - Google Patents
Double micro- Scan Architectures of rotating disc type Download PDFInfo
- Publication number
- CN106802276A CN106802276A CN201710036106.0A CN201710036106A CN106802276A CN 106802276 A CN106802276 A CN 106802276A CN 201710036106 A CN201710036106 A CN 201710036106A CN 106802276 A CN106802276 A CN 106802276A
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- Prior art keywords
- rotating disk
- rotating
- hole
- micro
- disk
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
- G01N2201/024—Modular construction
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Friction Gearing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Double micro- Scan Architectures of rotating disc type of the invention belong to micrometering technical field, and in particular to the sweep mechanism in a kind of indirect illumination micro-measurement apparatus for ellipsoid；The structure includes the first rotating disk and the second rotating disk；First rotating disk is provided with groove along radial direction, and the second rotating disk is provided with spiral-shaped groove, and the combination of the first rotating disk groove and the second rotating disk groove forms light hole；Second rotating disk is rotated relative to the first rotating disk, can change radial direction light angle；Second rotating disk and the first rotating disk unitary rotation, can change axial light angle；The micro- Scan Architecture of double rotating disc types of the invention, for the special construction of ellipsoid indirect illumination micro-measurement apparatus, there is provided a kind of sweep mechanism that can be placed in inside micro-measurement apparatus, the radially sweep limits of 30 to 120 degree and axially 360 degree of sweep limits are realized.
Description
Technical field
Double micro- Scan Architectures of rotating disc type of the invention belong to micrometering technical field, and in particular to one kind is anti-for ellipsoid
The sweep mechanism penetrated in illumination micro-measurement apparatus.
Background technology
Based on the micro-measurement apparatus of ellipsoidal reflector illumination, using the ellipsoidal reflector of large-numerical aperture, and ellipsoid
The over focus of speculum is overlapped with the focus of illumination objective lens, lighting source provided herein, and laboratory sample is placed at perifocus, you can
Obtain before to backward large angle illumination.Using ellipsoidal reflector illumination obtain before to backward large angle illumination, can
Efficiently against the deficiency that microscopic system resolving power is limited by numerical aperture, transverse resolution and the axial direction of system are increased substantially
Resolving power, has broad application prospects.
In micrometering technical field, the technological means for scanning illumination is widely adopted, ellipsoid indirect illumination micrometering
Device is no exception.Moreover, important component in scanning means or ellipsoid indirect illumination micro-measurement apparatus.Due to
The particularity of ellipsoidal reflector lighting system traditional is shaken, it is necessary to scanning means to be placed in the inside of micro-measurement apparatus
The scan mode that mirror or tilting mirror etc. are arranged on outside micro-measurement apparatus cannot be applied directly to ellipsoid indirect illumination micrometering
In device.
The content of the invention
Ellipsoid indirect illumination micro-measurement apparatus cannot be applied directly in order to solve traditional galvanometer or rotating mirror scanning structure
In problem, the invention discloses a kind of pair of micro- Scan Architecture of rotating disc type, for ellipsoid indirect illumination micro-measurement apparatus
A kind of special construction, there is provided sweep mechanism that can be placed in inside micro-measurement apparatus, realizes sweeping for the degree of radial direction 30 to 120
Retouch scope and axially 360 degree of sweep limits.
The object of the present invention is achieved like this：
Double micro- Scan Architectures of rotating disc type, including the first rotating disk and the second rotating disk；
First rotating disk is provided with groove along radial direction, and second rotating disk is provided with spiral-shaped groove, the spiral shell
Rotation shape is rotated a circle around the center of circle, and top and terminal are located at on Radius, the group of the first rotating disk groove and the second rotating disk groove
Close, form light hole；
First rotating disk and the second rotating disk are made by magnetic material, and synonyms pole is oppositely arranged；First rotating disk
With the second rotating disk to annular groove is provided with, inside grooves are provided with ball, and the relative position of the ball is by support
It is fixed；Using the principle that there is a natural attraction between the sexes, ball is clamped in the middle of the first rotating disk and the second rotating disk；
Second rotating disk is rotated relative to the first rotating disk, can change radial direction light angle；Second rotating disk and the first rotating disk are whole
Body is rotated, and can change axial light angle.
The above-mentioned pair of micro- Scan Architecture of rotating disc type, the second rotating disk is rotated relative to the first rotating disk, the second rotating disk and first turn
Disk unitary rotation, is realized by following structure：
First rotating disk and the second rotating disk are placed up and down, have section leading to for inverted trapezoidal in the first rotating disk middle setting
Hole, through-hole inner surface is frosting, has polygonal through hole in the second rotating disk middle setting, and the second rotating disk bottom symmetrical is provided with two
Individual expansion link, expansion link bottom installation motor, the rotating shaft connecting steering mechanism of the motor, the lower end of the rotating mechanism is rib
Cylinder, cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is round platform, and the through hole with the first rotating disk is engaged, described
The side of round platform is frosting；
When expansion link is retracted, rotating mechanism is inserted in the through hole of the first rotating disk and the second rotating disk simultaneously, using rotating machine
The matching relationship of structure lower end and the second rotating disk through hole, and rotating mechanism upper end and the first rotating disk through-hole inner surface frictional force,
Realize driving the first rotating disk and the second rotating disk to rotate jointly；
When expansion link stretches out, rotating mechanism upper end and the first rotating disk through hole are separated, rotating mechanism and the first rotating disk without
Effect, realizes only driving the second rotating disk to rotate.
Beneficial effect：
Firstth, the present invention passes through to rotate the first rotating disk and the second rotating disk, using groove position on the first rotating disk and the second rotating disk
The combination put changes thang-kng hole site, and then realizes scanning, there is provided a kind of brand-new scanning technique means.
Secondth, the present invention and core parts only include the first rotating disk and the second rotating disk, and number of elements is few, and low cost is debug
Simply.
3rd, in the micro- Scan Architecture of rotating disc type of the invention double, no matter the first rotating disk or the second rotating disk, its size is equal
It is suitable with scanning area, therefore, it is possible to realize miniaturization, it is placed in inside micro-measurement apparatus, radially 30 to 120 degree can be realized
Sweep limits with axially 360 degree.
4th, in the micro- Scan Architecture of double rotating disc types of the invention, the first rotating disk and the second rotating disk pass through motor control
Rotation, parameter can utilize computer precise control, light hole high accuracy positioning be realized, so that it is micro- to improve ellipsoid indirect illumination
The resolution ratio of measurement apparatus.
Brief description of the drawings
Fig. 1 is that position of the double micro- Scan Architectures of rotating disc type of the invention in ellipsoid indirect illumination micro-measurement apparatus is illustrated
Figure.
Fig. 2 is the structural representation of the first rotating disk.
Fig. 3 is the structural representation of the second rotating disk.
Fig. 4 is the structural representation after the first rotating disk and the second disk combination.
Fig. 5 is the assembling schematic diagram of the first rotating disk, the second rotating disk, ball and support.
Fig. 6 is the structural representation of support.
Fig. 7 is the matching relationship schematic diagram of rotating mechanism and the first rotating disk and the second rotating disk when expansion link is retracted.
Fig. 8 is the matching relationship schematic diagram of rotating mechanism and the first rotating disk and the second rotating disk when expansion link stretches out.
In figure：1 first rotating disk, 2 second rotating disks, 3 balls, 4 supports, 5 expansion links, 6 motors, 7 rotating mechanisms.
Specific embodiment
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The micro- Scan Architecture of double rotating disc types of the present embodiment, the position in whole ellipsoid indirect illumination micro-measurement apparatus
Put, as shown in Figure 1.
This pair of micro- Scan Architecture of rotating disc type, including the first rotating disk 1 and the second rotating disk 2；
First rotating disk 1 is provided with groove along radial direction, as shown in Figure 2；Second rotating disk 2 is provided with spiral-shaped
Groove, it is described it is spiral-shaped rotated a circle around the center of circle, top and terminal are located at on Radius, as shown in Figure 3；First rotating disk 1
The combination of groove and the groove of the second rotating disk 2, forms light hole, as shown in Figure 4；
The rotating disk 2 of first rotating disk 1 and second is made by magnetic material, and synonyms pole is oppositely arranged；First turn
The rotating disk 2 of disk 1 and second to annular groove is provided with, inside grooves are provided with ball 3, the relative position of the ball 3
Fixed by support 4；Using the principle that there is a natural attraction between the sexes, ball 3 is clamped in the middle of the first rotating disk 1 and the second rotating disk 2；First rotating disk
1st, the assembling schematic diagram of the second rotating disk 2, ball 3 and support 4 is as shown in figure 5, the structural representation of support 4 is as shown in Figure 6；
Second rotating disk 2 is rotated relative to the first rotating disk 1, can change radial direction light angle；Second rotating disk 2 and the first rotating disk
1 unitary rotation, can change axial light angle.
Specific embodiment two
The micro- Scan Architecture of double rotating disc types of the present embodiment, on the basis of specific embodiment one, further limits second
Rotating disk 2 is rotated relative to the first rotating disk 1, the second rotating disk 2 and the unitary rotation of the first rotating disk 1, is realized by following structure：
The rotating disk of first rotating disk 1 and second is placed about 2, and it is inverted trapezoidal to have section in the middle setting of the first rotating disk 1
Through hole, through-hole inner surface is frosting, has polygonal through hole in the middle setting of the second rotating disk 2, and the bottom symmetrical of the second rotating disk 2 is set
There are two expansion links 5, motor 6, the rotating shaft connecting steering mechanism 7 of the motor 6, the rotating mechanism 7 are installed in the bottom of expansion link 5
Lower end be prism, cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is round platform, the through hole with the first rotating disk 1
It is engaged, the side of the round platform is frosting；
When expansion link 5 is retracted, as shown in fig. 7, rotating mechanism 7 inserts the through hole of the first rotating disk 1 and the second rotating disk 2 simultaneously
In, led to the first rotating disk 1 using the lower end of rotating mechanism 7 and the matching relationship of the through hole of the second rotating disk 2, and the upper end of rotating mechanism 7
The frictional force of internal surface of hole, realizes driving the first rotating disk 1 and the common rotation of the second rotating disk 2；
When expansion link 5 stretches out, as shown in figure 8, the upper end of rotating mechanism 7 is separated with the through hole of the first rotating disk 1, rotating mechanism
7 and first rotating disk 1 without effect, realize only driving second rotating disk 2 to rotate.
It should be noted that when expansion link 5 stretches out, in the case that the second rotating disk 2 is rotated, it is ensured that the first rotating disk 1 is motionless,
Can be realized by way of damping is set on the first rotating disk 1, as long as resistance is more than the force of rolling friction of ball, the first rotating disk
1 is capable of achieving not rotate.Such technical scheme very simple to those skilled in the art, the selection of parameter can also
Obtained by limited trials, be not just described in detail in this application.
Also, it should be noted that expansion link 5, motor 6 and rotating mechanism 7 only occupy zone line, scanning is not interfered with
Region.
Claims (2)
1. the micro- Scan Architecture of pair rotating disc type, it is characterised in that including the first rotating disk (1) and the second rotating disk (2)；
First rotating disk (1) is provided with groove along radial direction, and second rotating disk (2) is provided with spiral-shaped groove, described
Spiral-shaped to be rotated a circle around the center of circle, top and terminal are located at on Radius, the first rotating disk (1) groove and the second rotating disk (2)
The combination of groove, forms light hole；
First rotating disk (1) and the second rotating disk (2) are made by magnetic material, and synonyms pole is oppositely arranged；First turn
Disk (1) and the second rotating disk (2) to annular groove is provided with, inside grooves are provided with ball (3), the ball (3)
Relative position is fixed by support (4)；Using the principle that there is a natural attraction between the sexes, ball (3) is clamped in the first rotating disk (1) and the second rotating disk
(2) in the middle of；
Second rotating disk (2) is rotated relative to the first rotating disk (1), can change radial direction light angle；Second rotating disk (2) and first turn
Disk (1) unitary rotation, can change axial light angle.
2. the according to claim 1 pair of micro- Scan Architecture of rotating disc type, it is characterised in that the second rotating disk (2) is relative to
One rotating disk (1) rotation, the second rotating disk (2) and the first rotating disk (1) unitary rotation, are realized by following structure：
First rotating disk (1) and the second rotating disk (2) are placed up and down, and it is inverted trapezoidal to have section in the first rotating disk (1) middle setting
Through hole, through-hole inner surface is frosting, has polygonal through hole, the second rotating disk (2) bottom pair in the second rotating disk (2) middle setting
Title is provided with two expansion links (5), and motor (6), the rotating shaft connecting steering mechanism of the motor (6) are installed in expansion link (5) bottom
(7), the lower end of the rotating mechanism (7) is prism, and cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is circle
Platform, the through hole with the first rotating disk (1) is engaged, and the side of the round platform is frosting；
It is sharp during rotating mechanism (7) is while insert the through hole of the first rotating disk (1) and the second rotating disk (2) when expansion link (5) is retracted
With rotating mechanism (7) lower end and the matching relationship of the second rotating disk (2) through hole, and rotating mechanism (7) upper end and the first rotating disk (1)
The frictional force of through-hole inner surface, realizes driving the first rotating disk (1) and the second rotating disk (2) to rotate jointly；
When expansion link (5) stretches out, rotating mechanism (7) upper end and the first rotating disk (1) through hole are separated, rotating mechanism (7) and the
One rotating disk (1) is realized only driving the second rotating disk (2) to rotate without effect.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910050692.3A CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201910050691.9A CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
| CN201710036106.0A CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710036106.0A CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050691.9A Division CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
| CN201910050692.3A Division CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106802276A true CN106802276A (en) | 2017-06-06 |
| CN106802276B CN106802276B (en) | 2019-04-05 |
Family
ID=58984552
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050692.3A Expired - Fee Related CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201710036106.0A Expired - Fee Related CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
| CN201910050691.9A Expired - Fee Related CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050692.3A Expired - Fee Related CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050691.9A Expired - Fee Related CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
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| CN (3) | CN109540798B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918419A (en) * | 2018-08-20 | 2018-11-30 | 长春理工大学 | A kind of solar simulator low irradiance fine regulating device |
| CN110987468A (en) * | 2019-11-27 | 2020-04-10 | 无为县金顺机动车检测有限公司 | Vehicle chassis central region scanning detector |
| CN112730258A (en) * | 2021-02-03 | 2021-04-30 | 四川广目科技有限公司 | Workpiece thread appearance defect scanning system based on 3D laser scanning and scanning device thereof |
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| CN112730258A (en) * | 2021-02-03 | 2021-04-30 | 四川广目科技有限公司 | Workpiece thread appearance defect scanning system based on 3D laser scanning and scanning device thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109580486B (en) | 2021-01-22 |
| CN109580486A (en) | 2019-04-05 |
| CN109540798B (en) | 2020-12-29 |
| CN109540798A (en) | 2019-03-29 |
| CN106802276B (en) | 2019-04-05 |
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