CN109536928B - Tray supporting and fixing device - Google Patents
Tray supporting and fixing device Download PDFInfo
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- CN109536928B CN109536928B CN201811412951.4A CN201811412951A CN109536928B CN 109536928 B CN109536928 B CN 109536928B CN 201811412951 A CN201811412951 A CN 201811412951A CN 109536928 B CN109536928 B CN 109536928B
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- tray
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- ceramic disc
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Organic Chemistry (AREA)
- General Induction Heating (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
The invention discloses a tray supporting and fixing device, comprising: the ceramic disc is used for placing the tray; the pressing block is arranged at the edge of the ceramic disc and used for fixing the tray on the ceramic disc; and the metal bracket is fixed below the ceramic disc and provided with n bracket arms, wherein n is more than or equal to 3 and used for supporting the ceramic disc, the metal bracket is fixed with a rotating shaft for realizing the rotation of the tray, and drives the ceramic disc to stably rotate together with the tray placed on the ceramic disc during rotation, wherein the length of the bracket arms of the metal bracket is less than the radius of the ceramic disc. The invention solves the problem of tray shaking or side turning caused by electromagnetic force in induction heating, and simultaneously can reduce the radiation heat loss of the tray to the surrounding space after the temperature rise, thereby further improving the heating efficiency.
Description
Technical Field
The disclosure belongs to the field of thin film material growth equipment manufacturing, and relates to a tray supporting and fixing device.
Background
The thin film material growth equipment is important process equipment in the production processes of semiconductor technology, microelectronic technology and the like, and the design and manufacturing technical level of the equipment has a key influence on the performance of a semiconductor device. Metal-organic Chemical Vapor Deposition (MOCVD) is a common semiconductor thin film material growth apparatus, plays an important role in mass production in the semiconductor industry, and is one of the most important apparatuses for epitaxially growing compound semiconductors such as indium phosphide, gallium arsenide, zinc oxide, gallium nitride, and the like in recent years.
MOCVD is a thin-layer single crystal material in which an organic compound of a group III or II element, a hydride of a group V, VI element, or the like is used as a source material for crystal growth, and the material is transported into a high-temperature reaction chamber at normal pressure or low pressure (10Torr to 100Torr), and then a thermal decomposition reaction is caused on a substrate wafer to regenerate various group III-V or group II-VI compound semiconductors and their multiple solid solutions. Within the reaction chamber, the substrate sheet is typically placed on a tray. The tray is heated by thermal radiation heating or electromagnetic induction heating, and then the tray transfers heat to the substrate sheet in a heat conduction mode so as to heat the substrate sheet to the required temperature.
The uniform distribution of temperature is crucial to improving the growth quality of the thin film material, and in order to solve the problem, the thin film material growth equipment generally enables the tray to rotate, and through the rotation of the tray, each substrate slice can obtain uniform and consistent heating effect in the reaction chamber, and is also favorable for promoting the uniform distribution of the reactant source material. But rotation can cause problems with how effectively the tray is secured.
At present, the tray is generally directly and stably placed on the rotating shaft, and in the rotating process, as long as no external force is used for destroying the balance of the tray, the tray can always stably rotate. This is suitable for the thin film material growth equipment which adopts the radiation heating method and is used more at present. The radiation heating method is that a heating wire or a heating sheet is arranged in a reaction chamber, the heating wire or the heating sheet can heat and raise the temperature after direct current is applied to the heating wire or the heating sheet, and the heat is transferred to a tray in the reaction chamber in a heat radiation mode, so that the tray is heated. However, as the application demand increases, the radiation heating method is not able to meet the heating demand of higher temperature and faster temperature rising speed, and thus the research on the induction heating method is increasing.
The induction heating is that an induction coil which is electrified with alternating current generates an alternating magnetic field in space by utilizing the principle of electromagnetic induction, and a tray positioned in the alternating magnetic field induces an eddy current in the tray and is directly heated and heated. The heating mode has the advantages of high temperature rising speed, high electric energy utilization rate and higher heating temperature. However, in the case of induction heating, since a current is induced in the tray located in the magnetic field, the tray is subjected to the action of the magnetic field, which applies a periodically varying electromagnetic force to the tray, causing the tray to shake. When the alternating current in the induction coil reaches a certain magnitude, the electromagnetic force borne by the tray can exceed the gravity of the tray, and if the tray is not effectively fixed, the tray can be turned on one side, so that serious consequences are caused. Therefore, compared with a radiation heating mode which is relatively mature in application, the thin film material growth equipment attracts attention to the adverse effect of electromagnetic force on the acting force of the tray caused by more and more induction heating modes.
Disclosure of Invention
Technical problem to be solved
In view of the problems caused by the above induction heating manner, the present disclosure provides a tray supporting and fixing device for fixing a tray on a rotating shaft of a thin film material growth apparatus to stably rotate at a low speed or at a high speed along with the rotating shaft, and at the same time, the loss of radiation heat to the surrounding space after the temperature of the tray is raised can be reduced, and the heating efficiency is further improved.
(II) technical scheme
According to an aspect of the present disclosure, there is provided a tray supporting and fixing device including: the ceramic disc is used for placing the tray; the pressing block is arranged at the edge of the ceramic disc and used for fixing the tray on the ceramic disc; and the metal bracket is fixed below the ceramic disc and provided with n bracket arms, wherein n is more than or equal to 3 and used for supporting the ceramic disc, the metal bracket is fixed with a rotating shaft for realizing the rotation of the tray, and drives the ceramic disc to stably rotate together with the tray placed on the ceramic disc during rotation, wherein the length of the bracket arms of the metal bracket is less than the radius of the ceramic disc.
In some embodiments of the disclosure, the edge of the ceramic disk has two steps above the plane of the ceramic disk, and when a tray to be placed is placed on the ceramic disk, the tray contacts with the next step and is aligned with the upper surface of the previous step, and an air layer is arranged below the tray and between the tray and the lower surface of the ceramic disk.
In some embodiments of the present disclosure, the pressing block is disposed on an upper surface of the upper step of the ceramic disk.
In some embodiments of the present disclosure, the length of the pressing block in the radial direction is greater than that of the upper step, so that the pressing block can cover the upper step and the tray simultaneously when the tray is placed in the ceramic tray.
In some embodiments of the present disclosure, the length of the support arms of the metal support is less than or equal to 0.5 times the radius of the ceramic disc.
In some embodiments of the present disclosure, the metal holder and the ceramic disk are fixed by a screw.
In some embodiments of the present disclosure, the center of the ceramic disk is provided with a first center hole therethrough; a second through center hole is formed in the center of the metal support, the second center hole is aligned to the center of the first center hole, the inner diameter of the second center hole is equal to the diameter of the rotating shaft, and a threaded hole is formed in the upper portion of the rotating shaft; the ceramic disc, the metal bracket and the rotating shaft are fixed by screwing the first screw into the threaded hole.
In some embodiments of the present disclosure, a square groove is disposed at a lower portion of an edge of the ceramic disc, a first opening is disposed at a top of the square groove, a second opening is correspondingly disposed on the pressing block, after the tray is placed in the ceramic disc, the first opening of the ceramic disc is aligned with the second opening of the pressing block, a second screw penetrates through the second opening and the first opening, and the fastening of the tray in the ceramic disc is achieved by the nut.
In some embodiments of the present disclosure, the number of compacts is greater than or equal to 2; and/or, the briquette is a metal block.
In some embodiments of the present disclosure, the n support arms are evenly distributed and equal in length.
(III) advantageous effects
According to the technical scheme, the tray supporting and fixing device provided by the disclosure at least has the following beneficial effects:
(1) the metal support can be fixed on the rotating shaft, n support arms (n is more than or equal to 3) of the metal support can firmly support the ceramic disc and rotate along with the rotating shaft together with the ceramic disc, the tray is placed in the ceramic disc and fixed by utilizing a pressing block, and the synchronous stable low-speed or high-speed rotation of the tray along with the rotating shaft is realized, wherein the length of the support arms of the metal support is smaller than the radius of the ceramic disc, so that the eddy heat generated in the metal support during electromagnetic induction heating can be reduced;
(2) preferably, the length of the support arm of the metal support is set to be 0.5 times or less of the radius of the ceramic disc, so that the problem of serious heat generation caused by large eddy current generated by electromagnetic induction effect in the metal support in an induction heating mode is avoided;
(3) the tray is placed in ceramic dish after, tray side and lower surface all are wrapped up by ceramic dish, only contact through the step department at ceramic dish edge between tray and the ceramic dish, other region separates between the two has the air bed, such setting can reduce the area of contact of tray and ceramic dish on the one hand, thereby weaken the tray by induction heating heat conduction effect to ceramic dish after heaing up, on the other hand ceramic dish also can go back the reflection of the heat part that the tray radiation was come, thereby be favorable to reducing the tray and heat dissipation to the radiant heat in space on every side after heaing up, the promotion of heating efficiency has been realized.
Drawings
Fig. 1 is a schematic structural view of a pallet supporting and fixing device according to an embodiment of the present disclosure.
Fig. 2 is an exploded view of portions of the pallet support and securing apparatus shown in fig. 1.
[ notation ] to show
01-a ceramic disc; 02-metal support;
03-briquetting; 04-a first screw;
05-square groove; 06-tray;
07-round pits; 08, 10-nut;
09-a second screw; 11-step.
Detailed Description
The utility model provides a tray supports and fixing device for be fixed in the low-speed or high-speed rotation that the tray is stable together along with the rotation axis on the rotation axis of thin film materials growth equipment, solved the tray that electromagnetic force probably arouses among the induction heating and rocked or turn on one's side the problem, still can reduce the radiant heat loss to the surrounding space after the tray intensifies simultaneously, further improve heating efficiency.
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
In a first exemplary embodiment of the present disclosure, a pallet support and securing apparatus is provided.
Fig. 1 is a schematic structural view of a pallet supporting and fixing device according to an embodiment of the present disclosure. Fig. 2 is an exploded view of portions of the pallet support and securing apparatus shown in fig. 1.
Referring to fig. 1 and 2, the pallet supporting and fixing device of the present disclosure includes: a ceramic tray 01 for placing the tray 06; the pressing block 03 is arranged at the edge of the ceramic disc 01 and used for fixing the tray 06 on the ceramic disc 01; and the metal support 02 is fixed below the ceramic disc 01 and is provided with n support arms, n is more than or equal to 3 and is used for supporting the ceramic disc, the metal support 02 is fixed with a rotating shaft for realizing the rotation of the tray, the ceramic disc 01 and the tray 06 placed on the ceramic disc 01 are driven to stably rotate together during the rotation, and the length of the support arms of the metal support 02 is smaller than the radius of the ceramic disc 01.
In the tray supporting and fixing device, the metal support can be fixed on the rotating shaft, n (n is more than or equal to 3) support arms of the metal support can firmly support the ceramic disc and rotate along with the rotating shaft together with the ceramic disc, the tray is placed in the ceramic disc and fixed by the pressing block, and the tray can synchronously and stably rotate at a low speed or at a high speed along with the rotating shaft, wherein the length of the support arms of the metal support is smaller than the radius of the ceramic disc, so that the eddy heat generated in the metal support during electromagnetic induction heating can be reduced.
In the present embodiment, as shown in fig. 2, there is provided a tray supporting and fixing device in which a tray 06 with a plurality of circular pits 07 is placed for example, the tray and fixing device including: ceramic disc 01, metal support 02 and briquette 03.
In some embodiments of the present disclosure, the n support arms are evenly distributed and equal in length. Of course, the number and distribution form of the support arms are not limited in the disclosure, the lengths of the support arms may be equal or different, and from the viewpoint of convenience in processing, the lengths of the support arms are preferably equal.
In this embodiment, the metal bracket 02 has 3 bracket arms, and the angle between each adjacent bracket arms of the metal bracket 02 is 120 °.
Referring to fig. 2, in this embodiment, the edge of the ceramic plate 01 has two steps 11 higher than the plane of the ceramic plate, when the tray 06 to be placed is placed on the ceramic plate 01, it contacts with the next step and aligns with the upper surface of the previous step, and an air layer is provided between the lower side of the tray and the lower surface of the ceramic plate.
Wherein, tray 06 places back in ceramic dish 01, tray 06's side and lower surface all are wrapped up by ceramic dish 01, only contact through step 11 department at ceramic dish 01 edge between tray 06 and the ceramic dish 01, other region separates between the two and has the air bed, such setting can reduce tray 06 and ceramic dish 01's area of contact on the one hand, thereby weaken tray 06 by the heat conduction effect of induction heating rear ceramic dish 01, on the other hand ceramic dish 01 also can go back the reflection of the heat part that tray 06 radiated, thereby be favorable to reducing tray 06 and lose to the radiant heat in space on every side after hearing up, the promotion of heating efficiency has been realized.
In this disclosure, the number of the pressing blocks 03 is at least 2, and the number of the pressing blocks can be set according to actual needs, as long as the function of fixing the tray on the ceramic disc can be realized. In addition, the material of the compact 03 is preferably metal.
In this embodiment, 3 pressing blocks 03 are uniformly distributed, and as shown in fig. 2, each pressing block 03 is disposed on the upper surface of the upper step of the ceramic tray 01, the length of the pressing block 03 in the radial direction is greater than that of the upper step, so that the pressing block 03 can cover the upper step and the tray 06 simultaneously when the tray 06 is placed in the ceramic tray 01.
In this embodiment, the briquetting realizes the fastening through the cooperation of screw and nut with placing the ceramic dish of tray between. As shown in fig. 2, a square groove 05 is formed in the lower portion of the edge of the ceramic disc 01, a first opening is formed in the top of the square groove 05, a second opening is correspondingly formed in the pressing block 03, after the tray 06 is placed in the ceramic disc 01, the first opening of the ceramic disc 01 is aligned with the second opening of the pressing block 03, a second screw 09 penetrates through the second opening and the first opening, and the fastening of the tray 06 in the ceramic disc 01 is achieved through the nut 10.
In order to achieve smooth surface after assembly, optionally, the first opening is matched with the outer diameter of the thread of the screw, the second opening is matched with the size of the nut, after assembly, the second screw 09 sequentially penetrates through the second opening and the first opening to penetrate into a hollow area corresponding to the square groove 05, the nut 10 is located in the area, and the second screw 09 is combined to achieve fastening of the tray 06 in the ceramic disc 01, wherein the second opening is used for accommodating the nut of the screw.
In some embodiments of the present disclosure, the metal holder and the ceramic disk are fixed by a screw.
Referring to fig. 2, a first through center hole is formed in the center of the ceramic disc 01, and correspondingly referring to fig. 1, a second through center hole is formed in the center of the metal bracket 02, the second center hole is aligned with the center of the first center hole, the inner diameter of the second center hole is equal to the diameter of the rotating shaft, and a threaded hole is formed in the upper portion of the rotating shaft; the ceramic disc, the metal bracket, and the rotary shaft are fixed by screwing the first screw 04 into the screw hole.
In some embodiments of the present disclosure, the length of the support arms of the metal support is less than or equal to 0.5 times the radius of the ceramic disc.
Next, the assembly process of the tray supporting and fixing device of the present disclosure is illustrated by the structure shown in this embodiment, and when the tray supporting and fixing device shown in this embodiment is assembled, the metal holder 02 is first placed on the rotating shaft in the reaction chamber, the ceramic disc 01 is placed on the metal holder 02 such that the second center hole is aligned with the center position of the first center hole, and then the first screw 04 is passed through the first center hole of the ceramic disc 01 and the second center hole of the metal holder 02 and screwed into the rotating shaft, thereby reliably fixing the ceramic disc 01 and the metal holder 02 on the rotating shaft. Then, the tray 06 is placed on the ceramic plate 01, the three pressing blocks 03 are placed, the pressing blocks 03 are fixed on the ceramic plate 01 by matching with the second screws 09 and the nuts 10, and at the moment, the tray 06 is fixed in the ceramic plate 01. At this time, the ceramic plate 01, the tray 06 and the metal holder 02 are integrally and reliably fixed on the rotating shaft and rotate along with the rotation of the rotating shaft, and even if the tray 06 is subjected to a large electromagnetic force in the electromagnetic induction heating process, the problem that the tray 06 turns over cannot occur.
When the electromagnetic induction is used for heating, an alternating magnetic field can be generated in the reaction chamber, the magnetic induction intensity around the tray 06 is usually stronger, preferably, the length of the support arm of the metal support 02 is designed to be 0.5 times or shorter than the radius of the ceramic disc, so that the problem that the metal support 02 generates heat seriously due to the fact that a larger eddy current is generated by the electromagnetic induction effect can be solved, and in addition, the ceramic disc 01 is not conductive, and the eddy current cannot be generated in the ceramic disc 01, so that the problem that the ceramic disc 01 generates heat due to the electromagnetic induction is avoided.
In summary, the present disclosure provides a tray supporting and fixing device, wherein a metal bracket can be fixed on a rotating shaft, n (n is greater than or equal to 3) bracket arms of the metal bracket can firmly support a ceramic disc and rotate along with the rotating shaft together with the ceramic disc, the tray is placed in the ceramic disc and fixed by a pressing block, so that the tray can synchronously and stably rotate at a low speed or at a high speed along with the rotating shaft, wherein the length of the bracket arms of the metal bracket is smaller than the radius of the ceramic disc, and the eddy heat generated in the metal bracket during electromagnetic induction heating can be reduced; the length of the support arm of the metal support is 0.5 times or less of the radius of the ceramic disc, so that the problem of serious heating caused by a large eddy current generated in the metal support due to an electromagnetic induction effect in an induction heating mode is avoided; the tray is placed in ceramic dish after, the side and the lower surface of tray all are wrapped up by ceramic dish, only contact through the step department at ceramic dish edge between tray and the ceramic dish, other region separates between the two has the air bed, such setting can reduce the area of contact of tray and ceramic dish on the one hand, thereby weaken the tray by induction heating heat conduction effect to ceramic dish after heaing up, on the other hand ceramic dish also can go back the reflection of the heat part that the tray radiation was come, thereby be favorable to reducing the tray and heat dissipation to the radiation heat of space on every side after heaing up, heating efficiency's promotion has been realized.
It should be noted that in the drawings or description, the same drawing reference numerals are used for similar or identical parts. Conventional structures or constructions will be omitted when they may obscure the understanding of the present disclosure. Implementations not depicted or described in the drawings are of a form known to those of ordinary skill in the art. Additionally, while exemplifications of parameters including particular values may be provided herein, it is to be understood that the parameters need not be exactly equal to the respective values, but may be approximated to the respective values within acceptable error margins or design constraints. Directional phrases used in the embodiments, such as "upper," "lower," "front," "rear," "left," "right," and the like, refer only to the orientation of the figure. Accordingly, the directional terminology used is intended to be in the nature of words of description rather than of limitation.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Furthermore, the word "comprising" or "comprises" does not exclude the presence of elements or steps other than those listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
The above-mentioned embodiments are intended to illustrate the objects, aspects and advantages of the present disclosure in further detail, and it should be understood that the above-mentioned embodiments are only illustrative of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.
Claims (10)
1. A pallet support and securing apparatus, comprising:
the ceramic disc is used for placing the tray;
the pressing block is arranged at the edge of the ceramic disc and used for fixing the tray on the ceramic disc; and
the metal support is fixed below the ceramic disc and provided with n support arms, n is larger than or equal to 3 and used for supporting the ceramic disc, the metal support is fixed with a rotating shaft for realizing the rotation of the tray, the ceramic disc is driven to stably rotate together with the tray placed on the metal support when the metal support rotates, and the length of each support arm of the metal support is smaller than the radius of the ceramic disc.
2. The tray supporting and holding device according to claim 1, wherein the edge of the ceramic tray has two steps higher than the plane of the ceramic tray, and when the tray to be placed is placed on the ceramic tray, it is in contact with the next step, aligned with the upper surface of the previous step, and an air layer is provided under the tray and between the lower surface of the ceramic tray.
3. The tray supporting and retaining apparatus of claim 2, wherein said pressing block is provided on an upper surface of an upper step of the ceramic tray.
4. The tray supporting and retaining apparatus of claim 2, wherein said compacts have a length in the radial direction greater than that of said upper step, allowing the compacts to simultaneously overlie the upper step and the tray when the tray is placed in the ceramic tray.
5. The pallet support and securing arrangement of claim 1 wherein the length of the bracket arms of the metal bracket is less than or equal to 0.5 times the radius of the ceramic disc.
6. The pallet support and fixing device of claim 1 wherein said metal bracket is fixed to the ceramic plate by screws.
7. The pallet support and securing arrangement of claim 6 wherein said ceramic disc has a first central hole therethrough; a second through center hole is formed in the center of the metal support, the second center hole is aligned to the center of the first center hole, the inner diameter of the second center hole is equal to the diameter of the rotating shaft, and a threaded hole is formed in the upper portion of the rotating shaft; the ceramic disc, the metal bracket and the rotating shaft are fixed by screwing the first screw into the threaded hole.
8. The tray supporting and retaining apparatus of claim 1, wherein the lower portion of the edge of the ceramic plate is provided with a square groove, the top of the square groove is provided with a first opening, the pressing block is correspondingly provided with a second opening, after the tray is placed in the ceramic plate, the first opening of the ceramic plate is aligned with the second opening of the pressing block, the second opening and the first opening are penetrated by a second screw, and the fastening of the tray in the ceramic plate is achieved by a nut.
9. The pallet support and securing arrangement of claim 1,
the number of the pressing blocks is more than or equal to 2; and/or the presence of a gas in the gas,
the pressing block is a metal block.
10. A pallet support and fixing arrangement according to any of claims 1 to 9 wherein the n bracket arms are evenly distributed and equal in length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811412951.4A CN109536928B (en) | 2018-11-23 | 2018-11-23 | Tray supporting and fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811412951.4A CN109536928B (en) | 2018-11-23 | 2018-11-23 | Tray supporting and fixing device |
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| Publication Number | Publication Date |
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| CN109536928A CN109536928A (en) | 2019-03-29 |
| CN109536928B true CN109536928B (en) | 2020-10-09 |
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| CN201811412951.4A Active CN109536928B (en) | 2018-11-23 | 2018-11-23 | Tray supporting and fixing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20050047196A (en) * | 2003-11-17 | 2005-05-20 | 동부아남반도체 주식회사 | Tool for heater position setting of cvd and heater position setting method |
| CN103074610A (en) * | 2012-08-28 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Substrate supporting structure and reaction chamber containing the same |
| CN103540912A (en) * | 2012-07-09 | 2014-01-29 | 中晟光电设备（上海）有限公司 | MOCVD (metal organic chemical vapor deposition) equipment and pallet supporting and rotating system in equipment |
| CN107475691A (en) * | 2017-08-24 | 2017-12-15 | 中国科学院半导体研究所 | A kind of heater based on electromagnetic induction |
| CN107578984A (en) * | 2013-03-27 | 2018-01-12 | 应用材料公司 | Base supports portion and the epitaxial growth equipment for including base supports portion |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017109900A (en) * | 2015-12-16 | 2017-06-22 | 富士電機株式会社 | Epitaxial growth system, epitaxial growth method, and production method of semiconductor element |
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2018
- 2018-11-23 CN CN201811412951.4A patent/CN109536928B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050047196A (en) * | 2003-11-17 | 2005-05-20 | 동부아남반도체 주식회사 | Tool for heater position setting of cvd and heater position setting method |
| CN103540912A (en) * | 2012-07-09 | 2014-01-29 | 中晟光电设备（上海）有限公司 | MOCVD (metal organic chemical vapor deposition) equipment and pallet supporting and rotating system in equipment |
| CN103074610A (en) * | 2012-08-28 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Substrate supporting structure and reaction chamber containing the same |
| CN107578984A (en) * | 2013-03-27 | 2018-01-12 | 应用材料公司 | Base supports portion and the epitaxial growth equipment for including base supports portion |
| CN107475691A (en) * | 2017-08-24 | 2017-12-15 | 中国科学院半导体研究所 | A kind of heater based on electromagnetic induction |
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|---|---|
| CN109536928A (en) | 2019-03-29 |
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