CN109524400A - Semiconductor devices including capacitor arrangement and the method for manufacturing it - Google Patents

Semiconductor devices including capacitor arrangement and the method for manufacturing it Download PDF

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Publication number
CN109524400A
CN109524400A CN201811086216.9A CN201811086216A CN109524400A CN 109524400 A CN109524400 A CN 109524400A CN 201811086216 A CN201811086216 A CN 201811086216A CN 109524400 A CN109524400 A CN 109524400A
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China
Prior art keywords
pattern
layer
sacrificial
support
sacrificial layer
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徐英植
赵诚
赵诚一
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
    • H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02057—Cleaning during device manufacture
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31105—Etching inorganic layers
    • H01L21/31111—Etching inorganic layers by chemical means
    • H01L21/31116—Etching inorganic layers by chemical means by dry-etching
    • H01L21/31122—Etching inorganic layers by chemical means by dry-etching of layers not containing Si, e.g. PZT, Al2O3
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
    • H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
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    • H10B—ELECTRONIC MEMORY DEVICES
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    • H10B—ELECTRONIC MEMORY DEVICES
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    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
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    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/036—Making the capacitor or connections thereto the capacitor extending under the transistor
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    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H10B12/0387—Making the trench
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    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

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Abstract

A kind of method of manufacturing semiconductor devices includes providing substrat structure.This method includes forming the lower sacrificial layer being sequentially stacked on substrat structure, lower support layer, upper sacrificial layer and upper support layer.This method includes forming mask pattern on upper support layer, etching upper support layer as etching mask by using mask pattern and form upper support pattern.This method includes sacrificial layer and upper sacrificial layer under forming the sunk area for penetrating upper support pattern, upper sacrificial layer, lower support layer and lower sacrificial layer and removing.Mask pattern is removed during the technique for forming upper support pattern.Also, at the end of the technique for forming sunk area, upper support pattern is left.

Description

Semiconductor devices including capacitor arrangement and the method for manufacturing it
Technical field
The illustrative embodiments of present inventive concept be related to include capacitor arrangement semiconductor devices, more specifically, relating to And the method for manufacturing the semiconductor devices.
Background technique
Semiconductor devices can be used for due to its relatively small size, multi-functional characteristic and/or relatively low manufacturing cost Electronics industry.Semiconductor devices can be classified as the semiconductor storage unit of storage logical data, handle partly leading for logical data The mixed semiconductor of both body logical device and the function with semiconductor storage unit and semiconductive logic device Device.
Relatively high speed and low-voltage (such as relative low power) semiconductor devices can be included in electronic device. Semiconductor devices can be integrated with relative altitude.The reliability of semiconductor devices may be in the semiconductor devices that relative altitude integrates It reduces.However, with the development of electronic industry, having had increasing need for highly reliable semiconductor devices.
Summary of the invention
One illustrative embodiments of present inventive concept provide the semiconductor devices with the electrical stability improved.
One illustrative embodiments of present inventive concept provide the system that can be reduced the process time and reduce process costs The method of manufacturing semiconductor device.
One illustrative embodiments of present inventive concept provide the manufacturing semiconductor devices that can be improved structural stability Method.
The illustrative embodiments conceived according to the present invention, a kind of method of manufacturing semiconductor devices include providing substrate knot Structure.This method includes forming the lower sacrificial layer being sequentially stacked on substrat structure, lower support layer, upper sacrificial layer and upper support Nitride layer.This method include formed on upper support layer mask pattern, by using mask pattern as etching mask etching on Support layer and form upper support pattern.This method includes being formed to penetrate upper support pattern, upper sacrificial layer, lower support layer With the sunk area of lower sacrificial layer and the lower sacrificial layer of removal and upper sacrificial layer.Mask pattern is forming upper support pattern It is removed during technique.Also, at the end of the technique for forming sunk area, upper support pattern is left.
The illustrative embodiments conceived according to the present invention, a kind of method of manufacturing semiconductor devices include providing substrate knot The sacrificial layer and support layer that structure, formation are sequentially stacked on substrat structure.This method includes being formed to cover in support layer Mould pattern and by using mask pattern as etching mask etch support layer and form support article pattern.This method packet It includes and etches sacrificial layer by using support article pattern as etching mask and form sacrificial pattern and removal sacrificial pattern.It covers Mould pattern is removed during the technique for forming support article pattern, and at the end of the technique for forming sacrificial pattern, supporter Pattern leaves.
The illustrative embodiments conceived according to the present invention, a kind of method of manufacturing semiconductor devices are included in above substrate Form the first sacrificial layer, the first support layer, the second sacrificial layer and multiple second support article patterns.This method include by using The multiple second support article pattern is as the first sacrificial layer of mask etching, the first support layer and the second sacrificial layer, to be formed Multiple first sacrificial patterns, multiple first support article patterns and multiple second sacrificial patterns, wherein each second support article pattern Thickness be reduced by the etching, and wherein described be etched in the multiple first sacrificial pattern, the multiple first Multiple sunk areas are formed between support article pattern, the multiple second sacrificial pattern and the multiple second support article pattern. This method includes forming capacitor in each sunk area of the multiple sunk area, and wherein capacitor includes first conductive Pattern, the dielectric pattern on the first conductive pattern and the second conductive pattern on dielectric pattern, and it is wherein described At least two second support article patterns in multiple second support article patterns are positioned as support and are formed in each sunk area Capacitor.And this method includes removing the multiple first sacrificial pattern and the multiple second sacrificial pattern.
Detailed description of the invention
The illustrative embodiments that present inventive concept is described in detail by referring to accompanying drawing, present inventive concept above and in addition Feature will become more apparent, in attached drawing:
Fig. 1 to 11 is the method for showing the manufacturing semiconductor devices for the illustrative embodiments conceived according to the present invention Cross-sectional view.
Figure 12 and 13 is the method for showing the manufacturing semiconductor devices for the illustrative embodiments conceived according to the present invention Cross-sectional view.
Figure 14 is the circuit diagram for showing dynamic random access memory (DRAM) device.
Figure 15 to 18 is the method for showing the formation conductive pattern for the illustrative embodiments conceived according to the present invention Cross-sectional view.
Specific embodiment
Fig. 1 to 11 is the method for showing the manufacturing semiconductor devices for the illustrative embodiments conceived according to the present invention Cross-sectional view.
Referring to Fig.1, substrat structure 100 can be provided.Substrat structure 100 may include semiconductor material (such as silicon (Si), Germanium (Ge) or combinations thereof), conductive material (such as DOPOS doped polycrystalline silicon, metal silicide, metal, metal nitride or its any group Close), (such as high-density plasma (HDP) oxide, tetraethyl orthosilicate (TEOS), plasma enhancing are former for insulating materials Tetraethyl orthosilicate (PETEOS), O3Tetraethyl orthosilicate (O3- TEOS), non-impurity-doped silicate glass (USG), phosphosilicate glass (PSG), borosilicate glass (BSG), boron phosphorus silicate glass (BPSG), fluoride silicate glass (FSG), spin-coating glass (SOG), east combustion silicon nitrogen (Tonen silazene (TOSZ)) or any combination thereof), or any combination thereof.Substrat structure 100 can With the multilayered structure with single layer or including multiple stack layers.
First sacrificial layer 210, the first support layer 220, the second sacrificial layer 230, the second support layer 240, mask layer 300 It can be sequentially formed on substrat structure 100 with fine pattern 400.First sacrificial layer 210, the first support layer 220, second It is heavy that chemical vapor deposition (CVD) technique, physical vapor can be used in sacrificial layer 230, the second support layer 240 and mask layer 300 It accumulates (PVD) technique or atomic layer deposition (ALD) technique and is formed.
Fine pattern 400 can be formed by autoregistration double patterning technique.For example, the formation of fine pattern 400 May include formed on mask layer 300 photoresist pattern, formed on mask layer 300 and photoresist pattern it is thin Layer, be etched anisotropically through by etch back process thin layer with formed on the side wall of photoresist pattern fine pattern 400, And removal photoresist pattern.It is formed for example, CVD technique, PVD process or ALD technique can be used in thin layer.Fine pattern 400 can have single layer structure or the multilayered structure including multiple stack layers.For example, fine pattern 400 may include silicon (Si), Si oxide (such as SiO2) or silicon nitrogen oxides (such as SiON).
Mask layer 300 may include the material for having relatively high etching selectivity relative to fine pattern 400.Mask layer 300 may include the layer comprising carbon.As an example, carbon can be the main component of mask layer 300.For example, the carbon of mask layer 300 Content can be with range from about 70% to about 99%.Mask layer 300 can be single layer.For example, mask layer 300 can be amorphous carbon layer (ACL) or spin-coating hardmask (SOH) layer.
Second support layer 240 may include the material for having relatively high etching selectivity relative to mask layer 300.Example Such as, the second support layer 240 may include silicon (Si), Si oxide (such as SiO2), metal oxide (such as WOx、TiOxOr AlOx) or silicon nitrogen oxides (such as SiON).Second support layer 240 can be single layer.Second support layer 240 can have First thickness t1.First thickness t1 can be along the orientation measurement orthogonal with the upper surface of substrat structure 100.
Each of first sacrificial layer 210 and the second sacrificial layer 230 may include the carbon-coating adulterated with impurity.For example, carbon-coating It can be amorphous carbon layer (ACL) or spin-coating hardmask (SOH) layer.
Impurity may include the nonmetalloid in addition to carbon, metallic element or combinations thereof.For example, impurity may include boron (B), tungsten (W), barium chloride (BaCl2), tungsten carbide (WC), titanium carbide (TiC), aluminium carbide (AlC) or its any group It closes.For example, carbon-coating can be adulterated in situ with impurity during the technique of deposited carbon layer.First sacrificial layer 210 and the second sacrificial layer 230 can have relatively high etching selectivity relative to the second support layer 240.For example, the first sacrificial layer 210 and second is sacrificial The etch-rate of each of domestic animal layer 230 and the ratio between the etch-rate of the second support layer 240 can be about 10 or bigger: 1.First Sacrificial layer 210 and the second sacrificial layer 230 can increase the adhesive strength of conductive material by impurity.The concentration of impurity can be with It is confirmed as allowing the first sacrificial layer 210 and the second sacrificial layer 230 that there is desired adhesion characteristic and etching characteristic.For example, In each of first sacrificial layer 210 and the second sacrificial layer 230, the concentration of impurity can be with range from about 20 volume % to about 80 bodies Product %.The concentration of impurity can refer to the volume of each of total volume and the first sacrificial layer 210 and second sacrificial layer 230 of impurity The ratio between.If the concentration of impurity is too low (for example, less than about 20 volume %), sacrificial layer 210 and 230 is for the viscous of conductive material Expected degree can be lower than by closing intensity.If the excessive concentration (such as greater than about 80 volume %) of impurity, 210 He of the first sacrificial layer The etch-resistance of second sacrificial layer 230 will increase, thus is likely difficult to etching first and sacrifices nitride layer 210 and the second sacrifice nitride layer 230.Execute formation (be described in more detail below) lower conductiving layer 610 technique at a temperature of, the first sacrificial layer 210 and Two sacrificial layers 230 may not deteriorate.For example, the technique for forming lower conductiving layer 610 can be in about 350 DEG C to about 400 DEG C of temperature Degree is lower to carry out, and the first sacrificial layer 210 and the second sacrificial layer 230 can have and be able to bear at least 400 DEG C of heat resistance.
First support layer 220 may include material identical with the second support layer 240.For example, the first support layer 220 may include silicon (Si), Si oxide (such as SiO2), metal oxide (such as WOx、TiOxOr AlOx) or silicon nitrogen oxidation Object (such as SiON).
Referring to Fig. 2, mask pattern 310 can be formed by patterned mask layer 300.The formation of mask pattern 310 can To include that fine pattern 400 is used to execute anisotropic etching process as etching mask with patterned mask layer 300.For example, Anisotropic etching process may include oxygen plasma etch technique.In an illustrative embodiments of present inventive concept, Fine pattern 400 can be removed during the formation of mask pattern 310.Mask pattern 310 can be with the second support layer 240 The upper surface away from substrat structure 100 directly contact.
Referring to Fig. 3, the second support article pattern 242 can be formed by the second support layer 240 of patterning.Second support The formation of article pattern 242 may include that mask pattern 310 is used to execute anisotropic etching process as etching mask with pattern Change the second support layer 240.Anisotropic etching process may include using fluorine based etch gas and O2The mixed gas of gas Or fluorine based etch gas, O2The dry plasma etch process of the mixed gas of gas and Ar gas.For example, fluorine based etch gas It can be C3F6Gas, C4F6Gas, C4F8Gas or C5F8Gas.In an illustrative embodiments of present inventive concept, mask Pattern 310 can be removed during the formation of the second support article pattern 242.Alternatively, mask pattern 310 can be in the second support It is removed after the formation of article pattern 242.Second support article pattern 242 can have second equal to or less than first thickness t1 Thickness t2.Second thickness t2 can be along the orientation measurement orthogonal with the upper surface of substrat structure 100.Sunk area 500 can be with It is formed in the second support article pattern 242.For example, sunk area 500 can be formed by anisotropic etching process.
Referring to Fig. 4, the second sacrificial pattern 232 can be formed by the second sacrificial layer 230 of patterning.Second sacrificial pattern 232 formation may include use second support article pattern 242 as etching mask execution the first anisotropic etching process with Etch the second sacrificial layer 230.First anisotropic etching process may include using comprising Cl2The etching gas of gas it is dry it is equal from Daughter etch process.When the second sacrificial layer 230 is adulterated with the carbon-coating of boron (such as amorphous carbon layer (ACL)), second sacrifices figure Case 232 can be by using including O2Gas, Cl2The etching gas of gas, HBr gas and carbon oxysulfide (COS) gas is done Plasma etch process and formed.First anisotropic etching process can execute under about 80 DEG C or higher temperature.Cause This, can be improved the etch-rate of the second sacrificial layer 230.
Second support article pattern 242 may not completely removed.Therefore, second is being used to support article pattern 242 as erosion After the first anisotropic etching process completion for carving mask, second support a part of of article pattern 242 can be left (see for example Fig. 5).For example, the thickness of the second support article pattern 242 can be reduced by the first anisotropic etching process.As an example, After first anisotropic etching process, the second support article pattern 242 can have the third thickness t3 less than second thickness t2. Third thickness t3 can be along the orientation measurement orthogonal with the upper surface of substrat structure 100.Sunk area 500 can pass through first Anisotropic etching process further extends into the second sacrificial pattern 232.
Referring to Fig. 5, the first support article pattern 222 can be formed by the first support layer 220 of patterning.First support Article pattern 222 can directly be contacted with the upper surface of substrat structure 100.The formation of first support article pattern 222 may include making The second support article pattern 242 is used to execute the second anisotropic etching process as etching mask to etch the first support layer 220. Second anisotropic etching process may include using fluorine based etch gas and O2The mixed gas or fluorine based etch gas of gas, O2The dry plasma etch process of the mixed gas of gas and Ar gas.For example, fluorine based etch gas can be C3F6Gas, C4F6Gas, C4F8Gas or C5F8Gas.
Second support article pattern 242 may be completely removed.Therefore, second is being used to support article pattern 242 as erosion After the second anisotropic etching process completion for carving mask, second support a part of of article pattern 242 can be left.Second The thickness of support article pattern 242 can be further decreased by the second anisotropic etching process.As an example, second respectively to different Property etch process after, second support article pattern 242 can have the 4th thickness t4 less than third thickness t3.4th thickness t4 It can be along the orientation measurement orthogonal with the upper surface of substrat structure 100.Sunk area 500 can be (such as second respectively to different After property etch process) it further extends into the first support article pattern 222.Therefore, the second anisotropic etching process it Afterwards, sunk area 500 can extend to the upper surface of the first sacrificial layer 210.
Referring to Fig. 6, the first sacrificial pattern 212 can be formed by the first sacrificial layer 210 of patterning.First sacrificial pattern 212 formation may include use second support article pattern 242 as etching mask execution third anisotropic etching process with Etch the first sacrificial layer 210.Third anisotropic etching process may include using comprising Cl2The etching gas of gas it is dry it is equal from Daughter etch process.When the first sacrificial layer 210 is adulterated with the carbon-coating of boron (such as amorphous carbon layer (ACL)), first sacrifices figure Case 212 can be by using including O2Gas, Cl2The etching gas of gas, HBr gas and carbon oxysulfide (COS) gas is done Plasma etch process and formed.Third anisotropic etching process can execute under about 80 DEG C or higher temperature.Cause This, can be improved the etch-rate of the first sacrificial layer 210.
Second support article pattern 242 may be completely removed.Therefore, use the second support article pattern 242 as etching After the third anisotropic etching process of mask is completed, second support a part of of article pattern 242 can be left.Therefore, Two support article patterns 242 can (such as after third anisotropic etching process) leave, and second support article pattern 242 Remainder can not be removed.The remainder of second support article pattern 242 may be used as the branch of support capacitor structure Object is supportted, this will be described in greater detail below.By third anisotropic etching process, the second supporter can be further decreased The thickness of pattern 242.As an example, the second support article pattern 242 can have small after third anisotropic etching process In the final thickness tg of the 4th thickness t4.Final thickness tg can be surveyed along the direction orthogonal with the upper surface of substrat structure 100 Amount.Final thickness tg can be greater than minimum thickness, to allow the second support article pattern 242 to be used as supporter.Sunk area 500 can To be further extended into the first sacrificial pattern 212 by third anisotropic etching process.Therefore, it is lost in third anisotropy After carving technology, sunk area 500 can extend to the upper surface of substrat structure.
Referring to Fig. 7, lower conductiving layer 610 can be in the inner surface and bottom surface and the second supporter figure of sunk area 500 It is conformally formed on the top surface of case 242.Lower conductiving layer 610 can be by executing CVD technique, PVD process or ALD technique shape At.The technique for forming lower conductiving layer 610 can carry out at a temperature of about 350 DEG C to about 400 DEG C.Lower conductiving layer 610 may include Conductive material.For example, lower conductiving layer 610 may include metal material (such as titanium, titanium nitride, tantalum, tantalum nitride or its is any At least one of combination) or DOPOS doped polycrystalline silicon.In an illustrative embodiments of present inventive concept, seed layer can be formed Between lower conductiving layer 610 and the inner surface and bottom surface of sunk area 500.
3rd sacrifice layer 620 can be formed on lower conductiving layer 610.3rd sacrifice layer 620 can be by executing CVD work Skill, PVD process or ALD technique and formed.3rd sacrifice layer 620 can fill sunk area 500 and can cover second Support the top surface of article pattern 242.3rd sacrifice layer 620 may include and 232 phase of the first sacrificial pattern 212 and the second sacrificial pattern Same material.For example, as described in more detail above, 3rd sacrifice layer 620 may include the carbon-coating adulterated with impurity.
Referring to Fig. 8, flatening process (such as etch-back work can be executed to 3rd sacrifice layer 620 and lower conductiving layer 610 Skill) to form third sacrificial pattern 622 and lower conductive pattern 612.Flatening process can be performed until the second supporter figure The top surface of case 242 is exposed.Therefore, lower conductive pattern 612 can be respectively formed in sunk area 500.Lower conductive pattern 612 can be electrically insulated from each other.Each lower conductive pattern 612 can correspond to include one in a pair of electrodes in the capacitor It is a.The upper surface of each third sacrificial pattern 622 and the upper surface of each lower conductive pattern 612 can along with substrat structure The parallel direction in 100 upper surface is substantially aligned to one another (such as can be coplanar).
Referring to Fig. 9, the first sacrificial pattern 212, the second sacrificial pattern 232 and third sacrificial pattern 622 can be removed.The One sacrificial pattern 212, the second sacrificial pattern 232 and third sacrificial pattern 622 can be by using oxygen (O2) plasma ash Chemical industry skill and/or stripping technology are removed.Lower conductive pattern 612 can be by the first support article pattern 222 and the second supporter figure Case 242 supports.
Referring to Fig.1 0, dielectric layer 630 can be formed in surface (such as top surface and the bottom of the second support article pattern 242 Surface), the first support surface (such as top surface and bottom surface) of article pattern 222, (such as the lower conductive pattern of lower conductive pattern 612 The top surface of case 612 and side surface) and substrat structure 100 (such as a part of the top surface of substrat structure 100) on.Dielectric Layer 630 can be formed by executing CVD technique, PVD process or ALD technique.Dielectric layer 630 may include having high dielectric The metal oxide of constant.For example, dielectric layer 630 may include Zirconium oxide, zirconium nitrogen oxides, aluminum oxide, tantalum oxidation Object, hafnium oxide or any combination thereof.Dielectric layer 630 can have single layer or the multilayered structure including multiple stack layers.Example Such as, dielectric layer 630 may include Zirconium oxide layer, al oxide layer and the Zirconium oxide layer or dielectric that sequence stacks Layer 630 may include Zirconium oxide layer, al oxide layer and the tantalum oxide layer that sequence stacks.Dielectric layer 630, which can be, to be set The dielectric layer between a pair of electrodes in capacitor arrangement is set, this will be described in greater detail below.
Referring to Fig.1 1, upper conductive layer 640 can be formed on substrat structure 100.Upper conductive layer 640 can pass through execution CVD technique, PVD process or ALD technique and formed.For example, upper conductive layer 640 may include metal material (such as titanium, titanium nitridation At least one of object, tantalum, tantalum nitride or any combination thereof) or DOPOS doped polycrystalline silicon.Upper conductive layer 640 can correspond to capacitor Another in a pair of electrodes of device.Therefore, the capacitor arrangement for the illustrative embodiments conceived according to the present invention can be with Including can pass through first electrode (such as lower conductive pattern 612) that dielectric layer (such as dielectric layer 630) is separated from each other and Second electrode (such as upper conductive layer 640).Alternatively, the capacitor arrangement for the illustrative embodiments conceived according to the present invention can To include two electrodes 612 being separated from each other by dielectric layer 630.
In general, sacrificial layer (or moulding layer) and at least three mask layers being sequentially stacked on sacrificial layer can be used for The capacitor with relatively high depth-width ratio is formed on substrat structure.However, the exemplary embodiment party conceived according to the present invention Formula, because the first sacrificial layer 210 and the second sacrificial layer 230 are selected relative to the second support article pattern 242 with relatively high etching Selecting property (such as 10 or bigger: 1 etch-rate), so can be reduced the quantity of mask layer.
As an example, in the technique for etching the first sacrificial layer 210, the second sacrificial layer 230 and the first support layer 220, Second support article pattern 242 may be used as etching mask.In this case, after etch process completion, the second supporter At least part of pattern 242 can be stayed in the second sacrificial pattern 232 due to above-mentioned etch-rate difference.Second supporter The remainder of pattern 242 may be used as supporter.Therefore, the second support article pattern 242 may be used as supporter and first Both etching masks of sacrificial layer 210 and the second sacrificial layer 230.Therefore, it is possible to reduce or minimize sacrificial for patterning first The quantity of the mask layer of domestic animal the 210, first support layer 220 of layer and the second sacrificial layer 230.
Compared with pure carbon-coating, doping can have relatively strong adhesive strength relative to conductive material with the carbon-coating of impurity. The first sacrificial pattern 212 and the second sacrificial pattern 232 for the illustrative embodiments conceived according to the present invention may include mixing The miscellaneous carbon-coating with impurity.Therefore, being formed in lower conductiving layer 610 in the first sacrificial pattern 212 and the second sacrificial pattern 232 can be with It is stable in structure.For example, lower conductiving layer 610 can not divide with the first sacrificial pattern 212 and the second sacrificial pattern 232 From.
First support article pattern 222 of the illustrative embodiments conceived according to the present invention and the second support article pattern 242 may include having than Si3N4The low dielectric constant of dielectric constant material (such as silicon (Si), Si oxide (SiO2)、 Metal oxide (such as WOx、TiOxOr AlOx) or silicon nitrogen oxides (such as SiON)).In this case, even if adjacent Lower conductive pattern 612 between first support article pattern 222 and second support article pattern 242 have than include Si3N4Support Electric short circuit between adjacent lower conductive pattern 612 will not occur for the small width of the width of article pattern.It is thereby possible to reduce or Minimize the distance between adjacent lower conductive pattern 612.As a result, the surface area of lower conductive pattern 612 can be increased to realize tool There is the capacitor arrangement of opposite high capacitance.
The another exemplary embodiment conceived according to the present invention, the method for manufacturing semiconductor devices may include in substrate 100 tops form the first sacrificial layer 210, the first support layer 220, the second sacrificial layer 230 and multiple second support article patterns 242.This method may include being used as the first sacrificial layer of mask etching 210, first by using multiple second support article patterns 242 Support layer 220 and the second sacrificial layer 230 are to form multiple first sacrificial patterns 212, multiple first support article patterns 222 and more A second sacrificial pattern 232.The thickness of each second support article pattern 242 can be reduced by etching.Etching can be more A first sacrificial pattern 212, multiple first support article patterns 222, multiple second sacrificial patterns 232 and multiple second supporter figures Multiple sunk areas 500 are formed between case 242.This method may include in each sunk area of multiple sunk areas 500 Form capacitor.Capacitor may include the first conductive pattern 612,630 and of dielectric pattern on the first conductive pattern 612 The second conductive pattern 640 on dielectric pattern 630.At least two second supports in multiple second support article patterns 242 Article pattern can be positioned as the capacitor that support is formed in each sunk area 500.This method may include removal multiple the One sacrificial pattern 212 and multiple second sacrificial patterns 232.
Figure 12 and 13 is the method for showing the manufacturing semiconductor devices for the illustrative embodiments conceived according to the present invention Cross-sectional view.Below in reference to Figure 12 and 13 describe present inventive concept an illustrative embodiments in, to above by reference to The description of the component and technical characteristic that Fig. 1 to 11 is described identical or essentially identical component and technical characteristic can be omitted or letter Strategic point refers to.
Referring to Fig.1 2, can execute with referring to figs. 1 to the essentially identical technique of technique described in 4 to form the second supporter Pattern 242, the second sacrificial pattern 232 and sunk area 500.However, each sunk area 500 can be towards the first support layer 220 become narrow gradually.Each sunk area 500 can with the top surface substantially the same height of the second sacrificial pattern 232 at have There is maximum width, and there can be minimum widith at height identical with the bottom surface of the second sacrificial pattern 232.
Second sacrificial pattern 232 may include the carbon-coating adulterated with impurity.For example, carbon-coating can be amorphous carbon layer (ACL) Or spin-coating hardmask (SOH) layer.Impurity can be substantially uniformly distributed in the second sacrificial pattern 232, or can be There is concentration gradient in two sacrificial patterns 232.For example, the concentration of impurity can be in the second sacrificial pattern 232 towards first Support nitride layer 220 is gradually lower.Alternatively, the concentration of impurity can in the second sacrificial pattern 232 towards the first support layer 220 by Gradual change is high.
Referring to Fig.1 2 and 4, cleaning procedure can be executed with remove stayed in the technique for forming the second sacrificial pattern 232 it is recessed Fall into the etch byproducts in region 500.A part of second sacrificial pattern 232 can also be removed in cleaning procedure, thus Each sunk area 500 can (such as along direction parallel with the upper surface of substrat structure 100) laterally expand.As a result, Each sunk area 500 can have substantially uniform width.
When the concentration of impurity is gradually lower in the second sacrificial pattern 232 towards the first support layer 220, cleaning procedure Clean solution or clean gas that the part relatively low relative to impurity concentration has relatively high etch-rate can be used.Or Person, when the concentration of impurity is gradually got higher in the second sacrificial pattern 232 towards the first support layer 220, cleaning procedure can be with Use the clean solution or clean gas relative to the relatively high part of impurity concentration with relatively high etch-rate.
Referring to Fig.1 3, it can execute with the essentially identical technique of the technique referring to described in Figures 5 and 6 to form the first supporter Pattern 222 and the first sacrificial pattern 212.Therefore, sunk area 500 can extend vertically, and sunk area 500 can arrive Up to the upper surface of substrat structure 100.However, each sunk area 500 can become narrow gradually towards substrat structure 100.It is each recessed A maximum width can be had at height identical with the top surface of the first sacrificial pattern 212 by falling into region 500, and can with There is minimum widith at the identical height of bottom surface of first sacrificial pattern 212.For example, each sunk area 500 can be There is substantially uniform width between two support article patterns 242, the second sacrificial pattern 232 and the first support article pattern 222, but It is that can be become narrow gradually with sunk area 500 close to the upper surface of substrat structure 100 between the first sacrificial pattern 212.
First sacrificial pattern 212 may include the carbon-coating adulterated with impurity.For example, carbon-coating can be amorphous carbon layer (ACL) Or spin-coating hardmask (SOH) layer.Impurity can be substantially uniformly distributed in the first sacrificial pattern 212, or can be There is concentration gradient in one sacrificial pattern 212.For example, the concentration of impurity can be in the first sacrificial pattern 212 towards substrate knot Structure 100 is gradually lower.Alternatively, the concentration of impurity can gradually be got higher in the first sacrificial pattern 212 towards substrat structure 100.
Referring to Fig.1 3 and 6, cleaning procedure can be executed with remove stayed in the technique for forming the first sacrificial pattern 212 it is recessed Fall into the etch byproducts in region 500.A part of first sacrificial pattern 212 can also be removed in cleaning procedure, thus Each sunk area 500 can laterally expand.As a result, each sunk area 500 can have substantially uniform width.
When the concentration of impurity is gradually lower in the first sacrificial pattern 212 towards substrat structure 100, cleaning procedure can be with There is the clean solution or clean gas of relatively high etch-rate using the part relatively low relative to impurity concentration.Alternatively, In the case where the concentration of impurity is gradually got higher in the first sacrificial pattern 212 towards substrat structure 100, cleaning procedure can make With the clean solution or clean gas relative to the relatively high part of impurity concentration with relatively high etch-rate.
Hereafter, it can execute and carry out manufacturing semiconductor devices with the essentially identical technique of the technique referring to described in Fig. 7 to 11.
The illustrative embodiments conceived according to the present invention, each sunk area 500 can be formed to have substantially Uniform width.The surface area for being formed in the lower conductive pattern 612 in the sunk area 500 with substantially uniform width can To be greater than the surface area for the lower conductive pattern being formed in the sunk area become narrow gradually towards substrat structure 100.As a result, can be with Form or realize the capacitor arrangement with relatively high capacitor.
Figure 14 is the circuit diagram for showing dynamic random access memory (DRAM) device.Below in reference to this hair of Figure 14 description In one illustrative embodiments of bright design, to identical or basic as the component or technical characteristic described above by reference to Fig. 1 to 13 The description of identical component and technical characteristic can be omitted or abstractly refer to.
Referring to Fig.1 4, DRAM device may include transistor TR, capacitor CP, wordline WL and bit line BL.Transistor TR, word Line WL and bit line BL can be included in the substrat structure 100 referring to figs. 1 to 13 descriptions.Transistor TR may include gate terminal Sub- GE, the first source/drain terminal SD1 and the second source/drain terminal SD2.Wordline WL and bit line BL can be electrically connected To gate terminal GE and the first source/drain terminal SD1.
Capacitor CP may include the lower conductive pattern 612 being more fully described above by reference to Figure 11,630 and of dielectric layer Upper conductive layer 640.Lower conductive pattern 612 may be electrically connected to the second source/drain terminal SD2.The method for forming capacitor CP Can with referring to figs. 1 to essentially identical described in 11 and/or 12 and 13.
Figure 15 to 18 is the method for showing the formation conductive pattern for the illustrative embodiments conceived according to the present invention Cross-sectional view.Below in reference to Figure 15 to 18 describe present inventive concept an illustrative embodiments in, to above by reference to Fig. 1 Description to the component and the identical or essentially identical component and technical characteristic of technical characteristic of 11 descriptions can be omitted or briefly Ground refers to.
Referring to Fig.1 5, the 4th sacrificial layer 20 and support layer 30 can be sequentially formed on substrat structure 10.Substrate knot Structure 10, the 4th sacrificial layer 20 and support layer 30 can respectively with the substrat structure 100 being more fully described above by reference to Fig. 1, Second sacrificial layer 230 and the second support layer 240 are essentially identical.Photoresist pattern 40 can be formed in support layer 30 On.Photoresist pattern 40 can expose a part of the top surface of support layer 30.
Referring to Fig.1 6, support layer 30 and the 4th sacrificial layer 20 can be patterned to form support article pattern 32 and the 4th Sacrificial pattern 22.Support article pattern 32 and the 4th sacrificial pattern 22 formation may include use photoresist pattern 40 as Etching mask executes anisotropic etching process to etch support layer 30 and the 4th sacrificial layer 20.Anisotropic etching process can With each to different with being executed to the second support layer 240 and the second sacrificial layer 230 of being more fully described above by reference to Fig. 3 and 4 Property etch process is essentially identical.The anisotropic etching process that the 4th sacrificial layer 20 can be executed, until the top of substrat structure 10 Surface is exposed.Therefore, the sunk area 70 of the top surface of exposure substrat structure 10 can be formed in support article pattern 32 and the In four sacrificial patterns 22.
Conductive layer 50 and the 5th sacrificial layer 60 can be sequentially formed at substrat structure 10, the 4th sacrificial pattern 22 and support On article pattern 32.Conductive layer 50 and the 5th sacrificial layer 60 can be formed by executing CVD technique, PVD process or ALD technique.It leads Electric layer 50 can extend along the inner surface of sunk area 70 and the top surface of support article pattern 32.5th sacrificial layer 60 can be filled out It fills sunk area 70 and the top surface of support article pattern 32 can be covered.5th sacrificial layer 60 may include and the 4th sacrificial layer 20 identical materials.
Referring to Fig.1 7, the 5th sacrificial layer 60 and conductive layer 50 can be flattened to form the 5th sacrificial pattern 62 and conduction Pattern 52.Flatening process (such as etch back process) can be executed until the top surface of support article pattern 32 is exposed.
Referring to Fig.1 8, the 4th sacrificial pattern 22 and the 5th sacrificial pattern 62 can be removed.For example, the 4th sacrificial pattern 22 It can be removed by using the cineration technics and/or stripping technology of oxygen plasma with the 5th sacrificial pattern 62.Therefore, by The conductive pattern 52 that support article pattern 32 supports can be formed on substrat structure 10.
The illustrative embodiments conceived according to the present invention can provide the semiconductor device with the reliability improved Part.
The illustrative embodiments conceived according to the present invention can provide the semiconductor device that manufacture has the efficiency improved The method of part.
Although being particularly shown and describing present inventive concept referring to the illustrative embodiments of present inventive concept, It will be appreciated by the skilled addressee that can carry out various changes of form and details wherein without departing from structure of the present invention The spirit and scope of think of.
This application claims enjoy the South Korea patent application 10- submitted in Korean Intellectual Property Office on the 18th of September in 2017 No. 2017-0119705 priority, it is open to be incorporated herein by reference of text.

Claims (20)

1. a kind of method of manufacturing semiconductor devices, which comprises
Substrat structure is provided；
Form lower sacrificial layer, lower support layer, upper sacrificial layer and the upper support layer being sequentially stacked on the substrat structure；
Mask pattern is formed on the upper support layer；
The upper support layer is etched as etching mask by using the mask pattern and forms upper support pattern；
Formed penetrate the upper support pattern, the upper sacrificial layer, the lower support layer and the lower sacrificial layer recess Region；And
The lower sacrificial layer and the upper sacrificial layer are removed,
Wherein the mask pattern is removed during the technique for forming the upper support pattern, and
Wherein, at the end of the technique for forming the sunk area, the upper support pattern is left.
2. according to the method described in claim 1, further include:
Form the lower electrode pattern extended along the inner surface of the sunk area.
3. according to the method described in claim 2, wherein forming the lower electrode pattern and including:
Form the lower electrode layer extended along the upper surface of the upper support pattern and the inner surface of the sunk area； And
Remove the lower electrode layer on the upper surface of the upper support pattern.
4. according to the method described in claim 2, further include:
Upper electrode layer is formed on the lower electrode pattern；And
Dielectric layer is formed between the lower electrode pattern and the upper electrode layer.
5. according to the method described in claim 1, wherein the thickness of the upper support pattern is forming the sunk area It is reduced during technique.
6. according to the method described in claim 1, wherein forming the sunk area includes being made using the upper support pattern The upper sacrificial layer, the lower support layer and the lower sacrificial layer are sequentially etched for etching mask.
7. according to the method described in claim 6, wherein formed the sunk area further include execute the first cleaning procedure, it is described First cleaning procedure laterally expands the sunk area in the upper sacrificial layer, and
Wherein first cleaning procedure is executed before the technique for etching the lower support layer.
8. according to the method described in claim 6, wherein formed the sunk area further include execute the second cleaning procedure, it is described Second cleaning procedure laterally expands the sunk area in the lower sacrificial layer, and
Wherein second cleaning procedure is executed after the technique for etching the lower sacrificial layer.
9. a kind of method of manufacturing semiconductor devices, which comprises
Substrat structure is provided；
Form the sacrificial layer and support layer being sequentially stacked on the substrat structure；
Mask pattern is formed on above support layer；
Above support layer is etched as etching mask by using the mask pattern and forms support article pattern；
The sacrificial layer is etched as etching mask by using above support pattern and forms sacrificial pattern；And
The sacrificial pattern is removed,
Wherein the mask pattern is removed during the technique for forming above support pattern, and
Wherein, at the end of the technique for forming the sacrificial pattern, above support pattern is left.
10. according to the method described in claim 9, wherein the sacrificial layer includes the carbon-coating adulterated with impurity, and
Wherein the impurity includes the element different from carbon.
11. according to the method described in claim 10, wherein the impurity is evenly distributed in the sacrificial pattern, and
Wherein the concentration range of the impurity described in the sacrificial pattern is from 20 volume % to 80 volume %.
12. according to the method described in claim 10, wherein the impurity includes boron (B) or tungsten (W).
13. according to the method described in claim 10, wherein the concentration of the impurity in the sacrificial pattern have gradient, with And
Wherein the concentration of the impurity gradually gets higher towards the substrat structure or is gradually lower towards the substrat structure.
14. according to the method described in claim 9, wherein above support pattern includes silicon (Si), Si oxide, metal oxidation Object or silicon nitrogen oxides.
15. according to the method described in claim 9, wherein etching the sacrificial layer by using including Cl2The etching gas of gas Dry plasma etch process and execute.
16. according to the method for claim 15, wherein the etching gas further includes O2Gas, HBr gas and the oxidation of carbon sulphur Object (COS) gas.
17. a kind of method of manufacturing semiconductor devices, which comprises
It is rectangular at the first sacrificial layer, the first support layer, the second sacrificial layer and multiple second support article patterns on substrate；
By using the multiple second support article pattern as the first sacrificial layer described in mask etching, first support layer With second sacrificial layer to form multiple first sacrificial patterns, multiple first support article patterns and multiple second sacrificial patterns, Wherein the thickness of described second support each of article pattern is reduced by the etching, and wherein it is described be etched in it is described more A first sacrificial pattern, the multiple first support article pattern, the multiple second sacrificial pattern and the multiple second support Multiple sunk areas are formed between article pattern；
Capacitor is formed in each sunk area of the multiple sunk area, wherein the capacitor includes the first conductive pattern Case, the dielectric pattern on first conductive pattern and the second conductive pattern on the dielectric pattern, Yi Jiqi Described in it is multiple second support article patterns at least two second support article patterns be positioned as support be formed in each depressed area The capacitor in domain；And
Remove the multiple first sacrificial pattern and the multiple second sacrificial pattern.
18. according to the method for claim 17, wherein after forming first conductive pattern and described in the formation Before dielectric pattern and second conductive pattern, the multiple first sacrificial pattern and the multiple second sacrificial pattern quilt Removal.
19. according to the method for claim 17, wherein formed it is the multiple second support article pattern include:
The second support layer is formed on second sacrificial layer；
Multiple mask patterns are formed in second support layer；And
The multiple mask pattern is used to etch second support layer as etching mask,
Wherein the multiple mask pattern is removed during the technique for etching second support layer.
20. according to the method for claim 17, wherein each of first sacrificial layer and second sacrificial layer include It adulterates with the carbon-coating of impurity, and
Wherein the impurity includes the element different from carbon.
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