CN109524336B - Tubular PECVD graphite boat structure - Google Patents
Tubular PECVD graphite boat structure Download PDFInfo
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- CN109524336B CN109524336B CN201811354016.7A CN201811354016A CN109524336B CN 109524336 B CN109524336 B CN 109524336B CN 201811354016 A CN201811354016 A CN 201811354016A CN 109524336 B CN109524336 B CN 109524336B
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 124
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 124
- 239000010439 graphite Substances 0.000 title claims abstract description 124
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims abstract description 102
- 230000000712 assembly Effects 0.000 claims abstract description 11
- 238000000429 assembly Methods 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 19
- 235000012431 wafers Nutrition 0.000 description 8
- 230000006872 improvement Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Chemical Vapour Deposition (AREA)
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Abstract
The invention discloses a tubular PECVD graphite boat structure, which comprises a ceramic base, two boat sheet locking disc assemblies, two ceramic fixing rings, a graphite rod and a plurality of boat sheets, wherein each boat sheet locking disc assembly comprises a ceramic insulating disc and a graphite conducting disc, the graphite conducting disc is provided with a plurality of clamping grooves and a plurality of first conducting grooves, the clamping grooves and the first conducting grooves are uniformly and alternately arranged, the ceramic insulating disc is provided with a plurality of clamping teeth, the clamping teeth and the clamping grooves are equal in number and matched, the clamping teeth are provided with second conducting grooves, a boat sheet mounting groove is formed in a mounting cylindrical surface on the ceramic base, the ceramic fixing rings are provided with fixing grooves, the boat sheets can be axially inserted into the boat sheet mounting grooves, the front ends of the boat sheets are simultaneously clamped in the first conducting grooves and the fixing grooves at the front ends, and the rear ends of the boat sheets are simultaneously electrically clamped in the second conducting grooves and the fixing. The boat sheet is arranged in a fan shape, the space of the quartz tube is fully utilized, the carrying quantity is larger than that of the prior art, the graphite boat electrode is positioned in the center of the quartz tube, and the boat sheet is arranged on the periphery of the electrode, so that the airflow field is smoother and more uniform.
Description
Technical Field
The invention relates to the field of photovoltaic manufacturing, in particular to a tubular PECVD graphite boat structure.
Background
In recent years, with the rapid development of the photovoltaic industry in China, the requirement on the capacity of equipment is higher and higher, in order to improve the carrying capacity of a graphite boat and further improve the capacity, the latest graphite boat has dug the carrying potential to the maximum extent, the principle structure of the novel graphite boat is shown in figure 1, three clamping points 101 are arranged on a boat sheet 100, the inserting direction is shown by an arrow, and because the clamping points are not arranged on one side of the arrow, a silicon wafer can slide out along the opposite direction of the arrow; the graphite boat has two electrodes 102, the positive and negative poles of the high-frequency power supply are connected on the two electrodes 102, a represents that two adjacent boat sheets 100 are respectively connected on the upper and lower two different electrodes, thus an electric field can be formed between the two adjacent boat sheets of the graphite boat, and all the spaced boat sheets are connected on the same electrode, which is the inter-boat sheet discharge principle of the graphite boat. The tubular PECVD equipment has several methods for improving the productivity, the first is to increase the number of the tubes of the equipment, and the increase from the previous 2 tubes to the current 5 tubes can cause the height of the equipment to be too high, and the method is about to reach the limit; the second method is to increase the single tube capacity of the equipment, and the methods for increasing the single tube capacity are also two methods, one is to shorten the time of a single coating process, and the other is to increase the number of silicon wafers coated at a time, namely to increase the carrying quantity of a single graphite boat.
The existing graphite boat projection is shown in fig. 2, and when the number of the rows is increased, the length of the graphite boat is increased, and fig. 2 is 8 rows, which has reached the limit, and the width of the graphite boat is also increased, i.e. the number of the rows of the boat sheets is increased, but this will result in the caliber of the quartz tube being enlarged, thereby increasing the device layer height, and the potential of this method is also explored.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the prior art and provides a tubular PECVD graphite boat structure which has the advantages of large carrying capacity, smoother and uniform airflow field and reasonable layout.
In order to solve the technical problems, the invention adopts the following technical scheme:
a tubular PECVD graphite boat structure comprises a ceramic base, two boat sheet locking disc assemblies, two ceramic fixing rings, a graphite rod and a plurality of boat sheets, wherein the boat sheet locking disc assemblies comprise ceramic insulating discs and graphite conducting discs, a plurality of clamping grooves and a plurality of first conducting grooves are formed in the graphite conducting discs along the circumferential direction, the clamping grooves and the first conducting grooves are uniformly and alternately arranged, a plurality of clamping teeth are arranged on the ceramic insulating discs, the number of the clamping teeth is equal to that of the clamping grooves, the clamping teeth can be matched with the clamping grooves, second conducting grooves are formed in the clamping teeth, the two boat sheet locking disc assemblies are fixed at the front end and the rear end of the ceramic base, the first conducting grooves at the front end and the second conducting grooves at the rear end are positioned on the same straight line, the graphite rod is arranged in the ceramic base in a penetrating mode, the front end of the graphite rod is connected with the graphite conducting discs at the front end in an insulating mode, and the graphite rod is connected with the graphite conducting discs at the rear end in a conducting mode, the front end of graphite rod has first electrode hole, be equipped with the second electrode hole on the graphite conducting disc, ceramic fixing ring has the opening, and two ceramic fixing ring's opening through oneself is fixed respectively at ceramic base both ends, and ceramic fixing ring's diameter is greater than the diameter of graphite conducting disc, be equipped with the installation cylinder on the ceramic base, be equipped with a plurality of circumference evenly arranged's boat piece mounting groove on the installation cylinder, ceramic fixing ring is last to be equipped with a plurality of fixed slots, the boat piece can be followed the axial and inserted in the boat piece mounting groove, the boat piece front end blocks simultaneously in the first conducting groove of front end and ceramic fixing ring's fixed slot, the rear end of boat piece blocks simultaneously in the second conducting groove of rear end and ceramic fixing ring's fixed slot.
As a further improvement of the above technical solution, preferably, a plurality of ceramic connecting rings are arranged along the axial direction of the ceramic base, each ceramic connecting ring has an opening, each boat piece sequentially passes through the ceramic connecting rings, and the ceramic connecting rings are fixed on the ceramic base through two ends of each opening, and the diameter of each ceramic connecting ring is larger than that of the graphite conductive disk.
As a further improvement of the above technical solution, preferably, each surface of the boat is provided with a plurality of groups of clamping points for clamping the silicon wafer, each group of clamping points is uniformly arranged along the axial direction, each group of clamping points includes three clamping points, one clamping point is located at one end, the other two clamping points are located at the other end, an isosceles triangle structure is formed between the three clamping points, and after the boat is mounted on the ceramic base, one end having one clamping point is located at the outer side.
As a further improvement of the above technical solution, preferably, the boat sheet mounting groove is a T-shaped groove, a vertical groove of the T-shaped groove faces outward, and the boat sheet is provided with a protruding strip that can be engaged with a horizontal groove of the T-shaped groove.
As a further improvement of the above technical solution, preferably, the graphite conducting disc has a stepped hole, the front end of the graphite rod is inserted into the stepped hole, and an insulating convex ring is arranged between the graphite rod and the stepped hole, and the insulating convex ring is fixed on the ceramic base at this end.
As a further improvement of the above technical means, preferably, the rear end of the graphite rod abuts against a step of the stepped hole of the graphite conductive plate at the end.
As a further improvement of the above technical means, preferably, the ceramic base has an inverted V-shaped structure.
As a further improvement of the above technical solution, preferably, a central angle of the ceramic fixing ring is greater than 180 °.
Compared with the prior art, the invention has the advantages that:
the fan-shaped structure fully utilizes the space of the quartz tube, so that the loading quantity of the graphite boat is larger than that of the conventional graphite boat, and the loading quantity of the graphite boat is greatly improved, which is the main advantage of the invention; in addition, the graphite boat electrode is positioned in the center of the quartz tube, and the boat sheet is arranged around the electrode, so that the gas flow is not blocked from flowing to the boat sheet, and the gas flow field is smoother and more uniform.
Drawings
FIG. 1 is a schematic diagram of a prior art graphite boat.
FIG. 2 is a schematic diagram of a boat in the prior art.
FIG. 3 is a schematic view showing a position where a graphite boat is installed in a quartz tube according to the prior art.
FIG. 4 is a schematic view (front end) of the graphite boat according to the present invention.
FIG. 5 is a schematic view (rear end) of the graphite boat in the present invention.
Fig. 6 is an enlarged view at E in fig. 4.
FIG. 7 is a schematic view of the boat locking disk assembly of the present invention.
FIG. 8 is a schematic view of a ceramic retaining ring according to the present invention.
FIG. 9 is a schematic structural view of a ceramic susceptor according to the present invention.
Fig. 10 is an enlarged view at F in fig. 9.
FIG. 11 is a schematic view of the structure of a graphite rod according to the present invention.
FIG. 12 is a schematic illustration of the process of inserting the sheets of the present invention.
FIG. 13 is a schematic view showing the position of the graphite boat installed in the quartz tube according to the present invention.
The reference numerals in the figures denote:
100. boat sheets; 101. sticking points; 102. a convex strip; 103. perforating; 200. a ceramic base; 201. a through hole; 210. mounting a cylindrical surface; 211. a boat sheet mounting groove; 2111. a vertical slot; 2112. a transverse groove; 220. an insulating convex ring; 300. a boat locking disk assembly; 301. a second electrode hole; 310. a ceramic insulating disk; 311. clamping teeth; 312. a second conductive slot; 320. a graphite conductive disk; 321. a card slot; 322. a first conductive slot; 323. a stepped bore; 400. a ceramic retaining ring; 401. fixing grooves; 402. a fixing hole; 500. a graphite rod; 501. a first electrode hole; 600. a ceramic connecting ring; 700. a quartz tube.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples of the specification.
As shown in fig. 4 to 12, the tubular PECVD graphite boat structure of the present embodiment includes a ceramic base 200, two boat locking disc assemblies 300, two ceramic fixing rings 400, a graphite rod 500 and a plurality of boat sheets 100, wherein the boat locking disc assemblies 300 include a ceramic insulating disc 310 and a graphite conductive disc 320, the graphite conductive disc 320 is circumferentially provided with a plurality of slots 321 and a plurality of first conductive grooves 322, the slots 321 and the first conductive grooves 322 are uniformly and alternately arranged, the ceramic insulating disc 310 is provided with a plurality of latches 311, the number of the latches 311 is equal to that of the slots 321, the latches 311 are capable of fitting with the slots 321, the latches 311 are provided with second conductive grooves 312, the two boat locking disc assemblies 300 are fixed at the front and rear ends of the ceramic base 200 (b in fig. 4 represents the front end of the graphite boat, c in fig. 5 represents the rear end of the graphite boat), and the first conductive grooves 322 at the front end and the second conductive grooves 312 at the rear end are located on the same straight line, the graphite rod 500 is arranged in the ceramic base 200 in a penetrating way, the front end of the graphite rod 500 is connected with the graphite conductive disc 320 at the front end in an insulating way, the rear end of the graphite rod 500 is connected with the graphite conductive disc 320 at the rear end in a conductive way, the front end of the graphite rod 500 is provided with a first electrode hole 501, the graphite conductive disc 320 is provided with a second electrode hole 301, the ceramic fixing rings 400 are provided with openings, the two ceramic fixing rings 400 are respectively fixed at the two ends of the ceramic base 200 through the respective openings, the diameter of the ceramic fixing rings 400 is larger than that of the graphite conductive disc 320, the ceramic base 200 is provided with a mounting cylindrical surface 210, the mounting cylindrical surface 210 is provided with a plurality of boat sheet mounting grooves 211 which are uniformly arranged in the circumferential direction, the ceramic fixing rings 400 are provided with a plurality of fixing grooves 401, boat sheets 100 can be inserted into the boat sheet mounting grooves 211 along the axial direction, the front ends of the boat sheets 100, the rear end of the boat 100 is simultaneously caught in the second conductive groove 312 at the rear end and the fixing groove 401 of the ceramic fixing ring 400.
The ceramic base 200 and the graphite rod 500 form a base, the boat pieces 100 are inserted into the boat piece mounting grooves 211 on the mounting cylindrical surface 210 one by one, two ends are fixed by the boat piece locking disc assembly 300, wherein the graphite conducting discs 320 at the front and rear ends are staggered, so that the front ends of the boat pieces 100 are clamped in the first conducting grooves 322 of the graphite conducting discs 320 at the front ends, the rear ends of the boat pieces are clamped in the second conducting grooves 312 of the ceramic insulating discs 310 at the rear ends, all the boat pieces 100 directly clamped in the first conducting grooves 322 at the front ends and the graphite conducting discs 320 at the front ends are conducted into a whole and are conducted with the second electrode holes 301 on the graphite conducting discs 320 at the front ends, and the boat pieces 100 are directly clamped in the first conducting grooves 322 at the front ends and clamped in the second conducting grooves 312 of the ceramic insulating discs 310 at the rear ends and are insulated from the graphite conducting discs 320; and all boat sheets 100 directly clamped in the second conductive grooves 312 of the front ceramic insulating disk 310 are insulated from the front graphite conductive disk 320, and such boat sheets 100 are clamped in the first conductive grooves 322 of the graphite conductive disk 320 at the rear end, are conducted with the graphite conductive disk 320 to form a whole, and are conducted with the graphite rod 500 at the rear end, and thus are conducted with the first electrode holes 501 on the graphite rod 500. The first electrode hole 501 and the second electrode hole 301 are connected with different electrodes, so that the effect is the same as that of the conventional graphite boat, and the adjacent boat sheets 100 are connected with different electrodes, so that an electric field is generated between the adjacent boat sheets 100.
In this embodiment, specifically, the graphite conducting disc 320 has a step hole 323, the front end of the graphite rod 500 is inserted into the step hole 323, and an insulating convex ring 220 is disposed between the two, and the insulating convex ring 220 is fixed on the ceramic base 200 at this end. The rear end of the graphite rod 500 abuts against the step of the step hole 323 of the graphite conductive plate 320 at this end, so that at the front end, due to the partition of the insulating convex ring 220, the graphite rod 500 and the graphite conductive plate 320 are insulated, and at the rear end, the graphite rod 500 and the graphite conductive plate 320 form a conductive structure. The ceramic base 200 is provided with a through hole 201 for mounting the graphite rod 500.
In this embodiment, the number of the fixing grooves 401 of the ceramic fixing ring 400 indicates the number of boat pieces 100 that can be inserted. The central angle of the ceramic retaining ring 400 is typically greater than 180 deg., so that as many boat sheets 100 as possible are inserted. Wherein, the ceramic base 200 is an inverted V-shaped structure. Thus, the ceramic susceptor 200 and the boat 100 together form a circular structure, and the space of the quartz tube 700 is fully utilized.
In this embodiment, a plurality of ceramic connection rings 600 are disposed along the axial direction of the ceramic base 200, the ceramic connection rings 600 have openings, the ceramic connection rings 600 sequentially pass through the boat sheets 100 and are fixed on the ceramic base 200 through two ends of the openings, and the diameter of the ceramic connection rings 600 is larger than that of the graphite conductive plate 320. The ceramic connection ring 600 is mainly used to fix the outward ends of the boat sheets 100 and prevent the boat sheets from shaking. The boat 100 is provided with a through hole 103 through which the controlled ceramic connection ring 600 passes.
In this embodiment, the boat mounting groove 211 is a T-shaped groove, and the vertical groove 2111 of the T-shaped groove faces outward, and the boat 100 is provided with a protruding strip 102 that can be engaged with the horizontal groove 2112 of the T-shaped groove. The boat piece is mounted by inserting the boat piece 100 into the boat piece mounting groove 211 on the mounting cylindrical surface 210 from the axial direction, and the protruding strips 102 on the boat piece 100 are engaged with the horizontal grooves 2112 of the boat piece mounting groove 211, so that the protruding strips 102 cannot move in the radial direction, thereby locking the boat piece 100 in the radial direction of the ceramic base 200, and the boat piece 100 cannot move in the axial direction by locking the boat piece locking disc assemblies 300 at both ends. Meanwhile, the boat 100 is fixed by the ceramic fixing ring 400 at both ends, each boat 100 is inserted into the fixing groove 401 of the ceramic fixing ring 400, the opening of the ceramic fixing ring 400 is fixed on the ceramic base 200 by the fixing hole 402, and the boat 100 is connected by the ceramic connecting ring 600 and then fixed on the ceramic base 200, so that all the boat 100 can be connected together and form a firm whole with the ceramic base 200.
In this embodiment, each surface of the boat 100 is provided with a plurality of groups of clamping points 101 for clamping silicon wafers, each group of clamping points 101 is uniformly arranged along the axial direction, each group of clamping points 101 includes three clamping points 101, one clamping point 101 is located at one end, the other two clamping points 101 are located at the other end, an isosceles triangle structure is formed between the three clamping points 101, and after the boat 100 is installed on the ceramic base 200, one end having one clamping point 101 is located at the outer side. The insert mode is shown by arrows in fig. 12, the silicon wafer is vertically inserted and then horizontally (leftwards or rightwards) moved to three clamping points 101, so that the silicon wafer has the clamping points 101 at the upper and lower parts in the vertical direction, and when the boat 100 forms a negative angle with the horizontal plane, the silicon wafer cannot slide out of the boat 100, so the design meets the arrangement of the fan-shaped structure of the graphite boat. The conventional graphite boat sheets are only at a positive angle to the horizontal (as shown in FIG. 1), otherwise the silicon wafers slip out of the boat sheet 100.
As shown in fig. 3, the upper half of the quartz tube 700 has a large space, but the space of the upper half of the quartz tube cannot be fully utilized due to the structure of the conventional graphite boat, and meanwhile, the conventional graphite boat cannot adapt to the shape of the quartz tube well, which has a certain influence on the uniformity of the gas flow field in the quartz tube 700. In view of these disadvantages, the graphite boat structure shown in fig. 13 of the present invention can fully utilize the upper half space of the quartz tube 700 to increase the carrying amount of the graphite boat, and the fan-shaped structure can improve the uniformity of the gas flow field in the quartz tube 700.
As shown in FIG. 1, the conventional graphite boat has 27 boat sheets and 416 slide glass sheets. As shown in FIG. 4, the graphite boat of the present invention has 40 sheets, the number of the carried sheets is 624 (the two sides of the boat have silicon sheets), the carried sheet number of the graphite boat is greatly increased, the sector structure fully utilizes the space of the quartz tube 700, and the carried sheet number is larger than that of the existing graphite boat, which is the main advantage of the present invention, the sector structure fully adapts to the cylindrical inner cavity of the quartz tube 700, the space of the quartz tube is fully utilized, the number of the boat sheets of the graphite boat is increased, the number of the carried sheets is increased from the original 27 sheets to 40 sheets, the carried sheet number is increased by 50%, thereby the single capacity of the tubular PECVD is increased, of course, the present invention is not a limit, and if the width of the base foot of the ceramic base 200 is reduced, the number of the boat sheets can also be.
In addition, in the prior art, two electrodes of the graphite boat block the flow of gas in the middle of the boat sheet; according to the graphite boat, the electrode of the graphite boat is positioned in the center of the quartz tube, and the boat sheet is arranged around the electrode, so that gas cannot be blocked from flowing to the boat sheet, and an airflow field can be smoother and more uniform.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (8)
1. The utility model provides a tubular PECVD graphite boat structure which characterized in that: the novel boat-shaped piece locking device comprises a ceramic base (200), two boat-shaped piece locking disc assemblies (300), two ceramic fixing rings (400), a graphite rod (500) and a plurality of boat-shaped pieces (100), wherein the boat-shaped piece locking disc assemblies (300) comprise ceramic insulating discs (310) and graphite conducting discs (320), a plurality of clamping grooves (321) and a plurality of first conducting grooves (322) are formed in the graphite conducting discs (320) along the circumferential direction, the clamping grooves (321) and the first conducting grooves (322) are uniformly and alternately arranged, a plurality of clamping teeth (311) are arranged on the ceramic insulating discs (310), the number of the clamping teeth (311) is equal to that of the clamping grooves (321), the clamping teeth (311) can be matched with the clamping grooves (321), second conducting grooves (312) are formed in the clamping teeth (311), the two boat-shaped piece locking disc assemblies (300) are fixed to the front end and the rear end of the ceramic base (200), and the first conducting grooves (322) at the front end and the second conducting grooves (312) at the rear end are positioned on the same straight line, the graphite rod (500) is arranged in the ceramic base (200) in a penetrating manner, the front end of the graphite rod (500) is connected with the graphite conductive disc (320) at the front end in an insulating manner, the rear end of the graphite rod (500) is connected with the graphite conductive disc (320) at the rear end in a conductive manner, the front end of the graphite rod (500) is provided with a first electrode hole (501), the graphite conductive disc (320) is provided with a second electrode hole (301), the ceramic fixing ring (400) is provided with an opening, the two ceramic fixing rings (400) are respectively fixed at two ends of the ceramic base (200) through respective openings, the diameter of the ceramic fixing ring (400) is larger than that of the graphite conductive disc (320), the ceramic base (200) is provided with an installation cylindrical surface (210), the installation cylindrical surface (210) is provided with a plurality of boat sheet installation grooves (211) which are uniformly arranged in the circumferential direction, and the ceramic fixing ring (400) is provided with a plurality, the boat piece (100) can be inserted into the boat piece mounting groove (211) along the axial direction, the front end of the boat piece (100) is simultaneously clamped in the first conductive groove (322) at the front end and the fixing groove (401) of the ceramic fixing ring (400), and the rear end of the boat piece (100) is simultaneously clamped in the second conductive groove (312) at the rear end and the fixing groove (401) of the ceramic fixing ring (400).
2. The tubular PECVD graphite boat structure of claim 1, wherein: the ceramic connecting rings (600) are arranged along the axial direction of the ceramic base (200), the ceramic connecting rings (600) are provided with openings, the ceramic connecting rings (600) sequentially penetrate through the boat sheets (100) and are fixed on the ceramic base (200) through two ends of the openings, and the diameter of each ceramic connecting ring (600) is larger than that of the graphite conductive disc (320).
3. The tubular PECVD graphite boat structure of claim 1, wherein: each face of boat piece (100) is equipped with multiunit and is used for blocking the stuck point (101) of silicon chip, and each group stuck point (101) is evenly arranged along the axial, and every group stuck point (101) includes three stuck point (101), and a stuck point (101) is located one end, and two other stuck points (101) are located the other end, and forms the isosceles triangle structure between three stuck point (101), after boat piece (100) is installed on ceramic base (200), the one end that has a stuck point (101) is located the outside.
4. The tubular PECVD graphite boat structure of any of claims 1 to 3, characterized in that: the boat piece mounting groove (211) is a T-shaped groove, a vertical groove (2111) of the T-shaped groove faces outwards, and a convex strip (102) which can be matched with a transverse groove (2112) of the T-shaped groove is arranged on the boat piece (100).
5. The tubular PECVD graphite boat structure of any of claims 1 to 3, characterized in that: the graphite conductive disc (320) is provided with a step hole (323), the front end of the graphite rod (500) penetrates through the step hole (323), an insulating convex ring (220) is arranged between the graphite rod and the step hole (323), and the insulating convex ring (220) is fixed on the ceramic base (200) at the end.
6. The tubular PECVD graphite boat structure of claim 5, wherein: the rear end of the graphite rod (500) is abutted against the step of the step hole (323) of the graphite conductive disc (320) at the end.
7. The tubular PECVD graphite boat structure of any of claims 1 to 3, characterized in that: the ceramic base (200) is of an inverted V-shaped structure.
8. The tubular PECVD graphite boat structure of any of claims 1 to 3, characterized in that: the central angle of the ceramic fixing ring (400) is larger than 180 degrees.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811354016.7A CN109524336B (en) | 2018-11-14 | 2018-11-14 | Tubular PECVD graphite boat structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811354016.7A CN109524336B (en) | 2018-11-14 | 2018-11-14 | Tubular PECVD graphite boat structure |
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| CN109524336A CN109524336A (en) | 2019-03-26 |
| CN109524336B true CN109524336B (en) | 2020-09-18 |
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| CN110137119B (en) * | 2019-05-21 | 2024-02-13 | 常州时创能源股份有限公司 | Graphite boat |
| CN111118478A (en) * | 2019-12-31 | 2020-05-08 | 湖南红太阳光电科技有限公司 | PECVD equipment for preparing heterojunction battery thin film |
| CN213184235U (en) * | 2020-07-03 | 2021-05-11 | 宁夏隆基乐叶科技有限公司 | Graphite boat and graphite boat coating equipment |
| CN113130359A (en) * | 2021-04-09 | 2021-07-16 | 深圳市捷佳伟创新能源装备股份有限公司 | Tray and slide glass device |
| CN115094401B (en) * | 2022-03-31 | 2024-03-01 | 深圳市石金科技股份有限公司 | Graphite boat suitable for conductive film deposition |
| CN115631987B (en) * | 2022-08-23 | 2024-02-13 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1153834A (en) * | 1995-11-30 | 1997-07-09 | 三星电子株式会社 | Boat for loading wafers in vertical diffusion furnace |
| CN102181846B (en) * | 2011-04-01 | 2013-05-01 | 石金精密科技（深圳）有限公司 | Cavity-type graphite boat |
| CN202323023U (en) * | 2011-11-18 | 2012-07-11 | 青岛赛瑞达电子科技有限公司 | PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment with new-structure graphite boat |
| CN103510076A (en) * | 2012-06-28 | 2014-01-15 | 沈文伟 | Novel graphite boat |
| CN203487229U (en) * | 2013-10-23 | 2014-03-19 | 东海耀碳素（大连）有限公司 | Ring slot type graphite boat |
| CN103578979B (en) * | 2013-11-29 | 2016-02-17 | 如皋市大昌电子有限公司 | Conversion process after a kind of axial diode welding |
| CN205789903U (en) * | 2016-06-02 | 2016-12-07 | 苏州阿特斯阳光电力科技有限公司 | A kind of saturated tubular type PECVD graphite boat |
| CN206591181U (en) * | 2017-02-14 | 2017-10-27 | 苏州阿特斯阳光电力科技有限公司 | A kind of tubular type PECVD graphite boats cool down room |
| CN207227547U (en) * | 2017-08-02 | 2018-04-13 | 中晟光电设备（上海）股份有限公司 | For the graphite plate in MOCVD device |
-
2018
- 2018-11-14 CN CN201811354016.7A patent/CN109524336B/en active Active
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|---|---|
| CN109524336A (en) | 2019-03-26 |
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