CN109520624A - A kind of target plate and electro-optical system resolution test method - Google Patents
A kind of target plate and electro-optical system resolution test method Download PDFInfo
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- 238000010998 test method Methods 0.000 title claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 53
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 77
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 238000012360 testing method Methods 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 11
- 239000003292 glue Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 238000007710 freezing Methods 0.000 claims description 5
- 230000008014 freezing Effects 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229910052755 nonmetal Inorganic materials 0.000 claims description 3
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- 238000001816 cooling Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 14
- 230000036039 immunity Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 41
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 239000010949 copper Substances 0.000 description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 10
- 229910052737 gold Inorganic materials 0.000 description 10
- 239000010931 gold Substances 0.000 description 10
- 229910052742 iron Inorganic materials 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- 239000011651 chromium Substances 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 6
- 241000784726 Lycaena thetis Species 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005457 Black-body radiation Effects 0.000 description 1
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- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009533 lab test Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
The present invention relates to photoelectric detection technology fields, a kind of method for providing target plate and infrared band electro-optical system resolution ratio being tested by the target plate, including the automatic temperature-controlled module for providing the uniform and stable temperature environment of target plate, the first area in the automatic temperature-controlled module and the second area on the first area, first area is different with the infra-red radiation emissivity of second area.The target plate is not influenced by other infrared sources in environment, strong interference immunity.Test method includes: first to draw the contrast standard curve of target plate with blackbody demarcation target plate；Then first contrast value is set, it is the contrast value corresponding temperature on standard curve by the temperature that automatic temperature-controlled module adjusts target plate, measure the radiance of first area at this temperature and second area respectively with electro-optical system to be tested, according between them difference and the first contrast value electro-optical system is corrected, the test method is simple, contrast controllable precise, and measuring accuracy is high.
Description
Technical field
The present invention relates to electro-optical system resolution ratio detection technique field more particularly to a kind of target plate and electro-optical system resolution ratio
Test method.
Background technique
Traditional electro-optical system detection method and device are generally based on the temperature difference between black matrix or grey body and target bar
Different to carry out, this mode is only applicable to test because to be precisely controlled the temperature difference between black matrix or grey body and target bar
The detection of room environmental, it is impossible to be used in the complex environment that outdoor or surrounding has radiation source to interfere.Electro-optical system resolution ratio includes two
Part, a part are temperature resolutions, i.e. minimum resolvable temperature difference (MRTD), another part spatial resolution.Patent
CN105547496A discloses a kind of minimum temperature resolving power testing device and its test method.The invention uses the more squares of combined type
The apparent temperature temperature difference generating device of shape cavity structure, the generating device of this structure can be used as approximate grey-body radiation source, and
The emissivity of each cell surface is different, and the blending surface of different emissivity distributions is formed by assembled unit.In specific temperature
Range and spectral region are spent, the invention has grey-body radiation characteristic, can not only solve temperature difference regulation problem, also act as infrared
The reference substance of the target of imaging system performance test, material emissivity measurement.But this target is only applicable to laboratory environment
Detection, be not suitable for field complexity radiation environment test.It is quick certainly that patent CN103256862B discloses a kind of electro-optical system
The comprehensive target plate of calibration standard and its measurement method, target plate, which is used on metal film, etches the filling of Triangle-Profile through-hole array
Micro-nano display powder is constituted, and when test, target plate is placed on the far field of the optical system of tested electro-optical system, and electro-optical system aims at mark
Quasi- target emits laser, the pattern reflected laser light spot image and instantaneous radiation visible light of standard summary target plate, infrared laser light
Spot image, tested electro-optical system receive and store digital picture, calculate the several of through-hole and triangle complementary array in digital picture
What center and straight length, with theoretical value compare the digital picture correction function for obtaining electro-optical system, resolution ratio, irradiation precision,
Tracking angular rate, tracking accuracy parameter.This target plate structure be advantageous in that fast and easy be aligned, and be integrated with visible light and
Infrared test target.But because metal film varies with temperature and radiance can change correspondingly, the infrared target formed in this way
The contrast of pattern is non-constant, can not accurately measure the MRTD parameter of Infrared.
Standard of the target as electro-optical system detection function and parameter, is widely used for the inspection of all kinds of electro-optical systems at present
In survey.But the overwhelming majority be suitable for can only laboratory experiment room environmental, the detection of especially infrared spectral coverage electro-optical system can be used in
The target of field complexity radiation environment is seldom.Perhaps even if can be realized detection, there is also outdoor or surroundings to have radiation source dry
Disturb the problem for keeping prohibited data detection true.
Summary of the invention
In view of the above problems, the invention proposes a kind of by itself temperature control and uses the material of different emissivity as base
Plate and target bar, realized using the difference of identical temperature lower substrate and target bar radiation-emitting ability indoors, outdoor, field environment
Under the conditions of technical solution that the electro-optical system resolution ratio of infrared band is used for quickly detecting.
The purpose of the present invention can be realized by following technical measures:
First aspect present invention provides a kind of target plate, which includes for providing target plate uniform and stable temperature environment
Automatic temperature-controlled module, the first area in the automatic temperature-controlled module and the secondth area on the first area
The infra-red radiation emissivity of domain, the first area and the second area is different, the first area and the second area
Collectively form the working region of the target plate；It should be noted that in the present invention, first area can be substrate or target bar,
Second area may be substrate or target bar, as long as the infra-red radiation emissivity of the material of the material and second area of first area
Difference is capable of forming certain emmisivity difference between the two.
Preferably, the automatic temperature-controlled module includes temperature element and temperature control component, the first area with it is described
Temperature control component connection, the temperature element are used for for measuring first area temperature, the temperature control component according to survey
The measurement result of warm element is heated up or is cooled down to the first area.
Preferably, the infra-red radiation emmisivity difference of the second area and the first area is 0.05~0.99.
It is highly preferred that the infra-red radiation emmisivity difference of the second area and the first area is 0.69~0.99.
Preferably, the second area is connected on the surface of the first area by heat-conducting glue；And/or
The second area is by way of plated film or coating on the surface of the first area；And/or
The second area is filled in the etch areas formed after the surface etch to the first area.
Preferably, the target plate further includes substrate, and the substrate is connect with the first area, the automatic temperature-controlled module
First area is heated up or cooled down by the substrate, the substrate is connected by heat-conducting glue and the temperature control component
It connects；And/or
The temperature control component is set in the substrate.
Preferably, the temperature element is any one in thermocouple, thermal resistance or thermistor；And/or
The temperature control component is semiconductor cooling device, high resistance metal film layer, non-metal semiconductive film layer, quantum
Any one in tunneling material film layer or resistance wire.
Preferably, the material of the first area is any one in gold, graphite, timber or golden copper mixture；And/or
The material of the second area be chromium, copper, gold, iron or it is pitch-dark in any one.
Second aspect of the present invention provides a kind of electro-optical system resolution test method, is applied to described in any of the above embodiments
Target plate, comprising:
Institute is measured respectively at different temperatures by the temperature that automatic temperature-controlled module adjusts first area and second area
State the radiance of first area and the radiance of the second area；
Contrast standard is drawn according to the relationship of the radiation brightness difference and temperature of the first area and the second area
Curve；
First radiation brightness difference is set, the first radiation brightness difference corresponding first is calculated according to the contrast standard curve
Temperature；
The temperature that first area and second area are adjusted by automatic temperature-controlled module is the first temperature, with Opto-electrical Section to be tested
The radiance of the first area and the second area at a temperature of system measures first respectively calculates first according to measurement result
At a temperature of the radiance of the first area and the second area actual emanations luminance difference；
The electro-optical system is corrected according to actual emanations luminance difference.
Preferably, in the test process of first area and the radiance of second area, with the spoke of platinum freezing point black matrix
Brightness is penetrated to demarcate as radiance of the benchmark to target plate.
It is highly preferred that " temperature for adjusting first area and second area by automatic temperature-controlled module is the first temperature "
The step of include:
When the environment temperature is higher than first temperature, cool down to the target plate；When the environment temperature is low
When first temperature, heat up to the target plate.
Compared with prior art, target plate provided by the invention not only adapts to the infrared light spectral coverage electro-optical system of laboratory environment
Resolution ratio detection, moreover it is possible to adapt to examine the resolution ratio of infrared light spectral coverage electro-optical system in outdoor or field complexity radiation environment
It surveys, is not influenced by other infrared sources in environment, improve the accuracy of detection data；Test method letter provided by the invention
Single, contrast controllable precise, measuring accuracy are high.
Detailed description of the invention
Fig. 1 is the first target plate structural schematic diagram provided in an embodiment of the present invention；
Fig. 2 is second of target plate structural schematic diagram provided in an embodiment of the present invention；
Fig. 3 is the third target plate structural schematic diagram provided in an embodiment of the present invention；
Fig. 4 is the 4th kind of target plate structural schematic diagram provided in an embodiment of the present invention；
Fig. 5 is the 5th kind of target plate structural schematic diagram provided in an embodiment of the present invention；
Fig. 6 is that the radiance provided in an embodiment of the present invention using platinum freezing point black matrix is bright as radiation of the benchmark to target plate
Spend the flow chart demarcated；
Fig. 7 is the radiation brightness difference of gold and chromium film that the embodiment of the present invention 1 provides and the graph of relation of temperature；
Fig. 8 is the radiation brightness difference of the graphite that the embodiment of the present invention 2 provides and copper film and the graph of relation of temperature；
Fig. 9 is the radiation brightness difference of the timber that the embodiment of the present invention 3 provides and golden film and the graph of relation of temperature；
Figure 10 is the radiation brightness difference of the timber that the embodiment of the present invention 4 provides and iron film and the graph of relation of temperature；
Figure 11 is the radiation brightness difference of the golden copper mixture that the embodiment of the present invention 5 provides and pitch-dark film and the relationship song of temperature
Line chart；
Figure 12 is a kind of target plate device provided in an embodiment of the present invention.
In figure: 1, target bar；2, substrate；3, substrate；4, automatic temperature-controlled module；5, the first mechanism；6, the second mechanism；7, adjustable
Save tripod；8, target plate；9, shell.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawing and specific implementation
Invention is further described in detail for example.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention,
It is not intended to limit the present invention.
In order to keep the narration of this disclosure more detailed with it is complete, below for embodiments of the present invention and specific real
It applies example and proposes illustrative description；But this not implements or uses the unique forms of the specific embodiment of the invention.Embodiment
In cover multiple specific embodiments feature and to construction with operate these specific embodiments method and step it is suitable with it
Sequence.However, can also reach identical or impartial function and sequence of steps using other specific embodiments.
It the present invention provides a kind of target plate, please refers to shown in Fig. 1 to Fig. 5, which successively includes automatic warm from top to bottom
Module 4, substrate 2 and the target bar 1 being located on 2 surface of substrate are controlled, target bar 1 is different from the infra-red radiation emissivity of substrate 2, also
To say: the target bar and substrate one in material composition, material crystal structure, material thickness, material surface state or
Several differences.Target bar 1 and substrate 2 collectively form test surfaces.Automatic temperature-controlled module 4 includes temperature element and temperature control component,
The temperature element feeds back to temperature control component for measuring substrate temperature, and temperature control component is according to the result pair of feedback
Substrate is heated up or is cooled down；In some embodiments of the invention, the measuring accuracy of temperature element controls within 0.2 DEG C.
In order to enable substrate is heated more evenly and stable, in some embodiments of the invention, as shown in figure 1 and figure 5,
Substrate 3 is additionally provided between substrate 2 and automatic temperature-controlled module 4, substrate 3 is made of the material that can generate infra-red radiation, substrate 2
It is connect by heat-conducting glue with substrate 3, and substrate 3 is connect by heat-conducting glue with temperature control component, therefore automatic temperature-controlled module 4 is logical
It crosses substrate 3 and is that substrate 2 provides uniform and stable temperature control, it is worth noting that, substrate 3 and temperature control component can also be with
Directly contact.In other embodiments of the invention, as shown in Figure 2, temperature control component is integrated in the substrate, substrate with
It is automatic temperature-controlled it is module-integrated be integrated to form the first mechanism 5 so that the structure of target plate is more simplified；In of the invention, there are also some
In embodiment, as shown in Figure 4, substrate and substrate are combined into one to form substrate plate, substrate plate with it is automatic temperature-controlled module-integrated
It is integrated to form the second mechanism 6, substrate plate is different from the infra-red radiation emissivity of target bar 1.
Target plate provided by the invention is based on the larger emmisivity difference between substrate and target bar, so that mutually synthermal
It is lower that there is certain radiation difference to realize that the electro-optical system resolution ratio to infrared band detects between target bar and substrate.Root
According to some embodiments of the present invention, the material of target bar and substrate can be the different any two kinds of materials of infra-red radiation emissivity
Material, such as target bar can be metal material (any one in such as copper, gold, iron, chromium or golden copper mixture, naturally it is also possible to be
Other metal materials), substrate can be any materials different from above-mentioned target bar infra-red radiation emissivity, such as graphite, timber, black
Paint, or it is identical with target bar different from the metal material or material of target bar, but with different thickness, crystal structure or
Configuration of surface etc..Certainly, target bar is also possible to nonmetallic materials, and substrate can be to be used material infra-red radiation with target bar at this time
The different other materials of emissivity.When target bar uses metal material in the application, metal target bar is to the substrate as infrared source
The infrared emanation of (either substrate) have the function of basad (perhaps substrate) direction reflection infra-red radiation make substrate (or
Substrate) low-level kept to the infra-red radiation of substrate normal direction positive direction by target bar, or level off to zero, that is, target can be made
Item keeps low-infrared radiation brightness to the infra-red radiation brightness of substrate normal direction positive direction, or reaches infra-red radiation brightness and environment
The effect that radiance is consistent；And substrate (or substrate) radiance can have with the eustasy of base reservoir temperature compared with
Big variation so that the radiation brightness difference of target bar and substrate (or substrate) vary with temperature it is in a linear relationship.It is preferred that target
The group of item and substrate is combined into copper and graphite, gold and timber, iron and timber, the mixing of pitch-dark and golden and copper, and the two material can be interchanged,
These combinations can guarantee there is biggish emmisivity difference between substrate and target bar, and ensure that between the two has enough radiation poor
It is different.The emmisivity difference of other embodiments according to the present invention, target bar and substrate can be 0.05~0.99, preferred emission
It is more acurrate to be conducive to resolution test result between 0.69~0.99 for rate difference.
Target bar can be arranged on a surface of a substrate by any suitable way in this field, according to the present invention one
A little embodiments, target bar can be connected on substrate by heat-conducting glue；Base can also be connected to by way of plated film or coating
On the surface of plate；Etched area can also be formed, target bar material is then filled in the etched area by first being performed etching to substrate
It is interior, as shown in Figure 5；The detection faces of target plate can also be spliced to form by target bar and substrate；Certainly table can also be carried out to substrate
Face specific region is modified to make target bar.The shape of target bar mainly needs to be configured according to detection, such as is referred to infrared
The four bar methods of minimum resolvable temperature difference (MRTD) target bar make different space frequency, the target bar of different contrast.
According to certain embodiments of the present invention, temperature element can be in the prior art any one, for example, thermoelectricity
Any one in even, thermal resistance or thermistor, temperature control component be also possible in the prior art any one, such as partly lead
It is any one in chiller part, high resistance metal film layer, non-metal semiconductive film layer, quantum tunneling film layer or resistance wire
Kind.
Target plate provided by the invention is based on together staggered by the combination of materials of two kinds of different emissivity, identical
At a temperature of, there is fixed difference, degree of being contrasted in the radiance of target plate different zones.It calibrates under different temperatures, two kinds of materials
After the relation curve that the radiance of material varies with temperature, so that it may the test target of different contrast is set, thus realization pair
The electro-optical system resolution ratio of infrared band is detected.Please refer to a kind of target plate dress provided in an embodiment of the present invention shown in Figure 12
It sets, is formed including adjustable tripod 7, above-mentioned target plate 8, shell 9, which is applicable not only to the infrared light of laboratory environment
The resolution ratio of spectral coverage electro-optical system detects, moreover it is possible to infrared light spectral coverage Opto-electrical Section suitable for outdoor or field complexity radiation environment
The resolution ratio of system detects, and is not influenced by other infrared sources in environment, improves the accuracy of detection data.
Another aspect of the present invention provides a kind of electro-optical system resolution test method, this method comprises: first being solidified with platinum
The radiance of point black matrix is demarcated as radiance of the benchmark to target plate；Then substrate is adjusted by automatic temperature-controlled module
The radiance of substrate and target bar is measured respectively at different temperatures with the temperature of target bar；Radiation according to substrate and target bar is bright
Degree difference and the relationship of temperature draw contrast standard curve；First radiation brightness difference is set again, according to contrast standard curve meter
Calculate corresponding first temperature of first radiation brightness difference；It then is the by the temperature that automatic temperature-controlled module adjusts substrate and target bar
One temperature measures the radiance of the first temperature lower substrate and target bar with electro-optical system to be tested respectively, and according to measurement result
Calculate the actual emanations luminance difference of the radiance of the first temperature lower substrate and target bar.
Under the premise of black body radiation is consistent, by the difference of two kinds of material emissivity of substrate and target bar, generate target plate
Pattern with fixed temperature difference effect, which is since the infrared signature difference of material determines, in a certain range
Linearly, it can be calibrated by test.It is bright to please refer to the radiation provided in an embodiment of the present invention with platinum freezing point black matrix shown in fig. 6
Spend the flow chart demarcated as radiance of the benchmark to target plate.With the radiance benchmark of platinum freezing point black matrix, utilize
Square distance law of reciprocity changes the response of infrared absolute radiometer, gives radiance datum tool to infrared absolute radiation
Meter；Calibration black matrix is calibrated with infrared absolute radiometer, gives calibration black matrix radiance datum tool；Use infrared thermoviewer
Optical path is built with black matrix with calibration, the infrared target plate of temp auto-controlled is demarcated, obtains the radiation brightness difference and temperature of substrate and target bar
The relation curve of degree.
In the method, the step of " temperature that substrate and target bar are adjusted by automatic temperature-controlled module is the first temperature " is also wrapped
Include: test environment temperature cools down to target plate when environment temperature is higher than first temperature；When environment temperature is lower than the
When one temperature, heat up to target plate.Test method provided by the invention is simple, contrast controllable precise, and measuring accuracy is high.
Embodiment 1
For the target plate of structure shown in FIG. 1 to FIG. 5, the material of substrate is the gold of polishing, and the material of target bar is chromium, the two
Emmisivity difference be 0.05, chromium material forms smooth chromium film on a gold surface by way of plated film, passes through thermal infrared imager
The contrast standard curve measured, as shown in Figure 7, wherein abscissa is the temperature of automatic temperature-controlled module control, and ordinate is
The radiance showed in the form of temperature that thermal infrared imager measures, from the figure, it can be seen that the radiance of chromium film and gold
Difference is in a linear relationship with temperature.
Embodiment 2
For the target plate of structure shown in FIG. 1 to FIG. 5, the material of substrate is graphite, and the material of target bar is copper, the hair of the two
Penetrating rate difference is 0.5, and copper product forms smooth copper film or fixable fitting by way of plated film on the surface of timber
Smooth copper film is formed on the flat smooth surface of graphite, the contrast standard curve measured by thermal infrared imager, such as Fig. 8
Shown in, wherein abscissa is the temperature of automatic temperature-controlled module control, and ordinate is the shape with temperature that thermal infrared imager measures
The radiance that formula shows, from the figure, it can be seen that the radiation brightness difference of copper film and graphite is in a linear relationship with temperature.
Embodiment 3
For the target plate of structure shown in FIG. 1 to FIG. 5, the material of substrate is timber, and the material of target bar is gold, the hair of the two
Penetrating rate difference is 0.88, and golden material forms smooth golden film by way of plated film on plank even curface, by infrared
The contrast standard curve that thermal imaging system measures, as shown in Figure 9, wherein abscissa is the temperature of automatic temperature-controlled module control, is indulged
Coordinate is the radiance showed in the form of temperature that measures of thermal infrared imager, from the figure, it can be seen that golden film and timber
Radiation brightness difference is in a linear relationship with temperature.
Embodiment 4
For the target plate of structure shown in FIG. 1 to FIG. 5, the material of substrate is timber, and the material of target bar is iron, the hair of the two
Penetrating rate difference is 0.69, and iron material forms smooth iron film by plated film mode on the surface of plank, passes through thermal infrared imager
The contrast standard curve measured, as shown in Figure 10, wherein abscissa is the temperature of automatic temperature-controlled module control, and ordinate is
The radiance showed in the form of temperature that thermal infrared imager measures, from the figure, it can be seen that the radiation of iron film and timber is bright
Degree difference is in a linear relationship with temperature.
Embodiment 5
For the target plate of structure shown in FIG. 1 to FIG. 5, the material of substrate is golden copper mixture, the material of target bar be it is pitch-dark,
The emmisivity difference of the two is 0.97~0.99, and pitch-dark material is connected to the smooth table of gold and copper mixture by way of coating
Thin layer is formed on face, the contrast standard curve measured by thermal infrared imager, as shown in Figure 11, wherein abscissa is automatic
The temperature of temperature control module control, ordinate are the radiance showed in the form of temperature that thermal infrared imager measures, Cong Tuzhong
It can be seen that the radiation brightness difference and temperature of pitch-dark and golden copper mixture are in a linear relationship.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of target plate, the target plate includes the spy for providing the automatic temperature-controlled module of the uniform and stable temperature environment of target plate
Sign is, further includes the first area in the automatic temperature-controlled module and the secondth area on the first area
The infra-red radiation emissivity of domain, the first area and the second area is different, the first area and the second area
Collectively form the working region of the target plate.
2. target plate as described in claim 1, which is characterized in that the infra-red radiation of the first area and the second area emits
Rate difference is 0.05~0.99.
3. target plate as claimed in claim 2, which is characterized in that the infra-red radiation of the first area and the second area emits
Rate difference is 0.69~0.99.
4. target plate as described in claim 1, which is characterized in that the second area is connected to the first area by heat-conducting glue
Surface on；And/or
The second area is by way of plated film or coating on the surface of the first area；And/or
The second area is filled in the etch areas formed after the surface etch to the first area.
5. target plate as described in claim 1, which is characterized in that the automatic temperature-controlled module includes temperature element and temperature control member
Part, the first area are connect with the temperature control component, and the temperature element is used to measure the temperature of the first area,
The temperature control component is for being heated up or being cooled down to the first area according to the measurement result of temperature element.
6. target plate as claimed in claim 5, which is characterized in that the target plate further includes substrate, the substrate and firstth area
Domain connection, the automatic temperature-controlled module are heated up or are cooled down to the first area by the substrate, and the substrate passes through
Heat-conducting glue is connect with the temperature control component；And/or
The temperature control component is set in the substrate.
7. target plate as described in claim 1, which is characterized in that the temperature element is in thermocouple, thermal resistance or thermistor
Any one；And/or
The temperature control component is semiconductor cooling device, high resistance metal film layer, non-metal semiconductive film layer, quantum tunneling
Any one in film layer or resistance wire.
8. a kind of electro-optical system resolution test method, which is characterized in that the described method includes:
Target plate described in any one of claims 1 to 7 is provided；
The temperature of first area and second area is adjusted by automatic temperature-controlled module, at different temperatures, measures described the respectively
The radiance of the radiance in one region and the second area；
Contrast standard curve is drawn according to the relationship of the radiation brightness difference and temperature of the first area and the second area；
First radiation brightness difference is set, corresponding first temperature of the first radiation brightness difference is calculated according to the contrast standard curve
Degree；
The temperature that first area and second area are adjusted by automatic temperature-controlled module is the first temperature, with electro-optical system to be tested point
Not Ce Liang at a temperature of first the first area and the second area radiance, the first temperature is calculated according to measurement result
Under the radiance of the first area and the second area actual emanations luminance difference；
The electro-optical system is corrected according to actual emanations luminance difference.
9. test method as claimed in claim 8, which is characterized in that the test in first area and the radiance of second area
In the process, it is demarcated using the radiance of platinum freezing point black matrix as radiance of the benchmark to target plate.
10. test method as claimed in claim 9, which is characterized in that it is described " by automatic temperature-controlled module adjust first area and
The temperature of second area be the first temperature " the step of include:
When the environment temperature is higher than first temperature, cool down to the target plate；When the environment temperature is lower than institute
When stating the first temperature, heat up to the target plate.
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| CN112649096A (en) * | 2020-12-12 | 2021-04-13 | 南京理工大学 | Large-scale variable-temperature four-bar target for open field test |
| CN113503975A (en) * | 2021-09-13 | 2021-10-15 | 四川大学 | Calibration plate and infrared temperature measurement mapping calibration method |
| CN113686451A (en) * | 2021-07-09 | 2021-11-23 | 中国科学院合肥物质科学研究院 | Spectral emissivity measuring method and system |
| CN114353968A (en) * | 2020-09-30 | 2022-04-15 | 北京振兴计量测试研究所 | Narrow space temperature measurement field calibration method and calibration system |
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