CN109513508A - A kind of polycrystalline silicon rod crushing device and its breaking method - Google Patents
A kind of polycrystalline silicon rod crushing device and its breaking method Download PDFInfo
- Publication number
- CN109513508A CN109513508A CN201811385078.4A CN201811385078A CN109513508A CN 109513508 A CN109513508 A CN 109513508A CN 201811385078 A CN201811385078 A CN 201811385078A CN 109513508 A CN109513508 A CN 109513508A
- Authority
- CN
- China
- Prior art keywords
- polycrystalline silicon
- silicon rod
- cooling medium
- shell
- feeding basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 178
- 238000000034 method Methods 0.000 title claims abstract description 38
- 239000002826 coolant Substances 0.000 claims abstract description 126
- 230000009467 reduction Effects 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 22
- 238000001816 cooling Methods 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 230000008569 process Effects 0.000 description 12
- 230000008646 thermal stress Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 230000005012 migration Effects 0.000 description 10
- 238000013508 migration Methods 0.000 description 10
- 239000007769 metal material Substances 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002210 silicon-based material Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 240000005373 Panax quinquefolius Species 0.000 description 1
- -1 at this point Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C19/00—Other disintegrating devices or methods
- B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
- B02C19/186—Use of cold or heat for disintegrating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C23/00—Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C23/00—Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
- B02C23/18—Adding fluid, other than for crushing or disintegrating by fluid energy
- B02C23/24—Passing gas through crushing or disintegrating zone
- B02C23/30—Passing gas through crushing or disintegrating zone the applied gas acting to effect material separation
Landscapes
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Silicon Compounds (AREA)
Abstract
A kind of polycrystalline silicon rod crushing device provided by the invention, including shell, feeding basket and cooling medium；Housing tip opening；Feeding basket is for placing polycrystalline silicon rod, the opening direction of feeding basket and the opening direction of shell are consistent, and it is placed in shell, several through-holes are offered on the non-opening face of feeding basket, it is contained in shell intracorporal cooling medium and feeding basket is flowed in or out by through-hole, cooling medium is contacted with the polycrystalline silicon rod being placed in feeding basket, utilizes the temperature difference of cooling medium and polycrystalline silicon rod, keep polycrystalline silicon rod broken, the temperature difference of cooling medium and polycrystalline silicon rod is at least 70 degrees Celsius.The present invention realizes using cooling medium and the temperature difference of polycrystalline silicon rod and is crushed that crushing efficiency is high and without metallic pollution.The invention further relates to a kind of polycrystalline silicon rod breaking methods.
Description
Technical field
The present invention relates to breaking polycrystalline silicon fields, more particularly to a kind of polycrystalline silicon rod crushing device and its breaking method.
Background technique
Polysilicon is the raw material for preparing semiconductor devices and solar battery, can be divided into the sun according to purity and purposes
It can level polysilicon and electronic-grade polycrystalline silicon.The main method for preparing polysilicon at present is improved Siemens, due to what is prepared
Polycrystalline silicon rod is long and diameter is big, and as improved Siemens production polycrystalline silicon technology is constantly broken through and developed, the polycrystalline of production
Silicon linear dimension is increasing, can not directly use as polycrystalline cast ingot or single crystal preparation raw material.However as polycrystalline cast ingot
Inventory increases and the maturation of monocrystalline continuous crystal-pulling technology, increasingly increases the demand of small powder, and more more and more urgent, therefore,
The polysilicon of improved Siemens production need to be manually or mechanically broken into the lesser silicon material of size, could for polycrystalline cast ingot or
Single crystal preparation uses.
The breaking method of polysilicon in the prior art are as follows: in-furnace temperature to be restored be reduced to 100 degrees Celsius and it is following when, will
Polycrystalline silicon rod is transferred to Special crushing platform and carries out hand breaking or be transferred to Special crushing equipment progress Mechanical Crushing, due to silicon
Hardness it is very high, it is therefore, existing broken so the breaking tool made of hard metal material is needed to remove broken polycrystalline silicon rod
The problems such as that there are crushing efficiencies is low for technology, metallic pollution.
Summary of the invention
In view of the above-mentioned problems, the object of the present invention is to provide a kind of polycrystalline silicon rod crushing device and its breaking methods.
To achieve the above object, the present invention takes following technical scheme: a kind of polycrystalline silicon rod crushing device, including shell,
Feeding basket and cooling medium；Housing tip opening；Feeding basket for placing polycrystalline silicon rod, the opening direction of feeding basket and shell
Opening direction is consistent, and is placed in shell, offers several through-holes on the non-opening face of feeding basket, it is intracorporal cold to be contained in shell
But medium flows in or out feeding basket by through-hole, and cooling medium is contacted with the polycrystalline silicon rod being placed in feeding basket, and utilization is cold
But the temperature difference of medium and polycrystalline silicon rod keeps polycrystalline silicon rod broken；Wherein, cooling medium and the temperature difference of polycrystalline silicon rod are at least
70 degrees Celsius.
By adopting the above technical scheme, due to the temperature difference using cooling medium and polycrystalline silicon rod, i.e., polycrystalline silicon rod is rapidly
The thermal stress generated in cooling procedure, so that polycrystalline silicon rod is broken；Therefore, there is no need to that the temperature in reduction furnace is waited to be reduced to spy
Definite value and hereinafter, such as 100 degrees Celsius and hereinafter, substantially reduce the time for waiting reduction furnace cooling, improves production efficiency；Separately
Outside, breaking tool made of traditional utilization hard metal material is efficiently avoided, in polycrystalline silicon rod shattering process, to more
The metallic pollution that crystalline silicon rod generates.
It preferably, further include inlet units and outlet port unit, inlet units are arranged on the side wall of shell and far from shell
Open end, to input cooling medium；The open end on the side wall of shell and close to shell is arranged in outlet port unit, cold to export
But medium；Inlet units, through-hole and outlet port unit form the overflow ducts of cooling medium.
By adopting the above technical scheme, the overflow ducts of " bottom in and top out " make cooling medium stream into and out feeding basket, flowing
Cooling medium will further improve crushing effect.
Preferably, the inner wall of shell is provided with non-metallic inner liner, thickness >=3 millimeter of non-metallic inner liner, non-metallic inner liner
In micro- gram/m of concentration of metallic impurities≤100 containing.
By adopting the above technical scheme, shell and polycrystalline silicon rod, and strict control non-metallic inner liner are separated with non-metallic inner liner
Concentration of metallic impurities, avoid in polycrystalline silicon rod shattering process, pollution of the shell to polycrystalline silicon rod.
Preferably, feeding basket is made of nonmetallic materials, and concentration of metallic impurities≤100 contained in nonmetallic materials are micro-
Gram/m.
By adopting the above technical scheme, it since in polycrystalline silicon rod shattering process, polycrystalline silicon rod is directly contacted with feeding basket, contains
Material basket is made of non-metallic material, and strict control its concentration of metallic impurities, efficiently avoids feeding basket to polycrystalline silicon rod
Pollution.
Preferably, through-hole is distributed on 5 non-opening faces of feeding basket, diameter >=3 millimeter of through-hole.
By adopting the above technical scheme, the setting of through-hole not only constitutes the overflow of cooling medium with inlet units and outlet port unit
Channel carries out polycrystalline silicon rod convenient for cooling medium cooling broken；And uniformly distributed through-hole, convenient for the flow direction of balanced cooling medium
And heat distribution, furthermore, it is also convenient for draining for broken rear silicon material；On the one hand through-hole aperture influences the overflow speed of cooling medium
On the other hand degree influences the speed of the broken rear draining of polycrystalline silicon rod；Through-hole aperture is set as at least 3 millimeters, can make cooling Jie
Matter has preferably flooding velocity and draining speed.
Preferably, temperature≤30 degree Celsius of cooling medium, resistivity >=10 megohm centimetre of cooling medium.
By adopting the above technical scheme, the maximum temperature of cooling medium is 30 degrees Celsius to ensure cooling medium and polycrystalline silicon rod
Temperature difference be at least 70 degrees Celsius, keep it broken to ensure that polycrystalline silicon rod generates enough thermal stress.
The present invention additionally provides a kind of polycrystalline silicon rod breaking method simultaneously, and this method is applied in polycrystalline silicon rod crushing device
In, polycrystalline silicon rod crushing device includes shell, feeding basket and cooling medium；Housing tip opening；Feeding basket is for placing polycrystalline
Silicon rod, the opening direction of feeding basket and the opening direction of shell are consistent, and can be placed in shell, on the non-opening face of feeding basket
Several through-holes are offered, the intracorporal cooling medium of shell is contained in by through-hole and flows in or out feeding basket；The breaking method includes:
Polycrystalline silicon rod is placed in feeding basket after reduction furnace taking-up；
The feeding basket for being placed with polycrystalline silicon rod is placed in shell；
Polycrystalline silicon rod is crushed by the temperature difference of the exuberant cooling medium in shell and feeding basket, cooling medium and polycrystalline silicon rod, is obtained
To polycrystalline silicon rod broken material；Wherein, cooling medium and the temperature difference of polycrystalline silicon rod are at least 70 degrees Celsius.
By adopting the above technical scheme, polycrystalline silicon crushing device is adapted to its breaking method, utilizes cooling medium and polysilicon
Temperature difference between stick, the thermal stress that polycrystalline silicon rod generates during rapid cooling ensure that more so that polycrystalline silicon rod is broken
The crushing efficiency of crystalline silicon rod；Feeding basket is convenient for the placement of polycrystalline silicon rod, it is ensured that breaking method is achieved, and shell is convenient for charge
Basket is isolated from the outside, and guarantees the purity of silicon material, is not contaminated.
Preferably, polycrystalline silicon crushing device further includes inlet units and outlet port unit, and the side of shell is arranged in inlet units
On the wall and open end far from shell, to input cooling medium；Outlet port unit is arranged on the side wall of shell and close to shell
Open end, to export cooling medium；Inlet units, through-hole and outlet port unit form the overflow ducts of cooling medium；In shell and
Exuberant cooling medium in feeding basket, including, cooling medium is flowed through into overflow ducts, forms circulation overflow；Recycle the time of overflow
>=5 minutes, temperature≤30 degree Celsius of cooling medium, resistivity >=10 megohm centimetre of cooling medium.
By adopting the above technical scheme, the setting of inlet units and outlet port unit, being passed through and being discharged convenient for cooling medium, subtracts
The difficulty of few artificial construction, saves cost of labor；The setting of overflow ducts, so that cooling medium can be in complete circulation path
Polycrystalline silicon rod is crushed；The state of circulation overflow makes cooling medium maintain low-temperature condition, forms enough temperature with polycrystalline silicon rod
Difference, to force polycrystalline silicon rod to generate enough stress, so that it is broken；It is obtained through test of many times, at least 5 minutes broken time,
The optimal effectiveness of degree of crushing can be effectively ensured, meanwhile, in the crushing efficiency highest under being crushed the time；Maximum temperature is 30
Degree Celsius the low-temperature condition of cooling medium is maintained, further ensures the crushing effect of polysilicon；Minimum is 10 megohms
Centimetre resistivity, the strict control impurity of cooling medium, it is therefore prevented that the impurity in cooling medium pollutes silicon material, into
And another ensure that crushing effect.
Preferably, polycrystalline silicon rod is taken out from reduction furnace, including, it, will when temperature≤1000 degree Celsius in reduction furnace
Polycrystalline silicon rod takes out out of reduction furnace.
By adopting the above technical scheme, temperature≤1000 degree Celsius in reduction furnace can take out polycrystalline silicon rod, without etc.
The temperature of furnace to be restored is reduced to particular value and hereinafter, such as 100 degrees Celsius and hereinafter, substantially reducing waiting reduction furnace cooling
Time improves production efficiency；In addition, the taking-out temperature of polycrystalline silicon rod can form enough temperature with the temperature of cooling medium
Difference, enough temperature official post polycrystalline silicon rods have sufficiently large stress, it is ensured that crushing effect.
Preferably, after obtaining polycrystalline silicon rod broken material, this method further include: when temperature≤100 of cooling medium are taken the photograph
When family name spends, the polycrystalline silicon rod broken material being contained in feeding basket is pulled out from shell, draining.
By adopting the above technical scheme, the taking-out temperature of polycrystalline silicon rod is up to 100 degrees Celsius, illustrates cooling medium and polycrystalline
Silicon rod has carried out sufficient heat exchange, can guarantee the crushing effect of polycrystalline silicon rod.
Detailed description of the invention
Fig. 1 is the schematic front view of the polycrystalline silicon rod crushing device of one embodiment of the present of invention；
Fig. 2 is the schematic top plan view of the polycrystalline silicon rod crushing device of one embodiment of the present of invention；
Fig. 3 is the polycrystalline silicon rod breaking method flow diagram of one embodiment of the present of invention.
Wherein, 1 is shell, and 2 be feeding basket, and 3 be cooling medium, and 4 be through-hole, and 5 be inlet units, and 6 be outlet port unit, 7
It is non-metallic inner liner for overflow ducts, 8,9 be hangers, and 10 be connecting rod, and 11 be wheel, and 12 be migration connecting rod.
Specific embodiment
Illustrate specific embodiment according to the present invention with reference to the accompanying drawing.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, still, the present invention may be used also
To be implemented using other than the one described here other modes, therefore, the present invention is not limited to following public specific realities
Apply the limitation of example.
The polycrystalline silicon rod crushing device that one embodiment of the present of invention provides, as depicted in figs. 1 and 2, including shell 1, Sheng
Expect basket 2 and cooling medium 3；1 top end opening of shell；Feeding basket 2 is used to place polycrystalline silicon rod (not shown), feeding basket 2
Opening direction is consistent with the opening direction of shell 1, and is placed in shell 1, offers on the non-opening face of feeding basket 2 several logical
Hole 4, the cooling medium 3 being contained in shell 1 flow in or out feeding basket 2 by through-hole 4, cooling medium 3 and are placed in charge
Polycrystalline silicon rod contact in basket 2 keeps polycrystalline silicon rod broken, wherein cooling using the temperature difference of cooling medium 3 and polycrystalline silicon rod
The temperature difference of medium 3 and polycrystalline silicon rod is at least 70 degrees Celsius.
By adopting the above technical scheme, using the temperature difference of cooling medium and polycrystalline silicon rod, i.e., polycrystalline silicon rod is in rapid cooling
The thermal stress generated in the process, so that polycrystalline silicon rod is broken；Therefore, there is no need to that the temperature in reduction furnace is waited to be reduced to particular value
And hereinafter, production efficiency is improved such as 100 degrees Celsius and hereinafter, substantially reduce the time for waiting reduction furnace cooling；In addition,
Breaking tool made of traditional utilization hard metal material is efficiently avoided, during broken polycrystalline silicon rod, to polycrystalline
The metallic pollution that silicon rod generates.
On the basis of the above embodiments, further, as shown in Figure 1, further including inlet units 5 and outlet port unit 6, into
Mouth unit 5 is arranged on the side wall of shell 1 and the open end far from shell 1, to input cooling medium 3；The setting of outlet port unit 6 exists
Open end on the side wall of shell 1 and close to shell 1, to export cooling medium 3；6 shape of inlet units 5, through-hole 4 and outlet port unit
At the overflow ducts 7 of cooling medium 3.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, inlet units 5 and outlet port unit 6 can be with
Be set as connecing mouth, pipeline, conduit etc. it is in the prior art any one；Valve is set in inlet units 5 and outlet port unit 6 or is opened
Guan Jia flows in and out speed with adjust cooling medium 3；Certainly, the flow velocity of cooling medium 3 can also be by cold for inputting
But the equipment of medium 3 and control, such as inputting the pump of cooling medium 3.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, the number of inlet units 5 and outlet port unit 6
Amount is at least 1, and inlet units 5 and outlet port unit 6 can be added according to the specification etc. of broken polycrystalline silicon rod to be cooled
Quantity is not limited to the numerical value of a certain fixation；Certainly, the inlet units 5 and outlet port unit 6 added can be equipped with more cooling Jie
The input equipment of matter 3, to increase the input quantity of cooling medium 3.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, inlet units 5 are all with outlet port unit 6
The structure of one section of non-opening face extension relative to shell 1.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, inlet units 5 and outlet port unit 6 are located at
On the opposite two sides of shell 1；Certainly, inlet units 5 and outlet port unit 6 can also be set on the same side of shell 1 or
On adjacent two sides, as long as flowing for cooling medium 3 " from bottom to top " can be made.
Above-described embodiment is passed through cooling medium 3 when in use, from inlet units 5, and cooling medium 3 enters inside shell 1, and
Enter feeding basket 2 by through-hole 4, adjust the valve of inlet units 5, is situated between with adjusting the cooling entered in shell 1 and feeding basket 2
After the position of the flow velocity of matter 3, medium 3 to be cooled reaches and is more than the position where outlet port unit 6, cooling medium 3 is single from outlet
It being flowed out in member 6, cooling medium 3 flows through the process of overflow ducts 7, the temperature dramatic decrease of polycrystalline silicon rod, and then generates thermal stress,
Thermal stress forces polycrystalline silicon rod broken；" from bottom to top " cooling medium 3 flowed can further increase crushing effect.
Certainly, on polycrystalline silicon rod crushing device of the present invention, inlet units 5 and outlet port unit 6 can also be not provided with,
Cooling medium 3 is directly poured by external equipment by the opening of shell 1 and feeding basket 2.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, feeding basket 2 is adapted to square with shell 1 each other
Shape, through-hole 4 are evenly arranged on five non-opening faces of feeding basket 2；Certainly, other shapes also can be selected in feeding basket 2 and shell 1；And
And leading in shell 1 is inputted from feeding basket 2 for inputting in feeding basket 2 cooling medium 3 from shell 1, and by cooling medium 3
Hole 4 can also be substituted with other structures, such as venetian blind type structure, groove-like structure, grid, strainer, as long as can be realized cooling
Medium 3 is output and input；Even, replacing such as through-hole 4 or through-hole 4 can be also not provided on the non-opening face of feeding basket 2
For structure, but feeding basket 2 is directly prepared into using the preferable material of seepage of water.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, in order to ensure the intensity of shell 1 and just
Property, shell 1 are made of metal material, but in order to avoid in polycrystalline silicon rod shattering process, gold of the metal shell 1 to polycrystalline rod
Category pollutes, the inner wall setting non-metallic inner liner 8 of shell 1, thickness >=3 millimeter of non-metallic inner liner 8, contains in non-metallic inner liner 8
Micro- gram/m of concentration of metallic impurities≤100.
Above-described embodiment when in use, be isolated non-metallic inner liner 8 with polycrystalline silicon rod, and strict control is nonmetallic by shell 1
The concentration of metallic impurities of liner 8 avoids in polycrystalline silicon rod shattering process, and shell 1 is to polycrystalline silicon rod made of metal material
Metallic pollution.
On the basis of the above embodiments, further, shell 1 can be arranged in non-metallic inner liner 8 in a manner of coating
Inner wall on, can also select the metal impurities such as rubber, plastics it is few material patch is placed on the inner wall of shell 1.
On the basis of the above embodiments, further, shell 1 can be made of nonmetallic materials, at this point, shell 1
Even if inner wall be not coated by non-metallic inner liner 8, can also fundamentally avoid pollution of the shell 1 to polycrystalline silicon rod.
On the basis of the above embodiments, further, feeding basket 2 is made of nonmetallic materials, contains in nonmetallic materials
Micro- gram/m of some concentration of metallic impurities≤100；Certainly, feeding basket 2 can also be made of metal material, but in order to avoid
Metallic pollution, concentration of metallic impurities≤100 for non-metallic inner liner being set, and is contained in non-metallic inner liner on the inner wall of feeding basket 2
Micro- gram/m.
By adopting the above technical scheme, since in polycrystalline silicon rod shattering process, feeding basket 2 is directly contacted with polycrystalline silicon rod,
I.e. feeding basket 2 has direct influence for the quality of polycrystalline silicon rod, and liner is arranged in feeding basket 2 and polycrystalline silicon rod contact portion, or
Person's feeding basket 2 directlys adopt nonmetallic materials and is made, and in strict control nonmetallic materials metal impurities concentration, it can be ensured that
Polycrystalline silicon rod, not by metallic pollution, farthest guarantees the quality of polycrystalline silicon rod in shattering process.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, the both ends of the opposite two sidewalls of feeding basket 2
It is respectively provided with a hangers 9, connecting rod 10 is provided between opposite hangers 9, connecting rod 10 is for lifting or putting down feeding basket 2；In use,
Mechanical arm can manually catch connecting rod 10, to realize rising or falling for feeding basket 2, rise to realize feeding basket 2 from shell
It is brought out in body 1, feeding basket 2 is put into shell 1 by decline with realizing；Certainly, for realizing the knot of feeding basket 2 risen or fallen
Structure, the connecting rod 10 for being not limited to hangers 9 and being arranged between hangers 9 can be in the opposite side wall setting hook of feeding basket 2, sky
The auxiliary such as thimble, T-type handle, lock are taken component, and two faces of opposite feeding basket 2 are arranged in each pair of auxiliary component of taking
On, different auxiliary component of taking also can be set in different sides, and 2 uniform force of charge when guaranteeing to take is not hung
It shakes, meanwhile, each pair of auxiliary takes the connection between component as shown in Figure 1, can be fixedly connected with two hangers 9 for connecting rod 10,
The non-metallic materials such as single connecting rod, rope, elastic band can be selected to be attached, especially work as difference using modes such as assemblings
To auxiliary take component be arranged in the different sides of feeding basket 2 when, dismountable connection type will not interfere the broken of polycrystalline silicon rod
Broken process, meanwhile, when draining silicon material, the connection component of intersection acts on certain covering protection of silicon material.
Furthermore the opposite side wall of feeding basket 2 can also be upwardly extended, to form extension, the elongated end of extension is set
Plate structure that is perpendicular or intersecting is set, plate structure is outwardly protruded with the infall with elongated end, to form crawl section, just
In manipulator or artificial crawl.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2, through-hole 4 be distributed in 5 of feeding basket 2 it is non-
On opening face, diameter >=3 millimeter of through-hole 4；When in use, cooling medium 3 enters after shell 1, enters charge by through-hole 4
Basket 2, until submergence polycrystalline silicon rod, then by the outlet port unit 6 of the inflow shell 1 of through-hole 4, heat exchange during which is carried out with polycrystalline silicon rod,
Polycrystalline silicon rod stress is broken, and after the completion of being crushed, feeding basket 2 is taken out, and the cooling medium 3 in feeding basket 2 is leaked out by through-hole 4,
Polycrystalline silicon rod is drained.
On the basis of the above embodiments, further, as shown in Figure 1 and Figure 2,1 bottom of shell is provided with wheel 11, shell
It is provided with migration connecting rod 12 in the one side wall of body 1, after migration connecting rod 12 is connect with traction device, the shifting of shell 1 can be drawn
It is dynamic；In use, manually or mechanically drawing the migration connecting rod 12 on shell 1, shell when moving horizontally this polycrystalline silicon crushing device
1 stress drives its bottom wheel 11, and wheel 11 is rolled, moved.
On the basis of the above embodiments, further, migration connecting rod 12 is fixed on shell 1, certainly, shell
The interface of migration connecting rod 12 can only be retained on 1, will migration connecting rod 12 or other power traction equipment as stand-alone assembly,
When the present apparatus needs mobile, connecting interface connect with pulling equipment or connect with migration connecting rod 12, when not needing be mobile, then will
Migration component disassembles.Equally, also leash, traction column etc. of phase same-action are played with migration connecting rod 12；Wheel 11 can
Think the one kind in the prior art such as one-way wheel, universal wheel.
On the basis of the above embodiments, further, temperature≤30 degree Celsius of cooling medium 3, the electricity of cooling medium 3
Resistance rate >=10 megohm centimetre.
By adopting the above technical scheme, the initial temperature of cooling medium is up to that 30 degrees Celsius of setting maintains cooling medium
Low-temperature condition, minimum 70 degrees Celsius of the temperature difference between the cooling medium of discharge and the cooling medium of inflow is to ensure cooling Jie
Matter and the temperature difference of polycrystalline silicon rod are at least 70 degrees Celsius, ensure that sufficient heat exchange between cooling medium and polycrystalline silicon rod,
Keep it broken to ensure that polycrystalline silicon rod generates enough thermal stress so that polycrystalline silicon rod stress is broken.
On the basis of the above embodiments, further, pure water is the optimal selection of cooling medium 3, in other optional realities
It applies in example, the substance of lower-cost easy circulation and easy alternating temperature, such as condensing gas can also be selected.
By adopting the above technical scheme, pure water is low in cost, it is convenient to obtain channel, and liquid condition is convenient for circulation, meanwhile, it is pure
The concentration of metallic impurities of water meets the requirements, and further ensures the crushing effect of polycrystalline silicon rod.
As shown in figure 3, present invention simultaneously provides a kind of polycrystalline silicon rod breaking method, apply in polycrystalline silicon rod crushing device
In (as shown in Figure 1), breaking polycrystalline silicon device includes shell 1, feeding basket 2 and cooling medium 3；1 top end opening of shell；Charge
For basket 2 for placing polycrystalline silicon rod, the opening direction of feeding basket 2 is consistent with the opening direction of shell 1, and is placed in shell 1, contains
Expect to offer several through-holes 4 on the non-opening face of basket 2, the cooling medium 3 being contained in shell 1 is flowed in or out by through-hole 4
Feeding basket 2；Include:
S101, polycrystalline silicon rod is placed in feeding basket 2 after reduction furnace taking-up；
Operator is put into after taking out polycrystalline silicon rod out of reduction furnace using existing polycrystalline silicon rod transfer equipments such as mechanical arms
In feeding basket 2, pollution in order to avoid mechanical arm to the high temperature polysilicon silicon rod taken out out of reduction furnace, mechanical arm and polycrystalline silicon rod
High-temperature resistant inner lining made of the part setting non-metallic material of contact.
S102, the feeding basket 2 for being placed with polycrystalline silicon rod is placed in shell 1；
The feeding basket 2 for being loaded with polycrystalline silicon rod is placed in shell 1 by operator, and feeding basket 2 can take out it in polycrystalline silicon rod
Before be put into shell 1, i.e., polycrystalline silicon rod is directly placed into feeding basket 2 after taking out, and at this point, feeding basket 2 is in shell 1；?
It can first put it into feeding basket 2 after polycrystalline silicon rod taking-up, then again be put into the feeding basket 2 for being loaded with polycrystalline silicon rod
In shell 1.
The temperature difference of S103, the exuberant cooling medium 3 in shell 1 and feeding basket 2, cooling medium 3 and polycrystalline silicon rod will be more
Crystalline silicon rod is broken, obtains polycrystalline silicon rod broken material；Wherein, cooling medium 3 and the temperature difference of polycrystalline silicon rod are at least 70 degrees Celsius.
The exuberant cooling medium 3 in shell 1 and feeding basket 2, cooling medium 3 in feeding basket 2 or can be loaded with polycrystalline
The feeding basket 2 of silicon rod inputs before being put into shell 1, feeding basket 2 can also be put into polycrystalline silicon rod, feeding basket 2 be put into it is defeated after shell 1
Enter；Ensure that there is temperature difference between cooling medium 3 and polycrystalline silicon rod, temperature difference is at least 70 degrees Celsius, at least 70 degrees Celsius
Temperature official post polycrystalline silicon rod inside generate thermal stress, thermal stress forces polycrystalline silicon rod broken, obtains polycrystalline silicon rod broken material.
On the basis of the above embodiments, further, breaking method is applied in polycrystalline silicon rod crushing device (such as Fig. 1 institute
Show) in, polycrystalline silicon rod crushing device further includes inlet units 5 and outlet port unit 6, and the side wall of shell 1 is arranged in inlet units 5
Upper and separate 1 open end of shell, to input cooling medium 3；Outlet port unit 6 is arranged on the side wall of shell 1 and opens close to shell 1
Mouth end, to export cooling medium 3；Inlet units 5, through-hole 4, outlet port unit 6 form the overflow ducts 7 of cooling medium 3；In shell
1 and feeding basket 2 in exuberant cooling medium 3, including, cooling medium 3 is flowed through into overflow ducts 7, forms circulation overflow；Recycle overflow
Time >=5 minute, temperature≤30 degree Celsius of cooling medium 3, resistivity >=10 megohm centimetre of cooling medium 3；It is cold
But medium 3 from bottom to top flows through shell 1 and feeding basket 2 using overflow ducts 7, and cooling medium 3 is enable to fill with polycrystalline silicon rod
Tap touching, and make to generate sufficient heat exchange between polycrystalline silicon rod and cooling medium 3, cooling medium 3 is formed in overflow ducts 7
Overflow is recycled, the time for recycling overflow directly affects crushing effect, and in the present embodiment, overflow time is at least 5 minutes, to ensure
Polycrystalline silicon rod has preferable crushing effect；Initial temperature≤30 degree Celsius of cooling medium 3, to ensure polycrystalline silicon rod and cooling
There is enough temperature differences, and the thermal stress produced by temperature difference between medium, it is ensured that or optimization crushing effect；Cooling medium
The resistivity of 3 resistivity >=10 megohm centimetre, cooling medium 3 is related to the purity of cooling medium 3, i.e. cooling medium 3
Purity it is higher, resistivity is bigger, resistivity >=10 megohm centimetre of cooling medium 3, to define cooling medium 3 indirectly
Purity, with ensure cooling medium 3 to polycrystalline silicon rod have lesser pollution, it is ensured that the quality of polycrystalline silicon rod.
On the basis of the above embodiments, further, in step 101, when temperature≤1000 degree Celsius in reduction furnace
When, polycrystalline silicon rod is taken out out of reduction furnace；Due to breaking method of the present invention using cooling medium 3 and polycrystalline silicon rod it
Between the thermal stress that generates of temperature difference keep polycrystalline silicon rod broken, therefore, when polycrystalline silicon rod takes out out of reduction furnace, in reduction furnace
Temperature can use polycrystalline silicon rod, greatly without being reduced to particular value and hereinafter, i.e. when temperature≤1000 degree Celsius in reduction furnace
Traditional breaking method is shortened greatly, the time for waiting reduction furnace temperature to reduce, to improve crushing efficiency.
On the basis of the above embodiments, further, after step 103, further include, when the temperature of cooling medium 3
At≤100 degrees Celsius, the polycrystalline silicon rod broken material being contained in feeding basket 2 is pulled out from shell 1, draining.
Using above-described embodiment, after the completion of broken process, connecting rod 10 is lifted, feeding basket 2 is taken out from shell 1, contained
Undischarged cooling medium 3 is released by through-hole 4 uniformly distributed on its five faces in material basket 2, until without containing cooling in feeding basket 2
Medium 3, completion drain process.
These are only the preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of polycrystalline silicon rod crushing device, which is characterized in that including shell, feeding basket and cooling medium；
The housing tip opening；
For the feeding basket for placing polycrystalline silicon rod, the opening direction of the feeding basket is consistent with the opening direction of the shell,
And be placed in the shell, several through-holes are offered on the non-opening face of the feeding basket；
It is contained in the shell intracorporal cooling medium and the feeding basket, cooling Jie is flowed in or out by the through-hole
Matter is contacted with the polycrystalline silicon rod being placed in the feeding basket, utilizes the temperature of the cooling medium and the polycrystalline silicon rod
Difference keeps the polycrystalline silicon rod broken；Wherein, the cooling medium and the temperature difference of the polycrystalline silicon rod are at least 70 degrees Celsius.
2. polycrystalline silicon rod crushing device according to claim 1, which is characterized in that further include that inlet units and outlet are single
Member；
The inlet units are arranged on the side wall of the shell and the open end far from the shell, to input cooling Jie
Matter；
The open end on the side wall of the shell and close to the shell is arranged in the outlet port unit, to export cooling Jie
Matter；
The inlet units, the through-hole and the outlet port unit form the overflow ducts of the cooling medium.
3. polycrystalline silicon rod crushing device according to claim 1, which is characterized in that the inner wall of the shell is provided with non-gold
Belong to liner, thickness >=3 millimeter of the non-metallic inner liner, concentration of metallic impurities≤100 contained in the non-metallic inner liner are micro-
Gram/m.
4. polycrystalline silicon rod crushing device according to claim 1, which is characterized in that the feeding basket is by nonmetallic materials system
At micro- gram/m of concentration of metallic impurities≤100 contained in nonmetallic materials.
5. polycrystalline silicon rod crushing device according to claim 1, which is characterized in that the through-hole is distributed in the feeding basket
5 non-opening faces on, diameter >=3 millimeter of the through-hole.
6. polycrystalline silicon rod crushing device according to claim 1, which is characterized in that temperature≤30 of the cooling medium are taken the photograph
Family name's degree, resistivity >=10 megohm centimetre of the cooling medium.
7. a kind of polycrystalline silicon rod breaking method, which is characterized in that apply in polycrystalline silicon rod crushing device, the breaking polycrystalline silicon
Device includes shell, feeding basket and cooling medium；The housing tip opening；The feeding basket is for placing polycrystalline silicon rod, institute
The opening direction for stating feeding basket is consistent with the opening direction of the shell, and can be placed in the shell, the feeding basket
Several through-holes are offered on non-opening face, the intracorporal cooling medium of the shell is contained in and is flowed in or out by the through-hole
The feeding basket；The breaking method includes:
The polycrystalline silicon rod is placed in the feeding basket after reduction furnace taking-up；
The feeding basket for being placed with the polycrystalline silicon rod is placed in the shell；
The exuberant cooling medium, the temperature of the cooling medium and the polycrystalline silicon rod in the shell and the feeding basket
The polycrystalline silicon rod is crushed by difference, obtains polycrystalline silicon rod broken material；Wherein, the temperature of the cooling medium and the polycrystalline silicon rod
Difference is at least 70 degrees Celsius.
8. polycrystalline silicon rod breaking method according to claim 7, which is characterized in that the polycrystalline silicon rod crushing device, also
Including inlet units and outlet port unit, the inlet units are arranged on the side wall of the shell and the opening far from the shell
End, to input the cooling medium；The opening on the side wall of the shell and close to the shell is arranged in the outlet port unit
End, to export the cooling medium；The inlet units, the through-hole and the outlet port unit form overflowing for the cooling medium
Circulation road；
The cooling medium exuberant in the shell and the feeding basket, including, the cooling medium is flowed through described
Overflow ducts form circulation overflow；Time >=5 minute of the circulation overflow, temperature≤30 degree Celsius of the cooling medium,
Resistivity >=10 megohm centimetre of the cooling medium.
9. polycrystalline silicon rod breaking method according to claim 7, which is characterized in that it is described by the polycrystalline silicon rod from reduction
Furnace takes out, comprising:
When temperature≤1000 degree Celsius in the reduction furnace, the polycrystalline silicon rod is taken out out of described reduction furnace.
10. polycrystalline silicon rod breaking method according to claim 7, which is characterized in that be crushed in the polycrystalline silicon rod that obtains
After material, the method also includes:
When temperature≤100 degree Celsius of the cooling medium, the polycrystalline silicon rod being contained in the feeding basket is crushed
Material pulled out from the shell, draining.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811385078.4A CN109513508A (en) | 2018-11-20 | 2018-11-20 | A kind of polycrystalline silicon rod crushing device and its breaking method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811385078.4A CN109513508A (en) | 2018-11-20 | 2018-11-20 | A kind of polycrystalline silicon rod crushing device and its breaking method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109513508A true CN109513508A (en) | 2019-03-26 |
Family
ID=65778133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811385078.4A Pending CN109513508A (en) | 2018-11-20 | 2018-11-20 | A kind of polycrystalline silicon rod crushing device and its breaking method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109513508A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110280372A (en) * | 2019-08-02 | 2019-09-27 | 合肥通彩自动化设备有限公司 | A kind of temperature difference crusher for TFT glass substrates crash |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009190001A (en) * | 2008-02-18 | 2009-08-27 | Mitsubishi Materials Corp | Crushing apparatus and crushing method of polycrystalline silicon rod |
| JP2010180078A (en) * | 2009-02-04 | 2010-08-19 | Tokuyama Corp | Process for producing polycrystal silicon |
| CN201729664U (en) * | 2010-05-27 | 2011-02-02 | 国电宁夏太阳能有限公司 | Polysilicon rod crushing equipment |
| CN102059170A (en) * | 2010-11-26 | 2011-05-18 | 镇江荣德新能源科技有限公司 | Device and method for breaking polycrystalline silicon rod |
| CN103599835A (en) * | 2013-11-20 | 2014-02-26 | 宁夏宁电光伏材料有限公司 | Silicon block crushing method |
| CN108405035A (en) * | 2018-02-26 | 2018-08-17 | 亚洲硅业（青海）有限公司 | A kind of polycrystalline silicon rod breaker and method |
| CN209646683U (en) * | 2018-11-20 | 2019-11-19 | 宁夏隆基硅材料有限公司 | A kind of polycrystalline silicon rod crushing device |
-
2018
- 2018-11-20 CN CN201811385078.4A patent/CN109513508A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009190001A (en) * | 2008-02-18 | 2009-08-27 | Mitsubishi Materials Corp | Crushing apparatus and crushing method of polycrystalline silicon rod |
| JP2010180078A (en) * | 2009-02-04 | 2010-08-19 | Tokuyama Corp | Process for producing polycrystal silicon |
| CN201729664U (en) * | 2010-05-27 | 2011-02-02 | 国电宁夏太阳能有限公司 | Polysilicon rod crushing equipment |
| CN102059170A (en) * | 2010-11-26 | 2011-05-18 | 镇江荣德新能源科技有限公司 | Device and method for breaking polycrystalline silicon rod |
| CN103599835A (en) * | 2013-11-20 | 2014-02-26 | 宁夏宁电光伏材料有限公司 | Silicon block crushing method |
| CN108405035A (en) * | 2018-02-26 | 2018-08-17 | 亚洲硅业（青海）有限公司 | A kind of polycrystalline silicon rod breaker and method |
| CN209646683U (en) * | 2018-11-20 | 2019-11-19 | 宁夏隆基硅材料有限公司 | A kind of polycrystalline silicon rod crushing device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110280372A (en) * | 2019-08-02 | 2019-09-27 | 合肥通彩自动化设备有限公司 | A kind of temperature difference crusher for TFT glass substrates crash |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101624187B (en) | Polysilicon growth ingot furnace | |
| CN207452294U (en) | A kind of bell with cooling device | |
| CN101575731A (en) | Vertical pulling silicon single crystal growing furnace with water-cooling jacket | |
| CN107217296B (en) | A kind of silicon wafer horizontal growth apparatus and method | |
| DE602004004095T2 (en) | MIRROR FOR A DEVICE FOR PRODUCING A CRYSTALLINE BLOCK, AND METHOD FOR THE PRODUCTION THEREOF | |
| WO2009118993A1 (en) | Single crystal manufacturing apparatus and single crystal manufacturing method | |
| Zhao et al. | Control of heat transfer in continuous-feeding Czochralski-silicon crystal growth with a water-cooled jacket | |
| CN209646683U (en) | A kind of polycrystalline silicon rod crushing device | |
| CN109513508A (en) | A kind of polycrystalline silicon rod crushing device and its breaking method | |
| CN105887186A (en) | Silicon single-crystal pulling equipment and growing method | |
| JPH01192789A (en) | Crystal-pulling up device and pulling up method | |
| CN206591201U (en) | Crystal silicon ingot furnace | |
| CN205893453U (en) | Guide cylinder for single crystal furnaces | |
| CN205839185U (en) | A kind of special-shaped guide shell structure | |
| CN106894082B (en) | Monocrystalline silicon growing furnace | |
| CN217677900U (en) | Cooling control system for single crystal pull rod workshop | |
| KR20110018316A (en) | Single crystal manufacturing apparatus | |
| CN208201169U (en) | The device of Defect monocrystalline | |
| CN110424050A (en) | A kind of device lifting speed and heat dissipation suitable for large size single crystal | |
| CN206562476U (en) | A kind of silicon melting furnaces for lifting silicon material fritting efficiency | |
| CN106319619B (en) | 6 inches of vertical pulling heavily-doped silicon dislocation-free growth techniques of one kind and its thermal field system | |
| CN205907390U (en) | Many crucibles liquid phase epitaxy siC crystal bear device | |
| CN114540939A (en) | Regulation control system for semiconductor growth furnace and regulation method thereof | |
| CN201459276U (en) | Czochralski silicon single crystal growing furnace with water cooling jacket | |
| KR20090079002A (en) | Apparatus for manufacturing silicon single crystal ingot |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |