CN109493913B - Two-degree-of-freedom micro-nano positioning platform - Google Patents
Two-degree-of-freedom micro-nano positioning platform Download PDFInfo
- Publication number
- CN109493913B CN109493913B CN201811599323.1A CN201811599323A CN109493913B CN 109493913 B CN109493913 B CN 109493913B CN 201811599323 A CN201811599323 A CN 201811599323A CN 109493913 B CN109493913 B CN 109493913B
- Authority
- CN
- China
- Prior art keywords
- decoupling
- platform
- guide
- driver
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Landscapes
- Micromachines (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The invention discloses a two-degree-of-freedom micro-nano positioning platform, which comprises a base, a motion platform, a guide mechanism, a decoupling mechanism and a driver, wherein the motion platform is arranged on the base; the motion platform is arranged in the middle of the base, the guide mechanisms are connected to the periphery of the motion platform and are connected with the decoupling mechanisms, the decoupling mechanisms are connected with the base, the amplifying mechanisms are arranged between the motion platform and the decoupling mechanisms and are connected with the decoupling mechanisms, drivers are arranged in the amplifying mechanisms and are used for driving the motion platform. The invention effectively utilizes the space of the positioning platform by structural layout and reduces the overall size of the positioning platform. The invention can reduce the force-displacement nonlinearity generated by the hinge rigidization effect of the positioning platform and reduce the concentrated stress of the hinge, the driver is more convenient to be assembled into the amplifying mechanism in an interference manner by the driver auxiliary assembling mechanism, the positioning platform can be integrally processed by linear cutting, and the invention has the advantages of no assembly, no friction, no lubrication and the like.
Description
Technical Field
The invention relates to the field of micro-nano precision positioning, in particular to a two-degree-of-freedom micro-nano positioning platform.
Background
The micro-nano positioning technology is widely applied to numerous fields such as microelectronic engineering, precision and ultra-precision machining, biomedical engineering, precision optical engineering and the like, and along with rapid development of scientific technology, the numerous fields provide higher and higher performance requirements for a micro-nano positioning system; the micro-nano positioning platform is the most important basic component in the micro-nano positioning system, and whether the structural design is reasonable or not determines the performance of the positioning system. Therefore, the research and development of a novel configuration micro-nano positioning platform with excellent performance is of great significance.
In some occasions requiring larger working stroke, a displacement amplification mechanism is usually additionally designed in the micro-nano positioning platform to amplify the displacement output by a driver, but the size of the positioning platform is increased, and the requirement on the installation space of the positioning platform is strict in some application occasions; in addition, reducing the size of the flexible hinges in the guide mechanism can reduce the size of the positioning platform, but can cause force-displacement nonlinear effects or cause excessive stress concentration on the hinges.
Disclosure of Invention
Aiming at the problems, the invention discloses a two-degree-of-freedom micro-nano positioning platform which is large in positioning stroke, small in hinge concentrated stress, good in force-displacement linearity and free from losing compactness.
In order to achieve the purpose, the invention adopts the following technical scheme:
a two-degree-of-freedom micro-nano positioning platform comprises a base, a motion platform, a guide mechanism, a decoupling mechanism and a driver; the decoupling mechanism is connected with the base, the amplifying mechanism is arranged between the moving platform and the decoupling mechanism and is connected with the decoupling mechanism, a driver is arranged in the amplifying mechanism, and the driver is used for driving the moving platform.
Furthermore, four sets of decoupling mechanisms are arranged, each decoupling mechanism comprises a middle rod and decoupling compliant members arranged at two ends of the middle rod; the middle rod is connected with the amplifying mechanism; the decoupling compliant member is connected with the base. The device is used for realizing the single-degree-of-freedom motion of the intermediate rod.
Further, the decoupling mechanisms are symmetrically distributed relative to the center of the moving platform.
Furthermore, the guide mechanisms are four groups, each guide mechanism comprises guide compliant members arranged at two ends, one end of each guide compliant member is connected with the moving platform, and the other end of each guide compliant member is connected with the decoupling mechanism. The device is used for realizing motion guidance of the motion platform.
Furthermore, the guide mechanisms are four groups, each guide mechanism comprises guide flexible members arranged at two ends, one end of each guide flexible member is connected with the moving platform, and the other end of each guide flexible member is connected with the middle rod.
Furthermore, the amplification mechanisms are arranged in two groups or four groups, and are symmetrically distributed relative to the center of the motion platform.
Further, the mechanism of enlargeing is equipped with stiff end and output, the stiff end is equipped with the fixed orifices that is used for fixed stiff end, the output with decoupling mechanism connects.
Furthermore, the driver also comprises a driver auxiliary assembly mechanism, the driver auxiliary assembly mechanism is symmetrically distributed relative to the center of the motion platform, and the driver auxiliary assembly mechanism is installed in a base connected with the outer side of the amplification mechanism.
Furthermore, the two-degree-of-freedom micro-nano positioning platform adopts an integrated processing mode.
Due to the adoption of the technical scheme, the invention has the beneficial effects that:
(1) the structure layout of the amplifying mechanism arranged among the motion platform, the guide mechanism and the decoupling mechanism effectively utilizes the space of the positioning platform, and the whole size of the positioning platform is reduced.
(2) The amplifying mechanism is arranged in the structural layout among the moving platform, the guide mechanism and the decoupling mechanism, and the flexible structural members of the guide mechanism and the decoupling mechanism have relatively large arrangement space, so that the force-displacement nonlinearity generated by the hinge rigidization effect of the positioning platform is reduced, and the hinge concentrated stress is reduced.
(3) The driver-assisted assembly mechanism facilitates interference assembly of the driver into the amplification mechanism.
(4) The positioning platform can be integrally machined by linear cutting, and has the advantages of no need of assembly, no friction, no need of lubrication and the like.
Drawings
Fig. 1 is a schematic diagram of the overall structure of an embodiment of the present invention.
Fig. 2 is a top view of fig. 1 of the present invention.
In the figure: 1. the device comprises a base, 2, a moving platform, 3, an amplifying mechanism, 31, a fixed end, 32, an output end, 4, a guide mechanism, 41, a guide flexible component, 5, a decoupling mechanism, 51, a decoupling flexible component, 52, a middle rod, 6, a driver, 7, a driver auxiliary assembly mechanism, 8, a platform fixing hole, 9 and a threaded hole.
Detailed description of the preferred embodiments
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
In the multi-degree-of-freedom micro-nano positioning platform, the effective decoupling mechanism has the functions of reducing the control difficulty, improving the positioning precision and avoiding the damage of a driver; therefore, the positioning platform structure with an effective decoupling mechanism, large positioning stroke, small hinge concentrated stress, good force-displacement linearity and no loss of compactness is developed, and has important significance for improving the performance of a positioning system.
A two-degree-of-freedom micro-nano positioning platform comprises a base 1, a motion platform 2, a guide mechanism 4, a decoupling mechanism 5 and a driver 6; the middle of the base 1 is provided with a motion platform 2, the periphery of the motion platform 2 is connected with the base through a decoupling mechanism 5, and the base 1 is provided with a plurality of platform fixing holes 8 for fixing and positioning the motion platform 2. The four corners of the base 1 are provided with arc-shaped or platform-shaped chamfers, so that an operator is prevented from being bruised by sharp corners at four positions.
An amplifying mechanism 3 is arranged between the moving platform 2 and the decoupling mechanism 5, the amplifying mechanism 3 is connected with the decoupling mechanism 5, the guide mechanism 4 covers the amplifying mechanism 3 and is connected with the decoupling mechanism 5, a driver 6 is arranged in the amplifying mechanism 3, and the driver 6 is used for driving the moving platform 2.
There are two or four groups of amplifying mechanisms 3, in this embodiment, two groups of diamond amplifying mechanisms are adopted, and each group is respectively and symmetrically arranged on the X axis and the Y axis of the moving platform 2. Each amplification mechanism 3 comprises a fixed end 31 and an output end 32, the fixed end 31 is provided with a platform fixing hole 8, and the fixed end 31 is fixed by additionally arranging a screw.
The driver 6 is mounted in the amplification mechanism 3 by interference fit the driver 6 is preferably a piezo ceramic driver in this embodiment. The amplification mechanism 3 is used to amplify the displacement output by the driver 6.
Since the driver 6 is mounted in the amplification mechanism 3 by interference fit, in order to facilitate the mounting of the driver 6 in the amplification mechanism 3, a driver auxiliary mounting mechanism 7 is mounted in the base 1 outside the intermediate lever 52 to which the amplification mechanism 3 is connected.
In the present embodiment, two sets of driver auxiliary assembly mechanisms 7 are provided, each set being symmetrical about the X-axis and the Y-axis, respectively, for assembling the driver 6 in the X-axis and the Y-axis, respectively, by machining threaded holes into the base 1 and screwing in the tapered end set screws. The driver auxiliary assembly mechanism 7 can apply force to the intermediate lever 52 to reversely move the output end 32, so that the space for installing the driver 6 in the amplifying mechanism 3 is enlarged, the installation of the driver 6 is facilitated, and after the driver 6 is installed at a proper position, the driver auxiliary assembly mechanism 7 is released to complete the installation of the driver 6.
The decoupling mechanisms 5 are provided with four groups, and each decoupling mechanism 5 comprises a middle rod 52 and decoupling compliant members 51 arranged at two ends of the middle rod 52; the intermediate rod 52 is connected with the output end 32 of the amplification mechanism 3; the decoupling compliant member 51 is connected with the base 1 for realizing the single degree of freedom motion of the intermediate lever 52. The decoupling mechanisms 5 are symmetrically distributed with respect to the center of the moving platform 2.
In the present embodiment, the two decoupling compliant members 51 preferably adopt a compound parallel four-bar guide mechanism for realizing the single-degree-of-freedom motion of the intermediate lever 52, and the decoupling function is realized because the degrees of freedom in the non-working direction of the intermediate lever 52 and the output end 32 are limited.
The two-degree-of-freedom and all-directional motion of the motion platform 2 are not interfered with each other, and one driver 6 only generates motion on the corresponding axis of the motion platform 2; the driver 6 is not damaged by the movement of the positioning platform.
The number of the guide mechanisms 4 is four, the guide mechanisms 4 comprise guide compliant members 41 arranged at two ends, one end of each guide compliant member 41 is connected with the moving platform 2, and the other end of each guide compliant member 41 is connected with an intermediate rod 52 of the decoupling mechanism 5. For guiding the motion platform motion 2.
The amplification mechanisms 3 are arranged in two groups or four groups, and the amplification mechanisms 3 are symmetrically distributed relative to the center of the motion platform 2. Amplification mechanism 3 is equipped with stiff end 31 and output 32, stiff end 31 is equipped with and is used for the platform fixed orifices 8 fixed with base 1, output 32 with decoupling mechanism 5's intermediate lever 52 is connected. The fixed end is fixed with the steel plate below the base, and the base is also fixed with the steel plate below the base.
The amplifying mechanism 3 is positioned between the motion platform 2, the guide mechanism 4 and the decoupling mechanism 5, and the flexible structural members of the guide mechanism 4 and the decoupling mechanism 5 have larger arrangement space due to the structural layout, so that the problems of force-displacement nonlinearity and stress concentration of the positioning platform caused by undersize hinge are reduced, the space of the positioning platform is fully utilized, and the positioning working stroke of the positioning platform is large without losing the structural compactness.
The driver 6 further comprises a driver auxiliary assembly mechanism 7, and the driver auxiliary assembly mechanisms 7 are distributed symmetrically relative to the center of the moving platform 2. The driver auxiliary fitting mechanism 7 is installed in the base 1 outside the intermediate lever to which the amplification mechanism 3 is connected. For applying a force to the intermediate lever 53 to move the amplification mechanism 3, facilitating the assembly of the driver 6 into the amplification mechanism 3. There are two sets of drive assist assembly mechanisms 7.
The two-degree-of-freedom micro-nano positioning platform adopts an integrated processing mode.
The working principle and the flow of the micro-nano positioning platform are as follows:
when the X-axis driver 6 is driven, the output displacement of the driver 6 is amplified by the amplifying mechanism 3, and the output end 32 and the intermediate rod 52 generate displacement, and the intermediate rod 52 drives the X-axis guiding compliant member 41. The moving platform 2 is then pushed by the guide compliant members 41 to generate a displacement motion, while the two sets of guide compliant members 41 in the Y-axis are symmetric about the X-axis. And because the existence of Y-axis decoupling mechanism 5, one end of guide mechanism 4 can cause the freedom of coupling to be restrained, so that motion platform 2 only moves along the X-axis when X-axis driver 6 is driven, and the Y-axis motion of motion platform 2 is the same.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (7)
1. A two-degree-of-freedom micro-nano positioning platform is characterized in that: the device comprises a base, a motion platform, a guide mechanism, a decoupling mechanism and a driver; the base middle part is equipped with motion platform, motion platform is connected with all around the guiding mechanism, guiding mechanism again with decoupling mechanism connects, decoupling mechanism with the pedestal connection, the mechanism of amplification is arranged in motion platform with between the decoupling mechanism, the guiding mechanism cover is located the mechanism of amplification outside, the mechanism of amplification is located among motion platform, guiding mechanism and the decoupling mechanism, the mechanism of amplification is connected with decoupling mechanism, be equipped with the driver in the mechanism of amplification, the driver is used for the drive motion platform.
2. The two-degree-of-freedom micro-nano positioning platform according to claim 1, characterized in that: the decoupling mechanisms are provided with four groups, and each decoupling mechanism comprises a middle rod and decoupling compliant members arranged at two ends of the middle rod; the middle rod is connected with the amplifying mechanism; the decoupling compliant member is connected with the base.
3. The two-degree-of-freedom micro-nano positioning platform according to claim 2, characterized in that: the decoupling mechanisms are symmetrically distributed relative to the center of the moving platform.
4. The two-degree-of-freedom micro-nano positioning platform according to claim 1, characterized in that: the four guide mechanisms comprise guide compliant members arranged at two ends, one end of each guide compliant member is connected with the moving platform, and the other end of each guide compliant member is connected with the decoupling mechanism.
5. The two-degree-of-freedom micro-nano positioning platform according to claim 2, characterized in that: the guide mechanism comprises guide compliant members arranged at two ends, one end of each guide compliant member is connected with the moving platform, and the other end of each guide compliant member is connected with the middle rod.
6. The two-degree-of-freedom micro-nano positioning platform according to claim 1 or 2, characterized in that: the amplifying mechanism is provided with a fixed end and an output end, the fixed end is provided with a fixed hole, and the output end is connected with the decoupling mechanism.
7. The two-degree-of-freedom micro-nano positioning platform according to claim 1, characterized in that: the two-degree-of-freedom micro-nano positioning platform adopts an integrated processing mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811599323.1A CN109493913B (en) | 2018-12-26 | 2018-12-26 | Two-degree-of-freedom micro-nano positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811599323.1A CN109493913B (en) | 2018-12-26 | 2018-12-26 | Two-degree-of-freedom micro-nano positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109493913A CN109493913A (en) | 2019-03-19 |
| CN109493913B true CN109493913B (en) | 2021-05-11 |
Family
ID=65712234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811599323.1A Active CN109493913B (en) | 2018-12-26 | 2018-12-26 | Two-degree-of-freedom micro-nano positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109493913B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110065926B (en) * | 2019-03-28 | 2021-11-02 | 杭州电子科技大学 | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform |
| CN110310695B (en) * | 2019-06-11 | 2021-07-06 | 天津大学 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN106195556A (en) * | 2016-09-22 | 2016-12-07 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platform |
| CN106299103A (en) * | 2016-09-09 | 2017-01-04 | 西安交通大学 | A kind of rhombus compliant mechanism with high natural frequency and displacement equations ratio |
| US9664562B1 (en) * | 2013-02-12 | 2017-05-30 | Lockheed Martin Corporation | Method and system for scanning staring focal plane array imaging |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
-
2018
- 2018-12-26 CN CN201811599323.1A patent/CN109493913B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
| US9664562B1 (en) * | 2013-02-12 | 2017-05-30 | Lockheed Martin Corporation | Method and system for scanning staring focal plane array imaging |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN106299103A (en) * | 2016-09-09 | 2017-01-04 | 西安交通大学 | A kind of rhombus compliant mechanism with high natural frequency and displacement equations ratio |
| CN106195556A (en) * | 2016-09-22 | 2016-12-07 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platform |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
Non-Patent Citations (1)
| Title |
|---|
| XY Parallel Compliant Stage with Compact Configuration;CHOI, Kee-Bong 等;《Journal of Nanoscience and Nanotechnology》;20121231;第12卷;5245-5251 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109493913A (en) | 2019-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108962336B (en) | Two-dimensional parallel flexible micro-motion platform based on piezoelectric drive | |
| CN109493913B (en) | Two-degree-of-freedom micro-nano positioning platform | |
| CN107622786B (en) | Two-stage piezoelectric driving micro-nano positioning platform | |
| CN107464586B (en) | Three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force | |
| CN103225728A (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN103302660B (en) | Two-degree-of-freedom metamorphic mechanism | |
| MY143608A (en) | Piston joint | |
| CN105904443A (en) | Two-degree-of-freedom flexible parallel mechanism for motion decoupling | |
| CN107786120B (en) | Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method | |
| CN110065926B (en) | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform | |
| CN106782674B (en) | Micro-displacement amplifier and nano positioning device | |
| CN101871549B (en) | Three-degree-of-freedom precision-positioning workbench | |
| CN109215730B (en) | Displacement reversing amplifying mechanism based on flexible hinge | |
| US6124695A (en) | Cartesian coordinates robot | |
| CN103056867B (en) | Flexible micro-moving manipulator | |
| CN110905909B (en) | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof | |
| CN109872767B (en) | Multi-source driven flexible parallel micromanipulator | |
| CN206048189U (en) | A kind of single-freedom and flexible mini positioning platform | |
| CN205029575U (en) | Inertia glues smooth platform | |
| CN204741009U (en) | Amplification device is moved to differential lever microbit of symmetry formula | |
| CN103869464B (en) | The flexible fast steering mirror of high accuracy | |
| US5214529A (en) | Assembly for static and dynamic positional control of an optical element | |
| CN208529149U (en) | Turbine disk water-immersion system corollary equipment | |
| KR100876617B1 (en) | Precision linear piezoelectric stepping positioner | |
| CN217941946U (en) | Angle steering device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |