CN109483403A - A kind of polishing pad brush with grooming function - Google Patents
A kind of polishing pad brush with grooming function Download PDFInfo
- Publication number
- CN109483403A CN109483403A CN201811593753.2A CN201811593753A CN109483403A CN 109483403 A CN109483403 A CN 109483403A CN 201811593753 A CN201811593753 A CN 201811593753A CN 109483403 A CN109483403 A CN 109483403A
- Authority
- CN
- China
- Prior art keywords
- brush
- polishing pad
- trimmer
- backboard
- stepped hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 70
- 230000003370 grooming effect Effects 0.000 title claims abstract description 21
- 238000012423 maintenance Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The present invention provides a kind of polishing pad brush with grooming function, including backboard, spring, trimmer, brush and screw, backboard is in oblate structure, it is provided with several through-holes passed through for the screw above, the front of brush is equipped with several hairbrush, several stepped holes are provided on the circumferencial direction at the brush back side, for placing a trimmer in each stepped hole, trimmer is mounted in the stepped hole and stretches out out of described stepped hole, backboard lid closes the back side in the brush and brush is fixed on backboard by screw, a spring is equipped in each stepped hole, one end of spring is resisted against on trimmer, the other end is resisted against on backboard.Both polishing pad brush and polishing pad trimmer are integrated in one by the present invention, it can be completed at the same time twice technique, improve the maintenance efficiency of polishing pad, reduce the labor intensity of operator, the cost of polishing pad maintenance is reduced, so that the cleannes of polishing pad and polishing precision can be guaranteed simultaneously.
Description
Technical field
The present invention relates to technical field of semiconductors, in particular it relates to a kind of polishing pad with grooming function
Brush.
Background technique
In the polishing processing procedure of semiconductor wafer and part photoelectric material, in order to ensure wafer polishing surface quality,
Precision and polishing efficiency need periodically to safeguard polishing pad；Common maintaining method has scrub and finishing.As shown in Figure 1,
Polishing pad brush a is to maintain the cleaning of polishing pad, the polishing fluid of skim-coat and shallow-layer is gone to crystallize, and polishing pad scrub usually makes
It is completed with polishing pad brush a.As shown in Fig. 2, polishing pad trimmer b is the flatness and pad interface in order to maintain polishing pad
Roughness, it is ensured that the polishing precision and polishing efficiency of chip, the finishing of polishing pad are completed usually using polishing pad trimmer b.
In actual production process, polishing pad brush and polishing pad trimmer are required using needing two sets of differences
Tool the maintenances of different purposes is carried out to polishing pad, due to using two kinds of tools and technique, affect polishing pad
Maintenance efficiency increases the maintenance cost of polishing pad.
To solve the above problems, the present invention provides a kind of polishing pad brush with grooming function, overcomes existing throwing
The defect that light pad brush and polishing pad trimmer have a single function, makes polishing pad trimmer and polishing pad brush be integrated in one, mentions
The maintenance efficiency of high polishing pad.
Summary of the invention
In order to solve problems in the prior art, the polishing pad brush with grooming function that the present invention provides a kind of, overcomes
The defect that existing polishing pad brush and polishing pad trimmer have a single function is integrated in polishing pad trimmer and polishing pad brush
One, improves the maintenance efficiency of polishing pad.
The invention patent provides a kind of polishing pad brush with grooming function, including backboard, spring, trimmer, brush
Disk and screw, the backboard are in oblate structure, are provided with several through-holes passed through for the screw above, the brush is just
Face is equipped with several hairbrush, and several stepped holes are provided on the circumferencial direction at the brush back side, are used to place in each stepped hole
One trimmer, the trimmer are mounted in the stepped hole and stretch out out of described stepped hole, and the backboard lid is closed described
Brush is simultaneously fixed on backboard by screw by the back side of brush, is equipped with a spring in each stepped hole, and the one of the spring
End is resisted against on the trimmer, and the other end is resisted against on the backboard.
Preferably, the end face of each trimmer is equipped with the slot for placing spring.
Preferably, the front of the backboard be equipped with several mounting grooves for fixed spring, the position of the mounting groove and
The position of the slot is corresponding.
Preferably, a boss is equipped in the stepped hole, the upper end-face edge of the trimmer is equipped with a fin, the boss
It is matched with the fin, to be limited to the trimmer in the stepped hole.
Preferably, the back side of the brush is equipped with several screw holes, the number of openings on the screw hole and the backboard
And position is corresponding.
Preferably, the periphery of each stepped hole is equipped with 4 screw holes.
Preferably, the stepped hole is evenly distributed on the circumferencial direction at the brush back side.
Preferably, the stepped hole is through-hole structure.
Technical solution provided by the invention has the benefit that the present invention by polishing pad brush and polishing pad trimmer
The two is integrated in one, and can be completed at the same time twice technique, improves the maintenance efficiency of polishing pad, and the labour for reducing operator is strong
Degree reduces the cost of polishing pad maintenance, so that the cleannes of polishing pad and polishing precision can be guaranteed simultaneously.
Detailed description of the invention
It, below will be to required use in embodiment description in order to illustrate more clearly of the technical solution in the invention patent
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings others
Attached drawing.
Fig. 1 is the structural schematic diagram of traditional polishing pad brush；
Fig. 2 is the structural schematic diagram of traditional polishing pad trimmer；
Fig. 3 is the Structure explosion diagram of the polishing pad brush in the present invention with grooming function；
Fig. 4 is the structure chart of the polishing pad brush in the present invention with grooming function.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, general replacement known to those skilled in the art
It is included within the scope of protection of the present invention.Secondly, the present invention has carried out detailed statement using schematic diagram, it is real the present invention is described in detail
When example, for ease of description, schematic diagram is not partially enlarged in proportion to the general scale, should not be in this, as limitation of the invention.
Above and other technical characteristic and beneficial effect, will in conjunction with the embodiments and attached drawing is to of the invention has grooming function
Polishing pad brush be described in detail.As shown, Fig. 3 is the structure of the polishing pad brush in the present invention with grooming function
Explosive view；Fig. 4 is the structure chart of the polishing pad brush in the present invention with grooming function.
As shown in Figure 3-4, the present invention provides a kind of polishing pad brush with grooming function, including backboard 200, spring
300, trimmer 400, brush 500 and screw 100.
Specifically, backboard 200 is in oblate structure, it is provided with several through-holes passed through for screw 100 above, backboard 200
Front is equipped with several mounting grooves for fixed spring, and the position of mounting groove is corresponding to the position of spring 300.
The front of brush 500 in the present embodiment is equipped with several hairbrush, is provided on the circumferencial direction at 500 back side of brush several
Stepped hole 600, for placing a trimmer 400 in each stepped hole 600, trimmer 400 is mounted in stepped hole 600 and from step
It is stretched out in hole 600, stepped hole 600 is through-hole structure, is evenly distributed on the circumferencial direction at 500 back side of brush, stepped hole 600
It is inside equipped with a boss, the upper end-face edge of trimmer 400 is equipped with a fin, and boss is matched with fin, to repairing in stepped hole
Whole device 400 is limited.
The lid of backboard 200 in the present embodiment closes the back side in brush 500 and brush 500 is fixed on backboard by screw
On 200, it is equipped with a spring 300 in each stepped hole 600, one end of spring 300 is resisted against on trimmer 400, and the other end is resisted against
On backboard 200.Trimmer is fixed in the stepped hole 600 of brush by 200 pressing spring 300 of backboard, backboard 200 passes through spiral shell
Silk is fixed with brush 500.
Spring 300 generates displacement between backboard 200 and trimmer 400 in order to prevent, and the end face of each trimmer 400 is equipped with
For placing the slot of spring 300, the front of backboard 200 is equipped with several mounting grooves for fixed spring 300, the position of mounting groove
It sets corresponding to the position of slot 700.
The back side of brush 500 in the present embodiment is equipped with several screw holes, preferably, the periphery of each stepped hole 600 is equipped with 4
A screw hole, screw hole on backboard 200 number of openings and position it is corresponding, screw 100 pass through backboard 200 on through-hole will carry on the back
Plate 200 is fixed in brush 500.
In conclusion both polishing pad brush and polishing pad trimmer are integrated in one by the present invention, two can be completed at the same time
Road technique improves the maintenance efficiency of polishing pad, reduces the labor intensity of operator, reduces the cost of polishing pad maintenance, makes
The cleannes and polishing precision for obtaining polishing pad can be guaranteed simultaneously.
Although the present invention essentially describes above embodiments, example is intended only as to be described, and the present invention is simultaneously
It is without being limited thereto.Those of ordinary skill in the art can make the essential characteristics of a variety of modifications and application without departing from embodiment.For example,
Each component that embodiment is shown in detail can be modified and be run, be believed that and be included in the modification and the relevant difference of application
In protection scope of the present invention as defined in the appended claims.
Embodiment involved in this specification is meant that specially feature, structure or the spy described in conjunction with the embodiment
Property is included at least one embodiment of the present invention.These terms for coming across everywhere in specification are not necessarily directed to same
Embodiment.In addition, it is common all to think that it falls into this field when describing a particular feature, structure, or characteristic in conjunction with any embodiment
In the range of these a particular feature, structure, or characteristics that technical staff combines other embodiments that can realize.
Claims (8)
1. a kind of polishing pad brush with grooming function, which is characterized in that including backboard, spring, trimmer, brush and spiral shell
Silk, the backboard are in oblate structure, are provided with several through-holes passed through for the screw above, if the front of the brush is equipped with
Dry hairbrush, is provided with several stepped holes on the circumferencial direction at the brush back side, for placing a trimmer in each stepped hole,
The trimmer is mounted in the stepped hole and stretches out out of described stepped hole, and the backboard lid closes at the back side of the brush
And brush is fixed on backboard by screw, a spring is equipped in each stepped hole, one end of the spring is resisted against institute
It states on trimmer, the other end is resisted against on the backboard.
2. the polishing pad brush according to claim 1 with grooming function, which is characterized in that the end of each trimmer
Face is equipped with the slot for placing spring.
3. according to right want 2 described in grooming function polishing pad brush, which is characterized in that the front of the backboard is equipped with
Several mounting grooves for fixed spring, the position of the mounting groove are corresponding to the position of the slot.
4. the polishing pad brush according to claim 1 with grooming function, which is characterized in that be equipped in the stepped hole
The upper end-face edge of one boss, the trimmer is equipped with a fin, and the boss is matched with the fin, to the stepped hole
Interior trimmer is limited.
5. the polishing pad brush according to claim 1 with grooming function, which is characterized in that the back side of the brush is set
Have several screw holes, the screw hole on the backboard number of openings and position it is corresponding.
6. the polishing pad brush according to claim 1 with grooming function, which is characterized in that the week of each stepped hole
Edge is equipped with 4 screw holes.
7. the polishing pad brush according to claim 1 with grooming function, which is characterized in that the stepped hole is uniform
It is distributed on the circumferencial direction at the brush back side.
8. the polishing pad brush according to claim 1 with grooming function, which is characterized in that the stepped hole is through-hole
Structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811593753.2A CN109483403A (en) | 2018-12-25 | 2018-12-25 | A kind of polishing pad brush with grooming function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811593753.2A CN109483403A (en) | 2018-12-25 | 2018-12-25 | A kind of polishing pad brush with grooming function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109483403A true CN109483403A (en) | 2019-03-19 |
Family
ID=65711922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811593753.2A Pending CN109483403A (en) | 2018-12-25 | 2018-12-25 | A kind of polishing pad brush with grooming function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109483403A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116872090A (en) * | 2023-09-07 | 2023-10-13 | 北京特思迪半导体设备有限公司 | Dressing disk and device for polishing wafer |
| CN116922223A (en) * | 2023-09-15 | 2023-10-24 | 江苏京成机械制造有限公司 | Trimming equipment is used in foundry goods production with collect dust function |
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| TW200400866A (en) * | 2002-04-02 | 2004-01-16 | Rodel Inc | Composite conditioning disk |
| TWI220657B (en) * | 2003-11-04 | 2004-09-01 | Kinik Co | Elongated dresser |
| JP2005271101A (en) * | 2004-03-23 | 2005-10-06 | Tokyo Seimitsu Co Ltd | Dressing device of polishing pad and polishing apparatus having the dressing device of polishing pad |
| CN201865077U (en) * | 2010-11-05 | 2011-06-15 | 长安大学 | Split-type disc brush |
| TWM429982U (en) * | 2011-12-15 | 2012-05-21 | Kinik Co | Chemical mechanical polishing pad dresser |
| CN102767149A (en) * | 2012-05-26 | 2012-11-07 | 苏州市京达环卫设备有限公司 | Disc type sweeping brush for sweeping machine |
| CN204163022U (en) * | 2014-08-18 | 2015-02-18 | 湖南工程学院 | A kind of motor-driven Floor-sweeping device |
| TW201609318A (en) * | 2014-09-11 | 2016-03-16 | China Grinding Wheel Corp | Polishing pad dresser with brushing element |
| CN108098590A (en) * | 2017-12-21 | 2018-06-01 | 东莞华晶粉末冶金有限公司 | The trimmer and its dressing method of a kind of grinding and polishing pad |
| CN209364390U (en) * | 2018-12-25 | 2019-09-10 | 上海致领半导体科技发展有限公司 | A kind of polishing pad brush with grooming function |
-
2018
- 2018-12-25 CN CN201811593753.2A patent/CN109483403A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200400866A (en) * | 2002-04-02 | 2004-01-16 | Rodel Inc | Composite conditioning disk |
| TWI220657B (en) * | 2003-11-04 | 2004-09-01 | Kinik Co | Elongated dresser |
| JP2005271101A (en) * | 2004-03-23 | 2005-10-06 | Tokyo Seimitsu Co Ltd | Dressing device of polishing pad and polishing apparatus having the dressing device of polishing pad |
| CN201865077U (en) * | 2010-11-05 | 2011-06-15 | 长安大学 | Split-type disc brush |
| TWM429982U (en) * | 2011-12-15 | 2012-05-21 | Kinik Co | Chemical mechanical polishing pad dresser |
| CN102767149A (en) * | 2012-05-26 | 2012-11-07 | 苏州市京达环卫设备有限公司 | Disc type sweeping brush for sweeping machine |
| CN204163022U (en) * | 2014-08-18 | 2015-02-18 | 湖南工程学院 | A kind of motor-driven Floor-sweeping device |
| TW201609318A (en) * | 2014-09-11 | 2016-03-16 | China Grinding Wheel Corp | Polishing pad dresser with brushing element |
| CN108098590A (en) * | 2017-12-21 | 2018-06-01 | 东莞华晶粉末冶金有限公司 | The trimmer and its dressing method of a kind of grinding and polishing pad |
| CN209364390U (en) * | 2018-12-25 | 2019-09-10 | 上海致领半导体科技发展有限公司 | A kind of polishing pad brush with grooming function |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116872090A (en) * | 2023-09-07 | 2023-10-13 | 北京特思迪半导体设备有限公司 | Dressing disk and device for polishing wafer |
| CN116872090B (en) * | 2023-09-07 | 2023-11-14 | 北京特思迪半导体设备有限公司 | Dressing disk and device for polishing wafer |
| CN116922223A (en) * | 2023-09-15 | 2023-10-24 | 江苏京成机械制造有限公司 | Trimming equipment is used in foundry goods production with collect dust function |
| CN116922223B (en) * | 2023-09-15 | 2023-11-24 | 江苏京成机械制造有限公司 | Trimming equipment is used in foundry goods production with collect dust function |
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