CN109465651A - Frictional rigidity switching device and Rigid-flexible Coupled Motion platform and method using it - Google Patents
Frictional rigidity switching device and Rigid-flexible Coupled Motion platform and method using it Download PDFInfo
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- CN109465651A CN109465651A CN201811451999.6A CN201811451999A CN109465651A CN 109465651 A CN109465651 A CN 109465651A CN 201811451999 A CN201811451999 A CN 201811451999A CN 109465651 A CN109465651 A CN 109465651A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
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Abstract
The invention discloses a kind of frictional rigidity switching device and using its Rigid-flexible Coupled Motion platform and method, the Coupled Rigid-flexible platform includes: hollow rigid frame, workbench and flexible hinge；The hollow rigid frame is connect by the flexible hinge with the workbench；The Rigid-flexible Coupled Motion platform further includes rigidity switching device；The rigidity switching device is fixed on the hollow rigid frame；The rigidity switching device includes switching mechanism and contact friction member；The switching mechanism drives the friction block mobile, to change the exposure level between the friction block and the workbench.The present invention is able to solve the vibration problem of Coupled Rigid-flexible platform during high speed exercise, realizes high Low rigidity switching, vibration and high rigidity flexible hinge compensation effect bad contradiction when avoiding Low rigidity flexible hinge high speed.
Description
Technical field
The present invention relates to motor-drive technique, more particularly relate to a kind of Coupled Rigid-flexible platform with rigidity switching device and
Motion platform.
Background technique
High speed and precision motion control field, based on the motion platform of mechanical guide there are frictional dead, precision be can only achieve
Micron order.In the occasion that higher precision requires, industrially need to reduce very using modes such as air bearing, magnetic suspension and hydrostatic slideways
At high cost to the influence for eliminating friction, use environment requires high, uncomfortable application and the electronic manufacture occasion having a large capacity and a wide range.However,
Electronics manufacturing obtain Moore's Law (when price is constant, the number of open ended component on integrated circuit, about every 18-24
Will double within a month, performance will also promote one times) harsh requirement is proposed to encapsulation equipment accuracy and speed.
Coupled Rigid-flexible platform dexterously combines a wide range of rigidity movement of linear platform and flexible hinge without the accurate fortune of friction
Dynamic feature avoids frictional dead with the flexible deformation of flexible hinge in speed zero crossing, realizes the benefit of frictional dead
It repays, therefore the movement of continuous precise may be implemented.It is mainly applicable in since the working principle of flexible hinge kinematic pair limits it
In the movement of micro-stroke, therefore during big stroke motion, flexible hinge is often used cooperatively with there is fricting movement pair, group
Cheng Hongwei composite motion platform realizes the movement of large stroke and high precision, compensates to grand movement.However, rigid frame
In a plane, effective work area is very small for frame, flexible hinge and workbench.Also, in the motion process of big stroke,
Since the rigidity of flexible hinge itself is very small, flexible hinge can be constantly of reciprocating vibration with the movement of platform, can shadow
The rigidity and kinematic accuracy of precision surface plate during sound grand movement.
Summary of the invention
Present invention seek to address that effective work area problem of the single driving Coupled Rigid-flexible platform of expansion, proposes that one kind is based on being somebody's turn to do
Expand the rigidity switching device of single driving Coupled Rigid-flexible platform of effective work area, it is flat in movement using rigidity switching mechanism
When platform is in non-model control dead zone, electricity consumption magnetic force control framework and platform are in contact condition, improve rigidity.Specific technical solution is such as
Under.
A kind of Coupled Rigid-flexible platform with rigidity switching device, the Coupled Rigid-flexible platform include: hollow rigid frame, work
Make platform and flexible hinge；The hollow rigid frame is connect by the flexible hinge with the workbench；The Coupled Rigid-flexible
Motion platform further includes rigidity switching device；The rigidity switching device is fixed on the hollow rigid frame；The rigidity is cut
Changing device includes switching mechanism and contact friction member；The switching mechanism drives the friction block mobile, to rub described in change
Exposure level between cleaning block and the workbench.
Further, the switching mechanism is the device that the exposure level is adjusted by linear motion.
Further, the switching mechanism is sliding electromagnet, cylinder or ball-screw.
Further, the hollow rigid frame is " recessed " shape hollow rigid frame；
" recessed " the shape hollow rigid frame two sides inner wall is equipped with groove, and the workbench setting is hollow in " recessed " shape
In the groove of rigid frame, and connected by the flexible hinge；The rigidity switching device further includes being fixed on " recessed "
The fixed block of shape hollow rigid frame outer bottom, the switching mechanism are arranged in the fixed block；" recessed " shape is hollow just
Property base of frame be equipped with through-hole；The switching mechanism passes through the through-hole and the friction block is driven to move up and down.
Further, the flexible hinge is that spring leaf, the workbench both ends and the spring leaf are connected by a briquetting
It is connected together, the spring leaf both ends tighten together further through other two briquetting with groove two sidewalls.
A kind of precision movement platform, the precision movement platform include base, the linear guide being fixed on the base,
Guide rail slide block, Coupled Rigid-flexible platform above-mentioned, linear motor rotor；Hollow rigid frame in the Coupled Rigid-flexible platform passes through
Guide rail slide block is mounted in linear guide；The linear motor rotor is installed on the workbench.
Further, the precision movement platform further includes the grating ruler reading head being installed on the workbench, is mounted on
Grating scale on the pedestal, the grating ruler reading head and the grating scale form non-contact composition detecting element.
Further, the precision movement platform further includes the anticollision device, collision-prevention device being installed on the pedestal.
A method of the precision movement platform of control preceding claim the described method comprises the following steps:
S1. the linear motor rotor directly drives the workbench, fails to overcome the hollow rigid frame in driving force
When frame static friction, the rigidity switching device does not work, and the workbench is generated micro- by the flexible deformation of the flexible hinge
Thin tail sheep realizes accurate Fine Feed；
S2. when driving force increases, frictional force is overcome, the hollow rigid frame movement is driven, and elasticity becomes at this time
Shape increases to a certain extent, and into limit state, all driving forces are transmitted to the hollow rigid frame and carry out high-speed motion,
Rigidity switching device enters working condition at this time, increases the exposure level between the friction block and the workbench, described rigid
Switching device is spent by the flexible hinge " locked ", and flexible deformation cannot occur；
S3. when stopping, the workbench is first braked, and drives the hollow rigid frame system by the flexible hinge
Dynamic, after the hollow rigid frame is braked completely, rigidity switching device power cut-off, the rigidity switching device is to institute at this time
It states flexible hinge " unlock ", flexible deformation decaying vibrational energy occurs.
Compared with prior art, beneficial effect is: the present invention is able to solve Coupled Rigid-flexible platform during high speed exercise
Vibration problem, realize the switching of high Low rigidity, vibration and high rigidity flexible hinge are mended when avoiding Low rigidity flexible hinge high speed
Repay ineffective contradiction.
Detailed description of the invention
Fig. 1 is schematic diagram of the invention.
Fig. 2 is front cross sectional view of the invention.
Fig. 3 is the partial enlarged view in Fig. 2 at A.
Fig. 4 is the partial enlarged view in Fig. 2 at B.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
As shown in Figure 1, a kind of motion platform includes pedestal 1, linear guide 2 and Coupled Rigid-flexible platform are installed on pedestal 1.It should
Coupled Rigid-flexible platform includes: " recessed " shape hollow rigid frame 5, workbench 7 and flexible hinge." recessed " shape hollow rigid frame 5 is logical
Guide rail slide block 3 is crossed to be mounted in linear guide 2.5 two sides inner wall of " recessed " shape hollow rigid frame is equipped with groove.Workbench 7 is arranged
It is connected in the groove of " recessed " shape hollow rigid frame 5, and through flexible hinge.Grating ruler reading head 4 and linear motor rotor 8
Be mounted on workbench 7, and through on concave hollow frame, with pedestal 1 grating scale 10 and linear motor stator electric 9 pass through it is non-
The detection of contact composition and driving element.For safety, anticollision device, collision-prevention device 6 is also mounted on pedestal 1.
As shown in figure 3, flexible hinge is spring leaf A01,7 both ends of workbench are connected to spring leaf A01 by briquetting A03
Together, spring leaf both ends tighten together further through briquetting A02 with groove two sidewalls.
As shown in figure 4, the Coupled Rigid-flexible platform further includes rigidity switching device, which includes: fixed block
B01, sliding electromagnet B02, spring B 03 and friction block B04.Rigidity switching device is fixed on rigid frame by fixed block B01
5, it is connected between the two with screw.Groove is equipped in the middle part of fixed block B01, for placing sliding electromagnet B02.Sliding electromagnet
B02 is connected with an axis, and the top of axis is friction block B04, spring B 03 sliding electromagnet B02 and contact friction member B04 it
Between.
In one embodiment, cylinder or ball-screw substitution can be used in sliding electromagnet.
Certainly, other than using " recessed " shape hollow rigid frame, the hollow rigid frame of other forms also can be used, such as
The hollow frame etc. of bis- " L " symmetric forms.At this point, rigidity switching device can be set on the bottom edge of two L shapes.
In addition, different according to the setting position of hinge, rigidity switching device can also correspondingly adjust setting to other ground
Side.Such as if hinge setting, in the bottom portion of groove of " recessed " shape hollow rigid frame, rigidity switching device also will be adjusted correspondingly
It is whole to side wall on.
In the work of rigidity switching device, sliding electromagnet B02 pushes away friction block B04 by the hole that rigid frame 5 is reserved
To 7 bottom of workbench, spring B 03 is sprung back, and contact friction member B04 comes into full contact with 7 bottom of workbench, is generated enough
Frictional force inhibits the spring leaf A01 being connected with workbench 7 that flexible deformation occurs and causes Platform Vibration, Coupled Rigid-flexible at this time
Platform is switched to rigid platfor；When rigidity switching device does not work, sliding electromagnet B02 is pulled down friction member B04 is contacted,
It is detached from 7 bottom of workbench, flexible deformation occurs for spring leaf A01, compensates grand movement, improves the kinematic accuracy of platform.
The rigidity switching device working principle of expansion type Coupled Rigid-flexible platform of the present invention is as follows:
The work of rigidity switching device can be divided into two kinds of situations: a. is less than the quiet of kinematic pair as the elastic deformation force of spring leaf
When the resistances such as frictional force, grating rule displacement sensor detects that rigid frame does not move, sliding electromagnet drop-down, friction block and work
Make platform separation, the spring leaf of workbench occurs flexible deformation and compensates frictional dead；B. when the flexible deformation of spring leaf acts on
When power is greater than the resistances such as the stiction between linear guide kinematic pair, rigid frame will switch to motion state by stationary state,
It being pushed away on sliding electromagnet, friction block and workbench are in close contact, and frictional force is generated, the spring leaf of workbench is hindered to move,
At this point, Coupled Rigid-flexible platform, which switches to rigid platfor, carries out grand movement.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (9)
1. a kind of Coupled Rigid-flexible platform with rigidity switching device, the Coupled Rigid-flexible platform includes: hollow rigid frame, work
Platform and flexible hinge；
The hollow rigid frame is connect by the flexible hinge with the workbench；
It is characterized in that, the Rigid-flexible Coupled Motion platform further includes rigidity switching device；
The rigidity switching device is fixed on the hollow rigid frame；
The rigidity switching device includes switching mechanism and contact friction member；
The switching mechanism drives the friction block mobile, to change the contact journey between the friction block and the workbench
Degree.
2. Coupled Rigid-flexible platform according to claim 1, which is characterized in that the switching mechanism is to be adjusted by linear motion
Save the device of the exposure level.
3. Coupled Rigid-flexible platform according to claim 2, which is characterized in that the switching mechanism is sliding electromagnet, gas
Cylinder or ball-screw.
4. Coupled Rigid-flexible platform according to claim 1-3, which is characterized in that
The hollow rigid frame is " recessed " shape hollow rigid frame；
" recessed " the shape hollow rigid frame two sides inner wall is equipped with groove, and the workbench is arranged in " recessed " the shape hollow rigid
In the groove of frame, and connected by the flexible hinge；
The rigidity switching device further includes the fixed block for being fixed on " recessed " shape hollow rigid frame outer bottom, the switching
Mechanism is arranged in the fixed block；
" recessed " the shape hollow rigid base of frame is equipped with through-hole；
The switching mechanism passes through the through-hole and the friction block is driven to move up and down.
5. Coupled Rigid-flexible platform according to claim 4, which is characterized in that the flexible hinge is spring leaf, the work
Make platform both ends and linked together with the spring leaf by a briquetting, the spring leaf both ends further through other two briquetting with
Groove two sidewalls tighten together.
6. a kind of precision movement platform, which is characterized in that the precision movement platform includes base, is fixed on the base
The described in any item Coupled Rigid-flexible platforms of linear guide, guide rail slide block, claim 1-5, linear motor rotor；
Hollow rigid frame in the Coupled Rigid-flexible platform is mounted in linear guide by guide rail slide block；
The linear motor rotor is installed on the workbench.
7. precision movement platform according to claim 6, which is characterized in that the precision movement platform further includes being mounted on
Grating ruler reading head on the workbench, the grating scale being mounted on the base, the grating ruler reading head and the light
Grid ruler forms non-contact composition detecting element.
8. precision movement platform according to claim 6 or 7, which is characterized in that the precision movement platform further includes peace
Loaded on the anticollision device, collision-prevention device on the pedestal.
9. a kind of method for controlling the described in any item precision movement platforms of claim 6-8, which is characterized in that the method packet
Include following steps:
S1. the linear motor rotor directly drives the workbench, fails to overcome the hollow rigid frame quiet in driving force
When friction, the rigidity switching device does not work, and the workbench generates small position by the flexible deformation of the flexible hinge
It moves, realizes accurate Fine Feed；
S2. when driving force increases, frictional force is overcome, the hollow rigid frame movement is driven, and flexible deformation increases at this time
Greatly to a certain extent, into limit state, all driving forces are transmitted to the hollow rigid frame and carry out high-speed motion, at this time
Rigidity switching device enters working condition, increases the exposure level between the friction block and the workbench, and the rigidity is cut
Flexible deformation cannot be occurred for the flexible hinge " locked " by changing device；
S3. when stopping, the workbench is first braked, and drives the hollow rigid frame to brake by the flexible hinge, when
After the hollow rigid frame is braked completely, rigidity switching device power cut-off, the rigidity switching device is to described soft at this time
Property hinge " unlock ", occur flexible deformation decay vibrational energy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451999.6A CN109465651B (en) | 2018-11-30 | 2018-11-30 | Friction type rigidity switching device, rigid-flexible coupling motion platform using same and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451999.6A CN109465651B (en) | 2018-11-30 | 2018-11-30 | Friction type rigidity switching device, rigid-flexible coupling motion platform using same and method |
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| CN109465651A true CN109465651A (en) | 2019-03-15 |
| CN109465651B CN109465651B (en) | 2023-11-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113997157A (en) * | 2021-11-11 | 2022-02-01 | 吉林大学 | Multi-surface common-body optical curved surface polishing machine tool and method based on macro-micro composite driving |
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2018
- 2018-11-30 CN CN201811451999.6A patent/CN109465651B/en active Active
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|---|---|---|---|---|
| US5268970A (en) * | 1990-06-29 | 1993-12-07 | Nippon Thompson Co., Ltd. | Anti-vibration linear motion guide unit |
| CN203843811U (en) * | 2014-05-20 | 2014-09-24 | 广东工业大学 | Adjustable rigidity and frequency one-dimensional micro-motion platform based on principle of stress stiffening |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113997157A (en) * | 2021-11-11 | 2022-02-01 | 吉林大学 | Multi-surface common-body optical curved surface polishing machine tool and method based on macro-micro composite driving |
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| CN109465651B (en) | 2023-11-28 |
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