CN109465650A - Air-cylinder type rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it - Google Patents
Air-cylinder type rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it Download PDFInfo
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- CN109465650A CN109465650A CN201811451998.1A CN201811451998A CN109465650A CN 109465650 A CN109465650 A CN 109465650A CN 201811451998 A CN201811451998 A CN 201811451998A CN 109465650 A CN109465650 A CN 109465650A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The invention discloses air-cylinder type rigidity switching device and using its Rigid-flexible Coupled Motion platform and method, wherein the Rigid-flexible Coupled Motion platform includes: rigid frame, nucleus movement platform and flexible hinge；The nucleus movement platform is connect by the flexible hinge with the rigid frame；The Rigid-flexible Coupled Motion platform further includes pushing meanss；The pushing meanss push the nucleus movement platform movement, to change the relative position between the nucleus movement platform and the rigid frame, to change the rigidity of the flexible hinge.The present invention can be realized the displacement of high-precision consecutive variations, and avoiding friction in pairs state switching under speed operation causes to be displaced " shake " caused by sudden change of acceleration.
Description
Technical field
The present invention relates to motor-drive technique, more particularly relates to a kind of Rigid-flexible Coupled Motion platform and use the hard and soft coupling
The motion platform and method of resultant motion platform.
Background technique
High speed and precision motion platform is widely used in the fields such as semiconductor packages.And it is flat in conventional high rate precise motion
In the structure design of platform, the uncertain variation of surface roughness will lead to frictional resistance amplitude between kinematic pair in motion platform
Uncertain variation.And vibration decaying in position fixing process so that platform continually move with it is static, cause frictional force " quiet to rub
Switch between wiping power " and " kinetic force of friction ".Therefore, in closed-loop control, driver adjusts driving force constantly to overcome difference to rub
Resistance is wiped, " vibration " of the motion platform near final position location is ultimately caused, influences positioning accuracy.
It is influenced to reduce the position error as caused by Frotteurism switching during starting, stopping and Fine Feed,
Iing is proposed a kind of effective scheme --- the Rigid-flexible Coupled Motion platform based on flexible hinge comes real by flexible hinge flexible deformation
The movement of existing continuous precise.The working principle of flexible hinge kinematic pair limits its movement for being primarily adapted for use in micro-stroke.
Therefore, during big stroke motion, flexible hinge is often used cooperatively with there is fricting movement pair, forms macro micro- compound motion
Platform realizes the movement of large stroke and high precision, compensates to the micro-displacement of position fixing process.
However, spring rates of flexure hinges is smaller during the positioning compensation of long stroke, it is easy to produce deformation, two platforms
Between can generate and do relatively reciprocating motion.Platform hysteresis as produced by inertia generates " vibration " phenomenon, affects fortune
The positioning accuracy of moving platform and positioning time.
Summary of the invention
The structure of existing most Coupled Rigid-flexible macro/micromotion platform are as follows: pass through between macro dynamic outer framework and micromotion platform
Flexible hinge connection, macro dynamic outer framework realize the macro movement of big stroke, and micromotion platform dynamically compensates above-mentioned macro in position fixing process
The movement warp of movement.Above-mentioned macro micro- compound motion can realize the movement of large stroke and high precision.However, current Coupled Rigid-flexible is flat
Platform have the shortcomings that one it is bigger be that it is macro it is dynamic during, flexible hinge because lower rigidity and generate vibration, to lead
The fluctuation for causing feedback signal, influences accuracy and speed of the high-accuracy motion platform in position fixing process.
The main object of the present invention is proposing a kind of Rigid-flexible Coupled Motion platform and using the Rigid-flexible Coupled Motion platform
Motion platform.Accelerated, in the motion process at the uniform velocity with deceleration in motion platform, which pushes away micromotion platform by cylinder
Power reaches the deformation of flexible hinge utmostly, to greatly promote the rigidity of flexible hinge.I.e. in this process,
Precision movement platform can be considered a rigid platfor, to prevent Low rigidity bring vibration in starting or quiescing process.Work as fortune
After moving platform enters position fixing process, which reduces or unloads original thrust, increases the damping of micromotion platform, so that elastic hinge
In Low rigidity state, for compensating micro-displacement.The technical solution adopted by the present invention is that as follows.
A kind of Rigid-flexible Coupled Motion platform, the Rigid-flexible Coupled Motion platform include: rigid frame, nucleus movement platform with
Flexible hinge；The nucleus movement platform is connect by the flexible hinge with the rigid frame；The Rigid-flexible Coupled Motion
Platform further includes pushing meanss；The pushing meanss push the nucleus movement platform movement, flat to change the nucleus movement
Relative position between platform and the rigid frame, to change the rigidity of the flexible hinge.
Further, the pushing meanss are cylinder damper device, and the cylinder damper device includes: that cylinder, piston are gentle
Cylinder push rod；Described piston one end is set in the cylinder, and the other end is connect with the cylinder push-rod；When the cylinder charge,
Cylinder push-rod described in the piston driving applies thrust to nucleus movement platform, and the spring rates of flexure hinges increases；The cylinder
When unloading air pressure, the recycling of cylinder push-rod described in the piston driving, the spring rates of flexure hinges restores Low rigidity state.
Further, the rigid frame has processing hole, and the processing hole is for placing cylinder damper device.
Further, the cylinder damper device further includes mounting flange, and the mounting flange is used for the cylinder damper
Device is fixed in processing hole.
Further, it is needed on the rigid frame with the processing hole of the cooperation of the cylinder there are certain surplus, with
Guarantee the movement of the cylinder push-rod.
Further, limiting device and/or damper are provided between the rigid frame and the nucleus movement platform.With
In the rigid shock that the alleviation nucleus movement platform is contacted with the rigid frame.
Further, the flexible hinge between the nucleus movement platform and the rigid frame is to be arranged symmetrically.
Further, there is also support stiffness reinforcement structures for the nucleus movement platform and rigid frame.
Further, the flexible hinge is straight beam type or cut type flexible hinge.
Further, the Rigid-flexible Coupled Motion platform is integral type processing and manufacturing.
A kind of precision movement platform, the precision movement platform include base, the linear guide being fixed on the base,
Guide rail slide block, Rigid-flexible Coupled Motion platform above-mentioned, linear actuator；Nucleus movement platform in the Coupled Rigid-flexible platform with
The linear actuator connection, the rigid frame are connect by the guide rail slide block with the linear guide.
Further, the precision movement platform further includes displacement sensor, institute's displacement sensors and the nucleus movement
Platform connection, for measuring the displacement of the nucleus movement platform in the movement direction.
Further, the linear actuator is voice coil motor or linear motor, is directly driven, fast response time.
A method of precision movement platform above-mentioned being controlled, the pushing meanss are cylinder damper device, the method
The following steps are included:
S1. the linear actuator directly drives the nucleus movement platform, when the linear actuator is started to work,
The cylinder damper device synchronous averaging pushes the nucleus movement platform, so that the flexible hinge is generated elastic deformation, works as institute
When stating elastic deformation and reaching maximum value, the spring rates of flexure hinges is maximum, and the linear actuator pushes the core fortune at this time
Moving platform high-speed motion；
S2. in the nucleus movement platform motion process, the cylinder damper device keeps pressure, so that in the movement
The flexible hinge still keeps maximum rigidity in the process, meets the needs of high-speed motion；
S3. when the nucleus movement platform stops entering positioning stage, the cylinder damper device unloading pressure, thus
Restore the flexible hinge to flexible state, carries out fine motion compensation using the flexible deformation of the flexible hinge, realize high-precision
Degree positioning.
Compared with prior art, beneficial effect is:
1. using without friction flexible hinge kinematic pair come realize high-precision consecutive variations be displaced, avoid and transported under speed operation
Dynamic frictional transition switching causes to be displaced " shake " caused by sudden change of acceleration.
2. the motion platform for using Coupled Rigid-flexible designs, used flexible hinge can be by natural resiliency deformation master
The dynamic change in friction force for adapting to guide rail kinematic pair avoids " to creep " caused by the switching of friction in pairs state and determine continuous dislocation
The influence of position, is advantageously implemented higher positioning accuracy.
3. using cylinder damper device, flexible hinge is placed in high rigidity state when platform carries out grand movement,
So that Coupled Rigid-flexible platform switches to rigid platfor, the vibration of flexible hinge in this process is avoided；In platform Fine Feed
In the process, cylinder damper device restores flexible hinge to Low rigidity state, and increases damping and reduce elasticity shake, flexible hinge
Flexible deformation occurs, compensates.
Detailed description of the invention
Fig. 1 is schematic diagram of the invention.
Fig. 2 is front cross sectional view of the invention.
Fig. 3 is the partial enlarged view of Fig. 2.
Fig. 4 is the working principle of the invention schematic diagram.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
As shown in Figure 1-3, motion platform mainly by base (A06), linear guide (A04), straight-line guide rail slide block (A05),
The composition such as Rigid-flexible Coupled Motion platform and linear motor driver.Wherein, Rigid-flexible Coupled Motion platform includes rigid frame
(A03), nucleus movement platform (A02), flexible hinge (A01) and cylinder damper device.Rigid frame (A03) and nucleus movement are flat
It is connected between platform (A02) by flexible hinge (A01) kinematic pair, rigid frame (A03) passes through linear guide kinematic pair and base
(A06) it connects；Cylinder damper device includes cylinder (A08), piston (A07), cylinder push-rod (A10).The setting of piston one end (A07)
In cylinder (A08), the other end is connect with cylinder push-rod (A10).Piston can be pushed by being inflated or losing heart to cylinder (A08)
(A07) it moves, the movement of piston (A07) drives cylinder push-rod (A10) movement, to change nucleus movement platform (A02) and rigid
Relative position between property frame (A03), to change the rigidity of the flexible hinge.
In one embodiment, rigid frame (A03) has processing hole, and the processing hole is for placing cylinder damper device；
Cylinder damper device further includes mounting flange (A09), and mounting flange (A09) is used to the cylinder damper device being fixed on processing
In hole.There are certain surpluses for the processing hole needs matched on rigid frame (A03) with cylinder (A08), guarantee the gas
The movement of cylinder push rod (A10).Certainly, the cylinder damper device may be not necessarily provided in the processing hole of rigid frame, can also
Be arranged elsewhere, in the gap between nucleus movement platform and rigid frame, as long as can change rigid frame with
The relative position of nucleus movement platform, to change the rigidity of flexible hinge just.In addition, being also not necessarily intended to hinder using cylinder
Buddhist nun's device, it is good using other pushing meanss.
Preferably, be provided between the rigid frame and nucleus movement platform of the Coupled Rigid-flexible platform limiting device and/
Or damper, the rigid shock contacted for alleviating the nucleus movement platform with the rigid frame.
Preferably, limiting device and resistance are provided between the rigid frame and nucleus movement platform of the Coupled Rigid-flexible platform
Buddhist nun's device, the rigid shock contacted for alleviating the nucleus movement platform with the rigid frame.
Preferably, the flexible hinge between the nucleus movement platform and the rigid frame of Coupled Rigid-flexible platform is pair
Claim arrangement.
Preferably, the Rigid-flexible Coupled Motion platform is integral type processing and manufacturing.
Preferably, the flexible hinge is straight beam type or cut type flexible hinge.
Preferably, the nucleus movement platform in the Rigid-flexible Coupled Motion platform and rigid frame there is also linear bearing,
The support stiffness reinforcement structure such as magnetic force.
Preferably, the linear actuator is voice coil motor or linear motor, is directly driven, fast response time.
Preferably, the precision movement platform further includes displacement sensor, institute's displacement sensors and the nucleus movement
Platform connection, for measuring the displacement of the nucleus movement platform in the movement direction.
Linear motor driver applies driving force to nucleus movement platform (A02).The driving force can make flexible hinge
(A01) flexible deformation occurs, and the nucleus movement platform (A02) is made to generate the straight-line displacement along rail length direction in turn.
The straight line that the flexible deformation reaction force of the flexible hinge (A01) can be used for that the rigid frame (A03) is overcome to be connected
Frictional force between guide rail kinematic pair.The work of cylinder damper device can be divided into two kinds of situations: a. in startup stage and motion stage,
Linear motor applies driving force to nucleus movement platform (A02), and piston (A07) is inflated at this time, and pusher cylinder push rod (A10) is to core
Heart motion platform (A02) applies thrust, and rigidity is maximum at this time for flexible hinge (A01)；B. in positioning stage, piston (A07) unloading
Air pressure, cylinder push-rod (A10) recycling improve the damping of nucleus movement platform (A02), and flexible hinge (A01) restores Low rigidity shape
State.
When the motion state of the linear guide kinematic pair switches between above situation a and b, the linear guide fortune
Difference between dynamic pair confficient of static friction and dynamic friction coefficient causes resistance to be mutated, and generates the rigid shock to motion platform, and
Lead to the friction " creeping " of kinematic pair.Simultaneously as flexible hinge (A01) rigidity is lower, elastic deformation is generated, so that core is transported
Moving platform (A02) enters positioning stage Shi Buting " shake ".It is flexible during the starting of Coupled Rigid-flexible platform and big stroke motion
Hinge (A01) is in the state of high rigidity due to the thrust of cylinder push-rod (A10), so that nucleus movement platform (A02) obtains
Enough to driving force.Positioning stage after the stopping of Coupled Rigid-flexible platform, the reduction of cylinder push-rod (A10) thrust lead to flexible hinge
Chain (A01) rigidity is restored, and the damping of nucleus movement platform (A02) is improved, so that nucleus movement platform (A02) passes through flexibility
The elastic deformation of hinge (A01) carries out positioning compensation.
The working principle of the rigidity switching device of Coupled Rigid-flexible platform of the present invention are as follows:
1. as shown in figure 4, the flexible deformation active force of the flexible hinge (A01) fails to overcome when being in starting state
Rigid frame (A03) static friction, the rigid frame (A03) will remain stationary state, and displacement sensor detects rigidity
Frame (A03) does not move.Cylinder damper device is started to work at this time, and single action cylinder (2) applies thrust to cylinder push-rod (A10),
Nucleus movement platform (A02) generates displacement, promotes flexible hinge (A01) to generate maximum flexibility deformation, reaches maximum rigidity state,
So that rigid frame (A03) and nucleus movement platform (A02) can be considered rigid connection；
2. as shown in figure 4, rigid frame (A03) and nucleus movement platform (A02) can be considered one after starting state
Rigid body.Then platform enters motion stage, and linear actuator drives nucleus movement platform (A02), all driving forces are transmitted to
Rigid frame (A03), meets the needs of platform high-speed motion；
3. as shown in figure 4, single action cylinder (2) reduces pressure when nucleus movement platform (A02) enters positioning stage afterwards in place
Power, cylinder push-rod (A10) thrust reduce, and flexible hinge (5) restores to Low rigidity state at this time.Pass through flexible hinge (A01) bullet
Property deformation effect, nucleus movement platform (A02) generate micro-displacement, thus compensate rigid frame (A03) because friction etc. reasons
The error of generation.The single action cylinder (2) under low-pressure has the function of damper simultaneously, can reduce flexible hinge when positioning because
" shake " that flexible deformation generates.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (10)
1. a kind of Rigid-flexible Coupled Motion platform, the Rigid-flexible Coupled Motion platform include: rigid frame, nucleus movement platform with it is soft
Property hinge；
The nucleus movement platform is connect by the flexible hinge with the rigid frame；
It is characterized in that, the Rigid-flexible Coupled Motion platform further includes pushing meanss；
The pushing meanss push the nucleus movement platform movement, to change the nucleus movement platform and the rigid frame
Between relative position, to change the rigidity of the flexible hinge.
2. Rigid-flexible Coupled Motion platform according to claim 1, which is characterized in that the pushing meanss are cylinder damper dress
It sets, the cylinder damper device includes: cylinder, piston and cylinder push-rod；
Described piston one end is set in the cylinder, and the other end is connect with the cylinder push-rod；
When the cylinder charge, cylinder push-rod described in the piston driving applies thrust, the flexible hinge to nucleus movement platform
Chain rigidity increases；
When the cylinder unloading air pressure, cylinder push-rod recycling described in the piston driving, the spring rates of flexure hinges restores low rigid
Degree state.
3. Rigid-flexible Coupled Motion platform according to claim 2, which is characterized in that the rigid frame has processing hole, institute
Processing hole is stated for placing cylinder damper device；
The cylinder damper device further includes mounting flange, and the mounting flange, which is used to for the cylinder damper device being fixed on, to be added
In work hole.
4. Rigid-flexible Coupled Motion platform according to claim 3, which is characterized in that on the rigid frame with the cylinder
Cooperation the processing hole need there are certain surpluses, to guarantee the movement of the cylinder push-rod.
5. Rigid-flexible Coupled Motion platform described in any one of -4 according to claim 1, which is characterized in that in the rigid frame
Limiting device and/or damper are provided between the nucleus movement platform.
6. Rigid-flexible Coupled Motion platform described in any one of -4 according to claim 1, which is characterized in that the nucleus movement is flat
Flexible hinge between platform and the rigid frame is to be arranged symmetrically.
7. Rigid-flexible Coupled Motion platform described in any one of -4 according to claim 1, which is characterized in that the flexible hinge is
Straight beam type or cut type flexible hinge.
8. a kind of precision movement platform, which is characterized in that the precision movement platform includes base, is fixed on the base
The described in any item Rigid-flexible Coupled Motion platforms of linear guide, guide rail slide block, claim 1-7, linear actuator；
Nucleus movement platform in the Rigid-flexible Coupled Motion platform is connect with the linear actuator, and the rigid frame passes through
The guide rail slide block is connect with the linear guide.
9. precision movement platform according to claim 8, which is characterized in that the precision movement platform further includes that displacement passes
Sensor, institute's displacement sensors are connect with the nucleus movement platform, for measuring the nucleus movement platform in the direction of motion
On displacement.
10. a kind of method of precision movement platform described in control claim 8 or 9, which is characterized in that the pushing meanss are
Cylinder damper device, the described method comprises the following steps:
S1. the linear actuator directly drives the nucleus movement platform, described when the linear actuator is started to work
Cylinder damper device synchronous averaging pushes the nucleus movement platform, so that the flexible hinge is generated elastic deformation, when the bullet
Property deformation when reaching maximum value, the spring rates of flexure hinges is maximum, and the linear actuator pushes the nucleus movement flat at this time
Platform high-speed motion；
S2. in the nucleus movement platform motion process, the cylinder damper device keeps pressure, so that in the motion process
Described in flexible hinge still keep maximum rigidity；
S3. when the nucleus movement platform stops entering positioning stage, the cylinder damper device unloading pressure, to make institute
It states flexible hinge to restore to flexible state, carries out fine motion compensation using the flexible deformation of the flexible hinge.
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| CN201811451998.1A CN109465650B (en) | 2018-11-30 | 2018-11-30 | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
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|---|---|---|---|
| CN201811451998.1A CN109465650B (en) | 2018-11-30 | 2018-11-30 | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281036A (en) * | 2019-06-14 | 2019-09-27 | 广东工业大学 | A kind of single driving Rigid-flexible Coupled Motion platform of double measurements |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11172953A (en) * | 1997-12-15 | 1999-06-29 | Taisei Corp | Flexible and rigid combination structure |
| CN202394545U (en) * | 2011-12-15 | 2012-08-22 | 东莞华中科技大学制造工程研究院 | Single-shaft floating linear platform |
| JP2013202708A (en) * | 2012-03-27 | 2013-10-07 | Hitachi Via Mechanics Ltd | Processing machine |
| CN104772727A (en) * | 2015-04-24 | 2015-07-15 | 严瑾 | Rigid-flexible blended clamp |
| CN105345759A (en) * | 2015-11-23 | 2016-02-24 | 清华大学 | Two-dimensional nanometer servo platform |
| CN106002312A (en) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | Single-driven rigid-flexible coupled precision motion platform as well as realizing method and application thereof |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
| CN106891306A (en) * | 2017-04-25 | 2017-06-27 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| CN107103131A (en) * | 2017-04-20 | 2017-08-29 | 华中科技大学 | A kind of Rigid-flexible Coupling Dynamics modeling method based on Simulink platforms |
| CN108015561A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of motion platform for expanding single driving Coupled Rigid-flexible work area |
| CN209919324U (en) * | 2018-11-30 | 2020-01-10 | 广东工业大学 | Rigid-flexible coupling platform with cylinder type rigidity switching device and motion platform |
-
2018
- 2018-11-30 CN CN201811451998.1A patent/CN109465650B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11172953A (en) * | 1997-12-15 | 1999-06-29 | Taisei Corp | Flexible and rigid combination structure |
| CN202394545U (en) * | 2011-12-15 | 2012-08-22 | 东莞华中科技大学制造工程研究院 | Single-shaft floating linear platform |
| JP2013202708A (en) * | 2012-03-27 | 2013-10-07 | Hitachi Via Mechanics Ltd | Processing machine |
| CN104772727A (en) * | 2015-04-24 | 2015-07-15 | 严瑾 | Rigid-flexible blended clamp |
| CN105345759A (en) * | 2015-11-23 | 2016-02-24 | 清华大学 | Two-dimensional nanometer servo platform |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
| CN106002312A (en) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | Single-driven rigid-flexible coupled precision motion platform as well as realizing method and application thereof |
| CN107103131A (en) * | 2017-04-20 | 2017-08-29 | 华中科技大学 | A kind of Rigid-flexible Coupling Dynamics modeling method based on Simulink platforms |
| CN106891306A (en) * | 2017-04-25 | 2017-06-27 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| CN108015561A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of motion platform for expanding single driving Coupled Rigid-flexible work area |
| CN209919324U (en) * | 2018-11-30 | 2020-01-10 | 广东工业大学 | Rigid-flexible coupling platform with cylinder type rigidity switching device and motion platform |
Non-Patent Citations (4)
| Title |
|---|
| 万德钧, 国防工业 * |
| 何伟宏等: "柔性铰链的微动平台设计", 机械设计与制造, no. 1, pages 56 - 58 * |
| 张庆,王华坤,张世琪: "微机电***二维微动工作台微位移机构特性研究", 机械与电子, no. 06, pages 37 - 40 * |
| 董申,陈丽霞,刘海龙: "微动工作台的研制及特性研究", 航空精密制造技术, vol. 1, no. 06, pages 510 - 3 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281036A (en) * | 2019-06-14 | 2019-09-27 | 广东工业大学 | A kind of single driving Rigid-flexible Coupled Motion platform of double measurements |
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