CN109444183A - Multi-functional X-ray imaging device - Google Patents
Multi-functional X-ray imaging device Download PDFInfo
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- CN109444183A CN109444183A CN201811588689.9A CN201811588689A CN109444183A CN 109444183 A CN109444183 A CN 109444183A CN 201811588689 A CN201811588689 A CN 201811588689A CN 109444183 A CN109444183 A CN 109444183A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 74
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/03—Investigating materials by wave or particle radiation by transmission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
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Abstract
The invention discloses a kind of multi-functional X-ray imaging devices, including work station, motion controller and multi-functional X-ray image forming apparatus body;Multi-functional X-ray image forming apparatus body includes pedestal, x-ray source displacement drive mechanism, sample stage displacement drive mechanism, detector displacement drive mechanism, x-ray source group, sample stage and detector group.Multi-functional X-ray imaging device of the invention includes two sets of x-ray sources and detector, the corresponding x-ray source of unrestricted choice and combinations of detectors can be required according to parts density to be measured, part size and imaging resolution, x-ray source can carry out position adjusting along Y-axis and Z-direction, detector can carry out position adjusting along X-axis, Y-axis and Z-direction, while x-ray source and detector can carry out position adjustment in Y-axis and Z-direction, equipment can need to carry out two-dimentional photography, tomography and tomographic imaging according to imaging.
Description
Technical field
The present invention relates to x-ray imaging technology field, in particular to a kind of multi-functional X-ray imaging device.
Background technique
Existing industrial X-ray imaging device only includes a set of x-ray source and detector, the ceiling capacity and function of x-ray source
Rate, the resolution ratio of detector and size are fixed, and the extension of industrial X-ray imaging device function is limited.Existing equipment X is penetrated simultaneously
Line source and detector only can carry out position adjustment along Z-direction, only have the function of two dimension photography and tomographic imaging, do not have chromatography
Imaging function.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of multi-functional X
Ray imaging device.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: a kind of multi-functional X-ray imaging device, packet
Include work station, motion controller and multi-functional X-ray image forming apparatus body;
The multi-functional X-ray image forming apparatus body includes pedestal, sets gradually X on the base along the x axis
Radiographic source displacement drive mechanism, detector displacement drive mechanism, is arranged in the x-ray source position sample stage displacement drive mechanism
The x-ray source group moved in driving mechanism, the sample stage that is arranged in sample stage displacement drive mechanism and it is arranged in the spy
Detector group in Ce Qi displacement drive mechanism;
Wherein, x-ray source displacement drive mechanism is used to that the x-ray source group to be driven to move along Y-axis and Z-direction,
Sample stage displacement drive mechanism is for driving the sample stage that rotation fortune is moved and done about the z axis along X-axis, Y-axis and Z-direction
Dynamic, detector displacement drive mechanism is for driving the detector group to move along X-axis, Y-axis and Z-direction.
Preferably, x-ray source displacement drive mechanism includes setting radiographic source column on the base, setting
It is flat in the radiographic source Z axis translation stage on the radiographic source column and the radiographic source Y-axis being arranged on the radiographic source Z axis translation stage
Moving stage.
Preferably, detector displacement drive mechanism include setting detector X-axis translation stage on the base,
The detector column being arranged on the detector X-axis translation stage, the detector Z axis translation being arranged on the detector column
Platform and the first detector Y-axis translation stage and the second detector being successively set on along Z-direction on the detector Z axis translation stage
Y-axis translation stage.
Preferably, the x-ray source group includes being successively set on the radiographic source Y-axis translation stage along the y axis
First x-ray source and the second x-ray source, and the height of the Z-direction of the focus of the two is identical;
The detector group includes being separately positioned on the first detector Y-axis translation stage and the translation of the second detector Y-axis
The first detector and the second detector on platform.
Preferably, sample stage displacement drive mechanism include setting sample stage X-axis translation stage on the base,
The sample stage Y-axis translation stage being arranged on the sample stage X-axis translation stage, the sample being arranged on the sample stage Y-axis translation stage
Sample platform Z axis lifting platform and the sample stage turntable being arranged on the sample stage Z axis lifting platform, the sample stage are arranged in the sample
On sample platform turntable.
Preferably, radiographic source Y-direction laser is additionally provided on the radiographic source Y-axis translation stage, the first radiographic source Z-direction swashs
Light device and the second radiographic source Z-direction laser;The radiographic source Y-direction laser and first x-ray source and the second x-ray source
The Z axis coordinate of focus is all the same, the Y axis coordinate phase of the first radiographic source Z-direction laser and the focus of first x-ray source
Together, the second radiographic source Z-direction laser is identical as the Y axis coordinate of focus of second x-ray source.
Preferably, the radiographic source Y-axis translation stage, radiographic source Z axis translation stage, the first detector Y-axis translation stage, second
Detector Y-axis translation stage, detector Z axis translation stage, detector X-axis translation stage, sample stage turntable, sample stage Z axis lifting platform, sample
Zero-bit optoelectronic switch is provided on sample platform Y-axis translation stage and sample stage X-axis translation stage;
The bottom of the pedestal is provided with multiple lower margins, and the lower margin includes height regulation pin and castor.
Preferably, the operating mode of the multi-functional X-ray imaging device include X-ray two dimension photography, X-ray chromatography at
Picture and x-ray tomography imaging, carry out the photography of X-ray two dimension workflow the following steps are included:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material and imaging resolution, selects corresponding x-ray source and detector;
3) x-ray source, detector and sample stage are controlled by motion controller and carries out position adjusting finally along Y-axis and Z axis
Ensure the corresponding radiographic source Y-direction laser of selected x-ray source, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser
Intersection point be overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage is controlled by motion controller and detector carries out position adjusting along the x axis, finally ensure sample
Projection on the detector is within the scope of detector detection plane, and it is suitable to have the multi-functional X-ray imaging device
Amplification ratio;
5) it by the way that motion controller control x-ray source is exposed, detector carries out data acquisition, obtains two dimension photography and ties
Fruit completes the photography of X-ray two dimension.
Preferably, the workflow which carries out X-ray tomography includes following step
It is rapid:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material and imaging resolution, selects corresponding x-ray source and detector;
3) x-ray source, detector and sample stage are controlled by motion controller and carries out position adjusting finally along Y-axis and Z axis
Ensure the corresponding radiographic source Y-direction laser of selected x-ray source, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser
Intersection point be overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage is controlled by motion controller and detector carries out position adjusting along the x axis, finally ensure sample
Projection on the detector is within the scope of detector detection plane, and it is suitable to have the multi-functional X-ray imaging device
Amplification ratio;
5) it is transported by motion controller control selected x-ray source and detector with certain velocity ratio reverse sync
It is dynamic, x-ray source exposure is started simultaneously at, and detector carries out data acquisition by certain frame per second;
6) work station rebuilds the tomographic projection data that detector acquires, and obtains tomography as a result, completing X-ray
Tomography.
Preferably, the workflow which carries out x-ray tomography imaging includes following step
It is rapid:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material and imaging resolution, selects corresponding x-ray source and detector;
3) x-ray source, detector and sample stage are controlled by motion controller and carries out position adjusting finally along Y-axis and Z axis
Ensure the corresponding radiographic source Y-direction laser of selected x-ray source, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser
Intersection point be overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage is controlled by motion controller and detector carries out position adjusting along the x axis, finally ensure sample
Projection on the detector is within the scope of detector detection plane, and it is suitable to have the multi-functional X-ray imaging device
Amplification ratio;
5) sample stage is controlled by motion controller at the uniform velocity to rotate about the z axis with certain speed, start simultaneously at x-ray source exposure
Light, and detector carries out data acquisition by certain frame per second;
6) work station rebuilds the tomographic projection data that detector acquires, and obtains x-ray tomography imaging results, completes
X-ray tomography imaging.
The beneficial effects of the present invention are: multi-functional X-ray imaging device of the invention includes simultaneously two sets of x-ray sources and spy
Device is surveyed, the corresponding x-ray source of unrestricted choice and detection can be required according to parts density to be measured, part size and imaging resolution
Device combination, x-ray source can carry out position adjusting along Y-axis and Z-direction, and detector can carry out position along X-axis, Y-axis and Z-direction
It adjusts, to make equipment that can be penetrated according to the corresponding X of requirement unrestricted choice of part size to be measured, part material and imaging resolution
Line source and combinations of detectors, while x-ray source and detector can carry out position adjustment in Y-axis and Z-direction, equipment can according at
As needing to carry out two-dimentional photography, tomography and tomographic imaging.Multi-functional X-ray imaging device of the invention increases on pedestal
The lower margin of foot wheel, the shift position and fixation that equipment can be convenient increase the portability of equipment operation.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of multi-functional X-ray imaging device of the invention;
Fig. 2 is the structural schematic diagram of multi-functional X-ray image forming apparatus body of the invention;
Fig. 3 is the structural schematic diagram at another visual angle of multi-functional X-ray image forming apparatus body of the invention;
Fig. 4 is the arrangement schematic diagram of laser of the invention;
Fig. 5 is the arrangement schematic diagram of zero-bit optoelectronic switch of the invention.
Description of symbols:
1, work station, 2, motion controller, 3, multi-functional X-ray image forming apparatus body, 301, pedestal, 302, lower margin,
303, the first x-ray source, the 304, second x-ray source, 305, radiographic source Y-axis translation stage, 306, radiographic source Z axis translation stage, 307,
Radiographic source column, the 308, first detector, the 309, second detector, the 310, first detector Y-axis translation stage, the 311, second detection
Device Y-axis translation stage, 312, detector Z axis translation stage, 313, detector column, 314, detector X-axis translation stage, 315, sample
Platform, 316, sample stage turntable, 317, sample stage Z axis lifting platform, 318, sample stage Y-axis translation stage, 319, the translation of sample stage X-axis
Platform, the 320, first radiographic source Z-direction laser, the 321, second radiographic source Z-direction laser, 322, radiographic source Y-direction laser, 323, zero
Position optoelectronic switch.
Specific embodiment
The present invention will be further described in detail below with reference to the embodiments, to enable those skilled in the art referring to specification
Text can be implemented accordingly.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein are not precluded one or more
The presence or addition of a other elements or combinations thereof.
As shown in Figs. 1-2, a kind of multi-functional X-ray imaging device of the present embodiment, including work station 1, motion controller 2
With multi-functional X-ray image forming apparatus body 3;
Multi-functional X-ray image forming apparatus body 3 is penetrated including pedestal 301, the X being successively set on pedestal 301 along the x axis
Line source displacement drive mechanism, 315 displacement drive mechanism of sample stage, detector displacement drive mechanism, setting are displaced in x-ray source and drive
X-ray source group on motivation structure, the sample stage 315 being arranged in 315 displacement drive mechanism of sample stage and it is arranged in detector position
Move the detector group in driving mechanism;
Wherein, x-ray source displacement drive mechanism is for driving x-ray source group to move along Y-axis and Z-direction, sample stage 315
Displacement drive mechanism is for driving sample stage 315 to move along X-axis, Y-axis and Z-direction and make rotating motion about the z axis, detector position
Driving mechanism is moved for driving detector group to move along X-axis, Y-axis and Z-direction.
Wherein, x-ray source displacement drive mechanism includes the radiographic source column 307 being arranged on pedestal 301, is arranged in ray
Radiographic source Z axis translation stage 306 on source column 307 and the radiographic source Y-axis translation stage being arranged on radiographic source Z axis translation stage 306
305.X-ray source group includes the first x-ray source 303 being successively set on radiographic source Y-axis translation stage 305 along the y axis and
Two x-ray sources 304, and the height of the Z-direction of the focus of the two is identical.
Wherein, referring to Fig. 2, detector displacement drive mechanism includes the detector X-axis translation stage being arranged on pedestal 301
314, detector column 313 is arranged in, is arranged on the detector column on detector X-axis translation stage 314 is set
Detector Z axis translation stage 312 and to be successively set on the first detector Y-axis on detector Z axis translation stage 312 along Z-direction flat
Moving stage 310 and the second detector Y-axis translation stage 311.Detector group includes being separately positioned on the first detector Y-axis translation stage 310
With the first detector 308 and the second detector 309 on the second detector Y-axis translation stage 311.
Wherein, referring to Fig. 2,315 displacement drive mechanism of sample stage includes the sample stage X-axis translation being arranged on pedestal 301
Platform 319, is arranged in sample stage Y-axis translation stage 318 the sample stage Y-axis translation stage 318 being arranged on sample stage X-axis translation stage 319
On sample stage Z axis lifting platform 317 and the sample stage turntable 316 that is arranged on sample stage Z axis lifting platform 317, sample stage 315 set
It sets on sample stage turntable 316.
Wherein, referring to Fig. 4, radiographic source Y-direction laser 322, the first ray are additionally provided on radiographic source Y-axis translation stage 305
Source Z-direction laser 320 and the second radiographic source Z-direction laser 321;Radiographic source Y-direction laser 322 and the first x-ray source 303 and
The Z axis coordinate of the focus of two x-ray sources 304 is all the same, the coke of the first radiographic source Z-direction laser 320 and the first x-ray source 303
The Y axis coordinate of point is identical, and the second radiographic source Z-direction laser 321 is identical as the Y axis coordinate of focus of the second x-ray source 304.
In one embodiment, referring to Fig. 5, radiographic source Y-axis translation stage 305, radiographic source Z axis translation stage 306, first are detected
Device Y-axis translation stage 310, the second detector Y-axis translation stage 311, detector Z axis translation stage 312, detector X-axis translation stage 314,
It is all provided on sample stage turntable 316, sample stage Z axis lifting platform 317, sample stage Y-axis translation stage 318 and sample stage X-axis translation stage 319
It is equipped with zero-bit optoelectronic switch 323;To carry out zero-point positioning to each moving parts.
In one embodiment, all translational motion mechanism (radiographic source Y-axis translation stages 305, radiographic source Z axis translation stage
306, the first detector Y-axis translation stage 310, the second detector Y-axis translation stage 311, detector Z axis translation stage 312, detector X
Axis translation stage 314, sample stage Z axis lifting platform 317, sample stage Y-axis translation stage 318 and sample stage X-axis translation stage 319) by watching
Motor-driven ball-screw is taken to move in a straight line realization along guide rail or do by the rack-and-pinion that servo motor drives along guide rail
Linear motion realizes that the rotary motion of sample stage turntable 316 is realized by the turbine and worm movement mechanism that servo motor drives.
In one embodiment, the bottom of pedestal 301 is provided with multiple lower margins 302, lower margin 302 include height regulation pin and
Castor can facilitate the movement and fixation of the setting position convenient for adjusting height and movement.
The operating mode of the multi-functional X-ray imaging device includes the photography of X-ray two dimension, X-ray tomography and X-ray
Tomographic imaging.
In one embodiment, carry out the photography of X-ray two dimension workflow the following steps are included:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material, the density of workpiece for measurement and imaging resolution, selects corresponding X
Radiographic source (is selected with detector in the first x-ray source 303, the second x-ray source 304 and the first detector 308, the second detector
It selects);
3) x-ray source, detector and sample stage 315 are controlled by motion controller 2 and carries out position adjusting along Y-axis and Z axis
Finally ensure the corresponding radiographic source Y-direction laser 322 of selected x-ray source, the first radiographic source Z-direction laser 320 and the second ray
The intersection point of source Z-direction laser 321 is overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage 315 is controlled by motion controller 2 and detector carries out position adjusting along the x axis, finally ensured
The projection of sample on the detector is within the scope of detector detection plane, and has the multi-functional X-ray imaging device
Suitable amplification ratio;
5) by the way that the control x-ray source of motion controller 2 is exposed, detector carries out data acquisition, two dimension photography is obtained
As a result, completing the photography of X-ray two dimension.
In one embodiment, the multi-functional X-ray imaging device carry out X-ray tomography workflow include with
Lower step:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material, the density of workpiece for measurement and imaging resolution, selects corresponding X
Radiographic source (is selected with detector in the first x-ray source 303, the second x-ray source 304 and the first detector 308, the second detector
It selects);
3) x-ray source, detector and sample stage 315 are controlled by motion controller 2 and carries out position adjusting along Y-axis and Z axis
Finally ensure the corresponding radiographic source Y-direction laser 322 of selected x-ray source, the first radiographic source Z-direction laser 320 and the second ray
The intersection point of source Z-direction laser 321 is overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage 315 is controlled by motion controller 2 and detector carries out position adjusting along the x axis, finally ensured
The projection of sample on the detector is within the scope of detector detection plane, and has the multi-functional X-ray imaging device
Suitable amplification ratio;
5) selected x-ray source and detector is controlled by motion controller 2 to transport with certain velocity ratio reverse sync
It is dynamic, x-ray source exposure is started simultaneously at, and detector carries out data acquisition by certain frame per second;
6) the tomographic projection data that work station 1 acquires detector are rebuild, and are obtained tomography and are penetrated as a result, completing X
Line tomography.
In one embodiment, the multi-functional X-ray imaging device carry out x-ray tomography imaging workflow include with
Lower step:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material, the density of workpiece for measurement and imaging resolution, selects corresponding X
Radiographic source (is selected with detector in the first x-ray source 303, the second x-ray source 304 and the first detector 308, the second detector
It selects);
3) x-ray source, detector and sample stage 315 are controlled by motion controller 2 and carries out position adjusting along Y-axis and Z axis
Finally ensure the corresponding radiographic source Y-direction laser 322 of selected x-ray source, the first radiographic source Z-direction laser 320 and the second ray
The intersection point of source Z-direction laser 321 is overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage 315 is controlled by motion controller 2 and detector carries out position adjusting along the x axis, finally ensured
The projection of sample on the detector is within the scope of detector detection plane, and has the multi-functional X-ray imaging device
Suitable amplification ratio;
5) sample stage 315 is controlled by motion controller 2 at the uniform velocity to rotate about the z axis with certain speed, start simultaneously at X-ray
Source exposure, and detector carries out data acquisition by certain frame per second;
6) the tomographic projection data that work station 1 acquires detector are rebuild, and obtain x-ray tomography imaging results, complete
It is imaged at x-ray tomography.
The present invention improves on the basis of existing industrial X-ray imaging device, be designed as a set of multi-functional X-ray at
As being equipped with two sets of x-ray sources and detector on device, x-ray source can carry out position adjusting along Y-axis and Z-direction, and detector can
Position adjusting is carried out along X-axis, Y-axis and Z-direction, to make equipment can be according to part size to be measured, part material and imaging point
The corresponding x-ray source of requirement unrestricted choice and combinations of detectors of resolution, while x-ray source and detector are in Y-axis and Z-direction
Position adjustment can be carried out, equipment can need to carry out two-dimentional photography, tomography and tomographic imaging according to imaging.More function of the invention
Can x-ray imaging device increase the lower margin 302 of foot wheel on pedestal 301, the shift position and fixation that equipment can be convenient,
Increase the portability of equipment operation.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details.
Claims (10)
1. a kind of multi-functional X-ray imaging device, which is characterized in that including work station, motion controller and multi-functional X-ray at
As device noumenon;
The multi-functional X-ray image forming apparatus body includes pedestal, sets gradually X-ray on the base along the x axis
Source displacement drive mechanism, sample stage displacement drive mechanism, detector displacement drive mechanism, setting are displaced in the x-ray source and drive
X-ray source group on motivation structure, the sample stage being arranged in sample stage displacement drive mechanism and it is arranged in the detector
Detector group in displacement drive mechanism;
Wherein, x-ray source displacement drive mechanism is described for driving the x-ray source group to move along Y-axis and Z-direction
Sample stage displacement drive mechanism is used to that the sample stage to be driven to move along X-axis, Y-axis and Z-direction and make rotating motion about the z axis,
Detector displacement drive mechanism is for driving the detector group to move along X-axis, Y-axis and Z-direction.
2. multi-functional X-ray imaging device according to claim 1, which is characterized in that the x-ray source displacement drive machine
Structure include setting radiographic source column on the base, the radiographic source Z axis translation stage being arranged on the radiographic source column and
Radiographic source Y-axis translation stage on the radiographic source Z axis translation stage is set.
3. multi-functional X-ray imaging device according to claim 2, which is characterized in that the detector displacement drive machine
Structure includes that setting detector X-axis translation stage on the base, the detector being arranged on the detector X-axis translation stage are vertical
Column, the detector Z axis translation stage being arranged on the detector column and the detector Z axis is successively set on along Z-direction
The first detector Y-axis translation stage and the second detector Y-axis translation stage on translation stage.
4. multi-functional X-ray imaging device according to claim 3, which is characterized in that the x-ray source group includes along Y
Axis direction is successively set on the first x-ray source and the second x-ray source on the radiographic source Y-axis translation stage, and the focus of the two
Z-direction height it is identical;
The detector group includes being separately positioned on the first detector Y-axis translation stage and the second detector Y-axis translation stage
The first detector and the second detector.
5. multi-functional X-ray imaging device according to claim 4, which is characterized in that the sample stage displacement drive machine
Structure includes setting sample stage X-axis translation stage on the base, the sample stage Y being arranged on the sample stage X-axis translation stage
Axis translation stage, the sample stage Z axis lifting platform being arranged on the sample stage Y-axis translation stage and setting are in the sample stage Z axis liter
Sample stage turntable on platform drops, and the sample stage is arranged on the sample stage turntable.
6. multi-functional X-ray imaging device according to claim 5, which is characterized in that on the radiographic source Y-axis translation stage
It is additionally provided with radiographic source Y-direction laser, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser;The radiographic source Y
All the same, the first radiographic source Z-direction to laser and the Z axis coordinate of the focus of first x-ray source and the second x-ray source
Laser is identical as the Y axis coordinate of focus of first x-ray source, the second radiographic source Z-direction laser and the 2nd X
The Y axis coordinate of the focus of radiographic source is identical.
7. multi-functional X-ray imaging device according to claim 5, which is characterized in that the radiographic source Y-axis translation stage,
Radiographic source Z axis translation stage, the first detector Y-axis translation stage, the second detector Y-axis translation stage, detector Z axis translation stage, detection
It is all provided on device X-axis translation stage, sample stage turntable, sample stage Z axis lifting platform, sample stage Y-axis translation stage and sample stage X-axis translation stage
It is equipped with zero-bit optoelectronic switch;
The bottom of the pedestal is provided with multiple lower margins, and the lower margin includes height regulation pin and castor.
8. the multi-functional X-ray imaging device according to any one of claim 6-7, which is characterized in that the multi-functional X
The operating mode of ray imaging device includes the photography of X-ray two dimension, X-ray tomography and x-ray tomography imaging, carries out X
Ray two dimension photography workflow the following steps are included:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material and imaging resolution, selects corresponding x-ray source and detector;
3) controlling x-ray source, detector and sample stage by motion controller and adjust along Y-axis and Z axis progress position finally ensures
The friendship of selected x-ray source corresponding radiographic source Y-direction laser, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser
Point is overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage is controlled by motion controller and detector carries out position adjusting along the x axis, finally ensure that sample is being visited
The projection surveyed on device is within the scope of detector detection plane, and is had the multi-functional X-ray imaging device and suitably put
Big ratio;
5) by motion controller control x-ray source be exposed, detector carry out data acquisition, obtain two dimension photography as a result,
Complete the photography of X-ray two dimension.
9. the multi-functional X-ray imaging device according to any one of claim 6-7, which is characterized in that the multi-functional X
Ray imaging device carry out X-ray tomography workflow the following steps are included:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material and imaging resolution, selects corresponding x-ray source and detector;
3) controlling x-ray source, detector and sample stage by motion controller and adjust along Y-axis and Z axis progress position finally ensures
The friendship of selected x-ray source corresponding radiographic source Y-direction laser, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser
Point is overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage is controlled by motion controller and detector carries out position adjusting along the x axis, finally ensure that sample is being visited
The projection surveyed on device is within the scope of detector detection plane, and is had the multi-functional X-ray imaging device and suitably put
Big ratio;
5) it is moved by motion controller control selected x-ray source and detector with certain velocity ratio reverse sync, together
When start x-ray source exposure, and detector by certain frame per second carry out data acquisition;
6) work station rebuilds the tomographic projection data that detector acquires, and obtains tomography as a result, completing X-ray chromatography
Imaging.
10. the multi-functional X-ray imaging device according to any one of claim 6-7, which is characterized in that this is multi-functional
X-ray imaging device carry out x-ray tomography imaging workflow the following steps are included:
1) workpiece for measurement is placed on sample platform;
2) it is required according to the size of workpiece for measurement, material and imaging resolution, selects corresponding x-ray source and detector;
3) controlling x-ray source, detector and sample stage by motion controller and adjust along Y-axis and Z axis progress position finally ensures
The friendship of selected x-ray source corresponding radiographic source Y-direction laser, the first radiographic source Z-direction laser and the second radiographic source Z-direction laser
Point is overlapped with detector detection plane center, and approximately through workpiece for measurement geometric center;
4) sample stage is controlled by motion controller and detector carries out position adjusting along the x axis, finally ensure that sample is being visited
The projection surveyed on device is within the scope of detector detection plane, and is had the multi-functional X-ray imaging device and suitably put
Big ratio;
5) sample stage is controlled by motion controller at the uniform velocity to rotate about the z axis with certain speed, start simultaneously at x-ray source exposure,
And detector carries out data acquisition by certain frame per second;
6) work station rebuilds the tomographic projection data that detector acquires, and obtains x-ray tomography imaging results, completes X and penetrates
Line tomographic imaging.
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