CN108426901A - A kind of X-ray demixing scan imaging system - Google Patents
A kind of X-ray demixing scan imaging system Download PDFInfo
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- CN108426901A CN108426901A CN201810166932.1A CN201810166932A CN108426901A CN 108426901 A CN108426901 A CN 108426901A CN 201810166932 A CN201810166932 A CN 201810166932A CN 108426901 A CN108426901 A CN 108426901A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/03—Investigating materials by wave or particle radiation by transmission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The present invention relates to a kind of X-ray demixing scan imaging systems, its objective table includes pedestal 1, the Θ shaft rotation platforms being disposed thereon, the Z axis lifting displacement platform being fixed on Θ shaft rotation platforms, the XY axis horizontal position moving stage being fixed on Z axis lifting displacement platform, and it is fixed on the switching support in XY axis horizontal position moving stage, Θ shaft rotations platform can rotate in the horizontal plane, it is vertically fixed with Φ shaft rotation platforms in switching support side, the Φ shaft rotations platform is hollow turntable and can be rotated in vertical plane, in the hollow space of Φ shaft rotation platforms it is further fixed on that the annular holder of plaques is clamped, sample plane is parallel with the turntable plane of Φ shaft rotation platforms, hollow turntable and annular holder are concentric；The clamper includes two latch closures, is both provided on the inside of two latch closures for sample and mutual corresponding three or more pins to be clamped.
Description
Technical field
The present invention relates to X-ray demixing scan imaging systems.
Background technology
X ray computer demixing scan imaging (Computed Laminography, abbreviation CL) technology is a kind of effectively inspection
The lossless detection method of sample internal structural information is widely used in fields such as industry, medical diagnosis.X-ray calculates
The object of machine demixing scan is flat sample, and X-ray is only in the thickness direction of sample with angle of inclination penetrator when scanning
Body is projected in multiple directions, can obtain sample three-dimensional tomographic image.
Currently, X ray computer tomography technology (Computed Tomography, abbreviation CT) is common lossless
Detection means, however CT scan mode is unsatisfactory for the imaging effect of tabular component, and be width the characteristics of plate object with
The ratio of thickness is very big.In comparison, CL scan modes can more effectively obtain the internal information of plaques, to obtain
More complete and clearly image.Therefore CL technologies are further frequent in the application of industrial circle.
Due to the particularity of scan pattern, CL scannings need X-ray with certain inclination angle incidence sample surfaces, that is,
Say that directions of rays and sample rotor shaft direction have certain angle, and directions of rays is vertical with sample shaft under CT patterns.Therefore, CL systems
The spatial position of system component is often different from conventional CT system, can be divided into two classes in general:(1) radiographic source, detector around
Inclination angle is adjusted in the rotation of one center of circle；(2) the rotation tune inclination angle of plane where relying on sample itself.
First class formation is suitable for that size is larger, inconvenient tilted-putted sample, and the demand to lab space is larger, right
Radiographic source, the control accuracy requirement of detector position movement are higher.Simultaneously because radiographic source, detector cannot be horizontally arranged, this
Just equipment instrument and weight are had certain limitations.Second class formation is suitable for that size is smaller, is easy the sample being clamped, whole
System is similar to general CT, interior in a limited space can operate, need not generally adjust radiographic source, detector position.By
This can be seen that compared to the first class formation, and requirement of second class formation for experiment condition is much smaller.When requiring in sample
When portion's fine structure carries out high-precision imaging, the second class formation is more advantageous.
Invention content
The object of the present invention is to provide it is a kind of be suitable for plaques carry out high-precision imaging X-ray demixing scan at
As system.Technical solution is as follows：
A kind of X-ray demixing scan imaging system, including radiographic source, radiographic source X to translation spindle motor, objective table, detection
Device X includes pedestal 1, is disposed thereon to translation spindle motor, detector Y-direction translation spindle motor, detector and capstan head, objective table
Θ shaft rotations platform, the Z axis being fixed on Θ shaft rotation platforms lifting displacement platform, the XY axis horizontal displacements being fixed on Z axis lifting displacement platform
Platform and the switching support being fixed in XY axis horizontal position moving stage, the Θ shaft rotations platform can rotate in the horizontal plane, Z axis position
Moving stage and XY axis horizontal position moving stage joint are realized and are moved in X-axis, Y-axis and Z-direction.It is characterized in that,
It is vertically fixed with Φ shaft rotation platforms in objective table switching support side, the Φ shaft rotations platform is hollow turntable and can be
Rotation, in the hollow space of Φ shaft rotation platforms is further fixed on that the annular holder of plaques, sample is clamped in vertical plane
Plane is parallel with the turntable plane of Φ shaft rotation platforms, and hollow turntable and annular holder are concentric；The clamper includes two rings
It detains, is both provided on the inside of two latch closures for sample being clamped and three or more mutual corresponding pins, pin end opens up
There are aperture or groove, plastic fixtures are fixed on aperture or groove, in gripper sample, each plastic fixtures
It is in direct contact sample surfaces.
It has the following advantages compared with prior art：
(1) within the system, radiographic source, sample stage, detector fixed point in the same plane, therefore can be more preferable
Ground ensures system stability, and reduces the uncertainty of relative motion generation between different instruments, to be conducive to be obtained after rebuilding
The picture quality arrived.
(2) sample stage of the system controls the rotation of sample stage angle and sample using two shafts to intersect vertically respectively
Turn, wherein the axis perpendicular to horizontal plane controls sample stage angle, the i.e. size at inclination angle, trunnion axis controls sample rotation, to
Realize 360 ° of scannings under specific oblique angle.The method can theoretically make inclination angle from 0 ° to 90 ° within the scope of change, be not necessarily to hand
It is dynamic to adjust.
(3) objective table is easily installed and dismantles, and the requirement being equipped with to space size, experiment condition and facility is relatively low, can
To be directly transformed on the basis of original CT system, there is certain operability, in terms of the function migration for realizing CL
It is simple and easy to do.
(4) size at Θ axis turning table controls inclination angle is used, control accuracy is high and adjustable extent is big；It is solid using clamper
Random sample product, on the one hand more conventional method stabilization, on the one hand can make sample by adjusting the stress on clamper four direction
Keep vertical.
(5) change sampling angle with hollow turntable so that ray can be not passed through other medium (air directly through sample
Except), the noise of image is reduced, clarity is improved.
Description of the drawings
Fig. 1 is the X-ray demixing scan image device structure figure of the present invention.
Fig. 2 is the bottom view for filling pedestal.
Fig. 3 is the double-deck annular holder for plate object sample to be clamped, and (a) is outside latch closure, is (b) inside latch closure,
(c) it is the clamper that sample has been clamped.
Fig. 4 is the installation drawing of carry sample clamper.
Specific implementation mode
The present invention will be described with reference to the accompanying drawings and examples.
CL scanning processes schematic diagram as shown in Figure 1, before scanning first by control the radiographic source X to translate spindle motor 3,
Detector X adjusts the suitable spacing of radiographic source 4, objective table 5, detector 9 to translation spindle motor 7, controls detector Y-direction translation shaft
Motor 8 adjusts 9 center of detector and is directed at radiographic source.
Θ shaft rotations platform 15, which is controlled, by the Θ axis driving motor 16 of objective table 5 turns to proper angle in the horizontal plane, with
The inclination angle of sample is adjusted, radiographic source is opened at this time while CCD acquires image.Reuse z-axis driving mechanism, the xy of objective table
Sample center is adjusted to the picture centre of acquisition by axis driving mechanism, and Φ axis driving mechanisms rotation Φ shaft rotations platform is used for multiple times and adjusts
X, y, z axis makes the point that image center location is adopted remain unchanged, to ensure ray source focus, sample, detector center at one
On straight line.It can start to carry out CL scannings to sample after the completion of above procedure, only Φ shaft rotation platforms move in scanning process, remaining device
Part remains stationary.
In Fig. 1：1 is optical table, and 2 be radiographic source pedestal, and 3 be radiographic source X to translation spindle motor, and 4 be radiographic source, and 5 are
Objective table, 6 be detector base, and 7 translate spindle motor to translation spindle motor, 8 for detector X for detector Y-direction, and 9 visit for tablet
Device is surveyed, 10 be optocoupler detector camera lens, and 11 be capstan head, and 12 be light path babinet, and 13 be CCD.
In Fig. 2：14 be objective table pedestal, and 15 be Θ shaft rotation platforms, and 16 be Θ axis driving motors, and 17 be to revolve platform switching plate, 18
For z-axis lifting platform, 19 be xy to displacement platform, and 20,21 be respectively x, y-axis driving motor, and 22 be perpendicular type switching support, and 23 be Φ
The hollow turntable of axis, 24 be Φ axis driving motors, and 25 be sample holder, and 26 be signal sample.
The structure of clamper 25 is as shown in Figure 3：Clamper is cyclic structure, is divided into two layers 27 and 28, is aluminium alloy material
Matter, there are four pins for inside, and for sample to be clamped, there is aperture in pin end, for fixing (the PVC materials of sphere plastic button 30
Matter).In use, between plate object sample 17 to be measured is placed in two layers of clamper, then by four pins alignments of upper layer and lower layer, two
Ring interlocks and clamps sample, and plastic button is in direct contact sample surfaces at this time, finally fastening screw 29 is used to adjust stress, makes entire
Stabilized structure.
Wherein 27 be latch closure on the inside of clamper, and 28 be latch closure on the outside of clamper, and 29 be fastening screw, and 30 be PVC plastic knob
Button is also referred to as fixing piece herein, and 26 be signal sample.
The key technology that CL scannings are carried out using rotary-type structure is how to be precisely controlled the variation at scanning inclination angle, adopts
With the scanning means of objective table of the present invention, the change at inclination angle is realized by rotating sample, and radiographic source and detector position are not
Become, such methods need have firm clamping to sample, and need to maintain the position of sample to stablize, and improved clamper is suitable
, regular shape smaller for sample size, the situation being fixed easily.
Claims (1)
1. a kind of X-ray demixing scan imaging system, including radiographic source, radiographic source X are to translation spindle motor, objective table, detector X
To translation spindle motor, detector Y-direction translation spindle motor, detector and capstan head, the Θ that objective table includes pedestal 1, is disposed thereon
Shaft rotation platform, the Z axis being fixed on Θ shaft rotation platforms lifting displacement platform, be fixed on Z axis lifting displacement platform on XY axis horizontal positions moving stage,
And it is fixed on the switching support in XY axis horizontal position moving stage, the Θ shaft rotations platform can rotate in the horizontal plane, Z axis displacement platform
It realizes with XY axis horizontal position moving stage joint and is moved in X-axis, Y-axis and Z-direction.It is characterized in that,
Φ shaft rotation platforms are vertically fixed in objective table switching support side, the Φ shaft rotations platform is hollow turntable and can be vertical
Rotation in surface in the hollow space of Φ shaft rotation platforms is further fixed on that the annular holder of plaques, sample plane is clamped
Parallel with the turntable plane of Φ shaft rotation platforms, hollow turntable and annular holder are concentric；The clamper include two latch closures, two
It is both provided on the inside of a latch closure for sample being clamped and three or more mutual corresponding pins, pin end offers aperture
Or groove, plastic fixtures are fixed on aperture or groove, in gripper sample, each plastic fixtures directly connect
Touch sample surfaces.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710271304 | 2017-04-24 | ||
| CN2017102713045 | 2017-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108426901A true CN108426901A (en) | 2018-08-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810166932.1A Pending CN108426901A (en) | 2017-04-24 | 2018-02-28 | A kind of X-ray demixing scan imaging system |
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|---|---|
| CN (1) | CN108426901A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444183A (en) * | 2018-12-25 | 2019-03-08 | 苏州斯玛维科技有限公司 | Multi-functional X-ray imaging device |
| CN110161064A (en) * | 2019-06-10 | 2019-08-23 | 重庆大学 | A kind of XRD three-dimensional crystal reconstructs three axis sample stages and application method |
| CN111624213A (en) * | 2020-06-15 | 2020-09-04 | 四川迪派锐科技有限公司 | A miniature article centre gripping subassembly and nondestructive detection device for nondestructive test detects |
| CN114113171A (en) * | 2021-11-25 | 2022-03-01 | 重庆九源机械有限公司 | Multi-axis scanning mechanical system |
| CN114113168A (en) * | 2021-09-30 | 2022-03-01 | 北京申士丰禾检测技术有限公司 | DR/CT detection device suitable for 2D/2.5D/3D |
| CN114264679A (en) * | 2021-12-03 | 2022-04-01 | 俐玛精密测量技术(苏州)有限公司 | Device for scanning and detecting electronic product based on X-ray |
-
2018
- 2018-02-28 CN CN201810166932.1A patent/CN108426901A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444183A (en) * | 2018-12-25 | 2019-03-08 | 苏州斯玛维科技有限公司 | Multi-functional X-ray imaging device |
| CN110161064A (en) * | 2019-06-10 | 2019-08-23 | 重庆大学 | A kind of XRD three-dimensional crystal reconstructs three axis sample stages and application method |
| CN110161064B (en) * | 2019-06-10 | 2024-04-02 | 重庆大学 | XRD three-dimensional crystallographic reconstruction triaxial sample stage and application method thereof |
| CN111624213A (en) * | 2020-06-15 | 2020-09-04 | 四川迪派锐科技有限公司 | A miniature article centre gripping subassembly and nondestructive detection device for nondestructive test detects |
| CN114113168A (en) * | 2021-09-30 | 2022-03-01 | 北京申士丰禾检测技术有限公司 | DR/CT detection device suitable for 2D/2.5D/3D |
| CN114113168B (en) * | 2021-09-30 | 2024-03-19 | 阿塔米智能装备(北京)有限公司 | DR/CT detection device suitable for 2D/2.5D/3D |
| CN114113171A (en) * | 2021-11-25 | 2022-03-01 | 重庆九源机械有限公司 | Multi-axis scanning mechanical system |
| CN114264679A (en) * | 2021-12-03 | 2022-04-01 | 俐玛精密测量技术(苏州)有限公司 | Device for scanning and detecting electronic product based on X-ray |
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Application publication date: 20180821 |
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| RJ01 | Rejection of invention patent application after publication |