CN109410751A - A kind of display base plate and preparation method thereof, display panel, display device - Google Patents
A kind of display base plate and preparation method thereof, display panel, display device Download PDFInfo
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- CN109410751A CN109410751A CN201811275982.XA CN201811275982A CN109410751A CN 109410751 A CN109410751 A CN 109410751A CN 201811275982 A CN201811275982 A CN 201811275982A CN 109410751 A CN109410751 A CN 109410751A
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- via hole
- base plate
- film layer
- film
- underlay substrate
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
Abstract
The present invention discloses a kind of display base plate and preparation method thereof, display panel, display device, is related to field of display technology, and to solve in existing display device, the segment difference at film layer via hole is larger, is easy the problem of impacting to the yield of display device.Above-mentioned display base plate, including functional layer, film layer via hole is provided in the functional layer, the film layer via hole includes at least two sub- via holes being sequentially communicated, along the underlay substrate far from the display base plate to the direction close to the underlay substrate, the aperture of at least two sub- via hole successively becomes smaller, and forms step between the adjacent sub- via hole.Display base plate provided by the invention is in display panel.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of display base plate and preparation method thereof, display panel, displays
Device.
Background technique
Currently, the working performance in order to guarantee display device, can generally make in display device and be used for planarizing substrate
Because of the planarization layer of segment difference in the face caused by various different layer patterns, but since the thickness of the planarization layer is thicker, so that
When making via hole on planarization layer, biggish segment difference will be generated at the via hole, makes other film layers on the planarization layer in this way
When, other film layers are easy to be broken at via hole, influence the yield of display device.
Summary of the invention
The purpose of the present invention is to provide a kind of display base plate and preparation method thereof, display panel, display devices, for solving
In certainly existing display device, the segment difference at film layer via hole is larger, is easy the problem of impacting to the yield of display device.
To achieve the goals above, the invention provides the following technical scheme:
The first aspect of the present invention provides a kind of display base plate, including functional layer, and film layer mistake is provided in the functional layer
Hole, the film layer via hole include at least two sub- via holes being sequentially communicated, along the underlay substrate far from the display base plate to leaning on
The direction of the nearly underlay substrate, the aperture of at least two sub- via hole successively become smaller, shape between the adjacent sub- via hole
At step.
Further, the display base plate further include:
Positioned at the functional plane to the first conductive pattern of the side of the underlay substrate；
Positioned at the functional layer backwards to the second conductive pattern of the side of the underlay substrate, second conductive pattern is logical
The film layer via hole is crossed to connect with first conductive pattern；
Orthographic projection of second conductive pattern on the underlay substrate is located at the film layer via hole in the substrate base
The inside of orthographic projection on plate.
Further, the sub- via hole in the film layer via hole near the underlay substrate on the underlay substrate just
Projection, positioned at the inside of orthographic projection of first conductive pattern on the underlay substrate.
Further, the sub- via hole in the film layer via hole near the underlay substrate on the underlay substrate just
Projection, partly overlaps with orthographic projection of first conductive pattern on the underlay substrate.
Further, the functional layer includes organic film.
Based on the technical solution of above-mentioned display base plate, the second aspect of the present invention provides a kind of display panel, including color film
Substrate and above-mentioned display base plate, the color membrane substrates are oppositely arranged with the display base plate, and in the color membrane substrates at least
Part spacer material protrudes into the film layer vias inside of functional layer in the display base plate.
Further, the spacer material protrudes into the end of the film layer via hole on the underlay substrate of the display base plate
Orthographic projection of the step on the underlay substrate in orthographic projection, with the film layer via hole farthest away from the underlay substrate is at least partly
Overlapping.
Based on the technical solution of above-mentioned display panel, the third aspect of the present invention provides a kind of display device, including above-mentioned
Display panel.
Based on the technical solution of above-mentioned display base plate, the fourth aspect of the present invention provides a kind of production side of display base plate
Method, for making above-mentioned display base plate, the step of production method includes the steps that making functional layer, the production functional layer
It specifically includes:
Production is provided with the functional layer of film layer via hole, and the film layer via hole includes at least two sub- via holes being sequentially communicated,
Along the underlay substrate far from the display base plate to the direction close to the underlay substrate, the aperture of at least two sub- via hole
Successively become smaller, forms step between the adjacent sub- via hole.
Further, when the functional layer includes organic film, the production is provided with the functional layer of film layer via hole
Step specifically includes:
Organic film is made using organic material；
The organic film is exposed using intermediate tone mask plate, organic film is formed and region, organic is fully retained
Film half retains region and organic film completely removes region, wherein the organic film be fully retained region correspond to it is described organic
Film layer region, the organic film half retains region and corresponds to the step region in the film layer via hole, described organic
Film completely removes the corresponding other regions in addition to the organic film region and the step region in region；
Developed using developer solution to the organic film after exposure, organic film will be located at and completely remove the organic of region
Film completely removes, and the organic film part for being located at half reservation region of organic film is removed, being formed has having for film layer via hole
Machine film layer.
In technical solution provided by the invention, the ladder with different pore size is set by the film layer via hole in functional layer
Hole, and the step of transition, when so that forming other film layers in film layer via hole, other film layers are formed in the inside of film layer via hole
Will not climb excessive height under the same angle of gradient, i.e., effectively slow down the gradient of climbing of other film layers, not only mention in this way
High bonding strengths of other film layers in the film layer vias inside, and it is more advantageous to the continuity and uniformity of other film layers.
Therefore, in technical solution provided by the invention, the other film layers being formed in film layer via hole have better quality of forming film, are making
Make to be not susceptible to be broken in process and use process, apply by technical solution provided in an embodiment of the present invention in display device
When middle, the yield of display device can be effectively promoted.
In addition, in technical solution provided by the invention, since the film layer via hole in functional layer is set as with different pore size
Stepped hole can be by the son in film layer via hole near underlay substrate so that do not limited by technique when making film layer via hole
The aperture of via hole makes smaller, and being located at the sub- via hole can be according to reality backwards to the aperture of other sub- via holes of underlay substrate side
Border need it is corresponding expand, therefore, in technical solution provided by the invention, the film layer that is produced in the functional layer with thicker degree
The aperture size of via hole is unrestricted, can better meet actual demand, but also can be realized and meeting display base plate tool
In the case where having more stable working performance, the generation of fluid-tight effect is preferably avoided, so that its being formed on film layer via hole
Its film layer being capable of diffusion more evenly.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes a part of the invention, this hair
Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the scale diagrams of film layer via hole；
Fig. 2 is the film layer via hole schematic diagram that display base plate includes in the related technology；
Fig. 3 is the film layer via hole and spacer material relative position schematic diagram that display base plate includes in the related technology；
Fig. 4-Fig. 5 is the schematic diagram that fluid-tight effect occurs in the related technology；
Fig. 6 is a kind of structural schematic diagram of film layer via hole provided in an embodiment of the present invention；
Fig. 7 is film layer via hole corresponding with Fig. 6 and spacer material relative position schematic diagram；
Fig. 8 is the structural schematic diagram of another film layer via hole provided in an embodiment of the present invention；
Fig. 9 is film layer via hole corresponding with Fig. 8 and spacer material relative position schematic diagram.
Appended drawing reference:
1- underlay substrate, the first insulating layer of 2-,
3- active layer, the first conductive pattern of 4-,
5- organic film, the second conductive pattern of 6-,
7- second insulating layer, 8- spacer material,
9- resin layer.
Specific embodiment
Display base plate that embodiment provides in order to further illustrate the present invention and preparation method thereof, display panel, display dress
It sets, is described in detail with reference to the accompanying drawings of the specification.
As stated in the background art, it generally will include the thicker film layer of thickness in existing display base plate, when in the film layer
When middle formation film layer via hole, size as shown in Figure 1 is the film layer via hole of a × b, and there are the following problems for meeting:
1, made film layer via size is restricted.
2, the depth of film layer via hole is larger, and the other film layers being formed in the film layer via hole are easy to appear fracture or film
The poor problem of layer uniformity.
In more detail, as shown in Figures 2 and 3, illustratively, display base plate includes: underlay substrate 1, and successively shape
At the first insulating layer 2, active layer 3, the first conductive pattern 4, organic film 5, the second conductive pattern 6 on the underlay substrate 1
With second insulating layer 7；Wherein the first conductive pattern 4 and the second conductive pattern 6 are electrically connected by the film layer via hole on organic film 5
It connects.Since organic film 5 has thicker thickness, so that the film layer via hole formed on organic film 5 has deeper depth, from
And it results in the second conductive pattern 6 in film layer via hole and is easy to happen fracture, and there is a problem of that uniformity is poor.
In addition, for high-resolution display device comprising pixel limited size so that in display device
The pore size for the film layer via hole that the display base plate of application includes is limited, results in the hole of the film layer via hole in display base plate
Diameter is smaller, and hole depth is deeper, when making other film layers on the film layer via hole, such as: resin layer 9, it may appear that other film layers
It is the case where film layer vias inside can not be uniformly diffused into (i.e. fluid-tight effect), specific as shown by the arrows in Figure 4；And to this
When other film layers are solidified, it is enclosed in the air expansion of film layer via bottom, the film layer at film layer via hole aperture will be filled in and rushed
It is broken, cause the film layer on film layer via hole periphery to be accumulated, causes film thickness uneven, it is specific as shown by the arrows in Figure 5.
In addition, it should be noted that, the aperture for the film layer via hole being arranged in display base plate can generally be set according to actual needs
It sets, in the prior art on the basis of meeting the job requirement of display base plate, can generally make the lesser film layer via hole in aperture, with
So that display base plate has more stable working performance, the generation of short-circuit conditions is preferably avoided.
Presence based on the above issues, the present inventor it has been investigated that, ladder can be set by film layer via hole
Via hole, to overcome the above problem.Referring specifically to Fig. 6 and Fig. 8, the embodiment of the invention provides a kind of display base plates, including function
Ergosphere is provided with film layer via hole in functional layer, and film layer via hole includes at least two sub- via holes being sequentially communicated, along far from display base
The underlay substrate 1 of plate to the direction close to underlay substrate 1, the aperture of at least two sub- via holes successively becomes smaller, adjacent sub- via hole
Between form step.
Specifically, by taking above-mentioned film layer via hole includes two sub- via holes as an example, which includes close to underlay substrate 1
The first sub- via hole (aperture c) and the second sub- via hole far from underlay substrate 1, between the first sub- via hole and the second sub- via hole
Form step.When forming other film layers in the film layer via hole, other film layers can be covered on the via hole inner wall with step.
By taking functional layer includes organic film 5 as an example, production includes the first sub- via hole and the second sub- via hole on organic film 5
Film layer via hole when, specific manufacturing process is as follows:
Organic film is made using organic material, organic film is exposed using intermediate tone mask plate, is formed organic
Film is fully retained region, half reservation region of organic film and organic film and completely removes region, and wherein organic film is protected completely
Region is stayed to correspond to 5 region of organic film, organic film half retains region and corresponds to the step region in film layer via hole, has
Machine film completely removes the corresponding other regions in addition to 5 region of organic film and step region in region；Using aobvious
Shadow liquid develops to the organic film after exposure, and the organic film for completely removing region positioned at organic film is completely removed,
The organic film part removal in half reservation region of organic film will be located at, forms the organic film 5 with film layer via hole.
It is according to the manufacturing process of the specific structure of above-mentioned display base plate and film layer via hole it is found that provided in an embodiment of the present invention
In display base plate, the stepped hole with different pore size is set by the film layer via hole in functional layer, and in the inside of film layer via hole
The step of transition is formed, when so that forming other film layers in film layer via hole, which will not climb under the same angle of gradient
Excessive height is risen, i.e., effectively slows down the gradient of climbing of other film layers, not only increases other film layers in this way in the film layer
The bonding strength of vias inside, and it is more advantageous to the continuity and uniformity of other film layers.Therefore, the embodiment of the present invention provides
Display base plate in, being formed in other film layers in film layer via hole has better quality of forming film, in manufacturing process and uses
Cheng Zhongjun is not susceptible to be broken, can be effective when applying display base plate provided in an embodiment of the present invention in display device
Promote the yield of display device.
In addition, in display base plate provided in an embodiment of the present invention, since the film layer via hole in functional layer is set as having not
With the stepped hole in aperture so that do not limited by technique when making film layer via hole, can by film layer via hole near substrate base
The aperture of the sub- via hole of plate 1 makes smaller, and is located at the sub- via hole backwards to the aperture of other sub- via holes of 1 side of underlay substrate
It can accordingly expand according to actual needs, therefore, in display base plate provided in an embodiment of the present invention, be produced on thicker degree
The aperture size of film layer via hole in functional layer is unrestricted, can better meet actual demand；But also it can be realized
Meet display base plate in the case where more stable working performance, the generation of fluid-tight effect is preferably avoided, so that being formed in
Other film layers on film layer via hole being capable of diffusion more evenly.
Further, in display base plate provided by the above embodiment, the type of functional layer is varied, illustratively, function
Ergosphere includes organic film 5；When in display base plate including organic film 5, which can be used as flat in display base plate
Smoothization layer, since organic film 5 itself has many advantages, such as low-k, high thickness and planarization, so that dividing in display base plate
The decrease that influences each other not between the conductive pattern of 5 two sides of organic film, so as to shorten being located at 5 liang of organic film
The safe distance reserved between the conductive pattern of side, in this way when display base plate and color membrane substrates are formed display panel to box,
The area that the black matrix in color membrane substrates is arranged in reduces, to effectively promote the aperture opening ratio of display panel.In addition, using has
The display base plate of machine film layer 5, the internal parasitic capacitance generated are also far smaller than other display bases for not using organic film 5
Plate, therefore it is more advantageous to the job stability of display base plate.
It is noted that display base plate provided in an embodiment of the present invention is suitable for plurality of display modes, and such as: advanced super Wei Chang
Switch technology (English: Advanced Super Dimension Switch, abbreviation ADS) display pattern, ADS display pattern change
I-ADS (English: Inverse Advanced Super Dimension Switch) display pattern of high transmittance after,
Or the improved high-resolution H-ADS display pattern of ADS display pattern.
Further, as shown in figures 7 and 9, display base plate provided by the above embodiment further include:
Positioned at functional plane to the first conductive pattern 4 of the side of underlay substrate 1；
Positioned at functional layer backwards to the second conductive pattern 6 of the side of underlay substrate 1, the second conductive pattern 6 passes through film layer mistake
Hole is connect with the first conductive pattern 4；Orthographic projection of second conductive pattern 6 on underlay substrate 1 is located at film layer via hole in substrate base
The inside of orthographic projection on plate 1.
Specifically, by taking functional layer includes organic film 5 as an example, pass through between the first conductive pattern 4 and the second conductive pattern 6
Film layer via hole connection on organic film 5.It include step inside hole, therefore in production second since film layer via hole is stepped hole
When conductive pattern 6, orthographic projection of second conductive pattern 6 on underlay substrate 1 can be set, be located at film layer via hole in underlay substrate
The inside of orthographic projection on 1；In more detail, illustratively, when film layer via hole includes the above-mentioned first sub- via hole and the second sub- mistake
Kong Shi, the second conductive pattern 6 may be formed on the step between the first sub- via hole and the second sub- via hole and the first sub- via hole
Inside, without the surface for the organic film 5 for continuing to extend to outside the inner wall or film layer via hole of the second sub- via hole；This second
The set-up mode of conductive pattern 6 further reduces the climb altitude and the gradient of the second conductive pattern 6, to preferably be promoted
Bonding strength of second conductive pattern 6 in film layer vias inside is more advantageous to the continuity and uniformly of the second conductive pattern 6
Property；Therefore, the set-up mode of this second conductive pattern 6, so that the second conductive pattern 6 of production has preferably at film quality
Amount, is not susceptible to be broken in manufacturing process and use process.
In order to enable the second conductive pattern 6 can be realized by film layer via hole and the first conductive pattern 4 it is good be electrically connected,
Guarantee first conductive pattern 4 can be exposed in film layer via hole near the sub- via hole of underlay substrate 1.
As shown in fig. 6, in some embodiments, the sub- via hole in settable film layer via hole near underlay substrate 1 is serving as a contrast
Orthographic projection on substrate 1, positioned at the inside of orthographic projection of first conductive pattern 4 on underlay substrate 1.
Specifically, orthographic projection of the sub- via hole on underlay substrate 1 in film layer via hole near underlay substrate 1, position are set
In the inside of orthographic projection of first conductive pattern 4 on underlay substrate 1, enables to the entire sub- via hole to expose first and lead
Electrograph shape 4 keeps the exposed area of the first conductive pattern 4 larger, is more advantageous to the second conductive pattern 6 and fills with the first conductive pattern 4
Tap touching.
As shown in figure 8, in some embodiments, the sub- via hole in film layer via hole near underlay substrate 1 can also be arranged
Orthographic projection on underlay substrate 1 partly overlaps with orthographic projection of first conductive pattern 4 on underlay substrate 1.
Specifically, orthographic projection of the sub- via hole on underlay substrate 1 in film layer via hole near underlay substrate 1 is set, with
Orthographic projection of first conductive pattern 4 on underlay substrate 1 partly overlaps, and enables to the sub- via hole while exposing the first conduction
Figure 4 and other film layers positioned at film layer via hole and underlay substrate 1 pass through the first conductive pattern 4 of film layer via hole exposure
Area is smaller.
The embodiment of the invention also provides a kind of display panels, including color membrane substrates and display base provided by the above embodiment
Plate, color membrane substrates are oppositely arranged with display base plate, and at least partly spacer material 8 in color membrane substrates protrudes into function in display base plate
The film layer vias inside of layer, as shown in figures 7 and 9.
Specifically, when making above-mentioned display panel, display base plate and color membrane substrates can be first made, which can also
Referred to as array substrate makes film layer mistake when making display base plate according to actual needs in the functional film layer in display base plate
Hole, the film layer via hole are stepped hole, are internally provided with step；It, can be according to film layer in display base plate when making color membrane substrates
The distributing position of spacer material 8 in the distributing position production color membrane substrates of via hole, then by color membrane substrates and display base plate to box,
At least partly spacer material 8 in color membrane substrates is protruded into the film layer vias inside of functional layer in display base plate, forms display panel.
It is noted that in addition to production while for connecting conductive pattern and accommodating the film layer mistake of spacer material 8 in display base plate
Outside hole, it can also make dedicated for accommodating the film layer via hole of spacer material 8.
In display panel provided in an embodiment of the present invention, since the spacer material 8 that color membrane substrates include can extend into display
The inside of the film layer via hole of substrate, so that being pressed during forming display panel to box, and to display panel
When, film layer via hole can the spacer material 8 to the portion that inserts into the inner play the role of fence, prevent spacer material 8 from shifting, slide into display
In pixel openings region in panel, the yield of display panel ensure that.In addition, due in the prior art in order to prevent spacer material
8 slidings, influence the normal display of display panel, generally wider black matrix area can be arranged on its periphery centered on spacer material 8
Domain, to ensure that spacer material 8 will not fall into pixel openings area after sliding, and in display panel provided in an embodiment of the present invention, by
In have film layer via hole surround spacer material 8, it is ensured that can spacer material 8 will not skid off outside film layer via hole, therefore, production display panel
When, the width in the black matrix region positioned at 8 periphery of spacer material can be reduced, to preferably improve the pixel in display panel
The transmitance of aperture opening ratio and display panel entirety.
In addition, since display panel provided in an embodiment of the present invention includes display base plate provided by the above embodiment,
The possessed beneficial effect of display base plate provided by the above embodiment, display panel provided in an embodiment of the present invention also have
Have, details are not described herein again.
Further, settable spacer material 8 protrudes into positive throwing of the end of film layer via hole on the underlay substrate 1 of display base plate
Orthographic projection of the step on underlay substrate 1 in shadow, with the film layer via hole farthest away from underlay substrate 1 is least partially overlapped.
Specifically, please continue to refer to Fig. 7 and Fig. 9, lining of the end in display base plate that spacer material 8 protrudes into film layer via hole is set
Orthographic projection of the step on underlay substrate 1 in orthographic projection on substrate 1, with the film layer via hole farthest away from underlay substrate 1 is extremely
Small part overlapping, so that spacer material 8 can be against in film layer via hole farthest away from underlay substrate when pressing display panel
On 1 step, spacer material 8 is caused to extend into the sub- via hole of underlay substrate 1 so as to avoid due to pressing, to being located at
The switching performance of conductive pattern in the sub- via hole has an impact.
The embodiment of the invention also provides a kind of display devices, including display panel provided by the above embodiment.
Due to display panel provided by the above embodiment production with higher and yield is used, but also with higher
The advantages that whole transmitance, therefore display device provided in an embodiment of the present invention is upper including equally having when above-mentioned display panel
Advantage is stated, details are not described herein again.
The embodiment of the invention also provides a kind of production methods of display base plate, provided by the above embodiment aobvious for making
Show substrate, the production method includes the steps that specifically including the step of making functional layer, make functional layer:
Production is provided with the functional layer of film layer via hole, and film layer via hole includes at least two sub- via holes being sequentially communicated, along remote
To the direction close to underlay substrate 1, the aperture of at least two sub- via holes successively becomes smaller underlay substrate 1 from display base plate, adjacent
Sub- via hole between form step.
Specifically, as shown in figures 7 and 9, it when making above-mentioned display base plate, first can successively be made on underlay substrate 1
First insulating layer 2, active layer 3 and the first conductive pattern 4, then make functional layer, which is chosen as organic film 5,
When making the functional layer, film layer via hole is made in the functional layer, then continues to make 6 He of the second conductive pattern on a functional
Second insulating layer 7, wherein the second conductive pattern 6 is electrically connected by the film layer via hole in functional layer with the first conductive pattern 4.
It, will be in functional layer in the display base plate made of the production method of display base plate provided in an embodiment of the present invention
Film layer via hole is made as the stepped hole with different pore size, and forms the step of transition in the inside of film layer via hole, so that in film
In layer via hole when forming other film layers, which will not climb excessive height under the same angle of gradient, i.e., effectively slow down
The gradient of climbing of other film layers, not only increases other film layers in the bonding strength of the film layer vias inside in this way, and
It is more advantageous to the continuity and uniformity of other film layers.Therefore, using the aobvious of production method provided in an embodiment of the present invention production
Show in substrate, the other film layers being formed in film layer via hole have better quality of forming film, in manufacturing process and use process
It should not being broken, when applying display base plate provided in an embodiment of the present invention in display device, can effectively be promoted
The yield of display device.
In addition, using production method provided in an embodiment of the present invention production display base plate in, due to the film in functional layer
Layer via hole is made as the stepped hole with different pore size, so that do not limited by technique when making film layer via hole, it can be by film layer
Near the smaller of the aperture of the sub- via hole of underlay substrate 1 production in via hole, and it is located at the sub- via hole backwards to 1 side of underlay substrate
The apertures of other sub- via holes can accordingly expand according to actual needs, therefore, using production method provided in an embodiment of the present invention
In the display base plate of production, the aperture size for being produced on the film layer via hole in the functional layer with thicker degree is unrestricted, energy
Enough better meet actual demand；But also it can be realized meeting display base plate there is the case where more stable working performance
Under, the generation of fluid-tight effect is preferably avoided, enables the diffusion of other film layers more evenly being formed on film layer via hole.
Further, when functional layer includes organic film 5, production provided by the above embodiment is provided with film layer via hole
The step of functional layer, specifically includes:
Organic film is made using organic material；
Organic film is exposed using intermediate tone mask plate, organic film is formed and region, organic film is fully retained
Half reservation region and organic film completely remove region, and wherein organic film is fully retained region and corresponds to 5 location of organic film
Domain, organic film half retain region and correspond to the step region in film layer via hole, and organic film completely removes region correspondence and removes
Other regions except 5 region of organic film and step region；
Developed using developer solution to the organic film after exposure, organic film will be located at and completely remove the organic of region
Film completely removes, and the organic film part for being located at half reservation region of organic film is removed, being formed has having for film layer via hole
Machine film layer 5.
Above-mentioned production is provided with the detailed process of the functional layer of film layer via hole it is found that using provided by the above embodiment
When production method makes display base plate, it can only be formed by single exposure technique and a developing process including above-mentioned film layer mistake
The functional layer in hole, manufacture craft is simple, saves production cost.
Unless otherwise defined, the technical term or scientific term that the disclosure uses should be tool in fields of the present invention
The ordinary meaning for thering is the personage of general technical ability to be understood." first ", " second " used in the disclosure and similar word are simultaneously
Any sequence, quantity or importance are not indicated, and are used only to distinguish different component parts." comprising " or "comprising" etc.
Similar word means that the element or object before the word occur covers the element or object for appearing in the word presented hereinafter
And its it is equivalent, and it is not excluded for other elements or object.The similar word such as " connection " or " connected " is not limited to physics
Or mechanical connection, but may include electrical connection, it is either direct or indirectly."upper", "lower",
"left", "right" etc. is only used for indicating relative positional relationship, and after the absolute position for being described object changes, then the relative position is closed
System may also correspondingly change.
It is appreciated that ought such as layer, film, region or substrate etc element be referred to as be located at another element "above" or "below"
When, which " direct " can be located at "above" or "below" another element, or may exist intermediary element.
In the description of above embodiment, particular features, structures, materials, or characteristics can be at any one or more
It can be combined in any suitable manner in a embodiment or example.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. a kind of display base plate, including functional layer, film layer via hole is provided in the functional layer, which is characterized in that the film layer
Via hole includes at least two sub- via holes being sequentially communicated, along the underlay substrate far from the display base plate to close to the substrate base
The aperture in the direction of plate, at least two sub- via hole successively becomes smaller, and forms step between the adjacent sub- via hole.
2. display base plate according to claim 1, which is characterized in that the display base plate further include:
Positioned at the functional plane to the first conductive pattern of the side of the underlay substrate；
Positioned at the functional layer backwards to the second conductive pattern of the side of the underlay substrate, second conductive pattern passes through institute
Film layer via hole is stated to connect with first conductive pattern；
Orthographic projection of second conductive pattern on the underlay substrate is located at the film layer via hole on the underlay substrate
Orthographic projection inside.
3. display base plate according to claim 2, which is characterized in that near the underlay substrate in the film layer via hole
Orthographic projection of the sub- via hole on the underlay substrate, positioned at orthographic projection of first conductive pattern on the underlay substrate
Inside.
4. display base plate according to claim 2, which is characterized in that near the underlay substrate in the film layer via hole
Orthographic projection of the sub- via hole on the underlay substrate, with orthographic projection portion of first conductive pattern on the underlay substrate
Divide overlapping.
5. display base plate according to any one of claims 1 to 4, which is characterized in that the functional layer includes organic film
Layer.
6. a kind of display panel, which is characterized in that including color membrane substrates and such as display according to any one of claims 1 to 5
Substrate, the color membrane substrates are oppositely arranged with the display base plate, and at least partly spacer material in the color membrane substrates protrudes into
The film layer vias inside of functional layer in the display base plate.
7. display panel according to claim 6, which is characterized in that the spacer material protrudes into the end of the film layer via hole
Step in orthographic projection on the underlay substrate of the display base plate, with the film layer via hole farthest away from the underlay substrate is in institute
The orthographic projection stated on underlay substrate is least partially overlapped.
8. a kind of display device, which is characterized in that including display panel as claimed in claims 6 or 7.
9. a kind of production method of display base plate, which is characterized in that for making as according to any one of claims 1 to 5
Display base plate, the production method include the steps that making functional layer, and the step of production functional layer specifically includes:
Production is provided with the functional layer of film layer via hole, and the film layer via hole includes at least two sub- via holes being sequentially communicated, along remote
Underlay substrate from the display base plate is to the direction close to the underlay substrate, and the aperture of at least two sub- via hole is successively
Become smaller, forms step between the adjacent sub- via hole.
10. the production method of display base plate according to claim 9, which is characterized in that when the functional layer includes organic
When film layer, described production the step of being provided with the functional layer of film layer via hole, is specifically included:
Organic film is made using organic material；
The organic film is exposed using intermediate tone mask plate, organic film is formed and region, organic film is fully retained
Half reservation region and organic film completely remove region, wherein region, which is fully retained, in the organic film corresponds to the organic film
Region, the organic film half retain region and correspond to the step region in the film layer via hole, the organic film
Completely remove the corresponding other regions in addition to the organic film region and the step region in region；
Developed using developer solution to the organic film after exposure, the organic film in region will be completely removed positioned at organic film
It completely removes, the organic film part for being located at half reservation region of organic film is removed, the organic film with film layer via hole is formed
Layer.
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