CN109407215A - A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber - Google Patents
A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber Download PDFInfo
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- CN109407215A CN109407215A CN201811361876.3A CN201811361876A CN109407215A CN 109407215 A CN109407215 A CN 109407215A CN 201811361876 A CN201811361876 A CN 201811361876A CN 109407215 A CN109407215 A CN 109407215A
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- mode optical
- waveguide
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 175
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 95
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 95
- 239000010703 silicon Substances 0.000 title claims abstract description 95
- 238000010168 coupling process Methods 0.000 title claims abstract description 49
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 79
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 38
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 34
- 230000008878 coupling Effects 0.000 claims abstract description 33
- 238000005859 coupling reaction Methods 0.000 claims abstract description 33
- 239000000835 fiber Substances 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000012545 processing Methods 0.000 claims abstract description 4
- 230000007246 mechanism Effects 0.000 claims description 19
- 230000000694 effects Effects 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 17
- 230000012010 growth Effects 0.000 abstract description 7
- 238000004891 communication Methods 0.000 abstract description 6
- 238000004062 sedimentation Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000007704 transition Effects 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 14
- 238000011900 installation process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000007493 shaping process Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 241000790917 Dioxys <bee> Species 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000007773 growth pattern Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The present invention relates to optical communication equipment technologies, more particularly to a kind of coupling process of silicon based opto-electronics chip and single mode optical fiber, sedimentation growth silicon dioxide layer on a silicon substrate, silicon waveguide is arranged in silicon dioxide layer, the end face processing of single mode optical fiber is at convex-shaped surface, there are gaps between single mode optical fiber and silicon dioxide layer, at least one section of low-index waveguide is provided between single mode optical fiber and silicon waveguide, cuboid and both ends are wedge angle to low-index waveguide in the form of sheets, silicon waveguide incidence end is wedge angle, the fibre core exit end of single mode optical fiber is aligned with low-index waveguide incidence end, low-index waveguide partly overlaps in the horizontal direction with silicon waveguide, and there is gap in vertical direction, low-index waveguide and the silicon dioxide layer of silicon waveguide two sides are machined with cutting, groove depth is greater than the depth of silicon waveguide embedment silicon dioxide layer.The beneficial effects of the present invention are: improving the coupling efficiency and tolerance between single mode optical fiber and silicon optical chip by the transition of low-index waveguide.
Description
Technical field
The present invention relates to optical communication equipment technologies, and in particular to a kind of coupling of silicon based opto-electronics chip and single mode optical fiber
Conjunction method.
Background technique
With the development of internet and mobile communication network, data center and 5G communication are for high speed communication device
Also when the river rises the boat goes up for demand.The means of optical device manufacturing cost can be significantly reduced as one of which for silicon based opto-electronics, also obtain
The concern in market.Since silicon waveguide is lost in communication band with low transmission, the advantage of high refractive index, silicon based optoelectronic devices tool
There are the expansible of height, the advantage of high integration.Due to the highly integrated characteristic of the sub- chip of silicon based opto-electronics, lead to the size of silicon waveguide
It is huge with existing optical communication device and transmission cable difference, result in the huge problem of coupling loss.The fibre core of existing optical fiber
Diameter is usually 10 times of silicon waveguide dimensions or so.Coupling loss causes the sub- chip of silicon based opto-electronics to receive limit in many applications
System.Although being suggested there are many scheme to reduce this loss.But the coupling of low cost, strong anti-interference is had both simultaneously
Mode is still the problem that industry needs to solve at present.
Chinese patent CN101533128B, publication date on November 10th, 2010, a kind of coupling of silicon nano optical wave guide and optical fiber
Close packaging method.In order to realize that efficient optical coupling and easy encapsulation, the present invention of silicon nano optical wave guide and optical fiber provide a kind of silicon
The coupling package method of nano optical wave guide and optical fiber realizes the small size in silicon nano optical wave guide using inverted cone-shaped spot-size converter
Mould spot to the large scale mould spot of optical fiber convert, and using V-type fiber orientation slot autoregistration characteristic realize silicon nano optical wave guide with
The alignment coupling and easy encapsulation of optical fiber.In the present invention back taper spot-size converter efficiently, broadband light coupled characteristic and optical mode field
Size conversion ability is combined with SOI substrate characteristic, V-type fiber orientation slot, realize waveguide be aligned with the true center of optical fiber and
Efficient optical coupling, and the fixation packaging technology of optical fiber is easy, is highly suitable for production application.But it only passes through mould spot and converts
It is coupled, to optical fiber with silicon waveguide to alignment request height, installation difficulty is big, is not suitable for promoting the use of.
Summary of the invention
The technical problem to be solved by the present invention is the current single mode optical fiber technical problem low with silicon waveguide coupling efficiency.It mentions
A kind of silicon substrate big as the tolerance degree of transition using low-index waveguide for using and handling that single mode optical fiber exit end is convex surface is gone out
The coupling process of opto chip and single mode optical fiber.
In order to solve the above technical problems, the technical solution used in the present invention are as follows: a kind of sub- chip of silicon based opto-electronics and single mode
Silicon dioxide layer is arranged applied to the coupling of single mode optical fiber and silicon waveguide in the coupling process of optical fiber on a silicon substrate, and silicon waveguide is set
It sets in silicon dioxide layer, the end face processing of single mode optical fiber is at convex-shaped surface, between existing between single mode optical fiber and silicon dioxide layer
It is rectangular in the form of sheets to be provided at least one section of low-index waveguide, the low-index waveguide for gap between single mode optical fiber and silicon waveguide
The bodily form and both ends are wedge angle, and the silicon waveguide incidence end is wedge angle, and fibre core exit end and the low-index waveguide of single mode optical fiber enter
End alignment is penetrated, the low-index waveguide partly overlaps in the horizontal direction with silicon waveguide, and there is gap in vertical direction,
The low-index waveguide and the silicon dioxide layer of silicon waveguide two sides are machined with cutting, and the groove depth is greater than silicon waveguide and buries
Enter the depth of silicon dioxide layer.The convex-shaped surface end face of single mode optical fiber can converge the signal light being emitted from single mode optical fiber fibre core,
Keep its mode spot-size suitable with silicon waveguide dimensions, plays the role of improving coupling efficiency, the wedge angle of low-index waveguide incidence end
Play the role of amplified signal optical mode spot, signal light is made to be easier to enter in silicon waveguide, plays the role of improving coupling tolerance.
Preferably, the single mode optical fiber is fixed by optical fiber briquetting and optical fiber fixed block, the optical fiber fixed block is in dioxy
SiClx layer forms simultaneously when generating, and optical fiber fixed block upper surface and optical fiber briquetting lower surface are machined with V-shaped groove, single mode optical fiber
It is fixedly connected by optical fiber briquetting with optical fiber fixed block, single mode optical fiber is fixedly clamped by the V-shaped groove.Optical fiber fixed block is in titanium dioxide
Settling growth shaping simultaneously when silicon layer sedimentation growth can be such that single mode optical fiber is aligned with low-index waveguide.Recommend but does not limit
, silicon dioxide layer is generated using sedimentation growth pattern, and settles optical fiber fixed block grow simultaneously, then etching molding.
Preferably, the single mode optical fiber is installed to coupling position by optical fiber erector, the optical fiber erector includes
Connection frame, screw rodb base, screw rod, rotating handle, two slide bars, sliding block, optical fiber grip slipper and optical fiber clamp briquetting, the fibre clip
It holds seat to be fixedly connected with a slide block, optical fiber clamping briquetting is close to be fixedly connected with optical fiber grip slipper, and optical fiber clamps briquetting and fibre clip
It holds seated connection contacting surface same position and is provided with V-groove, the optical fiber is clamped by described two V-grooves, the screw rod second end and cunning
Block is hinged and relatively fixed in the axial direction, and the sliding block and slide bar activity are clamped, the screw rod and two slide bar extending directions
Identical, the screw rodb base is machined with to be connect with screw rodb base by screw thread pair with the matched threaded hole of the screw rod, the screw rod, rotation
It changes hands handle and is fixedly mounted on screw rod first end, the slide bar is fixedly mounted on screw rodb base, and the screw rodb base is fixedly mounted on institute
It states on connection frame, the connection frame is detachably fixed with silicon substrate to be connect, after connection frame is fixedly connected with silicon substrate, by single mode
Optical fiber is clamped on optical fiber clamping briquetting and optical fiber grip slipper, and torsion rotating handle drives screw rod rotation, and then with movable slider
Mobile, sliding block drives single mode optical fiber to be moved to coupling position, after installation optical fiber briquetting fixes single mode optical fiber, removes optical fiber clamping
Briquetting and connection frame.
Preferably, the optical fiber erector used when single mode optical fiber is installed to coupling position further includes anticollision dress
It sets, anticollision device, collision-prevention device locks the sliding block when single mode optical fiber exit end is moved to coupling position.The folding of silicon waveguide and silica
The silicon waveguide penetrating that rate gap is huge, thus being used cooperatively with silica has the very strong constraint effect to light, so silicon wave
It leads and can have smaller size, usually only more than ten to tens microns, the ability that too small size causes it to absorb impact power
It is very faint, single mode optical fiber needs leaned on silicon waveguide and silicon dioxide layer it is close, when installing single mode optical fiber, if operate
It is improper that single mode optical fiber can be made to hit silicon dioxide layer and silicon waveguide, cause silicon dioxide layer and silicon waveguide to be damaged.By anti-
Collision device can avoid the shock of single mode optical fiber and silicon dioxide layer and silicon waveguide in single mode optical fiber installation process.
Preferably, the anticollision device, collision-prevention device includes contact-making switch, before the contact-making switch is mounted on single mode optical fiber exit end
Side, is connected when contact-making switch is with bar contact, and the locking mechanism that the anticollision device, collision-prevention device is used to lock sliding block includes two brakings
Block, spring and power supply, the sliding block and slide bar socket place are provided with through slot, and the through slot bottom is machined with T-slot, described two systems
Motion block bottom is clamped with the T-slot, is located on the outside of a slide bar in the middle part of described two brake block, described two brakings
Block middle inside is connected by the spring, and the both ends of the spring is connected to power supply by contact-making switch.When contact-making switch and obstacle
Object is connected when contacting, and spring and power supply are connected and be powered, spring energization after-contraction, is pulled two brake block to centre, is made to brake
Block is abutted with slide bar, and generating frictional force keeps sliding block locked.
Preferably, the anticollision device, collision-prevention device includes feeler lever, contact-making switch and locking mechanism, the fixed peace of the feeler lever first end
On optical fiber grip slipper, the contact-making switch is mounted on feeler lever second end, and the locking mechanism is coupled with contact-making switch, described
Locking mechanism locks the sliding block when contact-making switch is connected, and the contact-making switch includes front contact, back contact and graphite-pipe, institute
State front contact and back contact in a tubular form, the graphite pipe outer wall and front contact inner wall are socketed, and the back contact is fixed on spy
Bar end, the front contact by insulating layer with back contact is concentric is fixedly connected, the graphite-pipe front end goes out positioned at single mode optical fiber
Penetrate end front.The ability that silicon dioxide layer and silicon waveguide absorb impact power is very weak, thus contact-making switch triggering when will to the greatest extent can
Smaller power can be needed, the density of graphite-pipe itself is smaller, and conductive capability is strong, and size can be smaller, and graphite itself has
Lubricating action can reduce the frictional force of front contact and graphite-pipe, and the power needed when triggering contact-making switch is smaller, thus to two
Silicon oxide layer and the impact force of silicon waveguide are smaller.
Preferably, the locking mechanism includes two brake block, spring and power supply, the sliding block is opened with slide bar socket place
There is through slot, the through slot bottom is machined with T-slot, and described two brake block bottoms are clamped with the T-slot, described two systems
It is located in the middle part of motion block on the outside of a slide bar, described two brake block middle insides are connected by the spring, the front contact
It is connect with positive pole, the spring first end is electrically connected with back contact, and the spring second end is connect with power cathode.
Preferably, being machined with planar portions, the planar portions and the brake block medial surface on the outside of described two slide bars
Relatively and there are gaps.
Substantial effect of the invention is: signal optical mode spot is converged in the convex-shaped surface end face of single mode optical fiber, can be improved coupling
Efficiency is closed, the wedge angle amplified signal optical mode spot of low-index waveguide incidence end makes signal light be easier to enter in silicon waveguide, plays
Improve the effect of coupling tolerance.
Detailed description of the invention
Fig. 1 is one coupled structure schematic diagram of embodiment.
Fig. 2 is one coupled structure side diagrammatic cross-section of embodiment.
Fig. 3 is one coupled structure top view of embodiment.
Fig. 4 is two optical fiber erector structure chart of embodiment.
Fig. 5 is two optical fiber erector execution part structural schematic diagram of embodiment.
Fig. 6 is three optical fiber erector anticollision device, collision-prevention device structural schematic diagram of embodiment.
Fig. 7 is three locking mechanism structural schematic diagram of embodiment.
Fig. 8 is three locking mechanism structural schematic diagram two of embodiment.
Fig. 9 is three contact-making switch structural schematic diagram of embodiment.
Figure 10 is three contact-making switch sectional view of embodiment.
Figure 11 is embodiment three-circuit connection schematic diagram.
Wherein: 1, optical fiber briquetting, 2, single mode optical fiber, 3, cutting, 4, silicon dioxide layer, 5, silicon waveguide, 6, low-refraction wave
It leads, 7, optical fiber fixed block, 8, silicon substrate, 9, connection frame, 10, rotating handle, 11, optical fiber clamping briquetting, 12, feeler lever, 13, cunning
Block, 14, screw rodb base, 15, screw rod, 16, slide bar, 17, optical fiber grip slipper, 18, spring, 19, T-slot, 20, brake block, 21, rear touching
Point, 22, graphite-pipe, 23, front contact.
Specific embodiment
Below by specific embodiment, and in conjunction with attached drawing, a specific embodiment of the invention is further described in detail.
Embodiment one:
A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber 2, applied to the coupling of single mode optical fiber 2 and silicon waveguide 5, such as
It is one coupled structure schematic diagram of embodiment shown in Fig. 1, as shown in Fig. 2, being one coupled structure side diagrammatic cross-section of embodiment, such as
It is one coupled structure top view of embodiment shown in Fig. 3, the present embodiment settles growth silicon dioxide layer 4, silicon wave on silicon substrate 8
5 settings are led in silicon dioxide layer 4, the end face processing of single mode optical fiber 2 at convex-shaped surface, single mode optical fiber 2 and silicon dioxide layer 4 it
Between there are gap, at least one section of low-index waveguide 6, low-index waveguide 6 are provided between single mode optical fiber 2 and silicon waveguide 5 is in
Sheet cuboid and both ends are wedge angle, and 5 incidence end of silicon waveguide is wedge angle, the fibre core exit end and low-refraction of single mode optical fiber 2
The alignment of 6 incidence end of waveguide, low-index waveguide 6 partly overlaps in the horizontal direction with silicon waveguide 5, and exists in vertical direction
The silicon dioxide layer 4 of gap, low-index waveguide 6 and 5 two sides of silicon waveguide is machined with cutting 3, and 3 depth of cutting is greater than silicon waveguide
The depth of 5 embedment silicon dioxide layers 4.The convex-shaped surface end face of single mode optical fiber 2 can converge the letter being emitted from 2 fibre core of single mode optical fiber
Number light, keeps its mode spot-size suitable with 5 size of silicon waveguide, plays the role of improving coupling efficiency, 6 incidence end of low-index waveguide
Wedge angle play the role of amplified signal optical mode spot, make the signal light be easier to enter in silicon waveguide 5, play and improve coupling tolerance
Effect.
Single mode optical fiber 2 is fixed by optical fiber briquetting 1 and optical fiber fixed block 7, and optical fiber fixed block 7 is settled in silicon dioxide layer 4 and given birth to
Growth shaping is settled simultaneously when long, 7 upper surface of optical fiber fixed block and 1 lower surface of optical fiber briquetting are machined with V-shaped groove, single-mode optics
Fibre 2 is fixedly connected by optical fiber briquetting 1 with optical fiber fixed block 7, and single mode optical fiber 2 is fixedly clamped by V-shaped groove.Optical fiber fixed block 7 is two
Settling growth shaping simultaneously when the sedimentation growth of silicon oxide layer 4 can be such that single mode optical fiber 2 is aligned with low-index waveguide 6.
Embodiment two:
A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber 2, the present embodiment carry out the installation process of single mode optical fiber 2
Specific improvement, as shown in figure 4, being embodiment two optical fiber erector structure chart, as shown in figure 5, pacifying for two optical fiber of embodiment
Device execution part structural schematic diagram is filled, single mode optical fiber 2 is installed to coupling position by optical fiber erector, and optical fiber erector includes connecting
Connect frame 9, screw rodb base 14, screw rod 15,10, two slide bars 16 of rotating handle, sliding block 13, optical fiber grip slipper 17 and optical fiber clamping briquetting
11, optical fiber grip slipper 17 is fixedly connected with sliding block 13, and optical fiber clamping briquetting 11 is close to be fixedly connected with optical fiber grip slipper 17, optical fiber
Clamping briquetting 11 and 17 contact surface same position of optical fiber grip slipper are provided with V-groove, and optical fiber is clamped by two V-grooves, screw rod 15
Second end is hinged with sliding block 13 and relatively fixed in the axial direction, and sliding block 13 and 16 activity of slide bar are clamped, screw rod 15 and two cunnings
16 extending direction of bar is identical, and screw rodb base 14, which is machined with, passes through screw thread with the matched threaded hole of screw rod 15, screw rod 15 and screw rodb base 14
Pair connection, rotating handle 10 are fixedly mounted on 15 first end of screw rod, and slide bar 16 is fixedly mounted on screw rodb base 14, and screw rodb base 14 is solid
On connection frame 9, connection frame 9 is detachably fixed with silicon substrate 8 and connect, and connection frame 9 is fixedly connected with silicon substrate 8 for Dingan County
Afterwards, single mode optical fiber 2 is clamped on optical fiber clamping briquetting 11 and optical fiber grip slipper 17, torsion rotating handle 10 drives screw rod 15
Rotation, so it is mobile with movable slider 13, and sliding block 13 drives single mode optical fiber 2 to be moved to coupling position, installs optical fiber briquetting 1 for single mode
After optical fiber 2 is fixed, optical fiber clamping briquetting 11 and connection frame 9 are removed.Rest part is the same as embodiment one.
Embodiment three:
A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber 2, the present embodiment carry out the installation process of single mode optical fiber 2
Specific improvement, as shown in fig. 6, be embodiment three optical fiber erector anticollision device, collision-prevention device structural schematic diagram, the present embodiment is by single mode
It further includes anticollision device, collision-prevention device that optical fiber 2, which is installed to the optical fiber erector used when coupling position, and anticollision device, collision-prevention device is in 2 exit end of single mode optical fiber
It is moved to locked sliding block 13 when coupling position.The refringence of silicon waveguide 5 and silica is matched with silica away from huge
Closing the silicon waveguide 5 used has the very strong constraint effect to light, so silicon waveguide 5 can have smaller size, usually only
There are more than ten to tens microns, the ability that too small size causes it to absorb impact power is very faint, and single mode optical fiber 2 needs and silicon wave
Lead 5 and silicon dioxide layer 4 lean on it is close, when installing single mode optical fiber 2, if misoperation can make single mode optical fiber 2 hit two
Silicon oxide layer 4 and silicon waveguide 5 cause silicon dioxide layer 4 and silicon waveguide 5 to be damaged.It can be in single-mode optics by anticollision device, collision-prevention device
In fine 2 installation processes, the shock of single mode optical fiber 2 and silicon dioxide layer 4 and silicon waveguide 5 is avoided.
As shown in fig. 7, being three locking mechanism structural schematic diagram of embodiment, as shown in figure 8, being three locking mechanism knot of embodiment
Structure schematic diagram two, anticollision device, collision-prevention device include contact-making switch, are connected when contact-making switch is with bar contact, and anticollision device, collision-prevention device is slided for locked
The locking mechanism of block 13 includes two brake block 20, spring 18 and power supply, and sliding block 13 and 16 socket place of slide bar are provided with through slot, through slot
Bottom is machined with T-slot 19, and two 20 bottoms of brake block are clamped with T-slot, is located at slide bar in the middle part of two brake block 20
16 outsides, two 20 middle insides of brake block are connected by spring 18, and 18 both ends of spring are connected to power supply by contact-making switch.When connecing
It is connected when touching switch is with bar contact, spring 18 and power supply are connected and be powered, 18 energization after-contraction of spring, pull two to centre
A brake block 20, abuts brake block 20 with slide bar 16, and generating frictional force keeps sliding block 13 locked.
Anticollision device, collision-prevention device includes feeler lever 12, contact-making switch and locking mechanism, and 12 first end of feeler lever is fixedly mounted on optical fiber clamping
On seat 17, contact-making switch is mounted on 12 second end of feeler lever, and locking mechanism is coupled with contact-making switch, and locking mechanism connects in contact-making switch
Locked sliding block 13 when logical as shown in Figure 10, connects as shown in figure 9, being three contact-making switch structural schematic diagram of embodiment for embodiment three
Touching switch sectional view, contact-making switch includes front contact 23, back contact 21 and graphite-pipe 22, and front contact 23 and back contact 21 are in
Tubulose, 22 outer wall of graphite-pipe and 23 inner wall of front contact are socketed, and back contact 21 is fixed on 12 end of feeler lever, and front contact 23 passes through insulation
Layer with back contact 21 is concentric is fixedly connected, 22 front end of graphite-pipe is located at 2 exit end of single mode optical fiber front.Silicon dioxide layer 4 and
The ability that silicon waveguide 5 absorbs impact power is very weak, thus contact-making switch will need smaller power, graphite-pipe 22 in triggering as far as possible
The density of itself is smaller, and conductive capability is strong, and size can be smaller, and graphite itself has lubricating action, can reduce preceding touching
The frictional force of point 23 and graphite-pipe 22, the power needed when triggering contact-making switch is smaller, thus to silicon dioxide layer 4 and silicon wave
Lead 5 impact force it is smaller.
It as shown in figure 11, is embodiment three-circuit connection schematic diagram, front contact 23 is connect with positive pole, spring 18 first
End is electrically connected with back contact 21, and 18 second end of spring is connect with power cathode.
Optionally, two 16 outsides of slide bar are machined with planar portions, and planar portions are opposite with 20 medial surface of brake block and exist
Gap.Planar portions make slide bar 16 become face contact by line contact with the contact of brake block 20, and coupling mechanism force can be improved.Rest part is same
Embodiment two.
Above-mentioned embodiment is only a preferred solution of the present invention, not the present invention is made in any form
Limitation, there are also other variations and modifications on the premise of not exceeding the technical scheme recorded in the claims.
Claims (8)
1. a kind of coupling process of silicon based opto-electronics chip and single mode optical fiber, applied to the coupling of single mode optical fiber and silicon waveguide,
It is characterized in that,
Silicon dioxide layer is set on a silicon substrate, and silicon waveguide is arranged in silicon dioxide layer, and the end face processing of single mode optical fiber is at convex
Curved form, there are gap between single mode optical fiber and silicon dioxide layer, be provided between single mode optical fiber and silicon waveguide at least one section it is low
Index waveguide, cuboid and both ends are wedge angle to the low-index waveguide in the form of sheets, and the silicon waveguide incidence end is wedge angle,
The fibre core exit end of single mode optical fiber is aligned with low-index waveguide incidence end, and the low-index waveguide and silicon waveguide are in level side
It partly overlaps upwards, and there is gap in vertical direction, the silicon dioxide layer of the low-index waveguide and silicon waveguide two sides
It is machined with cutting, the groove depth is greater than the depth of silicon waveguide embedment silicon dioxide layer.
2. the coupling process of a kind of silicon based opto-electronics chip and single mode optical fiber according to claim 1, which is characterized in that
The single mode optical fiber is fixed by optical fiber briquetting and optical fiber fixed block, and the optical fiber fixed block is same when silicon dioxide layer generates
When form, optical fiber fixed block upper surface and optical fiber briquetting lower surface are machined with V-shaped groove, and single mode optical fiber is by optical fiber briquetting and light
Fine fixed block is fixedly connected, and single mode optical fiber is fixedly clamped by the V-shaped groove.
3. the coupling process of a kind of silicon based opto-electronics chip and single mode optical fiber according to claim 1 or 2, feature exist
In,
The single mode optical fiber is installed to coupling position by optical fiber erector, the optical fiber erector include connection frame, screw rodb base,
Screw rod, rotating handle, two slide bars, sliding block, optical fiber grip slipper and optical fiber clamp briquetting, and the optical fiber grip slipper is fixed with sliding block
Connection, optical fiber clamping briquetting are close to be fixedly connected with optical fiber grip slipper, and it is identical as optical fiber clamping seated connection contacting surface that optical fiber clamps briquetting
Position is provided with V-groove, and the optical fiber is clamped by described two V-grooves, and the screw rod second end and sliding block are hingedly and along axis
Direction is relatively fixed, and the sliding block and slide bar activity are clamped, and the screw rod is identical as two slide bar extending directions, the screw rodb base
It is machined with and is connect with screw rodb base by screw thread pair with the matched threaded hole of the screw rod, the screw rod, rotating handle is fixedly mounted
In screw rod first end, the slide bar is fixedly mounted on screw rodb base, and the screw rodb base is fixedly mounted on the connection frame, described
Connection frame is detachably fixed with silicon substrate and connect, and after connection frame is fixedly connected with silicon substrate, single mode optical fiber is clamped in optical fiber
It clamps on briquetting and optical fiber grip slipper, torsion rotating handle drives screw rod rotation, and then mobile with movable slider, and sliding block drives single
Mode fiber is moved to coupling position, after installation optical fiber briquetting fixes single mode optical fiber, removes optical fiber clamping briquetting and connection frame.
4. the coupling process of a kind of silicon based opto-electronics chip and single mode optical fiber according to claim 3, which is characterized in that
The optical fiber erector used when single mode optical fiber is installed to coupling position further includes anticollision device, collision-prevention device, and anticollision device, collision-prevention device is in list
Mode fiber exit end locks the sliding block when being moved to coupling position.
5. the coupling process of a kind of silicon based opto-electronics chip and single mode optical fiber according to claim 4, which is characterized in that
The anticollision device, collision-prevention device includes contact-making switch, and the contact-making switch is mounted in front of single mode optical fiber exit end, contact-making switch with
It is connected when bar contact, the locking mechanism that the anticollision device, collision-prevention device is used to lock sliding block includes two brake block, spring and power supply,
The sliding block and slide bar socket place are provided with through slot, and the through slot bottom is machined with T-slot, and described two brake block bottoms are and institute
T-slot clamping is stated, is located on the outside of a slide bar in the middle part of described two brake block, described two brake block middle insides are by institute
Spring connection is stated, the both ends of the spring is connected to power supply by contact-making switch.
6. the coupling process of a kind of silicon based opto-electronics chip and single mode optical fiber according to claim 4, which is characterized in that
The anticollision device, collision-prevention device includes feeler lever, contact-making switch and locking mechanism, and the feeler lever first end is fixedly mounted on optical fiber clamping
On seat, the contact-making switch is mounted on feeler lever second end, and the locking mechanism is coupled with contact-making switch, and the locking mechanism is connecing
Lock the sliding block when touching switch connection, the contact-making switch includes front contact, back contact and graphite-pipe, the front contact and
In a tubular form, the graphite pipe outer wall and front contact inner wall are socketed back contact, and the back contact is fixed on feeler lever end, before described
Contact by insulating layer with back contact is concentric is fixedly connected, the graphite-pipe front end is located at single mode optical fiber exit end front.
7. the coupling process of a kind of silicon based opto-electronics chip and single mode optical fiber according to claim 6, which is characterized in that
The locking mechanism includes two brake block, spring and power supply, and the sliding block and slide bar socket place are provided with through slot, described logical
Trench bottom is machined with T-slot, and described two brake block bottoms are clamped with the T-slot, in the middle part of described two brake block respectively
On the outside of a slide bar, described two brake block middle insides are connected by the spring, and the front contact and positive pole connect
It connects, the spring first end is electrically connected with back contact, and the spring second end is connect with power cathode.
8. a kind of coupling process of silicon based opto-electronics chip and single mode optical fiber, feature according to claim 5 or 7 exist
In,
Planar portions are machined on the outside of described two slide bars, between the planar portions are opposite with the brake block medial surface and presence
Gap.
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Address after: Room 511, South Building, No. 2 Chaofeng East Road, Yuhang Economic Development Zone, Hangzhou City, Zhejiang Province Applicant after: Hangzhou core hard Optoelectronic Technology Co., Ltd. Address before: 310018 Room 803, Building 20, Science Park Road, Baiyang Street, Hangzhou Economic and Technological Development Zone, Jianggan District, Hangzhou City, Zhejiang Province Applicant before: Hangzhou core hard Optoelectronic Technology Co., Ltd. |