CN109297600B - Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror - Google Patents

Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror Download PDF

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CN109297600B
CN109297600B CN201811229477.1A CN201811229477A CN109297600B CN 109297600 B CN109297600 B CN 109297600B CN 201811229477 A CN201811229477 A CN 201811229477A CN 109297600 B CN109297600 B CN 109297600B
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mirror
reflecting
double
light
rotating mirror
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CN109297600A (en
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魏儒义
王鹏冲
王飞橙
胡炳樑
吴银花
张鹏昌
韩意庭
卫翠玉
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry

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  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention relates to an overspeed detection hyperspectral imaging technology, and provides a Fourier transform hyperspectral imaging device based on a high-speed double-reflection rotating mirror, aiming at the problems of nonlinear optical path difference and the like of a transmission type interference spectrometer of the high-speed rotating mirror, comprising a collimating mirror, a beam splitter, a first reflecting mirror, a second reflecting mirror, a first hollow retro-reflector, a second hollow retro-reflector, a detector and a double-reflection rotating mirror; incident light is incident on a beam splitter and is split into reflected light and transmitted light; the reflected light enters the first hollow retro-reflector after being reflected by the first reflecting mirror and the double reflecting rotating mirror, is turned back to the double reflecting rotating mirror at 180 degrees, and is reflected to the beam splitter after being reflected by the double reflecting rotating mirror and the first reflecting mirror; the transmitted light enters the second hollow retro-reflector after being reflected by the second reflecting mirror and the double reflecting rotating mirror, and then the reflected light is turned back to the double reflecting rotating mirror at 180 degrees and then is reflected to the beam splitter through the double reflecting rotating mirror and the second reflecting mirror; interference light generated by the reflected light and the transmitted light is received by the detector.

Description

Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror
Technical Field
The invention relates to the technical field of overspeed detection hyperspectral imaging, in particular to a Fourier transform hyperspectral imaging device based on a high-speed double-reflection rotating mirror.
Background
The imaging spectrum technology is a new generation optical detection technology developed in the 80 th generation of the 20 th century, takes the spectrum analysis theory of an object as a core, and integrates the technologies of optical system design, object imaging technology, photoelectric detector, signal processing, information mining, spectrum information transmission theory and the like. The imaging spectroscopic technique combines the advantages of both spectroscopic and imaging techniques and can be used to analyze images and spectroscopic information of the target object, which form a three-dimensional data cube of the target object. In the three-dimensional data cube, the image contour information of the target object can be extracted through an imaging spectrum technology, and fine spectrum analysis can be performed on the target object; the method is widely applied to a plurality of aspects such as target detection, aerospace remote sensing, agricultural application, mineral resource detection, marine remote sensing, geological survey, disaster reduction forecast, biomedical diagnosis and the like.
Imaging spectrometers are classified in a variety of ways, mainly based on the structure of the system or the manner in which the spectra are acquired. According to the spectrum acquisition mode, the imaging spectrometer can be mainly divided into three categories of dispersion type, optical filter type and Fourier transform type.
In dispersive imaging spectrometers, the contradictory relationship between luminous flux and spectral resolution results in a dispersive imaging spectrometer having a significant difficulty in detecting both visible and infrared weak radiation.
The filter imaging spectrometer has the characteristics of simple design and relatively easy implementation, but each row of one frame of image corresponds to a different ground target and spectrum respectively, so that a plurality of difficulties are brought to image registration and later image processing.
In view of the shortcomings of both dispersive and filter type imaging spectrometers, since the last eighties of the last century, some well-known scientific research institutions abroad began the study of fourier transform imaging spectrometers. The method is widely applied to the fields of chemical analysis, biological research, mineral investigation, aerospace remote sensing and the like. Compared with the spectrometer of the type, the device has the advantages of high light flux, simultaneous detection of multiple channels, high resolution, high signal to noise ratio, wide spectrum range, high scanning speed and the like.
The earliest technology for realizing Fourier transform spectrum is Michelson interferometer, although the classical interferometer is improved continuously by the later people to generate a plurality of variants, the conventional moving mirror scanning type interferometer spectrometer needs a set of linear moving mirror system with very high precision requirement, so that the stability is poor, the process is complex, a plurality of difficulties are brought to development, and the problems of inclination and shearing caused by a flat moving mirror cannot be effectively solved.
Moving mirror scanning michelson interferometers generally have three disadvantages:
(1) The auxiliary light path is needed, and the structure is complex
In a traditional Michelson interference linear moving mirror interferometer, if a moving mirror tilts in the motion process, the interference efficiency is seriously affected, and even interference cannot be generated; the method has extremely strict orientation requirements, and according to a large number of theoretical calculation and engineering practices, the inclination angle of the movable mirror in the motion process is considered to be a few angular seconds, the instantaneous speed uniformity is within +/-1%, and the two indexes are the key of instrument development success. Because the moving process of the moving mirror is extremely difficult to control, an auxiliary light path is required to be arranged in the linear moving mirror interferometer, namely, the direction accuracy, the speed uniformity and the displacement in the moving mirror movement are accurately monitored and corrected by utilizing laser.
In addition, the linear moving mirror interferometer has high precision requirement on a moving mirror driving system, and when the moving mirror does reciprocating linear motion, uniform motion is required to be kept, and a high-precision servo system is required. These technical assurance measures complicate the overall interference system.
(2) Poor stability, low environment adaptability and low anti-interference capability
In the linear moving mirror interferometer, the moving mirror is required to move stably at a constant speed and has high requirements on tilting and shaking, so that a set of high-precision moving mirror driving system is required. However, in the practical engineering development process, the realization of the ultra-high-precision linear driving system of the moving mirror is still a difficult problem, and is also a key for limiting the wide application of the linear moving mirror interferometer. Therefore, various schemes are developed in various countries in the world to solve the problems of a high-precision moving mirror driving system, such as a scheme of adopting a surface spring support, a magnetic suspension support, a leaf spring-based vibration driving and the like, but the problem of high-precision linear driving of the moving mirror cannot be solved well.
In addition, the linear reciprocating motion of the movable mirror has strong dependence on the processing technology of the motion orbit, and the shaking has extremely obvious influence on the measuring effect, so that the system has poor stability, the capability of adapting to severe environments and the anti-interference capability of the spectrometer are reduced, and the spectrometer cannot work in special environments such as field complex environments, aviation and aerospace remote sensing and the like.
(3) Low time utilization rate and low detection speed
Because the moving mirror of the linear moving mirror interferometer needs to perform the moving processes of acceleration, deceleration, direction change and the like, the false scanning is unavoidable, a part of time is needed to be used in the moving control and adjustment of the moving mirror, the time utilization rate is only about 50%, namely, only half of the time is used for data acquisition in the whole sampling period.
In addition, the linear moving mirror interferometer needs one period of reciprocating movement of the moving mirror for collecting an interference spectrum, and the middle is accompanied with acceleration and deceleration, direction change and other processes, so that the linear moving mirror interferometer cannot be used for quickly measuring the spectrum, has poor real-time performance, limits the application field, and cannot exert the due strong technical advantages in the fields of time resolution spectrum detection, quick phenomenon monitoring and the like.
Wadsworth in 1997 proposed a high-speed lens-turning-mirror interference spectroscopy solution, inheriting the Fourier spectrum transformation interferometer style. The high resolution interference spectrometer based on turning mirror is a Fourier transform spectrometer based on moving mirror, belongs to time modulation type spectrometer, and its working principle is mainly that the turning mirror is rotated to make two beams of light produce variable optical path difference so as to obtain time-variable interference pattern, finally obtain high resolution spectrum information of target. The interference imaging spectrum technology with high stability and high sensitivity becomes a new development direction in the field of high-resolution hyperspectral space remote sensing.
In order to achieve the purpose of simultaneously ensuring the adaptability of the optical system to the environment under the condition of obtaining higher spectral resolution, two basic ideas are mainly: firstly, a structure for improving the stability of a system is designed on the basis of a Michelson interference system; and secondly, improving the spectral resolution of the static interference system by means of hardware improvement, software analysis and the like.
The rotating mirror type high resolution interferometer is mainly characterized in that the rotating mirror type high resolution interferometer can be used for high-speed measurement and vividly recording the complete development change process of a target, is used for observing the change rule of a rapidly-changed target two-dimensional space image along with time, and is mainly applied to the research of the field of ultra-high-speed moving objects such as explosion, shock waves, plasmas and the like.
Up to now, the most realistic choice considered to enable ultra high speed digital recording is the combination of a turning mirror and a CCD camera system. However, this solution still has drawbacks.
In a rotary mirror transmission type high-speed hyperspectral interferometer, the most central problem is the nonlinearity problem generated by the optical path difference of the system. The nonlinearity of the optical path difference brings about the period change and phase error of the interferogram, and also brings about noise and wave number drift to the restored spectrum.
According to the law of refraction, the optical path difference is changed continuously along with the change of the rotation angle of the refraction body, wherein certain inherent nonlinearity exists, which greatly influences the resolution of the spectrometer; meanwhile, the high-speed rotating mirror transmission type interference spectrometer generates optical path difference by means of transmission materials and rotation angles thereof, and the optical path difference nonlinearity is also caused by different refractive indexes of the materials by different wavelength lights; the effective rotation angle range of the rotating mirror is limited, and high requirements are also put on the selection of transmission materials.
Disclosure of Invention
The invention aims to solve the problems of poor stability, low measurement speed and the like of the traditional Michelson interferometer, and the problems of nonlinear optical path difference, high requirements on materials of a counter-rotating mirror, high light energy loss and the like of a high-speed rotating mirror transmission type interference spectrometer, and provides a Fourier transform hyperspectral imaging device based on a high-speed double-reflection rotating mirror.
In order to achieve the above purpose, the technical scheme provided by the invention is as follows: the Fourier transform hyperspectral imaging device based on the high-speed double-reflection rotating mirror is characterized by comprising a collimating mirror, a beam splitter, a first reflecting mirror, a second reflecting mirror, a first hollow retro-reflector, a second hollow retro-reflector, a detector and a double-reflection rotating mirror capable of rotating at high speed; the rotation axis of the double reflecting rotary mirror is parallel to the mirror surfaces of the first reflecting mirror and the second reflecting mirror; the incident light collimated by the collimating lens is incident on the beam splitter and is split into reflected light and transmitted light by the beam splitter; the reflected light sequentially passes through the first reflecting mirror and the double reflecting rotating mirror, then enters the first hollow retro-reflector, and then returns to the double reflecting rotating mirror at 180 degrees with the incident direction of the reflected light entering the first hollow retro-reflector, and then sequentially passes through the double reflecting rotating mirror and the first reflecting mirror to be reflected to the beam splitter; the transmitted light sequentially passes through the second reflecting mirror and the double reflecting rotating mirror, then enters the second hollow retro-reflector, and then returns to the double reflecting rotating mirror at 180 degrees with the incident direction of the reflected light entering the second hollow retro-reflector, and then sequentially passes through the double reflecting rotating mirror and the second reflecting mirror to be reflected to the beam splitter; the reflected light returned to the beam splitter interferes with the transmitted light to form interference light; the double reflection rotating mirror rotates at high speed to generate variable optical path difference between reflected light and transmitted light; the detector is positioned on the optical path of the interference light and is used for receiving the interference light generated by the reflected light and the transmitted light with different optical path differences. The detector obtains an interference spectrum of the interference light changing along with time through the received interference light with different optical path differences; and (3) inverting (filtering and Fourier transforming) the interference spectrum data by adopting a computer to finally obtain a high-resolution spectrum image of the target.
Further, both reflecting surfaces of the double reflecting rotary mirror are plated with high reflecting films.
Further, the semi-transparent and semi-reflective film is plated on the surface of the beam splitter, and an acute angle formed between a straight line where the incident direction of the incident light is located and a plane where the mirror surface of the beam splitter is located is 45 degrees, so that the intensity of the transmitted light is ensured to be the same as that of the reflected light, and the optimal interference effect can be obtained.
Further, the double reflecting rotary mirror is driven by a motor.
Further, the motor can adopt a direct current servo motor, and is preferably a high-speed permanent magnet direct current motor with neodymium iron boron as a magnetic core. Compared with the common direct current servo motor, the high-speed permanent magnet direct current motor using neodymium iron boron as a magnetic core has the characteristics of small volume, high power, high efficiency, high rotating speed, no stall risk and the like.
The working principle of the invention is as follows:
the invention establishes a high resolution reflection type double reflection rotating mirror interference spectrum detection system by utilizing the principle that optical path difference is generated by the double reflection rotating mirrors with inclined double surfaces coated with high reflection films so as to generate coherent interference of light rays emitted by the same target.
The method comprises the steps that incident light enters an interference light splitting system through a front optical system, the beam splitter splits the incident light into two beams of light, and the two beams of light interfere to form interference light; the motor drives the double reflecting mirror to generate interference light with different optical path differences in a high-speed rotation mode, the interference light is received by the detector to obtain an interference spectrum changing along with time, and a high-resolution spectrum image of the target is finally obtained after data inversion.
Compared with the prior art, the invention has the advantages that:
1. compared with a high-speed rotating mirror transmission type interferometer spectrometer, the invention adopts the high-speed double-reflection rotating mirror with the double surfaces coated with the high-reflection film, and light beams do not need to transmit through the mirror body, so that the nonlinear optical path difference caused by the traditional lens type rotating mirror interferometer spectrometer in the high-speed rotation process is avoided, and the defects of high requirements and high light energy loss of the traditional transmission type rotating mirror material are fundamentally overcome.
2. Compared with the traditional linear-movement Michelson interferometer, the invention adopts the double-reflection rotating mirror, so that the servo system is greatly simplified, the rotating speed and the rotating angle of the rotating mirror are easy to control, and an auxiliary light path is not needed, thereby simplifying the system structure; meanwhile, the rotating speed of the rotating moving mirror is easy to improve, so that the real-time performance of the system can be greatly improved, and the optical path difference can be improved, and the resolution of the system can be effectively improved.
3. The invention adopts a symmetrical compact light path design, skillfully adopts the combination of the inclined reflector and the hollow retroreflector, and ensures that the receiving system of the sheared two light beams can strictly reflect the light back along the original direction to complete interference no matter the sheared two light beams are incident at any angle. Even if the environment shakes, the incident light is offset, the hollow retroreflector can still ensure the parallelism of the incident light and the reflected light, so that the stability of the whole interference effect is ensured. The interference light-splitting system is insensitive to vibration and shaking, the influence of shaking on measurement is well overcome, and the reliability and anti-interference capability of the system are improved. Meanwhile, the compact light path design effectively reduces the system volume and reduces the dependence on the processing technology.
4. The double-reflection rotating mirror is the only moving part in the whole system, and can adopt a high-speed permanent magnet direct current motor to drive the rotating mirror; the full-digital servo control system can be adopted to ensure the rotation of the rotary mirror with high stability, so that not only can an initial zero signal for collecting data be provided, but also the uniform rotation of the double-reflecting rotary mirror can be realized. The frequency of data acquisition is consistent with the rotating speed frequency of the rotating mirror, namely, when the rotating mirror rotates for one circle, an acquisition pulse is given, and the synchronous operation of data acquisition and rotating of the rotating mirror can be realized.
5. The invention can obtain the zero signal in one rotation from the rotating shaft of the rotating mirror in a photoelectric mode or an electromagnetic mode so as to ensure the stability of the zero signal.
Drawings
FIG. 1 is a schematic diagram of a spectral imaging apparatus according to an embodiment of the present invention.
The reference numerals in the drawings are as follows:
1-collimating mirror, 2-beam splitter, 3-first reflector, 4-second reflector, 5-first hollow reflector, 6-second hollow reflector, 7-double reflection rotating mirror; 8-detector.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples.
The fourier transform hyperspectral imaging device based on a high-speed double-reflection rotating mirror as shown in fig. 1 comprises a collimating mirror 1, a beam splitter 2, a first reflecting mirror 3, a second reflecting mirror 4, a first hollow retro-reflector 5, a second hollow retro-reflector 6, a detector 8, a double-reflection rotating mirror 7 and a motor (not shown in the figure) for driving the double-reflection rotating mirror 7 to rotate, wherein the motor adopts a high-speed permanent magnet direct current motor with neodymium iron boron as a magnetic core; both reflecting surfaces of the double reflecting rotary mirror 7 are plated with high reflecting films; the rotation axis of the double reflecting rotary mirror 7 is parallel to the mirror surfaces of the first mirror 3 and the second mirror 4; the surface of the beam splitter 2 is plated with a semi-transparent and semi-reflective film, and the incident direction of the incident light forms 45 degrees with the beam splitter 2.
The incident light collimated by the collimator lens 1 is incident on the beam splitter lens 2, and is split into reflected light and transmitted light with the same intensity by the beam splitter lens 2.
The reflected light sequentially passes through the first reflecting mirror 3 and the double reflecting rotating mirror 7 and then enters the first hollow retro-reflector 5, then the reflected light and the incident direction of the reflected light entering the first hollow retro-reflector 5 are turned back to the double reflecting rotating mirror 7 at 180 degrees, and then sequentially passes through the double reflecting rotating mirror 7 and the first reflecting mirror 3 and then is reflected to the beam splitting mirror 2.
The transmitted light sequentially passes through the second reflecting mirror 4 and the double reflecting rotating mirror 7 and then enters the second hollow retro-reflector 6, then the reflected light and the incident direction of the reflected light entering the second hollow retro-reflector 6 are turned back to the double reflecting rotating mirror 7 at 180 degrees, and then sequentially passes through the double reflecting rotating mirror 7 and the second reflecting mirror 4 and then is reflected to the beam splitting mirror 2.
The reflected light returned to the beam splitter 2 interferes with the transmitted light to form interference light; the double reflecting turning mirror 7 is turned at high speed to generate a variable optical path difference between the reflected light and the transmitted light.
The detector 8 is located on the optical path of the interference light, and is used for receiving the interference light generated by the reflected light and the transmitted light with different optical path differences.
The detector 8 obtains an interference spectrum of the interference light changing along with time through the received interference light with different optical path differences; and carrying out inversion filtering and Fourier transformation on the interference spectrum data by adopting a computer, and finally obtaining a high-resolution spectrum image of the target.

Claims (3)

1. A Fourier transform hyperspectral imaging device based on a high-speed double-reflection rotating mirror is characterized in that: the device comprises a collimating mirror (1), a beam splitter (2), a first reflecting mirror (3), a second reflecting mirror (4), a first hollow retro-reflector (5), a second hollow retro-reflector (6), a detector (8) and a double-reflecting rotating mirror (7) capable of rotating at high speed; the rotation axis of the double reflecting rotary mirror (7) is parallel to the mirror surfaces of the first reflecting mirror (3) and the second reflecting mirror (4);
the incident light collimated by the collimating lens (1) is incident on the beam splitter (2) and is split into reflected light and transmitted light by the beam splitter (2);
the reflected light sequentially passes through the first reflecting mirror (3) and the double reflecting rotating mirror (7) and then enters the first hollow retro-reflector (5), then the reflected light is turned back to the double reflecting rotating mirror (7) at 180 degrees, and then sequentially passes through the double reflecting rotating mirror (7) and the first reflecting mirror (3) and is reflected to the beam splitting mirror (2);
the transmitted light sequentially passes through the second reflecting mirror (4) and the double reflecting rotating mirror (7) and then enters the second hollow retro-reflector (6), then the reflected light is turned back to the double reflecting rotating mirror (7) at 180 degrees, and then sequentially passes through the double reflecting rotating mirror (7) and the second reflecting mirror (4) and is reflected to the beam splitting mirror (2);
the reflected light returned to the beam splitter (2) interferes with the transmitted light to form interference light;
the detector (8) is positioned on the optical path of the interference light and is used for receiving the interference light;
the surface of the beam splitter (2) is plated with a semi-transparent and semi-reflective film, and an acute angle formed between a straight line where the incident direction of the incident light is located and a plane where the mirror surface of the beam splitter (2) is located is 45 degrees;
both reflecting surfaces of the double-reflecting rotating mirror (7) are plated with high-reflecting films.
2. The fourier transform hyperspectral imaging apparatus based on high-speed double-reflecting turning mirror as claimed in claim 1, wherein: the double reflecting rotary mirror (7) is driven by a motor.
3. A fourier transform hyperspectral imaging apparatus based on a high speed dual reflection turning mirror as claimed in claim 2 wherein: the motor adopts a direct current servo motor or a high-speed permanent magnet direct current motor taking neodymium iron boron as a magnetic core.
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