CN109297600A - Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror - Google Patents
Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror Download PDFInfo
- Publication number
- CN109297600A CN109297600A CN201811229477.1A CN201811229477A CN109297600A CN 109297600 A CN109297600 A CN 109297600A CN 201811229477 A CN201811229477 A CN 201811229477A CN 109297600 A CN109297600 A CN 109297600A
- Authority
- CN
- China
- Prior art keywords
- mirror
- bireflectance
- light
- tilting mirror
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000701 chemical imaging Methods 0.000 title claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 31
- 230000009466 transformation Effects 0.000 claims description 13
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 4
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 13
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 239000011521 glass Substances 0.000 description 20
- 238000001228 spectrum Methods 0.000 description 16
- 238000003384 imaging method Methods 0.000 description 13
- 230000003595 spectral effect Effects 0.000 description 13
- 230000033001 locomotion Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000013461 design Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004611 spectroscopical analysis Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009615 fourier-transform spectroscopy Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention relates to an overspeed detection hyperspectral imaging technology, and provides a Fourier transform hyperspectral imaging device based on a high-speed double-reflection rotating mirror aiming at the problems of nonlinear optical path difference and the like of a high-speed rotating mirror transmission type interference spectrometer, wherein the Fourier transform hyperspectral imaging device comprises a collimating mirror, a beam splitter, a first reflecting mirror, a second reflecting mirror, a first hollow regression reflector, a second hollow regression reflector, a detector and a double-reflection rotating mirror; incident light is incident on the beam splitter and is divided into reflected light and transmitted light; reflected light enters the first hollow retro reflector after being reflected by the first reflecting mirror and the double-reflection rotating mirror, then is turned back to the double-reflection rotating mirror in 180 degrees, and is reflected to the beam splitter by the double-reflection rotating mirror and the first reflecting mirror; the transmitted light enters a second hollow retro reflector after being reflected by a second reflecting mirror and a double-reflection rotating mirror, and then the reflected light is turned back to the double-reflection rotating mirror in 180 degrees and is reflected to a beam splitter by the double-reflection rotating mirror and the second reflecting mirror; the interference light generated by the reflected light and the transmitted light is received by the detector.
Description
Technical field
The present invention relates to overspeed detection high light spectrum image-forming technology fields, and in particular to a kind of based on high speed bireflectance tilting mirror
Fourier transformation Hyperspectral imaging devices.
Background technique
Imaging spectral technology is the optical detector technology of new generation to grow up in 80 generation of 20th century, it is with the spectrum of object point
Analysis theoretical is core, merged Optical System Design, image objects technology, photodetector, signal processing and information excavating and
The technologies such as transfer spectral information theory.Imaging spectral technology has merged the advantages of spectral technique and imaging technique, can be used to divide
Analysis target object image and spectral information, these image informations and spectral information just constitute the three-dimensional data cube of target object
Body.In three-dimensional data cube, the image outline information of target object can be extracted by imaging spectral technology, it can also be right
Target object carries out fine spectrum analysis；It is widely used in target acquisition, airborne and spaceborne RS, agricultural application, mineral resources
Many aspects such as detection, ocean remote sensing, geological exploration, mitigation forecast, biomedical diagnostic.
Imaging spectrometer there are many classification method, mainly according to the structure of system or obtain the mode difference of spectrum come
Classify.According to spectroscopy mode is obtained, imaging spectrometer can be divided mainly into color dispersion-type, optical filter type and Fourier transformation type three
Major class.
In color dispersion-type imaging spectrometer, the contradictory relation between luminous flux and spectral resolution results in color dispersion-type imaging
There are bigger difficulties in terms of detecting visible and infrared weak radiation for spectrometer.
Filter type imaging spectrometer has the characteristics that design is simple, it is relatively easy to realize, but one frame image is every
A line respectively corresponds different ground target and spectrum, therefore, brings many to the registration and the image procossing in later period of image
It is difficult.
The shortcomings that in view of color dispersion-type and optical filter type imaging spectrometer, since the late nineteen eighties in last century, foreign countries one
A little famous scientific research institutions have started the research of Fourier transformation imaging spectrometer.It has been widely used in chemistry point now
The fields such as analysis, biological study, mineral products investigation, astronautics and airborne remote sensing.Compared with its type spectrometer, have luminous flux high, more
Many advantages, such as channel detects simultaneously, high-resolution, high s/n ratio, and spectral region is wide, and scanning speed is fast.
Realize Fourier Transform Spectroscopy earliest is Michelson's interferometer, although this classical interferometer passes through
Has there are many variants in continuously improving for descendant, but since general index glass sweep type interference spectroscope requires a set of precision
Exigent linear type index glass system, leads to that stability is poor, complex process, brings many difficulties to development, cannot have
Effect solves inclination and shear problem caused by translation mirror.
Index glass sweep type Michelson interference spectrometer generally has the shortcomings that following three:
(1) auxiliary optical path is needed, structure is complicated
In the linear type movable lens interferometer of traditional Michelson interference, if it happens index glass tilts during the motion,
It will seriously affect interference efficiency, or even interference cannot be generated；Its directional requires also extremely strictly, according to a large amount of theoretical meter
Calculation and engineering practice, it is believed that reach satisfied instrument performance, tilt angle should be several rads to index glass during the motion,
Instantaneous velocity uniformity reaches within ± 1%, the two indexs are that instrument development is successfully crucial.Due to the motion process of index glass
Extremely difficult control, therefore setting auxiliary optical path is needed in linear type movable lens interferometer, i.e., it is quasi- to the direction in index glass movement using laser
True property, velocity uniformity, displacement carry out accurate monitoring and amendment.
In addition, linear type movable lens interferometer is very high to the required precision of index glass drive system, index glass is doing reciprocal straight line
When movement, need to remain a constant speed movement, need high-precision servo-system.These technology safeguard measures become entire interference system
Structure is complicated.
(2) stability is poor, and adaptive capacity to environment and anti-interference ability are low
In linear type movable lens interferometer, need index glass at the uniform velocity smooth motion and to inclination shake it is more demanding, so wanting
A set of high-precision index glass drive system is sought.But during actual engineering development, realize that the index glass of superhigh precision is straight
Line drive system is still a problem and the key that straight limit type movable lens interferometer is used widely.For this purpose, the world
Various countries have developed various schemes to solve the problems, such as high-accuracy index glass drive system, such as using diaphragm flexures support, magnetic suspension in succession
Support is based on the schemes such as leaf spring vibratory drive, but also not can solve index glass high accurate straight line always and move problem.
In addition, the reciprocating motion of index glass linear type is stronger to the processing technology dependence of tracks, shake to measurement effect
Influence is extremely significant, causes system stability poor, reduces ability and anti-interference ability that such spectrometer adapts to adverse circumstances,
It cannot work under the particular surroundings such as field complex environment, aerospace remote sensing.
(3) time availability is low, and speed of detection is slow
Since the index glass of linear type movable lens interferometer needs to carry out the motion processes such as acceleration-deceleration, direction change, no
Avoidable there are puppets to sweep, and portion of time must be used in the motion control and adjustment of index glass, and time availability is only 50% or so,
The only half of time acquires for data i.e. within the entire sampling period.
Index glass is needed to move back and forth a cycle in addition, linear type movable lens interferometer acquires a width interference spectrum, due to centre
Along with processes such as acceleration-deceleration, direction changes, so cannot be used for the rapid survey to spectrum, real-time performance is poor, answers it
It is restricted with field, its due powerful technology cannot be played in the fields such as time resolved spectroscopy detection and Fast Phenomena monitoring
Advantage.
Wadsworth proposed high speed lens rotary mirror type interference spectrum technical solution in 1997, inherited Fourier spectrum
Transform interference instrument style.High-resolution interference spectroscope based on tilting mirror, it is the Fourier transform spectrometer, based on index glass, is belonged to
In the spectrometer of time-modulation type, working principle is mainly the optical path difference for relying on the rotation of tilting mirror that two-beam is made to generate variation,
The interference pattern changed over time finally obtains the high-resolution spectral information of target.This kind of high stability, high sensitivity
Interference imaging spectral technology, will become high-resolution ultraphotic spectrum space remote sensing field a new developing direction.
In order to realize the adaptability under conditions of obtaining higher spectral resolution while guaranteeing optical system to environment
Purpose, mainly have two basic ideas: first is that on the basis of Michelson interference system design improve system stability
Structure；Second is that improving the spectral resolution of static interference system by the methods of hardware improvement, software analysis.
One of rotary mirror type high-resolution interferometer is mainly characterized by measuring at a high speed, visually records the complete of target
Development and change process changes with time rule for observing fast-changing target two-dimensional space image, is mainly used in quick-fried
The ultrahigh speeds moving object area researches such as fried, shock wave, plasma.
Up to the present, it is considered that the most realistic choice of ultrahigh speed recording digital code can be achieved to be tilting mirror and CCD camera chain
Combination.However, the program still remains shortcoming.
In the super spectrointerferometer of tilting mirror transmission-type high speed, the problem of core the most is exactly the non-thread of system optical path difference generation
Property problem.The non-linear variation and phase error for bringing the interference pattern period of optical path difference, also to recovery band noise
It drifts about with wave number.
According to the law of refraction, optical path difference changes with the corner of refractile body and constantly changes, wherein there is certain intrinsic
Non-linear, this can greatly influence the resolution ratio of spectrometer；Simultaneously as high-speed rotating mirror transmission-type interference spectroscope is by transmission
Material and its rotational angle generate optical path difference, and different wavelengths of light also brings the non-linear of optical path difference to the difference of Refractive Index of Material；
And effective angle range of tilting mirror is limited, also proposed very high requirement to the selection of transmission material.
Summary of the invention
The purpose of the present invention is overcoming the problems such as stability existing for existing Michelson's interferometer is poor, measuring speed is slow,
And high-speed rotating mirror transmission-type interference spectroscope optical path difference is non-linear, to tilting mirror material requirements, the problems such as big is lost in high, light energy,
And provide a kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror.
To achieve the above object, present invention provide the technical scheme that a kind of Fourier based on high speed bireflectance tilting mirror
Hyperspectral imaging devices are converted, are characterized in that, including collimating mirror, beam splitter, the first reflecting mirror, the second reflecting mirror, the
One hollow retroreflecting device, the second hollow retroreflecting device, detector and can high-speed rotating bireflectance tilting mirror；Bireflectance tilting mirror
Rotation axis be parallel to the mirror surface of the first reflecting mirror and the second reflecting mirror；The incident light beam strikes of collimated mirror collimation are to beam splitter
On, reflected light and transmitted light are divided by beam splitter；Reflected light successively enters first after the first reflecting mirror, the reflection of bireflectance tilting mirror
Hollow retroreflecting device, then reflected light and its incident direction for entering the first hollow retroreflecting device are turned back in 180 ° to double anti-
Tilting mirror is penetrated, then is successively reflexed on beam splitter by bireflectance tilting mirror, the first reflecting mirror；Transmitted light successively through the second reflecting mirror,
Enter the second hollow retroreflecting device after the reflection of bireflectance tilting mirror, then reflected light enters the second hollow retroreflecting device with it
Incident direction is turned back in 180 ° to bireflectance tilting mirror, then is successively reflexed on beam splitter by bireflectance tilting mirror, the second reflecting mirror；
It interferes to form interference light with transmitted light back to the reflected light on beam splitter；Bireflectance tilting mirror high-speed rotation make reflected light and
Transmitted light generates the optical path difference of variation；Detector is located in the optical path of interference light, for receive different optical path differences reflected light and
The interference light that transmitted light generates.Detector passes through the interference light of the different optical path differences received, obtains interference light and changes over time
Interference spectrum；After carrying out inverting (filtering and Fourier transformation) using data of the computer to interference spectrum, target is finally obtained
High-resolution spectroscopy image.
Further, two reflectings surface of above-mentioned bireflectance tilting mirror are coated with highly reflecting films.
Further, the surface of above-mentioned beam splitter is coated with semi-transflective reflective film, and the incident direction place of above-mentioned incident light is straight
Formed acute angle is 45 ° between plane where the mirror surface of line and beam splitter, ensure that the intensity of transmitted light and the intensity of reflected light
It is identical, make it possible to obtain optimal interference effect.
Further, above-mentioned bireflectance tilting mirror is driven by motor.
Further, DC servo motor can be used in above-mentioned motor, preferably using neodymium iron boron as the high-speed permanent magnetic direct current of magnetic core
Motor.Compared with common DC servo motor, there is small in size, power by the high-speed permanent magnetic direct current generator of magnetic core of neodymium iron boron
Greatly, high-efficient, the features such as revolving speed is high, dangerous without stall.
The working principle of the invention:
The present invention generates optical path difference using the bireflectance tilting mirror for tilting two-sided plating highly reflecting films, the light for issuing same target
Line generates the principle of coherent interference, establishes the reflective bireflectance tilting mirror interference spectrum detection system of high-resolution.
Incident light enters interference beam splitting system through preposition optical system, and incident light is divided into two bundles light, two beams by beam splitter
Light interferes to form interference light；Motor drives double mirror to generate the interference light that high speed rotation generates different optical path differences, interference
Light receives the interference spectrum changed over time through detector, and the high-resolution spectroscopy figure of target is finally obtained after data inversion
Picture.
Compared with prior art, the invention has the advantages that
1, compared with high-speed rotating mirror transmission-type interference spectroscope, the present invention is double anti-using the two-sided high speed for being coated with highly reflecting films
Tilting mirror is penetrated, light beam does not need to be transmitted through mirror body, and then avoids conventional lenses formula rotating mirror interference spectrometer in high-speed rotation mistake
Caused optical path difference is non-linear in journey, also fundamentally overcomes traditional transmission-type tilting mirror to tilting mirror material requirements height, light energy
Big defect is lost.
2, compared with the mobile Michelson's interferometer of traditional line, the present invention is greatly simplified using bireflectance tilting mirror
Servo-system, the revolving speed and rotation angle of tilting mirror easily control, and auxiliary optical path are not necessarily to, to simplify system structure；Meanwhile by
It is easily improved in the revolving speed of rotation index glass, can greatly improve the real-time performance of system, and help to improve optical path difference,
To effectively improve the resolution ratio of system.
3, the present invention uses the compact light path design of symmetric form, ingenious to use inclined mirror and the combination of hollow retroreflector,
Ensure that after no matter incident at any angle the two-beam being sheared is can reception system strictly along former direction reflected light it is complete
At interference.Even if environment shakes, so that some offsets have occurred in incident light, hollow retro reflective mirror still can guarantee incident light
Line is parallel with reflection light, to ensure that the stability of whole interference effect.Make to interfere beam splitting system to vibration and shake
It is insensitive, the influence shaken to measurement is preferably overcome, system reliability and anti-interference ability are improved.It is this compact simultaneously
Light path design effectively reduces system bulk, reduces the dependence to processing technology.
4, bireflectance tilting mirror is unique moving component in whole system in the present invention, and high-speed permanent magnetic direct current can be used
Machine provides driving for rotating mirror；Totally digitilized servo-control system can be used and guarantee turning for rotating mirror high stability
It is dynamic, the starting zero signal of acquisition data can be not only provided, can also realize the uniform rotation of bireflectance tilting mirror.Data acquisition
Frequency and the speed-frequency of tilting mirror be consistent, i.e., when tilting mirror rotates a circle, provide an acquisition pulse, may be implemented to adopt
Collect data progress synchronous with tilting mirror rotation.
5, the zero-bit that the present invention can be used that photovoltaic or electromagnetic mode are obtained from the shaft of tilting mirror when rotating a circle is believed
Number, to guarantee the stability of zero signal.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of optical spectrum imaging device one embodiment of the present invention.
Each label is described as follows in figure:
1- collimating mirror, 2- beam splitter, the first reflecting mirror of 3-, the second reflecting mirror of 4-, the first hollow reflector of 5-, in 6- second
Empty reflector, 7- bireflectance tilting mirror；8- detector.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
A kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror as shown in Figure 1, including collimation
Mirror 1, beam splitter 2, the first reflecting mirror 3, the second reflecting mirror 4, the first hollow retroreflecting device 5, the second hollow retroreflecting device 6,
The motor (not shown) that detector 8, bireflectance tilting mirror 7 and driving bireflectance tilting mirror 7 rotate, motor is used is with neodymium iron boron
The high-speed permanent magnetic direct current generator of magnetic core；Two reflectings surface of bireflectance tilting mirror 7 are coated with highly reflecting films；The rotation of bireflectance tilting mirror 7
Shaft axis is parallel to the mirror surface of the first reflecting mirror 3 and the second reflecting mirror 4；The surface of beam splitter 2 is coated with semi-transflective reflective film, described
The incident direction of incident light and beam splitter 2 are at 45 °.
On the incident light beam strikes to beam splitter 2 that collimated mirror 1 collimates, by beam splitter 2 be divided into the identical reflected light of intensity and
Transmitted light.
Reflected light successively enters the first hollow retroreflecting device 5 after the first reflecting mirror 3, bireflectance tilting mirror 7 reflect, then
Reflected light and its incident direction for entering the first hollow retroreflecting device 5 are turned back in 180 ° to bireflectance tilting mirror 7, then are successively passed through
Bireflectance tilting mirror 7, the first reflecting mirror 3 reflex on beam splitter 2.
Transmitted light successively enters the second hollow retroreflecting device 6 after the second reflecting mirror 4, bireflectance tilting mirror 7 reflect, then
Reflected light and its incident direction for entering the second hollow retroreflecting device 6 are turned back in 180 ° to bireflectance tilting mirror 7, then are successively passed through
Bireflectance tilting mirror 7, the second reflecting mirror 4 reflex on beam splitter 2.
It interferes to form interference light with transmitted light back to the reflected light on beam splitter 2；7 high-speed rotation of bireflectance tilting mirror
Reflected light and transmitted light is set to generate the optical path difference of variation.
Detector 8 is located in the optical path of interference light, and the reflected light and transmitted light for receiving different optical path differences generate dry
Relate to light.
Detector 8 passes through the interference light of the different optical path differences received, obtains the interference spectrum that interference light changes over time；It adopts
After carrying out inverting filtering and Fourier transformation with data of the computer to interference spectrum, the high-resolution spectroscopy figure of target is finally obtained
Picture.
Claims (5)
1. a kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror, it is characterised in that: including collimating mirror
(1), beam splitter (2), the first reflecting mirror (3), the second reflecting mirror (4), the first hollow retroreflecting device (5), the second hollow recurrence
Reflector (6), detector (8) and can high-speed rotating bireflectance tilting mirror (7)；The rotation axis of bireflectance tilting mirror (7) is parallel to
The mirror surface of first reflecting mirror (3) and the second reflecting mirror (4)；
On the incident light beam strikes to beam splitter (2) of collimated mirror (1) collimation, reflected light and transmitted light are divided by beam splitter (2)；
Reflected light successively enters the first hollow retroreflecting device (5) after the first reflecting mirror (3), bireflectance tilting mirror (7) reflection, so
Back reflection light is turned back in 180 ° to bireflectance tilting mirror (7), then is successively reflexed to by bireflectance tilting mirror (7), the first reflecting mirror (3)
On beam splitter (2)；
Transmitted light successively enters the second hollow retroreflecting device (6) after the second reflecting mirror (4), bireflectance tilting mirror (7) reflection, so
Back reflection light is turned back in 180 ° to bireflectance tilting mirror (7), then is successively reflexed to by bireflectance tilting mirror (7), the second reflecting mirror (4)
On beam splitter (2)；
It interferes to form interference light with transmitted light back to the reflected light on beam splitter (2)；
Detector (8) is located in the optical path of interference light, for receiving interference light.
2. a kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror according to claim 1, special
Sign is: the surface of the beam splitter (2) is coated with semi-transflective reflective film, straight line and beam splitting where the incident direction of the incident light
Formed acute angle is 45 ° between plane where the mirror surface of mirror (2).
3. a kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror according to claim 1 or claim 2,
Be characterized in that: two reflectings surface of the bireflectance tilting mirror (7) are coated with highly reflecting films.
4. a kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror according to claim 3, special
Sign is: the bireflectance tilting mirror (7) is driven by motor.
5. a kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror according to claim 4, special
Sign is: the motor uses DC servo motor or using neodymium iron boron as the high-speed permanent magnetic direct current generator of magnetic core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811229477.1A CN109297600B (en) | 2018-10-22 | 2018-10-22 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811229477.1A CN109297600B (en) | 2018-10-22 | 2018-10-22 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109297600A true CN109297600A (en) | 2019-02-01 |
| CN109297600B CN109297600B (en) | 2024-04-05 |
Family
ID=65157505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811229477.1A Active CN109297600B (en) | 2018-10-22 | 2018-10-22 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109297600B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109991731A (en) * | 2019-04-11 | 2019-07-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of light path changes device and optical interference system |
| CN113640241A (en) * | 2021-08-20 | 2021-11-12 | 中国科学院空天信息创新研究院 | Oscillating Fourier transform infrared spectrum device |
| CN113654659A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Swinging Fourier transform infrared spectrum device with parallel reflector group |
| CN113654658A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Parallel reflector group rotary Fourier transform infrared spectrum device |
| CN113740287A (en) * | 2021-09-15 | 2021-12-03 | 中国科学院空天信息创新研究院 | Rotating parallel mirror type Fourier transform infrared spectrum device |
| CN114136442A (en) * | 2021-11-23 | 2022-03-04 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010088023A2 (en) * | 2009-01-27 | 2010-08-05 | University Of Florida Research Foundation Inc. | Mirror-tilt-insensitive fourier transform spectrometer |
| CN102759402A (en) * | 2012-07-23 | 2012-10-31 | 北京理工大学 | Rotary Fourier transform interference imaging spectrometer |
| CN103323117A (en) * | 2013-05-30 | 2013-09-25 | 湖北久之洋红外***股份有限公司 | Mobile broadband Fourier transform infrared imaging spectrometer |
| KR101542894B1 (en) * | 2014-04-18 | 2015-08-07 | 국방과학연구소 | Optimized Method of Rotary Interferometer for Infrared Spectrometry |
| CN106153196A (en) * | 2016-06-16 | 2016-11-23 | 电子科技大学 | Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer |
| CN209043460U (en) * | 2018-10-22 | 2019-06-28 | 中国科学院西安光学精密机械研究所 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
-
2018
- 2018-10-22 CN CN201811229477.1A patent/CN109297600B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010088023A2 (en) * | 2009-01-27 | 2010-08-05 | University Of Florida Research Foundation Inc. | Mirror-tilt-insensitive fourier transform spectrometer |
| CN102759402A (en) * | 2012-07-23 | 2012-10-31 | 北京理工大学 | Rotary Fourier transform interference imaging spectrometer |
| CN103323117A (en) * | 2013-05-30 | 2013-09-25 | 湖北久之洋红外***股份有限公司 | Mobile broadband Fourier transform infrared imaging spectrometer |
| KR101542894B1 (en) * | 2014-04-18 | 2015-08-07 | 국방과학연구소 | Optimized Method of Rotary Interferometer for Infrared Spectrometry |
| CN106153196A (en) * | 2016-06-16 | 2016-11-23 | 电子科技大学 | Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer |
| CN209043460U (en) * | 2018-10-22 | 2019-06-28 | 中国科学院西安光学精密机械研究所 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
Non-Patent Citations (2)
| Title |
|---|
| 张伟;韩军;: "一类新型时间调制傅里叶变换成像光谱技术干涉仪方案", 科技信息, no. 07 * |
| 魏儒义;张学敏;周锦松;周泗忠;高晓惠;卫俊霞;王乐;: "反射式转镜干涉光谱仪光程差计算", 光学学报, no. 07 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109991731A (en) * | 2019-04-11 | 2019-07-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of light path changes device and optical interference system |
| CN113640241A (en) * | 2021-08-20 | 2021-11-12 | 中国科学院空天信息创新研究院 | Oscillating Fourier transform infrared spectrum device |
| CN113640241B (en) * | 2021-08-20 | 2023-03-14 | 中国科学院空天信息创新研究院 | Oscillating Fourier transform infrared spectrum device |
| CN113654659A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Swinging Fourier transform infrared spectrum device with parallel reflector group |
| CN113654658A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Parallel reflector group rotary Fourier transform infrared spectrum device |
| CN113654658B (en) * | 2021-08-30 | 2023-08-01 | 中国科学院空天信息创新研究院 | Rotary Fourier transform infrared spectrum device of parallel reflecting mirror group |
| CN113654659B (en) * | 2021-08-30 | 2023-08-01 | 中国科学院空天信息创新研究院 | Swinging Fourier transform infrared spectrum device of parallel reflecting mirror group |
| CN113740287A (en) * | 2021-09-15 | 2021-12-03 | 中国科学院空天信息创新研究院 | Rotating parallel mirror type Fourier transform infrared spectrum device |
| CN114136442A (en) * | 2021-11-23 | 2022-03-04 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
| CN114136442B (en) * | 2021-11-23 | 2024-05-14 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109297600B (en) | 2024-04-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109297600A (en) | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror | |
| CN102759402B (en) | Rotary Fourier transform interference imaging spectrometer | |
| CN209043460U (en) | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror | |
| GB1400253A (en) | Gauging dimensions | |
| CN103076090B (en) | Laser interferometer optical path difference location method and system | |
| CN110132179B (en) | Biorthogonal internal incidence type laser self-mixing micro-angle measuring system and measuring method | |
| CN102426058B (en) | Static interference imaging polarizer and method for acquiring polarization information of target | |
| CN104713649B (en) | A kind of Fourier transform spectrometer, interferometer | |
| CN103162645B (en) | A kind of rolling measurement method and apparatus measured based on the ellipse degree of bias | |
| CN108519153A (en) | The parallel pendulum mirror Fourier Transform Infrared Spectrometer of binary channels | |
| CN108917643A (en) | Three dimensional shape measurement system and method based on the scanning ranging of double light combs | |
| CN102135449A (en) | Fourier transform spectrum polarization detection method and system for high-speed rotating mirror | |
| CN203069274U (en) | Laser interferometer optical path difference positioning system | |
| CN110631513A (en) | Incident type angle sensing measuring device and method in bi-orthogonal plane mirror based on multi-longitudinal-mode self-mixing effect | |
| CN112432766B (en) | Laser scanning galvanometer performance detection method | |
| CN104155003B (en) | High stability tilting mirror interferometer | |
| CN212780503U (en) | Fourier near infrared spectrum interferometer and instrument for online material detection | |
| CN210166031U (en) | High-speed imaging spectrometer based on scanning galvanometer | |
| CN211697497U (en) | Time-domain optical coherence tomography system | |
| CN201331381Y (en) | High resolution reflection type high speed rotating mirror interference spectrometer | |
| CN114136442B (en) | Interferometer based on continuous rotation and working method thereof | |
| CN102829883B (en) | Polarization laser wavelength meter | |
| CN202793602U (en) | Polarization laser wavelength meter | |
| CN113654658B (en) | Rotary Fourier transform infrared spectrum device of parallel reflecting mirror group | |
| CN113640241B (en) | Oscillating Fourier transform infrared spectrum device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |