CN109292452B - Silicon wafer unloading device - Google Patents
Silicon wafer unloading device Download PDFInfo
- Publication number
- CN109292452B CN109292452B CN201811446123.2A CN201811446123A CN109292452B CN 109292452 B CN109292452 B CN 109292452B CN 201811446123 A CN201811446123 A CN 201811446123A CN 109292452 B CN109292452 B CN 109292452B
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- China
- Prior art keywords
- silicon wafer
- basket
- silicon
- discharging
- power device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 180
- 239000010703 silicon Substances 0.000 title claims abstract description 180
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 179
- 235000012431 wafers Nutrition 0.000 claims abstract description 152
- 238000007599 discharging Methods 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 35
- 238000003860 storage Methods 0.000 claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 description 10
- 238000005336 cracking Methods 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/34—Devices for discharging articles or materials from conveyor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a silicon wafer unloading device which comprises a material basket, wherein the material basket is configured to receive silicon wafers from a front production line, a material basket fixing device is configured to fix the material basket, a material basket carrying device is configured to carry the material basket to the material basket fixing device, a silicon wafer discharging device is configured to separate the silicon wafers from the material basket, a silicon wafer storage device is configured to store the silicon wafers, and the silicon wafer carrying device receives the silicon wafers separated by the silicon wafer discharging device and carries the silicon wafers into the silicon wafer storage device.
Description
Technical Field
The invention relates to a silicon wafer running device, in particular to a silicon wafer unloading device.
Background
The silicon wafer is obtained from the front channel by manpower in the mode of manual unloading or manual unloading, and a piece of silicon wafer is inserted into a silicon wafer material box.
In the process of manual material conveying, because the silicon wafer is extremely thin and fragile, the phenomenon of cracking or hidden cracking occurs in the silicon wafer conveying process easily because of unstable force application by manpower, and the material conveying mode has high requirements on workers and is difficult to work for a long time, so that the production efficiency is also very low.
Disclosure of Invention
In order to ensure the stability of silicon wafer unloading and improve the working efficiency of silicon wafer unloading, the technical scheme of the invention provides a silicon wafer unloading device. The technical proposal is as follows:
In a first aspect, the invention provides a silicon wafer unloading device, comprising a basket, wherein the basket is configured to receive silicon wafers from a previous production line, a basket fixing device is configured to fix the basket, a basket carrying device is configured to carry the basket to the basket fixing device, a silicon wafer discharging device is configured to separate the silicon wafers from the basket, a silicon wafer storage device is configured to store the silicon wafers, and the silicon wafer carrying device receives the silicon wafers separated by the silicon wafer discharging device and carries the silicon wafers into the silicon wafer storage device.
Through setting up of basket handling device and silicon chip handling device, realized the transport action of basket and silicon chip, avoided the manual work to the transport of basket and silicon chip, separated the silicon chip from the basket through the silicon chip goes out basket device simultaneously, avoided the manual work to separate the acquisition to the silicon chip to avoided manual operation, guaranteed the stability that the silicon chip unloaded, improved the work efficiency that the silicon chip unloaded.
In a first possible implementation manner of the first aspect, the material basket includes at least four limit posts and at least two baffles, the limit posts are installed between the baffles, and a plurality of grooves matched with the thickness of the single silicon wafer are formed in the limit posts.
Through the design of spacing post for the position of silicon chip in the basket can be fixed, thereby the acquisition of silicon chip handling device to the silicon chip of being convenient for.
With reference to the first aspect and the first possible implementation manner of the first aspect, in a second possible implementation manner of the first aspect, the number of the limiting columns is four, two of the limiting columns are guiding limiting columns, and the remaining two limiting columns are accommodating limiting columns.
With reference to the first aspect to the second possible implementation manner of the first aspect, in a third possible implementation manner of the first aspect, the basket fixing device includes a fixed wheel and a fixed wheel power device, and the fixed wheel is installed at an action end of the fixed wheel power device.
The fixed wheel power device drives the fixed wheel to press the material basket, so that the position of the material basket can be determined, the moving position of the silicon wafer carrying device can be determined conveniently, and the stability of the silicon wafer unloading device is greatly improved.
With reference to the third possible implementation manner of the first aspect, in a fourth possible implementation manner of the first aspect, the basket conveying device includes a basket conveying clamping jaw and a basket clamping jaw power device, and the basket clamping jaw power device drives the basket conveying clamping jaw to reciprocate along three axes.
Through the position that the basket transport clamping jaw pressed from both sides tightly and removed the basket, realized that the basket is carried to basket fixing device from preceding process, therefore increased the compatibility of silicon chip unloading device and preceding station.
With reference to the first aspect to the fourth possible implementation manner of the first aspect, in a fifth possible implementation manner of the first aspect, the silicon wafer discharging device includes a silicon wafer discharging head and a silicon wafer discharging power device that drives the silicon wafer discharging head to act, and the silicon wafer discharging power device drives the silicon wafer discharging head to reciprocate along three axes.
Through the setting of silicon chip basket discharging device for the silicon chip can be separated from the basket, thereby be convenient for silicon chip handling device acquire the silicon chip in the basket, through the setting of silicon chip basket discharging power device, realized that the silicon chip of silicon chip basket discharging head to the silicon chip of basket each position can both be separated, greatly increased the stability of silicon chip unloading device.
With reference to the first aspect to the fifth possible implementation manner of the first aspect, in a sixth possible implementation manner of the first aspect, the silicon wafer outlet basket head is provided with a plurality of grooves matched with positions of silicon wafers in the material basket.
Through the arrangement of the grooves on the silicon wafer basket discharging head, the silicon wafer can be embedded into the grooves on the silicon wafer basket discharging head when the silicon wafer basket is discharged, so that the stability of the silicon wafer in the process of discharging the silicon wafer basket is ensured.
With reference to the first aspect to the sixth possible implementation manner of the first aspect, in a seventh possible implementation manner of the first aspect, the silicon wafer handling device includes a silicon wafer clamping plate and a clamping plate power device that drives the silicon wafer clamping plate to act, and a groove matched with the silicon wafer is formed on the silicon wafer clamping plate.
Through the setting of the recess on the silicon chip clamping plate for the silicon chip can imbed in the recess on the silicon chip clamping plate when being tightened, and then can stabilize the stability of the silicon chip clamped in the clamping plate.
With reference to the first aspect to the sixth possible implementation manner of the first aspect, in a seventh possible implementation manner of the first aspect, the silicon wafer storage device includes a magazine and a lifting and traversing power device that drives the magazine to act.
The lifting and transverse moving power device drives the material box to lift and transversely move, so that the silicon wafer storage device can move along with the silicon wafer carrying device, the wafer unloading speed of the silicon wafer unloading device is further saved, and the working efficiency of the silicon wafer unloading device is finally improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention, wherein:
FIG. 1 is a schematic perspective view of a basket according to an embodiment of the present invention;
fig. 2 is a schematic perspective view of a cartridge according to an embodiment of the present invention;
FIG. 3 is a schematic perspective view of a silicon wafer unloading device according to an embodiment of the present invention;
FIG. 4 is a schematic perspective view of another angle of FIG. 3;
FIG. 5 is a schematic perspective view of a basket and basket clamping jaw according to an embodiment of the present invention;
FIG. 6 is a partial view of the position A of FIG. 3;
FIG. 7 is a partial view of the position B of FIG. 3;
FIG. 8 is a schematic diagram of a three-dimensional structure of a silicon wafer basket head in an embodiment of the invention;
FIG. 9 is a partial view of the position C of FIG. 8;
FIG. 10 is a partial view of the D position of FIG. 1;
fig. 11 is a partial view of the E position of fig. 3.
Detailed Description
The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
The silicon wafer is obtained from the front channel by manpower in the mode of manual unloading or manual unloading, and a piece of silicon wafer is inserted into a silicon wafer material box.
In the process of manual material conveying, because the silicon wafer is extremely thin and fragile, the phenomenon of cracking or hidden cracking occurs in the silicon wafer conveying process easily because of unstable force application by manpower, and the material conveying mode has high requirements on workers and is difficult to work for a long time, so that the production efficiency is also very low.
In order to ensure the stability of silicon wafer unloading and improve the working efficiency of silicon wafer unloading, the invention provides a silicon wafer unloading device, which has the following technical scheme:
the invention is described in further detail below with reference to fig. 1 to 10.
As shown in fig. 2 and 3, the present invention provides a wafer unloading device, comprising a basket 1, the basket 1 is configured to receive a wafer from a previous production line, the basket fixing device 2 is configured to fix the basket 1, the basket transporting device 3 is configured to transport the basket 1 to the basket fixing device 2, the wafer discharging device 4 is configured to separate the wafer from the basket 1, the wafer storage device 5 is configured to store the wafer, the wafer transporting device 6 receives the wafer separated by the wafer discharging device 4 and carries the wafer into the wafer storage device 5.
Through the setting of basket handling device 3 and silicon chip handling device 6, realized the transport action of basket 1 and silicon chip, avoided the manual work to the transport of basket 1 and silicon chip, simultaneously separated the silicon chip from basket 1 through silicon chip play basket device 4, avoided the manual work to separate the acquisition to the silicon chip to avoided manual operation, guaranteed the stability that the silicon chip unloaded, improved the work efficiency that the silicon chip unloaded.
As shown in fig. 1 and 10, the material basket 1 comprises at least four limit posts 12 and at least two baffle plates 11, wherein the limit posts 12 are installed between the baffle plates 11, a plurality of grooves matched with the thickness of a single silicon wafer are formed in the limit posts 12, in the single material basket 1, the number of the limit posts 12 is four, two limit posts 12 are guide limit posts 12, and the remaining two limit posts 12 are holding limit posts 12.
Through the design of the limit column 12, the position of the silicon wafer in the material basket 1 is fixed, so that the silicon wafer carrying device 6 is convenient for acquiring the silicon wafer.
As shown in fig. 11, the basket fixing device 2 includes a fixed wheel 21 and a fixed wheel power device 22, and the fixed wheel 21 is mounted at the action end of the fixed wheel power device 22.
The fixed wheel power device 22 drives the fixed wheel 21 to press the material basket 1, so that the position of the material basket 1 can be determined, the moving position of the silicon wafer carrying device 6 can be determined conveniently, the stability of the silicon wafer unloading device is greatly improved, and in the embodiment, the fixed wheel power device is a telescopic cylinder.
As shown in fig. 3, 4 and 5, the basket carrying device 3 includes a basket carrying jaw 31 and a basket jaw power device 32, the basket jaw power device 32 drives the basket carrying jaw 31 to reciprocate along three axes, in this embodiment, the basket jaw power device 32 is a three-axis moving platform, and of course, there is a telescopic cylinder on the basket carrying jaw 31 to drive the jaw to open and close.
By clamping and moving the position of the basket 1 by the basket carrying clamping jaw 31, the basket 1 is transported to the basket fixing device 2 from the previous working procedure, and therefore the compatibility of the silicon wafer unloading device and the previous working position is increased.
As shown in fig. 3, 7, 8 and 9, the silicon wafer discharging device 4 includes a silicon wafer discharging head 42 and a silicon wafer discharging power device 41 driving the silicon wafer discharging head 42 to act, the silicon wafer discharging power device 41 drives the silicon wafer discharging head 42 to reciprocate along three axes, the silicon wafer discharging head 42 is provided with a plurality of grooves matched with positions of silicon wafers in the material basket 1, in this embodiment, the silicon wafer discharging power device 41 is a combination arrangement of a lifting cylinder and a traversing servo motor unit, and the selection of the silicon wafer discharging power device 41 is not limited.
Through the setting of silicon chip basket discharging device 4 for the silicon chip can be separated from basket 1, thereby be convenient for silicon chip handling device 6 acquire the silicon chip in basket 1, through the setting of silicon chip basket discharging power device 41, realized that silicon chip basket discharging head 42 can both separate the silicon chip of basket 1 each position, greatly increased the stability of silicon chip unloading device.
Through the arrangement of the grooves on the silicon wafer basket outlet head 42, the silicon wafer can be embedded into the grooves on the silicon wafer basket outlet head 42 when the silicon wafer basket is discharged, so that the stability of the silicon wafer in the process of discharging the silicon wafer basket is ensured.
As shown in fig. 3 and 6, the silicon wafer handling device 6 includes a silicon wafer clamping plate 61 and a clamping plate power device 62 for driving the silicon wafer clamping plate 61 to act, in this embodiment, the clamping plate power device 62 is provided with two telescopic cylinders, the telescopic cylinders drive the two silicon wafer clamping plates 61 to perform clamping action, and a groove matched with the silicon wafer is formed on the silicon wafer clamping plate 61.
Through the arrangement of the grooves on the silicon wafer clamping plate 61, the silicon wafer can be embedded into the grooves on the silicon wafer clamping plate 61 when being clamped, and then the stability of the clamped silicon wafer in the clamping plate can be stabilized.
As shown in fig. 2, 3 and 4, the silicon wafer storage device 5 includes a material box 51 and a lifting and traversing power device 52 for driving the material box 51 to act, in this embodiment, the lifting and traversing power device 52 is assembled by matching a servo motor with a screw, and the selection of the lifting and traversing power device 52 is not limited.
The lifting and transverse moving power device drives the material box to lift and transversely move, so that the silicon wafer storage device can move along with the silicon wafer carrying device, the wafer unloading speed of the silicon wafer unloading device is further saved, and the working efficiency of the silicon wafer unloading device is finally improved.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The terms "first," "second," and the like in the description and in the claims, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Also, the terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "one end" and "the other end" merely indicate relative positional relationships, and when the absolute positional relationship of the object to be described is changed, the positional relationship to be associated is changed accordingly. Further, the term "at least one" as used herein includes one, two or more than two.
Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
It is to be understood that the invention is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the invention is limited only by the appended claims.
Claims (6)
1. A silicon wafer unloading device is characterized by comprising
A basket configured to receive silicon wafers from a front end of the production line,
A basket fixing device configured to fix the basket,
A basket carrying device configured to carry a basket to the basket fixing device,
A silicon wafer basket discharging device which is configured to separate silicon wafers from the material basket,
A silicon wafer storage device configured to store a silicon wafer,
The silicon wafer carrying device receives the silicon wafers separated by the silicon wafer basket discharging device and carries the silicon wafers into the silicon wafer storage device;
The basket fixing device comprises a fixed wheel and a fixed wheel power device, and the fixed wheel is arranged at the action end of the fixed wheel power device;
The silicon wafer discharging device comprises a silicon wafer discharging head and a silicon wafer discharging power device for driving the silicon wafer discharging head to act, and the silicon wafer discharging power device drives the silicon wafer discharging head to reciprocate along three axes;
the silicon wafer basket outlet head is provided with a plurality of grooves matched with the positions of the silicon wafers in the material basket.
2. The silicon wafer unloading device according to claim 1, wherein the material basket comprises at least four limit posts and at least two baffle plates, the limit posts are arranged between the baffle plates, and a plurality of grooves matched with the thickness of a single silicon wafer are formed in the limit posts.
3. The wafer unloading device of claim 2, wherein the number of the limit posts is four, two of the limit posts are guide limit posts, and the remaining two limit posts are accommodating limit posts.
4. The silicon wafer unloading device according to claim 1, wherein the basket carrying device comprises a basket carrying clamping jaw and a basket clamping jaw power device, and the basket clamping jaw power device drives the basket carrying clamping jaw to reciprocate along three axes.
5. The silicon wafer unloading device according to claim 1, wherein the silicon wafer carrying device comprises a silicon wafer clamping plate and a clamping plate power device for driving the silicon wafer clamping plate to act, and a groove matched with the silicon wafer is formed in the silicon wafer clamping plate.
6. The silicon wafer unloading device according to claim 1, wherein the silicon wafer storage device comprises a material box and a lifting and transverse moving power device for driving the material box to act.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811446123.2A CN109292452B (en) | 2018-11-29 | 2018-11-29 | Silicon wafer unloading device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811446123.2A CN109292452B (en) | 2018-11-29 | 2018-11-29 | Silicon wafer unloading device |
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| Publication Number | Publication Date |
|---|---|
| CN109292452A CN109292452A (en) | 2019-02-01 |
| CN109292452B true CN109292452B (en) | 2024-06-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811446123.2A Active CN109292452B (en) | 2018-11-29 | 2018-11-29 | Silicon wafer unloading device |
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| CN (1) | CN109292452B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850830B (en) * | 2019-11-20 | 2023-03-14 | 常州捷佳创精密机械有限公司 | Slot type equipment for automatic process treatment and formula scheduling method thereof |
| CN111206237A (en) * | 2020-02-19 | 2020-05-29 | 无锡市江松科技有限公司 | ALD silicon chip loading and unloading device |
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| CN201699001U (en) * | 2010-06-30 | 2011-01-05 | 英利能源（中国）有限公司 | Silicon wafer basket conveying line |
| CN203325863U (en) * | 2013-05-20 | 2013-12-04 | 嘉兴博科精密机械有限公司 | Silicon chip bearing box |
| JP3189816U (en) * | 2014-01-20 | 2014-04-03 | ウー，チャン−リンＷＵ， Ｃｈａｎ−Ｌｉｎ | Drawer basket frame |
| CN205471575U (en) * | 2016-02-03 | 2016-08-17 | 广州东智自动化设计有限公司 | Automatic mark system of beating of timber |
| CN107887314A (en) * | 2017-11-07 | 2018-04-06 | 河北晶龙阳光设备有限公司 | A kind of silicon chip transhipment loading attachment and the silicon chip transhipment stowage based on it |
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN209242135U (en) * | 2018-11-29 | 2019-08-13 | 无锡市江松科技有限公司 | Silicon wafer wafer-handling device |
-
2018
- 2018-11-29 CN CN201811446123.2A patent/CN109292452B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201699001U (en) * | 2010-06-30 | 2011-01-05 | 英利能源（中国）有限公司 | Silicon wafer basket conveying line |
| CN203325863U (en) * | 2013-05-20 | 2013-12-04 | 嘉兴博科精密机械有限公司 | Silicon chip bearing box |
| JP3189816U (en) * | 2014-01-20 | 2014-04-03 | ウー，チャン−リンＷＵ， Ｃｈａｎ−Ｌｉｎ | Drawer basket frame |
| CN205471575U (en) * | 2016-02-03 | 2016-08-17 | 广州东智自动化设计有限公司 | Automatic mark system of beating of timber |
| CN107887314A (en) * | 2017-11-07 | 2018-04-06 | 河北晶龙阳光设备有限公司 | A kind of silicon chip transhipment loading attachment and the silicon chip transhipment stowage based on it |
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN209242135U (en) * | 2018-11-29 | 2019-08-13 | 无锡市江松科技有限公司 | Silicon wafer wafer-handling device |
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| CN109292452A (en) | 2019-02-01 |
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