CN109282866A - A kind of high-precision gas micro-flowmeter and gas flow measurement method - Google Patents
A kind of high-precision gas micro-flowmeter and gas flow measurement method Download PDFInfo
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- CN109282866A CN109282866A CN201811194862.7A CN201811194862A CN109282866A CN 109282866 A CN109282866 A CN 109282866A CN 201811194862 A CN201811194862 A CN 201811194862A CN 109282866 A CN109282866 A CN 109282866A
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- gas
- capacitor
- gasmetry
- solenoid valve
- air inlet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
- G01F1/58—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters
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- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
The present invention provides a kind of high-precision gas micro-flowmeter and gas flow measurement method, gas micro-flowmeter includes flowmeter shell, and gasmetry capacitor, air inlet pipe and an air outlet pipe are provided in flowmeter shell.Solenoid valve gas port is provided in the middle part of air inlet pipe, the rear portion of air inlet pipe is provided with capacitor gas port.It is connected among the lower part of gasmetry capacitor with capacitor gas port, the lower part of escape pipe is connected with solenoid valve gas port, solenoid valve is provided in escape pipe, solenoid valve can control the logical of escape pipe and close, under test gas enters gasmetry capacitor from the capacitor gas port of air inlet pipe, and gasmetry capacitor capacitance value is caused to change.The present invention passes through the variation of gasmetry capacitor capacitance value, realize the purpose of the flow measurement of micrometeor gas in the unit time, the perception of gasmetry capacitor is sensitive, and capacitance variation speed is fast, therefore the flow measurement precision of micrometeor gas is very high and rapid, is suitable for accurate measurement.
Description
Technical field
The present invention relates to gas flowmeter fields, and in particular to a kind of high-precision gas micro-flowmeter and gas flow measurement
Method.
Background technique
Gas flowmeter is the equipment of meter gaseous flow, is mounted on the gas flow for recording and flowing through in pipeline, gas flow
It is an important parameter in industrial production.The applications such as industrial processes, scientific experiment and gas for domestic use are directed to
To flow measurement.High-precision gas micro-flowmeter is mainly used for the measurement of gas micro, and volumetric values are gas micro-flowmeter
One of main working parameters determine the measurement accuracy of gas micro, have good flow measurement stability, and principle is clear
It is clear, it is used widely as the flow standard table in gas measuring instrument or gas flow standard device.
Having when gas flow is very small or in gas can all cause flowmeter without metering when impurity, metering is inaccurate, even
Damage.And the measurement of gas flow generally requires a limited range, be otherwise unable to satisfy measurement needs, popularization and application by
To great limitation.To adapt to the specific demand in industrial stokehold measurement, saving manufacturing cost and simplifying pipe-line system, hair
A kind of condenser type gas flowmeter of bright wide-range by the precision for greatly improving the measurement of gas flow and simplifies pipeline system
System, and have that more gases can be surveyed, multrirange is adjustable, high-acruracy survey, the pressure loss are small, high reliablity, installation are simple, operation
The features such as facilitating is invented significant.
Summary of the invention
In view of the problems of the existing technology, there is provided a kind of high-precision gas micrometeors for the first object of the present invention
Meter, measurement accuracy are high.
The following technical solution is employed by the present invention:
A kind of high-precision gas micro-flowmeter, including flowmeter shell are provided with gasmetry electricity in flowmeter shell
Container, air inlet pipe and an air outlet pipe are provided with solenoid valve gas port in the middle part of the air inlet pipe, and the rear portion of air inlet pipe is provided with capacitor
Gas port；
It is connected among the lower part of the gasmetry capacitor with capacitor gas port, the lower part of escape pipe and solenoid valve air guide
Hole is connected, and solenoid valve is provided in escape pipe, solenoid valve can control the logical of escape pipe and close；
Under test gas enters gasmetry capacitor from the capacitor gas port of air inlet pipe, causes gasmetry capacitor capacitance
Value variation.
Preferably, the gasmetry capacitor includes two parallel metal plates, is had between two parallel metal plates
There is dielectric in gap in gap；The capacitor gas port is connected to the centre in the next metal plate.
There is provided a kind of gas flow measurement methods of high-precision gas micro-flowmeter for the second object of the present invention.
A kind of gas flow measurement method of high-precision gas micro-flowmeter, comprising the following steps:
Step 1: closing the solenoid valve in escape pipe, under test gas enters from air inlet pipe；
Step 2: under test gas enters gasmetry capacitor from the capacitor gas port in air inlet pipe, under test gas
It flows into, under the action of gas pressure intensity, the distance between two parallel metal plates of gasmetry capacitor reduce, and cause gas
The variation of bulk measurement capacitor capacitance value calculates the volume of inflow gas, Jin Erji by the variation of measurement capacitance
Calculate the gas flow of unit time；
Step 3: after measurement, opening solenoid valve, gas into escape pipe and is smoothly arranged by solenoid valve gas port
Out；
Step 4: executing step 1 repeatedly to 3, carry out gas flow measurement, averaged, to calculate under test gas
Flows per unit time.
The invention has the advantages that:
The present invention passes through the variation of gasmetry capacitor capacitance value, realizes that the flow of micrometeor gas in the unit time is surveyed
The purpose of amount, the perception of gasmetry capacitor is sensitive, and capacitance variation speed is fast, therefore the flow measurement precision of micrometeor gas
It is very high and rapid, it is suitable for accurate measurement, is averaged by repeatedly measuring, calculated gas flow is more accurate, this
The gas flowmeter that invention provides has fabulous application value.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of high-precision gas micro-flowmeter.
Specific embodiment
A specific embodiment of the invention is described further in the following with reference to the drawings and specific embodiments:
Embodiment 1
In conjunction with Fig. 1, a kind of high-precision gas micro-flowmeter, including flowmeter shell 1, it is provided in flowmeter shell 1
Gasmetry capacitor 2, air inlet pipe 3 and escape pipe 4.
Solenoid valve gas port 5 is provided in the middle part of air inlet pipe, the rear portion of air inlet pipe is provided with capacitor gas port 6；
It is connected among the lower part of gasmetry capacitor 2 with capacitor gas port 6, the lower part of escape pipe 4 and solenoid valve air guide
Hole 5 is connected, and solenoid valve 7 is provided in escape pipe 4, solenoid valve can control the logical of escape pipe and close.
Under test gas enters gasmetry capacitor from the capacitor gas port of air inlet pipe, causes gasmetry capacitor capacitance
Value variation.
Specifically, gasmetry capacitor includes two parallel metal plates, there is gap between two parallel metal plates,
There is dielectric in gap.
Capacitor gas port is connected to the centre in the next metal plate.
Embodiment 2
A kind of gas flow measurement method of high-precision gas micro-flowmeter, comprising the following steps:
Step 1: closing the solenoid valve 7 in escape pipe 4, under test gas enters from air inlet pipe 3.
Step 2: under test gas enters gasmetry capacitor 2 from the capacitor gas port 6 in air inlet pipe, under test gas
Inflow, under the action of gas pressure intensity, the distance between two parallel metal plates of gasmetry capacitor reduce, cause
The variation of gasmetry capacitor capacitance value calculates the volume of inflow gas by the variation of measurement capacitance, in turn
Calculate the gas flow of unit time.
Step 3: after measurement, opening solenoid valve 7, gas is by solenoid valve gas port 5, into escape pipe 4 and smoothly
Discharge.
Step 4: executing step 1 repeatedly to 3, carry out gas flow measurement, averaged, to calculate under test gas
Flows per unit time.
Certainly, the above description is not a limitation of the present invention, and the present invention is also not limited to the example above, this technology neck
The variations, modifications, additions or substitutions that the technical staff in domain is made within the essential scope of the present invention also should belong to of the invention
Protection scope.
Claims (3)
1. a kind of high-precision gas micro-flowmeter, which is characterized in that including flowmeter shell, be provided with gas in flowmeter shell
Bulk measurement capacitor, air inlet pipe and an air outlet pipe are provided with solenoid valve gas port in the middle part of the air inlet pipe, and the rear portion of air inlet pipe is set
It is equipped with capacitor gas port；
It is connected among the lower part of the gasmetry capacitor with capacitor gas port, lower part and the solenoid valve gas port phase of escape pipe
Even, it is provided with solenoid valve in escape pipe, solenoid valve can control the logical of escape pipe and close；
Under test gas enters gasmetry capacitor from the capacitor gas port of air inlet pipe, and gasmetry capacitor capacitance value is caused to become
Change.
2. a kind of high-precision gas micro-flowmeter according to claim 1, which is characterized in that the gasmetry capacitor
Including two parallel metal plates, there is gap between two parallel metal plates, have dielectric in gap；The capacitor gas port
It is connected to the centre in the next metal plate.
3. a kind of gas flow measurement method of high-precision gas micro-flowmeter according to claim 1 or 2, feature exist
In, comprising the following steps:
Step 1: closing the solenoid valve in escape pipe, under test gas enters from air inlet pipe；
Step 2: under test gas enters gasmetry capacitor from the capacitor gas port in air inlet pipe, with the stream of under test gas
Enter, under the action of gas pressure intensity, the distance between two parallel metal plates of gasmetry capacitor reduce, and cause gas
The variation for measuring capacitor capacitance value calculates the volume of inflow gas by the variation of measurement capacitance, and then calculates
The gas flow of unit time out；
Step 3: after measurement, opening solenoid valve, gas into escape pipe and is smoothly discharged by solenoid valve gas port；
Step 4: executing step 1 repeatedly to 3, carry out gas flow measurement, averaged, to calculate the list of under test gas
Position time flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811194862.7A CN109282866B (en) | 2018-10-15 | 2018-10-15 | High-precision gas micro-flowmeter and gas flow measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811194862.7A CN109282866B (en) | 2018-10-15 | 2018-10-15 | High-precision gas micro-flowmeter and gas flow measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109282866A true CN109282866A (en) | 2019-01-29 |
| CN109282866B CN109282866B (en) | 2020-09-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811194862.7A Active CN109282866B (en) | 2018-10-15 | 2018-10-15 | High-precision gas micro-flowmeter and gas flow measuring method |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85109076A (en) * | 1984-11-19 | 1986-08-20 | 奥尔弗里克斯国际有限公司 | Liquid flow sensing device |
| JPS62200229A (en) * | 1986-02-28 | 1987-09-03 | Takeo Igari | Gas flow rate measuring apparatus |
| CN2553344Y (en) * | 2002-07-19 | 2003-05-28 | 韩健 | Micro-flow sensor |
| CN104931107A (en) * | 2015-06-19 | 2015-09-23 | 安徽省农业科学院农业工程研究所 | Capacitance type wheat harvest yield real-time measuring method and device |
| CN106500781A (en) * | 2017-01-11 | 2017-03-15 | 李治良 | A kind of flow measurement device and measuring method |
| CN108348003A (en) * | 2015-09-16 | 2018-07-31 | 菲利普莫里斯生产公司 | Cylinder with the liquid storage part with flexible wall |
-
2018
- 2018-10-15 CN CN201811194862.7A patent/CN109282866B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85109076A (en) * | 1984-11-19 | 1986-08-20 | 奥尔弗里克斯国际有限公司 | Liquid flow sensing device |
| JPS62200229A (en) * | 1986-02-28 | 1987-09-03 | Takeo Igari | Gas flow rate measuring apparatus |
| CN2553344Y (en) * | 2002-07-19 | 2003-05-28 | 韩健 | Micro-flow sensor |
| CN104931107A (en) * | 2015-06-19 | 2015-09-23 | 安徽省农业科学院农业工程研究所 | Capacitance type wheat harvest yield real-time measuring method and device |
| CN108348003A (en) * | 2015-09-16 | 2018-07-31 | 菲利普莫里斯生产公司 | Cylinder with the liquid storage part with flexible wall |
| CN106500781A (en) * | 2017-01-11 | 2017-03-15 | 李治良 | A kind of flow measurement device and measuring method |
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| Publication number | Publication date |
|---|---|
| CN109282866B (en) | 2020-09-15 |
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