CN109230233A - A kind of vapor deposition automatic loading/unloading equipment - Google Patents
A kind of vapor deposition automatic loading/unloading equipment Download PDFInfo
- Publication number
- CN109230233A CN109230233A CN201811067273.2A CN201811067273A CN109230233A CN 109230233 A CN109230233 A CN 109230233A CN 201811067273 A CN201811067273 A CN 201811067273A CN 109230233 A CN109230233 A CN 109230233A
- Authority
- CN
- China
- Prior art keywords
- square rod
- axis
- vapor deposition
- streamline
- automatic loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 78
- 239000000463 material Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
- B65G17/12—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface comprising a series of individual load-carriers fixed, or normally fixed, relative to traction element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/82—Rotary or reciprocating members for direct action on articles or materials, e.g. pushers, rakes, shovels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of vapor deposition automatic loading/unloading equipment, including apparatus body；The apparatus body includes three axis carrying mechanisms, the intelligence conveying streamline for being connected with square rod and picks and places square rod mechanism, three axis carrying mechanisms, intelligence conveying streamline and pick-and-place square rod mechanism are successively installed from top to bottom, and three axis carrying mechanisms, intelligence conveying streamline and pick and place square rod mechanism and stagger successively the intersection position for existing simultaneously vertical plane, it is additionally provided on the apparatus body for three axis carrying mechanisms, intelligence conveying streamline and the control cabinet for picking and placing the work of square rod mechanism.It is of the invention novel in design, square rod with product is moved to the underface of three axis carrying mechanisms under the action of intelligently conveying streamline, the product on square rod is picked and placed into vapor deposition machinery by three axis carrying mechanisms and is deposited, product after vapor deposition, it is moved on blanking equipment, automatic charging and the blanking of product are realized, realizes that streamline does not stop line and continues working, improves work efficiency.
Description
Technical field
The present invention relates to a kind of loading and unloading equipment, specifically a kind of vapor deposition automatic loading/unloading equipment.
Background technique
Material is heated in vacuum environment and is plated on substrate referred to as vacuum evaporation, or cry vacuum coating by vapor deposition.
The heating method that vacuum evaporation uses mainly has: resistance heating, electron beam heating.Radio frequency induction heating, electric arc add
Heat and laser heating etc. are several.No matter any heating method, require that the material as evaporation source has the following performance: fusing point
It is high；Steam forces down；Chemical reaction does not occur with most of evaporation materials at the vaporization temperature or dissolve each other, while there is certain machine
Tool intensity.
Need the operation that feeding and blanking are carried out to product before and after vapor deposition, existing evaporated device during the work time, when
When needing to pick and place product, to stop streamline work could remove product, cannot accomplish to synchronize, therefore cause ineffective
Problem.
Summary of the invention
It is mentioned above in the background art to solve the purpose of the present invention is to provide a kind of vapor deposition automatic loading/unloading equipment
Problem.
To achieve the above object, the invention provides the following technical scheme:
A kind of vapor deposition automatic loading/unloading equipment, including apparatus body；The apparatus body includes three axis carrying mechanisms, connection
Have square rod intelligence conveying streamline and pick and place square rod mechanism, three axis carrying mechanisms, intelligence conveying streamline and pick and place square rod mechanism from
Top to bottm is successively installed, and three axis carrying mechanisms, intelligence conveying streamline and pick-and-place square rod mechanism are staggered successively and existed simultaneously vertically
The intersection position in face is additionally provided on the apparatus body for three axis carrying mechanisms, intelligence conveying streamline and picks and places square rod mechanism
The control cabinet of work.
As a further solution of the present invention: the three axis carrying mechanism includes that X-axis adjusts component, Y-axis adjusts component and Z
Axis adjusts component,
As further scheme of the invention: the Y-axis adjusting component is rack-mount, and it is vertical that X-axis adjusts component
It is mounted on Y-axis to adjust on component, Z axis adjusts component lower end and is equipped with the fixture for clamping product and Z axis adjusting component installation
It is adjusted on component in X-axis.
As the present invention further scheme: the intelligence conveying streamline include conveying assembly and be arranged in conveying group
The square rod positioning mechanism of carrier positioning mechanism connection on part.
As further scheme of the invention: the conveying assembly includes symmetrically arranged chain conveying mechanism, carrier
Positioning mechanism is mounted on chain conveying mechanism.
As further scheme of the invention: the chain conveying mechanism includes symmetrically arranged sprocket wheel and connection two
The shaft of the chain of sprocket wheel, one of sprocket wheel is connected to motor.
As further scheme of the invention: being provided with material position under product on the intelligence conveying streamline and take short side stick
, material position is mounted on the lower section of three axis carrying mechanisms under product, takes short side stick position that end and the position of intelligence conveying streamline is arranged in
It is not on same vertical plane in the front of three axis carrying mechanisms and three axis carrying mechanisms.
As further scheme of the invention: the pick-and-place square rod mould group includes push cylinder, jacking cylinder and is used for
The square rod for placing square rod waits for material position, and square rod waits for being provided with the placement plate for placing square rod, push cylinder and jacking gas in material position
Cylinder is located at the front end and lower end of placement plate.
As further scheme of the invention: there are two the jacking cylinder is symmetrical arranged.
Compared with prior art, the beneficial effects of the present invention are: the present invention is novel in design, the square rod of product will manually be had
It is placed into and picks and places in square rod mechanism, then the square rod with product enters on intelligence conveying streamline, and the square rod with product exists
It is moved to the underfaces of three axis carrying mechanisms under the action of intelligence conveying streamline, by three axis carrying mechanisms by the product on square rod
Pick and place vapor deposition machinery in be deposited, the product after vapor deposition is moved on blanking equipment, realize product automatic charging and
Blanking realizes that streamline does not stop line and continues working, improves work efficiency that line will be stopped in the prior art by, which efficiently solving, to incite somebody to action
Product is removed, and cannot accomplish to synchronize leads to ineffective problem.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that automatic loading/unloading equipment is deposited.
Fig. 2 is the structural schematic diagram that three axis carrying mechanisms in automatic loading/unloading equipment are deposited.
Fig. 3 is that the structural schematic diagram that square rod mechanism is picked and placed in automatic loading/unloading equipment is deposited.
Fig. 4 is that the structural schematic diagram that streamline is intelligently conveyed in automatic loading/unloading equipment is deposited.
In figure: 1- apparatus body, 2- cabinet, tri- axis carrying mechanism of 3-, 301-X axis adjust component, 302-Y axis adjusting group
Part, 303-Z axis adjust component, 304- fixture, 4- intelligently conveying streamline, material position under 401- product, 402- square rod positioning mechanism,
403- conveying assembly, 404- take short side stick position, 5- to pick and place square rod mechanism, 501- push cylinder, 502- square rod, 503- jacking gas
Cylinder, 504- square rod wait for material position.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment one
Please refer to Fig. 1~4, in the embodiment of the present invention, a kind of vapor deposition automatic loading/unloading equipment, including apparatus body 1: it is described
Apparatus body 1 includes three axis carrying mechanisms 3, the intelligence conveying streamline 4 for being connected with square rod 502 and picks and places square rod mechanism 5, and three axis are removed
Fortune mechanism 3, intelligence conveying streamline 4 and pick-and-place square rod mechanism 5 are successively installed from top to bottom, and three axis carrying mechanisms 3, intelligence conveying
Streamline 4 and pick-and-place square rod mechanism 5 stagger successively the intersection position for existing simultaneously vertical plane, are additionally provided with use on the apparatus body 1
In three axis carrying mechanisms 3, intelligence conveying streamline 4 and the control cabinet 2 for picking and placing the work of square rod mechanism 5, since charging equipment is under
Expect that device structure is identical, therefore, take charging equipment to be described in detail in the application, manually puts the square rod 502 with product
It sets and picks and places in square rod mechanism 5, then the square rod 502 with product enters on intelligence conveying streamline 4, the square rod with product
502 are moved to the underfaces of three axis carrying mechanisms 3 under the action of intelligently conveying streamline 4, by three axis carrying mechanisms 3 by square rod
Product on 502 is picked and placed into vapor deposition machinery and is deposited, and the product after vapor deposition is moved on blanking equipment, and product is in blanking
The process that moves in equipment, just on the contrary, realize blanking, realizes automatic charging and the blanking of product on charging equipment, real
Existing streamline does not stop line and continues working, and improves work efficiency.
Specifically, the three axis carrying mechanism 3 includes that X-axis adjusts component 301, Y-axis adjusts component 302 and Z axis is adjusted
Component 303, Y-axis adjusting component 302 is rack-mount, and X-axis adjusts component 301 and is vertically mounted on Y-axis adjusting component 302, Z
Axis adjusting 303 lower end of component is equipped with the fixture 304 for clamping product and Z axis adjusts component 303 and is mounted on X-axis adjusting component
On 301, component 301 is adjusted by the X-axis of setting, Y-axis adjusts component 302 and Z axis adjusts component 303 and realizes that fixture 304 is multi-party
The adjusting of position is mobile, to clamp to product.
Preferably, the X-axis adjusts component 301, Y-axis adjusts component 302 and Z axis adjusts component 303 and is all made of motor band
Dynamic chain realizes that driving, running are stablized.
Specifically, the intelligence conveying streamline 4 include conveying assembly 403 and with the load that is arranged on conveying assembly 403
Has the square rod positioning mechanism 402 of positioning mechanism connection, conveying assembly 403 includes symmetrically arranged chain conveying mechanism, and carrier is fixed
Position mechanism is mounted on chain conveying mechanism, and the chain conveying mechanism includes two sprocket wheels of symmetrically arranged sprocket wheel and connection
Chain, it is preferred that the shaft of one of sprocket wheel is connected to motor, motor-driven drive sprockets rotation, to realize conveying assembly 403
Running.
Preferably, material position 401 under product is provided on the intelligence conveying streamline 4 and take short side stick position 404, product blanking
Position 401 is mounted on the lower section of three axis carrying mechanisms 3, takes short side stick position 404 that the end of intelligence conveying streamline 4 is arranged in and is located at three
The front of axis carrying mechanism 3 and three axis carrying mechanisms 3 are not on same vertical plane, and operator is facilitated to remove short side stick.
Motor used above is illustrated at this, motor is all made of Y-160M 2-2 model motor, it can also be used
His model motor requires basic as long as meeting driving, and the application is not construed as limiting this.
Embodiment two
Embodiment two and the difference of embodiment one are that the pick-and-place square rod mould group 5 includes push cylinder 501, jacking gas
Cylinder 503 and square rod for placing square rod 502 wait for material position 504, and square rod waits for being provided in material position 504 for placing square rod 502
Placement plate, push cylinder 501 and jacking cylinder 503 are located at the front end and lower end of placement plate, it is preferred that the jacking cylinder
503 be symmetrical arranged there are two.
It should be strongly noted that cabinet, motor, jacking cylinder and push cylinder are answering for the prior art in the application
With manually the square rod with product is placed into and is picked and placed in square rod mechanism, then enters intelligent conveying with the square rod of product
On streamline, the square rod with product is moved to the underface of three axis carrying mechanisms under the action of intelligently conveying streamline, passes through three
Product on square rod is picked and placed into vapor deposition machinery and is deposited by axis carrying mechanism, and the product after vapor deposition is moved to blanking equipment
On, automatic charging and the blanking of product are realized, realizes that streamline does not stop line and continues working, improves work efficiency as the application's
Innovative point, line will be stopped in the prior art by, which efficiently solving, to remove product, and cannot accomplish to synchronize causes working efficiency low
The problem of.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (9)
1. a kind of vapor deposition automatic loading/unloading equipment, including apparatus body (1)；It is characterized in that, the apparatus body (1) includes three
Axis carrying mechanism (3), intelligence conveying streamline (4) and pick-and-place square rod mechanism (5) for being connected with square rod (502), three axis carrying mechanisms
(3), intelligence conveying streamline (4) and pick-and-place square rod mechanism (5) are successively installed from top to bottom, and three axis carrying mechanisms (3), intelligence are defeated
It send streamline (4) and picks and places square rod mechanism (5) and stagger successively the intersection position for existing simultaneously vertical plane, gone back on the apparatus body (1)
It is provided with for three axis carrying mechanisms (3), intelligence conveying streamline (4) and the control cabinet (2) for picking and placing square rod mechanism (5) work.
2. a kind of vapor deposition automatic loading/unloading equipment according to claim 1, which is characterized in that the three axis carrying mechanism
It (3) include that X-axis adjusts component (301), Y-axis adjusts component (302) and Z axis adjusts component (303).
3. a kind of vapor deposition automatic loading/unloading equipment according to claim 2, which is characterized in that the Y-axis adjusts component
(302) rack-mount, X-axis adjusts component (301) and is vertically mounted in Y-axis adjusting component (302), and Z axis adjusts component
(303) lower end is equipped with the fixture (304) for clamping product and Z axis adjusts component (303) and is mounted on X-axis adjusting component
(301) on.
4. a kind of vapor deposition automatic loading/unloading equipment according to claim 1, which is characterized in that the intelligence conveying streamline
(4) the square rod positioning mechanism for including conveying assembly (403) and being connect with the carrier positioning mechanism being arranged on conveying assembly (403)
(402) 。
5. a kind of vapor deposition automatic loading/unloading equipment according to claim 4, which is characterized in that the conveying assembly (403)
Including symmetrically arranged chain conveying mechanism, carrier positioning mechanism is mounted on chain conveying mechanism.
6. a kind of vapor deposition automatic loading/unloading equipment according to claim 5, which is characterized in that the chain conveying mechanism packet
It includes symmetrically arranged sprocket wheel and connects the chain of two sprocket wheels, the shaft of one of sprocket wheel is connected to motor.
7. a kind of vapor deposition automatic loading/unloading equipment according to claim 1, which is characterized in that the intelligence conveying streamline
(4) it is provided with material position under product (401) on and takes short side stick position (404), material position (401) is mounted on three axis carrying mechanisms under product
(3) lower section takes short side stick position (404) setting in the intelligently end of conveying streamline (4) and before being located at three axis carrying mechanisms (3)
Fang Yusan axis carrying mechanism (3) is not on same vertical plane.
8. a kind of vapor deposition automatic loading/unloading equipment according to claim 1, which is characterized in that the pick-and-place square rod mould group
It (5) include that push cylinder (501), jacking cylinder (503) and the square rod for placing square rod (502) wait for material position (504), square rod waits for
The placement plate for placing square rod (502), push cylinder (501) and jacking cylinder (503) difference position are provided in material position (504)
In the front end and lower end of placement plate.
9. a kind of vapor deposition automatic loading/unloading equipment according to claim 8, which is characterized in that the jacking cylinder (503)
There are two being symmetrical arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811067273.2A CN109230233B (en) | 2018-09-06 | 2018-09-06 | Automatic unloading equipment of going up of coating by vaporization |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811067273.2A CN109230233B (en) | 2018-09-06 | 2018-09-06 | Automatic unloading equipment of going up of coating by vaporization |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109230233A true CN109230233A (en) | 2019-01-18 |
| CN109230233B CN109230233B (en) | 2024-03-08 |
Family
ID=65058449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811067273.2A Active CN109230233B (en) | 2018-09-06 | 2018-09-06 | Automatic unloading equipment of going up of coating by vaporization |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109230233B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4396109A (en) * | 1980-06-30 | 1983-08-02 | Tatsuo Nambu | Device for causing holders transporting objects to release the objects |
| CN201109639Y (en) * | 2007-10-22 | 2008-09-03 | 章宏亮 | Automatic selection loading and unloading mechanism of cycle conveying belt |
| CN104071570A (en) * | 2014-06-20 | 2014-10-01 | 厦门弘信电子科技股份有限公司 | Automatic feeding machine matched with electric detecting machine device |
| CN206871841U (en) * | 2017-03-13 | 2018-01-12 | 浙江杰克机床有限公司 | A kind of round bar transport mechanism of band air blowing refueling device |
| CN209177402U (en) * | 2018-09-06 | 2019-07-30 | 浙江科甬泰自动化科技有限公司 | A kind of vapor deposition automatic loading/unloading equipment |
-
2018
- 2018-09-06 CN CN201811067273.2A patent/CN109230233B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4396109A (en) * | 1980-06-30 | 1983-08-02 | Tatsuo Nambu | Device for causing holders transporting objects to release the objects |
| CN201109639Y (en) * | 2007-10-22 | 2008-09-03 | 章宏亮 | Automatic selection loading and unloading mechanism of cycle conveying belt |
| CN104071570A (en) * | 2014-06-20 | 2014-10-01 | 厦门弘信电子科技股份有限公司 | Automatic feeding machine matched with electric detecting machine device |
| CN206871841U (en) * | 2017-03-13 | 2018-01-12 | 浙江杰克机床有限公司 | A kind of round bar transport mechanism of band air blowing refueling device |
| CN209177402U (en) * | 2018-09-06 | 2019-07-30 | 浙江科甬泰自动化科技有限公司 | A kind of vapor deposition automatic loading/unloading equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109230233B (en) | 2024-03-08 |
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