CN109226756A - A kind of device for observing transparent flow field near plasma increasing material manufacturing process molten bath - Google Patents
A kind of device for observing transparent flow field near plasma increasing material manufacturing process molten bath Download PDFInfo
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- CN109226756A CN109226756A CN201811212999.0A CN201811212999A CN109226756A CN 109226756 A CN109226756 A CN 109226756A CN 201811212999 A CN201811212999 A CN 201811212999A CN 109226756 A CN109226756 A CN 109226756A
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- material manufacturing
- increasing material
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 68
- 239000000463 material Substances 0.000 title claims abstract description 65
- 238000003384 imaging method Methods 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 2
- 230000002459 sustained effect Effects 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 15
- 239000012530 fluid Substances 0.000 abstract description 3
- 230000010429 evolutionary process Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 10
- 238000004088 simulation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000004992 fission Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/105—Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/105—Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
- B22F2003/1051—Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding by electric discharge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laser Beam Processing (AREA)
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
Abstract
The invention discloses a kind of devices in transparent flow field near observation plasma increasing material manufacturing process molten bath, including plasma increasing material manufacturing equipment, light-source system, light path system and imaging system, wherein light path system is that " V " word taper reflection type optical path is formed by a parabolic mirror;Parabolic mirror is arranged behind transparent flow field to be observed, and light-source system and the edge of a knife are arranged at the two focus length of parabolic mirror, the key light axial symmetry about parabolic mirror;At edge of a knife rear, camera lens and CCD/CMOS imaging sensor are set.The present invention can observation be carried out in transparent flow field near molten bath during plasma increasing material manufacturing, it obtains the optical imagery of flow field evolutionary process and the problem is analyzed, be of great significance to the development of the dynamics basic law, propulsion high energy beam increasing material manufacturing control shape control technology that disclose the flowing of increasing material manufacturing process medium fluid.
Description
Technical field
The present invention relates to a kind of device in transparent flow field near observation plasma increasing material manufacturing process molten bath, belong to etc. from
Daughter increases material manufacturing technology field.
Background technique
Increasing material manufacturing (3D printing) technology refers in such a way that material is successively accumulated, direct according to the threedimensional model of product
It is manufactured as physical product.With it is traditional subtract material manufacture compared with, increases material manufacturing technology does not need mold, can be with direct digitization system
It makes, has the characteristics that few waste of raw materials, simple process, manufacturing process are short, can shape complex appearance and structure, this is a kind of tool
There are the manufacturing method of innovative significance, the referred to as manufacturing science of 21 century.So far, increasing material manufacturing is in medical treatment, aviation boat
It, automobile manufacture, mold, cultural creative, the fields such as education are widely applied.Existing the used heat source of increases material manufacturing technology
Mainly there are laser, electron beam and plasma etc..
Plasma increases material manufacturing technology is heat source using the electric arc that the plasma source of welding current generates, and passes through increasing
Add the method for material to manufacture molded parts has compared with using laser and electron beam as the increases material manufacturing technology of heat source
The advantages such as deposition efficiency is high, manufacturing cost is low.It is generally divided into plasma deposition forming technology and plasma selective melting skill
Art.Plasma deposition forming technology be based on layer-by-layer cladding principle, using traditional welding process in convergence it is good, high compression
Plasma beam melts the metal powder of synchronous supply or silk material, and layer-by-layer heap covers until form metal components on substrate.
The process principle and selective laser smelting technology of plasma selective melting technology and the technology of electron beam selective melting are processed former
It manages essentially identical, components threedimensional model is layered and is sliced, by pre- powdering, control heat source beam and scanned along graphics track
Each layer alloy powder melts it and quickly solidification deposits, and gradually stacking becomes 3-dimensional metal part, and the accuracy of manufacture is high, therefore
The direct forming of accurate complex component may be implemented.Difference is that heat source is different.
During increasing material manufacturing, fluid flowing is all physical phenomenon that is extremely common and being difficult to avoid that, is related in process
And the physical mechanisms such as velocity field, height nonequilibrium state temperature field and stress field, all will be to manufacturing process and final molding part
Macro property generates far-reaching influence.
For at present, during studying increasing material manufacturing technical study, the method that researcher usually utilizes numerical value to calculate is to increasing material
Manufacturing process is simulated, and analyzing melting pool shape in components manufacturing process, molten bath, nearby the fluid in Temperature Distribution and molten bath is dynamic
Mechanics etc., and then study the method for improving molded part performance.But numerical simulation has certain limitation, digital method
Reliability, convergence, stability etc. restrict the application and popularization of numerical simulation technology.In addition, the simplification of boundary condition with
And the Approximation Problem of parameter also limits the ability that numerical simulation describes engineering problem, while there are also the limitations etc. of computing resource to ask
Topic.Become a kind of essential research means by the evolution in flow field during Research on experimental methods increasing material.
But the molten bath method for sensing at present in research field includes the light of transmitting being imaged and being collected transmitting
Light.Infrared ray (IR) and visible light camera for imaging, and the photoelectric diode device for light emitting detection
(in upstream with or without infrared bandpass filters) is all that thermometric obtains thermal energy image, and data volume is big, higher cost, and can not
The transparent flow field observed near molten bath develops.
Summary of the invention
To solve the above problems, the present invention provides transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath
Device, study the Evolution maps in transparent flow field near molten bath during plasma increasing material manufacturing, infer and solidified with regulation
Journey and it is formed by microstructure, to reach the target for improving increasing material manufacturing technique, optimizing part forming process.
In order to achieve the above objectives, transparent flow near a kind of observation plasma increasing material manufacturing process molten bath of the present invention
Field device, transparent flow field carries out contactless observation near molten bath during plasma increasing material manufacturing.With the refraction of light
The Density Distribution in transparent flow field is changed into the distribution of image light and shade by principle, and molten bath is attached during obtaining plasma increasing material manufacturing
The optical imagery in near-transparent flow field.
Technical scheme is as follows:
A kind of device for observing transparent flow field near plasma increasing material manufacturing process molten bath, including plasma increasing material manufacturing are set
Standby, light-source system, light path system and imaging system, light-source system include LED light source and fiber exit device;Light path system
The reflected light path formed for parabolic mirror;Imaging system includes the edge of a knife, camera lens and CCD/CMOS imaging sensor,
The plasma increasing material manufacturing equipment is arranged in light-source system and imaging system front end, plasma increasing material manufacturing to be observed
Transparent flow field is arranged on the workbench of plasma increasing material manufacturing equipment near molten bath in the process, and the parabolic mirror is set
It sets in the workbench front end of plasma increasing material manufacturing equipment, the light-source system, imaging system and parabolic mirror shape
At " V " word taper reflected light path, each section main shaft is set to sustained height.
Wherein, light-source system selects yellow LED light source, and couples approximate point in aluminum enclosure with 1.5mm small diameter fiber
Light source is emitted, and light-source system is supported fixation by adjustable optical bracket.
Wherein, reflecting mirror is generally round, and mirror surface is paraboloid, and one V-groove bracket is tangent is connected and fixed for setting.
Wherein, light-source system is arranged at the two focus length of parabolic mirror, the line of centres and parabolic mirror
The deflection angle of optical axis is 2 °.
Wherein, the edge of a knife is arranged at parabolic mirror two focus length, and 50% cutting is carried out to reflection source picture.
Wherein, camera lens, the setting of CCD/CMOS imaging sensor connect at edge of a knife rear with parabolic mirror center
The deflection angle of line and parabolic mirror primary optical axis is -2 °.
Wherein, plasma increasing material manufacturing equipment only has rear end face opening, closes on excess-three face and top.
The beneficial effects of the present invention are:
The device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath of the present invention, by non-contact
Transparent flow field is observed near molten bath during formula Optical devices plasma increasing material manufacturing, obtains the optics in transparent flow field
It is compareed and is analyzed with the numerical simulation image in flow field by image, and experiment is combined with analog simulation, improves research effect
Rate and accuracy achieve the purpose that improve increasing material manufacturing technique, optimization part forming process.
Detailed description of the invention
Fig. 1 is a kind of rough package drawing of device of the invention;
Fig. 2 is a kind of light-source system schematic diagram of device of the invention;
Fig. 3 is specific arrangement schematic diagram between a kind of system of device of the invention;
Fig. 4 is the parabolic mirror schematic diagram in a kind of light path system of device of the invention;
Fig. 5 is the fixation V-groove support schematic diagram of parabolic mirror in Fig. 3;
Fig. 6 is the observed result figure in practical embodiments.
Reference signs list:
1, light-source system;2, parabolic mirror;3, near molten bath transparent flow field during plasma increasing material manufacturing to be observed;
4, the edge of a knife;5, camera lens;6, CCD/CMOS imaging sensor;7, plasma increasing material manufacturing equipment;8, workbench;9, V-type
Slot bracket.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings.
The device in transparent flow field, embodiments thereof near a kind of observation plasma increasing material manufacturing process molten bath of the invention
As shown in Figure 1, including light-source system 1, parabolic mirror 2, the edge of a knife 4, camera lens 5 and CCD/CMOS imaging sensor 6,
Fission is arranged, and centre-height is consistent, i.e., its main shaft and primary optical axis are in a height;The light-source system 1, imaging system
And parabolic mirror 2 forms " V " word taper reflected light path, in entire use process, each section relative position is fixed, i.e.,
The optical path of formation does not change, and only transparent flow field 3 is becoming near molten bath during plasma increasing material manufacturing to be observed
Change, is recorded by imaging system.Transparent flow field 3 is arranged in parabolic near molten bath during plasma increasing material manufacturing to be observed
Between face reflecting mirror 2 and imaging system.
During actual practice, in order to determine the placement position of non-contact optical means each section, first to use
The working space and arrangement of plasma increasing material manufacturing equipment measure.It is closed on three face of equipment and top, only there is gold on one side
Belonging to door can open, and inner cavity is having a size of 1.2m × 1.2m × 1.6m, and wherein a height of 1.6m in inner cavity, print platform size are then 0.6m
×0.6m.XYZ triaxial movement platform drives nozzle and wire feeding head whole across print platform synchronizing moving in the X-axis direction, Z
The movement of axis X-axis translation column on carry out, the movement of Y-axis then Z axis translation crossbeam on carry out, print platform-X-axis side
To there also is provided distal end wire-feed motor.The laminar flow that the heat source of plasma increasing material manufacturing equipment is developed using the kidney-yang science and technology in Chengdu
Arc plasma beam.This be it is a kind of efficiently, high energy, can Digital Control pencil superelevation temperature-heat-source, and be configured with its company and grind
Special-purpose numerical control system processed.High-temperature plasma beam is ionized by high-purity argon and is generated, and protection gas is also high-purity argon, while again cooling work
With the diameter of nozzle is 5mm.The material selection of silk is 316L stainless steel, and the new standard trade mark is 022Cr17Ni12Mo2,
There are the features such as atmospheric corrosion resistance, elevated temperature strength are good, processing hardening is excellent, is highly suitable for metal increasing material manufacturing, and a diameter of
1.2mm。
As shown in Fig. 2, light-source system and the edge of a knife are at the two focus length of parabolic mirror, it is anti-about paraboloid
The key light axial symmetry of mirror is penetrated, deflection angle is 2 °, contrary.It can be selected according to the size of specific plasma increasing material manufacturing equipment
Select paraboloid focal length appropriate and deflection angle.
As shown in figure 3, light-source system 1 selects LED light source.Specifically, LED light source is arranged in aluminum enclosure, to meet this
A kind of requirement that method approximation point light source mode is emitted of invention, it is preferable that: the light of minor diameter is set in aluminum hull
Fibre is emitted, and diameter is preferably 1.5mm or so.Integrated light source system is supported fixation by adjustable optical bracket, so as to
The adjusting of height and angle is realized when being observed.
Fig. 4 is the schematic diagram of parabolic mirror 2.The preferred embodiment that parabolic mirror 2 manufactures is: high using reflectivity
Aluminum metal manufactured, use diamond tool carry out vehicle, polishing process, last plated film.V-groove bracket 9, V as shown in Figure 5
Type groove bracket 9 and round parabolic mirror 2 are tangent.Specifically, two connectors of setting keep V-groove and parabolic mirror solid
It is fixed, so that circular reflector is erected on platform.
Specifically, the light-source system 1 of LED light source and point light source beam emitter composition, is arranged in parabolic mirror 2
Two focus length at, the light of outgoing is passed through and is sent out behind transparent flow field 3 during plasma increasing material manufacturing to be observed near molten bath
Raw refraction obtains one at 2 two focus length of parabolic mirror and waits the reality stood upside down greatly by the reflection of parabolic mirror 2
Picture, the edge of a knife 5 being arranged on herein cut, into camera lens 6, are imaged on CCD/CMOS imaging sensor 7, realize equity
During gas ions increasing material manufacturing near molten bath transparent flow field observation.
Fig. 6 is the observed result figure of the invention obtained in actual practice process.It clearly has recorded since substrate heating
The flowing in transparent flow field changes near molten bath in this chain of events carried out to printing, by the numerical simulation image of itself and flow field
It is compareed and is analyzed, experiment is combined with analog simulation, that is, Efficiency and accuracy can be improved, reaches improvement and increases material system
The purpose made technique, optimize part forming process.
The above is only an a kind of practical operation application of device of the invention, it should be pointed out that: this technology is led
For the those of ordinary skill in domain, various improvements and modifications may be made without departing from the principle of the present invention, these
Improvements and modifications also should be regarded as protection scope of the present invention.
Claims (7)
1. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath, it is characterised in that: including it is equal from
Daughter increasing material manufacturing equipment, light-source system, light path system and imaging system, light-source system include that LED light source and optical fiber go out
Injection device;Light path system is the reflected light path that parabolic mirror is formed;Imaging system includes the edge of a knife, camera lens and CCD/
Cmos image sensor, plasma increasing material manufacturing equipment setting are to be observed in light-source system and imaging system front end
Transparent flow field is arranged on the workbench of plasma increasing material manufacturing equipment near molten bath during plasma increasing material manufacturing, institute
State the workbench front end that plasma increasing material manufacturing equipment is arranged in parabolic mirror, the light-source system, imaging system with
And parabolic mirror forms " V " word taper reflected light path, each section main shaft is set to sustained height.
2. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath according to claim 1,
It is characterized by: the light-source system is yellow LED light source, and approximate point is coupled in aluminum enclosure with 1.5mm small diameter fiber
Light source is emitted, and light-source system is supported fixation by adjustable optical bracket.
3. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath according to claim 1,
It is characterized by: the reflecting mirror is generally round, mirror surface is paraboloid, and one V-groove bracket is tangent is connected and fixed for setting.
4. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath according to claim 1,
It is characterized by: the light-source system is arranged at the two focus length of parabolic mirror, the line of centres and parabolic reflector
The deflection angle of mirror optical axis is 2 °.
5. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath according to claim 1,
It is characterized by: the edge of a knife is arranged at parabolic mirror two focus length, 50% cutting is carried out to reflection source picture.
6. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath according to claim 5,
It is characterized by: the camera lens, CCD/CMOS imaging sensor are arranged at edge of a knife rear, with parabolic mirror center
The deflection angle of line and parabolic mirror primary optical axis is -2 °.
7. the device in transparent flow field near a kind of observation plasma increasing material manufacturing process molten bath according to claim 1,
It is characterized by: the plasma increasing material manufacturing equipment only has rear end face opening, closed on excess-three face and top.
Priority Applications (1)
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CN201811212999.0A CN109226756A (en) | 2018-10-18 | 2018-10-18 | A kind of device for observing transparent flow field near plasma increasing material manufacturing process molten bath |
Applications Claiming Priority (1)
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CN201811212999.0A CN109226756A (en) | 2018-10-18 | 2018-10-18 | A kind of device for observing transparent flow field near plasma increasing material manufacturing process molten bath |
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Citations (8)
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---|---|---|---|---|
US2541437A (en) * | 1948-07-30 | 1951-02-13 | Prescott Rochelle | Apparatus for investigating optical refraction phenomena in gaseous media |
FR1382128A (en) * | 1962-08-20 | 1964-12-18 | Thomson Houston Comp Francaise | information recording element |
US3431352A (en) * | 1963-06-05 | 1969-03-04 | Onera (Off Nat Aerospatiale) | Device for the analysis of phenomena involving variations in optical path length |
US3468610A (en) * | 1966-05-10 | 1969-09-23 | Muffoletto Carl V | Schlieren and strain birefringence system |
CN101625281A (en) * | 2009-07-28 | 2010-01-13 | 中国科学院长春光学精密机械与物理研究所 | Testing device of imaging quality of extreme ultraviolet imaging optical instrument |
CN204536663U (en) * | 2015-05-06 | 2015-08-05 | 宁波海恩光电仪器有限责任公司 | Split type schlieren system |
CN106706271A (en) * | 2016-12-28 | 2017-05-24 | 大连鉴影光学科技有限公司 | Automatic detection and performance analysis optimization device and system for optical system |
CN106918313A (en) * | 2017-02-27 | 2017-07-04 | 浙江工业大学 | A kind of dish-style Stirling Salar light-gatherings minute surface quality determining method |
-
2018
- 2018-10-18 CN CN201811212999.0A patent/CN109226756A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2541437A (en) * | 1948-07-30 | 1951-02-13 | Prescott Rochelle | Apparatus for investigating optical refraction phenomena in gaseous media |
FR1382128A (en) * | 1962-08-20 | 1964-12-18 | Thomson Houston Comp Francaise | information recording element |
US3431352A (en) * | 1963-06-05 | 1969-03-04 | Onera (Off Nat Aerospatiale) | Device for the analysis of phenomena involving variations in optical path length |
US3468610A (en) * | 1966-05-10 | 1969-09-23 | Muffoletto Carl V | Schlieren and strain birefringence system |
CN101625281A (en) * | 2009-07-28 | 2010-01-13 | 中国科学院长春光学精密机械与物理研究所 | Testing device of imaging quality of extreme ultraviolet imaging optical instrument |
CN204536663U (en) * | 2015-05-06 | 2015-08-05 | 宁波海恩光电仪器有限责任公司 | Split type schlieren system |
CN106706271A (en) * | 2016-12-28 | 2017-05-24 | 大连鉴影光学科技有限公司 | Automatic detection and performance analysis optimization device and system for optical system |
CN106918313A (en) * | 2017-02-27 | 2017-07-04 | 浙江工业大学 | A kind of dish-style Stirling Salar light-gatherings minute surface quality determining method |
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