CN109163673B - A kind of multi-wavelength and the bisynchronous surface method for real-time measurement of phase shift interference and system - Google Patents
A kind of multi-wavelength and the bisynchronous surface method for real-time measurement of phase shift interference and system Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention discloses a kind of multi-wavelength and the bisynchronous surface method for real-time measurement of phase shift interference and systems, it uses intervention module, it is divided phase shift module and CCD image-forming module, reference light and measurement light are first broken down into four road light sources and simultaneous phase-shifting 0 by light splitting phase shift module by it, pi/2, π, 3 pi/2s, tetra- road light source of phase shift Hou carries out interference and collects synchronous phase-shifted interference pattern by CCD image-forming module, parameter calibration is carried out to synchronous phase-shifted interference pattern before measurement, the parameter of calibration is the collected reference light in each channel, light intensity is measured relative to the 1st collected reference light in channel, the difference for the phase-shift phase that the phase-shift phase and the 1st channel that the ratio and each channel for measuring light intensity introduce introduce, the phase information of tested exemplar is further determined that using the parameter of calibration, to obtain the surface temporal structure of tested exemplar And improve the accuracy of measurement result.
Description
Technical field
The invention belongs to real-time measurement fields, and in particular to a kind of multi-wavelength and the bisynchronous surface real-time measurement of phase shift interference
Method and system.
Background technique
The geometrical characteristic of sample surface pattern and structure is mainly formed by the technical process such as being surface-treated, being machined, body
The external feature on existing surface is the important quality index for manufacturing product and scientific research.Meanwhile surface topography and structure and exemplar
The intrinsic characteristic on surface, such as residual stress, microphysics mechanical property etc. also have inseparable connection, are product and exemplar
The important characterization of dynamic characteristic.
Synchronous phase shift interference technology is a kind of while obtaining several phase shifting interferences, solves the side of tested exemplar surface topography
Method.Relative to traditional time-phase displacement interference technique, its major advantage is environment resistant vibration, and it is more severe to can be applicable to environment
Workplace, while measuring speed is fast, can measure dynamic sample.Although synchronous phase-shifting technique can effectively reduce environment vibration
Dynamic influence, but other error terms have also been introduced, main includes the established angle and degree of delay error of wave plate, the installation of polarizing film
The distribution of light intensity caused by angle error, prism or grating unevenness and phase error, the matching error etc. of multi-frame interferometry figure.
There are mainly three types of than more typical structure for existing synchronous phase shift interference technology: one is based on the more of prismatic decomposition
Camera or the synchronous phase shift interference system of one camera, paper (" Simultaneous phase-shift interferometer ",
ACL Koliopoulos, International Society for Optics and Photonics, 1992:119-127)
Measurement of the synchronization phase shift interference technology based on prismatic decomposition for large scale optical device is disclosed, but it is to systematic error
Analysis lays particular emphasis on qualitative analysis, and the method for controlling error is equally confined to the selection of device and the adjustment of optical path；One is be based on
The synchronous phase shift interference system of the one camera of grating beam splitting, paper (" Three channel phase-shifting
Interferometer using polarization-optics and a diffraction grating ", Hettwer
A, Kranz J, Schwider J, Optical Engineering, 2000,39 (4): 960-966) one kind is disclosed based on light
The error of the synchronous phase shifting interferometer of the triple channel of grid light splitting, the synchronous phase shifting interferometer of the triple channel is divided into average intensity error and phase
Accuracy error is moved, analyzes its Producing reason of each, it was also proposed that corresponding method of controlling, but it is a lack of specific reality
Apply the description of scheme；One is the synchronization phase shift interference system based on pixelation polarized reticle or phase delay mask plate, the U.S.
Patent US7079251B2 discloses the method for a kind of analysis and correction multichannel interference imaging systematic error, considers in this method
Anamorphose, inactive pixels point, detector nonlinearity, random phase shift inaccuracy equal error influence, but same lack to tool
The description of body embodiment.Therefore, lay particular emphasis on theory analysis about the research of light channel structure error, quantitative description respectively misses more
The influence size in poor source depends on the control mode of error more and selects high-quality level device and raising installation accuracy.Together
When, when synchronous phase shift interference technology is applied to dynamic surface topography measurement, due to the limitation of phase shift interference technical principle, pass through
The phase that algorithm solves is wrapped in-π between π, therefore is typically only capable to measurement continuous surface.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, it is double same that the present invention provides a kind of multi-wavelengths and phase shift interference
The surface method for real-time measurement and system of step use intervention module, light splitting phase shift module and CCD image-forming module, obtain four-way
The synchronization phase-shifted interference pattern in road carries out parameter calibration, benefit to the synchronization phase-shifted interference pattern of CCD image-forming module acquisition before measurement
The phase information of tested exemplar is further determined that with the parameter of calibration, to obtain the surface temporal structure of tested exemplar and improve
The accuracy of measurement result.
To achieve the above object, according to one aspect of the present invention, it is double synchronous with phase shift interference to provide a kind of multi-wavelength
Surface method for real-time measurement, specifically:
S1. incident light light source provided is decomposed into mutually orthogonal reference light and measurement light；
S2. reference light is broken down into behind four tunnels synchronous progress phase shift respectively with measurement light and interferes；
S3. acquisition phase shift interference tetra- road optical signal of Hou is to obtain synchronous phase-shifted interference pattern；
S4. parameter calibration is carried out to the synchronization phase-shifted interference pattern of acquisition, specifically:
The light intensity for acquiring synchronous phase-shifted interference pattern is expressed as
In formula, Io1And Ir1The measurement light light intensity and reference light light intensity of first passage are respectively represented,Measurement phase is represented,
ko1、ko2、ko3Respectively represent second and third, the collected measurement light intensity of four-way is relative to the collected measurement light intensity of first passage
Ratio, kr1、kr2、kr3Respectively represent second and third, four-way it is collected with reference to light intensity it is collected relative to first passage
With reference to the ratio of light intensity, Δ γ21、Δγ31、Δγ41Respectively represent second and third, four-way introduce phase-shift phase and the 1st channel
The difference of the phase-shift phase of introducing；
The parameter value of calibration is respectively as follows: ko1、ko2、ko3、kr1、kr2、kr3、Δγ21、Δγ31And Δ γ41；
S5. light splitting phase shift interference tetra- road optical signal of Hou is acquired to obtain synchronous phase shifting interference using step S1~S3
Sample, and be analyzed and processed to obtain the measurement phase of tested exemplar, to obtain the surface temporal structure of tested exemplar.
As a further improvement of the present invention, step S2 divides reference light and measurement light using light splitting phase shift module
Light, phase shift and interference, wherein light splitting phase shift module includes a piece of achromatism quarter wave plate, three one-to-two spectral modules and four pieces
Analyzer, wherein the optical direction of four pieces of analyzers is respectively set to 0, π/4, pi/2,3 π/4, reference light and measurement light are successively passed through
Cross achromatism quarter wave plate, an one-to-two spectral module, be placed sequentially in conplane two one-to-two spectral modules and according to
It is secondary to be placed on conplane four pieces of analyzers, to realize the reference light and measure light to become the opposite circle in direction of rotation inclined
Vibration and is divided into symmetrical four road optical signal at light in parallel, and make the phase shift to the generation of four road optical signals be respectively 0, pi/2, π, 3 π/
2。
As a further improvement of the present invention, phase is measuredExpression formula are as follows:
A=(kr1ko2-kr2ko1)I1-(ko2-kr2)I2+(ko1-kr1)I3
B=(kr1ko3-kr3ko1)I1-(ko3-kr3)I2+(ko1-kr1)I4
Wherein,A、
B, a, b, c and d are coefficient.
As a further improvement of the present invention, phase is measuredRepresent actual phaseThe phase-shift phase introduced with first passage
Δγ1The sum of, Δ γ1Value be more than preset error range, sample surface elevation information is
As a further improvement of the present invention, measuring point elevation carrection Range Extension is realized using the light source of multi-wavelength, specifically
Are as follows:
Color LED is used to obtain the interferometric phase φ of three color of red, green and blue for light sourceR, φG, φB, it is equivalent to calculate red-green glow
Wavelength XRGWith green-blue light effective wavelength λGBCorresponding equivalent phase φRG=φR-φGAnd φGB=φG-φB；
mRG、mGBThe number of cycles series of respectively two effective wavelength phases, meets mRG≥mGBIt is utilized under conditions of >=0
FInite Element acquires equation (λRG/2)*mRG+φRGλRG/ 4 π=(λGB/2)*mGB+φGBλGBM in/4 πRGAnd mGBMinimal solution, will
The m of minimal solutionRGSubstitute into L=(λRG/2)*mRG+φRGλRG/ 4 π to L values；
L is substituted into equation L=(λR/2)*mR+φ'RλR/ 4 π, L=(λG/2)*mG+φG'λG/ 4 π and L=(λB/2)*mB+
φB'λB/ 4 π, φ hereR'、φG' and φB' be respectively three color of red, green and blue modified interferometric phase, limit φR'∈(-
π,π)、φG'∈(-π,π)、φB' ∈ (- π, π) and mR、mGAnd mBFor integer, the m of integer is acquiredR、mG、mB；
By mR、mG、mBSubstitute into LR=(λR/2)*mR+φRλR/4π、LG=(λG/2)*mG+φGλG/4π、LB=(λB/2)*mB+
φBλB/ 4 π, obtained LR、LGAnd LBValue is averaged, and resulting average value is to obtain measuring point height.
To achieve the above object, other side according to the invention, provides a kind of multi-wavelength and phase shift interference is double same
The surface real-time measurement system of step, the system include light source, intervention module, light splitting phase shift module and CCD image-forming module, wherein
The incident light that intervention module is used to provide light source is decomposed into mutually orthogonal reference light and measurement light, and light splitting phase shift module is used for
Reference light is broken down into behind four tunnels synchronous progress phase shift respectively with measurement light and is interfered, CCD image-forming module is for acquiring
Phase shift interferes tetra- road optical signal of Hou to obtain synchronous phase-shifted interference pattern, and is analyzed and processed to obtain the survey of tested exemplar
Phase is measured, so that the surface temporal structure of tested exemplar is obtained,
The synchronization phase-shifted interference pattern of CCD image-forming module acquisition carries out parameter calibration before measuring, specifically:
The light intensity of synchronous phase-shifted interference pattern is expressed as
In formula, Io1And Ir1The measurement light light intensity and reference light light intensity of CCD image-forming module first passage are respectively represented,Generation
Table measures phase, ko1、ko2、ko3Respectively represent CCD image-forming module second and third, the collected measurement light intensity of four-way relative to
The ratio of the collected measurement light intensity of CCD image-forming module first passage, kr1、kr2、kr3Respectively represent CCD image-forming module second,
Three, four-way it is collected with reference to light intensity relative to the collected ratio with reference to light intensity of CCD image-forming module first passage, Δ
γ21、Δγ31、Δγ41Respectively represent CCD image-forming module second and third, the four-way phase-shift phase and CCD image-forming module that introduce
The difference for the phase-shift phase that one channel introduces；
The parameter value of calibration is respectively as follows: ko1、ko2、ko3、kr1、kr2、kr3、Δγ21、Δγ31And Δ γ41。
As a further improvement of the present invention, step S2 divides reference light and measurement light using light splitting phase shift module
Light, phase shift and interference, wherein light splitting phase shift module includes a piece of achromatism quarter wave plate, three one-to-two spectral modules and four pieces
Analyzer, the optical direction of four pieces of analyzers are respectively set to 0, π/4, pi/2,3 π/4, and reference light and measurement light are successively by disappearing
Color difference quarter wave plate, an one-to-two spectral module are placed sequentially in conplane two one-to-two spectral modules and successively put
It sets in conplane four pieces of analyzers, reference light and measurement light are become into the opposite circularly polarized light in direction of rotation and parallel divides
At symmetrical four road optical signal, the phase shift that tetra- road optical signal of Qie Dui generates is respectively 0, pi/2, π, 3 pi/2s.
As a further improvement of the present invention, phase is measuredExpression formula are as follows:
A=(kr1ko2-kr2ko1)I1-(ko2-kr2)I2+(ko1-kr1)I3
B=(kr1ko3-kr3ko1)I1-(ko3-kr3)I2+(ko1-kr1)I4
Wherein,A、
B, a, b, c and d are coefficient.
As a further improvement of the present invention, phase is measuredRepresent actual phaseThe phase-shift phase introduced with first passage
Δγ1The sum of, Δ γ1Value be more than preset error range, sample surface elevation information is
As a further improvement of the present invention, measuring point elevation carrection Range Extension is realized using the light source of multi-wavelength, specifically
Are as follows:
Color LED is used to obtain the interferometric phase φ of three color of red, green and blue for light sourceR, φG, φB, it is equivalent to calculate red-green glow
Wavelength XRGWith green-blue light effective wavelength λGBCorresponding equivalent phase φRG=φR-φGAnd φGB=φG-φB；
mRG、mGBThe number of cycles series of respectively two effective wavelength phases, meets mRG≥mGBIt is utilized under conditions of >=0
FInite Element acquires equation (λRG/2)*mRG+φRGλRG/ 4 π=(λGB/2)*mGB+φGBλGBM in/4 πRGAnd mGBMinimal solution, will
The m of minimal solutionRGSubstitute into L=(λRG/2)*mRG+φRGλRG/ 4 π to L values；
L is substituted into equation L=(λR/2)*mR+φ'RλR/ 4 π, L=(λG/2)*mG+φG'λG/ 4 π and L=(λB/2)*mB+
φB'λB/ 4 π, φ hereR'、φG' and φB' be respectively three color of red, green and blue modified interferometric phase, limit φR'∈(-
π,π)、φG'∈(-π,π)、φB' ∈ (- π, π) and mR、mGAnd mBFor integer, the m of integer is acquiredR、mG、mB；
By mR、mG、mBSubstitute into LR=(λR/2)*mR+φRλR/4π、LG=(λG/2)*mG+φGλG/4π、LB=(λB/2)*mB+
φBλB/ 4 π, obtained LR、LGAnd LBValue is averaged, and resulting average value is to obtain measuring point height.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, have below beneficial to effect
Fruit:
1. the bisynchronous surface method for real-time measurement of multi-wavelength and phase shift interference of the invention and system, use interference mould
Block, light splitting phase shift module and CCD image-forming module obtain the synchronization phase-shifted interference pattern of four-way, to CCD image-forming module before measurement
The synchronization phase-shifted interference pattern of acquisition carries out parameter calibration, improves the precision of the measurement phase of tested exemplar, thus obtain by
The surface temporal structure of test sample part and the accuracy for improving measurement result.
2. the bisynchronous surface method for real-time measurement of multi-wavelength and phase shift interference of the invention and system, by the 1st
The phase-shift phase Δ γ that channel introduces1Default PV value error range, by Δ γ when being more than default error1From the phase value measured
It removes, to further reduce the error of measurement phase.
3. the bisynchronous surface method for real-time measurement of multi-wavelength and phase shift interference of the invention and system, more by introducing
Wavelength light source measures and introduces effective wavelength, and the number of cycles grade of effective wavelength is further acquired using FEM calculation
Number is believed to be back-calculated to obtain the number of cycles series of multi-wavelength using the height that the number of cycles series of multi-wavelength is tested exemplar
Breath effectively extends measurement range to integer effective wavelength half wavelengths long, and remain the Measurement Resolution of Single wavelength with
Precision.
Detailed description of the invention
Fig. 1 is the structural representation of the multi-wavelength and the bisynchronous surface real-time measurement system of phase shift interference of the embodiment of the present invention
Figure；
In all the appended drawings, same appended drawing reference indicates identical technical characteristic, specifically: 1- light source, 2- collimation are saturating
Microscope group, 3- light collecting lens, 4- aperture, 5- collimation lens, the 6- polarizer, 7- depolarization Amici prism, 8- Michelson interference mould
Block, 9- object lens, 10- polarization splitting prism, 11- reference planes mirror, 12- tested sample, 13- are divided phase shift module, 14- achromatism
Quarter wave plate, 15- right-angle prism, 16- analyzer array, 17- achromatic lens and 18- colored CCD image-forming module.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
In addition, as long as technical characteristic involved in the various embodiments of the present invention described below is each other not
Constituting conflict can be combined with each other.The present invention is described in more detail With reference to embodiment.
Fig. 1 is the structural representation of the multi-wavelength and the bisynchronous surface real-time measurement system of phase shift interference of the embodiment of the present invention
Figure.As described in Figure 1, multi-wavelength and the bisynchronous surface real-time measurement system of phase shift interference are (poly- comprising light source 1, collimation lens set 2
Optical lens 3, aperture 4, collimation lens 5), the polarizer 6, depolarization Amici prism 7, Michelson interference module 8 (object lens 9, polarization
Amici prism 10, reference planes mirror 11, tested sample 12), light splitting phase shift module 13 (achromatism quarter wave plate 14, depolarization light splitting
Prism 7, right-angle prism 15, analyzer array 16), achromatic lens 17 and colored CCD image-forming module 18, light source in the present embodiment
For color light source, the light generated from light source 1 is collected by collector lens 3, is obtained collimated light across aperture 4 and collimation lens 5 and is entered
The polarizer 6 becomes the linearly polarized light of collimation by the polarizer 6, dry being reflected into Michelson by depolarization Amici prism 7
Relate to module 8, wherein Michelson interference module 8 includes object lens 9, polarization splitting prism 10, reference planes mirror 11 and tested sample
12, two parts are divided by polarization splitting prism 10 by the polarised light of object lens 9；The s component wherein reflected is through reference planes mirror 11
It is reflected as reference light；The p-component of transmission obtains it by the surface reflection of tested sample 12 and surveys surface topography and structural information, at
To measure light.Two-way reflected light meets at the light splitting plane of polarization splitting prism 10, passes back through object lens 9, depolarization Amici prism
7, into light splitting phase shift module 13, synchronous phase shift interference occurs.When using polychromatic source (such as RGB combination light source or white light light
Source) illumination, and when use color camera progress interference pattern acquisition, by the channel decomposition of color camera, can obtain simultaneously
R, the synchronization interference pattern of tri- wave bands of G, B realizes that multi-wavelength is double synchronous with phase shift interference.Since multi-wavelength interference technology can
Effectively to extend the measuring range of Single wavelength phase shift interference, and real-time measurement may be implemented in the synchronous phase shift interference technology of four-way,
Synchronous realize of the two just forms a wide range of real-time interference system.
Phase shift module 13 is divided by the right-angled edge of broadband depolarization Amici prism 7,3 of a piece of achromatism quarter wave plate 14,3
Mirror 15 and an analyzer array 16 form.One of broadband depolarization Amici prism and a right-angle prism combination, shape
At an one-to-two spectral module.Reference light and measurement light first pass around achromatism quarter wave plate 14, and it is inclined to form oppositely oriented circle
Shake light.Then, successively process, 1 one-to-two spectral module, 2 one-to-two spectral modules become four parallel and symmetrical Lu Guang.
This four roads light is then respectively the analyzer array of 0, π/4, pi/2,3 π/4 by polarization direction again, to realize to four road optical signals
The phase shift of generation is respectively 0, pi/2, π, 3 pi/2s, ultimately forms the interference pattern that four width have different phase-shift phases.Interference pattern is again
It is imaged by achromatic lens 17 in the imaging target surface of CCD image-forming module 18, synchronous phase-shifted interference pattern is obtained by computer,
Processing and Phase Build Out are analyzed by computer, obtains the instantaneous pattern in surface and structure.
The principle of multi-wavelength and the bisynchronous surface real-time measurement system of phase shift interference, measurement is as follows:
According to the principle of polarised light phase shift interference, the measurement light and reference light for being incident on measuring system are respectivelyWithWherein, Ao(x, y) represents measurement light amplitude, Ar(x,
Y) it represents and refers to light amplitude,For measure light phase,For the phase of reference light, their polarization direction is hung down
Directly.
If the fast axle of quarter wave plate and x optical axis included angle are π/4；Polarization direction and x-axis angle through the light of analyzer are β,
The then distribution of interference light intensity are as follows:
I (x, y) represents camera finally collected interference pattern,For to
Seek phase.
It is found that wherein analyzer plays the role of phase-modulation, it, can be between measurement light and reference light when β changes
Introduce 2 β of fixed phase drift.According to the design of phase-shift unit, β is followed successively by 0, π/4, pi/2,3 π/4, then obtains the interference phase shift point of four tunnels
It Wei not 0, pi/2, π, 3 pi/2s.If:Io(x, y) and Ir(x, y) difference
Measurement light light intensity and reference light light intensity are represented, then the expression formula of four road interference signals is (conveniently for statement, to dispense in formula
Coordinate (x, y), similarly hereinafter.):
Phase distribution to be measured is acquired according to four-stepped switching policy are as follows:
The distribution of phase reflects the transient surface pattern and structure of tested exemplar, if obtaining interferometric phase range at half
In wavelength, then the relationship being tested between the apparent height information and phase distribution of exemplar is shown below:
Wherein z (x, y) is the elevation information of measured surface pattern, and λ is optical wavelength.When phase package range exceeds half
When wavelength, need to carry out phase unpacking, the Phase Unwrapping Algorithm φ (x, y) of acquisition, in formula (4)By φ (x, y)
Instead of the range ability of the obtained height value of the method is (- λ/4, λ/4).
However, above-mentioned calculation just for an idealized system for, i.e., orthogonal measurement light and reference light quilt
It is evenly distributed in four channels, and the phase-shift phase that four channels introduce accurately successively differs pi/2, but actual conditions
Under, measuring light and reference light in the distribution of four-way is not that uniformly, the phase-shift phase that four channels introduce is also not accurate
Ground is separated by pi/2, and therefore, practical interference light intensity is indicated are as follows:
In formula, IoiAnd Iri(i=1~4) respectively represent the respective measurement light light intensity of four-way and reference light light intensity, Δ γ1
~Δ γ4Respectively represent the phase-shift phase that four-way is actually introduced into.
In above-mentioned interference formula, only I1~I4For known quantity, Ioi、Iri、Δγi(i=1~4) andIt is all not
The amount of knowing.If being that independence is incoherent between unknown quantity, that is clearly that can not find out to obtain phase to be measured.However for reality
The system on border, after structure has determined that with device, for measuring light Ioi(i=1~4) and reference light Iri(i=1~4)
Distribution should fix, that is to say, that measurement light Ioi(i=1~4) and reference light IriExist between (i=1~4) and fixes
Proportionate relationship.This specific ratio can be calculated by measuring respectively with reference to light intensity and measurement light intensity, calculated ratio
The intrinsic parameter that example coefficient can be used as system is stored, and measurement every time, need to only call directly later.It enables
Ir4:Ir3:Ir2:Ir1=kr3:kr2:kr1:1
Io4:Io3:Io2:Io1=ko3:ko2:ko1:1
kr1,kr2,kr3Respectively represent CCD image-forming module second and third, four-way it is collected with reference to light intensity relative to CCD at
As the collected ratio with reference to light intensity of module first passage, ko1,ko2,ko3Respectively represent CCD image-forming module second and third, four-way
Ratio of the collected measurement light intensity in road relative to the collected measurement light intensity of CCD image-forming module first passage.
It enables againΔγ21=Δ γ2-Δγ1,Δγ31=Δ γ3-Δγ1,Δγ41=Δ γ4-Δ
γ1,Represent the sum of the phase-shift phase of phase to be measured and first passage introducing, Δ γ21~Δ γ41Respectively represent second and third, four
The difference for the phase-shift phase that the phase-shift phase and first passage that channel introduces introduce, can be referred to as relative phase shift amount, then corresponding reality is dry
Relating to light intensity equation group becomes,
The Δ γ in fixed system21~Δ γ41It is also definite value, can also solves in advance and the intrinsic ginseng as system
Number storage.Concrete mode is as follows:
For the phase shift interference signal in any one channel:
Ding Walk by Piezoelectric Ceramic reference mirror or measured piece Yi Heng to be moved away from (such as Δ h=10nm), and
A series of interference light intensity figures of synchronous acquisition, the phase shift intervals such as each pixel (x, y) position in available visual fieldInterference light intensity delta data, i.e.,
In(x, y) represents what certain pixel was detected when Piezoelectric Ceramic reference mirror or tested exemplar advance the n-th step
Interference light intensity.
Assuming that λ=620nm, the every introduced phase shift interval that moves a step that moves of piezoelectric ceramics areIt is probably mobile
After 31 steps, the interference light intensity of the pixel changes a cycle, using matlab to this 31 light intensity datas of the pixel
Point does Fourier fitting, can be in the hope of the initial phase of matched curve, the as corresponding phase difference of elemental height information
With phase difference γ caused by light channel structureiThe sum of (x, y)；
It enablesThe initial phase distribution for the i-th tunnel optical path that fitting obtains is represented, then
Wherein, Δγ21(x, y)~Δ γ41(x, y) respectively represent the 2nd, 3, the phase that introduces of 4 channels
The difference for the phase-shift phase that shifting amount and first passage introduce.
All pixels point in entire surface in the entire visual field in each channel is calculated, true phase difference is obtained
Distribution value value.Therefore, practical interference equation group is further indicated that are as follows:
And then it obtains:
Wherein,
A=(kr1ko2-kr2ko1)I1-(ko2-kr2)I2+(ko1-kr1)I3
B=(kr1ko3-kr3ko1)I1-(ko3-kr3)I2+(ko1-kr1)I4
Note that is acquired here isThat is, finally obtainedIt is phase to be askedIt is logical with first
(in fact, can be seen that from the derivation of formula, first passage here can be 4 channels to the sum of phase-shift phase that road introduces in fact
In any one).If Δ γ1Value be uniform, Δ γ under normal circumstances in measurement visual field1(or even Δ γ2~4)
Value is uniformly that PV value can be used to judge in the uniformity coefficient in entire interference pattern visual field.A threshold value δ can be set
(> 0), ifIt then can direct handleAs the phase distribution of sample surface, pass throughAcquire sample
The elevation information on part surface；Conversely, then also need fromIt is middle to be subtracted, to obtain truly surface phase distribution, sample at this time
Part surface relative altitude information is
It is bisynchronous big based on above-mentioned multi-wavelength and phase shift interference to expand as a preferred embodiment of the invention
The range of range high-precision surface real-time measurement system, specifically:
For the colored interference figure collected by color source lighting and colored CCD, due to that can be divided with Color Channel
Solution obtains the interference pattern of tri- components of R, G, B, then being based on above-mentioned phase calculation process, (above-mentioned calibration process will execute three
It is secondary, respectively correspond tri- components of R, G, B that colored interference figure decomposes) obtain the interferometric phase φ of three color of red, green and blueR,
φG, φB, calculate red-green glow effective wavelength λRGWith green-blue light effective wavelength λGBCorresponding equivalent phase φRG=φR-φGAnd φGB
=φG-φB；
mRG、mGBThe number of cycles series of respectively two effective wavelength phases, meets mRG≥mGBIt is utilized under conditions of >=0
FInite Element acquires equation (λRG/2)*mRG+φRGλRG/ 4 π=(λGB/2)*mGB+φGBλGBM in/4 πRGAnd mGBMinimal solution, will
The m of minimal solutionRGSubstitute into L=(λRG/2)*mRG+φRGλRG/ 4 π to L values；
L is substituted into equation L=(λR/2)*mR+φ'RλR/ 4 π, L=(λG/2)*mG+φG'λG/ 4 π and L=(λB/2)*mB+
φB'λB/ 4 π, φ hereR'、φG' and φB' be respectively three color of red, green and blue modified interferometric phase, limit φR'∈(-
π,π)、φG'∈(-π,π)、φB' ∈ (- π, π) and mR、mGAnd mBFor integer, the m of integer is acquiredR、mG、mB；
By mR、mG、mBSubstitute into LR=(λR/2)*mR+φRλR/4π、LG=(λG/2)*mG+φGλG/4π、LB=(λB/2)*mB+
φBλB/ 4 π, obtained LR、LGAnd LBValue is averaged, and resulting average value is to obtain measuring point height.
By above-mentioned three wavelength-interferometrics phase analysis, it is long to integer effective wavelength half-wavelength effectively to extend measurement range
Degree, and remain the Measurement Resolution and precision of Single wavelength.It, can be with when seeking optimal number of cycles solution using the above method
It avoids phase displacement error bring from calculating inaccuracy, while determining whether that the threshold value of optimal solution can be micron order, therefore to dry
Relating to grade solution is science and has high confidence level, while calculating speed is fast.
As a preferred embodiment of the invention, a kind of multi-wavelength and the bisynchronous surface real-time measurement side of phase shift interference
Method specifically:
S1. incident light light source provided is decomposed into mutually orthogonal reference light and measurement light；
S2. reference light is broken down into behind four tunnels synchronous progress phase shift (0, pi/2, π, 3 pi/2s) respectively with measurement light and occurs dry
It relates to；
Specifically: reference light and measurement light are divided using light splitting phase shift module, phase shift and interference, the light splitting phase
Shifting formwork block includes a piece of achromatism quarter wave plate, three one-to-two spectral modules and four pieces of analyzers, and four pieces of analyzers lead to
Light direction is respectively set to 0, π/4, pi/2,3 π/4, and reference light and measurement light successively pass through achromatism quarter wave plate, an one-to-two
Spectral module is placed sequentially in conplane two one-to-two spectral modules and is placed sequentially in conplane four pieces of analyzings
Device, light splitting phase shift module is parallel after being used to reference light becoming the opposite circularly polarized light in direction of rotation with measurement light to be divided into symmetrically
The phase shift that four road optical signal Qie Dui, tetra- road optical signal generates is respectively 0, pi/2, π, 3 pi/2s.
S3. acquisition phase shift interference tetra- road optical signal of Hou is to obtain synchronous phase-shifted interference pattern；
S4. parameter calibration is carried out to the synchronization phase-shifted interference pattern of acquisition, specifically:
The light intensity for acquiring synchronous phase-shifted interference pattern is expressed as
In formula, Io1And Ir1The measurement light light intensity and reference light light intensity of first passage are respectively represented,Measurement phase is represented,
ko1、ko2、ko3Respectively represent second and third, the collected measurement light intensity of four-way is relative to the collected measurement light intensity of first passage
Ratio, kr1、kr2、kr3Respectively represent second and third, four-way it is collected with reference to light intensity it is collected relative to first passage
With reference to the ratio of light intensity, Δ γ21、Δγ31、Δγ41Respectively represent second and third, four-way introduce phase-shift phase and the 1st channel
The difference of the phase-shift phase of introducing；
The parameter value of calibration is respectively as follows: ko1、ko2、ko3、kr1、kr2、kr3、Δγ21、Δγ31And Δ γ41；
Specifically:
For the phase shift interference signal in any one channel:
Ding Walk by Piezoelectric Ceramic reference mirror or measured piece Yi Heng to be moved away from (such as Δ h=10nm), and
A series of interference light intensity figures of synchronous acquisition, the phase shift intervals such as each pixel (x, y) position in available visual fieldInterference light intensity delta data, i.e.,
In(x, y) represents what certain pixel was detected when Piezoelectric Ceramic reference mirror or tested exemplar advance the n-th step
Interference light intensity.
Assuming that λ=620nm, the every introduced phase shift interval that moves a step that moves of piezoelectric ceramics areIt is probably mobile
After 31 steps, the interference light intensity of the pixel changes a cycle, using matlab to this 31 light intensity datas of the pixel
Point does Fourier fitting, can be in the hope of the initial phase of matched curve, the as corresponding phase difference of elemental height information
With phase difference γ caused by light channel structureiThe sum of (x, y)；
It enablesThe initial phase distribution for the i-th tunnel optical path that fitting obtains is represented, then
Wherein, Δγ21(x, y)~Δ γ41(x, y) respectively represent the 2nd, 3, the phase that introduces of 4 channels
The difference for the phase-shift phase that shifting amount and first passage introduce.
S5. the synchronization phase-shifted interference pattern that tested exemplar is acquired using step S1~S3, using the parameter value of calibration to quilt
The synchronization phase-shifted interference pattern of test sample part is analyzed and processed to obtain the measurement phase of tested exemplar, to obtain tested exemplar
Surface temporal structure.
Specifically: measurement phaseExpression formula are as follows:
A=(kr1ko2-kr2ko1)I1-(ko2-kr2)I2+(ko1-kr1)I3
B=(kr1ko3-kr3ko1)I1-(ko3-kr3)I2+(ko1-kr1)I4
Wherein,A、
B, a, b, c and d are coefficient；
Gained sample surface elevation information is
Measure phaseRepresent actual phaseThe phase-shift phase Δ γ introduced with first passage1The sum of, if Δ γ1Value
It is uniform, Δ γ under normal circumstances in measurement visual field1(or even Δ γ2~4) value be uniform in entire interference pattern visual field
, which can be used PV value to judge.A threshold value δ (> 0) can be set, ifIt then can be direct
?As the phase distribution of sample surface, pass throughAcquire the elevation information of sample surface；Conversely, then also needing
It will be fromMiddle to be subtracted, to obtain truly surface phase distribution, sample surface relative altitude information is at this time
Color LED is used to obtain the interferometric phase φ of three color of red, green and blue for light sourceR, φG, φB(above-mentioned calibration process is wanted
It executes three times, respectively corresponds tri- components of R, G, B that colored interference figure decomposes.), calculate red-green glow effective wavelength λRGWith it is green
Blue light effective wavelength λGBCorresponding equivalent phase φRG=φR-φGAnd φGB=φG-φB；
mRG、mGBThe number of cycles series of respectively two effective wavelength phases, meets mRG≥mGBIt is utilized under conditions of >=0
FInite Element acquires equation (λRG/2)*mRG+φRGλRG/ 4 π=(λGB/2)*mGB+φGBλGBM in/4 πRGAnd mGBMinimal solution, will
The m of minimal solutionRGSubstitute into L=(λRG/2)*mRG+φRGλRG/ 4 π to L values；
L is substituted into equation L=(λR/2)*mR+φ'RλR/ 4 π, L=(λG/2)*mG+φG'λG/ 4 π and L=(λB/2)*mB+
φB'λB/ 4 π, φ hereR'、φG' and φB' be respectively three color of red, green and blue modified interferometric phase, limit φR'∈(-
π,π)、φG'∈(-π,π)、φB' ∈ (- π, π) and mR、mGAnd mBFor integer, the m of integer is acquiredR、mG、mB；
By mR、mG、mBSubstitute into LR=(λR/2)*mR+φRλR/4π、LG=(λG/2)*mG+φGλG/4π、LB=(λB/2)*mB+
φBλB/ 4 π, obtained LR、LGAnd LBValue is averaged, and resulting average value is to obtain measuring point height.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of multi-wavelength and the bisynchronous surface method for real-time measurement of phase shift interference, which is characterized in that specifically:
S1. incident light light source provided is decomposed into mutually orthogonal reference light and measurement light；
S2. reference light is broken down into behind four tunnels synchronous progress phase shift respectively with measurement light and interferes；
S3. acquisition phase shift interference tetra- road optical signal of Hou is to obtain synchronous phase-shifted interference pattern；
S4. parameter calibration is carried out to the synchronization phase-shifted interference pattern of acquisition, specifically:
The light intensity for acquiring synchronous phase-shifted interference pattern is expressed as
In formula, Io1And Ir1The measurement light light intensity and reference light light intensity of first passage are respectively represented,Represent measurement phase, ko1、
ko2、ko3Respectively represent second and third, the collected measurement light intensity of four-way is relative to the collected measurement light intensity of first passage
Ratio, kr1、kr2、kr3Respectively represent second and third, four-way it is collected with reference to light intensity relative to the collected ginseng of first passage
Examine the ratio of light intensity, Δ γ21、Δγ31、Δγ41Respectively represent second and third, four-way introduce phase-shift phase draw with the 1st channel
The difference of the phase-shift phase entered；
The parameter value of calibration is respectively as follows: ko1、ko2、ko3、kr1、kr2、kr3、Δγ21、Δγ31And Δ γ41；
S5. light splitting phase shift interference tetra- road optical signal of Hou is acquired to obtain synchronous phase-shifted interference pattern using step S1~S3, and
It is analyzed and processed to obtain the measurement phase of tested exemplar, to obtain the surface temporal structure of tested exemplar.
2. a kind of multi-wavelength according to claim 1 and the bisynchronous surface method for real-time measurement of phase shift interference, feature
It is, step S2 is divided reference light and measurement light using light splitting phase shift module, phase shift and interference, wherein the light splitting
Phase shift module includes a piece of achromatism quarter wave plate, three one-to-two spectral modules and four pieces of analyzers, wherein four pieces of analyzings
The optical direction of device is respectively set to 0, π/4, pi/2,3 π/4, and reference light and measurement light successively pass through achromatism quarter wave plate, one
One-to-two spectral module is placed sequentially in conplane two one-to-two spectral modules and is placed sequentially in conplane four
Block analyzer, with realize by the reference light and measurement light become the opposite circularly polarized light in direction of rotation and it is parallel be divided into symmetrically
Four road optical signals, and the phase shift generated to four road optical signals is made to be respectively 0, pi/2, π, 3 pi/2s.
3. a kind of multi-wavelength according to claim 1 and the bisynchronous surface method for real-time measurement of phase shift interference, feature
It is, the measurement phaseExpression formula are as follows:
Wherein,A、B、a、
B, c and d is coefficient.
4. a kind of multi-wavelength according to claim 3 and the bisynchronous surface method for real-time measurement of phase shift interference, feature
It is, the measurement phaseRepresent actual phaseThe phase-shift phase Δ γ introduced with first passage1The sum of, Δ γ1Value be more than
Preset error range, sample surface elevation information are
5. a kind of multi-wavelength according to claim 3 or 4 and the bisynchronous surface method for real-time measurement of phase shift interference, special
Sign is, realizes measuring point elevation carrection Range Extension using the light source of multi-wavelength, specifically:
Color LED is used to obtain the interferometric phase φ of three color of red, green and blue for light sourceR, φG, φB, calculate red-green glow effective wavelength
λRGWith green-blue light effective wavelength λGBCorresponding equivalent phase φRG=φR-φGAnd φGB=φG-φB；
λR、λGAnd λBRespectively red, green and blue optical wavelength；mR、mGAnd mBThe respectively number of cycles of red, green and blue optical wavelength phase
Series；mRG、mGBThe number of cycles series of respectively two effective wavelength phases, meets mRG≥mGBUsing limited under conditions of >=0
First method acquires equation (λRG/2)*mRG+φRGλRG/ 4 π=(λGB/2)*mGB+φGBλGBM in/4 πRGAnd mGBMinimal solution, will be minimum
The m of solutionRGSubstitute into L=(λRG/2)*mRG+φRGλRG/ 4 π obtain L value；
L is substituted into equation L=(λR/2)*mR+φ'RλR/ 4 π, L=(λG/2)*mG+φG'λG/ 4 π and L=(λB/2)*mB+φB'
λB/ 4 π, φ hereR'、φG' and φB' be respectively three color of red, green and blue modified interferometric phase, limit φR'∈(-π,
π)、φG'∈(-π,π)、φB' ∈ (- π, π) and mR、mGAnd mBFor integer, the m of integer is acquiredR、mG、mB；
By mR、mG、mBSubstitute into LR=(λR/2)*mR+φRλR/4π、LG=(λG/2)*mG+φGλG/4π、LB=(λB/2)*mB+φB
λB/ 4 π, obtained LR、LGAnd LBValue is averaged, and resulting average value is to obtain measuring point height.
6. a kind of multi-wavelength and the bisynchronous surface real-time measurement system of phase shift interference, which includes light source, intervention module, divides
Light phase shift module and CCD image-forming module, wherein the incident light that the intervention module is used to provide light source is decomposed into mutually orthogonal
Reference light and measurement light, the light splitting phase shift module be used for by reference light and measure light be broken down into behind four tunnels same stepping respectively
Row phase shift simultaneously interferes, and the CCD image-forming module is for acquiring phase shift interference tetra- road optical signal of Hou to obtain synchronous phase shift
Interference pattern, and be analyzed and processed to obtain the measurement phase of tested exemplar, so that the surface for obtaining tested exemplar is instantaneously tied
Structure, which is characterized in that
The synchronization phase-shifted interference pattern of the CCD image-forming module acquisition carries out parameter calibration before measuring, specifically:
The light intensity of synchronous phase-shifted interference pattern is expressed as
In formula, Io1And Ir1The measurement light light intensity and reference light light intensity of CCD image-forming module first passage are respectively represented,It represents and surveys
Measure phase, ko1、ko2、ko3Respectively represent CCD image-forming module second and third, the collected measurement light intensity of four-way relative to CCD at
As the ratio of the collected measurement light intensity of module first passage, kr1、kr2、kr3Respectively represent CCD image-forming module second and third, four-way
Road it is collected with reference to light intensity relative to the collected ratio with reference to light intensity of CCD image-forming module first passage, Δ γ21、Δ
γ31、Δγ41Respectively represent CCD image-forming module second and third, four-way introduce phase-shift phase and CCD image-forming module first passage
The difference of the phase-shift phase of introducing；
The parameter value of calibration is respectively as follows: ko1、ko2、ko3、kr1、kr2、kr3、Δγ21、Δγ31And Δ γ41。
7. a kind of multi-wavelength according to claim 6 and the bisynchronous surface real-time measurement system of phase shift interference, feature
It is, step S2 is divided reference light and measurement light using light splitting phase shift module, phase shift and interference, wherein the light splitting
Phase shift module includes a piece of achromatism quarter wave plate, three one-to-two spectral modules and four pieces of analyzers, four pieces of analyzers
Optical direction is respectively set to 0, π/4, pi/2,3 π/4, and reference light and measurement light successively pass through achromatism quarter wave plate, one one point
Two spectral modules are placed sequentially in conplane two one-to-two spectral modules and are placed sequentially in conplane four pieces of inspections
The reference light is become the opposite circularly polarized light in direction of rotation with measurement light and parallel is divided into symmetrical four Lu Guangxin by inclined device
Number, the phase shift that tetra- road optical signal of Qie Dui generates is respectively 0, pi/2, π, 3 pi/2s.
8. a kind of multi-wavelength according to claim 6 and the bisynchronous surface real-time measurement system of phase shift interference, feature
It is, the measurement phaseExpression formula are as follows:
Wherein,A、B、a、
B, c and d is coefficient.
9. a kind of multi-wavelength according to claim 8 and the bisynchronous surface real-time measurement system of phase shift interference, feature
It is, the measurement phaseRepresent actual phaseThe phase-shift phase Δ γ introduced with first passage1The sum of, Δ γ1Value be more than
Preset error range, sample surface elevation information are
10. a kind of multi-wavelength and the bisynchronous surface real-time measurement system of phase shift interference according to claim 8 or claim 9,
It is characterized in that, realizes measuring point elevation carrection Range Extension using the light source of multi-wavelength, specifically:
Color LED is used to obtain the interferometric phase φ of three color of red, green and blue for light sourceR, φG, φB, calculate red-green glow effective wavelength
λRGWith green-blue light effective wavelength λGBCorresponding equivalent phase φRG=φR-φGAnd φGB=φG-φB；
λR、λGAnd λBRespectively red, green and blue optical wavelength；mR、mGAnd mBThe respectively number of cycles of red, green and blue optical wavelength phase
Series；mRG、mGBThe number of cycles series of respectively two effective wavelength phases, meets mRG≥mGBUsing limited under conditions of >=0
First method acquires equation (λRG/2)*mRG+φRGλRG/ 4 π=(λGB/2)*mGB+φGBλGBM in/4 πRGAnd mGBMinimal solution, will be minimum
The m of solutionRGSubstitute into L=(λRG/2)*mRG+φRGλRG/ 4 π obtain L value；
L is substituted into equation L=(λR/2)*mR+φ'RλR/ 4 π, L=(λG/2)*mG+φG'λG/ 4 π and L=(λB/2)*mB+φB'
λB/ 4 π, φ hereR'、φG' and φB' be respectively three color of red, green and blue modified interferometric phase, limit φR'∈(-π,
π)、φG'∈(-π,π)、φB' ∈ (- π, π) and mR、mGAnd mBFor integer, the m of integer is acquiredR、mG、mB；
By mR、mG、mBSubstitute into LR=(λR/2)*mR+φRλR/4π、LG=(λG/2)*mG+φGλG/4π、LB=(λB/2)*mB+φB
λB/ 4 π, obtained LR、LGAnd LBValue is averaged, and resulting average value is to obtain measuring point height.
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