CN109148609A - A kind of gallium arsenide solar cell with anti-reflection layer - Google Patents

A kind of gallium arsenide solar cell with anti-reflection layer Download PDF

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Publication number
CN109148609A
CN109148609A CN201710498727.0A CN201710498727A CN109148609A CN 109148609 A CN109148609 A CN 109148609A CN 201710498727 A CN201710498727 A CN 201710498727A CN 109148609 A CN109148609 A CN 109148609A
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China
Prior art keywords
layer
gallium arsenide
solar cell
reflection layer
reflection
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CN201710498727.0A
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Chinese (zh)
Inventor
黄孝如
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Haimen Embroidery Industrial Design Co Ltd
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Haimen Embroidery Industrial Design Co Ltd
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Priority to CN201710498727.0A priority Critical patent/CN109148609A/en
Priority to PCT/CN2017/091447 priority patent/WO2019000476A1/en
Publication of CN109148609A publication Critical patent/CN109148609A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H01L31/0693Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells the devices including, apart from doping material or other impurities, only AIIIBV compounds, e.g. GaAs or InP solar cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/544Solar cells from Group III-V materials

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention discloses a kind of gallium arsenide solar cell with anti-reflection layer, the gallium arsenide solar cell successively includes: gallium arsenide substrate;Back electric field layer in gallium arsenide substrate;GaAs p-n junction on back electric field layer, the GaAs p-n junction includes the N-shaped gallium arsenide layer and p-type gallium arsenide layer being stacked;Aluminum gallium arsenide Window layer on GaAs p-n junction;Contact electrode layer in aluminum gallium arsenide Window layer;Anti-reflection layer on contact electrode layer;And several electrodes on contact electrode layer.By the way that anti-reflection structure is added in the present invention, the light of reflection can be substantially reduced, the photoelectric conversion efficiency of solar battery is improved.

Description

A kind of gallium arsenide solar cell with anti-reflection layer
Technical field
The invention belongs to photovoltaic technology field, more particularly to a kind of gallium arsenide solar cell with anti-reflection layer.
Background technique
The development of gallium arsenide solar cell is that have more than 50 years so far and go through since the fifties in last century History.Discovery GaAs material has photovoltaic effect for the first time in the world within 1954, and in 1956, LoferskiJ.J. and his team were visited The physical property of the optimal material of manufacture solar cell is begged for, it is highest that they point out that material of the Eg within the scope of 1.2~1.6eV has Transfer efficiency.In the 1960s, Gobat etc., which has developed the 1st, mixes zinc GaAs solar cell, but conversion ratio is not high, only 9%~10%, the theoretical value far below 27%.In the 1970s, IBM Corporation and former Soviet Union's Ioffe technology physics wait as representative Research unit, using LPE (liquid phase epitaxy) technology introduce the heterogeneous Window layer of GaAlAs, reduce the compound speed on the surface GaAs Rate makes the efficiency of GaAs solar cell up to 16%.Soon, the HRL and Spectrolab in the U.S. are made by improving LPE technology The average efficiency of battery reaches 18%, and realizes batch production, has started the new era of high efficiency gallium arsenide solar cell.From After the eighties in last century, GaAs solar cell technology be experienced from LPE to MOCVD, from homoepitaxy to hetero-epitaxy, from unijunction To several developing stage of more knot laminated construction, development speed is increasingly accelerated, and efficiency is also continuously improved, at present laboratory highest Efficiency has reached 50%, and industry produces conversion ratio up to 30% or more.
But in gallium arsenide solar cell, quite a few light is had since the reflection of sunlight cannot be introduced into absorbed layer In, leverage the photoelectric conversion efficiency of gallium arsenide solar cell.
Therefore, in view of the above-mentioned problems, it is necessary to propose a kind of gallium arsenide solar cell with anti-reflection layer.
Summary of the invention
In view of this, the present invention provides a kind of gallium arsenide solar cells with anti-reflection layer.
In order to achieve the above-mentioned object of the invention, the present invention provides a kind of gallium arsenide solar cell with anti-reflection layer, should Gallium arsenide solar cell successively includes:
Gallium arsenide substrate;
Back electric field layer in gallium arsenide substrate;
GaAs p-n junction on back electric field layer, GaAs p-n junction includes the N-shaped gallium arsenide layer and p-type arsenic being stacked Gallium layer;
Aluminum gallium arsenide Window layer on GaAs p-n junction;
Contact electrode layer in aluminum gallium arsenide Window layer;
Anti-reflection layer on contact electrode layer;
And several electrodes on contact electrode layer.
As a further improvement of the present invention, the anti-reflection layer includes the first anti-reflection layer and the second anti-reflection layer, institute The first anti-reflection layer position magnesium fluoride layer is stated, the second anti-reflection layer is zinc sulfide layer.
As a further improvement of the present invention, first anti-reflection layer with a thickness of 30 ~ 50nm, the second anti-reflection layer With a thickness of 50 ~ 100nm.
As a further improvement of the present invention, gaas buffer is formed between the gallium arsenide substrate and back electric field layer Layer.
As a further improvement of the present invention, the GaAs buffer layer includes CT GaAs buffer layer and high temperature arsenic Gallium buffer layer.
As a further improvement of the present invention, the CT GaAs buffer layer with a thickness of 10 ~ 50nm, high temperature GaAs Buffer layer with a thickness of 50 ~ 100nm.
As a further improvement of the present invention, the N-shaped gallium arsenide layer with a thickness of 1 ~ 10 μm, the thickness of p-type gallium arsenide layer Degree is 100 ~ 500nm.
Compared with prior art, the beneficial effects of the present invention are:
By the way that the double-deck anti-reflection structure of magnesium fluoride layer and zinc sulfide layer is added in the present invention, the light of reflection can be substantially reduced Line improves the photoelectric conversion efficiency of solar battery.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The some embodiments recorded in invention, for those of ordinary skill in the art, without creative efforts, It is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural representation of the gallium arsenide solar cell in the embodiment of the invention with anti-reflection layer Figure.
Specific embodiment
Below by a detailed description of the technical solution in the embodiment of the present invention is provided, it is clear that described embodiment is only It is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill Personnel's every other embodiment obtained without making creative work belongs to the model that the present invention protects It encloses.
To join shown in Fig. 1, one of embodiment of the invention has the gallium arsenide solar cell of anti-reflection layer, The gallium arsenide solar cell successively includes:
Gallium arsenide substrate 10;
Back electric field layer 20 in gallium arsenide substrate;
GaAs p-n junction on back electric field layer, GaAs p-n junction includes the N-shaped gallium arsenide layer 31 and p-type arsenic being stacked Change gallium layer 32;
Aluminum gallium arsenide Window layer 40 on GaAs p-n junction;
Contact electrode layer 50 in aluminum gallium arsenide Window layer;
Anti-reflection layer on contact electrode layer;
And several electrodes 70 on contact electrode layer.
Wherein, anti-reflection layer includes the first anti-reflection layer 61 and the second anti-reflection layer 62, the first anti-reflection layer position magnesium fluoride Layer, the second anti-reflection layer are zinc sulfide layer.Preferably, the first anti-reflection layer 61 with a thickness of 30 ~ 50nm, the second anti-reflection layer 62 With a thickness of 50 ~ 100nm.
Further, GaAs buffer layer, arsenic are formed between gallium arsenide substrate and back electric field layer in present embodiment Gallium buffer layer includes CT GaAs buffer layer 81 and high temperature GaAs buffer layer 82.Preferably, CT GaAs buffer layer With a thickness of 10 ~ 50nm, be prepared under the conditions of 500 DEG C~550 DEG C, high temperature GaAs buffer layer with a thickness of 50 ~ 100nm is prepared under the conditions of 650 DEG C~710 DEG C.
Back electric field layer in the present invention can be avoided carrier caused by solar-electricity bottom of pond portion and expand toward incorrect direction It dissipates, can have carrier on the p-n junction of light absorbing layer, and then improve the collection efficiency of carrier.In addition, back electric field The use of layer can increase spectral response of the solar battery to infrared region, and reduce the combined efficiency of carrier.
As can be seen from the above technical solutions, in gallium arsenide solar cell of the invention, due to the anaclasis of GaAs Rate is 3.6 or so, if not applicable anti-reflection layer, has a large amount of sunlight and reflected and cannot be introduced into absorbed layer, in the present invention By the way that the double-deck anti-reflection structure of magnesium fluoride layer and zinc sulfide layer is added, the light of reflection can be substantially reduced, the sun is improved The photoelectric conversion efficiency of energy battery.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the embodiments can also be closed suitably, and forming those skilled in the art can With the other embodiments of understanding.

Claims (7)

1. a kind of gallium arsenide solar cell with anti-reflection layer, which is characterized in that the gallium arsenide solar cell is successively Include:
Gallium arsenide substrate;
Back electric field layer in gallium arsenide substrate;
GaAs p-n junction on back electric field layer, the GaAs p-n junction includes the N-shaped gallium arsenide layer being stacked and p-type Gallium arsenide layer;
Aluminum gallium arsenide Window layer on GaAs p-n junction;
Contact electrode layer in aluminum gallium arsenide Window layer;
Anti-reflection layer on contact electrode layer;
And several electrodes on contact electrode layer.
2. a kind of gallium arsenide solar cell with anti-reflection layer according to claim 1, which is characterized in that described anti- Reflecting layer includes the first anti-reflection layer and the second anti-reflection layer, first anti-reflection layer position magnesium fluoride layer, the second anti-reflection layer For zinc sulfide layer.
3. a kind of gallium arsenide solar cell with anti-reflection layer according to claim 2, which is characterized in that described One anti-reflection layer with a thickness of 30 ~ 50nm, the second anti-reflection layer with a thickness of 50 ~ 100nm.
4. a kind of gallium arsenide solar cell with anti-reflection layer according to claim 1, which is characterized in that the arsenic Change and is formed with GaAs buffer layer between gallium substrate and back electric field layer.
5. a kind of gallium arsenide solar cell with anti-reflection layer according to claim 4, which is characterized in that the arsenic Changing gallium buffer layer includes CT GaAs buffer layer and high temperature GaAs buffer layer.
6. a kind of gallium arsenide solar cell with anti-reflection layer according to claim 5, which is characterized in that described low Warm GaAs buffer layer with a thickness of 10 ~ 50nm, high temperature GaAs buffer layer with a thickness of 50 ~ 100nm.
7. a kind of gallium arsenide solar cell with anti-reflection layer according to claim 1, which is characterized in that the n P type gallium arensidep layer with a thickness of 1 ~ 10 μm, p-type gallium arsenide layer with a thickness of 100 ~ 500nm.
CN201710498727.0A 2017-06-27 2017-06-27 A kind of gallium arsenide solar cell with anti-reflection layer Withdrawn CN109148609A (en)

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CN201710498727.0A CN109148609A (en) 2017-06-27 2017-06-27 A kind of gallium arsenide solar cell with anti-reflection layer
PCT/CN2017/091447 WO2019000476A1 (en) 2017-06-27 2017-07-03 Gallium arsenide solar cell with anti-reflection layer

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Publication number Priority date Publication date Assignee Title
CN103579380A (en) * 2012-08-09 2014-02-12 索尼公司 Light-receiving or light-emitting component, solar cell, optical sensor and LED
CN103165686B (en) * 2013-02-28 2016-02-17 溧阳市生产力促进中心 A kind of five-junction solar cell with antireflective coating
CN106784127B (en) * 2015-11-20 2019-02-01 北京创昱科技有限公司 A kind of binode Thinfilm solar cell assembly and preparation method thereof

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