CN109087879A - A kind of manual pickling rotating jig - Google Patents
A kind of manual pickling rotating jig Download PDFInfo
- Publication number
- CN109087879A CN109087879A CN201811068963.XA CN201811068963A CN109087879A CN 109087879 A CN109087879 A CN 109087879A CN 201811068963 A CN201811068963 A CN 201811068963A CN 109087879 A CN109087879 A CN 109087879A
- Authority
- CN
- China
- Prior art keywords
- pickling
- gear
- manual
- rotating jig
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The invention discloses a kind of manual pickling rotating jig, including water tank box and fixing tool, fixing tool includes two pickling frames, and several support rods are vertically equipped between two pickling frames, and the middle part of each support rod is equipped at least one annular slot；Two pickling outer frame sides are respectively equipped with bracket, and pickling outer frame side passes through rotation connection axis respectively and is rotationally connected in the first mounting hole of bracket；One of rotation connection axis is equipped with first gear；Cabinet is equipped with the second mounting hole, interior to be equipped with transmission shaft, and transmission shaft is equipped with second gear, second gear and the ratcheting connection of first gear.In conclusion driving product rotation by the rotation of handle hand-operated gear, product is set to rotate pickling, product is caused product quality more to idealize by the degree one of pickling, and different depth pressure is all influential on pickling degree.Operator does not contact with pickling solution, has further ensured operator's safety, and hand replacement overturning push-and-pull, has more saved labour, more efficient.
Description
Technical field
The invention belongs to semiconductor material cleaning equipment technical fields, and in particular to a kind of manual pickling rotating jig.
Background technique
Silicon wafer must be cleaned strictly in semiconductor devices production.Micropollution also results in component failure.The purpose of cleaning
It is to remove surface contamination impurity, including organic matter and inorganic matter.These impurity some have with state of atom or ionic condition
In the form of a film or particle form is present in silicon chip surface, will lead to various defects.
The pickling solution main character of silicon product pickling be highly acid, strong corrosive and effumability, materials chemistry cleaning in
The impurity contamination of material surface is mainly removed using its highly acid and strong corrosive and technique corrosion treatment is carried out to part.It is existing
Some manual cleaning devices are the manual Mobile tool of horizontal lying-type to clean, and rotary tooling is then to rotate to drive main shaft by gear
Rotation make part rotation to reach piece surface with cleaning solution is full and uniform contacts, guarantee that workpiece reaches technique and requires.For
As for this fragile material of silicon, during pickling operation, to part must first fix tightly, prevent from shifting in rotary course
It slips and leads to part injury.
Existing manual pickling can be clamped small silicon chip to overturn in descaling bath by tweezers and be dragged effectively to clean,
It is then to crouch to put in descaling bath after fixing by tooling to reach cleaning part purpose by dragging tooling back and forth for large-scale silicon wafer.
Although both the above tooling can make the part after pickling reach technique requirement, when using tweezers clamping part, there is danger
Dangerous factor, as operator clamps, dynamics is inadequate, and part may slide from tweezers and cause part injury；When overturning part
It may also can collide with and cause to damage, and not can guarantee part in switching process and uniformly contacted with pickling solution, part turns over
Turn to drive liquid, liquid may be made to sputter from washing trough and come, although operator has dressed protective garment, but exists certain
Risk.The manual pickling tooling of horizontal is also in this way, being fixed part with the strut of V-groove by 4 outer circles, in washing trough
Middle Manual push-pull tooling can also make acid solution splash, and operation is excessively laborious, inefficient.
Therefore existing pickling, which is controlled, has the disadvantages that
1) traditional manual pickling part requires greatly close contact acid solution, although operator has dressed protective gear,
Its own safety can not be ensured completely；
2) it is clamped using tweezers or the sleeping pickling frame that pushes away is then very painstaking and not can guarantee the safety of part；
3) with tweezers clamp pickling and it is sleeping push away pickling and not can guarantee pickling uniformity, the roundness of aperture does not reach requirement.
In view of the above-mentioned problems, proposing the present invention.
Summary of the invention
The object of the present invention is to provide a kind of manual pickling rotating jigs.
For achieving the above object, the technical scheme is that a kind of manual pickling rotating jig, including water tank case
Body 13 and fixing tool, in which:
Fixing tool includes two pickling frames 2, and two pickling frames 1 are parallel, interval is arranged, vertical between two pickling frames 1
Equipped with several support rods 3, two ends of each support rod 3 are connected on two pickling frames 2；In each support rod 3
The corresponding position in portion is equipped at least one annular slot 4；Bracket 1 is respectively equipped on the outside of two pickling frames 2, on each bracket 1
Equipped with the first mounting hole 12, two 2 outsides of the pickling frames are rotationally connected with bracket 1 the by two rotation connection axis 8 respectively
In one mounting hole 12,2 bottom of pickling frame is higher than 1 bottom of bracket；One of rotation connection axis 8 is equipped with first gear 7；
Cabinet 13 is equipped with the second mounting hole 14, and transmission shaft is equipped in the second mounting hole 14, and one end of transmission shaft is set to case
13 outside of body, the other end are equipped with second gear 5, second gear 5 and the ratcheting connection of first gear 7, rotate the transmission shaft with band
Dynamic pickling frame 2 rotates vertically in bracket 1.
Wherein, support rod 3 is locked by detachable locking device on pickling frame 2.
Wherein, between first gear 7 and second gear 5 by the ratcheting connection of third gear 6, the first gear 7, second
Gear 5 and second gear 6 are arranged from the bottom up respectively.
Wherein, 3 quantity at least three of support rod.
Wherein, 4 groove body cross section of annular slot is V-type.
Wherein, the first mounting hole 12 is skewed slot, is communicated at the top of the top of the chute and support frame 1.
Wherein, one end that transmission shaft is set to 13 outside of cabinet is equipped with handle 11.
Wherein, two brackets 1 are plate-like support plate, and it is opposite to be removably fixed in cabinet 14 on the outside of two support plates respectively
Two inner walls on.
Wherein, pickling frame 2 is equipped with several through-holes 10.
Wherein, fixing tool is PVDF corrosion resistant material.
The beneficial effects of the present invention are:
Manual pickling rotating jig of the invention is rotated by handle hand-operated gear and drives product rotation, rotates product
Pickling, product is caused product quality more to idealize by the degree one of pickling, and in acid cleaning process, different depth pressure is to pickling
Degree is all influential.Operator does not contact other than loading/unloading products with pickling solution, has further ensured operator's safety, and
It is hand to replace overturning push-and-pull, more save labour, it is more efficient.
Detailed description of the invention
When considered in conjunction with the accompanying drawings, by referring to following detailed description, the present invention can be more completely and better understood with
And be easy to learn many adjoint advantages, but the drawings described herein are used to provide a further understanding of the present invention,
A part of the invention is constituted, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, does not constitute to this hair
Bright improper restriction, in which:
Fig. 1 is a kind of side structure schematic diagram of manual pickling rotating jig of the invention；
Fig. 2 is a kind of schematic perspective view of manual pickling rotating jig of the invention；
Fig. 3 is a kind of configuration schematic diagram of manual pickling rotating jig of the invention；
Fig. 4 is a kind of box structure diagram of manual pickling rotating jig of the invention.
Specific embodiment
Below in conjunction with attached drawing to the present invention, technical scheme in the embodiment of the invention is clearly and completely described.
As shown in Figs 1-4, a kind of manual pickling rotating jig, including water tank box 13 and fixing tool, in which:
Fixing tool includes two pickling frames 2, and two pickling frames 1 are parallel, interval is arranged, vertical between two pickling frames 1
Equipped with several support rods 3, two ends of each support rod 3 are connected on two pickling frames 2；In each support rod 3
The corresponding position in portion is equipped at least one annular slot 4；Bracket 1 is respectively equipped on the outside of two pickling frames 2, on each bracket 1
Equipped with the first mounting hole 12, two 2 outsides of pickling frame are rotationally connected with the peace of bracket 1 first by two rotation connection axis 8 respectively
It fills in hole 12,2 bottom of pickling frame is higher than 1 bottom of bracket；One of rotation connection axis 8 is equipped with first gear 7；
Cabinet 13 is equipped with the second mounting hole 14, and transmission shaft is equipped in the second mounting hole 14, and one end of transmission shaft is set to case
13 outside of body, the other end are equipped with second gear 5, second gear 5 and the ratcheting connection of first gear 7, rotate the transmission shaft with band
Dynamic pickling frame 2 rotates vertically in bracket 1.
Working principle: pickling workpiece 9 is clamped in the annular slot 4 of several support rods 3, and several support rods are from different directions
It is clamped in pickling frame, pickling frame 2 is rotationally connected on the bracket 1 of two sides, and is placed in water tank box 13, is led to
It crosses rotating drive shaft and drives second gear and first gear rotation, so that rotation connection axis 8 be driven to rotate, be rotatablely connected 8 band of axis
Dynamic pickling frame 2 rotates, to drive pickling workpiece to rotate, due to containing pickling solution in water tank box 13, so pickling workpiece can
Uniformly to be rotated in pickling solution, make pickling workpiece surface with pickling solution is full and uniform contacts, guarantee that workpiece reaches technique requirement,
And this method of clamping, it is not easy to injuring part, and grip securely；Operator does not contact with pickling solution, ensures
The safety of operator.
More preferably technical solution, support rod 3 are locked by detachable locking device on pickling frame 2.Detachable lock
Tight device screw nut preferably at low cost, adjustment and replacement support rod 3 easy to disassemble.
More preferably technical solution, by the ratcheting connection of third gear 6 between first gear 7 and second gear 5, described first
Gear 7, second gear 5 and second gear 6 are arranged from the bottom up respectively.Multiple gear mesh connection, and arranging up and down, can be with
So that the position of the second mounting hole on cabinet 13 is higher than pickling frame, the liquid level of pickling solution is allow to be higher than pickling frame.
More preferably technical solution, 3 quantity at least three of support rod.It can make from the fixed workpiece of at least three direction de-clampings
Fixed effect is more preferable, and more preferably the quantity of support rod 3 is four.
More preferably technical solution, 4 groove body cross section of annular slot are V-type.V-groove body and the edge of piece-holder are more kissed
It closes, can make to clamp stronger, and avoid damage to the edge of work.
More preferably technical solution, the first mounting hole 12 are skewed slot, are communicated at the top of the top of the chute and support frame 1.Pickling frame two
Two rotation connection axis 8 of side are put into skewed slot at the top of the first mounting hole and slide into bottom along skewed slot and fix, easy to disassemble.
More preferably technical solution, one end that transmission shaft is set to 13 outside of cabinet are equipped with handle 11.By convenient for rotation.
More preferably technical solution, two brackets 1 are plate-like support plate, are removably fixed in respectively on the outside of two support plates
On two opposite inner walls of cabinet 14.Cabinet wall is thickeied, the addition with pickling solution is prevented, cabinet middle part increases due to pressure
It heaves outward greatly, contact transmission shaft can not normally with cabinet, influence to rotate pickling.
More preferably technical solution, pickling frame 2 are equipped with several through-holes 10, and partial through holes 10 are more preferably set on pickling frame 2
At the outer rim of top, material on the one hand can be saved, on the other hand pickling frame is taken using tool hook convenient for operator, avoids operating
Personnel's close contact pickling solution.
More preferably technical solution, fixing tool are PVDF corrosion resistant material, are prolonged the service life.
In conclusion manual pickling rotating jig of the invention, is rotated by handle hand-operated gear and drives product rotation, made
Product rotates pickling, and product is caused product quality more to idealize by the degree one of pickling, in acid cleaning process, different depth pressure
Power is all influential on pickling degree.Operator does not contact other than loading/unloading products with pickling solution, has further ensured operation
Member's safety, and hand replacement overturning push-and-pull, more save labour, more efficient.
Claims (10)
1. a kind of manual pickling rotating jig, which is characterized in that including water tank box (13) and fixing tool, in which:
The fixing tool includes two pickling frames (2), and two pickling frames (1) are parallel, interval is arranged, two pickling
Several support rods (3) vertically are equipped between frame (1), two ends of each support rod (3) are connected to two pickling
On frame (2)；The corresponding position at the middle part of each support rod (3) is equipped at least one annular slot (4)；Two acid
It washes on the outside of frame (2) and is respectively equipped with bracket (1), each bracket (1) is equipped with the first mounting hole (12), two pickling frames
(2) outside is rotationally connected in (1) first mounting hole (12) of bracket by two rotation connection axis (8) respectively, the pickling frame
(2) bottom is higher than bracket (1) bottom；One of them described rotation connection axis (8) is equipped with first gear (7)；
The cabinet (13) is equipped with the second mounting hole (14), and transmission shaft is equipped in second mounting hole, the transmission shaft
One end is set on the outside of cabinet (13), and the other end is equipped with second gear (5), the second gear (5) and first gear (7) ratcheting company
It connects, rotates the transmission shaft to drive pickling frame (2) to rotate vertically in bracket (1).
2. a kind of manual pickling rotating jig according to claim 1, which is characterized in that the end of the support rod (3)
It is locked by detachable locking device on pickling frame (2).
3. a kind of manual pickling rotating jig according to claim 1, which is characterized in that the first gear (7) and the
Pass through third gear (6) ratcheting connection, the first gear (7), second gear (5) and second gear (6) between two gears (5)
It arranges from the bottom up respectively.
4. a kind of manual pickling rotating jig according to claim 1, which is characterized in that support rod (3) quantity is extremely
It is three few.
5. a kind of manual pickling rotating jig according to claim 1, which is characterized in that annular slot (4) groove body
Cross section is V-type.
6. a kind of manual pickling rotating jig according to claim 1, which is characterized in that first mounting hole (12) is
It is communicated at the top of skewed slot, the top of the chute and support frame (1).
7. a kind of manual pickling rotating jig according to claim 1, which is characterized in that the transmission shaft is set to cabinet
(13) one end on the outside of is equipped with handle (11).
8. a kind of manual pickling rotating jig according to claim 1, which is characterized in that two brackets (1) are
Plate-like support plate, two support plates outsides are removably fixed in respectively on two opposite inner walls of cabinet (14).
9. a kind of manual pickling rotating jig according to claim 1, which is characterized in that the pickling frame (2) is equipped with
Several through-holes (10).
10. a kind of manual pickling rotating jig according to claim 1, which is characterized in that the fixing tool is PVDF
Corrosion resistant material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811068963.XA CN109087879A (en) | 2018-09-13 | 2018-09-13 | A kind of manual pickling rotating jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811068963.XA CN109087879A (en) | 2018-09-13 | 2018-09-13 | A kind of manual pickling rotating jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109087879A true CN109087879A (en) | 2018-12-25 |
Family
ID=64841662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811068963.XA Pending CN109087879A (en) | 2018-09-13 | 2018-09-13 | A kind of manual pickling rotating jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109087879A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100687296B1 (en) * | 2005-12-27 | 2007-02-27 | 한국기계연구원 | Rotation type wafer carrier and cleaning apparatus with the same |
| TWM327751U (en) * | 2007-09-10 | 2008-03-01 | Horng Jinq Co Ltd | Rotary jig and tube engaging apparatus thereof |
| CN201556607U (en) * | 2009-09-30 | 2010-08-18 | 耿彪 | Multifunctional parabolic rotating mechanism |
| KR20120047411A (en) * | 2010-11-04 | 2012-05-14 | 현대자동차주식회사 | Automatic washing device for workpiece |
| TWM439254U (en) * | 2012-03-09 | 2012-10-11 | Solex Technology Corp | Wafer cleaning wafer rotation detecting structure |
| US20160086833A1 (en) * | 2014-09-19 | 2016-03-24 | Siconnex Customized Solutions Gmbh | Mounting System and Charging Method for Disc-Shaped Objects |
| CN106702496A (en) * | 2015-07-20 | 2017-05-24 | 有研半导体材料有限公司 | Device and method for eliminating surface damage of silicon wafer through acid etching |
| CN107321694A (en) * | 2017-08-01 | 2017-11-07 | 北京亦盛精密半导体有限公司 | A kind of fragile material pickling frame |
| CN208848859U (en) * | 2018-09-13 | 2019-05-10 | 北京亦盛精密半导体有限公司 | A kind of manual pickling rotating jig |
-
2018
- 2018-09-13 CN CN201811068963.XA patent/CN109087879A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100687296B1 (en) * | 2005-12-27 | 2007-02-27 | 한국기계연구원 | Rotation type wafer carrier and cleaning apparatus with the same |
| TWM327751U (en) * | 2007-09-10 | 2008-03-01 | Horng Jinq Co Ltd | Rotary jig and tube engaging apparatus thereof |
| CN201556607U (en) * | 2009-09-30 | 2010-08-18 | 耿彪 | Multifunctional parabolic rotating mechanism |
| KR20120047411A (en) * | 2010-11-04 | 2012-05-14 | 현대자동차주식회사 | Automatic washing device for workpiece |
| TWM439254U (en) * | 2012-03-09 | 2012-10-11 | Solex Technology Corp | Wafer cleaning wafer rotation detecting structure |
| US20160086833A1 (en) * | 2014-09-19 | 2016-03-24 | Siconnex Customized Solutions Gmbh | Mounting System and Charging Method for Disc-Shaped Objects |
| CN106702496A (en) * | 2015-07-20 | 2017-05-24 | 有研半导体材料有限公司 | Device and method for eliminating surface damage of silicon wafer through acid etching |
| CN107321694A (en) * | 2017-08-01 | 2017-11-07 | 北京亦盛精密半导体有限公司 | A kind of fragile material pickling frame |
| CN208848859U (en) * | 2018-09-13 | 2019-05-10 | 北京亦盛精密半导体有限公司 | A kind of manual pickling rotating jig |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3131149B2 (en) | Flow liquid scrubber cleaning method and apparatus | |
| KR20170007579A (en) | Bushing automated washing plant | |
| CN208848859U (en) | A kind of manual pickling rotating jig | |
| CN112605823A (en) | Chain production is with high-efficient automatic polishing equipment | |
| CN111014167A (en) | Intelligent cleaning machine for high-precision chip silicon production and cleaning method thereof | |
| CN110026397B (en) | Surface pretreatment method for metal stamping part | |
| US4516523A (en) | Apparatus for wetting apertured discs | |
| KR101872818B1 (en) | Cleaning and drying apparatus of metal products | |
| CN109087879A (en) | A kind of manual pickling rotating jig | |
| CN112427750A (en) | Automatic tapping equipment for metal pipe material | |
| CN205701644U (en) | A kind of cleaning device for mechanical parts | |
| JP2010104901A (en) | Automatic ultrasonic washing machine and automatic ultrasonic washing method | |
| CN209230400U (en) | A kind of heat-exchanger pipeline apparatus for eliminating sludge | |
| CN215008169U (en) | Rotary type flower basket for cleaning semiconductor wafer | |
| JP2001013677A (en) | Method of washing pellicle housing container | |
| CN212163854U (en) | Corrosion device is used in integrated circuit board production | |
| US3093149A (en) | Disc washing machine | |
| CN115472541A (en) | Method for improving poor CVD (chemical vapor deposition) particles and poor pollution | |
| CN211828700U (en) | Circular silicon chip handling device | |
| CN207770399U (en) | A kind of quartz wafer machine frame ultrasonic automatic cleaning machine | |
| CN208249197U (en) | Washing flow line | |
| CN211367744U (en) | Surface rust removing device for gear recovery processing | |
| CN113119600A (en) | Satellite antenna panel code spraying device | |
| KR20140001847U (en) | Device for treating of flat substrates | |
| CN213081095U (en) | Device for polishing cover plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |