JP2001013677A - Method of washing pellicle housing container - Google Patents

Method of washing pellicle housing container

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Publication number
JP2001013677A
JP2001013677A JP18135499A JP18135499A JP2001013677A JP 2001013677 A JP2001013677 A JP 2001013677A JP 18135499 A JP18135499 A JP 18135499A JP 18135499 A JP18135499 A JP 18135499A JP 2001013677 A JP2001013677 A JP 2001013677A
Authority
JP
Japan
Prior art keywords
cleaning
pellicle
pure water
ultrasonic
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18135499A
Other languages
Japanese (ja)
Inventor
Kazutoshi Sekihara
一敏 関原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP18135499A priority Critical patent/JP2001013677A/en
Publication of JP2001013677A publication Critical patent/JP2001013677A/en
Pending legal-status Critical Current

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Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PROBLEM TO BE SOLVED: To eliminate the need for the manpower of washing work and to improve the washing capacity and productivity by successively executing a shower washing to spray a washing liquid and an ultrasonic washing with a surfactant and in pure water, then executing dehydration and drying. SOLUTION: This method consists of respective stages for the shower washing to spray the washing liquid from a nozzle, the ultrasonic washing using the surfactant aqueous solution as the washing liquid, the shower washing to spray the pure water from the nozzle, the ultrasonic washing to use the pure water as the washing liquid, dehydrating and drying. The high washing capability may be obtained by executing the ultrasonic washing by taking the arrangement of the wash in shower washing and washing tanks and the flow of the washing liquid into consideration. The washing device is successively arrayed with the shower washing device 121, the ultrasonic washing device 122 using the aqueous surfactant solution, the shower washing device 123 using the pure water, ultrasonic washing device 124 using the pure water, the shower washing device 123 using the pure water, the dehydrating device 125 and the drying device 126 on a washing device stand 120.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、リソグラフィー用
ペリクル、特にはＬＳＩ、超ＬＳＩなどの半導体装置あ
るいは液晶表示板を製造する際のゴミよけとして、実質
的に５００ｎｍ以下の光を用いる露光方式に有用な帯電
防止されたリソグラフィー用ペリクルの収納容器の洗浄
方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an lithography pellicle, and more particularly, to an exposure method using light of substantially 500 nm or less as dust avoidance when manufacturing a semiconductor device such as an LSI or a super LSI or a liquid crystal display panel. The present invention relates to a method for cleaning a container for storing a pellicle for lithography, which is useful for antistatic purposes.

【０００２】[0002]

【従来の技術】ＬＳＩ、超ＬＳＩなどの半導体或いは液
晶表示板などの製造においては、半導体ウエハー或いは
液晶用原板に光を照射してパターニングが行われるが、
このときに用いる露光原板にゴミが付着していると、こ
のゴミが光を吸収したり光を曲げてしまうために、転写
したパターンが変形したり、エッジががさついたものと
なるほか、下地が黒く汚れたりして、寸法、品質、外観
などが損なわれるという問題があった。このため、これ
らの作業は通常クリーンルーム内で行われているが、こ
のクリーンルーム内でも露光原板を常に清浄に保つこと
が難しいので、露光用の光をよく透過させるペリクル膜
を、ゴミなどの異物よけのために、露光原板の表面に貼
着する方法が採られている。この場合、異物は露光原板
の表面には付着せず、ペリクル膜に付着するため、リソ
グラフィー時に焦点を露光原板のパターン面に合わせて
おけば、ペリクル膜上の異物は転写に無関係となる。2. Description of the Related Art In the manufacture of semiconductors such as LSIs and VLSIs or liquid crystal display panels, patterning is performed by irradiating a semiconductor wafer or a liquid crystal original plate with light.
If dust is attached to the exposure original plate used at this time, the dust absorbs or bends the light, so that the transferred pattern is deformed or the edges are rough, and the base is There is a problem in that the surface is blackened and the dimensions, quality, appearance and the like are impaired. For this reason, these operations are usually performed in a clean room.However, it is difficult to keep the original exposure plate clean even in this clean room. For this purpose, a method of sticking to the surface of an original exposure plate has been adopted. In this case, the foreign matter does not adhere to the surface of the original exposure plate, but adheres to the pellicle film. Therefore, if the focus is adjusted to the pattern surface of the original exposure plate during lithography, the foreign matter on the pellicle film becomes irrelevant to the transfer.

【０００３】ペリクルは、通常、光をよく透過させるニ
トロセルロース、酢酸セルロースなどからなる透明なペ
リクル膜を、アルミニウム、ステンレス、ポリエチレン
などからなるペリクルフレームの上端面に、ペリクル膜
の良溶媒を塗布して接着し（米国特許第４８６１４０２
号明細書、特公昭６３−２７７０７号公報参照）、さら
に、ペリクルフレームの下端面には、露光原板に装着す
るためのポリブデン樹脂、ポリ酢酸ビニル樹脂、アクリ
ル樹脂等からなる粘着層、及び粘着層の保護を目的とし
た離型層（セパレータ）を形成している。また、このペ
リクルは、ペリクル膜を露光原板に貼り付けた状態にお
いて、ペリクルフレーム内部に囲まれた露光原板上の空
間と外部との気圧差をなくすことを目的として、ペリク
ルフレームの一部に気圧調整用の小孔を開け、小孔を通
じて移動する空気からの異物侵入を防ぐために、フィル
ターを設置する等の工夫がなされている（実公昭６３−
３９３７０３号公報参照）。A pellicle is usually prepared by coating a transparent pellicle film made of nitrocellulose, cellulose acetate, etc., which transmits light well, and a good solvent of the pellicle film on the upper end surface of a pellicle frame made of aluminum, stainless steel, polyethylene or the like. And bonded (US Pat. No. 4,861,402).
Further, on the lower end surface of the pellicle frame, an adhesive layer made of a polybutene resin, a polyvinyl acetate resin, an acrylic resin, or the like for mounting on an exposure original plate, and an adhesive layer A release layer (separator) is formed for the purpose of protection. This pellicle has a pellicle film attached to an exposure original plate, and a part of the pellicle frame has an air pressure in order to eliminate the pressure difference between the space on the exposure original plate surrounded by the inside of the pellicle frame and the outside. In order to prevent the intrusion of foreign matter from the air moving through the small holes, a device such as a filter has been devised (Japanese Utility Model Publication No. 63-63).
393703).

【０００４】ペリクル膜を露光原板へ貼り付けるには、
一般にペリクルを収納容器から自動あるいは手動にて取
り出し、直ちにペリクル膜面及びペリクルフレーム内壁
の異物検査を行い、セパレータを除去した後、露光原板
の所定の位置に合わせ、露光原板に平行にペリクルフレ
ームに一定時間、一定荷重をかけて貼り付ける方法が採
られている。このとき、貼り付け前の異物検査におい
て、ペリクル膜面あるいはペリクルフレーム内壁に許容
できない大きさの異物があった場合、これを除去するに
は、ペリクルの材質及び構造からエアブロー等の簡易な
方法しか採れない。このため、ペリクルに異物の付着が
あった場合、そのほとんどが直ちに不良品とされる。こ
れらの理由により、保管及び輸送中において、ペリクル
に異物の付着は決してあってはならず、ペリクル収納容
器、特にその内側表面には、きわめて高い清浄度が要求
される。To attach a pellicle film to an original exposure plate,
Generally, the pellicle is automatically or manually removed from the container, and immediately inspected for foreign matter on the pellicle film surface and the inner wall of the pellicle frame.The separator is removed. A method of applying a fixed load for a fixed time with a constant load is employed. At this time, in the inspection of foreign matter before bonding, if there is foreign matter of an unacceptable size on the pellicle film surface or the inner wall of the pellicle frame, it can be removed only by a simple method such as air blow based on the material and structure of the pellicle. I can't take it. For this reason, when foreign matter adheres to the pellicle, most of the foreign matter is immediately regarded as defective. For these reasons, during storage and transport, there should be no attachment of foreign matter to the pellicle, and very high cleanliness is required for the pellicle storage container, especially the inner surface thereof.

【０００５】図１は、本発明が対象とする一般的なペリ
クル収納容器であり、（ａ）は斜視図、（ｂ）は（ａ）
に示したペリクル収納容器のＡ−Ａ矢視線にそう縦断面
図である。ペリクル収納容器は、上蓋１、トレイ２及び
これらを４隅の角で結合保持するクリップ３から構成さ
れている。トレイ２はペリクル（図示せず）を載置保持
し、上蓋１はトレイ２に嵌合してペリクルを覆い、ペリ
クルの損傷及び異物の付着を防ぐ。FIGS. 1A and 1B show a general pellicle container to which the present invention is applied. FIG. 1A is a perspective view, and FIG.
2 is a vertical sectional view taken along line AA of the pellicle storage container shown in FIG. The pellicle container includes an upper lid 1, a tray 2, and a clip 3 for connecting and holding these at four corners. The tray 2 holds and holds a pellicle (not shown), and the upper lid 1 is fitted to the tray 2 to cover the pellicle, thereby preventing damage to the pellicle and adhesion of foreign matter.

【０００６】これらの構成部材は、アルミニウム合金、
ステンレス鋼等の金属で製作することも可能であるが、
一般には、大量生産に向いている、製造コストが低い、
表面が滑らかである等の理由により、樹脂を射出成形し
て製造される。このとき用いられる樹脂の材質として
は、例えば、ＡＢＳ、ＰＶＣ、ＰＰなどが挙げられる。
射出成形機は、油圧を利用して、金型中に樹脂を高速、
高圧で充填して製品を得る装置であるため、一般に、射
出成形工場の製造現場は、機械の潤滑油、グリース等の
油脂類、作業者の着衣等からの繊維くず等の異物が周辺
及び空間中に大量に存在する不清浄な環境となってい
る。さらに成形に際しては、金型に樹脂が固着するのを
防ぐために、離型剤（粉末または液体）も使用される。
このため、加工業者から納入されるペリクル収納容器の
表面は、多種多様な異物が無数に付着した極めて不清浄
な状態となっている。[0006] These components are made of aluminum alloy,
Although it is possible to manufacture with metal such as stainless steel,
Generally suitable for mass production, low production cost,
It is manufactured by injection molding a resin because of its smooth surface. As a material of the resin used at this time, for example, ABS, PVC, PP and the like can be mentioned.
Injection molding machines use a hydraulic pressure to feed resin into the mold at high speed,
Since the equipment is used to obtain products by filling at high pressure, the manufacturing site of an injection molding plant generally contains foreign substances such as lubricating oil for machines, grease and other grease, and fiber waste from workers' clothing, etc. It is an unclean environment with a large amount inside. Further, at the time of molding, a release agent (powder or liquid) is also used to prevent the resin from sticking to the mold.
For this reason, the surface of the pellicle storage container delivered from the processor is in an extremely unclean state in which various kinds of foreign substances are attached innumerably.

【０００７】[0007]

【発明が解決しようとする課題】現在、低コストで高性
能な洗浄方法としては、超音波洗浄が半導体工業のみな
らず一般に広く採用されている。超音波洗浄の代表的な
特徴として、洗浄力が強力であることや、複雑な形状や
細かなものでも隅々まで洗浄できることが挙げられる。
これは、超音波の基本的な性質によるもので、複雑な形
状や表面に凹凸があっても、洗浄液中で超音波が回折し
て隅々まで回り込み、また、超音波を照射された被洗浄
物が、超音波を反射して別の面に超音波を伝えるなどの
現象が起こっていることによる。しかしながら、被洗浄
物の材質の硬度が低いもの、例えば、樹脂やゴムなどの
場合、照射された超音波を吸収してしまうという現象が
生じ、本来の洗浄効果は見込めない。特に超音波の照射
方向に面していない部分では、照射された面から反射さ
れた超音波が届くといった現象は全く期待できず、洗浄
能力が著しく低下する。このため、一般的な樹脂製で複
雑な形状のペリクル容器に対しては、超音波洗浄のみで
ペリクル容器の全面にわたって良好な洗浄品質を得るこ
とは不可能であった。At present, as a low-cost and high-performance cleaning method, ultrasonic cleaning is widely used not only in the semiconductor industry but also in general. Typical features of ultrasonic cleaning include strong cleaning power and the ability to clean every corner even with complex shapes and small ones.
This is due to the basic properties of ultrasonic waves.Even if there is a complex shape or irregularities on the surface, the ultrasonic waves diffract in the cleaning liquid and wrap around to every corner. This is due to the phenomenon that an object reflects ultrasonic waves and transmits the ultrasonic waves to another surface. However, when the material to be cleaned has a low hardness, for example, resin or rubber, a phenomenon occurs in which the irradiated ultrasonic wave is absorbed, and the original cleaning effect cannot be expected. In particular, in a portion not facing the irradiation direction of the ultrasonic wave, the phenomenon that the ultrasonic wave reflected from the irradiated surface reaches cannot be expected at all, and the cleaning ability is significantly reduced. For this reason, it has been impossible to obtain good cleaning quality over the entire surface of the pellicle container only by ultrasonic cleaning for a general resin-made pellicle container having a complicated shape.

【０００８】上記理由により、従来、上蓋１とトレイ２
については、強力なスクラブ（scrub ）洗浄を行って殆
どの異物を除去した後、界面活性剤水溶液中で超音波洗
浄を行い、ついで純水中で超音波洗浄する方法が採られ
ていた。ペリクル収納容器は多くの曲面や突起を有する
ため、スクラブ作業を装置化することはきわめて困難で
あり、それゆえに、スクラブ洗浄は手作業で行われてい
た。この方法は、人手によるスクラブ作業に洗浄力の多
くを頼っているため、手作業のムラにより洗浄品質にば
らつきを生じ、また作業者の肉体的負担がきわめて大き
く、大量生産に不向きという問題があった。For the above-mentioned reason, conventionally, the upper lid 1 and the tray 2
As for the method, a method has been adopted in which, after removing most of the foreign substances by performing a strong scrub cleaning, ultrasonic cleaning is performed in an aqueous solution of a surfactant and then ultrasonic cleaning in pure water. Since the pellicle storage container has many curved surfaces and projections, it is extremely difficult to implement a scrub operation as a device, and therefore, scrub cleaning has been performed manually. Since this method relies on a large amount of cleaning power for manual scrubbing, the cleaning quality varies due to unevenness in manual work, and the physical burden on the worker is extremely large, which is not suitable for mass production. Was.

【０００９】また、洗浄したペリクル収納容器は、使用
するまでに乾燥させなければならないが、一般的な樹脂
製のペリクル収納容器は、熱により変形しやすいため、
強制乾燥の温度条件には制限がある。材質にもよるが、
例えば、ＡＢＳ樹脂の場合、７０℃以上に加熱するとペ
リクル収納容器として許容できない大きさの変形が生ず
る。さらに、樹脂の場合、水に対する濡れ性が悪いた
め、水は表面で広がらず、表面張力で凝集して滴状にな
る。このため、洗浄後のペリクル収納容器の乾燥は、許
容できる乾燥温度が低いこと、付着している水の表面積
の小さいことが相まって、非常に困難である。ペリクル
収納容器の材質にもよるが、フィルターを介して温風を
吹き付ける温風乾燥機を使用した場合、完全に乾燥させ
るためには概ね３０分以上を必要とし、極めて生産性が
悪い。このため、大量に処理する場合には、著しく大型
の温風乾燥機を用意する必要があった。しかし、実際に
は、製作できる乾燥機の大きさには制限があるため、ク
リーンルームのダウンフローにより自然乾燥させる方法
が採られていた。自然乾燥の場合、乾燥時間は４時間以
上必要であり、極めて生産性が悪い。このように従来の
乾燥方法には多くの問題があり、極めて生産性が悪かっ
た。Further, the washed pellicle storage container must be dried before use, but a general resin pellicle storage container is easily deformed by heat.
There are restrictions on the temperature conditions for forced drying. Depending on the material,
For example, in the case of ABS resin, when heated to 70 ° C. or more, deformation of an unacceptable size as a pellicle storage container occurs. Further, in the case of resin, water does not spread on the surface because of poor wettability to water, and aggregates by surface tension to form droplets. For this reason, drying of the pellicle storage container after washing is extremely difficult due to the low allowable drying temperature and the small surface area of the attached water. Although it depends on the material of the pellicle storage container, when a hot air dryer that blows hot air through a filter is used, it takes about 30 minutes or more to completely dry, and the productivity is extremely poor. For this reason, when processing in large quantities, it was necessary to prepare a remarkably large warm air dryer. However, in practice, the size of a dryer that can be manufactured is limited, and a method of naturally drying by a downflow in a clean room has been adopted. In the case of natural drying, a drying time of 4 hours or more is required, and the productivity is extremely poor. As described above, the conventional drying method has many problems, and the productivity is extremely low.

【００１０】他方、クリップ３については、その形状か
ら人手でスクラブ洗浄を行うことは極めて困難なため、
カゴ型の洗浄治具に数十個〜数百個の単位で収納し、界
面活性剤水溶液中で超音波洗浄を行った後、純水ですす
ぎ、自然乾燥により乾燥していた。しかし、クリップの
材質も樹脂であるから、超音波洗浄のみでは大きな洗浄
効果は見込めない。一方、クリップ３は、ペリクル収納
容器の外側に取り付ける補助部品であり、ペリクルをペ
リクル収納容器から取り出す際には、作業者が手で外す
ものでもある。このため、上蓋やトレイほどの清浄性は
要求されず、前記洗浄方法で指摘した問題はあるもの
の、清浄性は充分に要求を満たしており、これまで、ク
リップ３に対する洗浄能力が問題となったことはなかっ
た。しかしながら、クリップの洗浄方法が上蓋及びトレ
イと別のプロセスになっている場合、クリップのために
別の洗浄装置を用意する必要があり、生産性の面で問題
があった。また、上蓋及びトレイと同じ工程でクリップ
を洗浄する場合、クリップは複雑な形状を有し表面積が
大きく、かつ数百個単位で洗浄が行われることから、界
面活性剤水溶液中での洗浄後、純水ですすぐ際に、純水
洗浄槽への界面活性剤の持ち込み量が多く、洗浄液を著
しく汚染する。このため、クリップを上蓋及びトレイと
同一の工程で洗浄するには問題があった。[0010] On the other hand, the clip 3 is extremely difficult to scrub manually due to its shape.
After several tens to several hundreds were stored in a basket-type cleaning jig and subjected to ultrasonic cleaning in a surfactant aqueous solution, they were rinsed with pure water and dried by natural drying. However, since the material of the clip is also a resin, a great cleaning effect cannot be expected only by ultrasonic cleaning. On the other hand, the clip 3 is an auxiliary component attached to the outside of the pellicle storage container, and is manually removed by an operator when removing the pellicle from the pellicle storage container. For this reason, the cleanliness is not required as high as the top lid or the tray, and although there is a problem pointed out in the above-mentioned cleaning method, the cleanliness sufficiently satisfies the requirement, and the cleaning ability for the clip 3 has been a problem so far. I never did. However, when the method of cleaning the clip is different from that of the upper lid and the tray, it is necessary to prepare another cleaning device for the clip, and there is a problem in productivity. In addition, when the clip is washed in the same process as the upper lid and the tray, since the clip has a complicated shape and a large surface area, and is washed in units of several hundred pieces, after washing in a surfactant aqueous solution, When rinsing with pure water, a large amount of the surfactant is brought into the pure water cleaning tank, which significantly contaminates the cleaning liquid. For this reason, there is a problem in cleaning the clip in the same process as the upper lid and the tray.

【００１１】従って、本発明の目的は、洗浄作業に人手
を必要とせず、洗浄能力及び生産性に優れたペリクル収
納容器の洗浄方法を提供するものである。Accordingly, an object of the present invention is to provide a method for cleaning a pellicle container which is excellent in cleaning performance and productivity without requiring any manpower for the cleaning operation.

【００１２】[0012]

【課題を解決するための手段】本発明のペリクル収納容
器の洗浄方法は、洗浄液をノズルから吹き付けるシャワ
ー洗浄、界面活性剤水溶液中での超音波洗浄、及び純水
中での超音波洗浄を順次行った後、脱水及び乾燥を行う
ことを特徴とする。この際、界面活性剤水溶液中での超
音波洗浄と純水中での超音波洗浄の間、及び／または純
水中での超音波洗浄と脱水の間に、ノズルから純水を吹
き付けるシャワー洗浄を行うことを好適とする。The method of cleaning a pellicle container according to the present invention comprises shower cleaning in which a cleaning liquid is sprayed from a nozzle, ultrasonic cleaning in a surfactant aqueous solution, and ultrasonic cleaning in pure water. After performing, dehydration and drying are performed. At this time, between the ultrasonic cleaning in the surfactant aqueous solution and the ultrasonic cleaning in the pure water and / or the ultrasonic cleaning and the dehydration in the pure water, the shower cleaning in which the pure water is blown from the nozzle. Is preferably performed.

【００１３】さらに、ペリクル収納容器の洗浄に際し、
純水中での超音波洗浄中に、０．５〜５分毎に１回の頻
度で、洗浄治具に収容したペリクル収納容器が完全に液
中より出る高さまで、洗浄治具ごと揺動させるのがよ
い。超音波洗浄に際しては、２０〜５０ｋＨｚの範囲内
の少なくとも２つの周波数が同時に混合された超音波を
用いたり、あるいは周波数が２０〜５０ｋＨｚの範囲内
において少なくとも３ｋＨｚ以上の帯域幅で連続して変
調が繰り返される超音波を用いることにより、洗浄をよ
り確実に行うことができる。脱水は、完全に純水中に浸
漬されたペリクル収納容器を、そのペリクル載置面が垂
直で、かつペリクル収納容器の上縁が液面に対し２〜１
５°の範囲内の角度に傾斜させた状態で、液面から０．
５〜２０ｍｍ／秒の範囲の引上げ速度で上方に引上げる
ことにより行われる。洗浄を終えたペリクル収納容器
は、温度が５０〜７０℃の空気を、ＵＬＰＡフィルター
を介して流速０．５ｍ／秒以上で吹き付けて乾燥され
る。これらの洗浄から乾燥までの一連の処理を連続で行
うのが望ましく、その際、ペリクル収納容器は自動搬送
される。Further, in cleaning the pellicle storage container,
During the ultrasonic cleaning in pure water, the cleaning jig is swung together with the cleaning jig once every 0.5 to 5 minutes until the pellicle storage container housed in the cleaning jig completely comes out of the liquid. It is better to let. At the time of ultrasonic cleaning, an ultrasonic wave in which at least two frequencies within a range of 20 to 50 kHz are mixed at the same time, or modulation is continuously performed at a bandwidth of at least 3 kHz or more within a frequency range of 20 to 50 kHz. By using repeated ultrasonic waves, cleaning can be performed more reliably. In the dehydration, a pellicle storage container completely immersed in pure water is placed such that the pellicle mounting surface is vertical and the upper edge of the pellicle storage container is 2-1 to the liquid level.
In a state where the liquid is inclined at an angle within a range of 5 °, the liquid is set at 0.
This is done by pulling up at a pulling speed in the range of 5-20 mm / sec. The washed pellicle storage container is dried by blowing air having a temperature of 50 to 70 ° C. through a ULPA filter at a flow rate of 0.5 m / sec or more. It is desirable to perform a series of processes from washing to drying continuously, and at that time, the pellicle container is automatically transported.

【００１４】本発明はまた、ペリクル収納容器の洗浄治
具が、ペリクル収納容器の構成部品である上蓋とトレイ
を、それぞれ別々にペリクル載置面を垂直にして、かつ
ペリクル載置面に対し垂直の方向に２０〜１００ｍｍの
間隔で２〜６ヶ所に設けた保持部で保持することを特徴
とし、特には、この保持部が、ペリクル収納容器の構成
部品である上蓋及びトレイとの接触部に液抜きを目的と
した溝を有することを好適とする。According to the present invention, a jig for cleaning a pellicle storage container may be configured such that an upper lid and a tray, which are components of the pellicle storage container, are separately set so that the pellicle mounting surface is vertical and the pellicle mounting surface is perpendicular to the pellicle mounting surface. Characterized in that it is held by holding portions provided at 2 to 6 places at intervals of 20 to 100 mm in the direction of 、, and particularly, this holding portion is in contact with an upper lid and a tray which are components of the pellicle storage container. It is preferable to have a groove for draining liquid.

【００１５】本発明は、洗浄液をノズルから吹き付ける
シャワー洗浄、洗浄液として界面活性剤水溶液を用いた
超音波洗浄、純水をノズルから吹き付けるシャワー洗
浄、洗浄液として純水を用いた超音波洗浄、脱水及び乾
燥の各工程からなるペリクル収納容器の洗浄方法、並び
にこの洗浄方法で用いられる洗浄治具とから構成され
る。この洗浄方法で対象とするペリクル収納容器は、そ
の材質、形状等は特に問わないが、樹脂の射出成形物で
形成されたものが特に有効である。The present invention is directed to shower cleaning in which a cleaning liquid is sprayed from a nozzle, ultrasonic cleaning using a surfactant aqueous solution as a cleaning liquid, shower cleaning in which pure water is sprayed from a nozzle, ultrasonic cleaning using pure water as a cleaning liquid, dehydration, and the like. The method includes a method for cleaning the pellicle storage container including the respective drying steps, and a cleaning jig used in the cleaning method. The material, shape, and the like of the pellicle storage container to be used in this cleaning method are not particularly limited, but those formed by injection molding of a resin are particularly effective.

【００１６】人手によるスクラブ洗浄は、汚れの激しい
被洗浄物に対して有効な洗浄方法であるが、洗浄品質に
ばらつきを生じる、大量生産にはむかない等のために、
より洗浄能力の高い洗浄方法を採用しなければならな
い。種々検討の結果、シャワー洗浄及び洗浄槽内におけ
る被洗浄物の配置と洗浄液の流れに考慮した超音波洗浄
を行うことにより、高い洗浄能力を得ることが可能であ
ることを見いだした。具体的には、上蓋とトレイは、互
いに組み合わせて同時に洗浄し、クリップについては、
別にクリップだけで数十〜数百個単位で洗浄する。これ
は、クリップを上蓋及びトレイと同時に洗浄すると、超
音波洗浄槽内で超音波を吸収、反射し、これらの洗浄を
妨げることが懸念されるためである。The scrub cleaning by hand is an effective cleaning method for an object to be cleaned which is heavily stained.
It is necessary to adopt a cleaning method with higher cleaning ability. As a result of various studies, it has been found that a high cleaning ability can be obtained by performing ultrasonic cleaning in consideration of the arrangement of the object to be cleaned in the shower cleaning and cleaning tank and the flow of the cleaning liquid. Specifically, the top lid and tray are combined and washed at the same time, and for the clips,
Separately, several tens to several hundreds are washed only with clips. This is because if the clip is washed at the same time as the upper lid and the tray, the ultrasonic wave is absorbed and reflected in the ultrasonic cleaning tank, and there is a concern that the washing may be hindered.

【００１７】[0017]

【発明の実施の形態】以下、本発明のペリクル収納容器
の洗浄方法の一例を、図に基づいて説明する。図２は、
シャワー洗浄のための装置（以下、シャワー洗浄装置と
いう）で、（ａ）は概略正面図、（ｂ）、（ｃ）はそれ
ぞれ要部の概略側面図及び概略平面図である。図３は、
界面活性剤水溶液中での超音波洗浄のための装置（以
下、超音波洗浄装置という）で、（ａ）は概略正面図、
（ｂ）、（ｃ）はそれぞれ要部の概略側面図及び概略平
面図である。図４は、図２のシャワー洗浄装置において
洗浄液として純水を用いる場合で、同様に（ａ）は概略
正面図、（ｂ）、（ｃ）はそれぞれ要部の概略側面図及
び概略平面図である。図５は、図３の超音波洗浄装置に
おいて洗浄液として純水を用いる場合で、（ａ）は概略
正面図、（ｂ）、（ｃ）はそれぞれ要部の概略側面図及
び概略平面図である。図６は、脱水のための装置（以
下、脱水装置という）の概略正面図である。図７は、乾
燥のための装置（以下、乾燥装置という）の概略正面図
である。なお、これらの概略正面図、概略側面図及び概
略平面図はいずれも説明に適した箇所での断面による図
を示している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an example of a method for cleaning a pellicle container according to the present invention will be described with reference to the drawings. FIG.
1A is a schematic front view, and FIGS. 2B and 2C are a schematic side view and a schematic plan view, respectively, of a main part of a device for shower cleaning (hereinafter, referred to as a shower cleaning device). FIG.
An apparatus for ultrasonic cleaning in a surfactant aqueous solution (hereinafter referred to as an ultrasonic cleaning apparatus), (a) is a schematic front view,
(B) and (c) are a schematic side view and a schematic plan view of a main part, respectively. 4A and 4B show a case where pure water is used as a cleaning liquid in the shower cleaning apparatus shown in FIG. 2. Similarly, FIG. 4A is a schematic front view, and FIGS. is there. FIGS. 5A and 5B show a case where pure water is used as a cleaning liquid in the ultrasonic cleaning apparatus of FIG. 3, wherein FIG. 5A is a schematic front view, and FIGS. . FIG. 6 is a schematic front view of an apparatus for dehydrating (hereinafter, referred to as a dehydrating apparatus). FIG. 7 is a schematic front view of an apparatus for drying (hereinafter, referred to as a drying apparatus). Each of the schematic front view, schematic side view, and schematic plan view shows a cross-sectional view at a location suitable for description.

【００１８】図２に示すシャワー洗浄装置を用い、ペリ
クル収納容器の上蓋１０とトレイ１１（以下、上蓋とト
レイを共に表すときはペリクル収納容器１０、１１とい
う）を個別に洗浄治具１２に収容して洗浄槽２０内に装
入する。上蓋１０とトレイ１１に洗浄液２１をノズル２
２から吹き付け、軽く表面に付着した程度の埃や超音波
洗浄では除去できない種類の異物を除去する。ここで使
用する洗浄液２１は、特に限定されるものではなく、水
道水、純水、界面活性剤の水溶液などが使用できる。た
だし、洗浄液を大量に使用するため、洗浄槽２０に連結
された配管２７にポンプ２５をつなぎ、洗浄液をヒータ
ー２４及びフィルター２３に通して矢印のように循環再
利用するのが望ましい。また、洗浄液に界面活性剤水溶
液を使用する場合は、大量に発生する泡を抑制するた
め、消泡剤を添加するとよい。Using the shower cleaning apparatus shown in FIG. 2, the upper lid 10 and the tray 11 of the pellicle storage container (hereinafter referred to as the pellicle storage containers 10 and 11 when both the upper lid and the tray are represented) are individually stored in the cleaning jig 12. And charged into the cleaning tank 20. The cleaning liquid 21 is applied to the upper lid 10 and the tray 11 by the nozzle 2.
The dust is sprayed from step 2 to remove dust that is lightly attached to the surface and foreign substances of a type that cannot be removed by ultrasonic cleaning. The cleaning liquid 21 used here is not particularly limited, and tap water, pure water, an aqueous solution of a surfactant, or the like can be used. However, in order to use a large amount of the cleaning liquid, it is desirable to connect a pump 25 to a pipe 27 connected to the cleaning tank 20, and to pass the cleaning liquid through the heater 24 and the filter 23 to circulate and reuse the cleaning liquid as indicated by the arrow. When an aqueous solution of a surfactant is used as the cleaning solution, an antifoaming agent may be added to suppress the generation of a large amount of foam.

【００１９】このシャワー洗浄におけるノズル２２の配
置や本数は、ペリクル収納容器１０、１１の全面がカバ
ーできるように、なおかつ無駄の無いように適宜選択す
ればよく、特に限定されるものではない。このとき、ペ
リクル収納容器１０，１１の全表面がムラなく洗浄でき
るよう、ノズル２２に移動機構を付設し、洗浄中ノズル
２２を移動させて洗浄液を噴射することも有効である。
この洗浄装置は異物の除去が目的であるから、洗浄液の
流量は、可能な限り多い方がより高い洗浄効果が期待で
きるので、ノズル１本あたり３Ｌ／分以上、また圧力に
ついても同様で０．３ＭＰａ以上とするのが望ましい。
洗浄時間は１〜１０分の範囲内とするのがよい。さらに
洗浄装置の周囲に洗浄液２１が飛散するのを防ぐため、
開閉可能なカバー２６などの密閉機構を備えるとよい。The arrangement and the number of the nozzles 22 in the shower cleaning may be appropriately selected so as to cover the entire surfaces of the pellicle storage containers 10 and 11 and to avoid waste, and are not particularly limited. At this time, it is also effective to attach a moving mechanism to the nozzle 22 and move the nozzle 22 during cleaning to spray the cleaning liquid so that the entire surface of the pellicle storage containers 10 and 11 can be cleaned evenly.
Since the purpose of this cleaning device is to remove foreign substances, the higher the flow rate of the cleaning liquid, the higher the cleaning effect can be expected. Therefore, the flow rate of the cleaning liquid is 3 L / min or more per nozzle, and the same applies to the pressure. It is desirable that the pressure be 3 MPa or more.
The washing time is preferably in the range of 1 to 10 minutes. Further, in order to prevent the cleaning liquid 21 from scattering around the cleaning device,
It is preferable to provide a sealing mechanism such as a cover 26 that can be opened and closed.

【００２０】シャワー洗浄が終了した後は、より精密な
洗浄を目的として、界面活性剤中での超音波洗浄を行
う。上記したように、一般的な樹脂製のペリクル収納容
器に対しては超音波洗浄は不向きであるが、種々検討の
結果、図３に示すような構造の超音波洗浄装置を使用す
ることで、上記問題を解決し、著しく洗浄能力を向上さ
せることができた。After the completion of the shower cleaning, ultrasonic cleaning in a surfactant is performed for more precise cleaning. As described above, ultrasonic cleaning is not suitable for general resin pellicle storage containers, but as a result of various studies, by using an ultrasonic cleaning apparatus having a structure as shown in FIG. The above problem was solved, and the cleaning ability was significantly improved.

【００２１】洗浄治具１２内に、ペリクル収納容器の上
蓋１０とトレイ１１を別々にして互いに平行に、かつペ
リクル載置面が垂直になるように取り付けて、これを底
面に超音波振動板３２を備えた洗浄槽３０内に装入し、
上蓋１０とトレイ１１の間から洗浄液３１を槽内に供給
しながら洗浄する。ペリクル収納容器１０，１１を図３
に示す位置に配置することで、底面の超音波振動板３２
から照射された超音波が途中で吸収されるのを防ぎ、ま
た洗浄液３１が上蓋１０とトレイ１１の表面に沿って滞
留することなく上方に向かって流れることで、超音波を
ペリクル収納容器１０，１１の全面に到達させて異物を
剥離し、表面から剥離した異物はすぐさま上方に向かっ
て運ばれ、さらに槽外へ運び去られる。これらの相乗効
果により、洗浄槽３０のペリクル収納容器１０、１１に
対する洗浄力は大幅に向上した。このとき、超音波洗浄
中の洗浄液３１は、洗浄槽３０内に存在する洗浄液の全
量に対して５０％／分以上、特には８０％／分以上の交
換率で、フィルター３３を通しながらポンプ３５で配管
３７内を循環させるのが望ましい。流量がこれより少な
いと、図中の矢印で示すような洗浄液の流れが形成され
ず、槽内に異物が滞留する虞れがある。In the cleaning jig 12, the upper lid 10 and the tray 11 of the pellicle storage container are separately mounted so that they are parallel to each other and the pellicle mounting surface is vertical. Into the washing tank 30 equipped with
The cleaning is performed while the cleaning liquid 31 is supplied into the tank from between the upper lid 10 and the tray 11. Pellicle storage containers 10 and 11 are shown in FIG.
, The ultrasonic vibration plate 32 on the bottom surface
The cleaning liquid 31 is prevented from being absorbed on the way, and the cleaning liquid 31 flows upward without stagnating along the surfaces of the upper lid 10 and the tray 11, so that the ultrasonic waves can be transmitted to the pellicle storage container 10, The foreign matter is peeled off by reaching the entire surface of 11 and the foreign matter peeled off from the surface is immediately carried upward and further carried out of the tank. Due to these synergistic effects, the cleaning power of the cleaning tank 30 for the pellicle storage containers 10 and 11 is greatly improved. At this time, the cleaning liquid 31 during the ultrasonic cleaning is passed through the filter 33 at an exchange rate of 50% / min or more, particularly 80% / min or more with respect to the total amount of the cleaning liquid existing in the cleaning tank 30 while passing through the filter 33. It is desirable to circulate the inside of the pipe 37 by using. If the flow rate is lower than this, the flow of the cleaning liquid as indicated by the arrow in the figure is not formed, and there is a possibility that foreign matter may stay in the tank.

【００２２】使用する界面活性剤は、被洗浄ペリクル収
納容器の材質、汚れ具合に応じて選択する必要があるた
め、特にその種類を問わないが、そのうちの幾つかを例
示すると、クリーンエースＳ（井内盛栄堂社製、商品
名）やＮＣＷ−６０１Ａ（和光純薬工業社製、商品名）
が挙げられる。洗浄能力に問題が無ければ、環境や装置
への負担を考慮すると、界面活性剤水溶液は中性である
ことが望ましい。また、この濃度は、使用する界面活性
剤の種類に応じて適宜検討すればよいが、クリーンエー
スＳの場合には３〜１０％の範囲内が望ましい。また洗
浄液の温度は高いほど洗浄能力も高くなるが、前述した
ように、一般的な樹脂製のペリクル収納容器の場合に
は、熱による変形が懸念されるため、２５〜５０℃の範
囲内で材質に応じて選択するとよい。The surfactant to be used must be selected according to the material of the pellicle storage container to be cleaned and the degree of contamination, and the type thereof is not particularly limited. NCW-601A (manufactured by Wako Pure Chemical Industries, trade name)
Is mentioned. If there is no problem in the cleaning ability, it is preferable that the surfactant aqueous solution is neutral in consideration of the burden on the environment and the apparatus. In addition, this concentration may be appropriately determined depending on the type of the surfactant to be used. In the case of Clean Ace S, the concentration is preferably in the range of 3 to 10%. Further, the higher the temperature of the cleaning liquid, the higher the cleaning ability. However, as described above, in the case of a general resin pellicle storage container, deformation due to heat is concerned, so that the temperature is within the range of 25 to 50 ° C. It is good to select according to the material.

【００２３】界面活性剤水溶液中での超音波洗浄時間は
長いほど洗浄能力が増大するので、ペリクル収納容器の
汚れの程度に応じて適宜洗浄時間を選択するのが望まし
いが、一般的な樹脂製のペリクル収納容器の場合、洗浄
液の温度によっては、洗浄時間とともに変形量が大きく
なることが懸念され、また生産性の面からも３〜２０分
の範囲内とするのが望ましい。このとき所望の生産性が
達成できない場合は、洗浄槽を複数に分けて装置を構成
し、一槽あたりのタクトタイムを短縮することが可能で
ある。The longer the ultrasonic cleaning time in the aqueous surfactant solution, the greater the cleaning ability. Therefore, it is desirable to appropriately select the cleaning time according to the degree of contamination of the pellicle storage container. In the case of the pellicle storage container, there is a concern that the amount of deformation increases with the cleaning time depending on the temperature of the cleaning liquid, and it is desirable to set the range within 3 to 20 minutes from the viewpoint of productivity. If the desired productivity cannot be achieved at this time, the cleaning tank can be divided into a plurality of parts to configure the apparatus, and the tact time per tank can be reduced.

【００２４】超音波の音圧強度が大きいほど洗浄能力は
高くなるが、１００ｋＰａ以上では、ときにはペリクル
収納容器の表面に損傷が生じる場合がある。また過大な
超音波強度は超音波振動板の劣化を早めたり、洗浄治具
の表面を損傷することも懸念される。このためペリクル
収納容器の表面に損傷を与えず、なおかつ十分な洗浄能
力を確保するには、超音波の音圧強度を２５〜１００ｋ
Ｐａの範囲内、特には５０ｋＰａとするのが望ましい。[0024] The higher the sound pressure intensity of the ultrasonic wave, the higher the cleaning ability. However, at a pressure of 100 kPa or more, sometimes the surface of the pellicle storage container is damaged. Further, there is a concern that excessive ultrasonic intensity may accelerate the deterioration of the ultrasonic vibration plate or damage the surface of the cleaning jig. For this reason, in order not to damage the surface of the pellicle storage container and to secure a sufficient cleaning ability, the sound pressure intensity of the ultrasonic wave is set to 25 to 100 k.
It is desirable to be within the range of Pa, particularly 50 kPa.

【００２５】超音波の周波数は、２０〜５０ｋＨｚの範
囲内のものを選択するのがよい。ただし、このとき単一
の周波数で行うと、定在波の影響で音圧分布が不均一に
なるため、ペリクル収納容器を槽内で揺動させる等の方
法で防止するのが望ましい。このため、周波数が２０〜
５０ｋＨｚの範囲内で、なおかつ、この範囲内の少なく
とも二つの周波数が同時に混合された超音波を発生する
ことのできる超音波洗浄機を採用するのが望ましい。こ
のような超音波洗浄機として、特にその種類は問わない
が、その一つを例示すれば、４周波混合型超音波洗浄
機：発振器ＵＯ１２００ＦＸ１−Ｐ（国際電気エルテッ
ク社製、商品名）が挙げられる。The frequency of the ultrasonic wave is preferably selected from the range of 20 to 50 kHz. However, if the operation is performed at a single frequency at this time, the sound pressure distribution becomes non-uniform due to the effect of the standing wave. Therefore, it is desirable to prevent the pellicle storage container by swinging it in the tank. Therefore, the frequency is 20 to
It is desirable to employ an ultrasonic cleaner that can generate ultrasonic waves in the range of 50 kHz and at least two frequencies within the range at the same time. The type of such an ultrasonic cleaner is not particularly limited, but one example thereof is a four-frequency mixing type ultrasonic cleaner: Oscillator UO1200FX1-P (trade name, manufactured by Kokusai Denki Eltec). Can be

【００２６】同様の観点から、周波数が２０〜５０ｋＨ
ｚの範囲内で、かつこの範囲内の少なくとも３ｋＨｚ以
上の帯域幅で、連続して変調を繰り返すことのできるも
のを使用するのもよい。このような超音波洗浄機とし
て、特にその種類は問わないが、その一つを例示すれば
スイープ型超音波洗浄機：発振器ＵＯ１２００ＰＶ−Ｙ
（同前）が挙げられる。さらに、上記２種類の超音波発
振形式の洗浄槽を組み合わせた洗浄装置を用いることも
できる。複数の周波数が同時に照射されるものは洗浄力
に優れ、また周波数変調を行うタイプは洗浄力がやや弱
いものの全体をムラなく洗浄できるという特性があり、
これらの違いを利用して、それぞれを最適なところに設
置する。例えば、界面活性剤を用いる超音波洗浄槽を２
槽で構成する場合、第１槽に洗浄力の強力な超音波洗浄
槽を、第２槽に強度分布のムラが少ない超音波洗浄槽を
設置することで、より洗浄効果を高くすることができ
る。なお、上記超音波洗浄槽に関する構成は、洗浄液が
界面活性剤水溶液の場合に限定されるものではなく、純
水や、その他の洗浄液の場合でも有効である。From the same viewpoint, the frequency is 20 to 50 kHz.
It is also possible to use one that can continuously repeat modulation within the range of z and at least a bandwidth of 3 kHz or more within this range. The type of such an ultrasonic cleaning machine is not particularly limited, but one example thereof is a sweep type ultrasonic cleaning machine: an oscillator UO1200PV-Y.
(Same as above). Furthermore, a cleaning device combining the above two types of cleaning tanks of the ultrasonic oscillation type can also be used. Those that are irradiated with multiple frequencies at the same time have excellent detergency, and the type that performs frequency modulation has the characteristic that the entire detergency can be washed evenly even if the detergency is somewhat weak,
Taking advantage of these differences, each is installed in the most suitable place. For example, an ultrasonic cleaning tank using a surfactant
In the case of using a tank, the cleaning effect can be further enhanced by installing an ultrasonic cleaning tank having a strong detergency in the first tank and an ultrasonic cleaning tank having less unevenness in intensity distribution in the second tank. . The configuration relating to the ultrasonic cleaning tank is not limited to the case where the cleaning liquid is an aqueous solution of a surfactant, but is also effective when pure water or another cleaning liquid is used.

【００２７】上記のようにして界面活性剤中で超音波洗
浄を終えたペリクル収納容器１０、１１は、洗浄液中か
ら引上げられ、次の工程に送られる。ペリクル収納容器
は形状が複雑で表面積が大きいため、界面活性剤の付着
量も多い。このため、このまま純水を用いる洗浄槽に入
れると、界面活性剤が純水中に多量に混入するため、界
面活性剤を除去するために多段の洗浄槽が必要となり、
装置の大型化、生産性の低下を招く。そこで、界面活性
剤水溶液中での超音波洗浄後、図４に示すようなシャワ
ー洗浄装置を使用して、ペリクル収納容器１０、１１を
洗浄治具１２ごと洗浄槽４０内に装入し、ノズル４２か
ら純水４１を吹き付けるシャワー洗浄を行い、界面活性
剤をペリクル収納容器１０，１１及び洗浄治具１２の表
面から完全に洗い流すのが望ましい。The pellicle containers 10 and 11, which have been subjected to ultrasonic cleaning in the surfactant as described above, are pulled up from the cleaning liquid and sent to the next step. Since the pellicle storage container has a complicated shape and a large surface area, the amount of the attached surfactant is large. For this reason, if it is put into a washing tank using pure water as it is, a large amount of surfactant is mixed into the pure water, so a multi-stage washing tank is required to remove the surfactant,
This leads to an increase in the size of the device and a decrease in productivity. Therefore, after the ultrasonic cleaning in the surfactant aqueous solution, the pellicle storage containers 10 and 11 are charged together with the cleaning jig 12 into the cleaning tank 40 using a shower cleaning device as shown in FIG. It is desirable to perform shower cleaning in which pure water 41 is blown from 42 to completely wash the surfactant from the surfaces of the pellicle storage containers 10 and 11 and the cleaning jig 12.

【００２８】純水の供給手段としては、図示のほか、様
々なものが考えられるが、所望の圧力、流量が得られれ
ばよく、特に限定されるものではない。ただし、ここで
の洗浄の目的は、異物を除去することではなく、表面に
付着した界面活性剤を洗い流すことであるから、圧力よ
りも流量が必要であり、これにはマグネットポンプが最
も適している。もちろん、ポンプ４５から発生した異物
を除去するため、ポンプ出口側にはフィルター４３が必
要である。このとき使用するシャワー洗浄装置には、ノ
ズル４２の配置、本数はペリクル収納容器１０，１１の
全面がカバーできるように適宜選択すれば良く、特に限
定されるものではない。ペリクル収納容器１０，１１の
全表面がムラなく洗浄できるよう、噴射中にノズル４２
を移動できる機構とすることも有効である。純水の噴射
流量は、ペリクル収納容器１０，１１の表面に付着した
界面活性剤が洗い流せる量を確保できればよく、ノズル
１本あたり２〜５Ｌ／分で、０．５〜２分噴射するのが
望ましい。また、圧力は０．０５ＭＰａ以上とするのが
よい。さらに装置周囲への液体の飛散を防ぐため、開閉
可能なカバー４６などの密閉手段を備えていることが望
ましい。As a means for supplying pure water, various means can be considered in addition to the illustration, but it is not particularly limited as long as a desired pressure and flow rate can be obtained. However, since the purpose of cleaning here is not to remove foreign substances but to wash away the surfactant attached to the surface, a flow rate is required rather than pressure, and a magnet pump is most suitable for this. I have. Of course, a filter 43 is required on the pump outlet side to remove foreign matter generated from the pump 45. In the shower cleaning device used at this time, the arrangement and the number of the nozzles 42 may be appropriately selected so as to cover the entire surfaces of the pellicle storage containers 10 and 11, and are not particularly limited. During injection, the nozzle 42 is used so that the entire surfaces of the pellicle storage containers 10 and 11 can be washed without unevenness.
It is also effective to use a mechanism that can move the. The injection flow rate of pure water may be sufficient if the amount of surfactant attached to the surfaces of the pellicle storage containers 10 and 11 can be washed away, and it is preferable to inject 0.5 to 2 minutes at 2 to 5 L / min per nozzle. desirable. The pressure is preferably set to 0.05 MPa or more. Further, in order to prevent the liquid from scattering around the apparatus, it is desirable to provide a sealing means such as a cover 46 that can be opened and closed.

【００２９】上記のようにして界面活性剤を除去した
後、さらに精密なすすぎと異物の除去を行うために、図
５に示す超音波洗浄装置を用いて純水中で超音波洗浄を
行う。この洗浄装置は、基本的には前記した界面活性剤
水溶液を用いるものと同様の構造を有していればよい
が、循環させるだけでは純水の純度が次第に低下するこ
とが懸念されるため、配管５７を図５に示すように配管
して純度の高い純水を給水管４８から供給し、他方、洗
浄槽５０の上縁からオーバーフローした液を排水管４９
から排水する。洗浄は洗浄液５１をポンプ５５で循環さ
せて所望の流量を維持しつつ、純度をも維持する必要が
ある。このときに供給する純水の流量は洗浄槽５０内の
純水の全体積の１０％／分以上とするのがよい。After removing the surfactant as described above, ultrasonic cleaning is performed in pure water using an ultrasonic cleaning apparatus shown in FIG. 5 in order to perform more precise rinsing and removal of foreign substances. This cleaning device may basically have the same structure as that using the above-mentioned surfactant aqueous solution, but there is a concern that the purity of pure water is gradually reduced only by circulation, A pipe 57 is connected as shown in FIG. 5 to supply pure water of high purity from a water supply pipe 48, while a liquid overflowing from the upper edge of the cleaning tank 50 is drained to a drain pipe 49.
Drain from In the cleaning, it is necessary to maintain the desired flow rate by circulating the cleaning liquid 51 by the pump 55 and also maintain the purity. The flow rate of the pure water supplied at this time is preferably 10% / min or more of the total volume of the pure water in the cleaning tank 50.

【００３０】純水中での超音波洗浄には、界面活性剤水
溶液を使用するときには起こらない問題を生じる。超音
波洗浄は、液中に超音波を照射することでキャビテーシ
ョンを発生させ、その気泡が破壊するときの衝撃波を利
用して洗浄を行うものであるが、樹脂製のペリクル収納
容器では、表面の純水に対する濡れ性が悪いため、表面
でキャビテーションの気泡が発生すると、その気泡がそ
のまま付着してしまう。付着した気泡の周辺では、照射
された超音波が気泡で妨害され、洗浄に支障をきたす。
また、気泡が表面にそのまま留まると、乾燥中にはじけ
て水滴となり乾燥時間の延長を招く。The ultrasonic cleaning in pure water has a problem that does not occur when an aqueous solution of a surfactant is used. In ultrasonic cleaning, cavitation is generated by irradiating ultrasonic waves into the liquid, and cleaning is performed by using a shock wave when the bubbles are destroyed. Due to poor wettability with pure water, if cavitation bubbles are generated on the surface, the bubbles will adhere as they are. In the vicinity of the attached air bubbles, the irradiated ultrasonic waves are obstructed by the air bubbles, which hinders cleaning.
Also, if the air bubbles remain on the surface as they are, they will pop out during the drying and become water droplets, leading to an extension of the drying time.

【００３１】このため、これを解決すべく様々な検討を
行った結果、揺動アーム５６と駆動機構５９とから構成
される単軸ロボットなどの揺動装置を用いて、純水中で
の超音波洗浄中に、ペリクル収納容器１０，１１が完全
に液中より出る高さまで、洗浄治具１２ごと上下に揺動
させることで、これを防ぐことができることを見いだし
た。揺動の頻度は洗浄時間との関係から決定する必要が
あるが、付着する気泡の数が洗浄時間に比例して増加し
続けるため、１回／０．５〜３分の頻度で、洗浄時間中
に数回繰り返し行うのがよい。また、その時の揺動速度
は、特に限定されるものではないが、生産性や洗浄槽５
０周囲への液の飛散を考慮すると２０〜１５０ｍｍ／秒
の間が望ましい。揺動動作については、引上げた後、液
面上で保持する必要はなく、直ちにまた純水中へ浸漬す
るのがよい。同様の効果をもたらすものとして、純水中
で噴流を表面に当てる等の方法も考えられるが、複数の
ペリクル収納容器を同時に処理する場合を考慮すると、
噴流を流出させるノズルの配置が複雑で困難である。ま
た洗浄槽中にノズルやその配管等の被洗浄物以外の物が
設置されているのも、超音波の不必要な反射や異物発生
の原因となり、望ましくない。Therefore, as a result of various studies to solve this, as a result of using a rocking device such as a single-axis robot including the rocking arm 56 and the drive mechanism 59, the ultra-high-pressure water in pure water was used. It has been found that this can be prevented by swinging the cleaning jig 12 up and down together with the pellicle storage containers 10 and 11 completely up to the level where the pellicle storage containers 10 and 11 come out of the liquid during the ultrasonic cleaning. The frequency of the oscillation needs to be determined from the relationship with the cleaning time. However, since the number of attached bubbles continues to increase in proportion to the cleaning time, the frequency of once / 0.5 to 3 minutes is used. It is good to repeat several times during the process. Further, the swing speed at that time is not particularly limited, but the productivity and the cleaning tank 5 are not limited.
Considering the scattering of the liquid around 0, it is desirable that the distance be between 20 and 150 mm / sec. With respect to the swinging operation, it is not necessary to hold the liquid on the liquid surface after being pulled up, and it is preferable to immediately immerse it in pure water. As a method that brings the same effect, a method such as applying a jet to the surface in pure water is also conceivable, but considering the case of simultaneously processing a plurality of pellicle storage containers,
The arrangement of the nozzles for discharging the jet is complicated and difficult. It is also undesirable that an object other than an object to be cleaned such as a nozzle and its piping is installed in the cleaning tank, because it causes unnecessary reflection of ultrasonic waves and generation of foreign matter.

【００３２】上記した純水中での超音波洗浄中の揺動
は、洗浄に影響しない程度に気泡を除去できるが、確実
性に欠ける。気泡が残ってしまった場合、上記したよう
に乾燥の際に大きな問題が生じるため、気泡の除去をよ
り確実とするために、何らかの方法で気泡を除去するの
が望ましい。そこで、種々検討の結果、純水中での超音
波洗浄の後、再度、純水をノズルで吹き付けるシャワー
洗浄を行い、気泡の取り残しを完全に除去してから脱水
を行うことで、この問題を解決できることを見いだし
た。このとき使用する装置としては、図４に示したシャ
ワー洗浄装置と同様のものが適している。注意すべき点
としては、洗浄の仕上げ段階に近いため、ノズル４２及
び配管４７の清浄度が高いことが要求される。吹き付け
る流体には、上記純粋の他にエアーを用いることでも、
同様の効果が達成できると考えられるが、異物の付着が
懸念されるためエアーは望ましくない。The above-mentioned rocking during the ultrasonic cleaning in pure water can remove bubbles to such an extent that the cleaning is not affected, but lacks certainty. If air bubbles remain, a serious problem occurs during drying as described above. Therefore, it is desirable to remove air bubbles by some method in order to more reliably remove air bubbles. Therefore, as a result of various studies, after ultrasonic cleaning in pure water, shower cleaning in which pure water is sprayed with a nozzle is again performed to completely remove residual air bubbles, and then to perform dehydration. I found something that could be solved. As the device used at this time, the same device as the shower cleaning device shown in FIG. 4 is suitable. It should be noted that the nozzle 42 and the pipe 47 are required to have a high degree of cleanliness because the cleaning stage is close to the finishing stage. By using air in addition to the above pure air,
It is thought that the same effect can be achieved, but air is not desirable because there is a concern that foreign matter may adhere.

【００３３】さて、上記のようにして洗浄が終了したペ
リクル収納容器は、次に乾燥工程に移されるが、このま
ま乾燥を行った場合、前述したように許容できる乾燥温
度が低いこと、付着している水の表面積が小さいこと等
が相まって、乾燥時間が著しく長くなる。乾燥方法とし
ては温風乾燥、赤外線ランプ等による直接加熱、スピン
乾燥、エアーナイフなど様々な方法が考えられるが、ペ
リクル収納容器の場合には極めて高い清浄度が要求され
るため、スピン乾燥、エアーナイフなどのクリーンルー
ム内の気流を著しく乱すものや動作の激しいものでは、
新たに異物を付着させてしまう虞れがあって望ましくな
い。また、赤外線ランプなどを用いた直接加熱は、複雑
な形状のペリクル収納容器全体を均一に加熱することが
困難で、変形を促進してしまう。このため異物の付着や
変形を考慮すると、温風乾燥が最も適している。The pellicle container, which has been washed as described above, is then transferred to a drying step. If the pellicle container is dried as it is, the allowable drying temperature is low as described above, Due to the small surface area of the existing water, the drying time becomes extremely long. Various methods such as hot air drying, direct heating using an infrared lamp, spin drying, and an air knife can be used as the drying method.However, in the case of a pellicle storage container, extremely high cleanliness is required. If the airflow in the clean room such as knives is significantly disturbed or the operation is severe,
There is a possibility that foreign matter may be newly attached, which is not desirable. In addition, direct heating using an infrared lamp or the like makes it difficult to uniformly heat the entire pellicle container having a complicated shape, and promotes deformation. For this reason, hot air drying is most suitable in consideration of adhesion and deformation of foreign matter.

【００３４】温風乾燥の条件について種々検討を行った
が、選択可能な条件の範囲では、ペリクル収納容器の変
形を防ぎつつ、短時間で乾燥させることは不可能なこと
が明らかになった。そこで、ペリクル収納容器の乾燥前
に脱水を行うことを検討した。脱水は、エアーブロー等
の方法が一般的であるが、種々検討を重ねた結果、図６
に示す脱水装置を用いて、ペリクル収納容器１０，１１
を洗浄治具１２ごと、ペリクル載置面が垂直になるよう
に完全に純水６１中に浸漬した後、ゆっくり引上げて脱
水する方法が有効であることを見いだした。洗浄治具１
２の浸漬、引上げは、駆動機構６９に取り付けられたア
ーム６６により行われる。この方法は、クリーンルーム
内の気流を乱さず異物の付着を引き起こす虞がないこ
と、装置構造が単純であること、複数のペリクル収納容
器を同時に処理するバッチ処理が容易であること等の利
点がある。Various investigations were conducted on the conditions of hot air drying, and it was found that it was impossible to dry the pellicle container in a short time while preventing deformation of the pellicle container within the range of selectable conditions. Therefore, it was studied to perform dehydration before drying the pellicle storage container. Dehydration is generally performed by a method such as air blowing, but as a result of various studies, FIG.
Pellicle storage containers 10 and 11
It was found that a method of completely immersing the entire pellicle mounting surface of the cleaning jig 12 in pure water 61 so that the pellicle mounting surface was vertical, and then slowly pulling it up to dehydrate was effective. Cleaning jig 1
2 is immersed and pulled up by an arm 66 attached to a drive mechanism 69. This method has the advantages that there is no risk of causing foreign matter to adhere without disturbing the airflow in the clean room, the device structure is simple, and batch processing for simultaneously processing a plurality of pellicle storage containers is easy. .

【００３５】このとき、引上げ動作中、ペリクル収納容
器１０，１１を取り付けた洗浄治具１２を、液面６２に
対する傾斜角度αが２〜１５°の範囲となるように引上
げるのがよい。傾斜角度αを２°未満とした場合、ペリ
クル収納容器１０，１１の外縁部において、液切りが極
めて悪くなる。また、このときの液面からの引上げ速度
が小さいほどよく、０．２〜２０ｍｍ／秒の範囲内とす
るのがよい。さらに生産性を高めるために、引上げ速度
が変えられるようにし、引上げ速度を０．２〜２０ｍｍ
／秒の範囲内に保ちつつ、液切りしにくい複雑形状の部
分が液面６２を通過するときは遅く、逆に液切りが容易
な単純形状の部分は早く通過させて引上げるのがよい。At this time, during the pulling operation, the cleaning jig 12 to which the pellicle containers 10 and 11 are attached is preferably pulled up so that the inclination angle α with respect to the liquid surface 62 is in the range of 2 to 15 °. If the inclination angle α is less than 2 °, the drainage of the outer edges of the pellicle storage containers 10 and 11 becomes extremely poor. Also, the lower the pulling speed from the liquid level at this time, the better, and it is better to be within the range of 0.2 to 20 mm / sec. In order to further increase the productivity, the pulling speed can be changed, and the pulling speed is set to 0.2 to 20 mm.
It is preferable that a portion having a complicated shape, which is difficult to drain, passes slowly through the liquid surface 62 while keeping the speed within a range of / sec.

【００３６】また、脱水槽６０内の純水６１の温度は、
ペリクル収納容器１０，１１の材質及び表面の清浄状態
に応じて適宜選択する必要があるが、あまり低温では後
の乾燥工程で昇温に時間がかかり、また、高温では容器
の変形の恐れがあるため、２０〜８０℃の範囲内、特に
一般的な樹脂製のペリクル収納容器に対しては２０〜５
０℃とするのが望ましい。The temperature of the pure water 61 in the dewatering tank 60 is
It is necessary to select an appropriate one according to the material of the pellicle storage containers 10 and 11 and the clean state of the surface. However, if the temperature is too low, it takes time to raise the temperature in the subsequent drying step, and if the temperature is high, the containers may be deformed. Therefore, the temperature is in the range of 20 to 80 ° C., and especially 20 to 5 for a general resin pellicle container.
Desirably, it is 0 ° C.

【００３７】前述のようにして洗浄後に脱水処理を施し
たペリクル収納容器は、乾燥装置、より具体的には温風
乾燥機により、完全に乾燥させることができる。乾燥装
置は、例えば、図７に示すような構造とし、温風は外気
導入ファン７６によりＨＥＰＡフィルター７７を経て装
置内に供給され、ヒーター７４で暖められ、ＵＬＰＡフ
ィルター７３を経てペリクル収納容器１０，１１に向か
って流れる。このとき温風はＵＬＰＡあるいはＨＥＰＡ
などの高性能フィルター７３，７７を用いて高レベルに
除塵する必要がある。温風の流れは、特にその方向を問
わないが、搬送装置との連結を考慮すると、図７に矢印
（符号７８）で示したように、上から下に流れるものが
望ましい。温風の温度は、ペリクル収納容器１０，１１
の材質にもよるが、５０〜８０℃の範囲内、特に樹脂製
のペリクル収納容器に対しては５５〜７０℃の範囲内と
し、５〜１５分で乾燥を行うのがよい。温風の流速は、
乾燥時間に与える影響はあまり大きくないが、ほぼ０．
５ｍｍ／秒とするのが望ましい。また乾燥が終了したペ
リクル収納容器は、その材質、乾燥条件にもよるが１０
分以上の冷却時間が必要である。The pellicle container subjected to the dehydration treatment after washing as described above can be completely dried by a drying device, more specifically, a hot air dryer. The drying device has, for example, a structure as shown in FIG. 7. Hot air is supplied into the device through an HEPA filter 77 by an outside air introduction fan 76, heated by a heater 74, passed through an ULPA filter 73, and the pellicle storage container 10. It flows toward 11. At this time, the hot air is ULPA or HEPA
It is necessary to remove dust to a high level using high-performance filters 73 and 77 such as those described above. The flow of the hot air is not particularly limited, but in consideration of the connection with the transfer device, the flow of the hot air is preferably from the top to the bottom as shown by an arrow (reference numeral 78) in FIG. The temperature of the hot air is controlled by the pellicle storage containers 10 and 11.
Although it depends on the material, the temperature is preferably in the range of 50 to 80 ° C., particularly in the range of 55 to 70 ° C. for the resin-made pellicle container, and drying is preferably performed in 5 to 15 minutes. The flow rate of hot air is
The effect on the drying time is not very large, but is almost 0.
It is desirable to set it to 5 mm / sec. The dried pellicle storage container depends on its material and drying conditions, but it may take 10 to 10 hours.
A cooling time of at least a minute is required.

【００３８】ここまで、上蓋とトレイの洗浄方法につい
て詳述してきたが、ペリクル収納容器のもう一つの構成
部品であるクリップの洗浄方法について、以下に詳述す
る。クリップの洗浄は、上蓋及びトレイとは別々に、ク
リップだけで数十〜数百個単位でまとめて行うのがよ
い。これは前記したように、クリップを上蓋及びトレイ
と同時に洗浄した場合、超音波洗浄槽内で超音波を吸
収、反射し、上蓋やトレイの洗浄を妨げることが懸念さ
れるためである。初めに、クリップをカゴ型の洗浄治具
に納める。洗浄治具の容積、つまり１回で洗浄する数量
は、特に限定されるものではないが、上蓋及びトレイと
同じ洗浄装置を使用するために、前記シャワー洗浄装置
で、ノズルから噴射された洗浄液が充分にかかる領域に
納まる程度がよい。その後は、前記した上蓋及びトレイ
と同じ方法で洗浄を行うのがよい。本発明の洗浄方法
は、上蓋及びトレイの洗浄を主眼とするものであるが、
クリップについても全く同じ方法で、清浄に洗浄するこ
とができる。また、乾燥についても全く同じ方法で完全
に乾燥することができる。Up to this point, the method of cleaning the upper lid and the tray has been described in detail. The method of cleaning the clip, another component of the pellicle storage container, will be described in detail below. It is preferable to wash the clips separately from the upper lid and the tray and collectively in tens to hundreds of clips using only the clips. This is because, as described above, when the clip is cleaned at the same time as the upper lid and the tray, there is a concern that the ultrasonic waves are absorbed and reflected in the ultrasonic cleaning tank, and that the cleaning of the upper lid and the tray is hindered. First, the clips are placed in a basket-type cleaning jig. The volume of the cleaning jig, that is, the number of cleanings performed at one time is not particularly limited, but in order to use the same cleaning device as the top lid and the tray, the cleaning liquid sprayed from the nozzle by the shower cleaning device is used. It is preferable that it fits sufficiently in such an area. After that, it is preferable to perform the cleaning by the same method as the above-described upper lid and tray. The cleaning method of the present invention mainly focuses on cleaning the upper lid and the tray,
Clips can be cleaned cleanly in exactly the same way. Also, drying can be performed completely by the same method.

【００３９】さて、これまで詳述してきた洗浄方法にお
いて、極めて重要となるのが洗浄治具の形状である。図
８及び図９はそれぞれペリクル収納容器とクリップの洗
浄に使用する洗浄治具を示したもので、それぞれ（ａ）
は概略正面図、（ｂ）は概略側面図、（ｃ）は概略平面
図である。図１０及び図１１は、それぞれ洗浄治具に上
蓋１０及びトレイ１１を取り付けるための、保持部の概
略平面図であって、（ａ）〜（ｄ）はそれぞれの保持部
に設けた異なる態様の溝を示している。In the cleaning method described in detail above, what is extremely important is the shape of the cleaning jig. FIGS. 8 and 9 show a cleaning jig used for cleaning the pellicle storage container and the clip, respectively.
Is a schematic front view, (b) is a schematic side view, and (c) is a schematic plan view. FIGS. 10 and 11 are schematic plan views of holding portions for attaching the upper lid 10 and the tray 11 to the cleaning jig, respectively, wherein (a) to (d) show different modes provided in the respective holding portions. The groove is shown.

【００４０】本発明者等は、本発明の超音波洗浄方法及
び脱水方法を達成するために、ペリクル収納容器の上蓋
とトレイを別々に、互いに平行になるように、なおかつ
ペリクル載置面が垂直になるように配置する洗浄治具を
作製した。この洗浄治具は、図８に示すように、ベース
フレーム８２、上蓋保持部８０とトレイ保持部８１を有
する支持フレーム８３、及び搬送のための搬送バー８４
から構成される。上蓋１０とトレイ１１を支持するため
の支持フレーム８３，８３間の間隔８５は、２０〜１０
０ｍｍの範囲とし、上蓋保持部８０とトレイ保持部８１
の数は２〜６カ所とするのがよい。なお、洗浄治具の構
造・形状は、上記した被洗浄ペリクル収納容器を上記配
置で保持することができればよく、図８の形状に限定さ
れるものではない。また、１つの洗浄治具に装着する数
量は、図８の例示では１組となっているが、もちろんこ
れに限定されるものではなく、図８と同様の構造で平行
に配置していけば、複数組の洗浄も充分に可能である。In order to achieve the ultrasonic cleaning method and the dewatering method of the present invention, the present inventors separately set the upper lid and the tray of the pellicle storage container so that they are parallel to each other, and the pellicle mounting surface is vertical. A cleaning jig was prepared so as to be arranged as follows. As shown in FIG. 8, the cleaning jig includes a base frame 82, a support frame 83 having an upper lid holder 80 and a tray holder 81, and a transport bar 84 for transport.
Consists of The interval 85 between the support frames 83 for supporting the upper lid 10 and the tray 11 is 20 to 10
0 mm, the upper lid holding section 80 and the tray holding section 81
Is preferably 2 to 6 places. The structure and shape of the cleaning jig are not limited to the shape shown in FIG. 8 as long as the cleaning pellicle storage container described above can be held in the above arrangement. In addition, the number of pieces to be attached to one cleaning jig is one set in the example of FIG. 8, but is not limited to this, as long as they are arranged in parallel with the same structure as in FIG. 8. In addition, a plurality of sets of washing can be sufficiently performed.

【００４１】搬送バー８４の形状は、搬送装置との兼ね
合いから決定されるべきであるが、上方より懸架して搬
送する場合は、図８に示すような構造とし、搬送による
ペリクル収納容器１０，１１への異物の付着を防ぐた
め、その両端８６で懸架するのがよい。また、搬送バー
８４は、搬送システムによってベースフレーム８２の下
側から持ち上げて搬送する場合など、必要としない場合
にはこれを省略してもよい。洗浄治具の材質は、その構
成部品毎に、洗浄中に発塵しにくいものの中から適切な
材質を選択すればよい。特にベースフレーム８２、上蓋
またはトレイの支持フレーム８３、搬送バー８４などの
主要構造体に関しては、必要な強度があればその材質を
問わないが、例えば、パイレックスガラス、石英ガラ
ス、ステンレス鋼、チタン及びその合金などが挙げられ
る。また、上蓋及びトレイ保持部８０，８１はペリクル
収納容器１０，１１の傷付きを防ぐために樹脂製にする
とよい。樹脂の種類は、温度、薬液に対して劣化せず、
ペリクル収納容器と接触した際に異物の発生しにくいも
のであればよく、特に限定されるものではないが、例え
ば、ＰＴＦＥ、ＰＥＥＫ、ＰＯＭ等のエンジニアリング
プラスチックを挙げることができる。The shape of the transport bar 84 should be determined based on the balance with the transport device. However, when transporting from above, the transport bar 84 has a structure as shown in FIG. In order to prevent foreign matter from adhering to the support 11, it is preferable to suspend at both ends 86. The transport bar 84 may be omitted when not necessary, such as when the transport bar is lifted from below the base frame 82 and transported by the transport system. As the material of the cleaning jig, an appropriate material may be selected for each component from among those which are unlikely to generate dust during cleaning. In particular, the main structure such as the base frame 82, the support frame 83 of the top lid or tray, and the transport bar 84 may be made of any material as long as it has the necessary strength. For example, Pyrex glass, quartz glass, stainless steel, titanium and Its alloys are mentioned. Further, the upper lid and the tray holding portions 80 and 81 are preferably made of resin in order to prevent the pellicle storage containers 10 and 11 from being damaged. The type of resin does not deteriorate with temperature and chemicals,
Any material that does not easily generate foreign matter when it comes into contact with the pellicle container is not particularly limited, and examples thereof include engineering plastics such as PTFE, PEEK, and POM.

【００４２】他方、クリップの洗浄治具は、例えば、図
９に示すように、クリップを収納するクリップ収納カゴ
９０、洗浄中のクリップの流出を防ぐ開閉式の蓋９１、
脱着アタッチメント９２から構成される。脱着アタッチ
メント９２により、図８に示す上蓋及びトレイの洗浄治
具に取り付け、取り外しが可能な構造となっている。ク
リップ洗浄治具は、複数個のクリップが流出しないよう
収容できればよく、開閉式の蓋９１、脱着アタッチメン
ト９２の構造、位置等は、特にこれに限定されるもので
はない。また、図８と同様な構造でクリップ専用の洗浄
治具を作製することももちろん可能であるが、コスト削
減の観点から、望ましくは図９に例示したように、上蓋
及びトレイの洗浄治具に、取り外し可能な構造とするの
がよい。On the other hand, for example, as shown in FIG. 9, the clip cleaning jig includes a clip storage basket 90 for storing clips, an openable lid 91 for preventing clips from flowing out during cleaning,
It comprises a detachable attachment 92. The detachable attachment 92 has a structure that can be attached to and detached from the cleaning jig of the upper lid and the tray shown in FIG. The clip cleaning jig only needs to be able to accommodate a plurality of clips so as not to flow out, and the structure and position of the openable / closable lid 91 and the detachable attachment 92 are not particularly limited thereto. It is of course possible to produce a cleaning jig dedicated to clips with the same structure as in FIG. 8, but from the viewpoint of cost reduction, it is desirable to use a cleaning jig for the top lid and tray as illustrated in FIG. , It is preferable to have a removable structure.

【００４３】クリップ収納カゴ９０の容積は、特に限定
されるものではないが、上蓋及びトレイと同じ洗浄装置
を使用するのが望ましいため、前記したシャワー洗浄装
置においてノズルから噴射された洗浄液が充分にかかる
大きさとするのがよい。クリップ収納カゴ９０の補強体
９３は、超音波洗浄において、超音波を妨害し、洗浄効
果を低下させることが懸念されるため、補強体９３は直
径０．５〜３ｍｍの丸棒とするのがよく、またクリップ
収納カゴ９０の網目９４は少なくとも５ｍｍ以上とする
のがよい。さらに、これらの構造体の材質は強度、耐食
性、価格からステンレス鋼が望ましい。Although the volume of the clip storage basket 90 is not particularly limited, it is desirable to use the same cleaning device as the upper lid and the tray, so that the cleaning liquid sprayed from the nozzle in the above-described shower cleaning device is sufficient. Such a size is preferable. The reinforcing member 93 of the clip storage basket 90 may be a round bar having a diameter of 0.5 to 3 mm because it is feared that the reinforcing member 93 may interfere with ultrasonic waves in ultrasonic cleaning and reduce the cleaning effect. The mesh 94 of the clip storage basket 90 is preferably at least 5 mm or more. Further, the material of these structures is preferably stainless steel from the viewpoint of strength, corrosion resistance and cost.

【００４４】図１０に図８のＡ部の詳細を示す。上蓋１
０及びトレイ１１の保持部は、洗浄槽への浸漬時及び引
上げ時に上蓋１０またはトレイ１１が脱落しないように
設計されていなければならない。この目的からすれば、
上蓋保持部１００は、その上面に、図１０（ａ）のよう
に、上蓋１０の周縁部に対応する断面形状の溝１０１を
備えたものであればよい。しかし、溝１０１の形状は、
上蓋１０との隙間が狭く液抜き溝がないため、引上げ脱
水時に上蓋１０と上蓋保持部１００の間の脱水が不十分
となり、また温風乾燥時にも温風が通りにくいことと相
まって、乾燥時間の延長を招く。よって、溝１０１は引
上げ脱水時に洗浄液の脱水を妨げない形状が望ましい。
ただし、単純に嵌合部を広くしただけでは上蓋１０の脱
落を招く。そこで種々検討した結果、図１０（ｂ）〜
（ｄ）に示すように、溝１０１の上蓋１０との接触部
に、さらに液抜きを目的とした溝を設けることで、これ
が解決できること見いだした。この液抜き溝の形状は、
（ｂ）に示すような矩形断面の溝１０２に限定されるも
のではなく、例えば、（ｃ）に示すような円弧状断面の
溝１０３、（ｄ）に示すようなＶ型断面の溝１０４な
ど、液抜きの目的が果たせる形状であればよい。FIG. 10 shows the details of the portion A in FIG. Top lid 1
The holding portion of the tray 0 and the tray 11 must be designed so that the upper lid 10 or the tray 11 does not fall off when immersed in the cleaning tank and when pulled up. For this purpose,
The upper lid holding portion 100 may have a groove 101 having a cross-sectional shape corresponding to the peripheral portion of the upper lid 10 on its upper surface as shown in FIG. However, the shape of the groove 101 is
Since the gap between the upper lid 10 and the upper lid 10 is small and there is no liquid draining groove, dehydration between the upper lid 10 and the upper lid holding portion 100 becomes insufficient at the time of pulling up and dehydrating, and the drying time is also reduced due to the difficulty of passing hot air at the time of hot air drying. Cause an extension. Therefore, it is desirable that the groove 101 has a shape that does not hinder the dehydration of the cleaning liquid at the time of pulling-up and dehydration.
However, simply widening the fitting portion causes the upper lid 10 to fall off. Therefore, as a result of various studies, FIG.
As shown in (d), it has been found that this problem can be solved by providing a groove for the purpose of draining the liquid further at the contact portion with the upper lid 10 of the groove 101. The shape of this drain groove is
The groove 102 is not limited to the groove 102 having a rectangular cross section as shown in (b), but may be, for example, a groove 103 having an arcuate cross section as shown in (c), a groove 104 having a V-shaped cross section as shown in (d), and the like. Any shape may be used as long as it can fulfill the purpose of draining liquid.

【００４５】トレイ１１についても同様のことがいえ
る。図１１に図８のＢ部の詳細を示す。図１１（ａ）の
トレイ保持部１１０の溝１１１の形状では、トレイ１１
との隙間が狭く液抜き溝がないため、引上げ脱水時に、
トレイ１１とトレイ保持部１１０の間の脱水が不十分と
なり、また、温風乾燥時にも温風が通りにくく、乾燥時
間の延長を招く。そのため、溝１１１のトレイ１１との
接触部に、さらに図１１（ｂ）〜（ｄ）に示すような液
抜きを目的とした溝を設けるのが望ましい。この液抜き
溝の形状は、（ｂ）に示すような矩形断面の溝１１２に
限定されるものではなく、例えば、（ｃ）に示すような
円弧状断面の溝１１３、（ｄ）に示すようなＶ型断面の
溝１１４など、液抜きの目的が果たせる形状であればよ
い。The same can be said for the tray 11. FIG. 11 shows the details of the portion B in FIG. In the shape of the groove 111 of the tray holding unit 110 shown in FIG.
The gap between them is narrow and there is no liquid drain groove.
Dehydration between the tray 11 and the tray holding unit 110 becomes insufficient, and it is difficult for hot air to pass through even during hot air drying, resulting in an increase in drying time. Therefore, it is desirable to provide a groove for drainage as shown in FIGS. 11B to 11D at the contact portion of the groove 111 with the tray 11. The shape of the liquid drain groove is not limited to the groove 112 having a rectangular cross section as shown in (b), but may be, for example, a groove 113 having an arc-shaped cross section as shown in (c), or (d). Any shape, such as a groove 114 having a V-shaped cross section, that can serve the purpose of liquid drainage may be used.

【００４６】上記各洗浄工程間の搬送手段については、
ペリクル収納容器と洗浄治具の重量が重いうえ工程が長
く、作業者の疲労が甚大であることに加えて、搬送中の
作業者からの異物の付着が懸念される。このため、本発
明の洗浄方法を実施する装置には、自動搬送機構を備え
ることが望ましい。前記した本発明の洗浄方法で使用す
る洗浄装置、脱水装置及び乾燥装置を工程の流れに沿っ
て配置し、これに搬送機構を設けることで、一連の工程
を連続かつ全自動で行う装置にすることができる。図１
２に本発明が適用される洗浄装置の一例を概略平面図で
示す。The transport means between the above-mentioned cleaning steps is as follows.
The weight of the pellicle storage container and the cleaning jig is heavy, the process is long, and the operator is extremely tired. In addition, there is a concern that foreign substances may adhere to the pellicle container during transportation. For this reason, it is desirable that the apparatus for performing the cleaning method of the present invention includes an automatic transport mechanism. The cleaning device, the dehydrating device and the drying device used in the above-described cleaning method of the present invention are arranged along the flow of the process, and a transport mechanism is provided in the cleaning device, so that a series of processes can be performed continuously and fully automatically. be able to. FIG.
FIG. 2 is a schematic plan view showing an example of a cleaning apparatus to which the present invention is applied.

【００４７】上記洗浄装置は、図２〜図７に関連して詳
細に説明した、洗浄装置架台１２０上にシャワー洗浄装
置１２１、界面活性剤水溶液を用いる超音波洗浄装置１
２２、純水を用いるシャワー洗浄装置１２３、純水を用
いる超音波洗浄装置１２４、純水を用いるシャワー洗浄
装置１２３、脱水装置１２５及び乾燥装置１２６が順に
配列されている。搬送装置は、搬送アーム１２９，引上
げアーム１３０，揺動アーム１３１、上下方向（引上げ
方向）搬送用の単軸ロボット１３５、左右方向搬送用の
サーボモータ１３２、ボールねじ１３３、直動ガイド１
３７、架台１２７、連結ロッド１３４及びコンベア１２
８から構成される。ペリクル収納容器１０、１１は洗浄
治具１２に取り付けられて工程順に処理・搬送される。The above-described cleaning apparatus is a shower cleaning apparatus 121 on a cleaning apparatus base 120 and an ultrasonic cleaning apparatus 1 using an aqueous solution of a surfactant described in detail with reference to FIGS.
22, a shower cleaning device 123 using pure water, an ultrasonic cleaning device 124 using pure water, a shower cleaning device 123 using pure water, a dehydrating device 125, and a drying device 126 are arranged in this order. The transfer device includes a transfer arm 129, a pulling arm 130, a swing arm 131, a single-axis robot 135 for transfer in a vertical direction (pulling direction), a servomotor 132 for transfer in a horizontal direction, a ball screw 133, and a linear guide 1.
37, stand 127, connecting rod 134 and conveyor 12
8. The pellicle storage containers 10 and 11 are attached to a cleaning jig 12 and processed and transported in the order of processes.

【００４８】この例では、純水を用いる超音波洗浄装置
の揺動アーム１３１（図５の５６に相当）と脱水装置の
引上げアーム１３０（図６の６６に相当）は、共に搬送
アームを兼ねており、純水による超音波洗浄及び引上げ
脱水処理が終了した後は搬送アームとして機能する。各
洗浄装置１２１〜１２４での各洗浄槽及び脱水装置１２
５における上下方向の移動及び脱水槽への搬送は、各洗
浄及び脱水装置毎に配置された単軸ロボット１３５によ
り行われるが、この単軸ロボット１３５は、連結ロッド
１３４によりそれぞれ連結され、サーボモータ１３２の
運転で全ての搬送アームが連動して動く。乾燥装置１２
６前後の搬送手段としてコンベア１２８を例示したが、
もちろんこれに限定されるものではなく、ウオーキング
ビーム型のものや、乾燥装置前後にロボットを配置した
ものでもよい。In this example, the swing arm 131 (corresponding to 56 in FIG. 5) of the ultrasonic cleaning apparatus using pure water and the pull-up arm 130 (corresponding to 66 in FIG. 6) of the dehydrator also serve as a transfer arm. After the ultrasonic cleaning with pure water and the pull-up / dehydration process are completed, the device functions as a transfer arm. Each cleaning tank and dehydrating device 12 in each of the cleaning devices 121 to 124
5 is carried out by a single-axis robot 135 disposed for each washing and dewatering device, and the single-axis robot 135 is connected by a connecting rod 134, and is connected to a servomotor. By the operation of 132, all the transfer arms move in conjunction. Drying device 12
The conveyor 128 has been exemplified as the transport means around 6.
Of course, the present invention is not limited to this, and may be a walking beam type or a type in which a robot is arranged before and after the drying device.

【００４９】搬送装置の構成として、上記のような全工
程を一体とした装置の他に、洗浄槽間を個別の独立した
搬送装置で結んだ形式など、種々の形態が挙げられる
が、所望の搬送動作が行えればよく、特に限定されるも
のではない。アクチュエータとしても、汎用ロボットの
組み合わせ、エアーシリンダー、サーボモータとボール
ねじなど、様々なものが使用でき、価格、特性に応じて
使い分ければよい。ただし、被洗浄物への異物の付着を
防ぐため、これらの駆動部は、適切なカバーで周囲から
遮蔽し、その内部を局所排気により、常に周囲よりも負
圧にしておくことが望ましい。As the structure of the transfer device, there are various forms such as a type in which the cleaning tanks are connected by separate and independent transfer devices, in addition to the above-described device in which all the steps are integrated. There is no particular limitation as long as the transport operation can be performed. Various actuators such as a combination of a general-purpose robot, an air cylinder, a servomotor and a ball screw can be used as the actuator. However, in order to prevent foreign matter from adhering to the object to be cleaned, it is desirable that these driving sections are shielded from the surroundings by an appropriate cover, and the inside thereof is always kept at a lower pressure than the surroundings by local exhaust.

【００５０】搬送装置における洗浄治具１２の支持方法
には、図１３に概略正面図で示したように、（ａ）上方
より懸架するもの、（ｂ）下方より保持するものなどが
挙げられるが、特に限定されるものではない。しかし、
下方から洗浄治具１２を保持する場合、把持アーム１３
９の構造が複雑になることから、望ましくは図１３
（ａ）に示した上方から懸架する方式とするのがよい。
搬送装置側は搬送アーム１２９の下部にフック１３８を
２カ所に設け、洗浄治具側はこれと対応する位置に上部
に搬送バー８４を有する構造となる。このとき、フック
１３８と搬送バー８４の嵌合部は、フック１３８が搬送
バー８４を下方より掬い上げた時、容易に懸架でき、な
おかつ搬送中にペリクル収納容器１０，１１及び洗浄治
具１２が振れない形状とする。このフック１３８と搬送
バー８４の嵌合部の詳細を図１３（ｃ）に示す。フック
１３８と搬送バー８４は、容易に懸架でき、なおかつ搬
送中の安定性を高くするために、相互の嵌合部分をテー
パー状とし、その角度βは３０〜７５°の範囲内とする
のがよい。As shown in the schematic front view of FIG. 13, the method of supporting the cleaning jig 12 in the transfer device includes (a) a method of suspending from above, and (b) a method of holding from below. However, there is no particular limitation. But,
When holding the cleaning jig 12 from below, the holding arm 13
Since the structure of FIG. 9 becomes complicated,
It is preferable to adopt a method of suspending from above shown in (a).
The transfer device has a structure in which hooks 138 are provided at two locations below the transfer arm 129, and the cleaning jig has a transfer bar 84 at an upper position at a position corresponding to the hook 138. At this time, the fitting portion between the hook 138 and the transport bar 84 can be easily suspended when the hook 138 scoops up the transport bar 84 from below, and the pellicle storage containers 10 and 11 and the cleaning jig 12 are moved during the transport. Shape that does not swing. FIG. 13C shows details of a fitting portion between the hook 138 and the transport bar 84. The hook 138 and the transport bar 84 can be easily suspended, and in order to enhance stability during transport, the mutual fitting portion is tapered, and the angle β is in the range of 30 to 75 °. Good.

【００５１】[0051]

【実施例】以下、本発明の洗浄方法を、実施例及び比較
例を挙げて説明する。 （実施例１）「クラス１０」のクリーンルーム内に置か
れた、図１２に示したのと同様の洗浄装置を用いて本発
明の洗浄方法を行った。先ず、ペリクル収納容器の上蓋
１０及びトレイ１１を図８に示す構造の洗浄治具１２に
取り付け、図２に示すシャワー洗浄装置を用いて、流量
をノズル１本あたり４Ｌ／分、圧力を０．３ＭＰａとし
て５分間の洗浄を行った。次に、図３に示す超音波洗浄
装置を用いて、界面活性剤：クリーンエースＳ（前出）
を１０％の濃度で純水に溶解したものを洗浄液として、
５分間の超音波洗浄を行った。このとき、洗浄液は、温
度を３０℃で一定に制御しながら、槽容量５０Ｌに対し
て流量４０Ｌ／分で循環させた。超音波洗浄機には、４
周波混合型超音波洗浄機：発振器ＵＯ１２００ＦＸ１−
Ｐ（前出）を使用し、音圧強度５０ｋＰａで超音波を照
射した。次に、図４に示すシャワー洗浄装置を用いて純
水を吹き付け、界面活性剤をペリクル収納容器１０、１
１及び洗浄治具１２の表面から洗い流した。流量はノズ
ル１本あたり２Ｌ／分、圧力は０．０５ＭＰａとして１
分間の洗浄を行った。EXAMPLES The cleaning method of the present invention will be described below with reference to examples and comparative examples. (Example 1) The cleaning method of the present invention was performed using a cleaning apparatus similar to that shown in Fig. 12, which was placed in a "class 10" clean room. First, the upper lid 10 and the tray 11 of the pellicle storage container are attached to the cleaning jig 12 having the structure shown in FIG. 8, and the flow rate is set to 4 L / min per nozzle and the pressure is set to 0. Washing was performed at 3 MPa for 5 minutes. Next, using the ultrasonic cleaning device shown in FIG. 3, a surfactant: Clean Ace S (described above)
Was dissolved in pure water at a concentration of 10% as a cleaning solution,
Ultrasonic cleaning was performed for 5 minutes. At this time, the cleaning liquid was circulated at a flow rate of 40 L / min with respect to a tank volume of 50 L while controlling the temperature at 30 ° C. at a constant value. 4 for ultrasonic cleaner
Frequency mixing type ultrasonic cleaner: Oscillator UO1200FX1-
Ultrasonic waves were applied at a sound pressure intensity of 50 kPa using P (described above). Next, pure water is sprayed using the shower cleaning device shown in FIG.
1 and from the surface of the cleaning jig 12. The flow rate is 2 L / min per nozzle and the pressure is 0.05 MPa.
Was performed for a minute.

【００５２】これにより界面活性剤を除去した後、図５
に示す超音波洗浄装置を用いて純水中で超音波洗浄を行
った。洗浄槽の容量５０Ｌに対し、４０Ｌ／分の流量で
純水を循環させながら、純水装置から純水を１０Ｌ／分
の流量で供給した。純水の温度は３０℃とし、５分間の
洗浄を行った。超音波洗浄機には上記と同じものを使用
し、音圧強度５０ｋＰａの条件で超音波を照射した。さ
らに、駆動機構５９と揺動アーム５６とからなる揺動装
置を用いて、洗浄中、ペリクル収納容器１０，１１を洗
浄治具１２とともに、１回／分の頻度、速度５０ｍｍ／
秒で揺動させた。次に、図４に示すシャワー洗浄装置を
用いて純水を吹き付け、ペリクル収納容器１０，１１の
表面に残っていた気泡を完全に除去した。流量をノズル
１本あたり２Ｌ／分、圧力は０．０５ＭＰａとして１分
間の洗浄を行った。After removing the surfactant by this, FIG.
The ultrasonic cleaning was performed in pure water using the ultrasonic cleaning apparatus shown in FIG. Pure water was supplied from the pure water apparatus at a flow rate of 10 L / min while circulating the pure water at a flow rate of 40 L / min with respect to the capacity of the cleaning tank of 50 L. The temperature of the pure water was 30 ° C., and washing was performed for 5 minutes. The same ultrasonic cleaner as described above was used, and ultrasonic waves were irradiated under the condition of a sound pressure intensity of 50 kPa. Further, during cleaning, the pellicle storage containers 10 and 11 are moved together with the cleaning jig 12 at a frequency of once / minute and at a speed of 50 mm / h using a swinging device including a driving mechanism 59 and a swinging arm 56.
Rocked in seconds. Next, pure water was sprayed using the shower cleaning device shown in FIG. 4 to completely remove air bubbles remaining on the surfaces of the pellicle storage containers 10 and 11. Cleaning was performed for 1 minute at a flow rate of 2 L / min per nozzle and a pressure of 0.05 MPa.

【００５３】このようにして洗浄が終了した後、図６に
示す脱水装置を用いて、ペリクル収納容器１０，１１の
全体を純水中に浸漬した後、洗浄治具１２とともにゆっ
くり引上げて脱水を行った。このとき、洗浄治具１２の
水面に対する傾斜角αは１０°とし、引上げ速度は１ｍ
ｍ／秒で一定とした。純水の温度は３５℃とし、脱水槽
６０の体積５０Ｌに対して流量４０Ｌ／分で循環させな
がら、給水管４８から純水を流量１０Ｌ／分で供給し
た。乾燥は、図７に示す構造の温風乾燥機を用い、流速
１．０ｍ／秒、温度７０℃の条件で１０分間行った。上
記のようにして、洗浄及び乾燥を行ったペリクル収納容
器５０個の上蓋１０とトレイ１１の内側を、暗室内にて
４０万ルクスの集光ランプで目視検査した。その結果、
５０個全てにおいて目視で確認できる異物は全く残って
いなかった。After the washing is completed in this manner, the entire pellicle storage containers 10 and 11 are immersed in pure water using a dehydrator shown in FIG. went. At this time, the inclination angle α of the cleaning jig 12 with respect to the water surface is 10 °, and the pulling speed is 1 m.
m / sec. The temperature of the pure water was 35 ° C., and pure water was supplied at a flow rate of 10 L / min from the water supply pipe 48 while circulating at a flow rate of 40 L / min with respect to a volume of 50 L of the dewatering tank 60. Drying was performed for 10 minutes at a flow rate of 1.0 m / sec and a temperature of 70 ° C. using a hot air dryer having a structure shown in FIG. As described above, the inside of the upper lid 10 and the tray 11 of the 50 pellicle storage containers that had been washed and dried were visually inspected in a dark room with a 400,000-lux condenser lamp. as a result,
No foreign matter which could be visually confirmed remained in all 50 pieces.

【００５４】（比較例１） 界面活性剤：クリーンエースＳ（前出）の１０％水溶液
をポリビニルアルコール製の不織布：ベルクリン（井内
盛栄堂社製、商品名）に浸潤させ、手作業でペリクル収
納容器の上蓋１０とトレイ１１の全表面をくまなくスク
ラブ洗浄し、純水ですすいだ後、図１４［（ａ）は概略
正面図、（ｂ）は概略側面図、（ｃ）は概略平面図であ
る］に示すパイレックスガラス製の洗浄治具１２の２つ
の槽１４２、１４３内にそれぞれ収容した。この洗浄治
具１２をペリクル収納容器１０、１１ごと、図１５
［（ａ）は概略正面図、（ｂ）、（ｃ）はそれぞれ要部
の概略側面図及び概略平面図である］に示す超音波洗浄
装置の洗浄槽１５０内に装入し、図３に示した超音波洗
浄装置を用いて、上記実施例と同じ条件、方法で、界面
活性剤の１０％純水溶液による超音波洗浄を行った。そ
の後、同じ超音波洗浄装置を用いて、純水中で１０分の
超音波洗浄を行った。洗浄液が純水であることと、純水
装置（図示せず）から純水を１０Ｌ／分の流量で供給す
ることを除き、洗浄装置の仕様及び洗浄条件は、上記し
た洗浄液が界面活性剤の場合と同じである。洗浄を終え
たペリクル収納容器１０、１１は、洗浄治具１２に入れ
たまま床面からの高さが１３００ｍｍの台上に放置し、
異物が付着しないように周囲に注意しながら５時間かけ
て自然乾燥させた。なお、本比較例における全ての作業
は「クラス１０」のクリーンルーム内で行った。(Comparative Example 1) Surfactant: A 10% aqueous solution of Clean Ace S (described above) was infiltrated into a non-woven fabric made of polyvinyl alcohol: Velklin (trade name, manufactured by Iuchi Seieido Co., Ltd.) and stored in a pellicle manually. After scrubbing the entire surface of the container top lid 10 and the tray 11 thoroughly and rinsing with pure water, FIG. 14 (a) is a schematic front view, (b) is a schematic side view, and (c) is a schematic plan view. Are contained in the two tanks 142 and 143 of the Pyrex glass cleaning jig 12 shown in FIG. The cleaning jig 12 is put together with the pellicle storage containers 10 and 11 in FIG.
[(A) is a schematic front view, and (b) and (c) are a schematic side view and a schematic plan view, respectively, of a main part]. Using the indicated ultrasonic cleaning apparatus, ultrasonic cleaning was performed with a 10% pure aqueous solution of a surfactant under the same conditions and method as in the above-described example. Thereafter, ultrasonic cleaning was performed in pure water for 10 minutes using the same ultrasonic cleaning device. Except that the cleaning liquid is pure water and that pure water is supplied at a flow rate of 10 L / min from a pure water apparatus (not shown), the specifications of the cleaning apparatus and the cleaning conditions are as follows. Same as case. The pellicle storage containers 10 and 11 having been washed are left on a table having a height of 1300 mm from the floor while being placed in the cleaning jig 12,
It was air-dried for 5 hours while paying careful attention to the surroundings so that foreign matter did not adhere. All the operations in this comparative example were performed in a “class 10” clean room.

【００５５】洗浄・乾燥を終えたそれぞれ５０個の上蓋
１０とトレイ１１の内側を、暗室内にて４０万ルクスの
集光ランプで目視検査した。その結果、５０個全てにお
いて目視で確認できる異物は全く残っていなかった。さ
らに、洗浄を施したペリクル収納容器にペリクルを収納
し輸送を行った場合に、ペリクルに異物の付着がないか
の確認試験を行った。異物が全く付着していないことを
確認したペリクルを、上記実施例及び本比較例で洗浄し
たそれぞれのペリクル収納容器に各５０個収納した。そ
れぞれのペリクル収納容器の周囲をクッション材で覆っ
て、各５個ずつを同一のダンボール箱に梱包し、２００
ｋｍの距離をトラック便にて往復輸送した。その後、ク
リーンルーム内でペリクルをペリクル収納容器から取り
だし、日立電子エンジニアリング社製のレーザー表面検
査装置及び４０万ルクスの集光ランプを使用した目視検
査にて、ペリクル膜面のみならずペリクルフレームの内
壁及び外壁について異物検査を行った。その結果、本比
較例で洗浄したペリクル収納容器については、５０個の
サンプルのうち、４個のペリクル膜面に０．５〜１μｍ
の大きさの異物の付着が認められたが、実施例１で洗浄
したペリクル収納容器には、５０個のサンプル全数にお
いて異物の付着は全く見られなかった。After cleaning and drying, the inside of each of the 50 upper lids 10 and trays 11 was visually inspected in a dark room with a 400,000 lux condenser lamp. As a result, no foreign matter that could be visually confirmed remained in all 50 pieces. Further, when the pellicle was stored in the washed pellicle storage container and transported, a confirmation test was performed to determine whether or not foreign matter was attached to the pellicle. Fifty pellicles, each of which was confirmed to have no foreign matter attached, were stored in each of the pellicle storage containers washed in the above-described example and this comparative example. The periphery of each pellicle storage container is covered with a cushioning material, and each of the five pellicle storage containers is packed in the same cardboard box.
It was transported back and forth over a distance of km by truck. After that, the pellicle was taken out of the pellicle storage container in the clean room, and visually inspected using a laser surface inspection device manufactured by Hitachi Electronics Engineering and a focusing lamp of 400,000 lux. Foreign material inspection was performed on the outer wall. As a result, with respect to the pellicle storage container washed in the present comparative example, 0.5 to 1 μm
However, in the pellicle container cleaned in Example 1, no foreign matter was observed in all of the 50 samples.

【００５６】（比較例２）５０個のペリクル収納容器に
ついて、前記実施例と同様にして洗浄を行い、脱泡を目
的としたシャワー洗浄及び脱水作業を行わずに、純水に
よる超音波洗浄後直ちに温風乾燥機で乾燥した。その結
果、１０分で乾燥できたのはサンプル５０個中、１個も
なかった。(Comparative Example 2) Fifty pellicle storage containers were cleaned in the same manner as in the above embodiment, and after ultrasonic cleaning with pure water without performing shower cleaning and dehydration for the purpose of defoaming. Immediately, it was dried with a hot air dryer. As a result, none of 50 samples could be dried in 10 minutes.

【００５７】（比較例３）５０個のペリクル収納容器に
ついて、上蓋保持部が図１０（ａ）に示す形状で、トレ
イ保持部が図１１（ａ）に示す形状の、図８に示す構造
の洗浄治具を使用し、前記実施例と全く同様にして、洗
浄〜乾燥までの一連の処理を行った。乾燥後、上蓋１０
を検査したところ、５０個のサンプル中、２４個につい
て、上蓋保持部８０との接触部に水滴の残留が認められ
た。また、トレイにおいては５０個のサンプル中、３８
個について、トレイ保持部８１との接触部に水滴の残留
が認められた。(Comparative Example 3) With respect to 50 pellicle storage containers, the upper lid holding portion has the shape shown in FIG. 10A and the tray holding portion has the shape shown in FIG. Using a cleaning jig, a series of processes from cleaning to drying were performed in exactly the same manner as in the above-described example. After drying, cover 10
As a result, water droplets were found to remain in contact with the upper lid holding portion 80 in 24 of 50 samples. In the tray, 38 out of 50 samples
Regarding the individual pieces, water droplets were observed at the contact portions with the tray holding portion 81.

【００５８】[0058]

【発明の効果】本発明によれば、ペリクル収納容器の表
面をきわめて清浄に洗浄することができる。また、ペリ
クル収納容器の洗浄から乾燥までの一連の作業を連続で
行うことが可能となり、きわめて高い生産性が達成され
る。According to the present invention, the surface of the pellicle container can be cleaned extremely cleanly. Further, a series of operations from washing to drying of the pellicle storage container can be performed continuously, and extremely high productivity is achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図１】 本発明が対象とする一般的なペリクル収納容
器を示し、（ａ）は斜視図、（ｂ）は（ａ）のＡ−Ａ矢
視線にそう縦断面図である。1A and 1B show a general pellicle storage container to which the present invention is applied, wherein FIG. 1A is a perspective view, and FIG. 1B is a longitudinal sectional view taken along line AA of FIG.

【図２】 本発明で使用するシャワー洗浄装置の一例を
示すもので、（ａ）は概略正面図、（ｂ）、（ｃ）はそ
れぞれ要部の概略側面図及び概略平面図である。FIG. 2 shows an example of a shower cleaning device used in the present invention, wherein (a) is a schematic front view, and (b) and (c) are a schematic side view and a schematic plan view of a main part, respectively.

【図３】 本発明で使用する、洗浄液として界面活性剤
水溶液を用いる超音波洗浄装置の一例を示すもので、
（ａ）は概略正面図、（ｂ）、（ｃ）はそれぞれ要部の
概略側面図及び概略平面図である。FIG. 3 shows an example of an ultrasonic cleaning apparatus using a surfactant aqueous solution as a cleaning liquid used in the present invention.
(A) is a schematic front view, (b), (c) is a schematic side view and a schematic plan view of a main part, respectively.

【図４】 本発明で使用する、洗浄液として純水を用い
るシャワー洗浄装置の一例を示すもので、（ａ）は概略
正面図、（ｂ）、（ｃ）はそれぞれ要部の概略側面図及
び概略平面図である。FIG. 4 shows an example of a shower cleaning apparatus using pure water as a cleaning liquid, which is used in the present invention, wherein (a) is a schematic front view, (b) and (c) are schematic side views of main parts, respectively. It is a schematic plan view.

【図５】 本発明で使用する、洗浄液として純水を用い
る超音波洗浄装置の一例を示すもので、（ａ）は概略正
面図、（ｂ）、（ｃ）はそれぞれ要部の概略側面図及び
概略平面図である。FIG. 5 shows an example of an ultrasonic cleaning apparatus using pure water as a cleaning liquid, which is used in the present invention, wherein (a) is a schematic front view, and (b) and (c) are schematic side views of main parts, respectively. And a schematic plan view.

【図６】 本発明で使用する脱水装置の一例を示す概略
正面図である。FIG. 6 is a schematic front view showing an example of a dehydrator used in the present invention.

【図７】 本発明で使用する乾燥装置の一例を示す概略
正面図である。FIG. 7 is a schematic front view showing an example of a drying device used in the present invention.

【図８】 本発明で使用するペリクル収納容器の洗浄治
具の一例を示し、（ａ）は概略正面図、（ｂ）は概略側
面図、（ｃ）は概略平面図である。8A and 8B show an example of a jig for cleaning a pellicle storage container used in the present invention, wherein FIG. 8A is a schematic front view, FIG. 8B is a schematic side view, and FIG. 8C is a schematic plan view.

【図９】 本発明で使用するクリップ洗浄治具の一例を
示し、（ａ）は概略正面図、（ｂ）は概略側面図、
（ｃ）は概略平面図である。FIG. 9 shows an example of a clip cleaning jig used in the present invention, wherein (a) is a schematic front view, (b) is a schematic side view,
(C) is a schematic plan view.

【図１０】 洗浄治具に上蓋を取り付ける保持部の概略
平面図を示し、（ａ）〜（ｄ）はそれぞれ保持部に設け
た溝の異なる態様を示す。FIGS. 10A and 10B are schematic plan views of a holding portion for attaching an upper lid to a cleaning jig, and FIGS. 10A to 10D show different modes of grooves provided in the holding portion.

【図１１】 洗浄治具にトレイを取り付ける保持部の概
略平面図を示し、（ａ）〜（ｄ）はそれぞれ保持部に設
けた溝の異なる態様を示す。FIGS. 11A and 11B are schematic plan views of a holding unit for attaching a tray to a cleaning jig, and FIGS. 11A to 11D show different modes of grooves provided in the holding unit; FIGS.

【図１２】 本発明が適用される洗浄装置の一例を示す
概略平面図である。FIG. 12 is a schematic plan view showing an example of a cleaning device to which the present invention is applied.

【図１３】 本発明で使用する洗浄治具の搬送形態を示
し、（ａ）、（ｂ）はそれぞれ異なる態様の洗浄治具の
概略正面図であり、（ｃ）は（ａ）のフックと搬送バー
の嵌合部の詳細を示す。FIGS. 13A and 13B are schematic front views of a cleaning jig used in the present invention, wherein FIGS. 13A and 13B are different front views of the cleaning jig in different modes. 3 shows details of a fitting portion of the transport bar.

【図１４】 比較例１において使用したペリクル収納容
器の洗浄治具を示し、（ａ）は概略正面図、（ｂ）は概
略側面図、（ｃ）は概略平面図である。14A and 14B show a jig for cleaning a pellicle storage container used in Comparative Example 1, wherein FIG. 14A is a schematic front view, FIG. 14B is a schematic side view, and FIG. 14C is a schematic plan view.

【図１５】 比較例１において使用した超音波洗浄装置
を示し、（ａ）は概略正面図、（ｂ）、（ｃ）はそれぞ
れ要部の概略側面図及び概略平面図である。FIGS. 15A and 15B show an ultrasonic cleaning apparatus used in Comparative Example 1, in which FIG. 15A is a schematic front view, and FIGS.

【符号の説明】[Explanation of symbols]

１：上蓋、 ２：トレイ、 ３：クリップ、１０：（ペ
リクル収納容器の）上蓋、１１：（ペリクル収納容器
の）トレイ、 １２：洗浄治具、２０，３０，４０，５
０，１５０：洗浄槽、２１，３１，５１，１５１：洗浄
液、 ２２，４２：ノズル、２３，３３，４３，５３，
６３，７３，７７，１５３：フィルター、２４，３４，
５４，６４，７４，１５４：ヒーター、２５，３５，４
５，５５，６５，１５５：ポンプ、 ２６，４６：カバ
ー、２７，３７，４７，５７，６７，１５７：配管、３
２，１５２：超音波振動板、 ４１，６１：純水、 ４
８：給水管、４９：排水管、 ５６：揺動アーム、 ５
８，６８：支持部、５９，６９：駆動機構、 ６０：脱
水槽、 ６２：液面、６６：引上げアーム、α：洗浄治
具の液面からの傾斜角度、７２：乾燥庫、 ７５：循環
ファン、 ７６：外気導入ファン、 ７８：矢印 ８０：上蓋保持部、 ８１：トレイ保持部、 ８２：ベ
ースフレーム、８３：支持フレーム、 ８４，１４１：
搬送バー、 ８５：間隔、８６：両端（搬送時の懸架位
置）、 ９０：クリップ収納カゴ、９１：開閉式の蓋、
９２：脱着アタッチメント、 ９３：補強体、９４：
網目、 １００：上蓋保持部、１０１，１１１：（液抜
き溝の無い）溝、１０２，１１２：矩形断面の液抜き
溝、１０３，１１３：円弧状断面の液抜き溝、１０４，
１１４：Ｖ型断面の液抜き溝、 １１０：トレイ保持
部、１２０：洗浄装置架台、 １２１：シャワー洗浄装
置、１２２：界面活性剤水溶液を用いる超音波洗浄装
置、１２３：純水を用いるシャワー洗浄装置、１２４：
純水を用いる超音波洗浄装置、 １２５：脱水装置、１
２６：乾燥装置、 １２７：搬送装置架台、 １２８：
コンベア、１２９：搬送アーム、 １３０：引上げアー
ム、 １３１：揺動アーム、１３２：サーボモータ、
１３３：ボールネジ、 １３４：連結ロッド、１３５：
単軸ロボット、 １３６：シャッター、１３７：直動ガ
イド、 １３８：フック、 １３９：把持アーム、β：
フックと搬送バーの嵌合部のテーパー角度、１４２，１
４３：槽、1: upper lid, 2: tray, 3: clip, 10: upper lid (of pellicle storage container), 11: tray (of pellicle storage container), 12: cleaning jig, 20, 30, 40, 5
0, 150: cleaning tank, 21, 31, 51, 151: cleaning liquid, 22, 42: nozzle, 23, 33, 43, 53,
63, 73, 77, 153: filters, 24, 34,
54, 64, 74, 154: heater, 25, 35, 4
5, 55, 65, 155: pump, 26, 46: cover, 27, 37, 47, 57, 67, 157: piping, 3
2, 152: ultrasonic vibration plate, 41, 61: pure water, 4
8: water supply pipe, 49: drain pipe, 56: swing arm, 5
8, 68: support portion, 59, 69: drive mechanism, 60: dehydration tub, 62: liquid surface, 66: pulling arm, α: inclination angle of cleaning jig from liquid surface, 72: drying cabinet, 75: circulation Fan: 76: outside air introduction fan, 78: arrow 80: upper lid holding unit, 81: tray holding unit, 82: base frame, 83: support frame, 84, 141:
Transport bar, 85: interval, 86: both ends (suspension position during transport), 90: clip storage basket, 91: openable lid,
92: attachment / detachment, 93: reinforcement, 94:
Mesh, 100: upper lid holding portion, 101, 111: groove (without liquid drain groove), 102, 112: liquid drain groove of rectangular cross section, 103, 113: liquid drain groove of arc-shaped cross section, 104,
114: V-shaped cross section drainage groove, 110: tray holding unit, 120: cleaning device stand, 121: shower cleaning device, 122: ultrasonic cleaning device using a surfactant aqueous solution, 123: shower cleaning device using pure water , 124:
Ultrasonic cleaning device using pure water, 125: dehydrating device, 1
26: Drying device, 127: Carrier frame, 128:
Conveyor, 129: Transfer arm, 130: Pull-up arm, 131: Swing arm, 132: Servo motor,
133: ball screw, 134: connecting rod, 135:
Single-axis robot, 136: shutter, 137: linear guide, 138: hook, 139: gripping arm, β:
142,1 Taper angle of the fitting part between hook and transfer bar
43: tank,

───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2H095 BB21 BB23 BB30 3B116 AA46 AB39 BB02 BB23 BB33 BB62 BB83 CC01 CC03 3B201 AA46 AB40 AB44 BB02 BB03 BB04 BB23 BB33 BB62 BB92 BB93 CB15 CC01 CC12 5F046 AA28  ────────────────────────────────────────────────── ─── Continued from the front page F term (reference)

Claims (13)

【特許請求の範囲】[Claims] 【請求項１】 洗浄液をノズルから吹き付けるシャワー
洗浄、界面活性剤水溶液中での超音波洗浄、及び純水中
での超音波洗浄を順次行った後、脱水及び乾燥を行うこ
とを特徴とするペリクル収納容器の洗浄方法。1. A pellicle characterized by sequentially performing shower cleaning in which a cleaning liquid is sprayed from a nozzle, ultrasonic cleaning in a surfactant aqueous solution, and ultrasonic cleaning in pure water, followed by dehydration and drying. How to clean the storage container. 【請求項２】 界面活性剤水溶液中での超音波洗浄と純
水中での超音波洗浄の間に、ノズルから純水を吹き付け
るシャワー洗浄が行われる請求項１に記載のペリクル収
納容器の洗浄方法。2. The cleaning of the pellicle container according to claim 1, wherein between the ultrasonic cleaning in the surfactant aqueous solution and the ultrasonic cleaning in pure water, shower cleaning in which pure water is blown from a nozzle is performed. Method. 【請求項３】 純水中での超音波洗浄と脱水の間に、ノ
ズルから純水を吹き付けるシャワー洗浄が行われる請求
項１に記載のペリクル収納容器の洗浄方法。3. The method for cleaning a pellicle container according to claim 1, wherein between the ultrasonic cleaning in pure water and the dehydration, shower cleaning in which pure water is blown from a nozzle is performed. 【請求項４】 純水中での超音波洗浄中に、０．５〜５
分毎に１回の頻度で、洗浄治具に収容したペリクル収納
容器が完全に液中より出る高さまで、洗浄治具ごと揺動
させる請求項１乃至３の何れかに記載のペリクル収納容
器の洗浄方法。4. The method according to claim 1, wherein the ultrasonic cleaning in pure water is performed for 0.5 to 5 minutes.
The pellicle storage container according to any one of claims 1 to 3, wherein the cleaning jig is swung together with the cleaning jig at a frequency of once per minute until the pellicle storage container housed in the cleaning jig completely comes out of the liquid. Cleaning method. 【請求項５】 超音波洗浄に際し、２０〜５０ｋＨｚの
範囲内の少なくとも２つの周波数が同時に混合された超
音波を用いる請求項１乃至４の何れかに記載のペリクル
収納容器の洗浄方法。5. The method for cleaning a pellicle container according to claim 1, wherein at the time of ultrasonic cleaning, ultrasonic waves in which at least two frequencies within a range of 20 to 50 kHz are simultaneously mixed. 【請求項６】 超音波洗浄に際し、周波数が２０〜５０
ｋＨｚの範囲内において少なくとも３ｋＨｚ以上の帯域
幅で連続して変調が繰り返される超音波を用いる請求項
１乃至４の何れかに記載のペリクル収納容器の洗浄方
法。6. The frequency of the ultrasonic cleaning is 20 to 50.
The method for cleaning a pellicle container according to any one of claims 1 to 4, wherein an ultrasonic wave whose modulation is continuously repeated at least over a bandwidth of at least 3 kHz within a range of kHz is used. 【請求項７】 脱水に際し、完全に純水中に浸漬された
ペリクル収納容器を、そのペリクル載置面が垂直で、か
つペリクル収納容器の上縁が液面に対し２〜１５°の範
囲内の角度に傾斜させた状態で、上方に引上げ脱水する
請求項１に記載のペリクル収納容器の洗浄方法。7. A pellicle storage container completely immersed in pure water for dehydration, wherein the pellicle mounting surface is vertical and the upper edge of the pellicle storage container is within a range of 2 to 15 ° with respect to the liquid level. 2. The method for cleaning a pellicle container according to claim 1, wherein the pellicle container is dewatered upward while being tilted at an angle of. 【請求項８】 液面からの引上げが、０．５〜２０ｍｍ
／秒の範囲の引上げ速度で行われる請求項７に記載のペ
リクル収納容器の洗浄方法。8. The method for raising the liquid from the liquid level by 0.5 to 20 mm
The method for cleaning a pellicle storage container according to claim 7, wherein the cleaning is performed at a pulling rate in a range of / p. 【請求項９】 乾燥に際し、温度が５０〜７０℃の空気
を、ＵＬＰＡフィルターを介して流速０．５ｍ／秒以上
で吹き付けて乾燥する請求項１に記載のペリクル収納容
器の洗浄方法。9. The method for cleaning a pellicle container according to claim 1, wherein air having a temperature of 50 to 70 ° C. is blown at a flow rate of 0.5 m / sec or more through an ULPA filter for drying. 【請求項１０】 洗浄から乾燥までの一連の処理が連続
でなされる請求項１に記載のペリクル収納容器の洗浄方
法。10. The method for cleaning a pellicle storage container according to claim 1, wherein a series of processes from cleaning to drying is performed continuously. 【請求項１１】 ペリクル収納容器が自動搬送される請
求項１０に記載のペリクル収納容器の洗浄方法。11. The method for cleaning a pellicle container according to claim 10, wherein the pellicle container is automatically conveyed. 【請求項１２】 ペリクル収納容器の構成部品である上
蓋とトレイを、それぞれ別々にペリクル載置面を垂直に
して、かつペリクル載置面に対し垂直の方向に２０〜１
００ｍｍの間隔で２〜６ヶ所に設けた保持部で保持する
ことを特徴とするペリクル収納容器の洗浄治具。12. An upper cover and a tray, which are components of the pellicle storage container, are separately placed with their pellicle mounting surfaces vertical to 20 to 1 in a direction perpendicular to the pellicle mounting surface.
A jig for cleaning a pellicle storage container, wherein the jig is held by holding portions provided at two to six places at intervals of 00 mm. 【請求項１３】 保持部が、ペリクル収納容器の構成部
品である上蓋及びトレイとの接触部に、液抜きを目的と
した溝を有する請求項１２に記載のペリクル収納容器の
洗浄治具。13. The jig for cleaning a pellicle container according to claim 12, wherein the holding portion has a groove for draining the liquid at a contact portion with the upper lid and the tray, which are components of the pellicle container.
JP18135499A 1999-06-28 1999-06-28 Method of washing pellicle housing container Pending JP2001013677A (en)

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WO2009107319A1 (en) * 2008-02-28 2009-09-03 信越半導体株式会社 Ultrasonic washing apparatus, and ultrasonic washing method
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US9958786B2 (en) 2003-04-11 2018-05-01 Nikon Corporation Cleanup method for optics in immersion lithography using object on wafer holder in place of wafer
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US9645505B2 (en) 2004-06-09 2017-05-09 Nikon Corporation Immersion exposure apparatus and device manufacturing method with measuring device to measure specific resistance of liquid
US8083856B2 (en) 2008-02-28 2011-12-27 Shin-Etsu Handotai Co., Ltd. Ultrasonic cleaning apparatus and ultrasonic cleaning method
JP2009202111A (en) * 2008-02-28 2009-09-10 Shin Etsu Handotai Co Ltd Ultrasonic cleaning device and ultrasonic cleaning method
WO2009107319A1 (en) * 2008-02-28 2009-09-03 信越半導体株式会社 Ultrasonic washing apparatus, and ultrasonic washing method
JP2012118476A (en) * 2010-12-03 2012-06-21 Shin Etsu Chem Co Ltd Pellicle frame cleaning method
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CN108636965B (en) * 2018-05-23 2021-07-30 彭小仙 Equipment for cleaning bottle body and cleaning process thereof
WO2022156021A1 (en) * 2021-01-22 2022-07-28 宁波云德半导体材料有限公司 Boiling and cleaning device for quartz processing
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