CN109087839B - Field emission microscope system for testing and calibrating field emission electron source array - Google Patents
Field emission microscope system for testing and calibrating field emission electron source array Download PDFInfo
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Abstract
A field emission microscope system for testing and calibrating an array of field emission electron sources, the system being connected in the relationship: the main light source and the auxiliary light source jointly generate light source illumination through the semi-reflecting mirror plate and the motor driving mirror; in the light path subsystem, the image sequentially passes through the glass vacuum cavity wall, the motor-driven lens and the semi-reflecting lens to generate an eyepiece image; generating a high frame rate image and a low frame rate image by a high-speed camera; the low frame rate image is used for controlling a motor to drive a lens to improve the definition of the image by soft generation of a focusing control signal through image processing; the synchronous controller generates a camera control signal, a current acquisition control signal and a power supply control signal to control the high-speed camera, the pulse high-voltage power supply and the high-speed current acquisition; a pulse high-voltage power supply applies high-voltage pulses between a field emission electron source and a transparent conductive layer in the image recording member and generates field emission current; high speed current acquisition digitizes the field emission current to produce current data.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to a field emission microscope system for testing and calibrating a field emission electron source array, which is applied to the technical fields of vacuum electronic equipment, X rays, electron guns, computed tomography, nondestructive testing and the like. The system can be used for testing and calibrating the field emission electron source.
[ background of the invention ]
Field electron emission (field emission) has been studied theoretically for a long time as a pure quantum phenomenon. Many field emission electron sources have been developed, most typically metal pointed cone cathodes and carbon nanotube cathodes. The X-ray source based on the field emission technology has the advantages of low working temperature and no heat radiation, and therefore, can be used for developing high-density X-ray arrays. This is not possible with conventional tungsten filament hot cathodes. With the development of field emission technology, a number of new medical and industrial X-ray imaging techniques have been proposed, such as high-density array-based flux field modulation techniques and multi-beam-based inverse geometry computed tomography techniques. However, the performance of field emission electron sources has not been able to meet the needs of marketization and industrialization due to the lack of deep understanding of the mechanism of field emission. In order to improve the reliability and the service life of the field emission electron source, a simple method for quantitatively describing and evaluating the performance of the field emission electron source is required. To this end, we developed a novel field emission microscope system as the primary detection device for the development of field emission electron sources.
Field emission microscopy was first proposed by elmendor in 1936 for studying molecular surface structures and electron distributions. The structure of the method is shown in fig. 1A, the basic structure is that a layer of fluorescent material 102 is coated on the inner wall of a spherical glass vacuum chamber 101, a field emission cathode 103 as an object to be studied is made into a pointed cone shape and is arranged at the center of the spherical glass vacuum chamber 101, when the field emission cathode 103 is connected to the negative pole of a high voltage power supply, a pattern of electron emission is displayed on the fluorescent material 102. The technology can achieve the image resolution of 0.3 nanometer. However, due to the limitation of the geometric structure, the existing field emission microscope can only observe a single field emission electron source, and the research on the field emission electron source array cannot be realized. In addition, the design uses fluorescent material 102 with significant delay and halo, so that the temporal and spatial resolution of the image cannot meet the viewing requirements of the carbon nanotube cathode array based field emission electron source.
In the course of our earlier studies, we found that the polymethyl methacrylate material has the ability to record electron distribution, and the electron beam distribution recorded by the material can achieve nanometer-scale image resolution. Further, since polymethyl methacrylate has higher sensitivity to electron beams having lower kinetic energy than fluorescent materials and the recorded image does not disappear, a field emission microscope using polymethyl methacrylate as a recording material can be used to quantitatively measure the accumulation and distribution of electrons in electron beams emitted from a field emission electron source. The cross-sectional view of this design is shown in FIG. 1B, the basic structure of which is a glass viewing window 111 and a conductive substrate 115 that are parallel to each other. A transparent conductive layer 112 and a layer of polymethylmethacrylate 114 are applied on the glass viewing window 111. The field emission electron source 113 is fabricated on the conductive substrate 115 on the side near the glass observation window 111. The glass viewing window 111 and the conductive substrate 115 are separated by an insulating layer 116. Wherein the thickness of the transparent conductive layer 112 and the polymethylmethacrylate 114 is less than 100 nanometers. The height of the field emission electron source 113 ranges from several micrometers to several hundred micrometers. The thickness of the insulating layer 116 is from 100 micrometers to several hundred micrometers. The design can be found in the documents Y.Sun, D.A. Jaffray, L. -Y.Chen, and J.T.W.Yeow, "Polymethyl Methacrylate Thin-Film-Based Field emission Microscope," IEEE trans.Nanotechnol., vol.11, No.3, pp.441-443, May 2012. This method, although it proposes the design of an image recording means, does not provide a method of recording an image and data synchronously.
In view of the fact that the prior art does not have the capability of detecting and recording the electron distribution uniformity of the field emission electron source in real time, the market of the detection equipment of the field emission system is blank at home and abroad.
[ summary of the invention ]
The invention mainly aims at the blank of the current field emission cathode detection in the aspects of market and technology, and provides a field emission microscope system for recording the electron distribution intensity and uniformity of a large-area field emission electron source. This system is a field emission microscope system based on the image recording means shown in fig. 1B described above. The system has the function of synchronously recording the field emission electron distribution image and the field emission current density data in real time.
The components and connections of the present system are shown in fig. 2. The system comprises an image recording component 201, an optical path subsystem 202, a high-speed camera 203, a pulse high-voltage power supply 204, a high-speed current acquisition 205, a high-speed network 206, a synchronous controller 207, image processing software 208 and a data memory 209. The components and connections of the optical path subsystem are shown in fig. 3. The optical path subsystem includes a primary light source 301, a secondary light source 302, a glass vacuum cavity wall 303, a motor-driven lens 304, and a half-reflective mirror 305.
The connection relation of each main component is as follows: the primary light source 301 generates light source illumination 211 in cooperation with the secondary light source 302 through the half mirror 305 and the motor-driven lens 304 to provide sufficient illumination for the image. Light source illumination 211 illuminates image recording component 201 through glass vacuum cavity wall 303. The field emission image 212 generated on the image recording section 201 enters the high-speed camera 203 through the optical path subsystem 202. In the optical path subsystem 202, the image passes through the glass vacuum cavity wall 303, the motor-driven lens 304, and the half mirror 305 in sequence to produce an eyepiece image 213. The high speed camera 203 generates a high frame rate image 242 and a low frame rate image 243. The low frame rate image 243 generates the focus control signal 222 for controlling the motor driven lens 304 via the image processing software 208 to improve the sharpness of the image. The synchronization controller 207 generates a camera control signal 221, a current acquisition control signal 224, and a power supply control signal 223 for controlling the high-speed camera 203, the pulsed high-voltage power supply 204, and the high-speed current acquisition 205. The pulsed high-voltage power supply 204 applies a high-voltage pulse 231 between the field emission electron source 113 and the transparent conductive layer 112 in the image recording member 201, and generates a field emission current 232. High speed current acquisition 205 digitizes field emission current 232 to produce current data 241. The high frame rate images 242 generated by the high speed camera 203 are transmitted to the data storage 209 via the high speed network 206 and the current data 241 captured by the high speed current acquisition 205 to generate mixed data 244 for storage, and the stored mixed data 244 will be used for archiving and post-analysis research.
Because the high-speed camera 203 can generate image data of a plurality of gigabytes per second, a common network and a hard disk can not realize real-time storage of the data, and the use of a high-speed memory can greatly improve the manufacturing cost of the system, the system realizes the popular storage of a large amount of data through complex time sequence control, thereby greatly improving the total time of image and data acquisition and obviously reducing the manufacturing cost of the system. The control timing of the synchronous control signals of the system is shown in fig. 4. Since the field emission electron sources 113 need to be operated in a pulsed operation mode, the duty ratio cannot be high, which would otherwise cause the field emission electron sources 113 to burn out due to overheating. Therefore, the system collects the image and current data at the time when the pulse high-voltage power supply 204 is switched on, and then transmits the data and the image by using the time when the pulse high-voltage power supply 204 is switched off. To maintain data integrity, the synchronization controller 207 first sends a current acquisition start 421 signal, generates a high speed camera turn on 411 signal after the current acquisition output has stabilized, and then generates a high voltage power on 401 signal, at which time the current and image are recorded in the high speed camera 203 and the high speed current acquisition 205. Depending on the system application, the power control signal 223 will be on for a period of time ranging from a few microseconds to a few milliseconds. The high voltage power off 402 signal then turns off the high voltage pulse 231. Then a high speed camera off 412 signal and a current collection end 422 signal are sequentially issued to stop the high speed camera 203 and the high speed current collection 205. Then, the synchronous controller 207 sends a signal of high frame rate image transmission start 413, the high speed camera 203 stores the high frame rate image 242 in the data memory 209 through the high speed network 206, after the high frame rate image 242 is completely transmitted, the synchronous controller 207 sends a signal of high frame rate image transmission end 414 and a signal of current data transmission start 423, and after the current data 241 is completely transmitted, the synchronous controller 207 sends a signal of current data transmission end 424. At the end of this one complete data acquisition cycle, the next pulse cycle is ready.
The present system employs image processing software 208 to improve image sharpness and reduce data processing time. The main functions of the image processing software are image data screening and auto-focusing. The low frame rate image 243 is passed through the image recognition software 502 to the light-point localization and time-stamping software 504 to generate light-point localization and time-stamping data for direct localization to corresponding image frame and current data at the time of later data analysis. In addition, the image recognition software 502 and the image sharpness analysis software 503 will generate corresponding focus control signals 222 according to the sharpness of the image to control the motor-driven lens 304 to improve the image sharpness.
The invention has the advantages and beneficial effects that: the invention relates to a field emission microscope system for testing and researching a field emission electron source. At present, similar systems do not appear at home and abroad. With the development and market promotion of field emission electron source technology, an efficient and convenient testing method and testing equipment are crucial to the development and production of field emission electron sources. The invention aims to fill the blank in the prior art and the market. In the production process of the field emission electron source, the system can become a detection device for measuring the uniformity of the electron beam distribution of the field emission electron source.
[ description of the drawings ]
Fig. 1A is a sectional view of an apparatus of a conventional field emission microscope.
FIG. 1B is a cross-sectional view of an image recording component of a field emission microscope for use with a field emission cathode array.
FIG. 2 shows system components and connections of a field emission microscope.
Fig. 3 shows the components and connections of the optical subsystem.
Fig. 4 is a control timing of the synchronization control signal.
FIG. 5 is a connection between the image recognition software and the autofocus subsystem.
Fig. 6 shows system components and connections according to the second embodiment.
The numbers in the figures illustrate the following:
101: spherical glass vacuum chamber 102: fluorescent material 103: field emission cathode
111: glass observation window 112: transparent conductive layer 113: field emission electron source
114: polymethyl methacrylate 115: conductive substrate 116: insulating layer
201: image recording section 202: the optical path subsystem 203: high-speed camera
204: pulsed high voltage power supply 205: high-speed current collection 206: high speed network
207: the synchronization controller 208: image processing software 209: data storage
211: light source illumination 212: field emission image 213: eyepiece image
221: camera control signals 222: focus control signal 223: power supply control signal
224: current collection control signal 231: high voltage pulse 232: field emission current
241: current data 242: high frame rate image 243: low frame rate images
244: mixing data
301: the main light source 302: the sub-light source 303: glass vacuum cavity wall
304: motor-driven lens 305: half-reflecting mirror
401: high voltage power on 402: high voltage power off 411: high speed camera turn on
412: high speed camera off 413: high frame rate image transmission start
414: high frame rate image transmission end 421: current collection start 422: end of current collection
423: current data transfer Start 424: end of current data transfer
502: the image recognition software 503: image definition analysis software
504: light-emitting point positioning and time stamping software
651: image feedback control signal
[ detailed description ] embodiments
The system configuration and the optical path configuration of the first embodiment are shown in fig. 2 and 3. The main light source 301, the sub-light source 302, the motor-driven lens 304, the half-mirror 305, and the high-speed camera 203 in the optical path subsystem shown in fig. 3 are disposed on the air side of the glass vacuum cavity wall 303, and the image recording part 201 is disposed on the vacuum side of the glass vacuum cavity wall 303. Light source illumination 211 illuminates image recording component 201 through glass vacuum cavity wall 303. The field emission image 212 generated on the image recording section 201 enters the high-speed camera 203 through the optical path subsystem 202. The high voltage pulse 231 generated by the pulsed high voltage power supply 204 enters the image recording part 201. Image recording component 201 generates field emission current 232 and generates field emission image 212.
The high-speed camera 203 in the present embodiment employs a 13600-frame-per-second high-speed camera. The image resolution is 512x512 pixels. The current acquisition rate is 300000 samples per second with a resolution of 14 bits. High-speed network 206 employs gigabit ethernet switches and six types of network wires. The motor-driven lens 304 is a microscope with 100 times magnification and a half-reflecting mirror 305 with 50%. The pulsed high voltage power supply 204 has a voltage of plus or minus 5000 volts, a current of 80 milliamps, and a bandwidth of 50 kilohertz. Image processing software was developed on high performance computers using the OpenCV computer vision library.
The camera control signal 221, the power control signal 223, and the current collection control signal 224 generated by the synchronization controller 207 use standard TTL level signals. The focus control signal 222 generated by the image processing software 208 uses a Pulse Width Modulation (PWM) signal to control the motor-driven lens 304 in the optical subsystem 202. Image recognition software 502, image sharpness analysis software 503, and light-emitting point localization and time stamping software 504 were developed using the OpenCV computer vision library on the LINUX platform using the PYTHON language. And light point positioning and time stamping software 504 records the X, Y coordinates of the light point and the time of light at that point in a text file format with a time resolution of 0.1 seconds.
The basic operation mode of the embodiment is as follows: the pulsed high voltage power supply 204 and the high speed current acquisition 204 are first enabled and preheated to improve the accuracy of the measurement. After the system is preheated, the image processing software 208, the data memory 209, the high-speed network 206, the high-speed camera 203, the main light source 301 and the auxiliary light source 302 are started. After which various parameters of the synchronization controller 207 are started and set. The time interval between the high voltage power on 401 signal and the high voltage power off 402 signal of the power control signal 223 is 5 milliseconds, the time interval between two high voltage power on 401 signals is 100 milliseconds, and the high speed camera on 411 signal is 5 microseconds ahead of the high voltage power on 401 signal. The current collection start 421 signal is 10 microseconds ahead of the high voltage power supply turn on 401 signal. The synchronous controller 207 sends a high-speed camera off 412 signal 5 microseconds after sending the high-voltage power off 402 signal, then sends a current collection end 422 signal with a delay of 10 microseconds, and then sends a high-frame-rate image transmission start 413 signal, a high-frame-rate image transmission end 414 signal, a current data transmission start 423 signal, and a current data transmission end 424 signal in sequence. At this point, a complete test cycle is complete and the system is ready for the next cycle. The emission uniformity and reliability of the tested field emission electron source 113 can be comprehensively tested by repeating the above cycle for a plurality of times.
When the emission uniformity of the field emission electron source 113 is tested, 50 to 100 cycles are generally operated, and the total test time is from several seconds to several tens of seconds. When testing reliability, the test should run continuously for more than 24 hours, obtaining more than eighty-one-hundred thousand sets of image and current data. By comparing the current data and the images at intervals, the trend of the performance of the measured field emission electron source 113 with time was obtained. This data can be used for quality inspection and quality control in the production process of the emission electron source 113.
The hardware structure of the second embodiment is the same as that of the first embodiment. The system structure of the second embodiment is shown in fig. 6. The system structure of the second embodiment is different from that of the first embodiment described above in that an image feedback control signal 651 is added, so that the image processing software 208 can issue a high-voltage power-off 402 signal in advance according to the content of the low-frame-rate image 243. The second embodiment is mainly applied to the development and research of the field emission electron source 113. The possibility of stopping the test at different stages of the operation of the field emission electron sources 113, in accordance with the adjustment of the image recognition software 502, has facilitated the observation and analysis of the field emission electron sources 113 using means such as a scanning electron microscope. In addition, in the second embodiment, a nonlinear and dynamic control method can be developed by changing the synchronous controller 207, so as to improve the operation stability of the field emission electron source 113 and improve the operation efficiency.
The high-speed camera 203 in the present embodiment employs a 13600-frame-per-second high-speed camera. The image resolution is 512x512 pixels. The current acquisition rate is 300000 samples per second with a resolution of 14 bits. High-speed network 206 employs gigabit ethernet switches and six types of network wires. The motor-driven lens 304 is a microscope with 100 times magnification and a half-reflecting mirror 305 with 50%. The pulsed high voltage power supply 204 has a voltage of plus or minus 5000 volts, a current of 80 milliamps, and a bandwidth of 50 kilohertz. Image processing software was developed on high performance computers using the OpenCV computer vision library.
The camera control signal 221, the power control signal 223, and the current collection control signal 224 generated by the synchronization controller 207 use standard TTL level signals. The focus control signal 222 generated by the image processing software 208 uses a Pulse Width Modulation (PWM) signal to control the motor-driven lens 304 in the optical subsystem 202. Image recognition software 502, image sharpness analysis software 503, and light-emitting point localization and time stamping software 504 were developed using the OpenCV computer vision library on the LINUX platform using the PYTHON language. And light point positioning and time stamping software 504 records the X, Y coordinates of the light point and the time of light at that point in a text file format with a time resolution of 0.1 seconds.
The basic operation mode of the embodiment is as follows: the pulsed high voltage power supply 204 and the high speed current acquisition 204 are first enabled and preheated to improve the accuracy of the measurement. After the system is preheated, the image processing software 208, the data memory 209, the high-speed network 206, the high-speed camera 203, the main light source 301 and the auxiliary light source 302 are started. After which various parameters of the synchronization controller 207 are started and set. The time interval between the power control signal 223 and the high voltage power on 401 signal is 100 milliseconds and the high speed camera on 411 signal is 5 microseconds ahead of the high voltage power on 401 signal. The current collection start 421 signal is 10 microseconds ahead of the high voltage power supply turn on 401 signal. The synchronous controller 207 sends a high-speed camera off 412 signal 5 microseconds after sending the high-voltage power off 402 signal, then sends a current collection end 422 signal with a delay of 10 microseconds, and then sends a high-frame-rate image transmission start 413 signal, a high-frame-rate image transmission end 414 signal, a current data transmission start 423 signal, and a current data transmission end 424 signal in sequence. At this point, a complete test cycle is complete and the system is ready for the next cycle. The time interval between the high voltage power on 401 signal and the high voltage power off 402 signal of the power control signal 223 in the present embodiment is not fixed, and the maximum time interval thereof is limited by the storage capacity of the high speed camera 203. After the synchronous controller 207 sends a signal of turning on the high voltage power source 401, when the image recognition software 502 in the image processing software 208 detects that the light-emitting point of the field emission image 212 appears, an image feedback control signal 651 is sent to the synchronous controller 207, and then the synchronous controller 207 sends signals of turning off 412 the high speed camera, ending 422 the current collection, starting 413 the high frame rate image transmission, ending 414 the high frame rate image transmission, starting 423 current data transmission and ending 424 current data transmission in sequence according to the set time interval. So far, the test is finished. The field emission electron source 113 and the polymethyl methacrylate 114 in the image recording member 201 can be observed and studied by a scanning electron microscope and an atomic force microscope to determine the characteristics and the damage mechanism of various field emitters. If the image processing software fails to capture the light emission phenomenon until the memory of the high-speed camera 203 is exhausted, the voltage of the high-voltage pulse 231 output by the pulse high-voltage power supply 204 needs to be increased appropriately, and the experiment is repeated until the light emission phenomenon occurs or the field emission current 232 reaches the maximum design current value of the field emission electron source 113. The voltage should not exceed 50 volts per increase.
Claims (10)
1. A field emission microscope system for testing and calibrating an array of field emission electron sources, characterized by: the system comprises an image recording component, an optical path subsystem, a high-speed camera, a pulse high-voltage power supply, a high-speed current acquisition unit, a high-speed network, a synchronous controller, image processing software and a data memory; the light path subsystem comprises a main light source, an auxiliary light source, a glass vacuum cavity wall, a motor-driven lens and a semi-reflecting lens;
the main light source and the secondary light source jointly generate light source illumination through the semi-reflecting mirror plate and the motor driving mirror, and sufficient illumination is provided for images; illuminating the image recording member through the glass vacuum chamber wall by the light source; the field emission image generated on the image recording component enters the high-speed camera through the optical path subsystem; in the light path subsystem, the image sequentially passes through the glass vacuum cavity wall, the motor-driven lens and the semi-reflecting lens to generate an eyepiece image; generating a high frame rate image and a low frame rate image by a high-speed camera; the low frame rate image is used for controlling a motor to drive a lens to improve the definition of the image by soft generation of a focusing control signal through image processing; the synchronous controller generates a camera control signal, a current acquisition control signal and a power supply control signal to control the high-speed camera, the pulse high-voltage power supply and the high-speed current acquisition; a pulse high-voltage power supply applies high-voltage pulses between a field emission electron source and a transparent conductive layer in the image recording member and generates field emission current; high-speed current collection is carried out to digitize field emission current to generate current data; the high-frame rate image generated by the high-speed camera and the current data captured by the high-speed current acquisition are mixed through a high-speed network to generate mixed data, and the mixed data are transmitted to a data storage device for storage, and the stored mixed data are used for archiving and later analysis and research.
2. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the high-speed camera can generate image data of a plurality of gigabytes per second, and the common network and the hard disk cannot realize real-time storage of the data.
3. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the field emission electron source needs to work in a pulse working mode, the duty ratio cannot be high, and otherwise, the field emission electron source is overheated and burnt.
4. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the image processing software can screen and automatically focus image data, and low-frame-rate images enter the light-emitting point positioning and time stamping software through the image recognition software to generate light-emitting point positioning and time stamping data so as to directly position corresponding image frames and current data during later-period data analysis.
5. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 4, wherein: the image recognition software and the image definition analysis software generate corresponding focusing control signals according to the image definition to control the motor to drive the lens, so that the image definition is improved.
6. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the high-speed camera adopts 13600 frames per second; the image resolution is 512x512 pixels; the current acquisition speed is 300000 times of sampling per second, and the resolution is 14 bits; the high-speed network adopts a gigabit Ethernet switch and six types of network cables; the motor-driven lens adopts a microscope lens with 100 times magnification and is matched with 50% of half-reflecting lens; the pulse high-voltage power supply has positive and negative 5000-volt voltage, 80 milliampere current and 50 kilohertz bandwidth; image processing software was developed on high performance computers using the OpenCV computer vision library.
7. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the camera control signal, the power supply control signal and the current acquisition control signal generated by the synchronous controller adopt standard TTL level signals.
8. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the focusing control signal generated by the image processing software adopts a Pulse Width Modulation (PWM) signal to control a motor in the light path subsystem to drive the lens.
9. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: image recognition software, image definition analysis software and luminous point positioning and time stamping software are developed on a LINUX platform by using an OpenCV computer vision library by adopting a PYTHON language; and the lighting point positioning and time stamping software records the X, Y coordinates of the lighting point and the time of lighting at that point in the format of a text file with a time resolution of 0.1 seconds.
10. The field emission microscope system for testing and calibrating an array of field emission electron sources of claim 1, wherein: the field emission microscope system for testing and calibrating the field emission electron source array collects images and current data at the time of the pulse high-voltage power supply being switched on, and then transmits the data and the images by utilizing the time of the pulse high-voltage power supply being switched off; in order to keep the integrity of data, a synchronous controller firstly sends out a current acquisition starting signal, generates a high-speed camera starting signal after the current acquisition output is stable, and then generates a high-voltage power supply starting signal, and at the moment, the current and the image are recorded in the high-speed camera and the high-speed current acquisition; according to different system applications, the high-voltage power supply starting signal is started for a period of time ranging from microseconds to milliseconds; then the high-voltage power supply closing signal closes the high-voltage pulse; then sequentially sending a high-speed camera closing signal and a current collection finishing signal to stop the high-speed camera and the high-speed current collection; then, the synchronous controller sends out a high frame rate image transmission starting signal, the high-speed camera stores the high frame rate image into the data memory through the high-speed network, after the high frame rate image is transmitted, the synchronous controller sends out a high frame rate image transmission ending signal and a current data transmission starting signal, and after the current data is transmitted, the synchronous controller sends out a current data transmission ending signal; at the end of this one complete data acquisition cycle, the next pulse cycle is ready.
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