CN109000692A - A kind of automatic detection fiber grating inscription location means - Google Patents
A kind of automatic detection fiber grating inscription location means Download PDFInfo
- Publication number
- CN109000692A CN109000692A CN201810612855.8A CN201810612855A CN109000692A CN 109000692 A CN109000692 A CN 109000692A CN 201810612855 A CN201810612855 A CN 201810612855A CN 109000692 A CN109000692 A CN 109000692A
- Authority
- CN
- China
- Prior art keywords
- fiber
- optical fiber
- optical
- camera
- mask plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 title claims abstract description 65
- 238000001514 detection method Methods 0.000 title claims abstract description 35
- 239000013307 optical fiber Substances 0.000 claims abstract description 67
- 230000003287 optical effect Effects 0.000 claims abstract description 32
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 11
- 238000010191 image analysis Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000005070 sampling Methods 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 206010057855 Hypotelorism of orbit Diseases 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35316—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Bragg gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of automatic detection fiber gratings to inscribe location means, including optical fiber Written Device and optical detection apparatus；The optical fiber Written Device includes ultraviolet laser, reflecting mirror, cylindrical lens, phase mask plate, optical fiber stationary fixture, optical detection apparatus；The optical detection apparatus includes camera, camera lens, annular light source, camera controller, light source controller；The optical fiber Written Device and optical detection apparatus are fixed on shockproof optical platform.Beneficial effect using the above scheme is: inscribing location means using automatic detection fiber grating, image sampling is carried out to phase mask plate region by camera, the actual positional relationship of optical fiber and phase mask plate is obtained by real-time image analysis, and detect the coat removing situation of the optical fiber in phase mask plate region, guarantee the service life for guaranteeing phase mask plate in the case that grating inscribes success rate, detection process carries out image procossing by controller, and exports judging result.
Description
Technical field
Technical field is inscribed the present invention relates to fiber grating more particularly to a kind of automatic detection fiber grating inscribes position dress
It sets.
Background technique
Fiber-optic grating sensor has a wide range of applications in sensory field, and fiber grating has the feature of quick response, right
The temperature energy fast reaction of locating range, can be made into that response is fast, high sensitivity and the high characteristic of measurement accuracy；Optical fiber grating sensing
Device is made of quartz crystal, small in size, light-weight, and structure is simple, non-conductive, not perishable, non-conductive, not dry by electromagnetism
It disturbs.Itself does not also generate electromagnetic interference, can be widely applied to oil pipeline, high voltage transmission line and nuclear power station grade height electromagnetism,
Inflammable and explosive occasion is detected.
The main method for preparing fiber grating at present has phase mask plate hair, point-to-point writing method and interferometry.Wherein, phase
Mask plate method is formed diffraction fringe by mask plate, utilizes ± 1 grade using 248nm ultraviolet laser as light source, light beam is inscribed
Diffraction fringe side exposure optical fiber prepares optical grating construction.This method is lower to light source requirements, the week of the fiber grating actually prepared
Phase is solely dependent upon the period of phase mask plate lath line, reduces the difficulty of fiber grating preparation process.Based on ultraviolet laser
Phase mask plate method is presently the most the preparation method generallyd use, is the standard technology for preparing fiber grating, and this method makes
Fiber grating moves towards practical and industrialization.
When inscribing grating using phase mask plate, the spacing of optical fiber to be inscribed and phase mask plate has a certain distance to want
It asks, is then easy not inscribe apart from too long, hypotelorism is then easy to form mask plate to damage, and influences the use of phase mask plate
Service life, although the placement location that mechanical clamp limitation optical fiber can be used is put since the suitable distance range is smaller by fixture
Range error caused by setting is still larger, by being manually unable to judge accurately suitable distance.Simultaneously because the coating of optical fiber surface
Layer can burn volatilization under the irradiation of ultraviolet laser, pollute phase mask plate, misplace if optical fiber is placed, lead to unstripped coating
The optical fiber of layer is placed in mask plate region, it will badly damaged phase mask plate causes huge loss.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the invention proposes a kind of automatic detection fiber gratings to inscribe position dress
It sets, using machine vision, fiber grating detection device and laser feedback inscribe state, reach and inscribe the high mesh of consistency
, each inscription switch is devised as the case may be.
The technical scheme to solve the above technical problems is that a kind of automatic detection fiber grating inscribes position dress
It sets, including optical fiber Written Device and optical detection apparatus；
The optical fiber Written Device includes ultraviolet laser, reflecting mirror, cylindrical lens, phase mask plate, optical fiber fixing clamp
Tool, optical detection apparatus；
The optical detection apparatus includes camera, camera lens, annular light source, camera controller, light source controller；
The optical fiber Written Device and optical detection apparatus are fixed on shockproof optical platform；
The camera and annular light source are mounted on the front end of optical fiber stationary fixture, and the ultraviolet laser is originated as optical path
End, reflecting mirror, cylindrical lens, phase mask plate and fiber clamp are successively passed through in paths path.Ultraviolet laser emits light
Fine grating inscribes light source, and the rectangular laser hot spot projected by ultraviolet laser light-emitting window reflects to form 90 degree by the reflecting mirror
Deflection, light source reach cylindrical lens and compress to hot spot in vertical direction, and rectangle optical fiber is compressed into linear light on the vertical plane
The hot spot of spot, compression forms diffraction fringe by acting on after the phase mask plate on optical fiber, realize that fiber grating is inscribed；
The fiber clamp includes the first fiber clamp and the second fiber clamp, is divided into two parts, the first fiber clamp
The phase mask plate left and right sides is respectively arranged at the second fiber clamp；
The camera and light source are set to the front of the first fiber clamp and the second fiber clamp；
Before the optical fiber is arranged at intervals at phase mask plate, camera is fixed on front, annular light source on optical fiber and is located at camera
Between optical fiber, camera brightness use is acted on, the camera is located on the optical axis of the light source for the laser inscribed, camera and optical axis
It is installed at 60 degree of angles.
Further, the optical fiber is not provided with painting in the fixed fiber grating section of the first fiber clamp and the second fiber clamp
Coating, the optical fiber are provided with coat in non-fiber grating section.
Further, the annular light source setting is fixed on adjustable height stand bar.
Beneficial effect using the above scheme is: carrying out grating inscription to inscription to meet phase mask plate interference technique
The requirement of the distance of optical fiber and phase mask plate, the distance for solving optical fiber and mask plate are excessive or too small can all influence grating inscription
Effect, using automatic detection fiber grating inscribe location means, by camera to phase mask plate region carry out image sampling,
The actual positional relationship of optical fiber and phase mask plate is obtained by real-time image analysis, and is detected in phase mask plate region
Optical fiber coat remove situation, guarantee grating inscribe success rate in the case where guarantee phase mask plate service life, inspection
Survey process carries out image procossing by controller, and exports judging result.
Detailed description of the invention
Fig. 1 is optical fiber Written Device structural schematic diagram；
Fig. 2 is optical detection apparatus structural schematic diagram；
Fig. 3 is that automatic detection fiber grating inscribes position detection flow diagram.
Specific embodiment
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the invention.
As shown in Figure 1, Figure 2 and Figure 3, a kind of automatic detection fiber grating inscribes location means, including optical fiber Written Device
And optical detection apparatus；The optical fiber Written Device includes ultraviolet laser, reflecting mirror, cylindrical lens, phase mask plate, optical fiber
Stationary fixture, optical detection apparatus；The optical detection apparatus includes camera, camera lens, annular light source, camera controller, light source
Controller；The optical fiber Written Device and optical detection apparatus are fixed on shockproof optical platform；The camera and annular light source
It is mounted on the front end of optical fiber stationary fixture, the ultraviolet laser as optical path starting point, successively pass through instead by paths path
Penetrate mirror, cylindrical lens, phase mask plate and fiber clamp.Ultraviolet laser launching fiber grating inscribes light source, is swashed by ultraviolet
The rectangular laser hot spot that light device light-emitting window projects reflects to form 90 degree of deflections by the reflecting mirror, and light source reaches cylindrical lens to light
Spot is compressed in vertical direction, and rectangle optical fiber is compressed into linear light spot on the vertical plane, and the hot spot of compression passes through the phase
It is acted on after mask plate and forms diffraction fringe on optical fiber, realize that fiber grating is inscribed；The fiber clamp includes the first fibre clip
Tool and the second fiber clamp, are divided into two parts, the first fiber clamp and the second fiber clamp are respectively arranged at the phase and cover
Template left and right sides；The camera and light source are set to the front of the first fiber clamp and the second fiber clamp；Between the optical fiber
Before being set to phase mask plate, camera is fixed on front, annular light source on optical fiber and acts on phase between camera and optical fiber
Machine brightness uses, and the camera is located on the optical axis of the light source for the laser inscribed, and camera and optical axis are installed at 60 degree of angle.
Specifically, the relative position of real-time detection need to be inscribed optical fiber and phase mask plate guarantees optical fiber and phase mask
The distance of plate is suitable, while coat optical fiber being avoided to be in phase mask plate nucleus, to phase mask in scribing process
Plate damages.
Wherein, adjustment optical fiber Written Device is in normal equipment, adjusts the optical axis of camera to quasi-fiber, and with
Optical fiber inscribes the optical axis of system into 60 degree of angles, opens the illumination for being fixed on annular light source on adjustable height stand bar, guarantees
Brightness is suitable in the visual field of camera, and wherein annular light source is connected with light source controller, by light source controller automatically control brightness and
Color, camera are connected by transmission cable with camera controller, and the content of camera fields of view is shown by screen.
It needs detection system to be corrected before optical fiber detector work, and saves the standard drawing of the optical fiber of eligible placement
Example.Optical fiber is not provided with coat in the fixed fiber grating section of the first fiber clamp and the second fiber clamp, and optical fiber is in non-optical fiber
Grating section is provided with coat, and camera obtains the image information of optical fiber, calculates fiber grating Duan Bushe by image analysis algorithm
Have that the length of coat, optical fiber are placed in the relative position of phase mask plate, fiber grating section is not provided with the clean of coat
Situation.And relevant data are saved and are used as reference standard.And start autotest operation.
When optical fiber Written Device works, after placing optical fiber, camera will focus fine progress image acquisition automatically, and mark with reference
Quasi- parameter is contrasted, and when optical fiber satisfaction placement requires, camera controller will control ultraviolet laser output laser progress grating
It inscribes, detection by then prompting error reporting, need to not reappose optical fiber.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (3)
1. a kind of automatic detection fiber grating inscribes location means, it is characterised in that: including optical fiber Written Device and optical detection
Device；
The optical fiber Written Device includes ultraviolet laser, reflecting mirror, cylindrical lens, phase mask plate, optical fiber stationary fixture, light
Learn detection device；
The optical detection apparatus includes camera, camera lens, annular light source, camera controller, light source controller；
The optical fiber Written Device and optical detection apparatus are fixed on shockproof optical platform；
The camera and annular light source are mounted on the front end of optical fiber stationary fixture, the ultraviolet laser as optical path starting point,
Reflecting mirror, cylindrical lens, phase mask plate and fiber clamp are successively passed through in paths path.Ultraviolet laser launching fiber light
Grid inscribe light source, the rectangular laser hot spot projected by ultraviolet laser light-emitting window by the reflecting mirror reflect to form 90 degree it is inclined
Turning, light source reaches cylindrical lens and compresses to hot spot in vertical direction, and rectangle optical fiber is compressed into linear light spot on the vertical plane,
The hot spot of compression forms diffraction fringe by acting on after the phase mask plate on optical fiber, realize that fiber grating is inscribed；
The fiber clamp includes the first fiber clamp and the second fiber clamp, is divided into two parts, the first fiber clamp and the
Two fiber clamps are respectively arranged at the phase mask plate left and right sides；
The camera and light source are set to the front of the first fiber clamp and the second fiber clamp；
Before the optical fiber is arranged at intervals at phase mask plate, camera is fixed on front, annular light source on optical fiber and is located at camera and light
Between fibre, camera brightness use is acted on, the camera is located on the optical axis of the light source for the laser inscribed, and camera and optical axis are at 60
The angle of degree is installed.
2. a kind of automatic detection fiber grating according to claim 1 inscribes location means, it is characterised in that: the optical fiber
It is not provided with coat in the fixed fiber grating section of the first fiber clamp and the second fiber clamp, the optical fiber is in non-fiber grating
Section is provided with coat.
3. a kind of automatic detection fiber grating according to claim 1 inscribes location means, it is characterised in that: the annular
Light source setting is fixed on adjustable height stand bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810612855.8A CN109000692A (en) | 2018-06-14 | 2018-06-14 | A kind of automatic detection fiber grating inscription location means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810612855.8A CN109000692A (en) | 2018-06-14 | 2018-06-14 | A kind of automatic detection fiber grating inscription location means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109000692A true CN109000692A (en) | 2018-12-14 |
Family
ID=64600712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810612855.8A Pending CN109000692A (en) | 2018-06-14 | 2018-06-14 | A kind of automatic detection fiber grating inscription location means |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109000692A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10795168B2 (en) | 2017-08-31 | 2020-10-06 | Metalenz, Inc. | Transmissive metasurface lens integration |
| CN114185129A (en) * | 2022-02-15 | 2022-03-15 | 深圳奥斯诺导航科技有限公司 | Method for writing inclined grating polarization filter |
| CN114236677A (en) * | 2021-12-31 | 2022-03-25 | 武汉锐科光纤激光技术股份有限公司 | Optical fiber inscribing machine |
| CN114325929A (en) * | 2021-12-31 | 2022-04-12 | 武汉锐科光纤激光技术股份有限公司 | Optical path system for optical fiber writing and optical fiber writing machine |
| US11906698B2 (en) | 2017-05-24 | 2024-02-20 | The Trustees Of Columbia University In The City Of New York | Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
-
2018
- 2018-06-14 CN CN201810612855.8A patent/CN109000692A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11906698B2 (en) | 2017-05-24 | 2024-02-20 | The Trustees Of Columbia University In The City Of New York | Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces |
| US10795168B2 (en) | 2017-08-31 | 2020-10-06 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11579456B2 (en) | 2017-08-31 | 2023-02-14 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| CN114236677A (en) * | 2021-12-31 | 2022-03-25 | 武汉锐科光纤激光技术股份有限公司 | Optical fiber inscribing machine |
| CN114325929A (en) * | 2021-12-31 | 2022-04-12 | 武汉锐科光纤激光技术股份有限公司 | Optical path system for optical fiber writing and optical fiber writing machine |
| CN114325929B (en) * | 2021-12-31 | 2024-04-19 | 武汉锐科光纤激光技术股份有限公司 | Optical path system for optical fiber writing and optical fiber writing machine |
| CN114185129A (en) * | 2022-02-15 | 2022-03-15 | 深圳奥斯诺导航科技有限公司 | Method for writing inclined grating polarization filter |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109000692A (en) | A kind of automatic detection fiber grating inscription location means | |
| EP3445604B1 (en) | Optical system for measuring contact strength between pantograph and overhead line | |
| CN101107558B (en) | Tracking auto focus system | |
| US10794834B2 (en) | Real-time inspection of automated ribbon placement | |
| CN103744271B (en) | A kind of laser direct writing system and photoetching method | |
| CN103913294B (en) | A kind of cross curve increment scaling method for laser galvanometer system | |
| CN106443872B (en) | One kind inscribing any grid region length of fibre grating approach based on adjustable diaphragm | |
| CN103438821B (en) | A kind of honeycomb ceramic support transmittance detection device and method | |
| CN108663746A (en) | A kind of continuous Written Device of fiber grating and method of difference centre wavelength | |
| CN208269936U (en) | A kind of automatic detection fiber grating inscription location means | |
| CN205352314U (en) | Novel laser range finder detects device | |
| CN104776804B (en) | The optical camera Method of Adjustment and device measured based on contactless slight distance | |
| CN203760048U (en) | OLED panel display defect restoring system | |
| CN208705516U (en) | One kind having feedback control optical fiber Written Device | |
| CN110672426A (en) | Cross double-pull characterization heating test platform and method | |
| CN207570496U (en) | A kind of laser beam welding two dimension deformation measuring device of wind-powered electricity generation sheet of material | |
| CN212111176U (en) | Device for visually detecting and marking defects of cement bricks | |
| CN107860328A (en) | The laser beam welding two dimension deformation measuring device and measuring method of a kind of wind-powered electricity generation sheet of material | |
| JP4177565B2 (en) | Method for adjusting calibration roll for scissors inspection apparatus and scissors inspection apparatus | |
| JP2016148596A (en) | Linear array camera calibration method for surface inspection device | |
| CN208283593U (en) | A kind of continuous Written Device of fiber grating of difference central wavelength | |
| RU2789204C1 (en) | Device and method for detecting optical defects in structural optics parts | |
| CN111174732A (en) | Method and device for detecting perpendicularity of optical axis of industrial measurement camera | |
| TWI694243B (en) | Wire grid splicing calibration device and method | |
| CN109327697B (en) | Focal plane debugging equipment and method for line imaging position marker |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |