CN108987298B - 旋转涂胶装置和方法 - Google Patents
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Abstract
本发明提供一种旋转涂胶装置和方法,旋转涂胶装置包括一自身可旋转的转轴和一固定在所述转轴端部的吸盘,吸盘下方设置有电磁感应装置,这样吸盘在旋转时若由于离心力导致吸盘上受力不均匀时,吸盘的盘面与水平面相交时,吸盘与下方电磁感应装置发生变化,则电磁感应装置的电磁力发生变化,对吸盘不同部分排斥力和吸引力也发生变化,从而对不平衡的离心力造成了力学补偿,维持了吸盘的平衡。本发明提供的旋转涂胶装置和方法,仅需设置电磁感应装置,无需人力对其进行操控,该装置和方法会自动调控排斥力和吸引力,因此具有使吸盘更加平稳、减少振动对设备损伤、提高旋涂光刻胶效果的同时且省时省力的优点。
Description
技术领域
本发明涉及半导体光刻机领域,特别涉及一种旋转涂胶装置和方法。
背景技术
目前在芯片制造业,包括LED芯片领域普遍采用高速旋转涂胶方式在样品表面涂敷一层光刻胶,然后利用光刻和显影技术形成特定的微小图形,用于后续加工工艺的保护层。
芯片及LED芯片制造,在直径小于200mm的样品中普遍采用“Flat”形式用于对准。“Flat”形式是指圆形物料沿着小于直径的弦切削下一小块,在切口处形成一个平边。物料的几何中心和重心分离。
涂胶显影工艺需要以几何中心为旋转中心进行高速旋转,由于重心的偏移,导致以几何中心为旋转中心的物料在不同方向上产生不同的离心力。不平衡的离心力将传递到提供转动的***上,一般是电机的轴。不平衡的离心力将引起旋转***不稳定,引起振动。涂胶过程中,振动对涂敷的膜厚有负面影响,尤其当基片的质量较大,特别是6寸蓝宝石片,蓝宝石重心偏移过大,所以在旋转时会产生强烈的振动,可能会导致物料破碎或者旋转***损坏。
发明内容
为解决上述问题,本发明提出了一种旋转涂胶装置和方法,在装置中设置电磁感应装置,对倾斜的吸盘产生可变化的电磁力,使其维持平衡。
为达到上述目的,本发明提供一种旋转涂胶装置,包括一自身可旋转的转轴和一固定在所述转轴端部的吸盘,所述转轴旋转时带动所述吸盘转动,所述吸盘下方设置有跟随所述吸盘转动的电磁感应装置,使得所述吸盘在旋转时产生的离心力与所述电磁感应装置产生的磁力产生力学平衡。
作为优选,所述电磁感应装置包括一固定在所述吸盘底面的环形磁铁、一固定在转轴处的条形磁铁和位于所述环形磁铁和所述条形磁铁之间的线圈组。
作为优选,所述线圈组设置有至少两组,所有的线圈组围绕所述转轴均匀分布。
作为优选,所述线圈组从上至下包括与所述环形磁铁产生电磁感应的第一线圈和与所述条形磁铁产生电磁感应的第二线圈,第一线圈与所述第二线圈之间通过电线电性连接。
作为优选,所述基底上具有切口,所述切口处对应的第一线圈和对应的环形磁铁极性相反,所述切口对应的第二线圈与所述条形磁铁上与该第二线圈对应的端部极性相反。
作为优选,所述线圈组固定在支架上。
作为优选,所述线圈组设置有八组,所有的线圈组围绕所述转轴均匀分布。
本发明还提供一种使用如上所述的旋转涂胶装置的旋转涂胶方法,提供一待涂胶的基底放置在所述吸盘上,当转轴带动所述吸盘旋转时,若离心力使得吸盘上的点高度不相同时,所述电磁感应装置与吸盘上高度较低的部分产生斥力,与吸盘上高度较高的部分产生引力。
与现有技术相比,本发明的有益效果是:本发明提供一种旋转涂胶装置和方法,旋转涂胶装置包括一自身可旋转的转轴和一固定在所述转轴端部的吸盘,吸盘下方设置有电磁感应装置,这样吸盘在旋转时若由于离心力导致吸盘上受力不均匀时,吸盘的盘面与水平面相交时,吸盘与下方电磁感应装置发生变化,则电磁感应装置的电磁力发生变化,对吸盘不同部分排斥力和吸引力也发生变化,从而对不平衡的离心力造成了力学补偿,维持了吸盘的平衡。本发明提供的旋转涂胶装置和方法,仅需设置电磁感应装置,无需人力对其进行操控,该装置和方法会自动调控排斥力和吸引力,因此具有使吸盘更加平稳、减少振动对设备损伤、提高旋涂光刻胶效果的同时且省时省力的优点。
附图说明
图1为本发明提供的旋转涂胶装置结构示意图;
图2为图1的俯视图;
图3为本发明提供的线圈组的结构示意图。
图中:1-基底,2-吸盘,3-转轴,4-环形磁铁,5-第一线圈,6-第二线圈,7-条形磁铁。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。
请参照图1,本发明提供一种旋转涂胶装置,包括一自身可旋转的转轴3和一固定在所述转轴3端部的吸盘2,转轴3一般与电机等驱动装置连接,驱动装置驱动转轴3围绕自身的轴旋转,转轴3旋转时带动吸盘2旋转。
吸盘2上放置有基底1,若该基底1的重心与圆心并不重合,例如为用于制作LED的蓝宝石片,一般为平片缺口设计,但安装至吸盘2时,需将基底1的圆心与吸盘2的圆心重合放置,这样该基底1放置在吸盘2上旋转时,吸盘2与基底1共同的重心则偏离转轴3的轴心,那么旋转时必然产生不平衡的离心力,吸盘2上重量大的一处产生较强的离心力,重量小的一处产生较弱的离心力,使得吸盘2产生晃动,重量大的一处向下沉,重量小的一处往上翘曲。
在本发明提供的旋转装置中,设置了电磁感应装置,分别包括一个或多个磁生电装置和一个或多个电生磁装置,所述磁生电装置利用磁铁与线圈相对运动产生电动势,所述电生磁装置通过电流后产生相应磁场;
该电磁感应装置从上至下具体为:
固定在吸盘2下方的环形磁铁4,环形磁铁4沿吸盘2圆周方向分布;
线圈组,从上至下分别为第一线圈5和与第一线圈5电性连接的第二线圈6;
固定在转轴3处的条形磁铁7,该条形磁铁7可固定在转轴3的圆周面,或者可横向贯穿转轴3。
其中由上述条形磁铁7与第二线圈6构成磁生电装置,由环形磁铁4与第一线圈5构成电生磁装置。
请参照图2,在上述电磁感应装置中,可设置多组线圈组,并且围绕转轴3均匀分布。
在吸盘2上重力小的一处,也即切口对应之处,环形磁铁4的极性与该处下方第一线圈5的极性相反,该第一线圈5对应的第二线圈6与其所在的条形磁铁7的端部的极性也相反。
在吸盘2上重力大的一处,环形磁铁4的极性与该处下方第一线圈5的极性相同,该第一线圈5对应的第二线圈6与其所在的条形磁铁7的端部的极性也相同。
上述线圈组中线圈的极性可通过线圈绕组的方向来设置,线圈组可固定在四周支架上,与转轴3和吸盘2并不发生物理接触。
本发明还提供一种使用上述旋转涂胶装置的旋转涂胶方法,具体为
在吸盘2上放置具有切口的待涂胶的基底1,该基底1具有切口(未图示),在转轴3带动吸盘2旋转时,吸盘2上重力大之处高度下降,使得此处与对应的第一线圈5的距离减小,而随着吸盘2的上述形变,转轴3必然也发生形变,使得转轴3向吸盘2上重力大之处倾斜,那么该处条形磁铁7与第二线圈6之间的距离减小,此时第二线圈6的电动势增大,则内部电流增大,而该处第一线圈5和第二线圈6电性连接,则第一线圈5的电流也增大,第一线圈5与该处环形磁铁4之间的磁场也增大,导致第一线圈5与该处环形磁铁4之间的磁力增大,由于第一线圈5和此处的环形磁铁4极性相同,则第一线圈5对此处环形磁铁4的排斥力增大,对吸盘2此处产生向上托举的力。
相应地,在吸盘2上重力小之处,则此处的第一线圈5和其对应的环形磁铁4之间极性相反,则产生相互吸引的磁力,若该处吸盘2向上翘起,则吸引力会将该处吸盘2向下吸附。
综上所示,本发明提供的电磁感应装置在吸盘2上重力大之处产生向上托举的力,在重力小之处产生向下吸附的力,使得吸盘2在旋转过程中,保持力学平衡,减少了吸盘2振动的可能性,更加降低了吸盘2的振动对设备造成的损伤风险。
请参照图3,由于线圈的感性阻抗,磁场会发生一个时间延误,可以减小第二线圈6与第一线圈5的距离或减小第二线圈6与条形磁铁7的距离,消除迟滞效应。
本发明提供一种旋转涂胶装置和方法,旋转涂胶装置包括一自身可旋转的转轴3和一固定在所述转轴3端部的吸盘2,吸盘2下方设置有电磁感应装置,这样吸盘2在旋转时若由于离心力导致吸盘2上受力不均匀,导致吸盘2的盘面与水平面相交时,吸盘2与下方电磁感应装置发生变化,则电磁感应装置的电磁力发生变化,对吸盘2不同部分排斥力和吸引力也发生变化,从而对不平衡的离心力实现了力学补偿,维持了吸盘2的平衡。本发明提供的旋转涂胶装置和方法,仅需设置电磁感应装置,无需人力对其进行操控,该装置和方法会自动调控排斥力和吸引力,因此具有使吸盘2更加平稳、减少振动对设备损伤、提高旋涂光刻胶效果的同时且省时省力的优点。
本发明对上述实施例进行了描述,但本发明不仅限于上述实施例。显然本领域的技术人员可以对发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包括这些改动和变型在内。
Claims (7)
1.一种旋转涂胶装置,包括一自身可旋转的转轴和一固定在所述转轴端部的吸盘,所述转轴旋转时带动所述吸盘转动,其特征在于,所述吸盘下方设有电磁感应装置,使得所述吸盘在旋转时产生的离心力与所述电磁感应装置产生的磁力产生力学平衡;
所述电磁感应装置包括一个或多个电生磁装置和一个或多个磁生电装置,所述电生磁装置由一固定在所述吸盘底面的环形磁铁与一线圈组组成,和/或所述磁生电装置由一固定在所述固定在转轴处的条形磁铁与一线圈组组成。
2.如权利要求1所述的旋转涂胶装置,其特征在于,所述线圈组设置有至少两组,所有的线圈组围绕所述转轴均匀分布。
3.如权利要求1所述的旋转涂胶装置,其特征在于,所述线圈组包括与所述环形磁铁产生电磁感应的第一线圈和与所述条形磁铁产生电磁感应的第二线圈,第一线圈与所述第二线圈之间通过电线电性连接。
4.如权利要求1所述的旋转涂胶装置,其特征在于,吸盘上放置待涂胶的基底,所述基底上具有切口,所述切口处对应的第一线圈和对应的环形磁铁极性相反,所述切口对应的第二线圈与所述条形磁铁上与该第二线圈对应的端部极性相反。
5.如权利要求1所述的旋转涂胶装置,其特征在于,所述线圈组固定在支架上。
6.如权利要求1所述的旋转涂胶装置,其特征在于,所述线圈组设置有八组,八组线圈组围绕所述转轴均匀分布。
7.一种使用如权利要求1~6中任意一项所述的旋转涂胶装置的旋转涂胶方法,其特征在于,提供一待涂胶的基底放置在所述吸盘上,当转轴带动所述吸盘旋转时,若离心力使得吸盘上的点高度不相同时,所述电磁感应装置与吸盘上高度较低的部分产生斥力,与吸盘上高度较高的部分产生引力。
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