CN108957781A - Optical lens adjustment and detection system and method - Google Patents
Optical lens adjustment and detection system and method Download PDFInfo
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- CN108957781A CN108957781A CN201810811031.3A CN201810811031A CN108957781A CN 108957781 A CN108957781 A CN 108957781A CN 201810811031 A CN201810811031 A CN 201810811031A CN 108957781 A CN108957781 A CN 108957781A
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
A kind of optical lens adjustment and detection system, including resetting equipment and image quality detection device；Resetting equipment includes eccentric difference measuring device and mirror surface gap measuring device, image quality detection device include wave front aberration detection device；Eccentric difference measuring device includes optical measuring head, air-float turntable and column guide rail, optical measuring head includes lighting module, projection module, micro- second level amplification module and the first detector, optical measuring head is slidably connected with column guide rail, optical measuring head can be moved up and down along column guide rail, and air-float turntable is for fixing camera lens to be measured.Above-mentioned optical lens adjustment and detection system, it not only can detecte the thickness of the centering error of eyeglass to be measured and the spacing of eyeglass to be measured and eyeglass to be measured, the wave front aberration of entire camera lens to be measured can also be detected, assess the image quality of entire camera lens to be measured, and the micro- second level amplification module of optical measuring head is used to that secondary amplification will to be carried out through the imaging of projection module, to improve the detection accuracy of optical lens adjustment and detection system.
Description
Technical field
The present invention relates to optics integration techno logy field more particularly to a kind of optical lens adjustment and detection systems and method.
Background technique
As photoelectric technology develops rapidly, large quantities of high-end camera lenses appear in the every field such as scientific research, life, e.g., Mobile phone mirror
Head, endoscope, high-end microcobjective, monitoring oscilloscop etc..The production and processing of these camera lenses and optics adjustment are closely related.Strict control
The bias and the spacing of mirror surface of eyeglass, and the image quality for quantifying camera lens becomes the key of optical lens adjustment.
Eccentricity of glasses lens difference measurements are exactly to measure to the inclination of eyeglass with radial deflection using relevant measurement method.Mirror
Interplanar distance measurement is exactly to measure using relevant measurement method to optical material (eyeglass) thickness and its airspace.Mirror
Piece bias and distance measurement provide for the build-up tolerance of camera lens accurately assesses data, and indicates that optics assembles improved direction.
Finally camera lens adjustment is made to reach design tolerance requirement, obtains good optical property.Wave aberration detection is passed using interference, wavefront
The technologies such as sensor carry out a kind of detection means of quantitative evaluation to lens imaging quality.Image quality inspection is introduced in camera lens assembly system
Module is surveyed, realizes dress, inspection one.While quantifying tolerance, the assessment of camera lens image quality detection is provided.
However, traditional dress check system by linear guide and optical grating ruler measurement precision due to being limited, measurement accuracy is not
It is high.
Summary of the invention
In consideration of it, it is necessary to provide a kind of higher optical lens adjustment of measurement accuracy and detection systems and method.
A kind of optical lens adjustment and detection system, including resetting equipment and image quality detection device；
The resetting equipment includes eccentric difference measuring device and mirror surface gap measuring device, the image quality detection device include
Wave front aberration detection device；
The bias difference measuring device includes optical measuring head, air-float turntable and column guide rail, the optical measuring head
Including lighting module, projection module, micro- second level amplification module and the first detector, the optical measuring head and the column guide
Rail is slidably connected, and the optical measuring head can be moved up and down along the column guide rail, and the air-float turntable is for fixing mirror to be measured
Head.
In one embodiment, the air-float turntable includes air-bearing and four-dimensional adjusting bracket, and the four-dimension adjusting bracket is used
In the fixation camera lens to be measured, and adjust the mechanical axis of the camera lens to be measured.
In one embodiment, the asynchronous bounce axially and radially of the air-float turntable is less than 20nm, and the air bearing turns
The synchronous bounce axially and radially of platform is less than 70nm.
In one embodiment, the rotation coding positioning accuracy of the air-float turntable is 1 ".
In one embodiment, the projection module includes collimator objective and switching object lens, and the collimator objective is to target
The light that center issues is collimated；The switching object lens include the object lens for switching turntable and multiple groups different focal length, the multiple groups object
Mirror is set on the switching turntable, and object lens described in each group are switched over by the switching turntable, to meet different curvature
Target pattern is projected to the center of curvature of camera lens to be measured as plane by the measurement of the camera lens to be measured, the object lens.
In one embodiment, the mirror surface gap measuring device includes optical interference circuit system and focusing lens；
The optical interference circuit system includes long coherence scale light path module and short coherent measurement light path module；
The long coherence scale light path module includes long coherence light source, the first coupler, reference arm, scale delay arm and
Two detectors are provided with optical fiber retroeflector in the reference arm, are provided with movable mirror in the scale delay arm,
The light of the long coherence light source outgoing is divided into two-way by first coupler, enters the reference arm, another way all the way
Into the scale delay arm, final two-way light is reflected back the first coupler and forms interference, is received by second detector；
The short coherent measurement light path module includes short-coherence light source, the second coupler, first annular device, the second annular
Device, measurement arm, third coupler and balanced detector, the light of the short-coherence light source outgoing is by second coupler point
For two-way, enter the scale delay arm through the first annular device all the way, another way is through described in second circulator entrance
Measure arm, the reflected light of the reflected light of the scale delay arm and the measurement arm is respectively through the first annular device and described the
The port of second ring device, which is emitted at the third coupler, forms interference signal, is received by the balanced detector；
The long coherence scale light path module and short coherent measurement light path module common shelving have the movable mirror
The scale delay arm, and coupling is carried out by the first wavelength division multiplexer and is connected with beam splitting.
In one embodiment, the axial scan system of the scale delay arm includes collimator objective, corner cube reflector, puts down
Face reflecting mirror and linear guide；
The collimator objective and the plane mirror are fixed on one end of the linear guide；
The corner cube reflector is solid on the sliding block of the linear guide, and the corner cube reflector makes reflected light with incident light
Identical angle outgoing；
Fiber exit light is incident on the corner cube reflector after being collimated by the collimator objective, and last emergent light impinges upon institute
It states on plane mirror, and by backtracking after plane mirror reflection.
In one embodiment, the wave front aberration detection device includes collimator and extender mirror, beam splitter, expands component, mark
Quasi-reflection mirror and Wavefront sensor；
Optical fiber head emergent light is reflected by the beam splitter after the collimator and extender mirror and expands component, after expanding
Collimated light beam exposes to standard reflection mirror in confocal mode, is returned by the light beam original road that standard reflection mirror reflects through tested camera lens
It is moved back into the Wavefront sensor.
A kind of optical lens adjustment and detection method, comprising the following steps:
S10, lens data to be measured is imported, and determines the position of each face image of spherical center, and initialization dead-center position；
S20, loading machine lens barrel, and the mechanical axis of the lens barrel and the shaft weight of air-float turntable are adjusted using amesdial
It closes；
S30, the eyeglass of camera lens to be measured described in eccentric difference measuring device and the adjustment of mirror surface gap measuring device is utilized；
S40, it is switched to Wave-front measurement mode, the measurement of wave front aberration is carried out using wave front aberration detection device；
S50, judge whether image quality reaches requirement；
S60, if so, terminate adjustment；
S70, if it is not, switch back into adjustment mode, detect the bias and spacing of the camera lens to be measured, analyze measured data, and
It is introduced into optical design software and optimizes redesign；
S80, the parameter using redesign, repeat step S30 to S50, until image quality is met the requirements.
In one embodiment, using the method for the eyeglass of camera lens to be measured described in mirror surface gap measuring device adjustment include with
Lower step:
The coherent signal envelope of short Coherent optical path signal is solved using the algorithm of solution envelope, then is searched out by peak-seeking algorithm
The signal point position of each mirror surface；
The signaling point that corresponding long coherence scale optical delay circuit is found by signal point position, using phase shift algorithm,
Find out the phase of each point；
Calculate the phase difference between each mirror surface between the number a and each face of interference signal in the periodThis makes it possible to obtain each mirror surfaces
Between optical path difference are as follows:Wherein λ is long coherence optical wavelength；
Thickness between each mirror surface are as follows: d=OLD/n, n are the refractive index of medium between each face where short coherent light.
Above-mentioned optical lens adjustment and detection system, by be arranged eccentric difference measuring device, mirror surface gap measuring device and
Wave front aberration detection device not only can detecte the thickness of the centering error of eyeglass to be measured and the spacing of eyeglass to be measured and eyeglass to be measured
Degree can also detect the wave front aberration of entire camera lens to be measured, assess the image quality of entire camera lens to be measured, and optical measuring head includes throwing
Shadow module and micro- second level amplification module, micro- second level amplification module are used to the imaging through projection module carrying out secondary put
Greatly, to improve the detection accuracy of optical lens adjustment and detection system.
Detailed description of the invention
Fig. 1 is the optical lens adjustment of an embodiment and the optical element structure schematic diagram of detection system；
Fig. 2 is the switching-over light path figure of optical lens adjustment and detection system；
Fig. 3 is the structural schematic diagram of optical lens adjustment and detection system；
Fig. 4 is the switching turntable that centering error measures pickup lens and wave-front optical aberration measurement reference mirror；
Fig. 5 is the schematic illustration of eccentric difference measuring device；
Fig. 6 is the principle index path of mirror surface gap measuring device；
Fig. 7 is that the short relevant and long coherence of mirror surface distance measurement system acquires signal graph；
Fig. 8 is the light path design figure of scale delay arm in mirror surface gap measuring device；
Fig. 9 a is the structural schematic diagram of centering error measurement module；
Fig. 9 b is the schematic diagram that double lens gluing is completed using centering error measurement module；
Figure 10 is the optical lens adjustment and detection method flow chart of an embodiment.
Specific embodiment
In order to be more clear the objectives, technical solutions, and advantages of the present invention, with reference to the accompanying drawings and embodiments, to this hair
It is bright to be further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
As shown in Figure 1, the optical lens adjustment of an embodiment and detection system, including resetting equipment and image quality detection are set
It is standby.Resetting equipment includes eccentric difference measuring device 100 and mirror surface gap measuring device 200, image quality detection device include wavefront picture
Poor detection device 300.
The eccentric difference measuring device 100 of optical lens adjustment and detection system, mirror surface gap measuring device 200 and wavefront picture
Poor 300 three of detection device is mutually indepedent, by user demand selectively assembling and can use.
Fig. 2 and Fig. 3 are please referred to, eccentric difference measuring device 100 includes optical measuring head 605, air-float turntable 610 and column
Guide rail 604.Optical measuring head 605 includes that lighting module 3, projection module 5, micro- second level amplification module 2 and the first photoelectricity are visited
Survey device 1.Optical measuring head 605 is slidably connected with column guide rail 604, optical measuring head 605 along column guide rail 604 can on move down
It is dynamic, facilitate optical measuring head 605 to move up and down searching image of spherical center.Air-float turntable 14 is for fixing camera lens to be measured.
Above-mentioned optical lens adjustment and detection system, by the way that eccentric difference measuring device 100, mirror surface gap measuring device is arranged
200 and wave front aberration detection device 300, it not only can detecte the centering error of eyeglass to be measured and the spacing of eyeglass to be measured and mirror to be measured
The thickness of piece can also detect the wave front aberration of entire camera lens to be measured, assess the image quality of entire camera lens to be measured, and optical measuring head
605 include projection module and micro- second level amplification module 2, and micro- second level amplification module 2 is used for will be through the imaging of projection module 5
Secondary amplification is carried out, to improve the detection accuracy of optical lens adjustment and detection system.
Fig. 2 is eccentric difference measuring device 100, the mirror surface gap measuring device of above-mentioned optical lens adjustment and detection system
200 with the switching-over light path of wave front aberration detection device 300.Wherein the left side is resetting equipment, including upper end bias difference measuring device
100, the focusing lens 316 with the mirror surface gap measuring device 200 of lower end.The right is wave front aberration detection device 300.It completes
After camera lens adjustment, standard reflection mirror 14 (reference mirror) is switched in optical path by rotation switching turntable (as shown in Figure 4), is entered
To wave-front optical aberration measurement mode.Standard reflection mirror 14 is reference mirror.
In one embodiment, air-float turntable 14 includes air-bearing and four-dimensional adjusting bracket, and four-dimensional adjusting bracket is for fixing
Camera lens to be measured, and adjust the mechanical axis of camera lens to be measured.
In one embodiment, the asynchronous bounce axially and radially of air-float turntable 14 is less than 20nm, air-float turntable 14
Synchronous bounce axially and radially is less than 70nm.The rotation coding positioning accuracy of air-float turntable 14 is 1 ".It is arranged by this kind, it is eccentric
The misalignment measurement precision of difference measuring device can reach 0.1 μm.
In one embodiment, the repetitive positioning accuracy of column guide rail 604 has higher requirements, and surveys automatically to meet more mirror surfaces
Amount, repetitive positioning accuracy reach 1 μm.
In one embodiment, lighting module 3 is cold light source or LED illumination target.There are two types of target patterns, first is that cross
Cross hair, second is that the rectangular array of different space frequency distribution.
In one embodiment, projection module 5 includes collimator objective and switching object lens.Collimator objective issues target center
Light collimated.Switch object lens, target pattern is projected into the center of curvature of camera lens to be measured as plane.It includes more for switching object lens
The object lens of group different focal length, to meet the measurement of the camera lens to be measured of different curvature, each group object lens are switched over by switching turntable.
The focal length of objective lens has :+20 ,+50 ,+100 ,+150 ,+200 ,+400 ,+800 ,+1200 ,+1600 ,+2000, -2000, -
1600, -1200, -800, -400, -200 etc., for selection by the user.
Specifically, the structure of switching turntable is as shown in figure 4, just different tested camera lenses, selection are suitable in practical applications
More eyeglass detections are completed in object lens combination.
In one embodiment, micro- second level amplification module 2 includes microcobjective and cylinder mirror.
The misalignment measurement module software of eccentric difference measuring device can calculate the centre of sphere image position in each face of eyeglass automatically, so-called
Centre of sphere image position is the centre of sphere of each mirror surface of tested camera lens by the position where all optical mirror slips imaging more than face.
Misalignment measurement module software can each face of automatic arranging eccentric difference data, and calculate each eyeglass relative to air bearing
The eccentricity of the shaft of turntable 14.When the optical axis of filled camera lens is not overlapped with the shaft of air-float turntable 14, it can also be fitted appearance
The optimal optical axis of head.
In actual measurement, need to be manually entered or by optical lens file import the radius of curvature of eyeglass, thickness,
Away from and glass material parameter.So that misalignment measurement module software generates image of spherical center position data, each mirror face eccentric is and guided
The measurement of difference and the fitting of optimal optical axis.
Specifically, referring to FIG. 2, eccentric difference measuring device 100, including light source 3011, condenser 3012, target 3013,
Beam splitter 4, projection module 5, air-float turntable 14, micro- second level amplification module 2 and the first detector 1.Mirror 6 to be measured turns set on air bearing
On platform 14.First detector 1 is CCD camera.
Light source 3011, condenser 3012, target 3013 and beam splitter 4 are linearly set gradually, light source 3011, condenser
3012 and target 3013 be located on the straight line where the input path of beam splitter 4.
Projection module 5, beam splitter 4, micro- second level amplification module 2 and detector 1 are linearly set gradually, projection module 5,
Micro- second level amplification module 2 and the first detector 1 are located on the straight line where the reflected light path of beam splitter 4.
The light that light source 3011 issues is radiated on target 3013 after condenser 3012, and the pattern of target 3013 is by beam splitter
After 4 reflections, it is imaged on after projection module 5 on the center of curvature face of mirror to be measured, center of curvature picture is reflected by mirror to be measured, through projecting
Module 5 is imaged on the top of beam splitter 4, and center of curvature picture is imaged on the first detector 1 through micro- second level amplification module 2.
The principle of the reflective auto-collimation misalignment measurement of eccentric difference measuring device 100 as shown in figure 5, please also refer to Fig. 2,
6 eccentricity of measured lens that radius of curvature is R is d, and when air-float turntable 7 rotates, the centre of sphere is that d draws circle with radius.Projection module 5 enters
The light beam penetrated is reflected imaging and will be drawn with radius 2d=D by measured lens 6 to be justified.Center of curvature picture is finally imaged through optical measuring head
It is that radius draws circle on the first detector 1, and with D '.β=D'/D is the enlargement ratio of whole system.
It please also refer to Fig. 1 and Fig. 2, in one embodiment, mirror surface gap measuring device 200 includes optical interference circuit system
System and focusing lens 316.It please also refer to Fig. 3, optical interference circuit system is set in optic fibre light path case 601.Focusing lens 316 and wave
Preceding aberration detecting 300 is integrated in raising middle flask 611.Optical lens adjustment and detection system 100 further include control cabinet 608.
Referring to FIG. 6, optical interference circuit system includes long coherence scale light path module and short coherent measurement light path module.
Long coherence scale light path module include long coherence light source 301, the first coupler 304, reference arm, scale delay arm and
Second detector 302 is provided with optical fiber retroeflector 309 in reference arm, is provided with movable mirror in scale delay arm,
The light that long coherence light source 301 is emitted divides by the first coupler 304 for two-way, enters reference arm all the way, and another way enters mark
Ruler delay arm, final two-way light are reflected back the first coupler 304 and form interference, received by the second detector 302.Its result is as schemed
In 5 shown in scale signal.
Further, into the light all the way of reference arm, optical fiber retroeflector 309 reflects back into after adjustable attenuator 307
First coupler 304.The light that another way enters scale delay arm is incident on by the first wavelength division multiplexer 306 with collimating mirror 308
Movable mirror 310.Movable mirror 310 is set in linear guide 311.
In one embodiment, long coherence light source 301 can be distributed feedback laser.Distributed feedback laser
Central wavelength be 1550nm, bandwidth 3M.Its coherence length requires twice that is greater than mirror surface distance measurement effective travel, to protect
Card scale signal has preferable contrast.
In one embodiment, the first coupler 304 is 2 × 2 fiber couplers.Wherein, 50% light enters all the way
Reference arm, the light of another way 50% enter scale delay arm.
According to the temporal coherence of light it is found that when scale delay arm is mobile, 304 interference light intensity of the second detector will occur
Light and shade variation, each periodically variation represent one wavelength of optical path difference, can accurate calibration from there through light intensity variation is counted
The amount of movement of scale delay arm.
Short coherent measurement light path module includes short-coherence light source 321, the second coupler 320, first annular device 305, second
Circulator 318, measurement arm, third coupler 314 and balanced detector 313, the light that short-coherence light source 321 is emitted pass through second
Coupler 320 divides for two-way, enters scale delay arm through first annular device 305 all the way, and another way enters through the second annular 318 devices
Measure arm, the reflected light of the reflected light of scale delay arm and measurement arm is respectively through first annular device 305 and the second circulator 318
Port outgoing forms interference signal at third coupler 314, is balanced the reception of detector 313.Letter is measured in its result such as Fig. 7
Shown in number.
Further, short-coherence light source 321 issue short coherent light be divided into after the second coupler 320 two-way respectively into
Enter to state first annular device 305 and the second circulator 318.No. 2 end emergent lights of first annular device 305 are through the first wavelength division multiplexer
306 and collimating mirror 308 after, be incident on movable mirror 310, first annular device 305 returned to after optical path reflection, and hold from No. 3
Outgoing most enters 2X2 third coupler 314 (50:50) through adjustable attenuator 315 afterwards.Second wavelength division multiplexer 317 is by the second ring
No. 2 end emergent lights of shape device 318 and the outgoing optical coupling for indicating light source 319, wherein the wavelength of instruction light source 319 is 660nm,
It is incident in tested camera lens 312 through focusing lens 316, is tested the short coherent light of each mirror-reflection in camera lens 312 through focusing lens
316 and second wavelength division multiplexer 317 return to the second circulator 318, and bring out and penetrate from No. 3, most enter afterwards through adjustable attenuator 315
Third coupler 314.Two-way light is interfered in third coupler 314, is finally balanced detector 313 and is received.
Long coherence scale light path module and the shared scale for being equipped with movable mirror 310 of short coherent measurement light path module prolong
Slow arm, and coupling is carried out by the first wavelength division multiplexer 306 and is connected with beam splitting.Long coherence scale light path module and short coherent measurement
Light path module shares scale delay arm, can increase the accuracy of tape measure, can promote measurement accuracy to 0.1 μm.
In one embodiment, short-coherence light source 321 is superradiance short-coherence light source.The central wavelength of short-coherence light source
For 1310nm, half-peak breadth is 40~120nm.Wherein, half-peak breadth is bigger, and coherence length is shorter, and axial resolution is higher.
In one embodiment, the second coupler 320 is the fiber coupler of 95:5.Short-coherence light source issues short relevant
Light is divided into two beams through the fiber coupler of 95:5, wherein 5% light enters scale delay arm through first annular device 305,95%
Light enters measurement arm through the second circulator 318.
According to the principle that short coherent tomographic measures, the light of measurement arm and scale delay arm is only worked as in short coherent measurement optical path
The light path passed through could generate interference signal when close, and thus marking the position of each mirror surface.
In one embodiment, referring to FIG. 8, the axial scan system of scale delay arm includes collimator objective 212, angle
Bore reflecting mirror 214, plane mirror 216 and linear guide.
Collimator objective 212 and plane mirror 216 are fixed on one end of linear guide.
Corner cube reflector 214 is solid on the sliding block of linear guide, and corner cube reflector 214 makes reflected light with the identical of incident light
Angle outgoing.
Fiber exit light is collimated after object lens 212 collimate and is incident on corner cube reflector 214, and last emergent light impinges upon plane
On reflecting mirror 216, and by backtracking after the reflection of plane mirror 216.During practical adjustment, need to adjust plane reflection
Mirror 216 makes light along backtracking, the coupling efficiency of collimator objective 212 is made to reach maximum.
The stability requirement of the corner cube reflector 214 of the axial scan system of scale delay arm is low, is suitably applied in movement
In optical path.In addition, the folding optical path formed using corner cube reflector 214 and plane mirror 216, reduces the row of linear guide
Range request.
Mirror surface gap measuring device 200 needs the timing of strict control signal acquisition, i.e., records simultaneously in measurement process
The signal of the signal of long coherence scale optical path and short coherent measurement optical path.
Microscope group 8 is reflected in Fig. 2 to be used to the measurement light of mirror surface interval measurement module being introduced into tested camera lens.
In one embodiment, referring to FIG. 2, wave front aberration detection device 300 includes collimator and extender mirror 1112, beam splitting
Mirror 12 expands component 10, standard reflection mirror 14 and Wavefront sensor 13.After the collimated beam expanding lens 1112 of 1111 emergent light of optical fiber head
It is reflected by beam splitter 12 and expands component 10.Collimated light beam after being expanded is exposed to through tested camera lens 6 in confocal mode
Standard reflection mirror 14.The light beam backtracking that standard reflection mirror 14 reflects enters Wavefront sensor 13.
It is adjusted on platform specifically, tested camera lens 6 is set to the four-dimensional of air-float turntable 7.After completing centering adjustment, no longer need to adjust
Camera lens, while integrating assembling & adjusting system, the step for simplifying measurement is poly-.Integrated assembling & adjusting system another advantage is that using eccentric
Difference measuring device 100 automatically adjusts camera lens, reduces camera lens and tilts introduced wave aberration.
It during practical adjustment, needs by wave front aberration detection device 300, collimation beam expanding lens 1112 and expands group
The emergent light of part 10 carries out Wave-front measurement, to instruct system adjustment.The light source module 11 of wave front aberration detection is for providing light source.
In one embodiment, Wavefront sensor 13 can be Shack-Hartmann wavefront sensor.
In one embodiment, the confocal position for expanding component 10 introduces aperture and carries out spatial filtering, avoids system miscellaneous
Light enters Shack-Hartmann wavefront sensor 13, influences to measure.
In one embodiment, standard reflection mirror 14 is spherical surface standard mirror.Standard reflection mirror 14 is wave front aberration inspection
Survey the reference mirror of device 300.
Standard reflection mirror 14 is fixed on switching turntable by four-dimensional adjusting bracket.Using minor adjustment amount four-dimensional adjusting bracket with
The column guide rail of big stroke constitutes five dimension adjustment, to meet the detection for the object lens for not having to focal length.In actual measurement, pass through five dimensions
Adjustment criteria mirror makes optical path along backtracking, then measures.
Wave front aberration detection device 300 needs to carry out wave aberration to optical system and standard reflection mirror in measurement process
Calibration.It needs to remove system wave aberration when solving wavefront.
In addition, referring to FIG. 10, also providing the optical lens adjustment and detection method of an embodiment, including following step
It is rapid:
S10, lens data to be measured is imported, and determines the position of each face image of spherical center, and initialization dead-center position.
S20, loading machine lens barrel, and be overlapped using the mechanical axis that amesdial adjusts lens barrel with the shaft of air-float turntable.
S30, the eyeglass of eccentric difference measuring device and mirror surface gap measuring device adjustment camera lens to be measured is utilized.
S40, it is switched to Wave-front measurement mode, the measurement of wave front aberration is carried out using wave front aberration detection device.
S50, judge whether image quality reaches requirement.
S60, if so, terminate adjustment.
S70, if it is not, switch back into adjustment mode, detect the bias and spacing of camera lens to be measured, analyze measured data, and by its
It introduces optical design software and optimizes redesign.
S80, the parameter using redesign, repeat step S30 to S50, until image quality is met the requirements.
Above-mentioned optical lens adjustment and detection method, not only can detecte between the centering error of eyeglass to be measured and eyeglass to be measured
Away from the thickness with eyeglass to be measured, the wave front aberration of entire camera lens to be measured can also be detected, assesses the image quality of entire camera lens to be measured, and
Adjustment and detection only need simple switching just to can be carried out, and measurement accuracy is high.
It in one embodiment, include following using the method for the eyeglass of mirror surface gap measuring device adjustment camera lens to be measured
Step:
S110, the coherent signal envelope that short Coherent optical path signal is solved using the algorithm of solution envelope, then pass through peak-seeking algorithm
Search out the signal point position of each mirror surface.
S120, the signaling point that corresponding long coherence scale optical delay circuit is found by signal point position, utilize phase shift
Algorithm finds out the phase of each point.
Phase difference between S130, each mirror surface of calculating between the number a and each face of interference signal in the periodThis makes it possible to obtain
Optical path difference between each mirror surface are as follows:Wherein λ is long coherence optical wavelength.
Thickness between S140, each mirror surface are as follows: d=OLD/n, n are the refractive index of medium between each face where short coherent light.
Fig. 9 a and Fig. 9 b is please referred to, completes double lens gluing using eccentric difference measuring device, specific step is poly- as follows:
S210, bottom mirror is placed on the four-dimensional adjusting bracket of air-float turntable, is adsorbed fixation with vacuum air pump.
After S220, cemented surface gluing, top eyeglass is placed.
S230, the optical parameter of double glued mirrors is imported into centering error measuring system, and calculates the center of curvature image position in each face
It sets.
Optical parameter refers to the parameters such as radius of curvature, mirror surface interval, glass material.
S240, the suitable objective lens of selection, move up and down misalignment measurement head, and projection objective is made to focus on top lens
Upper surface, and set the position of linear guide at this time to the reference position (opposite zero-bit) of center of curvature image position.
S250, the center of curvature image position that the focus point of measuring head is moved to three faces respectively, each face of preliminary test is in CCD
The case where upper drawing circle, and the inclination of balsaming lens is suitably adjusted, make three faces that can draw completely circle on CCD.
S260, the eccentricity for further measuring bottom mirror and each face of top eyeglass, and it is fitted bottom mirror and top mirror
The optical axis of piece, respectively as shown in the central axes Fig. 9 b AB and BC.
S270, fine tuning top lens, until axis AB is overlapped with BC.
It is glued to complete eyeglass by S280, ultra-violet curing glue.
The above is only the preferred embodiment of the present invention, it is noted that for those skilled in the art,
Without departing from the principles of the invention, several improvements and modifications can also be made, these improvements and modifications also should be regarded as this hair
Bright protection scope.
Claims (10)
1. a kind of optical lens adjustment and detection system, which is characterized in that including resetting equipment and image quality detection device；
The resetting equipment includes eccentric difference measuring device and mirror surface gap measuring device, and the image quality detection device includes wavefront
Aberration detecting；
The bias difference measuring device includes optical measuring head, air-float turntable and column guide rail, and the optical measuring head includes
Lighting module, projection module, micro- second level amplification module and the first detector, the optical measuring head and the column guide rail are sliding
Dynamic connection, the optical measuring head can be moved up and down along the column guide rail, and the air-float turntable is for fixing camera lens to be measured.
2. optical lens adjustment as described in claim 1 and detection system, which is characterized in that the air-float turntable includes air bearing
Bearing and four-dimensional adjusting bracket, the four-dimension adjusting bracket adjust the machinery of the camera lens to be measured for fixing the camera lens to be measured
Axis.
3. optical lens adjustment as described in claim 1 and detection system, which is characterized in that the axial direction of the air-float turntable and
Radial asynchronous bounce is less than 20nm, and the synchronous bounce axially and radially of the air-float turntable is less than 70nm.
4. optical lens adjustment as described in claim 1 and detection system, which is characterized in that the rotation of the air-float turntable is compiled
Code positioning accuracy is 1 ".
5. optical lens adjustment as described in claim 1 and detection system, which is characterized in that the projection module includes collimation
Object lens and switching object lens, the light that the collimator objective issues target center collimate；The switching object lens include that switching turns
The object lens of disk and multiple groups different focal length, the multiple groups object lens are set on the switching turntable, and object lens described in each group pass through described
Switching turntable switches over, and to meet the measurement of the camera lens to be measured of different curvature, the object lens project to target pattern
The center of curvature of camera lens to be measured is as plane.
6. optical lens adjustment as described in claim 1 and detection system, which is characterized in that the mirror surface gap measuring device
Including optical interference circuit system and focusing lens；
The optical interference circuit system includes long coherence scale light path module and short coherent measurement light path module；
The long coherence scale light path module includes long coherence light source, the first coupler, reference arm, scale delay arm and the second spy
Device is surveyed, optical fiber retroeflector is provided in the reference arm, is provided with movable mirror in the scale delay arm, it is described
The light of long coherence light source outgoing is divided into two-way by first coupler, enters the reference arm all the way, and another way enters
The scale delay arm, final two-way light are reflected back the first coupler and form interference, are received by second detector；
The short coherent measurement light path module includes short-coherence light source, the second coupler, first annular device, the second circulator, surveys
Arm, third coupler and balanced detector are measured, the light of the short-coherence light source outgoing is divided into two by second coupler
Road, enters the scale delay arm through the first annular device all the way, and another way enters the measurement through second circulator
The reflected light of arm, the reflected light of the scale delay arm and the measurement arm is respectively through the first annular device and second ring
The port of shape device, which is emitted at the third coupler, forms interference signal, is received by the balanced detector；
The long coherence scale light path module and short coherent measurement light path module common shelving have the described of the movable mirror
Scale delay arm, and coupling is carried out by the first wavelength division multiplexer and is connected with beam splitting.
7. optical lens adjustment as claimed in claim 6 and detection system, which is characterized in that the axial direction of the scale delay arm
Scanning system includes collimator objective, corner cube reflector, plane mirror and linear guide；
The collimator objective and the plane mirror are fixed on one end of the linear guide；
The corner cube reflector is solid on the sliding block of the linear guide, and the corner cube reflector makes reflected light with the phase of incident light
Same angle outgoing；
Fiber exit light is incident on the corner cube reflector after being collimated by the collimator objective, and last emergent light impinges upon described flat
On the reflecting mirror of face, and by backtracking after plane mirror reflection.
8. optical lens adjustment as described in claim 1 and detection system, which is characterized in that the wave front aberration detection device
Including collimator and extender mirror, beam splitter, expand component, standard reflection mirror and Wavefront sensor；
Optical fiber head emergent light is reflected by the beam splitter after the collimator and extender mirror and expands component, parallel after being expanded
Light beam exposes to standard reflection mirror through tested camera lens in confocal mode, the light beam backtracking reflected by standard reflection mirror into
Enter to the Wavefront sensor.
9. a kind of optical lens adjustment and detection method, which comprises the following steps:
S10, lens data to be measured is imported, and determines the position of each face image of spherical center, and initialization dead-center position；
S20, loading machine lens barrel, and be overlapped using the mechanical axis that amesdial adjusts the lens barrel with the shaft of air-float turntable；
S30, the eyeglass of camera lens to be measured described in eccentric difference measuring device and the adjustment of mirror surface gap measuring device is utilized；
S40, it is switched to Wave-front measurement mode, the measurement of wave front aberration is carried out using wave front aberration detection device；
S50, judge whether image quality reaches requirement；
S60, if so, terminate adjustment；
S70, if it is not, switch back into adjustment mode, detect the bias and spacing of the camera lens to be measured, analyze measured data, and by its
It introduces optical design software and optimizes redesign；
S80, the parameter using redesign, repeat step S30 to S50, until image quality is met the requirements.
10. optical lens adjustment as claimed in claim 9 and detection method, which is characterized in that filled using mirror surface distance measurement
Set the method for the eyeglass of camera lens to be measured described in adjustment the following steps are included:
The coherent signal envelope of short Coherent optical path signal is solved using the algorithm of solution envelope, then each mirror is searched out by peak-seeking algorithm
The signal point position in face；
It is found out by the signaling point that signal point position finds corresponding long coherence scale optical delay circuit using phase shift algorithm
The phase of each point；
Calculate the phase difference between each mirror surface between the number a and each face of interference signal in the periodThis makes it possible to obtain between each mirror surface
Optical path difference are as follows:Wherein λ is long coherence optical wavelength；
Thickness between each mirror surface are as follows: d=OLD/n, n are the refractive index of medium between each face where short coherent light.
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| CN108168470A (en) * | 2018-03-21 | 2018-06-15 | 中国工程物理研究院激光聚变研究中心 | A kind of measuring device and method of the frequency-doubling crystal characteristic angle based on divergent beams |
| CN111044259A (en) * | 2019-12-12 | 2020-04-21 | 中国科学院苏州生物医学工程技术研究所 | Distance, eccentricity and wavefront aberration integrated measuring system of optical lens |
| CN111122439A (en) * | 2020-01-14 | 2020-05-08 | 仪锐实业有限公司 | Device and method for detecting quality of optical lens group |
| CN111338390A (en) * | 2020-04-08 | 2020-06-26 | 西安光衡光电科技有限公司 | Cemented lens centering control method and system and full-automatic cementing equipment |
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| CN108168470A (en) * | 2018-03-21 | 2018-06-15 | 中国工程物理研究院激光聚变研究中心 | A kind of measuring device and method of the frequency-doubling crystal characteristic angle based on divergent beams |
| CN111044259A (en) * | 2019-12-12 | 2020-04-21 | 中国科学院苏州生物医学工程技术研究所 | Distance, eccentricity and wavefront aberration integrated measuring system of optical lens |
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| CN111338390A (en) * | 2020-04-08 | 2020-06-26 | 西安光衡光电科技有限公司 | Cemented lens centering control method and system and full-automatic cementing equipment |
| CN112114436A (en) * | 2020-09-15 | 2020-12-22 | 深圳市韵腾激光科技有限公司 | Method for assembling and adjusting long-focal-depth laser cutting head |
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| CN112596258A (en) * | 2020-12-04 | 2021-04-02 | 中国科学院西安光学精密机械研究所 | Debugging method for two-dimensional turntable folded optical assembly |
| CN112596258B (en) * | 2020-12-04 | 2021-09-14 | 中国科学院西安光学精密机械研究所 | Debugging method for two-dimensional turntable folded optical assembly |
| CN115826258A (en) * | 2022-12-20 | 2023-03-21 | 中国工程物理研究院激光聚变研究中心 | Afocal laser lens group, precise assembling and adjusting device and precise assembling and adjusting method |
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Application publication date: 20181207 |