CN112114436A - Method for assembling and adjusting long-focal-depth laser cutting head - Google Patents
Method for assembling and adjusting long-focal-depth laser cutting head Download PDFInfo
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- CN112114436A CN112114436A CN202010967235.3A CN202010967235A CN112114436A CN 112114436 A CN112114436 A CN 112114436A CN 202010967235 A CN202010967235 A CN 202010967235A CN 112114436 A CN112114436 A CN 112114436A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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Abstract
The invention provides a method for assembling and adjusting a long-focus depth laser cutting head, which adopts a focusing autocollimator to observe the position difference between a spherical center image and a surface image of each lens in the laser cutting head and a reference target image of the autocollimator, and judges and adjusts each lens so as to ensure that the optical axes of each lens in the laser cutting head coincide; simultaneously, an autocollimator and an imaging camera are used for carrying out bidirectional observation to respectively obtain a reflected image and a transmitted image of the special-shaped optical element, so that the optical axis of the special-shaped optical element is superposed with the optical axis of each lens; in addition, before each lens is installed, the mechanical axis of the laser cutting head is vertical to the horizontal plane, and the mechanical axis of the laser cutting head is coincided with the optical axis of the lens. The adjusting method provided by the invention overcomes the problem of low adjusting precision of the special-shaped optical element, and the adjusting precision of each lens is high, so that the cutting precision of the laser processing system is improved; meanwhile, the steps of installing and adjusting the laser cutting head in the laser processing system are simplified.
Description
Technical Field
The invention relates to the field of optical assembly, in particular to a method for assembling and adjusting a long-focus-depth laser cutting head.
Background
At present, long-focus depth laser cutting heads often adopt special-shaped optical elements such as conical lenses or diffractive optical elements, and the purpose of long-focus depth is achieved by utilizing the special-shaped optical elements to generate Bessel beams. The installation of optical components directly guarantees through the machining precision of mechanical part in the current laser cutting head, has the problem in two respects: firstly, the machining precision of the mechanical part needs to be strictly controlled, and the manufacturing cost and the manufacturing difficulty of the mechanical part are increased; secondly, the machining precision of the laser cutting head is reduced by the assembly accumulated error generated by direct installation; the conventional optical adjustment method is adopted, such as a surface reflection method or a center deviation measurement method, wherein the surface reflection method utilizes laser to irradiate a plurality of reflection points generated on the surface of each lens, and the superposition of the plurality of reflection points is realized by adjusting each lens.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the technical defects and provide a method for assembling and adjusting a long-focus-depth laser cutting head, so as to solve the problems that the conventional method is low in assembly precision and cannot accurately assemble a special-shaped optical element.
The invention mainly aims at the laser cutting head which can generate Bessel beams to realize long focal depth; therefore, the laser cutting head uses a rotationally symmetric special-shaped optical element such as a conical lens or a diffractive optical element to obtain the Bessel beam, and the special-shaped optical element consists of a special-shaped plane and a plane, wherein the special-shaped plane faces to the emergent light direction, and the plane faces to the incident light direction; in the laser cutting head, the first lens is a special-shaped optical element, and the plane of the first lens faces the outer face of the laser cutting head, so that the Bessel beam can be conveniently transmitted in the whole optical path of the laser cutting head.
In order to solve the technical problem, the invention provides an assembly and adjustment method of a long-focus-depth laser cutting head, which comprises the following steps: adjusting a calibration device: a calibration test bench is built, and an autocollimator is vertical to a horizontal plane; adjusting a mechanical frame of the laser cutting head: fixing a laser cutting head on an adjusting frame, placing a reflector with a cross wire on a datum plane of the laser cutting head, and adjusting the laser cutting head in four dimensions by observing the position of a reflected image generated by an autocollimator on a computer after passing through the reflector so as to enable the reflected image of the cross wire to coincide with a reference target image of the autocollimator; adjusting a lens close to a focal plane in the laser cutting head: removing the reflector, mounting the lens in a mechanical outer frame of the laser cutting head, observing a spherical center image and a surface image of the lens on a computer, and loosening and tightening lateral screws of the mechanical frame of the laser cutting head to ensure that the spherical center image and the surface image of the lens are superposed with a reference target image; installing and adjusting other lenses: mounting an adjusting lens from bottom to top in the same way as the third step; installing a special-shaped optical element: after the camera and the autocollimator are oppositely arranged, the special-shaped optical element is placed in a mechanical outer frame of the laser cutting head, a surface reflection image and a transmission image of the special-shaped optical element are observed, the side screw is adjusted to enable the reflection image to be superposed with a reference target image, and the light spot energy of the transmission image is uniformly and symmetrically distributed.
A long-focus depth laser cutting head in the method uses a rotationally symmetrical special-shaped optical element to obtain a Bessel beam, wherein the special-shaped optical element consists of a special-shaped plane and a plane, the special-shaped plane faces to an emergent light direction, and the plane faces to an incident light direction; in the laser cutting head, the first lens is a special-shaped optical element, and the plane of the first lens faces the outer face of the laser cutting head;
the debugging method comprises the following steps:
step 1: adjusting the calibration device: a calibration test bench is built, and an autocollimator is vertical to a horizontal plane;
the method comprises the following steps: adjusting the mechanical frame of the laser cutting head: fixing a mechanical frame of the laser cutting head on an adjusting frame, placing a reflector with a cross wire on a datum plane of the mechanical frame () of the laser cutting head, and adjusting the mechanical frame () of the laser cutting head in four dimensions by observing the position of a reflected image generated by an autocollimator on a computer after passing through the reflector so as to enable the reflected image of the cross wire to coincide with a reference target image of the autocollimator, wherein at the moment, a mechanical axis of the mechanical frame () of the laser cutting head coincides with an optical axis of the autocollimator;
the method comprises the following steps: adjusting the lens in the laser cutting head close to the focal plane thereof: removing a reflector, installing a lens into a mechanical frame () of the laser cutting head, observing a spherical center image and a surface image of the lens on a computer, and loosening and tightening a lateral screw of the mechanical frame () of the laser cutting head to ensure that the spherical center image and the surface image of the lens are superposed with a reference target image, wherein at the moment, the optical axis of the lens is superposed with the mechanical axis of the mechanical frame () of the laser cutting head;
the method comprises the following steps: mounting and adjusting other lenses: installing an adjusting lens from bottom to top in the same way;
the method comprises the following steps: installing a special-shaped optical element: after the camera and the autocollimator are oppositely arranged, the special-shaped optical element is placed in a mechanical outer frame of the laser cutting head, the autocollimator observes a surface reflection image of the special-shaped optical element, meanwhile, the camera observes a transmission image of the special-shaped optical element, a lateral screw is adjusted to enable the reflection image to be superposed with a reference target image, light spot energy of the transmission image is uniformly and symmetrically distributed, and at the moment, an optical axis of the special-shaped optical element is superposed with a mechanical axis of the mechanical frame () of the laser cutting head.
As a further improvement of the present invention, in the above step, the autocollimator is mounted on a fixed support, the autocollimator has a focusing function, a first camera is arranged on an image focal plane of the autocollimator, an image signal of the first camera is transmitted to a computer for display, and a water tank filled with water is placed at a position more than 250mm below the autocollimator; focusing the autocollimator to a target which can be observed at infinity, reflecting a light beam emitted by the autocollimator on the water surface of the water tank, then entering the autocollimator again, observing a reflected image on the computer, and adjusting the autocollimator in an inclined manner to enable the reflected image to be superposed with a reference target image of the autocollimator, so that the autocollimator is absolutely vertical to the horizontal plane.
As a further improvement of the invention, in the step, the water tank is removed, a mechanical frame of the laser cutting head is fixed on an adjusting frame at a position which is more than mm under the autocollimator, the end surface of the mechanical frame of the laser cutting head, which is close to the autocollimator, is a reference surface, a reflector with the mechanical frame is placed on the reference surface, the mechanical frame of the reflector is tightly matched with the reference surface of the autocollimator, and the reflector is tightly matched into the mechanical frame; focusing the autocollimator to an object at infinity, wherein a light beam emitted by the autocollimator enters the autocollimator after being reflected by a reflecting surface of the reflector, a reflected image is observed on the computer, and the mechanical frame of the laser cutting head is adjusted by inclination to enable the reflected image to be coincident with a reference object image, so that the mechanical axis of the mechanical frame of the laser cutting head is vertical to a horizontal plane; focusing the autocollimator to observe the cross wire on the reflector, wherein reflected light generated on the cross wire enters the autocollimator, observing the image of the cross wire on the computer, and adjusting the mechanical frame of the laser cutting head by translation to ensure that the image of the cross wire is superposed with a reference target image, which indicates that the mechanical axis of the mechanical frame of the laser cutting head is superposed with the optical axis of the autocollimator.
As a further improvement of the present invention, in the steps, first, an imaging lens and a second camera are placed under the mechanical frame of the laser cutting head, the autocollimator is focused to a target that can be observed at infinity, the light beam emitted by the autocollimator passes through the laser cutting head and the imaging lens, then is imaged onto the second camera, and transmits an image signal to the computer for display, by adjusting the placement positions of the imaging lens and the second camera, the image of the light beam is completely presented on the second camera, and the image of the light beam is uniformly distributed, which indicates that the optical axis of the imaging lens is parallel to the optical axis of the laser cutting head, and the light beam emitted by the autocollimator is completely received by the second camera; secondly, a special-shaped optical element is placed in the mechanical frame of the laser cutting head, the light beam emitted by the autocollimator enters the autocollimator after being reflected by the plane of the special-shaped optical element, observing a reflected image on the computer, simultaneously, after the light beam emitted by the autocollimator passes through the laser cutting head and the imaging lens, imaging on the second camera, adjusting second screws which are evenly distributed on the lateral side of the mechanical frame of the laser cutting head, enabling the special-shaped optical element to move in the inner frame of the mechanical frame of the laser cutting head until a reflected image is observed to be coincident with a reference target image, locking the second screw until the symmetrical cross images exist, fixing the special-shaped optical element in the mechanical frame of the laser cutting head, pressing the special-shaped optical element by using a pressing ring, and removing the second screw; and indicating that the optical axis of the special-shaped optical element is coincided with the autocollimator and the optical axis of the special-shaped optical element is coincided with the mechanical axis of the mechanical frame of the laser cutting head.
As a further improvement of the invention, the target information in the range of infinity to 250mm can be observed in the focusing range of the autocollimator.
As a further improvement of the invention, four second screws which are evenly distributed in the lateral direction of the mechanical frame of the laser cutting head are adjusted.
The invention has the beneficial effects that:
the invention provides a method for assembling and adjusting a long-focus depth laser cutting head, which adopts a focusable autocollimator to observe the position difference between a spherical center image and a surface image of each lens in the laser cutting head and a reference target image of the autocollimator, and judges and adjusts each lens so as to ensure that the optical axes of each lens in the laser cutting head coincide; simultaneously, an autocollimator and an imaging camera are used for carrying out bidirectional observation to respectively obtain a reflected image and a transmitted image of the special-shaped optical element, so that the optical axis of the special-shaped optical element is superposed with the optical axis of each lens; in addition, before each lens is installed, the mechanical axis of the laser cutting head is vertical to the horizontal plane, and the mechanical axis of the laser cutting head is coincided with the optical axis of the lens. Compared with the prior art, the invention solves the problem of low assembly precision of the special-shaped optical element in the laser cutting head, improves the overall assembly precision of the laser cutting head, thereby reducing the installation error of the laser processing system, improving the problem of cutting precision reduction of the laser processing system caused by installation and adjustment, and simultaneously simplifying the installation steps of the laser cutting head as a module in the laser processing system.
Drawings
To more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, and it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope. In the drawings:
FIG. 1 is a schematic view of the installation and adjustment process of the long-focal-depth laser cutting head according to the present invention;
FIG. 2 is a schematic view of an autocollimator calibration of the present invention;
FIG. 3 is a schematic view of the mechanical frame adjustment of the laser cutting head of the present invention;
FIG. 4 is a schematic view of the lens of the present invention mounted near the focal plane of the laser cutting head;
FIG. 5 is a schematic view of the present invention showing the installation of a conical mirror;
fig. 6 is a schematic diagram of the light spot changing process of the present invention.
The names of the components in the figure are as follows:
the device comprises a fixing support 101, an autocollimator 102, a first camera 103, a computer 104, a water tank 105, a reflecting mirror 201, a laser cutting head mechanical frame 202, an adjusting frame 203, a first screw 301, a first lens 302, a special-shaped optical element 401, a second screw 402, a second lens 403, an imaging lens 404, a second camera 405, a spot shape 501 before a conical mirror is not adjusted, and a spot shape 502 after the conical mirror is adjusted.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Method for assembling and adjusting long-focal-depth laser cutting head
As shown in fig. 1, an embodiment of the present invention provides an assembly and adjustment process of a long-focus-depth laser cutting head, where the assembly and adjustment process specifically includes the following steps:
adjusting a calibration device: as shown in fig. 2, an autocollimator 102 is mounted on a fixed bracket 101, the autocollimator 102 has a focusing function, and can observe target information within a range of ∞ 250mm within a focusing range, a first camera 103 is arranged on an image focal plane of the autocollimator 102, an image signal of the first camera 103 is transmitted to a computer 104 to be displayed, and a water tank 105 filled with water is arranged at a position more than 250mm under the autocollimator 102; focusing the autocollimator 102 to a target which can be observed at infinity, reflecting the light beam emitted by the autocollimator 102 through the water surface of the water tank 105, then re-entering the autocollimator 102, observing a reflected image on the computer 104, and adjusting the autocollimator 102 by tilting so that the reflected image coincides with a reference target image of the autocollimator 102, which indicates that the autocollimator 102 is absolutely vertical to the horizontal plane.
Adjusting a mechanical frame of the laser cutting head: as shown in fig. 3, the water tank 105 is removed, a laser cutting head mechanical frame 202 is fixed on an adjusting frame 203 at a position more than 250mm below the autocollimator 102, the end surface of the laser cutting head mechanical frame 202, which is close to the autocollimator 102, is a reference surface, a reflector 201 with a mechanical frame is placed on the reference surface, the mechanical frame of the reflector 201 is tightly matched with the reference surface of the autocollimator 102, meanwhile, the reflector 201 is tightly matched into the mechanical frame, and in addition, a cross hair is carved on the center of the reflecting surface of the reflector 201; focusing the autocollimator 102 to an object at infinity, wherein a light beam emitted by the autocollimator 102 enters the autocollimator 102 after being reflected by a reflecting surface of the reflecting mirror 201, a reflected image is observed on the computer 104, and the reflected image is coincided with a reference object image by adjusting the mechanical frame 202 of the laser cutting head in an inclined manner, which indicates that a mechanical axis of the mechanical frame 202 of the laser cutting head is perpendicular to a horizontal plane; focusing the autocollimator 102 to observe the cross wire on the reflector 201, wherein the reflected light generated on the cross wire enters the autocollimator 102, observing the cross wire image on the computer 104, and adjusting the mechanical frame 202 of the laser cutting head by translation to enable the cross wire image to be coincident with a reference target image, which shows that the mechanical axis of the mechanical frame 202 of the laser cutting head is coincident with the optical axis of the autocollimator 102.
Mounting a lens close to a focal plane in the laser cutting head: after the step (2) is completed, fixing the laser cutting head mechanical frame 202, removing the reflector 201, installing the first lens 302 in the laser cutting head mechanical frame 202, focusing the autocollimator 102, observing the spherical center image and the surface image of the first lens 302 on the computer 104, adjusting 4 first screws 301 uniformly distributed in the lateral direction of the laser cutting head mechanical frame 202 to move the first lens 302 in the inner frame of the laser cutting head mechanical frame 202 until the observed spherical center image and surface image are overlapped with a reference target image, locking the first screws 301 to fix the first lens 302 in the laser cutting head mechanical frame 202, pressing the first lens 302 by using a pressing ring, and removing the first screws 301; indicating that the optical axis of the first mirror 302 coincides with the autocollimator 102 and the optical axis of the first mirror 302 coincides with the mechanical axis of the laser cutting head mechanical frame 202.
Installing and adjusting other lenses: and (4) sequentially mounting optical lenses from bottom to top, wherein the adjusting mode is the same as the third step.
Installing a special-shaped optical element: as shown in fig. 5, first, an imaging lens 404 and a second camera 405 are placed right below the laser cutting head mechanical frame 202, the autocollimator 102 is focused to a target that can be observed at infinity, the light beam emitted by the autocollimator 102 passes through the laser cutting head and the imaging lens 404, is imaged onto the second camera 405, and transmits an image signal to the computer 104 for display, by adjusting the placement positions of the imaging lens 404 and the second camera 405, the image of the light beam is completely presented on the second camera 405, and the image of the light beam is uniformly distributed, which indicates that the optical axis of the imaging lens 404 is parallel to the optical axis of the laser cutting head, and the light beam emitted by the autocollimator 102 is completely received by the second camera 405; next, the profiled optical element 401 is placed within the laser cutting head mechanical frame 202, the profiled optical element 401: for example, a conical mirror, the light beam emitted from the autocollimator 102 enters the autocollimator 102 after being reflected by the special-shaped optical element 401, a reflected image is observed on the computer 104, meanwhile, the light beam emitted from the autocollimator 102 is imaged on the second camera 405 after passing through the laser cutting head and the imaging lens 404, if the observed image is the image 501 in fig. 6, 4 second screws 402 uniformly distributed laterally of the laser cutting head mechanical frame 202 are adjusted, the special-shaped optical element 401 moves in the inner frame of the laser cutting head mechanical frame 202 until the reflected image is observed to coincide with a reference target image and the image 502 in fig. 6 is simultaneously present, the second screws 402 are locked to fix the special-shaped optical element 401 in the laser cutting head mechanical frame 202, and then the special-shaped optical element 401 is pressed by a pressing ring, removing the second screw 402; it is shown that the optical axis of the shaped optical element 401 coincides with the autocollimator 102 and the optical axis of the shaped optical element 401 coincides with the mechanical axis of the mechanical frame 202 of the laser cutting head.
After the installation and adjustment of the special-shaped optical element are completed, the optical machine installation and adjustment of the laser cutting head of the embodiment is finished. In this embodiment, the assembly of the fifth step is performed by taking a conical lens as an example, and the assembly and adjustment methods of other special-shaped optical elements are similar.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (6)
1. A method for assembling and adjusting a long-focal-depth laser cutting head is characterized by comprising the following steps:
the long-focus-depth laser cutting head in the method uses a rotationally symmetric special-shaped optical element to obtain a Bessel beam, wherein the special-shaped optical element consists of a special-shaped plane and a plane, the special-shaped plane faces to the emergent light direction, and the plane faces to the incident light direction; in the laser cutting head, the first lens is a special-shaped optical element, and the plane of the first lens faces the outer face of the laser cutting head;
the debugging method comprises the following steps:
step 1: adjusting the calibration device: a calibration test bench is set up, and an autocollimator (102) is vertical to a horizontal plane;
step 2: adjusting a laser cutting head mechanical frame (202): fixing a laser cutting head mechanical frame (202) on an adjusting frame (203), placing a reflector (201) with a cross wire on a datum plane of the laser cutting head mechanical frame (202), and adjusting the laser cutting head mechanical frame (202) in four dimensions by observing the position of a reflected image generated on a computer (104) after an autocollimator (102) passes through the reflector (201) so that the reflected image of the cross wire is superposed with a reference target image of the autocollimator (102), wherein at the moment, a mechanical axis of the laser cutting head mechanical frame (202) is superposed with an optical axis of the autocollimator (102);
and step 3: adjusting the lens in the laser cutting head close to the focal plane thereof: removing a reflector, mounting a lens into a mechanical frame (202) of the laser cutting head, observing a spherical center image and a surface image of the lens on a computer, and loosening and tightening a lateral screw of the mechanical frame of the laser cutting head to enable the spherical center image and the surface image of the lens to be coincided with a reference target image, wherein at the moment, an optical axis of the lens is coincided with a mechanical axis of the mechanical frame (202) of the laser cutting head;
and 4, step 4: mounting and adjusting other lenses: installing an adjusting lens from bottom to top in the same manner as the step 3;
and 5: installing a special-shaped optical element: after the camera and the autocollimator are oppositely arranged, the special-shaped optical element is placed in a mechanical outer frame of the laser cutting head, the autocollimator observes a surface reflection image of the special-shaped optical element, meanwhile, the camera observes a transmission image of the special-shaped optical element, a lateral screw is adjusted to enable the reflection image to be superposed with a reference target image, light spot energy of the transmission image is uniformly and symmetrically distributed, and at the moment, an optical axis of the special-shaped optical element is superposed with a mechanical axis of the mechanical frame (202) of the laser cutting head.
2. The method of claim 1 for adjusting a long depth of focus laser cutting head, wherein: in the step 1, the autocollimator (102) is mounted on a fixed support (101), the autocollimator (102) has a focusing function, a first camera (103) is arranged on an image space focal plane of the autocollimator (102), an image signal of the first camera (103) is transmitted to a computer (104) to be displayed, and a water tank (105) filled with water is placed at a position which is more than 250mm below the autocollimator (102); focusing the autocollimator (102) to a target which can be observed at infinity, reflecting a light beam emitted by the autocollimator (102) through the water surface of the water tank (105), then re-entering the autocollimator (102), observing a reflected image on the computer (104), and adjusting the autocollimator (102) in an inclined mode to enable the reflected image to be coincident with a reference target image of the autocollimator (102), wherein the autocollimator (102) is kept absolutely vertical to the horizontal plane.
3. The method of claim 2 for adjusting a long depth of focus laser cutting head, wherein: step 2, removing the water tank (105), fixing a mechanical frame (202) of the laser cutting head on an adjusting frame (203) at a position which is more than 250mm under the autocollimator (102), wherein the end surface, close to the autocollimator (102), of the mechanical frame (202) of the laser cutting head is a reference surface, placing a reflector (201) with the mechanical frame on the reference surface, wherein the mechanical frame of the reflector (201) is tightly matched with the reference surface of the autocollimator (102), and meanwhile, the reflector (201) is tightly matched into the mechanical frame; focusing the autocollimator (102) to an object at infinity, wherein a light beam emitted by the autocollimator (102) enters the autocollimator (102) after being reflected by a reflecting surface of the reflector (201), a reflected image is observed on the computer (104), and the reflected image is coincided with a reference object image by adjusting the mechanical frame (202) of the laser cutting head in an inclined mode, so that the mechanical axis of the mechanical frame (202) of the laser cutting head is perpendicular to the horizontal plane; focusing the autocollimator (102) to observe a cross wire on the reflector (201), wherein reflected light generated on the cross wire enters the autocollimator (102), observing a cross wire image on the computer (104), and adjusting the laser cutting head mechanical frame (202) in a translation manner to enable the cross wire image to be coincident with a reference target image, so that the mechanical axis of the laser cutting head mechanical frame (202) is coincident with the optical axis of the autocollimator (102).
4. The method of claim 3 for adjusting a long depth of focus laser cutting head, wherein: in step 3, firstly, an imaging lens (404) and a second camera (405) are placed under the mechanical frame (202) of the laser cutting head, the autocollimator (102) is focused to a target with infinite observation distance, and after a light beam emitted by the autocollimator (102) passes through the laser cutting head and the imaging lens (404), imaging the image on the second camera (405) and transmitting the image signal to the computer (104) for displaying, by adjusting the placement positions of the imaging lens (404) and the second camera (405), the image of the light beam is completely presented on the second camera (405), and the imaging of the light beam is uniformly distributed, which shows that the optical axis of the imaging lens (404) is parallel to the optical axis of the laser cutting head, while the light beam emitted by the autocollimator (102) is completely received by the second camera (405); secondly, placing a special-shaped optical element (401) in the mechanical frame (202) of the laser cutting head, enabling a light beam emitted by the autocollimator (102) to enter the autocollimator (102) after being reflected by the plane of the special-shaped optical element (401), observing a reflected image on the computer (104), simultaneously imaging the light beam emitted by the autocollimator (102) onto the second camera (405) after passing through the laser cutting head and the imaging lens (404), adjusting second screws (402) which are evenly distributed in the lateral direction of the mechanical frame (202) of the laser cutting head, enabling the special-shaped optical element (401) to move in the inner frame of the mechanical frame (202) of the laser cutting head until the reflected image is observed to be overlapped with a reference target image and a symmetrical cross image is obtained, locking the second screws (402) to fix the special-shaped optical element (401) in the mechanical frame (202) of the laser cutting head, pressing the special-shaped optical element (401) by using a pressing ring, and then removing the second screw (402); indicating that the optical axis of the profiled optical element (401) coincides with the autocollimator (102) and that the optical axis of the profiled optical element (401) coincides with the mechanical axis of the laser cutting head mechanical frame (202).
5. The method of claim 2 for adjusting a long depth of focus laser cutting head, wherein: the target information within the range of ∞ -250 mm can be observed within the focusing range of the autocollimator (102).
6. The method of claim 4 for adjusting a long depth of focus laser cutting head, wherein: four second screws (402) adjusting the lateral uniformity of the laser cutting head mechanical frame (202).
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CN114397762A (en) * | 2022-01-04 | 2022-04-26 | 中国科学院微电子研究所 | Debugging method for main optical axis of optical system |
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