CN108956712B - ZnO纳米晶增强Si纳米柱阵列敏感材料及其制备方法和传感器 - Google Patents
ZnO纳米晶增强Si纳米柱阵列敏感材料及其制备方法和传感器 Download PDFInfo
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- CN108956712B CN108956712B CN201810700070.6A CN201810700070A CN108956712B CN 108956712 B CN108956712 B CN 108956712B CN 201810700070 A CN201810700070 A CN 201810700070A CN 108956712 B CN108956712 B CN 108956712B
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- 239000002073 nanorod Substances 0.000 title claims abstract description 27
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- 238000002360 preparation method Methods 0.000 title abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 14
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- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 9
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- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
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CN201810700070.6A CN108956712B (zh) | 2018-06-29 | 2018-06-29 | ZnO纳米晶增强Si纳米柱阵列敏感材料及其制备方法和传感器 |
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CN108956712B true CN108956712B (zh) | 2021-01-12 |
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Citations (7)
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---|---|---|---|---|
CN2408573Y (zh) * | 1999-12-06 | 2000-11-29 | 中国科学院长春光学精密机械研究所 | 低温(常温)场效应式气敏元件 |
CN101158662A (zh) * | 2007-11-02 | 2008-04-09 | 华南理工大学 | 氢气传感器用薄膜材料及其制备方法 |
CN102965622A (zh) * | 2012-12-19 | 2013-03-13 | 中国科学院微电子研究所 | 一种表面掺杂Au或Pt纳米晶的敏感膜的制备方法 |
CN104614413A (zh) * | 2015-02-09 | 2015-05-13 | 华中科技大学 | 一种无电极式半导体气体传感器及其制备方法 |
CN104713914A (zh) * | 2015-02-02 | 2015-06-17 | 华中科技大学 | 一种半导体电阻式气体传感器及其制备方法 |
CN105866187A (zh) * | 2016-03-25 | 2016-08-17 | 中国科学院高能物理研究所 | 半导体气敏传感器及其制备方法 |
CN107867714A (zh) * | 2017-10-26 | 2018-04-03 | 中国工程物理研究院化工材料研究所 | 纳米晶状SnO2/石墨烯复合气敏材料及其制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100946701B1 (ko) * | 2007-12-10 | 2010-03-12 | 한국전자통신연구원 | 나노 결정 복합 산화물 박막, 이를 구비한 환경 가스 센서및 환경 가스 센서의 제조방법 |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2408573Y (zh) * | 1999-12-06 | 2000-11-29 | 中国科学院长春光学精密机械研究所 | 低温(常温)场效应式气敏元件 |
CN101158662A (zh) * | 2007-11-02 | 2008-04-09 | 华南理工大学 | 氢气传感器用薄膜材料及其制备方法 |
CN102965622A (zh) * | 2012-12-19 | 2013-03-13 | 中国科学院微电子研究所 | 一种表面掺杂Au或Pt纳米晶的敏感膜的制备方法 |
CN104713914A (zh) * | 2015-02-02 | 2015-06-17 | 华中科技大学 | 一种半导体电阻式气体传感器及其制备方法 |
CN104614413A (zh) * | 2015-02-09 | 2015-05-13 | 华中科技大学 | 一种无电极式半导体气体传感器及其制备方法 |
CN105866187A (zh) * | 2016-03-25 | 2016-08-17 | 中国科学院高能物理研究所 | 半导体气敏传感器及其制备方法 |
CN107867714A (zh) * | 2017-10-26 | 2018-04-03 | 中国工程物理研究院化工材料研究所 | 纳米晶状SnO2/石墨烯复合气敏材料及其制备方法 |
Non-Patent Citations (2)
Title |
---|
掺杂Sb3+的ZnO纳米晶敏感材料的性能;张丽华 等;《材料研究学报》;19940831;第8卷(第4期);第348-351页 * |
花状ZnO纳米晶的合成及其气敏性能研究;张健 等;《黑龙江大学自然科学学报》;20120430;第29卷(第2期);第225-228页 * |
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