CN108896612A - Miniature humidity sensor - Google Patents
Miniature humidity sensor Download PDFInfo
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- CN108896612A CN108896612A CN201811069136.2A CN201811069136A CN108896612A CN 108896612 A CN108896612 A CN 108896612A CN 201811069136 A CN201811069136 A CN 201811069136A CN 108896612 A CN108896612 A CN 108896612A
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- humidity sensor
- miniature humidity
- sensor according
- cantilever beam
- miniature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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Abstract
The present invention provides a kind of Miniature humidity sensor, is related to micro-electromechanical system field.The Miniature humidity sensor includes：Sensitive structure, supporting layer, cantilever beam, signal wire, frame and substrate；Wherein, the frame is fixed on substrate；The supporting layer is connect by cantilever beam with frame；The sensitive structure is fixed on supporting layer；The signal wire is connect with sensitive structure, and is fixed on a cantilever beam.Miniature humidity sensor structure provided by the invention is simple, easy to process, and can accelerate response speed, reduces hysteresis, reduces device volume.
Description
Technical field
The present invention relates to micro-electromechanical system field more particularly to a kind of Miniature humidity sensors.
Background technique
Humidity indicates the water vapour amount in air, is closely related with production and living.It is traditionally used for the sensing of detection humidity
Device has hair hygrograph, dry bulb thermometer, cold-spot hygrometer etc., since volume is big, consistency is poor, precision is low, in recent years gradually
Develop towards Miniature humidity sensor direction.
Miniature humidity sensor is the humidity sensor using micro fabrication development, main to pass through detection sensitive material
Physically or chemically the measurement of humidity is realized in amount variation caused by the variation of middle moisture content.It particularly may be divided into：Measure sensitive material
1) the sonic surface wave type humidity sensor of mass change before and after the moisture absorption；2) the resistance pressure type humidity sensor of stress variation；3) resistance
The resistance type humidity sensor of rate variation；4) the capacitive humidity sensor of change in dielectric constant；5) two poles of Work function Change
Cast sensor.
To optimize existing Miniature humidity sensor, extensive work is directed generally to following three aspects at present：1) optimize quick
Feel material, such as uses：Nanofiber, graphene oxide or its modified material, polyimides；2) optimize sensor structure, such as：It is logical
Structure design is crossed to increase the capacitor of per unit area, propose that new structure improves sensitivity；3) simplify sensor process, reduce and produce
Product cost.
These Miniature humidity sensors, although many aspects have got a promotion by various Optimized Approaches.But due to it
Sensitivity is carried out to humidity using sensitive material, therefore there is a problem that low-response, hysteresis are big, and device volume still needs
It further decreases.
Summary of the invention
Miniature humidity sensor provided by the invention can accelerate response speed, reduce hysteresis, reduce device body
Product.
The present invention uses following technical scheme：
A kind of Miniature humidity sensor, including：Sensitive structure, supporting layer, cantilever beam, signal wire, frame and substrate；Its
In,
The frame is fixed on substrate；
The supporting layer is connect by cantilever beam with frame；
The sensitive structure is fixed on supporting layer；
The signal wire is connect with sensitive structure, and is fixed on a cantilever beam.
Optionally, the substrate is without graphical or have patterned substrate.
Optionally, the substrate is conductor, semiconductor or insulator.
Optionally, for the frame to be cuboid, prismatoid or cylindrical structure, quantity is one or more.
Optionally, the frame is insulator, or is covered with the conductor or semiconductor of dielectric material.
Optionally, the supporting layer is cuboid, square or cylindrical structure.
Optionally, the supporting layer is made of dielectric material, for silica, silicon nitride or by silica and silicon nitride group
At multilayer material.
Optionally, the cantilever beam is long strip type, L-type or folded form, and quantity is one or more.
Optionally, the cantilever beam is made of dielectric material, for silica, silicon nitride or by silica and silicon nitride group
At multilayer material.
Optionally, the sensitive structure is thermal resistance, diode or thermal resistance and diode.
Optionally, the sensitive structure be one or more, it is multiple between be serial or parallel connection form.
Optionally, the sensitive structure is located at lower surface, centre or the upper surface of supporting layer.
Optionally, the signal wire is metal connecting line.
Optionally, the signal wire is located at lower surface, centre or the upper surface of cantilever beam.
Miniature humidity sensor provided in an embodiment of the present invention, only sensitive structure in structure, without sensitive material, because
This does not need to cause physically or chemically to measure change by the variation of moisture content in material, therefore can avoid because of Vapor adsorption or desorption
The big problem of low-response, hysteresis caused by process is conducive to promote device performance；In addition, sensitive structure uses thermal resistance, two
Pole pipe or thermal resistance and diode, it means that sensitive structure has the function of heater and detector concurrently simultaneously, can mention to itself
While for certain heat, the temperature change on sensitive structure is detected, to obtain ambient humidity information.It is this by heater and
The two-in-one structure of detector is conducive to reduce device volume.
Detailed description of the invention
Fig. 1 is the cross-sectional view of the structure of one Miniature humidity sensor of the embodiment of the present invention；
Fig. 2 is the structure top view of one Miniature humidity sensor of the embodiment of the present invention；
Fig. 3 is the cross-sectional view of the structure of two Miniature humidity sensor of the embodiment of the present invention；
Fig. 4 is the structure top view of two Miniature humidity sensor of the embodiment of the present invention.
Appended drawing reference in figure：1, sensitive structure；2, supporting layer；3, cantilever beam；4, signal wire；5, frame；6, substrate.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
It is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
Fig. 1 and Fig. 2 respectively illustrates the sectional view and top view of one structure of Miniature humidity sensor embodiment.Fig. 3 and Fig. 4
Respectively illustrate the sectional view and top view of two structure of Miniature humidity sensor embodiment.As shown in Figs 1-4, which passes
Sensor includes：Sensitive structure 1, supporting layer 2, cantilever beam 3, signal wire 4, frame 5 and substrate 6.Frame 5 is fixed on substrate 6；Branch
Support layer 2 is connect by cantilever beam 3 with frame 5；Sensitive structure 1 is fixed on supporting layer 2；Signal wire 4 is connect with sensitive structure 1,
And it is fixed on cantilever beam 3.
In one structure of Miniature humidity sensor embodiment of Fig. 1 and Fig. 2, substrate 6 is without patterned substrate, and frame 5 is
Cuboid, quantity are 2；In two structure of Miniature humidity sensor embodiment of Fig. 3 and Fig. 4, substrate 6 is that have patterned base
Bottom, frame 5 are prismatoids, and quantity is 2.In embodiment one and two, supporting layer 2 is cuboid, and cantilever beam 3 is long strip type, number
Amount is 2.Sensitive structure 1 is thermal resistance, diode or thermal resistance and diode, be can be one or more (>=2), it is multiple between be
Serial or parallel connection form.
In embodiment one and two, substrate 6 is conductor, semiconductor or insulator, can for metal, silicon, silicon carbide, quartz or
Sapphire.Frame 5 is insulator, or is covered with the conductor or semiconductor of dielectric material.Supporting layer 2 is made of dielectric material, can
Think silica, silicon nitride or the multilayer material being made of silica and silicon nitride.Cantilever beam 3 is made of dielectric material, can be with
For silica, silicon nitride or the multilayer material being made of silica and silicon nitride.Sensitive structure 1 can be metal when being thermal resistance
Or doped semiconductor, it can be silicon PN junction or hetero-junctions when being diode.Signal wire 4 is metal connecting line, can be aluminium, copper or
Gold.
In embodiment one and two, sensitive structure 1 is located at lower surface, centre or the upper surface of supporting layer 2.Signal wire 4 is located at
Lower surface, centre or the upper surface of cantilever beam 3.
Particularly, which is placed in humidity environment to be measured.Sensitive structure is given by signal wire 4
1 applies a constant current, and sensitive structure 1 increases since the fuel factor of electric current will lead to 2 temperature of supporting layer.Meanwhile air humidity
Thermal conductance supporting layer 2 can be made to have hot transmitting to ambient enviroment again, so that the temperature of supporting layer 2 is finally reached thermal balance.
Under different equilibrium temperatures, because there is temperature characterisitics for sensitive structure 1 itself, therefore the electrical signal of its output is by temperature shadow
It rings.Finally, the output voltage that sensitive structure 1 is measured by signal wire 4, just can reflect tested ambient humidity.
Miniature humidity sensor provided in an embodiment of the present invention, using the thermal conductivity effect measurement humidity of sensitive structure 1, therefore
It avoids to cause physically or chemically to measure change by the variation of moisture content in sensitive material and measure.Rapidly with response,
The small feature of hysteresis is conducive to promote device performance.
Miniature humidity sensor provided in an embodiment of the present invention, sensitive structure 1 is using thermal resistance, diode or thermal resistance and two poles
Pipe, quantity are one or more (>=2), it is multiple between be serial or parallel connection form.Add this means that sensitive structure 1 is used as simultaneously
Hot device and detector both change own temperature, while also obtaining corresponding electricity output at different temperatures, to reflect environmental wet
Degree.This structure that heater and detector is two-in-one is conducive to reduce device volume.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by those familiar with the art, all answers
It is included within the scope of the present invention.Therefore, protection scope of the present invention should be subject to the protection scope in claims.
Claims (14)
1. a kind of Miniature humidity sensor, which is characterized in that including：Sensitive structure, supporting layer, cantilever beam, signal wire, frame and
Substrate；Wherein,
The frame is fixed on substrate；
The supporting layer is connect by cantilever beam with frame；
The sensitive structure is fixed on supporting layer；
The signal wire is connect with sensitive structure, and is fixed on a cantilever beam.
2. Miniature humidity sensor according to claim 1, which is characterized in that the substrate is without graphical or have figure
The substrate of change.
3. Miniature humidity sensor according to claim 2, which is characterized in that the substrate is conductor, semiconductor or exhausted
Edge body.
4. Miniature humidity sensor according to claim 1, which is characterized in that the frame be cuboid, prismatoid or
Cylindrical structure, quantity are one or more.
5. Miniature humidity sensor according to claim 4, which is characterized in that the frame is insulator, or is covered with
The conductor or semiconductor of dielectric material.
6. Miniature humidity sensor according to claim 1, which is characterized in that the supporting layer is cuboid, square
Or cylindrical structure.
7. Miniature humidity sensor according to claim 6, which is characterized in that the supporting layer is made of dielectric material,
For silica, silicon nitride or the multilayer material being made of silica and silicon nitride.
8. Miniature humidity sensor according to claim 1, which is characterized in that the cantilever beam is long strip type, L-type or folding
Stack-type, quantity are one or more.
9. Miniature humidity sensor according to claim 8, which is characterized in that the cantilever beam is made of dielectric material,
For silica, silicon nitride or the multilayer material being made of silica and silicon nitride.
10. Miniature humidity sensor according to claim 1, which is characterized in that the sensitive structure is thermal resistance, diode
Or thermal resistance and diode.
11. Miniature humidity sensor according to claim 10, which is characterized in that the sensitive structure is one or more
It is a, it is multiple between be serial or parallel connection form.
12. Miniature humidity sensor described in 0 or 11 according to claim 1, which is characterized in that the sensitive structure is located at support
Lower surface, centre or the upper surface of layer.
13. Miniature humidity sensor according to claim 1, which is characterized in that the signal wire is metal connecting line.
14. Miniature humidity sensor according to claim 13, which is characterized in that the signal wire is located under cantilever beam
Surface, centre or upper surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811069136.2A CN108896612A (en) | 2018-09-13 | 2018-09-13 | Miniature humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811069136.2A CN108896612A (en) | 2018-09-13 | 2018-09-13 | Miniature humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108896612A true CN108896612A (en) | 2018-11-27 |
Family
ID=64359772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811069136.2A Pending CN108896612A (en) | 2018-09-13 | 2018-09-13 | Miniature humidity sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109717872A (en) * | 2018-12-19 | 2019-05-07 | 浙江大学 | Breathing detection sensor and its detection method based on piezoelectric cantilever |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142263A (en) * | 1994-12-29 | 1997-02-05 | 株式会社东金 | Humidity sensor |
| KR20010045356A (en) * | 1999-11-04 | 2001-06-05 | 구자홍 | Thin film type absolute humidity sensor |
| CN102243199A (en) * | 2011-04-20 | 2011-11-16 | 东南大学 | Relative humidity sensor of fast-response microelectronic mechanical system |
| CN103018289A (en) * | 2013-01-04 | 2013-04-03 | 东南大学 | Capacitive humidity sensor |
| CN108387341A (en) * | 2018-04-12 | 2018-08-10 | 昆山光微电子有限公司 | Micro vacuum meter and its working method |
-
2018
- 2018-09-13 CN CN201811069136.2A patent/CN108896612A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142263A (en) * | 1994-12-29 | 1997-02-05 | 株式会社东金 | Humidity sensor |
| KR20010045356A (en) * | 1999-11-04 | 2001-06-05 | 구자홍 | Thin film type absolute humidity sensor |
| CN102243199A (en) * | 2011-04-20 | 2011-11-16 | 东南大学 | Relative humidity sensor of fast-response microelectronic mechanical system |
| CN103018289A (en) * | 2013-01-04 | 2013-04-03 | 东南大学 | Capacitive humidity sensor |
| CN108387341A (en) * | 2018-04-12 | 2018-08-10 | 昆山光微电子有限公司 | Micro vacuum meter and its working method |
Non-Patent Citations (1)
| Title |
|---|
| BURAK OKCAN 等: "A Low-Power Robust Humidity Sensor in a Standard CMOS Process", 《IEEE TRANSACTIONS ON ELECTRON DEVICES》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109717872A (en) * | 2018-12-19 | 2019-05-07 | 浙江大学 | Breathing detection sensor and its detection method based on piezoelectric cantilever |
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Application publication date: 20181127 |