CN108848604A - A kind of portable micro-hollow cathode discharge plasma fluidic device - Google Patents

A kind of portable micro-hollow cathode discharge plasma fluidic device Download PDF

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Publication number
CN108848604A
CN108848604A CN201810791954.7A CN201810791954A CN108848604A CN 108848604 A CN108848604 A CN 108848604A CN 201810791954 A CN201810791954 A CN 201810791954A CN 108848604 A CN108848604 A CN 108848604A
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CN
China
Prior art keywords
cathode discharge
voltage
hollow
discharge electrode
fluidic device
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Pending
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CN201810791954.7A
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Chinese (zh)
Inventor
王瑞雪
邵涛
赵勇
章程
任成燕
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Institute of Electrical Engineering of CAS
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Institute of Electrical Engineering of CAS
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Priority to CN201810791954.7A priority Critical patent/CN108848604A/en
Publication of CN108848604A publication Critical patent/CN108848604A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/48Generating plasma using an arc
    • H05H1/481Hollow cathodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles

Abstract

The present invention relates to a kind of portable micro-hollow cathode discharge plasma fluidic devices, including microhollow cathode discharge electrode, excitation source module, gas supply module and insulation crust, above-mentioned microhollow cathode discharge electrode, excitation source module and gas supply module are wrapped in inside by the insulation crust, and the insulation crust front end is additionally provided with nozzle.The excitation source module includes the charged lithium cells being sequentially connected electrically, low-voltage DC voltage-stabilizing circuit, DC voltage booster circuit, high-voltage pulse generator and impedance matching circuit, wherein impedance matching circuit connects microhollow cathode discharge electrode, and gas supply module connection microhollow cathode discharge electrode is simultaneously directly powered by low-voltage DC voltage-stabilizing circuit.Portable micro-hollow cathode discharge plasma fluidic device of the present invention can get rid of rare gas gas supply problem using air as gas source, while be able to solve the problem of glow discharge is converted to arc discharge under hyperbar, generate air glow plasma.

Description

A kind of portable micro-hollow cathode discharge plasma fluidic device
Technical field
The present invention relates to a kind of portable micro-hollow cathode discharge plasma fluidic devices.
Background technique
Atmosphere cold plasma jet stream by gas flowing region of discharge is generated living radical, charged particle, High activity molecule and atom transport break through traditional cold equal plasmas limited space, in biomedical, material to region processed The fields such as modification, derived energy chemical are with a wide range of applications.The generation of atmosphere cold plasma not only needs external source (example Such as 220V industrial-frequency alternating current, signal trigger, high-tension cable corollary equipment) also need working gas supply (such as gas cylinder, matter Measure flowmeter, pressure reducing valve etc.).These complicated and necessary ancillary equipments limit the application of outdoor occasion or emergency case.
In recent years, the appearance of portable plasma fluidic device allows corona treatment easily to cope with various fields It closes.Portable plasma fluidic device on the market is broadly divided into power module, gas supply module, plasma and mould occurs Block.Module occurs for its plasma and power module determines the plasma characteristics of generation.
According to different application field, researcher has designed and has developed the plasma hair of a variety of different structures at present Raw module.Needle ring, bi-cyclic form medium barrier plasma jet stream high-voltage end and low-pressure end separated because of dielectric, have Effect avoids electric discharge from converting to electric arc, is conducive to the application extremely sensitive to temperature such as biomedical, sterilization.Chinese patent CN201410160831.5 discloses a kind of hand-held large area low temperature plasma generating device.Using porous disc electrode, And dielectric barrier discharge constitutes plasma discharge cells, while carrying out the array of multiple plasma jet devices. Not only safety and also can to avoid occur arc discharge.Chinese patent CN201710873449.2 disclose a kind of hand-held etc. from Daughter fluidic device, it is similar with previous patent, Jet stream array unit is formed using needle ring dielectric barrier discharge unit, blower mentions For air Gas flow rate, device is easy to carry about with one, and is not necessarily to external power supply.Although this dielectric barrier discharge plasma jet stream using Highly-safe but required excitation threshold is high.Portable plasma fluidic device often uses air as plasma and puts The working gas of electricity, excitation electric field strength threshold value needed for air is very high, dielectric barrier discharge unit can not excite air etc. from Daughter.Therefore module occurs for some plasmas using similar mediums barrier discharge form.Chinese patent CN201410236903.X discloses a kind of generation device of handheld portable sliding arc low temperature plasma, is able to use sky Gas, elementary gas or mixture are not necessarily to other stimulation devices as working gas, and equipment fault is few.Chinese patent CN201110391504.7 discloses a kind of Handheld plasma electric torch, using spininess bare electrode structure, is directly made with air For excited gas, but without blowning installation;It is boosted and is powered with DC, maximum power is up to 10W.Class dielectric barrier discharge for material at Strength of discharge and chemical characteristic are obviously reinforced when reason, but this discharge plasma is easily converted into arc discharge very much, are not suitable for people Body medical treatment.
Realize that the maximum obstacle of portable plasma fluidic device is exactly power module design.Necessary portion as device Point, numerous patents are using portable DC boosting, high-frequency and high-voltage alternating current source as driving source.Chinese patent 201210540793.7 open one kind can portable disinfection field application flashlight, the direct current that rechargeable battery is provided Pressure vibrated, boost after form High Level AC Voltage;Under direct current and ac-excited mode, a large amount of electric power consumption is heated in gas On, meanwhile, discharge space temperature is excessively high, and the electrode substance for sputtering or being evaporated is seriously polluted;Pulse excitation source then mentions significantly High electro-optical efficiency.Chinese patent 201710183836.3 discloses a kind of microsecond pulse plasma jet all-in-one machine dress It sets, the whole microsecond power module of device is integrated, the advantage with discharging efficiency height and device miniaturization, but whole device volume Greatly, inconvenient to carry.
Summary of the invention
Unreasonable, excitation volume source Pang is designed for discharge electrode existing for above-mentioned portable plasma fluidic device Greatly, the problems such as plasma gas temperature is high, the purpose of the present invention is to provide a kind of portable microhollow cathode discharge etc. from Daughter fluidic device, to expand atmosphere cold plasma outdoors or the application of outburst surroundings.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of portable micro-hollow cathode discharge plasma fluidic device, including microhollow cathode discharge electrode, excitation Source module, gas supply module and insulation crust, the insulation crust is by above-mentioned microhollow cathode discharge electrode, excitation source module and confession Gas module is wrapped in inside, and the insulation crust front end is additionally provided with nozzle;Wherein:
Microhollow cathode discharge electrode is the cone structure by anode, insulating layer and cathode up of three-layer;The anode position In internal layer, and inner hollow, form hollow tubular;The cathode is located at outer layer and is wrapped in entire microhollow cathode discharge electrode It is external;The insulating layer is located at centre and separates the anode and cathode and realize electric insulation;The nozzle is described The discharge aperture that the cone front end of microhollow cathode discharge electrode opens up, the discharge aperture is through microhollow cathode discharge electrode Anode, insulating layer and cathode;
The excitation source module includes the charged lithium cells being sequentially connected electrically, low-voltage DC voltage-stabilizing circuit, DC boosting electricity Road, high-voltage pulse generator and impedance matching circuit further include being electrically connected with the charged lithium cells for controlling charging The control circuit of lithium battery on-off switchs;The impedance matching circuit connects microhollow cathode discharge electrode;
Supplying module includes feeding pneumatic, and one end of the feeding pneumatic is connected to direct current air pump, the feeding pneumatic it is another The inner hollow pipe of one end connection anode;The direct current air pump is directly powered by low-voltage DC voltage-stabilizing circuit.
Further, the anode is hollow cylinder structure, and the central axes of the anode and microhollow cathode discharge are electric The central axes of pole are overlapped.
Further, the diameter of the discharge aperture is 0.05-0.8mm.
Further, the microhollow cathode discharge electrode is equipped with several, and several microhollow cathode discharge electrodes It is set side by side to form porous array glow discharge, each microhollow cathode discharge electrode is in series with a steady resistance.
Further, the charged lithium cells provide low-voltage direct source, and output voltage is 12V or 24V.
Further, high-voltage pulse generator by multiple switch mosfets connect the solid switch formed, energy-storage travelling wave tube and Pulse signal controller composition;Impedance matching circuit is made of capacitor and inductance.
Further, in the excitation source module, by the output electricity of low-voltage DC voltage-stabilizing circuit stability charged lithium cells Low-voltage DC is upgraded to high voltage direct current through DC voltage booster circuit, and charged for energy-storage travelling wave tube by pressure;Wherein the MOSFET is opened The duty ratio and frequency range for closing speed pulse waveform regulated, when solid switch conducting, energy-storage travelling wave tube passes through impedance matching electricity Road and microhollow cathode discharge electrode discharge energy in the form of pulsed discharge.
Further, wherein impedance matching circuit is made of capacitor and inductance.
Further, the operating voltage of the direct current air pump is 5V or 12V, and the gas flow rate of the feeding pneumatic is 0.5 ~5slm/min.
Further, the insulation crust is pistol type, cylinder, taper or ellipse;The material of the insulation crust For polytetrafluoroethylene (PTFE) or PMMA.
Further, when the insulation crust is pistol type, the insulation crust is equipped with insulated handle;The charging lithium Battery is equipped in insulated handle, and the control circuit switch is located on the outside of the insulated handle.
Beneficial effects of the present invention are:
Compared with conventional portable plasma producing apparatus, portable microhollow cathode discharge plasma of the present invention Body fluidic device is able to solve the problem of glow discharge is converted to arc discharge under hyperbar, generates air glow plasma. Device uses portable pulse excitation source, on the one hand avoids heating discharge gas, on the other hand influences Electron energy distribution, Increase high energy electron number and excitation coefficient, improves discharge power.Gas temperature can be down to room temperature, plasma active free radical It is abundant, it can be widely applied to the fields such as biomedicine, material, environmental protection and chemical defence.
Detailed description of the invention
Fig. 1 is portable micro-hollow cathode discharge plasma fluidic device structural schematic diagram of the present invention;
Fig. 2 is microhollow cathode discharge electrode structure schematic diagram of the present invention;
Wherein, 1- nozzle, 2- impedance matching circuit, 3- feeding pneumatic, 4- high-voltage pulse generator, 5- direct current air pump, 6- Charged lithium cells, 7- insulated handle, 8- control circuit switch, 9- low-voltage DC voltage-stabilizing circuit, 10- DC voltage booster circuit, 11- are exhausted Edge shell, 12- cathode, 13- anode, 14- insulating layer.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not For limiting the present invention.
A kind of portable micro-hollow cathode discharge plasma fluidic device, as shown in Figure 1, including microhollow cathode discharge Electrode, excitation source module, gas supply module and insulation crust 11.The insulation crust by above-mentioned microhollow cathode discharge electrode, swash It encourages source module and gas supply module is wrapped in inside.The insulation crust can be pistol type, cylinder, taper or ellipse, it is described The material of insulation crust is polytetrafluoroethylene (PTFE) or PMMA (polymethyl methacrylate).In the present embodiment, select outside the insulation Shell 11 is pistol type, and the insulation crust 11 is equipped with insulated handle 7, convenient for hand-held.
As shown in Fig. 2, microhollow cathode discharge electrode is the cone by 12 up of three-layer of anode 13, insulating layer 14 and cathode Structure.The anode 13 is located at internal layer, and inner hollow, forms hollow tubular.In the present embodiment, the anode 13 is open circles Rod structure, and the central axes of the anode 13 are overlapped with the central axes of microhollow cathode discharge electrode.The cathode 12 is located at outer Layer is simultaneously wrapped in entire microhollow cathode discharge electrode exterior.The insulating layer 14 is located at intermediate by the anode 13 and cathode 12 It separates and realizes electric insulation.It is equipped with nozzle in 11 front end of insulation crust, specifically, the nozzle 1 is in micro- sky The discharge aperture that the cone front end of the heart-yin pole discharge electrode opens up, the discharge aperture run through the anode of microhollow cathode discharge electrode 13, insulating layer 14 and cathode 12, and the diameter of the discharge aperture is 0.05-0.8mm.
According to practical application, such as to increase machining area, multiple microhollow cathode discharge electrodes can be set side by side with reality Existing hyperbar porous array glow discharge, and each microhollow cathode discharge electrode one steady resistance of series connection, limit single hole High current.
The excitation source module includes the charged lithium cells 6 being sequentially connected electrically, low-voltage DC voltage-stabilizing circuit 9, DC boosting Circuit 10, high-voltage pulse generator 4 and impedance matching circuit 2, control circuit switch 8 and the charged lithium cells 6 are electrically connected And the on-off for controlling charged lithium cells 6.The impedance matching circuit 2 connects microhollow cathode discharge electrode.The charging Lithium battery 6 is located in insulated handle 7.
High-voltage pulse generator 4 switchs series connection shape by multiple MOSFET (Metal-Oxide Semiconductor field effect transistor) At solid switch, energy-storage travelling wave tube and pulse signal controller composition.
The charged lithium cells 6 provide low-voltage direct source, and output voltage is 12V or 24V.Primary charging can support this hair Bright described portable micro-hollow cathode discharge plasma fluidic device continuous work ten more than hour.By low-voltage DC voltage-stabilizing Low-voltage DC is upgraded to high voltage direct current through DC voltage booster circuit 10 by the output voltage of 9 constant charge lithium battery 6 of circuit, and For energy-storage travelling wave tube charging.The pulse signal controller is equipped with the display screen of tangible control, and the display screen is embedded in insulation 11 surface of shell, by controlling the duty ratio and frequency range of the switch mosfet speed pulse waveform regulated, when solid is opened When closing conducting, energy-storage travelling wave tube is released energy by impedance matching circuit 2 and microhollow cathode discharge electrode in the form of pulsed discharge It puts.
Wherein impedance matching circuit 2 is made of capacitor and inductance, is caused with eliminating conducting wire and microhollow cathode discharge electrode Stray capacitance, optimize plasma jet discharge power.Entire portable microhollow cathode discharge plasma of the present invention Body fluidic device is not required to be grounded.
Supplying module includes feeding pneumatic 3, and one end of the feeding pneumatic 3 is connected to direct current air pump 5, the feeding pneumatic 3 The other end connection anode 13 inner hollow pipe.The direct current air pump 5 is directly powered by low-voltage DC voltage-stabilizing circuit 9, described The operating voltage of direct current air pump 5 is 5V or 12V.The gas flow rate of the feeding pneumatic 3 is 0.5~5slm/min.
Micro- hollow cathode (Micro-hollow Cathode, hereinafter referred to as MHC) is that one kind can generate at high pressure The electrode structure of micro discharge plasma, structure is made of the anode of arbitrary shape and micro- hollow cathode, according to hollow The certain theory of cathode pD value product (p refers to the air pressure of discharge gas component, and D refers to the inflated diameter of cathode), due to pore size In submillimeter magnitude, glow discharge under atmospheric pressure can be realized;On the other hand, the annular electrode structure of micro- hollow cathode makes Electronics is obtained under the action of cathode radial electric field, oscillatory process is realized, considerably increases the chance of ionization by collision, so this is put Very high electron density may be implemented in electricity;Meanwhile more massive electric discharge in order to obtain, usually processed in a planar cathode Multiple micropores realize the electric discharge of array micropore;Finally, due to which size is small, trigger voltage required for discharging is very low, usually only needs Want several kilovolts.The present invention is able to solve glow discharge under hyperbar and is converted to arc discharge based on micro- hollow cathode electrode The problem of, generate air glow plasma.Simultaneously using high-voltage pulse as driving source, air plasma can be effectively reduced The excitation electric field strength of jet stream.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (10)

1. a kind of portable micro-hollow cathode discharge plasma fluidic device, which is characterized in that including microhollow cathode discharge Electrode, excitation source module, gas supply module and insulation crust (11), the insulation crust (11) are electric by the microhollow cathode discharge Pole, excitation source module and gas supply module are wrapped in inside, and insulation crust (11) front end is additionally provided with nozzle (1);Wherein:
Microhollow cathode discharge electrode is the cone structure by anode (13), insulating layer (14) and cathode (12) up of three-layer;Institute It states anode (13) and is located at internal layer, and inner hollow, form hollow tubular;The cathode (12) is located at outer layer and is wrapped in entire micro- Hollow cathode discharge electrode exterior;The insulating layer (14) is located at centre and separates the anode (13) and cathode (12) simultaneously in fact Existing electric insulation;The nozzle (1) is the discharge aperture opened up in the cone front end of the microhollow cathode discharge electrode, described Discharge aperture runs through anode (13), insulating layer (14) and the cathode (12) of microhollow cathode discharge electrode;
The excitation source module includes the charged lithium cells (6) being sequentially connected electrically, low-voltage DC voltage-stabilizing circuit (9), DC boosting Circuit (10), high-voltage pulse generator (4) and impedance matching circuit (2) further include being electrically connected with the charged lithium cells (6) For control charged lithium cells (6) on-off control circuit switch (8);The impedance matching circuit (2) connects micro- hollow yin Pole discharge electrode;
Supplying module includes feeding pneumatic (3), and one end of the feeding pneumatic (3) is connected to direct current air pump (5), the feeding pneumatic (3) the inner hollow pipe of other end connection anode (13);The direct current air pump (5) is direct by low-voltage DC voltage-stabilizing circuit (9) Power supply.
2. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that described Anode (13) is hollow cylinder structure, and the central axes of the anode (13) and the central axes of microhollow cathode discharge electrode are heavy It closes.
3. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that described The diameter of discharge aperture is 0.05-0.8mm.
4. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that described Microhollow cathode discharge electrode is equipped with several, and several microhollow cathode discharge electrodes are set side by side to form porous array brightness Light electric discharge, each microhollow cathode discharge electrode are in series with a steady resistance.
5. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that described Charged lithium cells (6) provide low-voltage direct source, and output voltage is 12V or 24V.
6. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that its In:
High-voltage pulse generator (4) is connected the solid switch formed, energy-storage travelling wave tube and pulse signal control by multiple switch mosfets Device composition processed;
Impedance matching circuit (2) is made of capacitor and inductance.
7. portable micro-hollow cathode discharge plasma fluidic device according to claim 6, which is characterized in that in institute It states in excitation source module, by the output voltage of low-voltage DC voltage-stabilizing circuit (9) constant charge lithium battery (6), through DC boosting electricity Low-voltage DC is upgraded to high voltage direct current by road (10), and is charged for energy-storage travelling wave tube;Wherein the switch mosfet speed is adjusted The duty ratio and frequency range of impulse waveform, when solid switch conducting, energy-storage travelling wave tube passes through impedance matching circuit (2) and micro- sky The heart-yin pole discharge electrode discharges energy in the form of pulsed discharge.
8. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that described The operating voltage of direct current air pump (5) is 5V or 12V, and the gas flow rate of the feeding pneumatic (3) is 0.5~5slm/min.
9. portable micro-hollow cathode discharge plasma fluidic device according to claim 1, which is characterized in that described Insulation crust (11) is pistol type, cylinder, taper or ellipse;The material of the insulation crust (11) be polytetrafluoroethylene (PTFE) or PMMA。
10. portable micro-hollow cathode discharge plasma fluidic device according to claim 9, which is characterized in that when When the insulation crust (11) is pistol type, the insulation crust (11) is equipped with insulated handle (7);The charged lithium cells (6) Equipped in insulated handle (7), the control circuit switch (8) is located on the outside of the insulated handle (7).
CN201810791954.7A 2018-07-18 2018-07-18 A kind of portable micro-hollow cathode discharge plasma fluidic device Pending CN108848604A (en)

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Cited By (6)

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CN111107707A (en) * 2019-12-31 2020-05-05 河海大学常州校区 Corona sterilization device powered by storage battery
CN111148334A (en) * 2019-12-31 2020-05-12 河海大学常州校区 Portable dry cell power supply DC corona sterilizing pen
CN113198404A (en) * 2021-06-02 2021-08-03 华北电力大学(保定) Hollow cathode array discharge jet device
CN113399675A (en) * 2021-05-31 2021-09-17 南京苏曼生物医学科技有限公司 Handheld body surface sterilization and repair device cooperating with plasma and nano-silver spraying
CN114360341A (en) * 2021-12-02 2022-04-15 北京科技大学 Multi-mode switching plasma discharge experiment demonstration device and method
CN115235301A (en) * 2022-07-09 2022-10-25 南京理工大学 Ignition device and ignition method for low-power hollow cathode microplasma

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CN114360341B (en) * 2021-12-02 2022-12-06 北京科技大学 Multi-mode switching plasma discharge experiment demonstration device and method
CN115235301A (en) * 2022-07-09 2022-10-25 南京理工大学 Ignition device and ignition method for low-power hollow cathode microplasma

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