CN108844896A - A kind of slide mount for optical polish piece monitor station - Google Patents

A kind of slide mount for optical polish piece monitor station Download PDF

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Publication number
CN108844896A
CN108844896A CN201810815023.6A CN201810815023A CN108844896A CN 108844896 A CN108844896 A CN 108844896A CN 201810815023 A CN201810815023 A CN 201810815023A CN 108844896 A CN108844896 A CN 108844896A
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CN
China
Prior art keywords
monitor station
connecting rod
lantern ring
optical polish
slide mount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810815023.6A
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Chinese (zh)
Inventor
陆宇
江光成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Orbis Technology Co Ltd
Original Assignee
Hefei Orbis Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Orbis Technology Co Ltd filed Critical Hefei Orbis Technology Co Ltd
Priority to CN201810815023.6A priority Critical patent/CN108844896A/en
Publication of CN108844896A publication Critical patent/CN108844896A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a kind of slide mounts for optical polish piece monitor station, including monitor station, the top two sides of the monitor station are provided with two groups of guide rails, sliding block with matching is provided on the guide rail, bracket is provided at the top of the sliding block, sliding sleeve is provided on the bracket, connecting plate is provided between the side of the ipsilateral sliding sleeve, the side of the connecting plate and two stack clamping devices are provided with far from the side of the sliding sleeve, wherein, the sliding sleeve includes lantern ring, the top two sides of the lantern ring are provided with limit plate, limited post is set on the lantern ring and between limit plate, the side setting of the limited post is fluted, link block is provided in the groove, the side setting finite place piece of the side of the link block and the separate groove.Beneficial effect:Rationally, structure is simple, facilitates operation, is easily achieved, versatile for design.

Description

A kind of slide mount for optical polish piece monitor station
Technical field
The present invention relates to optical sheet detection technique field, it particularly relates to a kind of for optical polish piece monitor station Slide mount.
Background technique
Optical sheet needs to detect appearance, optical characteristics etc. after a polish, it is common practice to by optical polish piece It lies in a horizontal plane on monitor station, by manually or by instrument being detected.For example, being thrown using spectrophotometer to smalt When mating plate carries out spectral detection, it is first to lie in a horizontal plane in smalt polished silicon wafer on monitor station, then passes through the lifting of monitor station Mechanism by smalt polished silicon wafer vertical direction be elevated to the suitable vertical range of the camera lens of instrument, by manually moving horizontally indigo plant Glass polishing piece carries out full sheet spectral detection.The shortcomings that operation is:Smalt polished silicon wafer is direct contact monitor station on one side, During moving horizontally smalt polished silicon wafer, polished silicon wafer can be unavoidably polluted, or make to polished silicon wafer direct contact surface It at scratch, influences to detect quality and polished silicon wafer quality, especially for brittle optical polish thin slice, operate extremely difficult.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Summary of the invention
For the problems in the relevant technologies, the present invention proposes a kind of slide mount for optical polish piece monitor station, with Overcome above-mentioned technical problem present in existing the relevant technologies.
The technical proposal of the invention is realized in this way:
The top two sides of a kind of slide mount for optical polish piece monitor station, including monitor station, the monitor station are respectively provided with There are two groups of guide rails, sliding block with matching is provided on the guide rail, bracket is provided at the top of the sliding block, it is described It is provided with sliding sleeve on bracket, connecting plate, the side of the connecting plate are provided between the side of the ipsilateral sliding sleeve And two stack clamping devices are provided with far from the side of the sliding sleeve, wherein the sliding sleeve includes lantern ring, and the lantern ring It is arranged on the bracket, the top two sides of the lantern ring are provided with limit plate, are arranged on the lantern ring and between limit plate The side setting of limited post, the limited post is fluted, is provided with link block in the groove, the side of the link block and remote Finite place piece is arranged in side from the groove, and the bottom of the locating part passes through the institute of two sides at the top of shaft and the lantern ring Limit plate flexible connection is stated, the bottom side of the locating part is provided with spring, and the bottom of the spring and the lantern ring Top connection, wherein the clamping device includes fixed block, and the side of the fixed block is fixedly connected with the connecting plate, One middle side part of the fixed block is provided with telescopic rod, is provided with fixed link at the top and bottom of the fixed block side, and The side of the fixed link is provided with tilting bar, and the outside of the tilting bar is arranged with sleeve, the side on the sleeve It is provided with connecting rod one, and is to be flexibly connected between the connecting rod one and the sleeve, the side of the connecting rod one And the side far from the sleeve is flexibly connected with the side of connecting rod two, the side on the sleeve and the separate connecting rod One side is flexibly connected with the corner of L-type connecting rod, and one end of the side of the L-type connecting rod and the telescopic rod It is flexibly connected, the other side of the L-type connecting rod is flexibly connected with the other side of the connecting rod two, the connecting rod two Side and is flexibly connected with clamping bar far from the side of the connecting rod one, the side of the clamping bar and the separate connection The side of bar two is provided with clamping plate.
Further, the bottom of the monitor station is provided with anti-skid chequer.
Further, the appearance of the bracket is provided with graduation mark.
Further, stop collar is provided at the top of the bracket.
Further, one end of the tilting bar and one end of the fixed link is provided with limited block.
Further, V-groove is provided on the clamping plate.
Further, rubber pad is provided in the V-groove on the clamping plate.
Beneficial effects of the present invention:By being provided with clamping device, so that it can form water to optical polish piece Flat clamping avoids the prior art and optical polish piece is directly placed in the pollution for causing polished silicon wafer on monitor station or scratches polishing Piece;By being provided with sliding sleeve so that its can according to the use demand of user come the height to optical polish piece into Row is adjusted, so that its detection is more convenient;By the left and right sides setting guide rail on monitor station, passes through guide rail and slide company Bracket is connect, in conjunction with the clamping of clamping device, and realizes the clamping of different size or size optical polish piece, to give optical polish It is greatly convenient that the contactless full sheet detection of piece is brought.
In addition, by being provided with anti-skid chequer, so that it can play good antiskid effect, to effectively improve The shelf-stability of monitor station;By being provided with graduation mark, so that its height adjustment is more accurate;By being provided with Stop collar, to efficiently avoid the generation of sliding sleeve obscission;By being provided with rubber pad, so that it is effectively Reduce the damage to optical polish piece, so that its available better protection.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings Obtain other attached drawings.
Fig. 1 is a kind of structural representation of slide mount for optical polish piece monitor station according to an embodiment of the present invention Figure;
Fig. 2 is that the structure of sliding sleeve in a kind of slide mount for optical polish piece monitor station according to an embodiment of the present invention is shown It is intended to;
Fig. 3 is the structure of clamping device in a kind of slide mount for optical polish piece monitor station according to an embodiment of the present invention Schematic diagram.
In figure:
1, monitor station;2, guide rail;3, sliding block;4, bracket;5, sliding sleeve;6, connecting plate;7, clamping device;8, lantern ring;9, it limits Plate;10, limited post;11, groove;12, link block;13, locating part;14, shaft;15, spring;16, fixed block;17, telescopic rod; 18, fixed link;19, tilting bar;20, sleeve;21, connecting rod one;22, connecting rod two;23, L-type connecting rod;24, clamping bar; 25, clamping plate;26, anti-skid chequer;27, graduation mark;28, stop collar;29, limited block;30, rubber pad.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art's every other embodiment obtained belong to what the present invention protected Range.
According to an embodiment of the invention, providing a kind of slide mount for optical polish piece monitor station.
As shown in Figure 1-3, a kind of slide mount for optical polish piece monitor station according to an embodiment of the present invention, including Monitor station 1, the top two sides of the monitor station 1 are provided with two groups of guide rails 2, are provided on the guide rail 2 cooperating therewith Sliding block 3, the top of the sliding block 3 is provided with bracket 4, sliding sleeve 5, the ipsilateral sliding is provided on the bracket 4 It covers and is provided with connecting plate 6 between 5 side, the side of the side of the connecting plate 6 and the separate sliding sleeve 5 is provided with Two stack clamping devices 7, wherein the sliding sleeve 5 includes lantern ring 8, and the lantern ring 8 is set on the bracket 4, the lantern ring 8 top two sides are provided with limit plate 9, and limited post 10, the limited post 10 are arranged on the lantern ring 8 and between limit plate 9 Side setting fluted 11, be provided with link block 12 in the groove 11, the side of the link block 12 and far from described recessed Finite place piece 13 is arranged in the side of slot 11, and the bottom of the locating part 13 passes through shaft 14 and the 8 top two sides of lantern ring The limit plate 9 is flexibly connected, and the bottom side of the locating part 13 is provided with spring 15, and the bottom of the spring 15 and institute State the top connection of lantern ring 8, wherein the clamping device 7 includes fixed block 16, and the side of the fixed block 16 and the company Fishplate bar 6 is fixedly connected, and a middle side part of the fixed block 16 is provided with telescopic rod 17, the top and bottom of 16 side of fixed block Portion is provided with fixed link 18, and the side of the fixed link 18 is provided with tilting bar 19, and the outside of the tilting bar 19 is equal It is arranged with sleeve 20, the side on the sleeve 20 is provided with connecting rod 1, and the connecting rod 1 and the sleeve It is to be flexibly connected between 20, the side of the connecting rod 1 and the side and the one of connecting rod 2 22 far from the sleeve 20 Side is flexibly connected, the turning of the side on the sleeve 20 and the side far from the connecting rod 1 with L-type connecting rod 23 Place is flexibly connected, and the side of the L-type connecting rod 23 is flexibly connected with one end of the telescopic rod 17, the L-type connecting rod 23 other side is flexibly connected with the other side of the connecting rod 2 22, the side of the connecting rod 2 22 and the separate company The side of extension bar 1 is flexibly connected with clamping bar 24, the side of the clamping bar 24 and far from the connecting rod 2 22 one Side is provided with clamping plate 25.
With the aid of the technical scheme, by being provided with clamping device 7, so that it can form optical polish piece Level clamping, avoids the prior art and optical polish piece is directly placed in the pollution or scuffing for causing polished silicon wafer on monitor station 1 Polished silicon wafer;By being provided with sliding sleeve 5, so that it can be according to the use demand of user come the height to optical polish piece Degree is adjusted, so that its detection is more convenient;By the left and right sides setting guide rail 2 on monitor station 1, pass through guide rail 2 are slidably connected bracket 4, in conjunction with the clamping of clamping device 7, and realize the clamping of different size or size optical polish piece, thus It is greatly convenient to bring to the contactless full sheet detection of optical polish piece.
In addition, the bottom of the monitor station 1 is provided with anti-skid chequer 26, by being provided with anti-skid chequer 26, so that it can To play good antiskid effect, to effectively improve the shelf-stability of monitor station 1;The appearance of the bracket 4 is all provided with It is equipped with graduation mark 27, by being provided with graduation mark 27, so that its height adjustment is more accurate;The top of the bracket 4 It is provided with stop collar 28, by the way that restraining position ring block 28 is arranged, to efficiently avoid the generation of 5 obscission of sliding sleeve;Institute It states one end of tilting bar 19 and one end far from the fixed link 18 and is provided with limited block 29;It is provided on the clamping plate 25 V-groove;It is provided with rubber pad 30 in the V-groove on the clamping plate 25, by being provided with rubber pad 30, so that Which effectively reduces the damages to optical polish piece, so that its available better protection.
In conclusion by means of above-mentioned technical proposal of the invention, by being provided with clamping device 7, so that it can To form horizontal clamping to optical polish piece, avoids the prior art directly optical polish piece is placed on monitor station 1 and cause The pollution of polished silicon wafer scratches polished silicon wafer;By being provided with sliding sleeve 5, so that it can be according to the use demand of user The height of optical polish piece is adjusted, so that its detection is more convenient;Pass through the left and right sides on monitor station 1 Guide rail 2 is set, is slidably connected bracket 4 by guide rail 2, in conjunction with the clamping of clamping device 7, and realizes different size or size optics The clamping of polished silicon wafer, thus to optical polish piece the detection of contactless full sheet bring it is greatly convenient.
In addition, by being provided with anti-skid chequer 26, so that it can play good antiskid effect, to effectively mention The high shelf-stability of monitor station 1;By being provided with graduation mark 27, so that its height adjustment is more accurate;Pass through Restraining position ring block 28 is set, to efficiently avoid the generation of 5 obscission of sliding sleeve;By being provided with rubber pad 30, thus So which effectively reduces the damages to optical polish piece, so that its available better protection.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.

Claims (7)

1. a kind of slide mount for optical polish piece monitor station, which is characterized in that including monitor station(1), the monitor station (1)Top two sides be provided with two groups of guide rails(2), the guide rail(2)On be provided with sliding block with matching(3), institute State sliding block(3)Top be provided with bracket(4), the bracket(4)On be provided with sliding sleeve(5), the ipsilateral sliding sleeve (5)Side between be provided with connecting plate(6), the connecting plate(6)Side and far from the sliding sleeve(5)Side it is equal It is provided with two stack clamping devices(7), wherein the sliding sleeve(5)Including lantern ring(8), and the lantern ring(8)It is set in the branch Frame(4)On, the lantern ring(8)Top two sides be provided with limit plate(9), the lantern ring(8)Upper and limit plate(9)Between set Set limited post(10), the limited post(10)Side setting it is fluted(11), the groove(11)Inside it is provided with link block (12), the link block(12)Side and far from the groove(11)Side be arranged finite place piece(13), and the limit Part(13)Bottom pass through shaft(14)With the lantern ring(8)The limit plate of top two sides(9)It is flexibly connected, the limit Part(13)Bottom side be provided with spring(15), and the spring(15)Bottom and the lantern ring(8)Top connection, In, the clamping device(7)Including fixed block(16), and the fixed block(16)Side and the connecting plate(6)It is fixed to connect It connects, the fixed block(16)A middle side part be provided with telescopic rod(17), the fixed block(16)The top and bottom of side are equal It is provided with fixed link(18), and the fixed link(18)Side be provided with tilting bar(19), the tilting bar(19)It is outer Side is arranged with sleeve(20), the sleeve(20)On side be provided with connecting rod one(21), and the connecting rod one (21)With the sleeve(20)Between be flexibly connected, the connecting rod one(21)Side and far from the sleeve(20)'s Side and connecting rod two(22)Side be flexibly connected, the sleeve(20)On side and far from the connecting rod one(21)'s Side with L-type connecting rod(23)Corner be flexibly connected, and the L-type connecting rod(23)Side and the telescopic rod (17)One end be flexibly connected, the L-type connecting rod(23)The other side with the connecting rod two(22)The other side activity Connection, the connecting rod two(22)Side and far from the connecting rod one(21)Side and clamping bar(24)Activity is even It connects, the clamping bar(24)Side and far from the connecting rod two(22)Side be provided with clamping plate(25).
2. a kind of slide mount for optical polish piece monitor station according to claim 1, which is characterized in that the inspection Scaffold tower(1)Bottom be provided with anti-skid chequer(26).
3. a kind of slide mount for optical polish piece monitor station according to claim 1, which is characterized in that the branch Frame(4)Appearance be provided with graduation mark(27).
4. a kind of slide mount for optical polish piece monitor station according to claim 1, which is characterized in that the branch Frame(4)Top be provided with stop collar(28).
5. a kind of slide mount for optical polish piece monitor station according to claim 1, which is characterized in that described to incline Brace(19)One end and far from the fixed link(18)One end be provided with limited block(29).
6. a kind of slide mount for optical polish piece monitor station according to claim 1, which is characterized in that the folder Tight plate(25)On be provided with V-groove.
7. a kind of slide mount for optical polish piece monitor station according to claim 6, which is characterized in that the folder Tight plate(25)On the V-groove in be provided with rubber pad(30).
CN201810815023.6A 2018-07-24 2018-07-24 A kind of slide mount for optical polish piece monitor station Pending CN108844896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810815023.6A CN108844896A (en) 2018-07-24 2018-07-24 A kind of slide mount for optical polish piece monitor station

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810815023.6A CN108844896A (en) 2018-07-24 2018-07-24 A kind of slide mount for optical polish piece monitor station

Publications (1)

Publication Number Publication Date
CN108844896A true CN108844896A (en) 2018-11-20

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CN201810815023.6A Pending CN108844896A (en) 2018-07-24 2018-07-24 A kind of slide mount for optical polish piece monitor station

Country Status (1)

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CN (1) CN108844896A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102798593A (en) * 2012-07-18 2012-11-28 京东方科技集团股份有限公司 Optical test system
CN103659657A (en) * 2013-11-30 2014-03-26 南通环球光学仪器有限公司 Glass clamping device
ES2561665A1 (en) * 2014-09-15 2016-02-29 Universidad De Jaén Universal support for topographic targets and plates (Machine-translation by Google Translate, not legally binding)
US20160377961A1 (en) * 2013-12-16 2016-12-29 Carson Optical, Inc. Self-centering mechanism, a clamping device for an electronic device and means for their integration
CN106842474A (en) * 2017-02-21 2017-06-13 苏州艾力光电科技有限公司 A kind of optics clamping device
CN207053773U (en) * 2017-07-21 2018-02-27 盐城宝丰磁电有限公司 A kind of loudspeaker for being easy to adjust height
CN107984407A (en) * 2016-08-22 2018-05-04 徐勤凤 Adjustable clamper
CN108080869A (en) * 2017-12-28 2018-05-29 陕西专壹知识产权运营有限公司 A kind of clamping device of laser cutting machine

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102798593A (en) * 2012-07-18 2012-11-28 京东方科技集团股份有限公司 Optical test system
CN103659657A (en) * 2013-11-30 2014-03-26 南通环球光学仪器有限公司 Glass clamping device
US20160377961A1 (en) * 2013-12-16 2016-12-29 Carson Optical, Inc. Self-centering mechanism, a clamping device for an electronic device and means for their integration
ES2561665A1 (en) * 2014-09-15 2016-02-29 Universidad De Jaén Universal support for topographic targets and plates (Machine-translation by Google Translate, not legally binding)
CN107984407A (en) * 2016-08-22 2018-05-04 徐勤凤 Adjustable clamper
CN106842474A (en) * 2017-02-21 2017-06-13 苏州艾力光电科技有限公司 A kind of optics clamping device
CN207053773U (en) * 2017-07-21 2018-02-27 盐城宝丰磁电有限公司 A kind of loudspeaker for being easy to adjust height
CN108080869A (en) * 2017-12-28 2018-05-29 陕西专壹知识产权运营有限公司 A kind of clamping device of laser cutting machine

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Application publication date: 20181120

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