CN108827443B - Preparation method of lateral sparse target for ultrahigh pressure sound velocity measurement - Google Patents
Preparation method of lateral sparse target for ultrahigh pressure sound velocity measurement Download PDFInfo
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- CN108827443B CN108827443B CN201810628453.7A CN201810628453A CN108827443B CN 108827443 B CN108827443 B CN 108827443B CN 201810628453 A CN201810628453 A CN 201810628453A CN 108827443 B CN108827443 B CN 108827443B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H5/00—Measuring propagation velocity of ultrasonic, sonic or infrasonic waves, e.g. of pressure waves
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Abstract
The invention discloses a preparation method of a lateral sparse target for ultrahigh pressure sound velocity measurement, which is characterized in that very thin samples are overlapped into a sufficient thickness and are glued into a whole, then the side surface of the whole is optically processed and polished, and finally the polished whole is processed and used in a slicing mode, so that the side surface (along the thickness direction) polishing treatment of a sheet sample with micron-sized thickness can be realized, the error is small, the problem that the intersection line between the side surface of the sample and the upper plane and the lower plane of the sample generates a large defect due to the fact that the sheet sample is directly processed and polished in the prior art is avoided, and the experimental requirements of ultrahigh pressure sound velocity measurement cannot be met.
Description
Technical Field
The invention relates to the field of ultrahigh pressure sound velocity measurement, in particular to a preparation method of a lateral sparse target for ultrahigh pressure sound velocity measurement.
Background
The response characteristic of the material under high pressure has important significance for a plurality of physical research fields such as earth and planet physics, inertial confinement fusion, modeling of the first-nature principle and the like. In various representations of response characteristics of the material, the sound velocity reflects the propagation characteristics of small stress disturbance in a medium, carries various modulus information of the material, is a mechanical property of the material in a certain thermodynamic state, and is an important means for researching a state equation, a constitutive relation, phase change (including solid-solid phase change) and material composition of the material. For most transparent materials, when the pressure reaches several Mbar to dozens of Mbar, the state after the shock wave is a fluid state, the dielectric also has insulator-metal phase transition, the sound velocity is equivalent to the bulk sound velocity, for the transparent medium, the shock wave front shows high reflectivity, and the velocity interferometer can directly measure the shock wave velocity.
Under the condition of meeting the one-dimensional plane impact loading, lateral sparsity (sound wave) is introduced through the design of the target, and then the shock wave surface can be bent on the sparse side surface. The use of a line imaging VISAR (arbitrary reflecting surface velocity interferometer) system to realize the historical measurement of the velocity of a shock wave front has become a common means in the field of shock dynamics, but other information carried by the line imaging VISAR system has been ignored for a long time. When the parameter f of the line imaging VISAR objective lens is larger, the return light of the detection light cannot enter the imaging lens due to the tiny inclination of the emitting surface, so that the signal is lost, and just when the shock wave is bent, the bent part does not have a reflection signal on the image surface, so that the lateral displacement of the boundary of the plane shock wave along with the time can be measured in a recording system. The displacement data reflects the process of lateral small disturbance propagation after the shock wave and can be directly related to the shock wave velocity, so that a continuous sound velocity change curve on a main shock adiabatic line is obtained.
The above-mentioned techniques have very high requirements on the physical target, mainly by introducing rarefaction waves transversely to the propagation direction of the shock wave, the most direct method being to let the shock wave pass out of the substrate, partly into the sample and partly into a low impedance (relative to the sample) vacuum: that is, the sample covers only a part of the substrate, and the side edge of the sample is perpendicular to the plane of the substrate, so that a sample with one side edge perpendicular to two planes of the thin sample and accurate polishing without edge breakage needs to be processed; for a long time, no target-making technology mentions polishing treatment in the thickness direction of a sheet with a micron-sized thickness; the classical optical processing method generally uses mechanical cutting or laser cutting to process the boundary of an ultrathin sample, but the processing method cannot meet the requirements of experiments.
Disclosure of Invention
In order to solve the technical problems of poor polishing precision of ultrathin samples in the thickness direction and the like in the prior art, the invention provides a preparation method of a lateral sparse target for ultrahigh pressure sound velocity measurement, the preparation method can realize polishing treatment of micron-sized thin slice samples in the thickness direction, and the defect size of the intersection line of the side face of the sample and the upper plane and the lower plane of the sample is ensured to be not more than 1% of the thickness of the sample.
The invention is realized by the following technical scheme:
a preparation method of a lateral sparse target for ultrahigh pressure sound velocity measurement comprises the following steps:
step one, processing a transparent material into n sheet samples with the thickness of d;
step two, preliminarily processing n thin slice samples with the thickness d into a size which is 1-2 times larger than the design value of the samples;
step three, overlapping and packaging the n slice samples subjected to the primary processing in the step two into a whole;
cutting the whole packaged n sheet samples from the middle in the direction vertical to the plane of the samples;
step five, grinding and polishing the side surface cut from the middle in the direction vertical to the plane of the sample in the step four, and detecting whether the side surface meets the requirement;
step six, if the side surface meets the requirements, the n slice samples processed in the step five are subjected to slice processing on the whole; otherwise, repeating the step five;
step seven, taking out the sheet samples close to the middle positions in the whole n sheet samples, and cleaning and airing the sheet samples;
and step eight, detecting the slice sample cleaned and dried in the step seven, and if the slice sample is qualified, performing subsequent processing to obtain a lateral sparse target for ultrahigh-pressure sound velocity measurement.
Specifically, the step three of packaging and fixing the n sheet samples into a whole specifically includes: for thin sheet samples of hard material, n processed thin sheet samples were stacked together: every two layers are adhered by glue, and are clamped by a clamp capable of ensuring that two surfaces are parallel, and the n sheet samples are fixed into a whole after each layer is added for clamping; or, for a thin sheet sample of soft material, n processed thin sheet samples are stacked together: the n thin slice samples are clamped and fixed into a whole by directly adopting a clamp capable of ensuring that two surfaces are parallel.
Specifically, the slicing treatment of the whole n slice samples in the sixth step includes: for a hard material slice sample, putting the processed slice sample into an organic solvent vessel for soaking until the encapsulated glue is completely released; and (3) for the sheet sample of the soft material, removing the clamp of the whole processed sheet sample.
Specifically, d is 30-1000 mu m, the thickness uniformity of the n thin sheet samples is less than 1%, and the parallelism is superior to 0.01.
Specifically, in the fifth step, the side surface is processed, including grinding, rough polishing and fine polishing.
Specifically, in the step eight, the detection of the flake sample includes the detection by using a microscope.
The invention has the following advantages and beneficial effects:
according to the preparation method of the lateral sparse target, the extremely thin samples are overlapped into a whole with enough thickness, the samples are glued into the whole, then the side face of the whole is optically processed and polished, and finally the polished whole is processed and used in a slicing mode, so that the side face (along the thickness direction) polishing treatment of the sheet sample with the micron-sized thickness can be realized, a plurality of samples can be processed and finished at one time, the error is small, the problem that the intersection line of the side face of the sample and the upper plane and the lower plane of the sample generates a large defect due to the fact that the sheet sample is directly processed and polished in the prior art is solved, and the experimental requirements of ultrahigh pressure sound velocity measurement cannot be met.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a flow chart of the preparation method of the present invention.
FIG. 2 is a test chart of a sample prepared by the preparation method of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Examples
As shown in fig. 1, a method for preparing a lateral sparse target for ultra-high pressure sound velocity measurement includes the following steps:
s01, processing the transparent material into n sheet samples with the thickness d; according to the physical experiment requirements and the laser loading capacity, the thickness d is generally between 30 and 1000 mu m, the uniformity requirement of the thickness of the sample is less than 1 percent, and the parallelism is superior to 0.01.
And S02, preliminarily processing the n thin sheet samples with the thickness d into a size which is 1-2 times larger than the design value of the samples.
S03, for a slice sample of hard material (such as diamond, quartz, magnesium oxide, magnesium silicate and other materials), overlapping and packaging n processed slice samples one by one, wherein each two layers are adhered by glue in the overlapping and packaging process and are clamped by a clamp capable of ensuring that two surfaces are parallel, and each overlapping slice is clamped once until the n processed slice samples are packaged into a whole (the clamp on the layer can be detached or retained after each layer of packaging is finished, and the clamp is the same as the sample material); or, for a sheet sample of a soft material (such as organic thin film materials of polystyrene, polyethylene, and the like), stacking and packaging n processed sheet samples one by one: n processed slice samples are overlapped together, and the n slice samples are clamped and fixed into a whole by directly adopting a clamping plate capable of ensuring that two surfaces are parallel for subsequent treatment (in the subsequent treatment process, the clamping plate always keeps a clamping state, and the material of the clamping plate is the same as that of the sample).
S04, cutting the whole packaged n sheet samples from the middle and the direction vertical to the sample plane to obtain the side surfaces of the sheet samples;
s05, grinding, rough polishing and fine polishing the side surface cut from the direction vertical to the sample plane in the step S04, and detecting whether the processed side surface meets the requirement under a microscope; as shown in the processed side detection diagram of fig. 2, data processing (using the intersection line between the side of the sample and its upper and lower planes, i.e. the ratio of 1/2 of the sum of the widths of the peaks on fig. 2 to the thickness d of the sample to characterize the defect of the sample) can obtain that the defect size at the intersection line between the side of the sheet sample near the middle position in the whole sample and its upper and lower planes is 3.5% of the thickness of the sample, and not more than 4% of the thickness of the sample, which meets the requirement;
s06, if the processed side surface meets the requirement, the processed sheet sample is wholly put into an organic solvent vessel for soaking until the encapsulated glue is completely released (if the clamp is provided, the clamp needs to be removed); or, for the sheet sample of the soft material, the fixture of the whole processed sheet sample is removed; otherwise, repeating the step S05;
s07, taking out the sheet sample close to the middle position in the whole n sheet samples, and cleaning and airing the sheet sample;
s08, detecting the slice sample cleaned and dried in the step S07 (detecting by using a microscope), and if the slice sample is qualified, performing subsequent processing to prepare a lateral sparse target for ultrahigh-pressure sound velocity measurement; and if not, discarding.
The preparation method of the lateral sparse target for the ultrahigh pressure sound velocity measurement can realize the polishing treatment in the thickness direction of a micron-sized sheet sample and ensure that the size of a defect at the intersection line of the side surface of the sample and the upper plane and the lower plane of the sample is not more than 4% of the thickness of the sample.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A preparation method of a lateral sparse target for ultrahigh pressure sound velocity measurement is characterized by comprising the following steps:
step one, processing a transparent material into n sheet samples with the thickness of d;
step two, preliminarily processing n thin slice samples with the thickness d into a size which is 1-2 times larger than the design value of the samples;
step three, overlapping and packaging the n slice samples subjected to the primary processing in the step two into a whole, and specifically comprising the following steps: for thin sheet samples of hard material, n processed thin sheet samples were stacked together: every two layers are adhered by glue, and are clamped by a clamp capable of ensuring that two surfaces are parallel, and the n sheet samples are fixed into a whole after each layer is added for clamping; or, for a thin sheet sample of soft material, n processed thin sheet samples are stacked together: directly clamping and fixing n sheet samples into a whole by adopting a clamp capable of ensuring that two surfaces are parallel;
cutting the whole packaged n sheet samples from the middle in the direction vertical to the plane of the samples;
step five, grinding and polishing the side surface cut from the middle in the direction vertical to the plane of the sample in the step four, and detecting whether the side surface meets the requirement;
step six, if the side surface meets the requirements, the n slice samples processed in the step five are subjected to slice processing on the whole; otherwise, repeating the step five;
step seven, taking out the sheet samples close to the middle positions in the whole n sheet samples, and cleaning and airing the sheet samples;
and step eight, detecting the slice sample cleaned and dried in the step seven, and if the slice sample is qualified, performing subsequent processing to obtain a lateral sparse target for ultrahigh-pressure sound velocity measurement.
2. The method for preparing the lateral sparse target for the ultra-high pressure sound velocity measurement according to claim 1, wherein the step six of slicing the whole of the n slice samples comprises: for a hard material slice sample, putting the processed slice sample into an organic solvent vessel for soaking until the encapsulated glue is completely released; and (3) for the sheet sample of the soft material, removing the clamp of the whole processed sheet sample.
3. The method for preparing the lateral sparse target for the ultrahigh-pressure sound velocity measurement according to claim 1, wherein d is 30-1000 μm, the thickness uniformity of the n thin sheet samples is less than 1%, and the parallelism is better than 0.01.
4. The method for preparing the lateral sparse target for the ultrahigh-pressure sound velocity measurement according to claim 1, wherein in the fifth step, the side surface is processed, and the processing comprises grinding, rough polishing and fine polishing.
5. The method for preparing the lateral sparse target for the ultrahigh-pressure sound velocity measurement according to claim 1, wherein in the step eight, the thin slice sample is detected by using a microscope.
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| CN108827443B true CN108827443B (en) | 2020-07-28 |
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Citations (4)
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| CN203210147U (en) * | 2013-05-04 | 2013-09-25 | 蓝思科技（长沙）有限公司 | Polishing clamp for straight edges of plurality pieces of glasses |
| CN105115795A (en) * | 2015-07-20 | 2015-12-02 | 北京大学 | Preparation method of micron-size sheet transmission electron microscope cross-sectional sample |
| KR20180039517A (en) * | 2016-10-10 | 2018-04-18 | 강흥석 | Laminated sheet grinding apparatus and laminated sheet grinding method |
| CN108044483A (en) * | 2017-12-29 | 2018-05-18 | 广州珠江恺撒堡钢琴有限公司 | Anyhow the automatic polishing machine and its polishing method of side workpiece |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203210147U (en) * | 2013-05-04 | 2013-09-25 | 蓝思科技（长沙）有限公司 | Polishing clamp for straight edges of plurality pieces of glasses |
| CN105115795A (en) * | 2015-07-20 | 2015-12-02 | 北京大学 | Preparation method of micron-size sheet transmission electron microscope cross-sectional sample |
| KR20180039517A (en) * | 2016-10-10 | 2018-04-18 | 강흥석 | Laminated sheet grinding apparatus and laminated sheet grinding method |
| CN108044483A (en) * | 2017-12-29 | 2018-05-18 | 广州珠江恺撒堡钢琴有限公司 | Anyhow the automatic polishing machine and its polishing method of side workpiece |
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