CN108801513B - Flexible stress sensor based on nanowire bound conductive liquid film and preparation method thereof - Google Patents
Flexible stress sensor based on nanowire bound conductive liquid film and preparation method thereof Download PDFInfo
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- CN108801513B CN108801513B CN201710312772.2A CN201710312772A CN108801513B CN 108801513 B CN108801513 B CN 108801513B CN 201710312772 A CN201710312772 A CN 201710312772A CN 108801513 B CN108801513 B CN 108801513B
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Abstract
The invention discloses a flexible stress sensor based on a nanowire bound conductive liquid film and a preparation method thereof, wherein the flexible stress sensor comprises a silicon rubber substrate with a cluster nanowire structure on the surface, and bound ionic liquid in the cluster nanowire structure is used as the conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm. The flexible stress sensor of the invention has the following advantages: the ionic liquid has no abrasion in the stretching process, and has ultrahigh fatigue resistance: after more than 22500 repeated stretching experiments with stretching ratios from 0% to 100%, the sensor can still maintain good performance; the large stretching range can detect 200% of deformation at most; the minimum stretching can detect deformation of 0.3 percent; the preparation process is simple and the cost is low.
Description
Technical Field
The invention relates to a flexible stress sensor preparation process, in particular to a flexible stress sensor based on a nanowire bound conductive liquid film and a preparation method thereof.
Background
With the rapid development of artificial intelligence technology, the requirements of human beings on human-computer communication are increasing day by day, and artificial flexible electronic devices with perception functions of simulating human touch, smell, hearing, vision and the like occupy an extremely important position in the revolution. Due to the advantages of the flexible stress sensor in the aspects of pulse detection, heartbeat detection and the like, the flexible stress sensor has wide application prospect in the field of medical health and becomes the core component of an artificial flexible electronic device. At present, the mainstream way of manufacturing the tension sensor is to convert the deformation of the sensor into the change of the resistance value during the stretching process. One of the methods is to fill a conductive substance, such as Ag nanowires, carbon powder, metal particles, and the like, in a polymer, thereby obtaining a conductive elastomer. Another method is to embed or stack conductive structures, such as aligned single-walled carbon nanotubes, a composite of a conductive polymer and carbon nanotubes, and a metal film, on a flexible substrate, thereby obtaining a tension sensor having a multi-layered structure. However, such sensors have two significant disadvantages during use: poor fatigue resistance and unstable electrical signals have become significant problems that limit the industrialization of such sensors. Studies have shown that these two disadvantages arise from: the cracks generated in the solid conducting layer are not recoverable in the continuous stretching and shrinking circulation process; the solid conductive substances are continuously worn away during mutual rubbing.
Disclosure of Invention
The invention aims to: the flexible stress sensor has ultrahigh fatigue resistance, is simple in preparation process, and remarkably improves the fatigue resistance of the flexible stress sensor.
In order to achieve the purpose, the invention adopts the following technical scheme:
according to the invention, the ionic liquid is bound in the cluster nanowire structure, and the liquid ionic liquid is used as a conductive substance, so that the fatigue resistance of the sensor is improved.
The specific technical scheme of the invention is as follows:
a flexible stress sensor based on nanowire bound conductive liquid film comprises a silicon rubber substrate with a cluster nanowire structure on the surface, wherein ionic liquid is bound in the cluster nanowire structure to serve as the conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm.
The invention also provides a preparation method of the flexible stress sensor based on the nanowire bound conductive liquid film, which comprises the following steps:
1) preparing a liquid prepolymer mixed solution: mixing the silicone oligomer, the cross-linking agent and the modifying agent;
2) preparing a silicon rubber substrate with cluster nanowire structures: dripping the liquid prepolymer mixed liquid obtained in the step 1) on a template with nano holes for polymerization, crosslinking and curing reaction, and then soaking the liquid prepolymer mixed liquid in 70-90 ℃ corrosive liquid for 2-20 hours to remove the template;
3) preparing an ionic liquid mixed solution: dissolving the ionic liquid in a low-boiling-point volatile organic solvent (such as ethanol);
4) preparing a uniform conductive liquid film: dropwise adding the ionic liquid mixed solution prepared in the step 3) with a quantitative volume on the surface of the silicon rubber substrate obtained in the step 2);
5) forming a flexible stress sensor based on a nanowire bound conductive liquid film: and (3) standing the silicon rubber substrate with the ionic liquid mixed solution dropwise added on the surface obtained in the step 4) at room temperature to volatilize the low-boiling-point volatile organic solvent.
Preferably, the organic silicon oligomer is polydimethylsiloxane with a polymerization degree of 10-200 and a terminal vinyl group; the cross-linking agent is methyl-terminated polydimethylsiloxane; the modifier is an ethoxy polyethyleneimine aqueous solution with the concentration of 35-40 wt%.
Preferably, the silicone oligomer: a crosslinking agent: the proportion of the modifier is (5-10g): (0.5-1g): 10-40 muL.
Preferably, the template with the nano-pores is one of an anodized aluminum template, a porous silicon template and a PET plastic template, the depth of the nano-pores is 300nm-6 μm, and the pore diameter is 30-400 nm.
Preferably, the concentration of the ionic liquid mixed solution is 0.001mg/mL-0.1 mg/mL; the ionic liquid is hydrophobic ionic liquid.
Preferably, the hydrophobic ionic liquid is one of 1-butyl-3-methylimidazole bis (trifluoromethanesulfonyl) imide salt, 1-hexyl-3-methylimidazole tetrafluoroborate, 1-octyl-3-methylimidazole bis (trifluoromethanesulfonyl) imide salt and 1-hexyl-3-methylimidazole hexafluorophosphate.
Preferably, the quantification volume of step 4) is 25-250. mu.L.
The method of the invention, wherein the preferred volatilization time of the step 5) is 0.5-2 hours, and the preferred temperature is 10-70 ℃.
According to the invention, the template is used for introducing the cluster nanowire structure on the silicon rubber substrate, and the ionic liquid for binding the liquid is used as the conductive layer, so that the fatigue resistance of the flexible stress sensor is greatly improved. The sensor of the invention requires the uniform distribution of the ionic liquid conducting layer on the surface, namely the ethanol solution of the ionic liquid needs to reach super-hydrophilicity (contact angle is less than 5 degrees) on the surface of the substrate, so as to improve the stability of the sensor. The flexible stress sensor of the invention has the following advantages: the ionic liquid has no abrasion in the stretching process, and has ultrahigh fatigue resistance: after more than 22500 repeated stretching experiments with stretching ratios from 0% to 100%, the sensor can still maintain good performance; the large stretching range can detect 200% of deformation at most; the minimum stretching can detect deformation of 0.3 percent; the preparation process is simple and the cost is low.
Drawings
FIG. 1 is a surface texture microscopic image of a flexible stress sensor of the present invention;
FIG. 2 is a contact angle of the mixed solution in example 1 on a silicone rubber substrate having a nanowire length of 4 μm;
FIG. 3 is a graph showing the effect of nanowire length on the contact angle of a mixed solution for a substrate prepared in example 1;
FIG. 4 is the effect of different nanowire lengths on the sensor performance of the stress sensor surface prepared in example 1;
FIG. 5 is a graph of the maximum strain of the stress sensor prepared in example 1 as a function of nanowire length;
FIG. 6 shows the gradient tension of the sensor prepared in example 1 when the nanowire length is 4 μm;
FIG. 7 is a graph showing the minimum elongation detected by the sensor when the nanowire prepared in example 1 has a length of 4 μm;
FIG. 8 shows the fatigue resistance of the sensor prepared in example 1 when the nanowire length is 4 μm;
FIG. 9 shows the surface topography of the sensor at different stretching ratios when the nanowire length is 4 μm in example 1.
Detailed Description
The technical solution of the present invention will be further described with reference to the following examples.
Example 1
According to the invention, an anodic alumina template (the depth of a nano hole is 300nm-6 mu m, the aperture is 30-400nm) is used for introducing a cluster nanowire structure on a silicon rubber substrate, so that the ionic liquid for binding the liquid is used as a conductive liquid film layer, and the purpose of obviously improving the fatigue resistance of the sensor is achieved. The method comprises the following specific steps:
(1) taking 10g of organic silicon oligomer, 1g of cross-linking agent and 30 mu L of modifying agent, and uniformly stirring and mixing, wherein the organic silicon oligomer is vinyl-terminated polydimethylsiloxane with the polymerization degree of 10-200; the cross-linking agent is methyl-terminated polydimethylsiloxane; the modifier is an ethoxy polyethyleneimine aqueous solution with the concentration of 35-40 wt%;
(2) dripping a small amount of the obtained mixture on an anodic alumina template, standing for half an hour, carrying out polymerization crosslinking curing reaction for 4 hours at the temperature of 110 ℃, and then soaking the anodic alumina template in 70-90 ℃ corrosive liquid for 2-4 hours to remove the template, thereby obtaining the silicon rubber substrate with the cluster nanowire structure on the surface;
(3) dissolving 0.50mg of 1-butyl-3-methylimidazolium bistrifluoromethanesulfonimide salt in 50mL of ethanol, and shaking up to obtain a mixed solution;
(4) dripping 25 μ L of the above mixed solution onto the above silicon rubber substrate, and rapidly spreading to obtain uniform liquid film (see FIG. 2);
(5) the materials are kept stand for 1.5 hours at room temperature, a layer of uniform ionic liquid film is formed on the surface of a substrate after ethanol is volatilized, and the sensor (shown as figure 1) is successfully prepared, wherein as can be seen from figure 1, the flexible stress sensor comprises a silicon rubber substrate with a cluster nanowire structure on the surface, and ionic liquid is bound in the cluster nanowire structure to serve as a conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm.
Fig. 2 is a contact angle of the mixed solution on a silicone rubber substrate having a nanowire length of 4 μm prepared in example 1. Fig. 3 is a graph showing the effect of the nanowire length of the substrate on the contact angle of the mixed solution prepared by the method of example 1. FIG. 4 is the effect of different nanowire lengths on the sensor performance of the stress sensor surface prepared by the method in example 1. Fig. 5 shows the maximum tensile of the stress sensor prepared by the method of example 1 as a function of the nanowire length. FIG. 6 shows the gradient tension of the sensor when the nanowire length is 4 μm, which is prepared by the method of example 1. FIG. 7 is a graph showing the minimum extension detected by the sensor when the nanowire length is 4 μm prepared by the method of example 1. FIG. 8 shows the fatigue resistance of the sensor when the nanowire length is 4 μm, prepared by the method of example 1. FIG. 9 shows the surface topography of the sensor prepared by the method of example 1 at different stretch ratios (0% -200%) for nanowires with a length of 4 μm. As can be seen from the above figures, the above product significantly improves the fatigue resistance of the flexible stress sensor, and has a large detection stretch range and an extremely small minimum stretch detection.
Example 2
According to the invention, a porous silicon template (the depth of a nano hole is 300nm-6 mu m, the aperture is 30-400nm) is used for introducing a cluster nanowire structure on a silicon rubber substrate, so that the ionic liquid for binding the liquid is used as a conductive layer, and the aim of obviously improving the fatigue resistance of the sensor is achieved. The method comprises the following specific steps:
(1) taking 10g of organic silicon oligomer, 0.5g of cross-linking agent and 40 mu L of modifying agent, and uniformly stirring and mixing, wherein the organic silicon oligomer is vinyl-terminated polydimethylsiloxane with the polymerization degree of 10-200; the cross-linking agent is methyl-terminated polydimethylsiloxane; the modifier is an ethoxy polyethyleneimine aqueous solution with the concentration of 35-40 wt%;
(2) dripping a small amount of the obtained mixture on a porous silicon template, standing for half an hour, carrying out polymerization crosslinking curing reaction for 4 hours at the temperature of 110 ℃, and then soaking the porous silicon template in 70-90 ℃ corrosive liquid for 2-4 hours to remove the template, thereby obtaining a silicon rubber substrate with a cluster nanowire structure on the surface;
(3) dissolving 0.05mg of 1-hexyl-3-methylimidazolium tetrafluoroborate in 50mL of ethanol, and shaking up to obtain a mixed solution;
(4) dripping 250 μ L of the above mixed solution onto the above silicon rubber substrate, and rapidly spreading to obtain uniform liquid film (see FIG. 2);
(5) the materials are kept stand for 0.5 hour at room temperature, a layer of uniform ionic liquid film is formed on the surface of a substrate after ethanol is volatilized, and the sensor (shown as figure 1) is successfully prepared, wherein as can be seen from figure 1, the flexible stress sensor comprises a silicon rubber substrate with a cluster nanowire structure on the surface, and ionic liquid is bound in the cluster nanowire structure to serve as a conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm.
Example 3
According to the invention, an anodic alumina template (the depth of a nano hole is 300nm-6 mu m, the aperture is 30-400nm) is used for introducing a cluster nanowire structure on a silicon rubber substrate, so that the ionic liquid for binding the liquid is used as a conductive layer, and the purpose of obviously improving the fatigue resistance of the sensor is achieved. The method comprises the following specific steps:
(1) taking 5g of organic silicon oligomer, 1g of cross-linking agent and 20 mu L of modifying agent, and uniformly stirring and mixing, wherein the organic silicon oligomer is vinyl-terminated polydimethylsiloxane with the polymerization degree of 10-200; the cross-linking agent is methyl-terminated polydimethylsiloxane; the modifier is an ethoxy polyethyleneimine aqueous solution with the concentration of 35-40 wt%;
(2) dripping a small amount of the obtained mixture on an anodic alumina template, standing for half an hour, carrying out polymerization crosslinking curing reaction for 4 hours at the temperature of 110 ℃, and then soaking the anodic alumina template in 70-90 ℃ corrosive liquid for 2-4 hours to remove the template, thereby obtaining the silicon rubber substrate with the cluster nanowire structure on the surface;
(3) dissolving 0.25mg of 1-octyl-3-methylimidazolium bis (trifluoromethylsulfonyl) imide salt in 50mL of ethanol, and shaking up to obtain a mixed solution;
(4) dripping 50 μ L of the above mixed solution onto the above silicon rubber substrate, and rapidly spreading to obtain uniform liquid film (see FIG. 2);
(5) the materials are kept stand for 1 hour at room temperature, a layer of uniform ionic liquid film is formed on the surface of a substrate after ethanol is volatilized, and the sensor (shown in figure 1) is successfully prepared, wherein as can be seen from figure 1, the flexible stress sensor comprises a silicon rubber substrate with a cluster nanowire structure on the surface, and ionic liquid is bound in the cluster nanowire structure to serve as a conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm.
Example 4
According to the invention, the PET plastic template is used for introducing the cluster nanowire structure on the silicon rubber substrate, so that the ionic liquid for binding the liquid is used as the conductive layer, and the purpose of obviously improving the fatigue resistance of the sensor is achieved. The method comprises the following specific steps:
(1) taking 5g of organic silicon oligomer, 0.5g of cross-linking agent and 10 mu L of modifying agent, and uniformly stirring and mixing, wherein the organic silicon oligomer is vinyl-terminated polydimethylsiloxane with the polymerization degree of 10-200; the cross-linking agent is methyl-terminated polydimethylsiloxane; the modifier is an ethoxy polyethyleneimine aqueous solution with the concentration of 35-40 wt%;
(2) dripping a small amount of the obtained mixture on a PET plastic template, standing for half an hour, carrying out polymerization crosslinking curing reaction for 4 hours at the temperature of 110 ℃, and then soaking the mixture in 70-90 ℃ corrosive liquid for 2-4 hours to remove the template, thereby obtaining the silicon rubber substrate with the cluster nanowire structure on the surface;
(3) dissolving 1.00mg of 1-hexyl-3-methylimidazolium hexafluorophosphate in 50mL of ethanol, and shaking up to obtain a mixed solution;
(4) dripping 250 μ L of the above mixed solution onto the above silicon rubber substrate, and rapidly spreading to obtain uniform liquid film (see FIG. 2);
(5) the materials are kept stand for 2 hours at room temperature, a layer of uniform ionic liquid film is formed on the surface of a substrate after ethanol is volatilized, and the sensor (shown in figure 1) is successfully prepared, wherein as can be seen from figure 1, the flexible stress sensor comprises a silicon rubber substrate with a cluster nanowire structure on the surface, and ionic liquid is bound in the cluster nanowire structure to serve as a conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm.
The present invention may be embodied in many different forms and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (9)
1. A flexible stress sensor based on a nanowire bound conductive liquid film is characterized by comprising a silicon rubber substrate with a cluster nanowire structure on the surface, wherein ionic liquid is bound in the cluster nanowire structure to serve as the conductive liquid film; the length of the nanowire in the cluster nanowire structure is 300nm-6 mu m, and the diameter of the nanowire in the cluster nanowire structure is 30-400 nm;
the nanowires in the cluster nanowire structure are all in a vertical state on the silicon rubber substrate.
2. The method for preparing a flexible stress sensor based on nanowire bound conductive liquid film as claimed in claim 1, the method for preparing comprises the following steps:
1) preparing a liquid prepolymer mixed solution: mixing the silicone oligomer, the cross-linking agent and the modifying agent;
2) preparing a silicon rubber substrate with cluster nanowire structures: dripping the liquid prepolymer mixed liquid obtained in the step 1) on a template with nano holes for polymerization, crosslinking and curing reaction, and then soaking the liquid prepolymer mixed liquid in 70-90 ℃ corrosive liquid for 2-20 hours to remove the template;
3) preparing an ionic liquid mixed solution: dissolving the ionic liquid in a low-boiling-point volatile organic solvent;
4) preparing a uniform conductive liquid film: dropwise adding the ionic liquid mixed solution prepared in the step 3) with a quantitative volume on the surface of the silicon rubber substrate obtained in the step 2);
5) forming a flexible stress sensor based on a nanowire bound conductive liquid film: and (3) standing the silicon rubber substrate with the ionic liquid mixed solution dropwise added on the surface obtained in the step 4) at room temperature to volatilize the low-boiling-point volatile organic solvent.
3. The method for preparing the flexible stress sensor based on the nanowire-bound conductive liquid film as claimed in claim 2, wherein the silicone oligomer is vinyl-terminated polydimethylsiloxane with a degree of polymerization of 10-200; the cross-linking agent is methyl-terminated polydimethylsiloxane; the modifier is an ethoxy polyethyleneimine aqueous solution with the concentration of 35-40 wt%.
4. The method for preparing the flexible stress sensor based on the nanowire bound conductive liquid film as claimed in claim 2, wherein the ratio of the organic silicon oligomer to the cross-linking agent to the modifying agent is 5-10g:0.5-1g:10-40 μ L.
5. The method for preparing a flexible stress sensor based on a nanowire-bound conductive liquid film according to claim 2, wherein the template having the nano-pores is one of an anodized aluminum template, a porous silicon template and a PET plastic template, the nano-pores have a depth of 300nm to 6 μm and a diameter of 30 nm to 400 nm.
6. The method for preparing the flexible stress sensor based on the nanowire bound conductive liquid film as claimed in claim 2, wherein the concentration of the ionic liquid mixed solution is 0.001mg/mL to 0.1 mg/mL; the ionic liquid is hydrophobic ionic liquid.
7. The method as claimed in claim 6, wherein the hydrophobic ionic liquid is one of 1-butyl-3-methylimidazole bis (trifluoromethanesulfonyl) imide salt, 1-hexyl-3-methylimidazole tetrafluoroborate, 1-octyl-3-methylimidazole bis (trifluoromethanesulfonyl) imide salt and 1-hexyl-3-methylimidazole hexafluorophosphate.
8. The method for preparing a flexible stress sensor based on a nanowire-bound conductive liquid film according to claim 2, wherein the quantitative volume of the step 4) is 25-250 μ L.
9. The method for preparing a flexible stress sensor based on a nanowire-bound conductive liquid film according to claim 2, wherein the volatilization time of the volatilization in the step 5) is 0.5-2 hours.
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| CN109884138A (en) * | 2019-03-27 | 2019-06-14 | 苗伟宁 | A kind of flexible humidity sensor with fast-response characteristic |
| CN110371919B (en) * | 2019-07-19 | 2022-06-17 | 北京航空航天大学 | Self-assembly preparation method of micro-nano multilevel column structure |
| CN112111153B (en) * | 2020-08-12 | 2022-05-31 | 佛山(华南)新材料研究院 | Oriented heat conduction material and preparation method and application thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101354298A (en) * | 2008-09-12 | 2009-01-28 | 清华大学 | Piezoresistive transducer probe based on electric conduction high molecule sensitivity membrane and preparation method thereof |
| CN104098082A (en) * | 2014-06-27 | 2014-10-15 | 京东方科技集团股份有限公司 | Formation method and equipment for directional nanowire material as well as formation method for conductive structure |
| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
| CN105451650A (en) * | 2013-07-18 | 2016-03-30 | 国立研究开发法人科学技术振兴机构 | Biocompatible electrode structure and method for producing same, and device and method for producing same |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6581474B2 (en) * | 2001-02-22 | 2003-06-24 | Sandia National Laboratories | Triboluminescent indicator system |
| CN104934551B (en) * | 2015-05-14 | 2017-07-28 | 京东方科技集团股份有限公司 | A kind of flexible electrode layer and preparation method thereof, display base plate, display device |
| CN105738015B (en) * | 2016-02-01 | 2018-06-08 | 上海交通大学 | A kind of resistance-type film pulling force sensor and preparation method thereof |
| CN105758562B (en) * | 2016-03-29 | 2018-10-16 | 电子科技大学 | A kind of pliable pressure sensor and preparation method thereof |
| CN205843855U (en) * | 2016-07-28 | 2016-12-28 | 国网山西省电力公司忻州供电公司 | Pliable pressure sensor |
| CN106370327B (en) * | 2016-10-08 | 2020-09-15 | 中国科学院深圳先进技术研究院 | Flexible pressure sensor and manufacturing method thereof |
-
2017
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101354298A (en) * | 2008-09-12 | 2009-01-28 | 清华大学 | Piezoresistive transducer probe based on electric conduction high molecule sensitivity membrane and preparation method thereof |
| CN105451650A (en) * | 2013-07-18 | 2016-03-30 | 国立研究开发法人科学技术振兴机构 | Biocompatible electrode structure and method for producing same, and device and method for producing same |
| CN104098082A (en) * | 2014-06-27 | 2014-10-15 | 京东方科技集团股份有限公司 | Formation method and equipment for directional nanowire material as well as formation method for conductive structure |
| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
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