Have the increasing material system of processing and method of environment composition on-line checking function
Technical field
The present invention relates to the material increasing fields of metal material, more particularly to a kind of tool environment composition on-line checking function
Increasing material system of processing and method.
Background technology
Increases material manufacturing technology is that the technology of Quick-forming is realized using discrete dynamics models principle according to three-dimensional entity model,
The labyrinth parts that a variety of materials can directly be manufactured, are with a wide range of applications.But metal increasing material manufacturing is related to
Complicated metal molten solidifies metallurgical process, high to processing environment purity requirements, and environment composition control is improper easily to be generated
Defect, if the hydrogen in protective gas may cause hydrogen blistering, oxygen metal may be caused to aoxidize, Solid micro may pollute
Optical devices simultaneously interfere light beam to relay.Therefore, the real-time detection of environment composition is particularly important.Ambiance includes mainly protecting
Protect microparticle material internal release gas in gas, process and generated with laser gasification metal.Accurate on-line checking ring
Border atmosphere constituent is of great significance to control forming quality with content.
Time of-flight mass spectrometer has extensive use as a kind of high-precision substance component detection device, and measurement range can
Up to 10-6At%~100at%.It is mentioned in the patent of Patent No. CN201480023610.1, mass spectrum is applied in increasing material manufacturing
The concept of pollutant is detected, but the technology lacks the specific detection means for distinguishing particulate matter and gas.
Invention content
The present invention is compound by laser individual particle mass spectrum and electron bombardment ionization source mass spectrum, provides a kind of tool environment composition and examines online
The increasing material system of processing and method of brake.
The present invention has the increasing material system of processing of environment composition on-line checking function, including increase material processing subsystem and environment at
Divide on-line checking subsystem;
The increasing material processing subsystem is used for increasing material processing into row metal, and it includes being used for into row metal to increase material processing subsystem
Increase the control unit of material process control;
The environment composition on-line checking subsystem includes laser individual particle mass spectrograph, electron bombardment source mass spectrometer, substance
Separative element, mass spectrograph gas circuit unit, mass spectrum collection head and collection head motion control mechanism;Laser individual particle mass spectrograph, electronics
Bombardment source mass spectrometer, collection head motion control mechanism are all connected with control unit;
Collection head motion control mechanism is used under the control of the control unit, driving mass spectrum collection head tracking molten bath movement;
Mass spectrum collection head is used for collecting the mixture of microparticle and gas in the ambient enviroment of molten bath;Mass spectrograph gas circuit unit is used for mix
It closes object and is transmitted to substance separative element, substance separative element is used for microparticle and gas in separating mixture, microparticle is led to
It crosses a gas circuit and is transmitted to laser individual particle mass spectrograph, gas is transmitted to electron bombardment source mass spectrometer by another gas circuit;
Laser individual particle mass spectrograph is used for detecting the ingredient and content of microparticle, and electron bombardment source mass spectrometer is used for detecting gas
The ingredient and content of body, and detection data is fed back into control unit.
Further, the increasing material processing subsystem using selective laser fusing building mortion, laser only nearly building mortion,
Electron beam selective melting building mortion, electron beam direct-forming device or electric arc building mortion.
Further, the increasing material processing subsystem further comprises that control unit, high energy beam generating unit, high energy beam pass
Defeated unit, processing head kinematical control mechanism, processing head and objective table;
High energy beam generating unit and processing head kinematical control mechanism are all connected with control unit;
High energy beam generating unit is used for generating energy beam, and high energy beam transmission unit is used for energy beam being transmitted to processing head,
Processing head is used for using energy beam fusing raw metal and forms molten bath on objective table;
Processing head kinematical control mechanism is used for that processing head is driven to move by preset path.
Further, the collection head motion control mechanism and the processing head kinematical control mechanism be mechanical arm or mostly from
By degree motion platform.
Further, the collection head motion control mechanism is used under the control of the control unit, driving mass spectrum collection head
Molten bath movement is tracked, is specifically realized with the following method:
It is pre-designed the motion path for increasing processing head and mass spectrum collection head in material processing subsystem, processing head and mass spectrum is made to adopt
The motion path of market-head is identical, but there is delay.
Further, the collection head motion control mechanism is used under the control of the control unit, driving mass spectrum collection head
Molten bath movement is tracked, is specifically realized with the following method:
Layer surface is deposited using laser scanning, reflected light is received using laser detector, molten bath is judged according to light variation
Position, control mass spectrum collection head are tracked to molten bath.
Further, the substance separative element includes difference vacuum sample cone and quartz capillary, difference vacuum sample
Cone connects laser individual particle mass spectrograph by a gas circuit, and quartz capillary connects electron bombardment source mass spectrometer by another gas circuit.
The increasing material processing method of tool environment composition on-line checking function provided by the invention, system is processed using above-mentioned increasing material
System, including step:
(1) control unit control increases material processing subsystem and forms molten bath on objective table;
(2) control unit controls collection head motion control mechanism, and collection head motion control mechanism drives mass spectrum collection head real
When track molten bath, acquire the surrounding material around molten bath;
(3) surrounding material enters substance separative element by mass spectrum collection head and mass spectrograph gas circuit unit, is detached through substance
Unit is separated into microparticle and gas, respectively enters laser individual particle mass spectrograph and electron bombardment source mass spectrometer;
(4) ingredient and size of laser individual particle mass spectrograph detection microparticle, and detection data is sent to control unit;
(5) ingredient and content of electron bombardment source mass spectrometer detection gas, and detection data is sent to control unit;
(6) control unit is according to the detection data of reception, judge it is exceeded with the presence or absence of impurity component in surrounding material, once
There is impurity component super, control unit sends out alarm, and shuts down;After staff excludes reason for Exceeding, it is further continued for carrying out increasing material
Processing;
(7) step (1)~(6) are repeated until completing to increase material processing.
Compared to the prior art, the present invention has following features and advantageous effect:
The present invention, which increases material system of processing, has the function of environment composition on-line checking, can be in increasing material process, to molten bath
Ambient enviroment substance carries out high-precision on-line checking, more specifically, using laser individual particle mass spectrograph and electron bombardment ionization source mass spectrum
Instrument respectively in surrounding material microparticle and gas be detected, and detection data is fed back into control unit.Control unit
Once it was found that impurity component is exceeded, then stop and exclude reason for Exceeding, until the exceeded situation of impurity component is eliminated.
The present invention is compound by laser individual particle mass spectrum and electron bombardment ionization source mass spectrum, for realizing environment in material process is increased
The full object Mass Spectrometer Method of substance can be to increase to control quality in material process and provide environment cleanliness to provide technical support.
Description of the drawings
Fig. 1 is the structural schematic diagram that the present invention increases material system of processing in embodiment.
In figure, 1- control units, 2- high energy beam generating units, 3- processing head kinematical control mechanisms, 4- high energy beams transmission list
Member, 5- processing heads, 6- substance separative elements, 7- laser individual particle mass spectrographs, 8- electron bombardment source mass spectrometers, 9- mass spectrograph gas circuits
Unit, 10- collection head motion control mechanisms, 11- mass spectrum collection heads, 12- sedimentaries, 13- objective tables, the molten baths 14-.
Specific implementation mode
In order to illustrate more clearly of the present invention and/or technical solution in the prior art, below originally by control description of the drawings
The specific implementation mode of invention.It should be evident that drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, others are can also be obtained according to these attached drawings
Attached drawing, and obtain other embodiments.
The present invention increases material system of processing tool environment composition on-line checking function and utilizes laser list in increasing material process
The ingredient and content of particle mass spectrograph and electron bombardment source mass spectrometer detection molten bath ambient enviroment substance, and sentence according to testing result
Whether abscission ring border material impurities ingredient is exceeded.Once it was found that having, impurity component is exceeded, then shutdown adjustment.The present invention is by increasing material
The on-line checking that surrounding material impurity component is carried out in process, to realize the quality and powder injection molding that increase material process.
Referring to Fig. 1, it is shown the structural schematic diagram for increasing material system of processing in the present embodiment, the increasing material system of processing is main
Including increasing material processing subsystem and environment composition on-line checking subsystem.The increasing material processing subsystem further comprises that control is single
Member 1, high energy beam generating unit 2, high energy beam transmission unit 4, processing head kinematical control mechanism 3, processing head 5 and objective table 13;It is high
Beam generating unit 2 and processing head kinematical control mechanism 3 are all connected with control unit 1, and control unit 1 is used for controlling high energy beam
Unit 2 and processing head kinematical control mechanism 3, high energy beam generating unit 2 are used for generating the energy beam of fusing raw metal, high energy beam
Transmission unit 4 is used for energy beam being transmitted to processing head 5, the energy that processing head 5 is used for transmitting using high energy beam transmission unit 4
It measures beam and melts raw metal, and molten bath 14 is formed in objective table 13.Processing head kinematical control mechanism 3 is used for that processing head 5 is driven to press
1 preset path of control unit moves.
In present embodiment, when the high energy beam that high energy beam generating unit 2 generates is laser beam, high energy beam transmission is single
Optical fiber or speculum for transmitting laser then can be used in member 4;When high energy beam generating unit 2 generate high energy beam be electric arc, etc.
Whens gas ions, electron beam etc., the cable for transmitting electric energy then can be used in high energy beam transmission unit 4.
The environment composition on-line checking subsystem includes laser individual particle mass spectrograph 7, electron bombardment source mass spectrometer 8, object
Matter separative element 6, mass spectrograph gas circuit unit 9, mass spectrum collection head 11 and collection head motion control mechanism 10, laser individual particle mass spectrum
Instrument 7, electron bombardment source mass spectrometer 8, collection head motion control mechanism 10 are all connected with control unit 1, the control in control unit 1
Lower work.In present embodiment, processing head kinematical control mechanism 3 and collection head motion control mechanism 13 using mechanical arm or
Multi-degree-of-freedom motion platform etc..
Collection head motion control mechanism 10 is used for driving mass spectrum collection head 11 to track the movement of molten bath 14, and mass spectrum collection head 11 is used
To collect the mixture of microparticle and gas in 14 ambient enviroment of molten bath;Mass spectrograph gas circuit unit 9 is used for mass spectrum collection head
11 mixtures collected are transmitted to substance separative element 6, and the microparticle that substance separative element 6 is used in separating mixture is gentle
Microparticle is transmitted to laser individual particle mass spectrograph 7 by a gas circuit, gas is transmitted to electron bombardment by another gas circuit by body
Source mass spectrometer 8.
Collection head motion control mechanism 10 drives 11 tracking molten bath 14 of mass spectrum collection head to move and following technology specifically can be used
Means are realized:
The first, since molten bath 14 is formed in 5 lower section of processing head, so processing head 5 and mass spectrum collection head can be pre-designed
11 motion path keeps processing head 5 identical with the motion path of mass spectrum collection head 11, but there is delay, you can ensures that mass spectrum is adopted
Market-head 11 is located near molten bath 14.
Second, using 12 surface of laser scanning sedimentary, reflected light is received using laser detector, is changed according to light
Judge 14 position of molten bath, then controls mass spectrum collection head 11 and track to molten bath 14.
In the present invention, substance separative element 6 be used for by mixture microparticle and gas detach.This specific implementation
In mode, substance separative element 6 includes difference vacuum sample cone and quartz capillary, and difference vacuum sample cone is connected by a gas circuit
Laser individual particle mass spectrograph 7 is connect, quartz capillary connects electron bombardment source mass spectrometer 8 by another gas circuit.Mixture enters object
Matter separative element 6, only microparticle can be bored by difference vacuum sample, and then enter laser individual particle mass spectrograph 7;Quartz capillary
May filter that microparticle, only gas by and enter electron bombardment ionization source mass spectrograph 8.
In the increasing material manufacturing method using system shown in Figure 1, control unit 1 is controlled according to the scan path of planning and is processed
Head motion control mechanism 3 drives processing head 5 to move, and forms the sedimentary 12 of specific shape;Meanwhile environment composition on-line checking
The mass spectrum collection head 11 of system follows molten bath 14 to move, to be monitored on-line to 14 ambient enviroment ingredient of molten bath.
The present invention increases material processing method and is as follows:
(1) control unit 1 controls high energy beam generating unit 2 and generates energy beam, and generated energy beam is passed by high energy beam
Defeated unit 4 is transferred to processing head 5, and processing head 5 melts raw metal using the energy beam that high energy beam transmission unit 4 transmits,
And form molten bath 18 in objective table 16.
(2) control unit 1 controls collection head motion control mechanism 10, and collection head motion control mechanism 10 drives mass spectrum acquisition
First 11 real-time tracing molten bath 14 acquires the surrounding material around molten bath 14.
(3) surrounding material enters substance separative element 6, substance point by mass spectrum collection head 11 and mass spectrograph gas circuit unit 9
Surrounding material is separated into microparticle and gas from unit 6, respectively enters laser individual particle mass spectrograph 7 and electron bombardment ionization source mass spectrum
Instrument 8.
(4) laser individual particle mass spectrograph 7 detects the ingredient and size of microparticle, and detection data is sent to control unit
1。
(5) ingredient and content of 8 detection gas of electron bombardment source mass spectrometer, and detection data is sent to control unit 1.
(6) control unit 1 is according to the detection data of reception, judge it is exceeded with the presence or absence of impurity component in surrounding material, one
Denier has that impurity component is exceeded, and control unit 1 sends out alarm, and shuts down;After staff excludes reason for Exceeding, it is further continued for carrying out
Increase material processing.The exceeded content for both having referred to an impurity component of the impurity component is exceeded, and it is exceeded also to refer to microparticle size.
(7) step (1)~(6) are repeated until completing to increase material processing.
Be described in above-described embodiment illustrate the present invention, though text in illustrated by specific term, not
Protection scope of the present invention can be limited with this, be familiar with this technical field personage can understand the present invention spirit with it is right after principle
It changes or changes and reaches equivalent purpose, and this equivalent change and modification, should all be covered by right institute circle
Determine in scope.