CN108717130A - Detection device, copper sheet and detection method for fixing AFM probe - Google Patents
Detection device, copper sheet and detection method for fixing AFM probe Download PDFInfo
- Publication number
- CN108717130A CN108717130A CN201810433434.9A CN201810433434A CN108717130A CN 108717130 A CN108717130 A CN 108717130A CN 201810433434 A CN201810433434 A CN 201810433434A CN 108717130 A CN108717130 A CN 108717130A
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- Prior art keywords
- copper sheet
- probe
- afm
- cantilever beam
- fixing
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Abstract
The invention discloses a kind of for fixing detection device, copper sheet and the detection method of AFM probe, wherein detection device includes：The shape feature of copper sheet is half circle sheet of preset thickness and preset diameters, and is equipped with trapezoid-shaped openings in the axis line position of half circle sheet, is open with generating to the scarf of copper sheet indent；Light microscope；Controller, predeterminated position for being under an optical microscope applied to adhesive by the cantilever beam of not needle point on copper sheet, and the probe of atomic force microscope to be detected is contacted by adhesive position on copper sheet by light microscope, and it gradually pressurizes until the cantilever beam of the probe of AFM to be detected is pressed down, and after silicon base and cantilever beam are detached from, lift the silicon base of not cantilever beam, so that the cantilever beam and needle point of the probe of AFM to be detected stay on copper sheet, to carry out transmission electron microscope detection.The structure of the detecting device is simple, and light portable, cost is extremely low.
Description
Technical field
The present invention relates to microscopic techniques fields, more particularly to a kind of for fixing AFM (Atomic Force
Microscope, atomic force microscope) (Transmission electron microscope, transmitted electron are aobvious in TEM for probe
Micro mirror) in the detection device, copper sheet and the detection method that are detected.
Background technology
The research of tribology is not limited solely to be tested under the friction instrument of macroscopic view, in the past 10 years, with atomic force
The development and application of the instruments such as microscope (AFM), they play great impetus to the Study on Microcosmic Mechanism of superslide.With
This simultaneously as contact zone area significantly reduction, how friction process is parsed into order to which one is highly important
Problem.Since excessive qualitatively analysis cannot be carried out to contact zone in friction process, so to atomic force microscope after experiment
(AFM) needle point of probe, which is detected, just becomes judge friction process important means.And transmission electron microscope
(TEM) it is then the important means analyzed atomic force microscope (AFM) needle point.
Transmission electron microscope (TEM) can be assisted to atomic force microscope (AFM) probe needle currently, having two ways
Point is detected, one is probe is fixed using a kind of specific fixture, the cost of this fixture is up to 150,000 people
People's coin greatly improves the cost of transmission electron microscope (TEM) test experience.The second is using FIB (Focused Ion
Beam, focused ion beam) surface layer stripping is carried out to needle surface, although the relatively low experiment of this method cost is time-consuming longer,
And there is destruction to needle surface so that needle point can not carry out repeating detection.
Invention content
The present invention is directed to solve at least some of the technical problems in related technologies.
For this purpose, an object of the present invention is to provide a kind of detection device for fixing AFM probe, the apparatus structure
Simply, light portable, cost is extremely low, and sample making is convenient, and the operating time is short, and will not be damaged to needle point.
It is another object of the present invention to propose a kind of copper sheet for fixing AFM probe.
Another object of the present invention is to propose a kind of detection method for fixing AFM probe.
In order to achieve the above objectives, one aspect of the present invention embodiment proposes a kind of detection device for fixing AFM probe,
Including：Copper sheet, the shape feature of the copper sheet are half circle sheet of preset thickness and preset diameters, and in half circle sheet
Axis line position is equipped with trapezoid-shaped openings, is open with generating to the scarf of copper sheet indent；Light microscope；Controller is used for
Adhesive is applied to by the predeterminated position on the copper sheet by the cantilever beam of not needle point under the light microscope, and is passed through
The probe of atomic force microscope to be detected is contacted adhesive position on the copper sheet by the light microscope, and by
Gradually pressurization is until the cantilever beam of the probe of the AFM to be detected is pressed down, and after silicon base and the cantilever beam are detached from, lifts
There is no the silicon base of the cantilever beam so that the cantilever beam and needle point of the probe of the AFM to be detected stay on the copper sheet, with
Carry out transmission electron microscope detection.
The embodiment of the present invention for fixing the detection device of AFM probe, using an AFM cantilever beam without needle point by glue
Glutinous agent is applied to the specific position of fixing device, and afm tip to be detected is fixed on adhesive position for saturating by adhesive
Radio microscopy is surveyed, and the probe property analysis problem in capable of being tested for Micro Lub provides a kind of simple and highly efficient means,
Study condition is provided for analysis friction mechanism and research and development new material, simple in structure, light portable, cost is extremely low, and sample
Product are easy to make, and the operating time is short, and will not be damaged to needle point.
In addition, the detection device according to the above embodiment of the present invention for fixing AFM probe can also have it is following attached
The technical characteristic added：
Further, in one embodiment of the invention, the predeterminated position on the copper sheet is copper sheet 45° angle point
Sharp place.
Further, in one embodiment of the invention, the preset thickness is 0.1 millimeter, and the preset diameters are 3
Millimeter.
Further, in one embodiment of the invention, further include：Fixed probe, the gluing for dipping predetermined amount
Agent, and the adhesive of the predetermined amount is put on the copper sheet 45° angle and is sharply located.
In order to achieve the above objectives, another aspect of the present invention embodiment proposes a kind of copper sheet for fixing AFM probe, institute
The shape feature for stating copper sheet is half circle sheet of preset thickness and preset diameters, and is set in the axis line position of half circle sheet
There are trapezoid-shaped openings, is open with generating to the scarf of copper sheet indent.The copper sheet is easy to process, simple in structure, light portable, cost
It is extremely low.
In order to achieve the above objectives, further aspect of the present invention embodiment proposes a kind of detection side for fixing AFM probe
Method includes the following steps：Adhesive is applied on copper sheet by the cantilever beam of not needle point under the light microscope
Predeterminated position, and it is by light microscope that adhesive institute on the probe contact copper sheet of atomic force microscope to be detected is in place
It sets；Gradually pressurization is until the cantilever beam of the probe of the AFM to be detected is pressed down；After silicon base and the cantilever beam are detached from,
Lift the silicon base of no cantilever beam so that the cantilever beam and needle point of the probe of the AFM to be detected stay in the copper sheet
On, to carry out transmission electron microscope detection.
The embodiment of the present invention for fixing the detection method of AFM probe, using an AFM cantilever beam without needle point by glue
Glutinous agent is applied to the specific position of fixing device, and afm tip to be detected is fixed on adhesive position for saturating by adhesive
Radio microscopy is surveyed, and the probe property analysis problem in capable of being tested for Micro Lub provides a kind of simple and highly efficient means,
Study condition is provided for analysis friction mechanism and research and development new material, simple in structure, light portable, cost is extremely low, and sample
Product are easy to make, and the operating time is short, and will not be damaged to needle point.
In addition, the detection method according to the above embodiment of the present invention for fixing AFM probe can also have it is following attached
The technical characteristic added：
Further, in one embodiment of the invention, the predeterminated position on the copper sheet is copper sheet 45° angle point
Sharp place.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partly become from the following description
Obviously, or practice through the invention is recognized.
Description of the drawings
Above-mentioned and/or additional aspect and advantage of the invention will become from the following description of the accompanying drawings of embodiments
Obviously and it is readily appreciated that, wherein：
Fig. 1 is the structural schematic diagram according to the detection device for fixing AFM probe of one embodiment of the invention；
Fig. 2 is the device and detects schematic diagram according to the transmission electron microscope of one embodiment of the invention；
Fig. 3 is the copper sheet schematic diagram for fixing AFM probe according to one embodiment of the invention；
Fig. 4 is the occupation mode schematic diagram for fixing AFM probe according to one embodiment of the invention；
Fig. 5 is the flow chart according to the detection method for fixing AFM probe of one embodiment of the invention.
Specific implementation mode
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to for explaining the present invention, and is not considered as limiting the invention.
Detection device, the copper sheet for fixing AFM probe proposed according to embodiments of the present invention is described with reference to the accompanying drawings
And detection method, the detection device for fixing AFM probe proposed according to embodiments of the present invention is described with reference to the accompanying drawings first.
Fig. 1 is the structural schematic diagram of the detection device for fixing AFM probe of one embodiment of the invention.
As shown in Figure 1, the detection device 10 for being used to fix AFM probe includes：Copper sheet 100, light microscope 200 and control
Device 300 processed.
Wherein, the shape feature of copper sheet 100 is half circle sheet of preset thickness and preset diameters, and in half circle sheet
Axial location is equipped with trapezoid-shaped openings, is open with generating to the scarf of copper sheet indent.Light microscope 200.Controller 300 is used for
Adhesive is applied to by the predeterminated position on copper sheet by the cantilever beam of not needle point under the light microscope, and passes through light
Microscope is learned by adhesive position on the probe of atomic force microscope to be detected contact copper sheet, and gradually pressurization until
The cantilever beam of the probe of AFM to be detected is pressed down, and after silicon base and cantilever beam are detached from, lifts the silicon substrate of not cantilever beam
Bottom so that the cantilever beam and needle point of the probe of AFM to be detected stay on copper sheet, to carry out transmission electron microscope detection.The present invention is implemented
The structure of the detecting device of example is simple, and light portable, cost is extremely low, and sample making is convenient, and the operating time is short, and not to needle point
It can damage.
Further, in one embodiment of the invention, the predeterminated position on copper sheet can be that copper sheet 45° angle is sharp
Place.
It is understood that adhesive is applied to fixing device by the embodiment of the present invention with the cantilever beam of a not no needle point
Specific position, for example, copper sheet 45° angle is sharply located.
Further, in one embodiment of the invention, preset thickness can be 0.1 millimeter, and preset diameters can be 3
Millimeter.
It is understood that the embodiment of the present invention is made of copper sheets, it is processed into using means such as wire cuttings
Specific shape, copper sheet are detected for fixing atomic force microscope (AFM) probe tip with carrying out transmission electron microscope (TEM),
Its shape feature is 0.1 millimeter of a thickness, half circle sheet of 3 millimeters of diameter, thin slice axis line position there are one trapezoid-shaped openings, this
The miniature copper sheet shape common feature of class is that there are one cambered inwards scarfs to be open, and size is illustrated but is not limited only to this example
This is a kind of, which is suitable for carrying out transmission electron microscope (TEM) to atomic force microscope (AFM) probe of all models examining
It surveys, feature is simple easily system and at low cost, is not damaged needle point structure.In embodiments of the present invention, copper sheet can also claim
Make miniature copper sheet.Wherein, the device of transmission electron microscope (TEM) and detection are as shown in Figure 2.
Specifically, as shown in figure 3, the embodiment of the present invention is processed by the copper sheet to a 0.1mm thickness is made.It is first
The disk that next diameter 3mm is first cut on copper sheet, is then cut into two semicircles.One of semicircle is taken, wherein axis two
Two points of mark at each 0.5mm in side are cut along 45 ° of directions along the direction far from central axes at this 2 points, and cutting is deep
Degree is, along central axes direction 0.5mm, partly entirety detains by shearing later, and fixing device completes.
Further, in one embodiment of the invention, further include：Fixed probe.Wherein, fixed probe is for dipping
The adhesive of predetermined amount, and the adhesive of predetermined amount is put on copper sheet 45° angle and is sharply located.
It is understood that the embodiment of the present invention needs, in miniature copper sheet surface smear adhesive, it is aobvious to carry out transmitted electron
Preparing experiment before micro mirror (TEM) detection carries out under an optical microscope, first with an atomic force microscope without needle point
(AFM) cantilever beam dips a small amount of adhesive, then contacts the cantilever beam and the specific position of miniature copper sheet, adhesive is applied
It smears in the position.
Further, needle point is fixed on miniature copper sheet by the embodiment of the present invention, first with the help of light microscope,
Adhesive position on miniature copper sheet is contacted with atomic force microscope to be detected (AFM) probe, later gradually pressurization, until former
The cantilever beam of sub- force microscope (AFM) probe is pressed down, and silicon base and cantilever beam are detached from, and lift the silicon substrate of not cantilever beam later
Bottom, and the cantilever beam of atomic force microscope (AFM) probe and needle point can stay on miniature copper sheet at this time, and needle point will not be caused
Any damage, to ensure that the genuine and believable of transmission electron microscope testing result.
Specifically, as shown in figure 4, being illustrated to the occupation mode of device of the embodiment of the present invention, wherein entirely make
It is carried out under an optical microscope with process.It also needs to other than probe (probe A) to be fixed use a nothing in fixation procedure
The cantilever beam (probe B) of needle point.Fixation procedure is divided into three steps：
The first step dips a small amount of adhesive with probe B, pays attention to holding the dosage of adhesive, it is excessive or it is very few all
It will cause harmful effect, those skilled in the art that can be held as the case may be to dosage to fixation procedure, herein not
It is specifically limited.
Adhesive is applied to fixing device 45° angle with probe B and sharply located, it should be noted that will do not visited by second step
Needle B is broken, and otherwise can influence the fixation of probe A needle points.
Third walks, and probe A pressings are smeared in previous step at adhesive, are gradually reinforced, until probe A cantilever beams are far from needle
Tip is broken, and the cantilever beam of probe A is fixed on adhesive at this time and needle point is hanging, this step needs to pay attention to pressing probe A's
Position, it is excessively outer to fix loosely, and excessively needle point overhead positions can be caused too close from fixing device by inner, it is unfavorable for
Detection.
To sum up, the embodiment of the present invention is designed to provide a kind of for being carried out to atomic force microscope (AFM) probe tip
It fixes to carry out the easy device of transmission electron microscope (TEM) detection, the device of the embodiment of the present invention has the following advantages：
(1) cost is very low first, it is only necessary to is processed to the copper sheet of a piece of 0.1mm thickness, the mistake of fixed needle point to be detected
It only needs to use atomic force microscope (AFM) cantilever beam without needle point in journey.
(2) it secondly tests and takes short, need nearly ten hours according to the method for focused ion beam (FIB) overburden removing
Time, and in the case where skillfully using the present apparatus, needle point is fixed on device and only needs a few minutes clock time, is greatly improved
Conventional efficient.
(3) finally, the device of the embodiment of the present invention does not damage tip portion, on the one hand ensure that testing result
It is genuine and believable, on the other hand also possibility is provided to carry out a variety of detections to the same needle point.
The detection device for fixing AFM probe proposed according to embodiments of the present invention is outstanding using an AFM without needle point
Adhesive is applied to the specific position of fixing device by arm beam, and afm tip to be detected is fixed on adhesive position by adhesive
It sets so that transmission electron microscope detects, the probe property analysis problem in capable of being tested for Micro Lub provides a kind of simple and efficient
Means, for analysis friction mechanism and research and development new material provide study condition, simple in structure, light portable, cost is extremely low,
And sample making is convenient, and the operating time is short, and will not be damaged to needle point.
In addition, another aspect of the present invention embodiment proposes a kind of copper sheet for fixing AFM probe, the shape of copper sheet is special
Sign is half circle sheet of preset thickness and preset diameters, and is equipped with trapezoid-shaped openings in the axis line position of half circle sheet, to generate
It is open to the scarf of copper sheet indent.The copper sheet is easy to process, simple in structure, and light portable, cost is extremely low.
The detection method for fixing AFM probe proposed according to embodiments of the present invention referring next to attached drawing description.
Fig. 5 is the flow chart of the detection method for fixing AFM probe of one embodiment of the invention.
As shown in figure 5, the detection method for being used to fix AFM probe includes：
In step S501, adhesive is applied to by copper sheet by the cantilever beam of not needle point under the light microscope
On predeterminated position, and the probe of atomic force microscope to be detected is contacted by adhesive institute on copper sheet by light microscope
In position.
In step S502, gradually pressurization is until the cantilever beam of the probe of AFM to be detected is pressed down.
In step S503, after silicon base and cantilever beam are detached from, the silicon base of not cantilever beam is lifted so as to be detected
The cantilever beam and needle point of the probe of AFM stay on copper sheet, to carry out transmission electron microscope detection.
Further, in one embodiment of the invention, the predeterminated position on copper sheet is that copper sheet 45° angle is sharply located.
It should be noted that the aforementioned explanation to the detection device embodiment for fixing AFM probe is also applied for
The detection method for fixing AFM probe of the embodiment, details are not described herein again.
The detection method for fixing AFM probe proposed according to embodiments of the present invention is outstanding using an AFM without needle point
Adhesive is applied to the specific position of fixing device by arm beam, and afm tip to be detected is fixed on adhesive position by adhesive
It sets so that transmission electron microscope detects, the probe property analysis problem in capable of being tested for Micro Lub provides a kind of simple and efficient
Means, for analysis friction mechanism and research and development new material provide study condition, simple in structure, light portable, cost is extremely low,
And sample making is convenient, and the operating time is short, and will not be damaged to needle point.
In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.In the description of the present invention, the meaning of " plurality " is at least two, such as two, three
It is a etc., unless otherwise specifically defined.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
Claims (7)
1. a kind of detection device for fixing AFM probe, which is characterized in that including：
Copper sheet, the shape feature of the copper sheet are half circle sheet of preset thickness and preset diameters, and in half circle sheet
Axis line position is equipped with trapezoid-shaped openings, is open with generating to the scarf of copper sheet indent；
Light microscope；And
Adhesive is applied to the copper sheet by controller for the cantilever beam by not needle point under the light microscope
Predeterminated position, and the probe of atomic force microscope to be detected is contacted by the copper sheet by the light microscope and is glued
Glutinous agent position, and gradually pressurization is until the cantilever beam of the probe of the AFM to be detected is pressed down, and in silicon base and described
After cantilever beam is detached from, the silicon base of no cantilever beam is lifted so that the cantilever beam and needle point of the probe of the AFM to be detected
It stays on the copper sheet, to carry out transmission electron microscope detection.
2. the detection device according to claim 1 for fixing AFM probe, which is characterized in that pre- on the copper sheet
Sharply locate if position is the copper sheet 45° angle.
3. according to claim 1 for fixing the detection device of AFM probe, which is characterized in that the preset thickness is
0.1 millimeter, the preset diameters are 3 millimeters.
4. the detection device according to claim 1 for fixing AFM probe, which is characterized in that further include：
Fixed probe, the adhesive for dipping predetermined amount, and the adhesive of the predetermined amount is put on the copper sheet 45° angle point
Sharp place.
5. a kind of copper sheet for fixing AFM probe, which is characterized in that the shape feature of the copper sheet is preset thickness and presets
Half circle sheet of diameter, and trapezoid-shaped openings are equipped in the axis line position of half circle sheet, to generate to the oblique of copper sheet indent
Face shape opening.
6. a kind of detection method for fixing AFM probe, which is characterized in that include the following steps：
Adhesive is applied to by the predeterminated position on copper sheet by the cantilever beam of not needle point under an optical microscope, and passes through light
Microscope is learned by adhesive position on the probe contact copper sheet of atomic force microscope to be detected；
Gradually pressurization is until the cantilever beam of the probe of the AFM to be detected is pressed down；
After silicon base and the cantilever beam are detached from, the silicon base of no cantilever beam is lifted so that the AFM's to be detected
The cantilever beam and needle point of probe stay on the copper sheet, to carry out transmission electron microscope detection.
7. the detection method according to claim 6 for fixing AFM probe, which is characterized in that pre- on the copper sheet
Sharply locate if position is the copper sheet 45° angle.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810433434.9A CN108717130B (en) | 2018-05-08 | 2018-05-08 | Detection device, copper sheet and detection method for fixing AFM probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810433434.9A CN108717130B (en) | 2018-05-08 | 2018-05-08 | Detection device, copper sheet and detection method for fixing AFM probe |
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| CN108717130B CN108717130B (en) | 2020-09-25 |
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| JPH07113634A (en) * | 1993-10-18 | 1995-05-02 | Matsushita Electric Ind Co Ltd | Probe for scanning probe microscope, manufacture thereof, recording reproducer using probe and fine machining device |
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| US7348570B2 (en) * | 2005-12-14 | 2008-03-25 | University Of Washington | Unsupported, electron transparent films and related methods |
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| CN108717130B (en) | 2020-09-25 |
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