CN108713253A - For improved heat and the gallium nitride transistor with underfill aluminium nitride of RF performances - Google Patents

For improved heat and the gallium nitride transistor with underfill aluminium nitride of RF performances Download PDF

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Publication number
CN108713253A
CN108713253A CN201680083045.7A CN201680083045A CN108713253A CN 108713253 A CN108713253 A CN 108713253A CN 201680083045 A CN201680083045 A CN 201680083045A CN 108713253 A CN108713253 A CN 108713253A
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China
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substrate
layer
aln layer
transistor
aln
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H·W·田
S·达斯古普塔
M·拉多萨夫列维奇
P·B·菲舍尔
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Intel Corp
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Intel Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
    • H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42356—Disposition, e.g. buried gate electrode
    • H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/2003—Nitride compounds

Abstract

A kind of equipment includes the transistor device on substrate, which includes：Intrinsic layer, the intrinsic layer include raceway groove；Source electrode and drain electrode on the opposite side of raceway groove；And the diffusion barrier between each of intrinsic layer and source electrode and drain electrode, the conduction band energy of the diffusion barrier are less than the conduction band energy of the conduction band energy of raceway groove and the material more than source electrode and drain electrode.A kind of method includes：It is the intrinsic layer region of channel definition of transistor device on substrate；Diffusion impervious layer is formed in the region defined for source electrode and drain electrode；And form source electrode on the diffusion barrier in the region defined for source electrode, and drain electrode is formed in the region defined for drain electrode.

Description

It is brilliant for improved heat and the gallium nitride with underfill aluminium nitride of RF performances Body pipe
Technical field
Gallium nitride transistor and circuit.
Background technology
Gallium nitride (GaN) transistor or circuit for power amplification, power conversion and switching usually handle a large amount of work( Rate.This transistor and a large amount of heat of circuit usually dissipation, need to remove by heat management.Partly leading with high heat conductance Body substrate suits the requirements.In frequency applications, needs substrate while there is high heat conductance and high resistivity, to prevent substrate In significant radio frequency (RF) loss.It identifies substrate appropriate and there is challenge.For example, silicon-on-insulator (SOI) substrate is with higher Resistivity, but there is poor thermal conductivity.The existing higher heat-conductivity of silicon carbide (SiC) substrate has high resistivity again, but usually only There is small size to be available, such as diameter is less than 6 inches (about 15 centimetres), and of high cost.The body silicon substrate allusion quotation of low cost Type has fully good thermal conductivity, but not provides very high resistivity and opened without causing wafer manufacture cost and chip to handle Pin dramatically increases.Using high resistivity silicon substrate low RF is obtained to be lost, but they usually with the chip during avoiding processing It is crushed in relevant manufacturing process and brings challenges.
Description of the drawings
Fig. 1 shows the side cross-sectional view of the substrate including gallium nitride (GaN) transistor device.
Fig. 2 shows the side cross-sectional view of a substrate part, which is the chip for having on the surface thereof buffer layer Part.
Fig. 3 shows the structure for introducing Fig. 2 after hard mask on the buffer layer.
Fig. 4 shows slow on the opposite side for inverting structure and exposing substrate by substrate formation opening or groove Rush the structure of Fig. 3 after layer.
Fig. 5 shows the structure for forming Fig. 4 after aln layer in the trench.
Fig. 6 shows the structure of Fig. 5 after residual volume of the deposited sacrificial material to fill groove in the trench.
Fig. 7, which is shown, to be inverted structure and what is carried out on the front side of structure or device-side includes removal hard mask layer Subsequent technique after Fig. 6 structure.
Fig. 8 shows the knot that Fig. 7 after gallium nitride layer and polarization/electric charge induction layer is formed in the device-side of structure Structure.
Fig. 9, which is shown, to be patterned sacrifice or dummy gate electrode hard mask and the gallium nitride layer in interface is made to be recessed The structure of Fig. 8 later.
Figure 10 shows the structure of Fig. 9 after source electrode and drain electrode regrowth process.
Figure 11 shows the structure that Figure 10 after groove isolation construction is formed around device.
Figure 12, which is shown, to be patterned to by sacrificial mask for the selected size of gate electrode and patterned sacrificial The structure of Figure 11 after interlayer dielectric is formed around domestic animal mask and in the structure.
Figure 13 shows the structure of Figure 12 after replacing metal gate process.
Figure 14 shows the structure of Figure 13 after forming the trench contact portion towards source electrode and drain electrode.
Figure 15 shows the structure of Figure 14 after substrate thinning.
Figure 16 shows the side cross-sectional view of such as substrate of low-resistivity silicon substrate, which is, for example, A part for the larger structure of nucleating layer on such as chip and its surface.
Figure 17 shows the structures of Figure 16 after the formation hard mask layer on nucleating layer.
Figure 18 is shown after being inverted substrate and forming groove by substrate to expose nucleating layer from the back side of substrate Figure 17 structure.
Figure 19 shows the structure for forming Figure 18 after aln layer in the trench.
Figure 20 is shown in the structure using Figure 19 after expendable material filling groove.
Figure 21, which is shown, is inverting and is continuing Figure 20's after the processing to the positive side or device-side of substrate by structure Structure.
Figure 22 show the second substrate of e.g. silicon substrate and the buffer layer that is formed on the surface of the second substrate and The side cross-sectional view of gallium nitride layer.
Figure 23 is shown after forming sacrificial mask and forming source electrode and drain electrode recess or notch in gallium nitride layer Figure 22 structure.
Figure 24 shows the structure of Figure 23 after formation of source and drain.
Figure 25 shows the structure of Figure 24 after forming groove isolation construction.
Figure 26 is shown is patterned to the sacrifice gate structure with the area size for gate electrode by sacrificial mask The structure of Figure 25 later.
Figure 27 show removal sacrificial mask and formed include gate-dielectric and gate electrode grid pile stack it The structure of Figure 26 afterwards.
Figure 28 shows the structure for engaging the structure at the device-side of carrier wafer and removing Figure 27 after substrate.
Figure 29, which is shown, engages the structure of Figure 28 with the structure of Figure 21.
Figure 30 shows the structure of Figure 29 after substrate thinning.
Figure 31 shows the structure of Figure 30 after removing carrier wafer.
Figure 32 is the interpolater for implementing one or more embodiments.
Figure 33 shows the embodiment of computing device.
Specific implementation mode
Describe a kind of device and method comprising the gallium nitride transistor on substrate or circuit block, in transistor or electricity There is aluminium nitride (AlN) floor below the block of road.Below transistor or circuit block (such as in substrate itself) there are aln layers Allow to use low-resistivity substrate, such as low-resistivity silicon substrate, while high resistivity and high heat conductance are provided to the structure.
Fig. 1 shows the side cross-sectional view of the substrate including gallium nitride (GaN) transistor device.In one embodiment, Substrate 110 is a part for the larger substrate of such as chip.In one embodiment, substrate 110 is low-resistivity silicon substrate. In the context, low-resistivity silicon substrate refers to that body resistivity is less than 1000 ohm-cms (Ω-cm) and more typically big About 10 Ω-cm or smaller monocrystalline substrates.
In one embodiment, the buffer layer 120 of material is provided that on substrate 110, by gallium nitride device or circuit Structure is isolated with substrate 110.In one embodiment, buffer layer 120 includes aluminium nitride (AlN).Following article will be described, scheme It is formed in 1 during one of such as structure of structure 100, aluminum nitride buffer layer had both been served as by gallium nitride device or circuit The buffer layer that structure is kept apart with substrate 110, and serve as the nucleating layer of the aluminium nitride for being formed in substrate 110.
In one embodiment, the thickness of the buffer layer 120 of aluminium nitride is about more than 25 μm.Buffering in structure 100 It is provided that high resistance gallium nitride layer on layer 120.Gallium nitride layer 140 provides the basis for being formed on gallium nitride transistor. Typically, gallium nitride layer 140 can be epitaxially grown to the thickness about more than 1 μm.Formed gallium nitride layer 140 it Afterwards, polarization/electric charge induction layer 145 is introduced on gallium nitride layer 140.Polarization/electric charge induction layer is due to its polarization field and nitridation Difference that the polarization field of gallium is compared and attract electronics towards the interface between gallium nitride layer 140 and polarization/electric charge induction layer 145 Material.This concentration of electronics is referred to as two-dimensional electron gas (2DEG).In one embodiment, for/electric charge induction the layer that polarizes 145 material is the alloy of group-III element and nitrogen.Example include but not limited to aluminium nitride (AlN), aluminum indium nitride (AlInN) and Aluminium gallium nitride alloy (AlGaN), wherein the 50% of alloy compositions are nitrogen.
Fig. 1 shows gallium nitride transistor comprising the source electrode 160 that is separated from each other and drain electrode 165, on gallium nitride layer 140 Grid pile stack and raceway groove in gallium nitride layer 140 or depletion region 150 source electrode 160 and drain electrode 165 are separated.Implement at one In example, the material for source electrode 160 and drain electrode 165 is n-type material, such as the alloy of III-V compound material and nitrogen.Example The InGaN (InGaN) including but not limited to formed by epitaxial deposition process.Source electrode 160 and drain electrode 165 are by such as dioxy The dielectric layer 180 (trench isolations) that SiClx or dielectric constant are less than the material (low-k materials) of silica surrounds.Gate stack Body 170 includes gate-dielectric and gate electrode.Grid pile stack 170 is set to such as silica or high-g value or dioxy On the gate-dielectric of the combination of SiClx and high-g value.The material of grid pile stack 170 is metal material, such as, but not limited to Tantalum nitride or silicide.
Fig. 1 shows the dielectric spacers 185 of the such as silica or low-k materials that are formed around gate electrode 170 And it is set to the structure in the interlayer dielectric 188 of such as silica or low k dielectric material.Fig. 1, which is also shown, to be passed through Interlevel dielectric layer 188 leads to the trench contact portion 190 of source electrode 160 and leads to drain electrode 165 by interlevel dielectric layer 188 Trench contact portion 195.
What is formed in the substrate 110 of the structure 100 of Fig. 1 is aln layer 130.In one embodiment, for example, by outer Aln layer 130 is formed the thickness to the thickness for being about organic semiconductor device by growth process.Representative thickness includes on the directions z 50 microns (μm) is to 100 μm of thickness.As indicated, aln layer 130 does not consume the overall region of substrate 110.On the contrary, at one In embodiment, the length and width size (being respectively x sizes and y sizes) of aln layer 130 is defined to surround aluminium nitride support Structure or circuit occupied area.In this case, aln layer provides resistivity to transistor arrangement and thermal conductivity is supported, And it is of approximately the representative length and width size more than 100 μm.
Include that aln layer 130 provides several advantages in substrate 110.First, aluminium nitride material serves as good exhausted Edge body realizes that low radio frequency (RF) is lost to increase the resistivity of substrate.Thermal conductivity (285 watts/meter/open (W/ that aluminium nitride has M/K)) also more preferable than silicon (149W/m/K).In the case where introducing aln layer 130 as described by underfill process, Buffer layer is allowed to serve as nucleating layer from buffer layer (buffer layer 120) the growing aluminum nitride layer 130 of aluminium nitride.Finally, all as above The one or more aln layers of selectivity placement will often reduce RF and be lost and improve below the device architecture and/or transmission line stated Hot property.
Fig. 2-Figure 15 describes the embodiment of the method for the structure to form Fig. 1, the structure of Fig. 1 include gallium nitride transistor and The aln layer being formed in the substrate of transistor.With reference to figure 2, Fig. 2 shows the side cross-sectional view of a part for substrate, The substrate is, for example, a part for chip.In one embodiment, substrate 210 is low resistivity single crystal silicon substrate.Substrate 210 It is provided that buffer layer 220 on surface (high surfaces).In one embodiment, it is about to be more than that buffer layer 220, which is thickness, The aluminium nitride material technique of 100nm.In one embodiment, buffer layer 220 is to pass through metal organic chemical vapor deposition (MOCVD) technique is formed.
Fig. 3 shows the structure that Fig. 2 after hard mask 225 is introduced on buffer layer 220.Hard mask layer 225 is, for example, The silicon nitride material that a certain thickness is deposited to by chemical vapor deposition (CVD), in the phase of next processing substrate 210 Buffer layer 220 is protected when offside.
Fig. 4, which is shown, to be inverted structure and is forming opening or groove 228 by substrate 210 to expose the opposite side of substrate On buffer layer 220 after Fig. 3 structure.In one embodiment, groove can be formed by mask and etch process 228.Typically, masking material, and the area that exposed needle defines underfill aln layer are deposited on the back side of substrate 210 Domain.Then the exposed region of etching substrate 210 is to form groove 228.Wet-etching agent or dry etchant can be used to etch Silicon substrate.Representative etchant is, for example, potassium hydroxide (KOH) or tetraethyl ammonium hydroxide (TMAH).
Fig. 5 shows the structure that Fig. 4 after aln layer 230 is formed in groove 228.For example, extension can be passed through Growth technique forms aluminium nitride 230.In one embodiment, aln layer 230 is sufficiently thick, to match in substrate as described below The thickness of substrate 210 after thinning operation.Representative thickness is about 50 microns micro- to 100 for thinned substrate Rice.
Fig. 6 shows the knot of Fig. 5 after residual volume of the deposited sacrificial material 235 to fill groove in groove 228 Structure.In one embodiment, expendable material 235 is the oxide introduced by depositing operation.
Fig. 7, which is shown, to be inverted structure and is continuing the structure of Fig. 6 after the processing to the front side of structure.It is specific and Speech, Fig. 7 show the structure that Fig. 6 after hard mask 225 is for example removed by etch process.
Fig. 8 shows the structure of Fig. 7 after forming gallium nitride layer and polarization layer.Fig. 8, which is shown, for example passes through extension The gallium nitride layer 240 that growth technique introduces, is formed into the thickness about more than 1 μm.Surface (the institute of gallium nitride layer 240 The upper surface of observation) on be provided that polarization layer 245.In one embodiment, polarization layer 245 is one or more III group members The alloy of element and nitrogen.Example includes but not limited to AlN, AlInN and AlGaN, and wherein nitrogen is the 50% of alloy compositions.
Fig. 9, which is shown, to be patterned to sacrifice or dummy gate electrode hard mask and keeps the gallium nitride layer 240 in interface recessed The structure of Fig. 8 after falling into.More specifically, Fig. 9 shows the sacrificial mask 246 of such as silicon nitride material, sacrificial mask 246 It is patterned as the area size for having close to gate electrode and sidewall spacers, sidewall spacers are set to for gate stack In the target location of body/sidewall spacers and cover polarization layer 245 and gallium nitride layer 240.On the opposite side of sacrificial mask 246 It is source electrode and drain electrode area.Fig. 9 shows recess 247, wherein in this region that respectively source electrode and drain electrode is specified In addition to the part and polarization layer 245 of gallium nitride layer 240.
Figure 10 shows the structure of Fig. 9 after source electrode and drain electrode regrowth process.In one embodiment, source electrode 260 and drain electrode 265 be III-V material and nitrogen alloy, such as, but not limited to formed by epitaxial growth technology in region 247 InGaN.
Figure 11 shows the structure of Figure 10 after trench isolations.Specifically, Figure 11 shows 260 He of neighbouring source electrode Drain electrode 265 and the groove isolation construction 280 for surrounding transistor device.In one embodiment, groove isolation construction 280 is such as The dielectric substance of silica or low-k materials.
Figure 12, which is shown, to be patterned to by sacrificial mask 246 for the selected size of gate electrode and patterned The structure of Figure 11 after interlayer dielectric is formed around sacrificial mask 246 and in the structure.For example, interlayer dielectric 288 is Silica or low k dielectric material.
Figure 13 shows the structure of Figure 12 after replacing metal gate process.In this process, sacrificial mask is removed 246 and the polarization layer of the lower section of sacrificial mask 246 is removed via etching, and introduce gate-dielectric and gate electrode as grid Pole stacked body.Suitable material for gate-dielectric is, for example, silica or high-k dielectric material or silica and high k The mixture of material.Suitable material for gate electrode 270 is, for example, metal, such as tantalum nitride or silicide.
Figure 14 shows the structure of Figure 13 after forming the trench contact portion for leading to source electrode 260 and drain electrode 265.One In a embodiment, opening for source electrode and drain electrode can be led to by interlevel dielectric layer 228 to be formed with etch process by sheltering Mouthful, and then Deposit contact material with formed lead to source electrode 260 trench contact portion 290 and towards drain electrode 265 groove connect Contact portion 295.Suitable material for trench contact portion 290 and trench contact portion 295 is, for example, tungsten.
Figure 15 shows the structure of Figure 14 after substrate 210 is thinned.In one embodiment, from the back of the body of substrate 210 Substrate 210 is thinned to the thickness of aln layer 230 by side, to exposure aln layer 230.It can be held for example, by polishing process Row substrate thinning.The structure of structure in Figure 15 similar to figure 1 described above.
Figure 16-Figure 29 shows the second embodiment for the technological process for being used to form gallium nitride transistor or circuit, wherein There is aln layer below transistor or circuit.With reference to figure 16, the figure shows the substrates of such as low-resistivity silicon substrate 310, it is, for example, a part for the larger structure of such as chip.Superimposition is such as aln layer on the surface of substrate 310 Nucleating layer 320.The representative thickness of nucleating layer 320 is about more than 100nm.
Figure 17 shows the structures of Figure 16 after the formation hard mask layer on nucleating layer 320.For example, in one embodiment In, hard mask layer 325 is silicon nitride material.
Figure 18 show by substrate invert and by substrate formed groove with from the back side of substrate expose nucleating layer 320 it The structure of Figure 17 afterwards.The nucleating layer 320 that Figure 18 shows the groove 328 formed by substrate and exposed in the back side of substrate. In one embodiment, what groove had be dimensioned for surround the transistor that substrate is formed or attached on substrate 310 or The occupied area of circuit devcie.
Figure 19 shows the structure of Figure 18 after forming aln layer 330.In one embodiment, such as by outer Growth process forms aln layer 330 to the thickness for being about 50-100 microns.
Figure 20 is shown in the structure using Figure 19 after expendable material filling groove 328.For example, expendable material 335 It is the oxide formed by depositing operation.
Figure 21, which is shown, to be inverted structure and is continuing to Figure 20's after the front side of substrate or the processing of device-side Structure.The structure after removing hard mask layer 325 has been shown in particular in Figure 21.For example, can be removed by etch process this Hard mask layer.
Figure 22 shows the second substrate 315, is, for example, and 310 independent silicon substrate of substrate.Second substrate 315 has shape The buffer layer 321 of such as aluminium nitride material on the surfaces Cheng Yuqi.In one embodiment, buffer layer 321 is to by follow-up nitrogen Change gallium layer with substrate material (for example, silicon) to be isolated.Buffer layer 321 can be formed by epitaxial growth technology, and with about super Cross the representative thickness of 100nm.The gallium nitride layer introduced also by such as epitaxial growth technology is provided that on buffer layer 321 340.Gallium nitride layer 340 has the thickness for being approximately greater than 1 μm.Polarization layer 345 is provided that on gallium nitride layer 340.For polarizing The suitable material of layer 345 includes the alloy (for example, AlN, AlInN, AlGaN) of group-III element and nitrogen.Epitaxial growth can be passed through Technique forms polarization layer 345.
Figure 23 shows in formation sacrificial mask and forms source electrode and drain electrode recess or notch in gallium nitride layer and divide The structure of Figure 22 after not making the source electrode and drain electrode adjacent with the opposite side of sacrificial mask be recessed.
Figure 24 shows the structure of Figure 23 after formation of source and drain.
Figure 25 shows the structure of Figure 24 after forming groove isolation construction.
Figure 26 is shown is patterned to the sacrifice gate structure with the area size for gate electrode by sacrificial mask The structure of Figure 25 later and after forming interlevel dielectric layer.
Figure 27 show removal sacrificial mask and formed include gate-dielectric and gate electrode grid pile stack it The structure of Figure 26 afterwards.Gate electrode 370 is, for example, metal, such as leads to the trench contact portion of source electrode by interlevel dielectric layer With towards the trench contact portion of drain electrode.
Figure 28 shows that the device-side in carrier wafer engages the structure and removes the structure of Figure 27 after substrate 315.
Figure 29, which is shown, engages the structure of Figure 28 with the structure of Figure 21.
Figure 30 show the structure of Figure 21 substrate it is thinned after Figure 29 structure.
Figure 31 shows the structure of Figure 30 after removing carrier.
Figure 32 shows the interpolater 400 including one or more embodiments.Interpolater 400 is for by the first substrate 402 are bridged to the substrate between two parties of the second substrate 404.First substrate 402 can be such as integrated circuit die.Second substrate 404 Such as can be memory module, computer motherboard or another integrated circuit die.In general, the purpose of interpolater 400 be by Connection expands to broader spacing or connection is rerouted to different connections.For example, interpolater 400 can be by integrated circuit Tube core is coupled to ball grid array (BGA) 406, and ball grid array 406 then may be coupled to the second substrate 404.In some embodiments In, the first and second substrates 402/404 are attached to the opposite side of interpolater 400.In other embodiments, the first and second substrate 402/404 is attached to the same side of interpolater 400.In other embodiments, three or more linings are interconnected using interpolater 400 Bottom.
Epoxy resin, ceramic material or such as polyimides that interpolater 400 can be reinforced by epoxy resin, glass fibre Polymer material formed.In other embodiments, interpolater can be formed by alternate rigidity or flexible material, the material May include the identical material being described above in semiconductor substrate, such as silicon, germanium and other iii-vs and IV races material Material.
Interpolater may include metal interconnection 408 and via 410, including but not limited to through silicon via (TSV) 412.Interpolation Device 400 can also include both embedded devices 414, including passive and active device.This device includes but not limited to capacitance Device, decoupling capacitors, resistor, inductor, fuse, diode, transformer, sensor and static discharge (ESD) device.Also Can include according to more complicated embodiment described herein being formed on the interpolater 400 of the GaN transistor of formation and circuit Device, such as radio frequency (RF) device, power amplifier, power management devices, antenna, array, sensor and MEMS device.
According to embodiment, devices disclosed herein or technique can be used in the manufacture of interpolater 400.
Figure 33 shows the computing device 500 according to one embodiment.If computing device 500 may include dry part. In one embodiment, these components are attached to one or more mainboards.In alternative embodiments, these components are fabricated onto individually On system on chip (SoC) tube core rather than on motherboard.Component in computing device 500 includes but not limited to integrated circuit die 502 and at least one communication chip 508.In some embodiments, communication chip 508 is fabricated as integrated circuit die 502 part.Integrated circuit die 502 may include memory 506 on CPU 504 and tube core, be used frequently as high speed Buffer memory, can be by the skill of such as embedded DRAM (eDRAM) or spin-transfer torque memory (STTM or STTM-RAM) Art provides.
Computing device 500 may include that may or may not be physically and electrically connected to motherboard or be manufactured in SoC tube cores Other components.These other components include but not limited to volatile memory 510 (for example, DRAM), nonvolatile memory 512 (for example, ROM or flash memory), graphics processing unit 514 (GPU), digital signal processor 516, cipher processor 542 (application specific processor that Encryption Algorithm is executed in hardware), chipset 520, antenna 522, display or touch-screen display 524, Touch screen controller 526, battery 528 or other power supplys, power amplifier (not shown), global positioning system (GPS) device 544, compass 530, motion co-processor or sensor 532 (may include accelerometer, gyroscope and compass), loud speaker 534, Camera 536, user input apparatus 538 (such as keyboard, mouse, stylus and Trackpad) and mass storage device 540 (such as Hard disk drive, compress disk (CD), digital versatile disk (DVD) etc.).
Communication chip 508 can realize for the wireless communication from 500 transmission data of computing device.Term " wireless " And its derivative can be used for describing that data can be transmitted by non-solid medium by using modulated electromagnetic radiation Circuit, device, system, method, technology, communication channel etc..The term does not imply that associated device does not include any circuit, Although they can not include in some embodiments.Communication chip 508 can implement times in several wireless standards or agreement What standard or agreement, including but not limited to Wi-Fi (802.11 series of IEEE), WiMAX (802.16 series of IEEE), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, its derivative and it is designated as 3G, 4G, 5G and any other wireless protocols of more highest version.Computing device 500 can To include multiple communication chips 508.For example, the first communication chip can be exclusively used in the relatively short distance of such as Wi-Fi and bluetooth without Line communicates, and can be exclusively used in GPS, EDGE, GPRS, CDMA, WiMAX, LTE, EV-DO etc. longer for the second communication chip Distance wireless communication.
The processor 504 of computing device 500 includes one or more devices, such as is formed according to embodiment as described herein GaN transistor or circuit.Term " processor " can refer to electronic data of the processing from register and/or memory with should Electronic data is converted into any device for the other electronic data that can be stored in register and/or memory or the portion of device Point.
Communication chip 508 can also include one or more devices, such as the GaN formed according to embodiment as described herein Transistor or circuit.
In other embodiments, another component accommodated in computing device 500 can include one or more devices, example Such as according to the GaN transistor or circuit of embodiment as described herein formation.
In various embodiments, computing device 500 can be laptop computer, netbook computer, notebook calculating It is machine, ultrabook computer, smart phone, tablet computer, personal digital assistant (PDA), super mobile PC, mobile phone, desk-top Computer, server, printer, scanner, monitor, set-top box, amusement control unit, digital camera, portable music are broadcast Put device or digital video recorder.In other embodiments, computing device 500 can be any other electronics for handling data Device.
Example
Example 1 is a kind of equipment comprising：Transistor device, the transistor device include raceway groove, and the raceway groove includes The gallium nitride being set on substrate；It is set on substrate, the buffer layer between raceway groove and substrate；And aln layer, wherein Buffer layer is set on aln layer.
In example 2, the aln layer of the equipment of example 1 is set on substrate.
In example 3, the substrate of the equipment of example 1 or 2 includes silicon.
In example 4, the substrate of any exemplary equipment in example 1-3 includes low-resistivity silicon.
In example 5, the buffer layer of any exemplary equipment in example 1-4 includes aluminium nitride.
In example 6, the region of the aln layer of any exemplary equipment in example 1-5 includes accounting for comprising transistor With the size in region.
In example 7, the aln layer of any exemplary equipment in example 1-6 includes the thickness of substrate.
Example 8 is a kind of method, and this method includes：Buffer layer is formed on the first side of substrate；It is formed on the buffer layer Transistor device including raceway groove, raceway groove include gallium nitride；And form aln layer in the second side of substrate.
In example 9, the formation aln layer in example 8 includes：Groove is formed to exposure in the second side of substrate The depth of buffer layer；And aln layer is formed in the trench.
In example 10, the formation groove in example 9 includes forming the groove for including a region, the region include comprising The size of the occupied area of transistor.
In example 11, after the aln layer of formation in the trench in example 9 or 10, by substrate thinning to aluminium nitride The thickness of layer.
In example 12, the formation buffer layer in any example in example 8-11 is before forming transistor device.
In example 13, formation transistor device in example 8 include form transistor device on the first substrate, and It includes aln layer being formed on the second substrate, and this method further includes that substrate is coupled to form aln layer.
In example 14, after the first substrate and the second substrate are coupled, the method for example 13 includes removal First substrate.
In example 15, formed before transistor device on the first substrate, the method for example 13 is included in the first substrate Upper formation buffer layer.
In example 16, the aln layer that formed on the second substrate in any example in example 13-15 includes： Formation includes the nucleating layer of aluminium nitride on first side of the second substrate；And groove formation is arrived in the second side of the second substrate The depth of exposure nucleating layer；And aln layer is formed in the trench.
Example 17 is a kind of equipment comprising：Transistor device, the transistor device include raceway groove, which includes The gallium nitride being set on silicon substrate；The aln layer being set in substrate；And it is arranged between raceway groove and aln layer Buffer layer.
In example 18, the aln layer of the equipment of example 17 includes the thickness of substrate.
In example 19, the region of the aln layer of the equipment of example 17 includes the ruler of the occupied area comprising transistor It is very little.
In example 20, the buffer layer of the equipment of example 17 includes aluminium nitride.
The above description of embodiment illustrated is included in the content described in abstract, it is not intended that is exhausted or general The present invention is limited to disclosed precise forms.Although the particular implementation of the present invention is described herein for exemplary purposes Mode and example, but those skilled in the relevant art, it will be recognized that in range, various equivalent modifications are all possible.
These modifications can be made according to the above specific implementation mode.The term used in following following claims should not be solved It is interpreted into the particular implementation limited the invention to disclosed in description and claims.On the contrary, the scope of the present invention is wanted It is determined by the claims that follow completely, claim is to explain established principle according to claim to explain.

Claims (20)

1. a kind of equipment, including：
The transistor device being set on substrate, the transistor device include raceway groove, and the raceway groove includes gallium nitride；
It is set on the substrate, the buffer layer between the raceway groove and the substrate；And
Aln layer, wherein the buffer layer is set on the aln layer.
2. equipment according to claim 1, wherein the aln layer is set in the substrate.
3. equipment according to claim 1, wherein the substrate includes silicon.
4. equipment according to claim 1, wherein the substrate includes low-resistivity silicon.
5. equipment according to claim 1, wherein the buffer layer includes aluminium nitride.
6. equipment according to claim 1, wherein the region of the aln layer includes the occupancy for including the transistor The size in region.
7. equipment according to claim 1, wherein the aln layer includes the thickness of the substrate.
8. a kind of method, including：
Buffer layer is formed on the first side of substrate；
Transistor device is formed on the buffer layer, the transistor device includes raceway groove, and the raceway groove includes gallium nitride；With And
Aln layer is formed in the second side of the substrate.
9. according to the method described in claim 8, wherein, forming the aln layer includes：
Groove is formed into the depth to the exposure buffer layer in the second side of the substrate；And
Aln layer is formed in the trench.
10. according to the method described in claim 9, wherein, it includes forming the groove for including a region to form groove, the region It include the size of the occupied area comprising the transistor.
11. according to the method described in claim 9, wherein, being formed in the trench after the aln layer, by the lining Bottom is thinned to the thickness of the aln layer.
12. according to the method described in claim 8, wherein, forming the buffer layer before forming the transistor device.
13. according to the method described in claim 8, wherein, it includes forming institute on the first substrate to form the transistor device Transistor device is stated, and it includes that the aln layer is formed on the second substrate to form the aln layer, and the side Method further includes that the substrate is coupled.
14. according to the method for claim 13, wherein be coupled by first substrate and second substrate Later, the method includes removing first substrate.
15. according to the method for claim 13, wherein before forming the transistor device on first substrate, The method includes forming the buffer layer on first substrate.
16. according to the method for claim 13, wherein forming the aln layer on second substrate includes：
Formation includes the nucleating layer of aluminium nitride on the first side of second substrate；And
Groove is formed into the depth to the exposure nucleating layer in the second side of second substrate；And
The aln layer is formed in the trench.
17. a kind of equipment, including：
The transistor device being set on silicon substrate, the transistor device include raceway groove, and the raceway groove includes gallium nitride；
The aln layer being set in the substrate；And
The buffer layer being set between the groove and the aln layer.
18. equipment according to claim 17, wherein the aln layer includes the thickness of the substrate.
19. equipment according to claim 17, wherein the region of the aln layer includes accounting for comprising the transistor With the size in region.
20. equipment according to claim 17, wherein the buffer layer includes aluminium nitride.
CN201680083045.7A 2016-04-01 2016-04-01 For improved heat and the gallium nitride transistor with underfill aluminium nitride of RF performances Pending CN108713253A (en)

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