CN108709505B - Wide-range interference grating ruler and distance measurement method thereof - Google Patents
Wide-range interference grating ruler and distance measurement method thereof Download PDFInfo
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Abstract
The invention discloses a wide-range interference grating ruler and a distance measurement method thereof, wherein the wide-range interference grating ruler comprises a grating array and a double-reading-head system, the grating array is formed by splicing a plurality of grating units, and the double-reading-head system comprises a laser, a beam splitter, two reading heads and a data processing unit; the laser is used for emitting a laser beam, and the optical splitter is used for splitting the laser beam to obtain a first laser beam and a second laser beam which are projected to the grating array; the two reading heads respectively acquire real-time displacement readings corresponding to the first laser beam and the second laser beam; the data processing unit is used for carrying out data processing on the real-time displacement readings of the two reading heads to obtain actual displacement; wherein the data processing comprises: performing interval compensation and reading head state judgment according to respective real-time displacement readings of the single reading heads and the interval between the grating units; and calculating the actual displacement by utilizing the real-time displacement reading and the distance compensation result of the single reading head based on the state of the reading head.
Description
Technical Field
The invention relates to the field of grating ranging, in particular to a method for realizing wide-range ranging by utilizing a spliced grating.
Background
The grating ruler is a tool for precise displacement measurement, is widely applied to the field of engineering technology scientific research, and has the advantages of high precision, strong anti-interference capability and the like because the measurement reference is the grating pitch of the grating. The grating ruler is divided into a Morel stripe grating ruler and an interference grating ruler according to the measurement principle, the cost of the Morel stripe grating ruler is low, and the precision of the interference grating ruler is high. The interference grating ruler requires good grating pitch consistency and high flatness of the grating surface, which makes the interference grating ruler with large measuring range difficult to process and high cost.
The above background disclosure is only for the purpose of assisting understanding of the inventive concept and technical solutions of the present invention, and does not necessarily belong to the prior art of the present patent application, and should not be used for evaluating the novelty and inventive step of the present application in the case that there is no clear evidence that the above content is disclosed before the filing date of the present patent application.
Disclosure of Invention
In order to solve the problems of high processing difficulty and high cost of the conventional large-range interference grating ruler, the invention provides a double-reading-head large-range interference grating ruler based on a spliced grating, and simultaneously provides a method for measuring distance by adopting the large-range interference grating ruler, so that the large-range incremental displacement measurement is realized, and the purpose of realizing high-precision large-range displacement measurement by using the low-cost spliced grating is achieved.
One of the technical solutions proposed by the present invention to achieve the above object is as follows:
a wide-range interference grating ruler comprises a grating array and a dual-reading head system, wherein the grating array is formed by splicing a plurality of grating units, and the dual-reading head system comprises a laser, a beam splitter, two reading heads and a data processing unit; the laser is used for emitting a laser beam, and the beam splitter is used for splitting the laser beam to obtain a first laser beam and a second laser beam which are used for projecting to the grating array; the two reading heads respectively obtain real-time displacement readings corresponding to the first laser beam and the second laser beam; the data processing unit is used for carrying out data processing on the real-time displacement readings of the two reading heads to obtain actual displacement; wherein the data processing comprises:
performing interval compensation and reading head state judgment according to respective real-time displacement readings of the single reading heads and the interval between the grating units; and calculating the actual displacement by utilizing the real-time displacement reading and the distance compensation result of the single reading head based on the state of the reading head.
Another embodiment of the present invention further provides a distance measuring method of the wide-range interferometric grating ruler, including the following steps:
when initializing, a first laser beam and a second laser beam corresponding to a reading head A and a reading head B are projected on the same grating unit, and the projection points are respectively marked as PA、PB(ii) a Wherein, a projection point PAAt PBLeft side;
the reading heads A and B move rightwards relative to the grating array simultaneously and keep fixed relative to the moving direction, and the reading X is read according to the real-time displacement of the reading heads A and B during the moving processA、XBJudging the state of the reading head;
recording the displacement reading difference value of the reading heads A and B in the moving process, and performing space compensation;
and calculating the actual displacement X by using the real-time displacement reading and the distance compensation result of the single reading head based on the state of the reading head.
Preferably, the reading X is read according to the real-time displacement of the reading heads A and BA、XBJudging the state of the reading head, specifically comprising:
obtaining real-time displacement readings X of reading head A and reading head BA、XBAnd calculating the difference (X) of the displacement readingsA-XB)；
Separately solve for XA、XBAnd (X)A-XB) Derivative X ofA'、XB'、(XA-XB)'；
When the reading head and the grating array move relatively, according to XA'、XB' and (X)A-XB) To judge the status of the reading head: first, an initial state is defined in which projection points P of the first and second laser beams respectively corresponding to the reading head A and the reading head B are projectedA、PBOn the same raster unit as the projection point PAAt PBOn the left and with readheads a and B simultaneously moving to the right relative to the grating array, readheads a and B will experience the following four states in sequence:
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and projects a point PAAnd PBWhen the grating units are positioned on the same grating unit,recording as state S1;
when X is presentA' No. 0 and XB' is 0 and (X)A-XB) When'' 0, point P is projectedBThe reading head B is interrupted in the interval area between the adjacent grating units, and the reading head A is in normal reading and is recorded as the state S2;
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and two projection points PAAnd PBWhen the two raster units are positioned on the adjacent raster units, the state is recorded as S3;
when X is presentA' 0 and XB' ≠ 0 and (X)A-XB) When' ≠ 0, point P is projectedAThe reading head A is interrupted and the reading head B is normally read and is recorded as a state S4 when the reading head A is positioned in the interval area between the adjacent grating units;
wherein, when XA' No. 0 and XB' ≠ 0 and (X)A-XB) And when the number and the direction of the two projection points passing through the interval area are counted, the two reading heads are judged to be in the state S1 or the state S3, and in the states S1 and S3, the two reading heads normally read.
Preferably, the algorithm process for performing the distance compensation includes:
during the relative movement of the grating array and the double-reading head in a constant relative movement direction, (X)A-XB) When the value is 0, namely every time the state S1 or the state S3, the difference value X of the double reading head is recorded in turnA-XB＝δi1,2,3, …,2N-2, N being the number of grating elements constituting the grating array; in the state S1, δi＝δ2k-1K 1,2,3, …, N-1, k indicating that read head B has passed k of said spaced regions; in the state S3, δi＝δ2k。
Preferably, the actual displacement X is calculated as follows:
wherein, S is S1, and S2 indicates that the status S of the reading head is S1 or S2; s3, S4 indicates that the status S of the readhead is either status S3 or status S4.
The wide-range interference grating ruler and the distance measuring method thereof can realize high-precision wide-range displacement measurement by using the spliced grating with low cost.
Drawings
FIG. 1 is a schematic diagram of a beam splitter of a wide-range interferometric grating scale in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of a dual-readhead system of a wide-range interferometric grating scale according to this invention.
Detailed Description
The invention is further described with reference to the following figures and detailed description of embodiments.
The specific implementation mode of the invention provides a wide-range interference grating ruler, which comprises a grating array and a double-reading head system, wherein the grating array is formed by splicing a plurality of grating units, and the double-reading head system comprises a laser, a beam splitter, two reading heads and a data processing unit; with reference to fig. 1 and 2, the laser is adapted to emit a laser beam L0A beam splitter BS for splitting the laser beam L0Splitting light to obtain a first laser beam L for projection onto the grating arrayAAnd a second laser beam LB(ii) a Two reading heads respectively obtain real-time displacement readings corresponding to the first laser beam and the second laser beam; the data processing unit is used for processing the real-time displacement readings read by the two reading heads to obtain actual displacement; wherein the data processing unit performs the following data processing:
performing interval compensation and reading head state judgment according to respective real-time displacement readings of the single reading heads and the interval between the grating units; and calculating the actual displacement by utilizing the real-time displacement reading and the distance compensation result of the single reading head based on the state of the reading head.
In one embodiment, the beam splitter is shown in FIG. 1 as a laser beam L0Is incident from one working surface of the spectroscope BS and then is divided into two beams of parallel laser LAAnd LBAnd (4) injecting. Preferably, the beam splitter isocanderically splits the laser beam LAAnd LBThe beam diameter is preferably 2 mm.
With continued reference to fig. 1, the beam splitter is a splitting prism, the direction of the incident light is parallel to the splitting plane and parallel to the top plane, and the incident light is incident on any side surface, and the incident point enables the first refracted light of the incident light to pass through the splitting plane before passing through other optical planes.
Referring to FIG. 2, in one particular embodiment, the two readheads of the dual readhead system are identical in principle and are symmetrical about the double mirror M, and are labeled A and B for ease of distinction. At the reading head A, a laser beam LAAfter the light is irradiated on the transmission grating G, two beams of diffracted light A1 and A2 are generated, the two beams of diffracted light are respectively reflected by the reflecting mirrors 11 and M and then are combined at the beam splitter 21, one part of the combined light generates an interference signal at the detector PA2, the other part of the combined light performs phase delay through the quarter-wave plate 31, an interference signal with 90-degree phase delay is generated at the detector PA1, and the displacement X of the reading head A can be calculated through the two interference signalsA. Similarly, at the reading head B, the laser beam LBAfter the two beams of diffracted light are irradiated on the transmission grating G, two beams of diffracted light B1 and B2 are generated, the two beams of diffracted light are respectively reflected by the reflecting mirrors 12 and M and then are combined at the beam splitter 22, one part of the combined light generates an interference signal at the detector PB2, the other part of the combined light performs phase delay through the quarter-wave plate 32, an interference signal with 90-degree phase delay is generated at the detector PB1, and the displacement X of the reading head B can be calculated through the two interference signalsB。
In order to expand the measuring range, the invention adopts the grating array spliced by a plurality of grating units, because the spliced position is difficult to avoid gaps, if only one reading head is adopted to read the displacement, errors can exist certainly, the invention obtains the real-time displacement reading X of the two reading heads by the double-reading-head system shown in figure 2 based on the principleAAnd XBThen, the data processing program of the present invention is used to perform the following processing to obtain the actual displacement value, and the data processing is as follows:
1) firstly, judging the state of a reading head:
calculating a difference in readings (X)A-XB) Separately solving for XA、XBAnd (X)A-XB) Derivative X ofA'、XB'、(XA-XB) '; when the reading head and the grating array move relatively, according to XA'、XB' and (X)A-XB) To judge the status of the reading head: first, an initial state is defined in which projection points P of the first and second laser beams respectively corresponding to the reading head A and the reading head B are projectedA、PBOn the same raster unit as the projection point PAAt PBOn the left and with readheads a and B simultaneously moving to the right relative to the grating array, readheads a and B will experience the following four states in sequence:
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and points PA and P are projectedBWhen the two raster units are positioned on the same raster unit, the state is marked as S1;
when X is presentA' No. 0 and XB' is 0 and (X)A-XB) When'' 0, point P is projectedBThe reading head B is interrupted in the interval area between the adjacent grating units, and the reading head A is in normal reading and is recorded as the state S2;
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and two projection points PAAnd PB, when located on two adjacent grating elements, is recorded as state S3;
when X is presentA' 0 and XB' ≠ 0 and (X)A-XB) When' ≠ 0, the projection point PA is positioned in the interval area between the adjacent grating units, at the moment, the reading of the reading head A is interrupted, and the reading head B reads normally and is recorded as a state S4;
wherein, when XA' No. 0 and XB' ≠ 0 and (X)A-XB) And when the number and the direction of the two projection points passing through the interval area are counted, the two reading heads are judged to be in the state S1 or the state S3, and in the states S1 and S3, the two reading heads normally read.
2) Secondly, performing distance compensation:
during the relative movement of the grating array and the double-reading head in a constant relative movement direction, (X)A-XB) When the displacement difference X of the double reading head is sequentially recorded every time the state S1 or the state S3 is' 0A-XB＝δi1,2,3, …,2N-2, N being the number of grating elements constituting the grating array; in the state S1, δi＝δ2k-1K 1,2,3, …, N-1, k indicating that read head B has passed k of said spaced regions; in the state S3, δi＝δ2k
3) Calculating the actual displacement X:
wherein, S is S1, and S2 indicates that the status S of the reading head is S1 or S2; s3, S4 indicates that the status S of the readhead is either status S3 or status S4.
According to the wide-range interference grating ruler provided by the preferred embodiment of the invention, the distance between adjacent grating units of the grating array is 0.1-1 mm, the length of each grating unit is 5-10 mm, the plurality of grating units are sequentially arranged in parallel along the length direction and spliced into the grating array, and the grid lines of the gratings are vertical to the arrangement direction. And the splicing of the plurality of gratings adopts photoetching splicing or mechanical splicing.
The photolithographic splicing comprises: and uniformly coating photoresist on the grating array substrate, and inlaying the photoetching latent image of the grating unit on the photoresist of the grating array substrate through multiple times of interference photoetching exposure according to the preset splicing requirement.
The mechanical splice comprises: firstly, grating units are manufactured on mutually independent grating substrates, and then the grating units are fixed on the whole grating array substrate according to the preset splicing requirement.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several equivalent substitutions or obvious modifications can be made without departing from the spirit of the invention, and all the properties or uses are considered to be within the scope of the invention.
Claims (6)
1. A wide-range interference grating scale is characterized in that: the grating array is formed by splicing a plurality of grating units, and the double-reading head system comprises a laser, a beam splitter, two reading heads and a data processing unit;
the laser is used for emitting a laser beam, and the beam splitter is used for splitting the laser beam to obtain a first laser beam and a second laser beam which are used for projecting to the grating array;
the two reading heads respectively obtain real-time displacement readings corresponding to the first laser beam and the second laser beam;
the data processing unit is used for carrying out data processing on the real-time displacement readings of the two reading heads to obtain actual displacement;
wherein the data processing comprises:
performing space compensation and state judgment of the reading head according to the real-time displacement reading of the reading head A, the real-time displacement reading of the reading head B and the space between the grating units;
calculating the actual displacement by using the real-time displacement reading and the spacing compensation result of the single reading head based on the state of the reading head;
the reading head state judgment specifically comprises the following steps:
obtaining real-time displacement readings X of reading head A and reading head BA、XBAnd calculating a difference value (X) of the readingsA-XB)；
Separately solve for XA、XBAnd (X)A-XB) Derivative X ofA'、XB'、(XA-XB)'；
When the reading head and the grating array move relatively, according to XA'、XB' and (X)A-XB) To judge the status of the reading head: first, an initial state is defined in which projection points P of the first and second laser beams respectively corresponding to the reading head A and the reading head B are projectedA、PBOn the same raster unit as the projection point PAAt PBOn the left and with readheads a and B simultaneously moving to the right relative to the grating array, readheads a and B will experience the following four states in sequence:
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and projects a point PAAnd PBWhen the two raster units are positioned on the same raster unit, the state is marked as S1;
when X is presentA' No. 0 and XB' is 0 and (X)A-XB) When'' 0, point P is projectedBThe reading head B is interrupted in the interval area between the adjacent grating units, and the reading head A is in normal reading and is recorded as the state S2;
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and two projection points PAAnd PBWhen the two raster units are positioned on the adjacent raster units, the state is recorded as S3;
when X is presentA' 0 and XB' ≠ 0 and (X)A-XB) When' ≠ 0, point P is projectedAThe reading head A is interrupted and the reading head B is normally read and is recorded as a state S4 when the reading head A is positioned in the interval area between the adjacent grating units;
wherein, when XA' No. 0 and XB' ≠ 0 and (X)A-XB) When the number and the direction of the two projection points passing through the interval area are counted, the two reading heads are judged to be in the state S1 or the state S3, and in the states S1 and S3, the two reading heads normally read;
the distance compensation specifically comprises:
during the relative movement of the grating array and the double-reading head in a constant relative movement direction, (X)A-XB) When the displacement difference X of the double reading head is sequentially recorded every time the state S1 or the state S3 is' 0A-XB＝δiI-1, 2,3, …,2N-2, N being the light constituting the grating arrayThe number of gate cells;
in the state S1, δi＝δ2k-1K is 1,2,3, …, N-1, k indicating that read head B has passed k of said spaced regions; in the state S3, δi＝δ2k；
Calculating the actual displacement X:
wherein, S is S1, and S2 indicates that the status S of the reading head is S1 or S2; s3, S4 indicates that the status S of the readhead is either status S3 or status S4.
2. The wide-range interferometric grating scale of claim 1, wherein: the distance between adjacent grating units of the grating array is 0.1-1 mm, the length of each grating unit is 5-10 mm, the grating units are sequentially arranged in parallel along the length direction and spliced into the grating array, and grid lines of the gratings are perpendicular to the arrangement direction.
3. The wide-range interferometric grating scale of claim 2, wherein: and the splicing of the plurality of gratings adopts photoetching splicing or mechanical splicing.
4. A wide-range interferometric grating scale as claimed in claim 3, characterized in that: the photolithographic splicing comprises: and uniformly coating photoresist on the grating array substrate, and inlaying the photoetching latent image of the grating unit on the photoresist of the grating array substrate through multiple times of interference photoetching exposure according to the preset splicing requirement.
5. A wide-range interferometric grating scale as claimed in claim 3, characterized in that: the mechanical splice comprises: firstly, grating units are manufactured on mutually independent grating substrates, and then the grating units are fixed on the whole grating array substrate according to the preset splicing requirement.
6. The method for measuring distance of a wide-range interferometric grating scale as claimed in claim 1, comprising the steps of:
when initializing, a first laser beam and a second laser beam corresponding to a reading head A and a reading head B are projected on the same grating unit, and the projection points are respectively marked as PA、PB(ii) a Wherein, a projection point PAAt PBLeft side;
the reading heads A and B move rightwards relative to the grating array simultaneously and keep fixed relative to the moving direction, and the reading X is read according to the real-time displacement of the reading heads A and B during the moving processA、XBJudging the state of the reading head;
recording the displacement reading difference value of the reading heads A and B in the moving process, and performing space compensation;
calculating the actual displacement X by utilizing the real-time displacement reading and the spacing compensation result of the single reading head based on the state of the reading head;
real-time displacement reading X according to reading heads A and BA、XBJudging the state of the reading head, specifically comprising:
obtaining real-time displacement readings X of reading head A and reading head BA、XBAnd calculating the difference (X) of the displacement readingsA-XB)；
Separately solve for XA、XBAnd (X)A-XB) Derivative X ofA'、XB'、(XA-XB)'；
When the reading head and the grating array move relatively, according to XA'、XB' and (X)A-XB) To judge the status of the reading head: first, an initial state is defined in which projection points P of the first and second laser beams respectively corresponding to the reading head A and the reading head B are projectedA、PBOn the same raster unit as the projection point PAAt PBOn the left and with readheads a and B simultaneously moving to the right relative to the grating array, readheads a and B will experience the following four states in sequence:
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and projects a point PAAnd PBWhen the two raster units are positioned on the same raster unit, the state is marked as S1;
when X is presentA' No. 0 and XB' is 0 and (X)A-XB) When'' 0, point P is projectedBThe reading head B is interrupted in the interval area between the adjacent grating units, and the reading head A is in normal reading and is recorded as the state S2;
when X is presentA' No. 0 and XB' ≠ 0 and (X)A-XB) ' 0, and two projection points PAAnd PBWhen the two raster units are positioned on the adjacent raster units, the state is recorded as S3;
when X is presentA' 0 and XB' ≠ 0 and (X)A-XB) When' ≠ 0, point P is projectedAThe reading head A is interrupted and the reading head B is normally read and is recorded as a state S4 when the reading head A is positioned in the interval area between the adjacent grating units;
wherein, when XA' No. 0 and XB' ≠ 0 and (X)A-XB) When the number and the direction of the two projection points passing through the interval area are counted, the two reading heads are judged to be in the state S1 or the state S3, and in the states S1 and S3, the two reading heads normally read;
the algorithm process for performing the distance compensation comprises the following steps:
during the relative movement of the grating array and the double-reading head in a constant relative movement direction, (X)A-XB) When the value is 0, namely every time the state S1 or the state S3, the difference value X of the double reading head is recorded in turnA-XB＝δi1,2,3, …,2N-2, N being the number of grating elements constituting the grating array;
in the state S1, δi＝δ2k-1K is 1,2,3, …, N-1, k indicating that read head B has passed k of said spaced regions; in the state S3, δi＝δ2k；
The calculation formula of the actual displacement X is as follows:
wherein, S is S1, and S2 indicates that the status S of the reading head is S1 or S2; s3, S4 indicates that the status S of the readhead is either status S3 or status S4.
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