CN108691769B - Vacuum pump device and operation control method for vacuum pump device - Google Patents
Vacuum pump device and operation control method for vacuum pump device Download PDFInfo
- Publication number
- CN108691769B CN108691769B CN201810321818.1A CN201810321818A CN108691769B CN 108691769 B CN108691769 B CN 108691769B CN 201810321818 A CN201810321818 A CN 201810321818A CN 108691769 B CN108691769 B CN 108691769B
- Authority
- CN
- China
- Prior art keywords
- pump
- booster pump
- main
- main pump
- booster
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 claims description 78
- 230000005856 abnormality Effects 0.000 claims description 41
- 238000005086 pumping Methods 0.000 claims description 8
- 230000004913 activation Effects 0.000 abstract description 20
- 230000003213 activating effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
- F04C2240/403—Electric motor with inverter for speed control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/07—Electric current
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/86—Detection
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Valves And Accessory Devices For Braking Systems (AREA)
- Forklifts And Lifting Vehicles (AREA)
Abstract
The present invention relates to a vacuum pump apparatus and an operation control method for the vacuum pump apparatus. The vacuum pump device is provided with a main pump and a booster pump. The main pump and the booster pump are provided with an intake port and an exhaust port, respectively. The air inlet of the main pump is communicated with the air outlet of the booster pump. The switch receives an activation instruction for activating the main pump. When the switch receives the start instruction and the main pump is started, whether to start the booster pump is determined based on the start instruction, and the booster pump is started. This makes it possible to provide a vacuum pump that is smaller and lower in cost than conventional vacuum pumps.
Description
Technical Field
The present invention relates to a vacuum pump apparatus including a main pump and a booster pump, and an operation control method for the vacuum pump apparatus.
Background
In recent years, dry vacuum pumps that can operate at atmospheric pressure and easily provide a clean vacuum environment have been used in a wide range of fields, for example, as components of semiconductor manufacturing equipment or as equipment for manufacturing liquid crystals. Conventionally, a pump control unit, a pressure sensor, a main pump inverter, and a booster pump inverter have been used in the operation of a dry vacuum pump incorporating a Main Pump (MP) and a Booster Pump (BP). Also, a pressure sensor is necessary in starting the booster pump. The reason for this is as follows.
The main pump and the booster pump are respectively provided with an air inlet and an air outlet, and the air inlet of the main pump is communicated with the air outlet of the booster pump. The intake port of the booster pump is the intake side of the vacuum pumping apparatus, and the exhaust port of the main pump is the exhaust side of the vacuum pumping apparatus. A pressure sensor is disposed in a pipe connecting an exhaust port of the booster pump and an intake port of the main pump. The pressure sensor detects the pressure in the pipe. The time for starting the booster pump is as follows: the pump control unit determines whether or not the pressure value detected by the pressure sensor is appropriate, and if so, outputs an activation signal to the booster pump inverter.
The reason why the main pump and the booster pump are not started simultaneously is as follows. Since the booster pump has a large load when the pressure in the pipe between the booster pump and the main pump does not become a vacuum equal to or lower than a predetermined pressure, the booster pump cannot be operated stably. Therefore, the booster pump is started after the piping between the main pump and the booster pump is vacuumed by the operation of the main pump.
The dry vacuum pump is started and stopped as follows. The main pump is activated by operation of an activation switch by a user. The pump control unit determines whether or not the pressure in the pipe between the main pump and the booster pump is equal to or lower than a predetermined pressure. When it is determined that the vacuum pressure is equal to or lower than the predetermined pressure, the pump control unit sends a command to the booster pump inverter to start the booster pump.
When the main pump is stopped by an operation of a stop switch by a user or an alarm in the main pump, the pump control portion sends a command to the booster pump inverter to stop the booster pump. On the other hand, when the booster pump is stopped due to the occurrence of an alarm in the booster pump, the pump control unit determines whether or not to stop the main pump, and when it is determined that the main pump does not need to be stopped, the pump control unit does not stop the main pump. The reason for this is as follows. Even if the booster pump is stopped, if the main pump is operated, the rate of pressure rise in the container that should be evacuated is suppressed. In addition, the main pump is considered to be normal even when the booster pump is stopped for a reason specific to the booster pump. Therefore, whether to continue the operation of the main pump depends on the design concept of the user or designer of the vacuum system.
Documents of the prior art
Patent document
Patent document 1: japanese patent No. 4218756
In a conventional dry vacuum pump incorporating a main pump and a booster pump, a pressure sensor and a signal processing circuit for the pressure sensor are required to appropriately start the booster pump. Therefore, an installation space for the pressure sensor is required, and the vacuum pump is increased in size. In addition, the cost for the pressure sensor and its signal processing circuitry results in a high cost vacuum pump.
Disclosure of Invention
One embodiment of the present invention is made to solve the above problem, and an object of the present invention is to provide a vacuum pump which is smaller and lower in cost than the conventional vacuum pump.
In order to solve the above problem, according to a first aspect, there is provided an operation control device for a vacuum pump apparatus including a main pump and a booster pump, the main pump and the booster pump including an intake port and an exhaust port, respectively, the intake port of the main pump communicating with the exhaust port of the booster pump, the intake port of the booster pump being on an intake side of the vacuum pump apparatus, the exhaust port of the main pump being on an exhaust side of the vacuum pump apparatus, the operation control device including: a start instruction receiving unit that receives a start instruction for starting the main pump; and a booster pump starting unit that determines whether or not to start the booster pump based on the start instruction when the start instruction receiving unit receives the start instruction and the main pump is started, and further starts the booster pump.
In the present embodiment, there is no pressure sensor and no signal processing circuit of the pressure sensor, and the main pump and the booster pump can be started without using the pressure sensor. Therefore, when the start instruction receiving unit receives the start instruction and the main pump is started, the booster pump starting unit determines whether or not to start the booster pump based on the start instruction, and further starts the booster pump. Since there is no pressure sensor or signal processing circuit of the pressure sensor, a vacuum pump which is smaller and lower in cost than the conventional vacuum pump can be provided.
The reason why the operation can be performed without the pressure sensor is as follows. Conventionally, the reason why the main pump and the booster pump are not started at the same time is because, in the booster pump, if the pressure in the pipe between the booster pump and the main pump does not become a vacuum equal to or lower than a predetermined pressure, the load on the booster pump becomes large, and the booster pump cannot operate stably. Conventionally, after a pipe between a main pump and a booster pump is vacuumed by the operation of the main pump, the booster pump is started.
When the rotation speed of the main pump exceeds a predetermined value and a predetermined time elapses after the start of the main pump, the pressure between the main pump and the booster pump is estimated to be a pressure at a level at which the booster pump can be started. This is because the volume of the intake side (upper stage side) of the main pump is not infinite. A container that is to be subjected to vacuum is provided on the intake side of the vacuum pump device. The dry vacuum pump evacuates the gas in the container to make the container become vacuum. The volume of the tank is limited and therefore the volume of the intake side (superior side) of the main pump is not infinite. As described above, the booster pump can be safely started only by knowing that a predetermined time has elapsed after the main pump is started. In addition, since the degree of vacuum in the pipe does not substantially decrease when only a short time has elapsed after the stop of the main pump, the booster pump can be safely started immediately after the start of the main pump.
The time required to be able to start the booster pump, or the rotational speed of the main pump required to be able to start can be determined by experiment or the like. However, in the case of an unexpected situation, that is, in the case where the volume of the container is much larger than that assumed in the pump design, in the case where the container is not closed due to a mistake or the like, or in the case where gas flows into the container from the outside due to a breakage or the like, there are the following disposal methods. In such a case, even when the main pump reaches a predetermined rotational speed and a predetermined time elapses, the pressure between the main pump and the booster pump may not reach a sufficient vacuum for stably operating the booster pump. In this case, since the current flowing to the booster pump motor increases, the current of the booster pump motor is detected by the inverter device of the booster pump, and a booster pump overcurrent alarm is generated. When the over-current alarm of the booster pump is detected, the booster pump is stopped. Further, a signal indicating the stop of the booster pump is transmitted from the digital output portion of the inverter device for the booster pump to the digital input portion of the main pump inverter device, thereby stopping the main pump and safely stopping the pump system.
In a second aspect, the operation control device is configured such that the booster pump activation unit determines that the booster pump can be activated and activates the booster pump when the activation instruction reception unit receives the activation instruction.
In a third aspect, the operation control device is configured such that the booster pump activation unit determines that the booster pump can be activated and activates the booster pump when a predetermined time has elapsed after the activation instruction reception unit receives the activation instruction.
In a fourth aspect, the operation control device is configured such that the booster pump starting unit determines that the booster pump can be started and starts the booster pump when the predetermined time has elapsed and the rotation speed of the main pump is equal to or greater than a predetermined number after the start instruction receiving unit receives the start instruction.
In a fifth aspect, the operation control device is configured such that, when the predetermined time has elapsed after the start instruction receiving unit receives the start instruction, the number of revolutions of the main pump is equal to or greater than a predetermined number, and a current value of a motor that drives the main pump is equal to or less than a predetermined value, the booster pump starting unit determines that the booster pump can be started, and starts the booster pump.
In the present embodiment, the reason why the booster pump is determined to be activated when the current value of the motor driving the main pump is equal to or less than the predetermined value is as follows. Since the pressure between the main pump and the booster pump cannot be actually measured because there is no pressure sensor, whether the pressure required for stable operation of the booster pump is reached or not is estimated from the results of experiments and the like. One method of improving the accuracy of the estimation is the method of the present embodiment. In the present embodiment, when the main pump reaches a predetermined rotational speed, the current of the main pump is monitored, and when a predetermined time has elapsed after the current of the main pump has decreased to a predetermined value, the booster pump is started.
The current flowing to the main pump motor is proportional to the flow rate of gas introduced to the main pump. That is, when the pressure in the tank is high immediately after the start of operation, the main pump current is high. When the pressure of the upper stage of the main pump is lowered by exhausting the gas in the tank, the current of the main pump is lowered. From this fact, the pressure on the upper stage side of the main pump can be estimated with higher accuracy than the pressure on the upper stage side of the main pump can be estimated based on the rotational speed, the current, and the time. Therefore, it is possible to reliably recognize that the condition for starting the rotation of the booster pump is satisfied, and the possibility of the occurrence of an alarm when the booster pump is started can be reduced.
In a sixth aspect, the operation control device is configured as follows, and includes: a stop instruction receiving unit that receives a stop instruction for stopping the main pump; and a booster pump stop unit that determines whether or not to stop the booster pump based on the stop instruction and stops the booster pump when the stop instruction receiving unit receives the stop instruction and the main pump stops.
In a seventh aspect, the operation control device is configured as follows, and includes: a main pump abnormality detection unit that detects an abnormality of the main pump; and an abnormality stop unit that stops the main pump and the booster pump when the main pump abnormality detection unit detects an abnormality of the main pump.
In an eighth aspect, the operation control device is configured as follows, and includes: a booster pump abnormality detection unit that detects an abnormality of the booster pump; and a booster pump abnormality stop unit that stops the booster pump without stopping the main pump when the booster pump abnormality detection unit detects an abnormality of the booster pump.
In the present embodiment, the main pump is not operated when the booster pump is stopped. The reason for this is because the main pump does not necessarily have to be stopped when the booster pump is stopped. Even if the booster pump is stopped, the speed of the pressure rise in the tank is suppressed when the main pump is operated. Therefore, in the case where the booster pump is stopped for a reason specific to the booster pump, whether to stop or continue the operation of the main pump depends on the design concept of the vacuum system. When the user or the like desires to continue the operation of the main pump, the signal for stopping the booster pump may not be transmitted from the digital output portion for the booster pump to the digital input portion for the main pump. Further, even if the signal is transmitted and the main pump receives the signal that the booster pump is stopped, the main pump may not be stopped.
In a ninth aspect, the operation control device is configured to include a signal input unit to which a signal for controlling the rotational speed of the main pump and/or the booster pump is externally input.
In a tenth aspect, there is provided an operation control method for a vacuum pump apparatus including a main pump and a booster pump, the main pump and the booster pump including an intake port and an exhaust port, respectively, the intake port of the main pump communicating with the exhaust port of the booster pump, the intake port of the booster pump being on an intake side of the vacuum pump apparatus, the exhaust port of the main pump being on an exhaust side of the vacuum pump apparatus, the operation control method comprising: a step of accepting a start instruction for starting the main pump; and determining whether to start the booster pump based on the start instruction and starting the booster pump when the main pump is started upon receiving the start instruction.
Drawings
Fig. 1 is a block diagram showing a schematic configuration of a vacuum pump apparatus including an operation control device according to an embodiment of the present invention.
Fig. 2 is a block diagram showing a schematic configuration of a vacuum pump apparatus including an operation control apparatus according to a comparative example.
Fig. 3 is a block diagram showing the configuration of the main pump inverter 41.
Fig. 4 is a block diagram showing the flow of signals inside the inverter control circuit 66.
Fig. 5 is a block diagram showing the exchange of signals between the inverter control circuit 66 of the main pump 10 and the inverter control circuit 66 of the booster pump 20.
Fig. 6 is a diagram showing the relationship between the timing of starting and stopping the main pump 10 and the booster pump 20.
Fig. 7 is a diagram showing the relationship between the timing of starting and stopping the main pump 10 and the booster pump 20.
Description of the symbols
1 vacuum pump device
41 main pump inverter
42 booster pump inverter
64 inverter main circuit
66 inverter control circuit
72 alarm detection part
74 temperature detecting part
76 current detecting part
78 rotation speed detecting part
80 digital signal detection part
82 digital signal output part
84 analog signal detecting section
86 switch
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or corresponding components are denoted by the same reference numerals, and redundant description thereof is omitted.
Fig. 1 is a block diagram showing a schematic configuration of a vacuum pump apparatus having an operation control device according to an embodiment of the present invention. As shown in the drawing, the vacuum pump apparatus 1 includes a main pump 10 and a booster pump 20 of a double-shaft positive-displacement dry vacuum pump. The main pump 10 includes a pump section 102 and a motor section (pump driving motor) 104. The pump section 102 includes an intake port 11a and an exhaust port 11 b. The booster pump 20 includes a pump section 202 and a motor section (pump driving motor) 204. The pump section 202 includes an intake port 21a and an exhaust port 21 b.
The intake port 11a of the main pump 10 and the exhaust port 21b of the booster pump 20 are connected by a connecting pipe 31. The vacuum pump apparatus 1 is configured by connecting the intake port 21a of the booster pump 20 to an exhaust port (not shown) of a container (not shown) through a connecting pipe 92. The intake port 11a of the booster pump 20 is set to the intake side of the vacuum pump apparatus 1, and the exhaust port 11b of the main pump 10 is set to the exhaust side of the vacuum pump apparatus 1. By operating the motor sections 104, 204 and the pump sections 102, 202 of the main pump 10 and the booster pump 20, the gas in the tank is sucked from the intake port 21a of the booster pump 20 as indicated by an arrow a. The drawn gas is drawn from the exhaust port 21B of the booster pump 20 to the intake port 11a of the main pump 10, and is discharged from the exhaust port 11B as indicated by an arrow B.
The main pump inverter 41 supplies a drive current to the motor portion 104 (pump-driving motor) via a power supply line L1. The booster pump inverter 42 supplies a drive current to the motor section 204 (pump driving motor) via a power supply line L2. The main pump inverter 41 and the booster pump inverter 42 transmit signals for start or stop via a signal line 50. The details of the signal for start or stop will be described later.
The vacuum pump apparatus 1 is started and stopped substantially as follows. By the operation of the start/stop switch by the user, a start/stop instruction 60 is input to the main pump inverter 41, and the pump section 102 is started. The main pump inverter 41 transmits a signal for starting the pump section 202 via the signal line 50. The pump section 202 is activated by this signal.
The stop is as follows. When an alarm is generated in the pump section 102 of the main pump 10 and the pump section 102 is stopped, the main pump inverter 41 transmits a signal for stopping the pump section 202 via the signal line 50. The pump section 202 is stopped by this signal.
When an alarm occurs in the pump section 202 of the booster pump 20 and the booster pump is stopped, the main pump 10 is not stopped. At this time, the booster pump 20 is started again by the retry function of the booster pump inverter 42.
When the main pump 10 is stopped by the user's operation of the start-stop switch, the main pump inverter 41 transmits a signal for stopping the pump section 202 via the signal line 50. The pump section 202 is stopped by this signal. Further, the booster pump inverter 42 has a function of booster pump rotation speed control depending on the external analog voltage 62.
Here, in order to compare with the present embodiment, fig. 2 shows a vacuum pump apparatus 52 that requires a pressure sensor for starting the booster pump. Fig. 2 is a block diagram showing a schematic configuration of a vacuum pump apparatus 52 having an operation control apparatus according to a comparative example. The pressure sensor 54 is disposed in the connecting pipe 31 connecting the exhaust port 21b of the pump section 202 of the booster pump 20 and the intake port 11a of the pump section 102 of the main pump 10. The pressure sensor 54 detects the pressure in the connecting pipe 31. The pressure detected by the pressure sensor 54 is sent to the pump control portion 56. The pump control unit 56 determines whether or not the pressure value detected by the pressure sensor 54 is an appropriate value in order to detect the timing to start the pump section 202 of the booster pump 20. If the pressure value is appropriate, the pump control unit 56 outputs an activation signal 58 to the booster pump inverter 421.
Fig. 3 illustrates a main pump inverter 41 according to the present embodiment. Fig. 3 is a block diagram showing the configuration of the main pump inverter 41. The booster pump inverter 42 has substantially the same configuration as the main pump inverter 41. For the different points, reference is made in the following description of the main pump inverter 41. Regarding the portions of the main pump inverter 41 not mentioned in relation to the booster pump inverter 42, the main pump inverter 41 and the booster pump inverter 42 have the same structure and operation.
The main pump inverter 41 includes: an inverter main circuit 64 for supplying an ac current to the motor unit 104 to drive the motor unit 104; an inverter control circuit 66 for controlling the inverter main circuit 64 in accordance with various signals input from the outside to indirectly operate the motor unit 104 by the inverter control circuit 66; and a control circuit power supply 70, wherein the control circuit power supply 70 generates a low-voltage dc power supply necessary for driving the inverter control circuit 66 by the power supply 68 input to the main pump inverter 41. Generally, 100V, 200V, 400V, etc. of AC are input to the main pump inverter 41. On the other hand, the inverter control circuit 66 is driven by DC 3.3V, 5V, 12V, or the like. The inverter control circuit 66 performs alarm detection and display based on an input signal to the inverter control circuit 66, records a target rotation speed and the like, and records an operation history of the inverter. The inverter control circuit 66 of the main pump 10, the inverter control circuit 66 of the booster pump 20, and the switch 86 constitute an operation control device.
The current, temperature, and rotation speed are detected by a current detector 76, a temperature detector 74, and a rotation speed detector 78, which will be described below. As shown in fig. 4, the current detector 76, the temperature detector 74, and the rotation speed detector 78 output the respective detection results to the alarm detector 72. Fig. 4 is a block diagram showing the flow of signals inside the inverter control circuit 66.
The temperature detection unit 74 receives a temperature signal from a temperature sensor provided outside the main pump inverter 41, and converts the temperature signal into temperature information of a predetermined format. The converted information is transmitted to the alarm detection unit 72. The temperature detector 74 is an analog circuit or a CPU having an a/D conversion function. The load on the pump can be estimated by measuring the temperatures of the respective portions of the main pump 10. The temperature sensor is provided in, for example, the pump section 102 main body and the motor section 104. The temperature sensors may be provided in the pipes 94 located before the intake port 21a of the booster pump 20, between the main pump 10 and the booster pump 20, and after the exhaust port 11b of the main pump 10.
The current detection unit 76 receives a signal from the current sensor, and converts the signal into current information of a predetermined format. The converted information is transmitted to the alarm detection unit 72. The current detection unit 76 is an analog circuit or a CPU having an a/D conversion function. The current sensors are provided at, for example, an output portion, an input portion, and a motor portion 104 of the main pump inverter 41. The current sensor is, for example, a hall current detector. The hall current detector measures a current by measuring a magnetic flux generated in proportion to the current without contact through a combination of a magnetic core and a magnetic sensor (hall element).
The rotation speed detecting unit 78 obtains the rotation speed of the motor from the motor current obtained by the current detecting unit 76. The rotation speed detecting unit 78 obtains the rotation speed of the motor by estimating the position of the magnetic pole of the motor from the distortion of the waveform of the motor current and continuously estimating the position of the magnetic pole of the motor. Instead of using the motor current, a magnetic pole sensor or a rotational speed sensor may be provided in the motor, and a sensor signal obtained by the sensor may be read into a rotational speed detection unit to detect the rotational speed of the motor. In this case, the phase of the motor can be easily and accurately grasped as compared with the estimation of the rotation speed from the current, and therefore the motor can be controlled more stably.
The digital signal detection unit 80 detects a switch signal 88 (analog signal or digital signal) from a switch 86 for starting and stopping the vacuum pump apparatus 1, a start/stop signal as a digital signal from the upper (lower) position device, and a digital signal (TH temperature signal, alarm signal, etc.) from the upper (lower) position device. The digital signal detection unit 80 determines whether to start the booster pump 20 based on the start instruction when the main pump 10 is started, and the digital signal detection unit 80 has a function of starting a booster pump start unit of the booster pump 20 and the like, but this point will be described later.
The switch 86, which is a start instruction receiving unit that receives a start instruction for starting the main pump 10, outputs a switch signal 88. The start instruction is input by the user of the vacuum pump apparatus 1 operating the switch 86. The switch 86 is used by a user to indicate the start and stop of the main pump 10. That is, the switch 86 is a stop instruction receiving unit that receives a stop instruction for stopping the main pump. The stop instruction is input by the user of the vacuum pump apparatus 1 operating the switch 86. Whether the start indication or the stop indication is identified by, for example, whether the voltage of the switching signal 88 is high or low.
The digital signal detection portion 80 of the main pump inverter 41 recognizes whether the switching signal 88 from the switch 86 is at a high level or a low level. Based on the recognition result, the start signal or the stop signal is output as a signal 106 to the voltage frequency control section 100. Whether the signal 106 is a start indication or a stop indication is identified, for example, by whether the voltage of the signal 106 is high or low. The voltage frequency control unit 100 that receives the signal 106 controls the inverter main circuit 64 to start or stop the main pump 10. The digital signal detection unit 80 outputs the recognition result to the digital signal output unit 82.
The digital signal detection unit 80 of the booster pump inverter 42 detects a start/stop signal, which is a digital signal output from the digital signal output unit 82 of the main pump inverter 41. The digital signal detection section 80 of the booster pump inverter 42, which receives the start/stop signal, which is the digital signal output from the digital signal output section 82 of the main pump inverter 41, identifies whether the signal is the start signal or the stop signal. Based on the recognition result, the start signal or the stop signal is output to the voltage frequency control section 100 of the booster pump inverter 42. The voltage/frequency control unit 100 that receives these signals controls the inverter main circuit 64 to start or stop the booster pump 20.
The digital signal detection unit 80 can receive a signal from the switch 86 and can also receive a start signal and a stop signal of the digital signal. Whether the start/stop is performed by the switch 86 (in the case of the main pump inverter 41) or the start/stop is performed by a digital signal (in the case of the booster pump inverter 42), there are two methods: a) a method of setting in advance in the inverter device, and b) a method of inputting from the outside as a digital signal in accordance with which instruction is inputted.
The digital signal detection portions 80 of the main pump inverter 41 and the booster pump inverter 42 detect a TH temperature signal, an alarm signal, and the like. Further, TH (thermal protector) is a temperature sensor for preventing overheating of the motor, and is a temperature sensor in which an internal contact of the temperature sensor becomes open when the temperature of the motor reaches a prescribed temperature. The digital signal detection unit 80 detects that the internal contact of the temperature sensor is opened based on the TH temperature signal. As a method of detecting the turning-off state, for example, there is a method of configuring a circuit such that the TH temperature signal changes from a low level to a high level when the turning-off state is detected.
The digital signal output section 82 receives the start/stop signal from the digital signal detection section 80, and outputs a digital signal (start (stop) signal 96) to the upper (lower) bit device. That is, as shown in fig. 5, the digital signal output portion 82 of the main pump inverter 41 outputs a start (stop) signal 96 to the digital signal detection portion 80 of the booster pump inverter 42. The digital signal output section 82 of the booster pump inverter 42 outputs the alarm signal to the digital signal output section 82 of the booster pump inverter 42. Fig. 5 is a block diagram showing the exchange of signals between the inverter control circuit 66 of the main pump 10 and the inverter control circuit 66 of the booster pump 20.
The digital signal detection unit 80 of the main pump inverter 41 is a booster pump starting unit that determines whether to start the pump section 202 of the booster pump inverter 42 and further starts the pump section 202 based on the start instruction when the start instruction receiving unit (switch 86) receives the start instruction and the pump section 102 of the main pump inverter 41 is started. The determination method is various depending on the use, state, and characteristics of the vacuum pump apparatus 1.
For example, as shown in fig. 6, when a predetermined time 90 (booster pump start delay time) has elapsed after the switch 86 receives the start instruction, the digital signal detection unit 80 of the main pump inverter 41 determines that the booster pump 20 can be started and starts the booster pump 20. At this time, the digital signal detecting section 80 transmits a signal for starting the booster pump 20 to the digital signal output section 82. The digital signal output section 82 transmits the activation signal to the digital signal detection section 80 of the booster pump 20. Fig. 6 is a diagram showing the relationship between the timing of starting and stopping the main pump 10 and the booster pump 20.
Here, the predetermined time 90 may be 0 second. That is, the digital signal detection unit 80 of the main pump inverter 41 may determine that the booster pump 20 can be started and start the booster pump 20 when the switch 86 receives the start instruction. When the elapsed time is short after the booster pump 20 is stopped, the vacuum degree in the connecting pipe 31 is not reduced, and therefore the booster pump 20 can be started immediately.
After the switch 86 receives the start instruction and when a predetermined time has elapsed and the number of revolutions of the main pump 10 is equal to or greater than a predetermined number, the digital signal detection unit 80 of the main pump inverter 41 may determine that the booster pump 20 can be started and start the booster pump 20. The rotation speed is sent from the rotation speed detection unit 78 to the digital signal detection unit 80 as a signal 110. By considering the rotation speed, it can be considered that the degree of vacuum in the connecting pipe 31 is reliably reduced.
After the switch 86 receives the start instruction, if a predetermined time has elapsed, the number of revolutions of the main pump 10 is equal to or greater than a predetermined number, and the current value of the motor driving the main pump is equal to or less than a predetermined value, the digital signal detection unit 80 of the main pump inverter 41 may determine that the booster pump 20 can be started and start the booster pump 20. The current value is sent from the current detection unit 76 to the digital signal detection unit 80 as a signal 112. The vacuum degree in the connecting pipe 31 can be considered to be more reliably reduced by taking the current value and the rotation speed of the motor into consideration.
The inverter control circuit 66 of the main pump inverter 41 includes a stop instruction receiving unit (switch 86) that receives a stop instruction for stopping the main pump 10, and a booster pump stopping unit (digital signal detecting unit 80) that determines whether or not to stop the booster pump 20 based on the stop instruction when the switch 86 receives the stop instruction and the main pump 10 is stopped. In this case, as shown at time 114 in fig. 6, the booster pump 20 is also stopped simultaneously with the stop of the main pump 10.
At this time, the digital signal detecting part 80 transmits a stop signal to the voltage frequency control part 100 to stop the main pump 10, and transmits a stop signal to the digital signal output part 82 to stop the booster pump 20.
The operation control device includes a main pump abnormality detection unit (the alarm detection unit 72 of the main pump 10) that detects an abnormality of the main pump 10, and an abnormality stop unit (the digital signal detection units 80 of the main pump 10 and the booster pump 20) that stops the main pump 10 and the booster pump 20 when the alarm detection unit 72 detects an abnormality of the main pump 10. That is, the digital signal detection portions 80 of the main pump 10 and the booster pump 20 stop the inverter main circuits 64 of the main pump 10 and the booster pump 20, respectively, via the voltage frequency control portion 100.
As for the flow of the signal, the signal flows from the alarm detection portion 72 of the main pump 10 to the digital signal detection portion 80 and from the digital signal detection portion 80 to the voltage frequency control portion 100 with respect to the stop of the main pump 10, and the main pump 10 is stopped. Further, when the booster pump 20 is stopped, signals flow from the alarm detection unit 72 of the main pump 10 to the digital signal detection unit 80, from the digital signal detection unit 80 to the digital signal output unit 82, from the digital signal output unit 82 to the digital signal detection unit 80 of the booster pump 20, and from the digital signal detection unit 80 to the voltage frequency control unit 100, and the booster pump 20 is stopped.
The operation control device may further include a booster pump abnormality detection unit (the alarm detection unit 72 of the booster pump 20) that detects an abnormality of the booster pump 20, and a booster pump abnormality stop unit (the digital signal output unit 82 of the booster pump 20) that stops the booster pump without stopping the main pump when the booster pump abnormality detection unit detects an abnormality of the booster pump 20.
At this time, in order to stop the booster pump 20, a signal flows from the alarm detection unit 72 of the booster pump 20 to the digital signal detection unit 80, and from the digital signal detection unit 80 to the voltage frequency control unit 100, and the booster pump 20 is stopped. The stop signal does not flow from the booster pump 20 to the main pump 10. Whether the main pump is stopped or not is determined by the design concept of the vacuum pump apparatus 1 as described above.
The operation control device includes a signal input unit (analog signal detection unit 84) to which a signal for controlling the rotational speed of the main pump 10 and/or the booster pump 20 is input from the outside (analog signal detection unit 84). This will be explained below. The analog signal detection section 84 shown in fig. 3 receives an input signal in analog form from the outside. The signal may be a current signal, for example 4 to 20 mA. In addition, the signal may be a voltage signal of 0 to 5V or 1 to 10V. The target rotation speed of the motor unit 104 or the motor unit 204 is changed by the input signal. For example, when the change is made by a 4 to 20mA signal, if 4mA is input, the pump target rotation speed is decreased. The target rotational speed was increased in proportion to the input current, and the rotational speed was rated at 20 mA. When the pump user does not require the pump exhaust performance, the power consumption of the pump can be reduced by reducing the rotation speed of the pump.
The rotational speed may also be changed by a digital signal instead of an analog signal. In this case, the target rotational speed a or the target rotational speed B set in advance in the inverter device is used and determined by the digital signal. A mode capable of increasing the rotation speed by inputting a digital signal through a plurality of systems. For example, in the 3-system, the 8-mode, which is the power of 2, can be selected. The motor unit 104 or the motor unit 204 is controlled by selecting a rotation speed from 8 rotation speeds preset in the inverter device, i.e., the target rotation speed a to the target rotation speed H. By inputting digital signals to a plurality of systems, the external rotational speed command circuit can be configured at a lower cost than when it is an analog circuit.
According to the present embodiment, the operation control method for the vacuum pump apparatus 1 including the main pump 10 and the booster pump 20 can be implemented. In the present method, as described above, the main pump 10 and the booster pump 20 are provided with an intake port and an exhaust port, respectively, and the exhaust port of the booster pump communicates with the intake port of the main pump, the intake port of the booster pump is the intake side of the vacuum pump apparatus, and the exhaust port of the main pump is the exhaust side of the vacuum pump apparatus.
As shown in fig. 7, the operation control method receives a start instruction for starting the main pump 10 (step 1). When the main pump 10 is started upon receiving the start instruction, it is determined whether to start the booster pumps 20 and thus the booster pumps 20, based on the start instruction (step 2). After the booster pump 20 is started, the rotation speed of the booster pump 20 is controlled by inputting an analog voltage to the booster pump 20 from the outside (step 3). Fig. 7 is a diagram showing the relationship between the timing of starting and stopping the main pump 10 and the booster pump 20.
When the booster pump 20 is stopped, the stop instruction receiving unit receives the stop instruction and stops the main pump (step 4). The digital signal detector 80 determines whether or not to stop the booster pump 20 based on the stop instruction, and stops the booster pump 20 when determining to stop the booster pump 20 as described above (step 5). When the main pump abnormality detection portion detects an abnormality of the main pump 10, the main pump 10 and the booster pump 20 can be stopped (step 6).
While the embodiments of the present invention have been described above, the embodiments of the present invention are not intended to limit the present invention, but are for convenience of understanding. The present invention can be modified and improved without departing from the gist thereof, and it is needless to say that the present invention includes equivalents thereof. In addition, in a range in which at least a part of the problems described above can be solved or in a range in which at least a part of the effects can be achieved, the claimed range and each component described in the specification can be arbitrarily combined or omitted.
As described above, the present invention has the following aspects.
[ means one ]
An operation control device for a vacuum pump device including a main pump and a booster pump,
the main pump and the booster pump are respectively provided with an air inlet and an air outlet, the air inlet of the main pump is communicated with the air outlet of the booster pump, the air inlet of the booster pump is the air inlet side of the vacuum pump device, the air outlet of the main pump is the air outlet side of the vacuum pump device,
the operation control device includes:
a start instruction receiving unit that receives a start instruction for starting the main pump; and
and a booster pump starting unit that determines whether or not to start the booster pump based on the start instruction and further starts the booster pump when the start instruction receiving unit receives the start instruction and the main pump is started.
[ means two ]
The operation control device according to the first aspect,
the booster pump activation unit determines that the booster pump can be activated and activates the booster pump when the activation instruction receiving unit receives the activation instruction.
[ means III ]
The operation control device according to the first aspect,
the booster pump starting unit determines that the booster pump can be started and starts the booster pump when a predetermined time has elapsed after the start instruction receiving unit receives the start instruction.
[ means IV ]
The operation control device according to the third aspect of the present invention,
the booster pump activation unit determines that the booster pump can be activated and activates the booster pump when the predetermined time has elapsed and the rotational speed of the main pump is equal to or greater than a predetermined number after the activation instruction receiving unit receives the activation instruction.
[ means five ]
The operation control device according to the fourth aspect, wherein,
the booster pump activation unit determines that the booster pump can be activated and activates the booster pump when the predetermined time has elapsed after the activation instruction receiving unit receives the activation instruction, the number of revolutions of the main pump is equal to or greater than a predetermined number, and a current value of a motor that drives the main pump is equal to or less than a predetermined value.
[ means six ]
The operation control device according to any one of the first to fifth aspects,
the operation control device includes:
a stop instruction receiving unit that receives a stop instruction for stopping the main pump; and
and a booster pump stop unit that determines whether or not to stop the booster pump based on the stop instruction and stops the booster pump when the stop instruction receiving unit receives the stop instruction and the main pump stops.
[ means seven ]
The operation control device according to any one of the first to sixth aspects,
the operation control device includes:
a main pump abnormality detection unit that detects an abnormality of the main pump; and
an abnormality stop unit that stops the main pump and the booster pump when the main pump abnormality detection unit detects an abnormality of the main pump.
[ means eight ]
The operation control device according to any one of the first to seventh aspects,
the operation control device includes:
a booster pump abnormality detection unit that detects an abnormality of the booster pump; and
and a booster pump abnormality stop unit that stops the booster pump without stopping the main pump when the booster pump abnormality detection unit detects an abnormality of the booster pump.
[ means nine ]
The operation control device according to any one of the first to eighth aspects,
the operation control device includes a signal input unit to which a signal for controlling the rotational speed of the main pump and/or the booster pump is input from the outside.
[ means of ten ]
An operation control method for a vacuum pump apparatus including a main pump and a booster pump,
the main pump and the booster pump are respectively provided with an air inlet and an air outlet, the air inlet of the main pump is communicated with the air outlet of the booster pump, the air inlet of the booster pump is the air inlet side of the vacuum pump device, the air outlet of the main pump is the air outlet side of the vacuum pump device,
the operation control method includes:
a step of accepting a start instruction for starting the main pump; and
and determining whether to start the booster pump based on the start instruction when the main pump is started upon reception of the start instruction, and further starting the booster pump.
Claims (11)
1. A vacuum pump apparatus comprising a main pump and a booster pump, characterized in that,
the main pump and the booster pump are respectively provided with an air inlet and an air outlet, the air inlet of the main pump is communicated with the air outlet of the booster pump, the air inlet of the booster pump is the air inlet side of the vacuum pump device, the air outlet of the main pump is the air outlet side of the vacuum pump device,
the vacuum pump device is provided with:
an instruction receiving unit that receives a start instruction for starting the main pump or a stop instruction for stopping the main pump, and outputs a switching signal;
a main pump inverter that receives the output switching signal to start or stop the main pump and outputs a start/stop signal for instructing start/stop of the booster pump; and
and a booster pump inverter that detects a start/stop signal output from the main pump inverter to start or stop the booster pump.
2. Vacuum pumping apparatus as defined in claim 1,
the main pump inverter is configured to: capable of outputting a start signal for instructing start of the booster pump after start-up of the main pump, the booster pump inverter being configured to: it is determined whether to start the booster pump based on the start signal output from the main pump inverter, thereby starting the booster pump.
3. Vacuum pumping apparatus as defined in claim 1,
when the instruction receiving unit receives the start instruction, the booster pump inverter determines that the booster pump can be started and starts the booster pump.
4. Vacuum pumping apparatus as defined in claim 1,
after the instruction receiving unit receives the start instruction and when a predetermined time has elapsed, the booster pump inverter determines that the booster pump can be started and starts the booster pump.
5. Vacuum pumping apparatus as defined in claim 4,
after the instruction receiving unit receives the start instruction, and when the predetermined time has elapsed and the rotational speed of the main pump is equal to or greater than a predetermined number, the booster pump inverter determines that the booster pump can be started and starts the booster pump.
6. Vacuum pumping apparatus as defined in claim 5,
the booster pump inverter determines that the booster pump can be started and starts the booster pump when the predetermined time has elapsed after the instruction receiving unit receives the start instruction, the number of revolutions of the main pump is equal to or greater than a predetermined number, and a current value of a motor that drives the main pump is equal to or less than a predetermined value.
7. Vacuum pump apparatus according to any of claims 1 to 6,
the vacuum pump apparatus includes a booster pump stop unit that determines whether or not to stop the booster pump based on the stop instruction and stops the booster pump when the instruction receiving unit receives the stop instruction and the main pump stops.
8. Vacuum pumping apparatus as defined in claim 1 or 2,
the vacuum pump device is provided with:
a booster pump abnormality detection unit that detects an abnormality of the booster pump; and
and a booster pump abnormality stop unit that stops the booster pump without stopping the main pump when the booster pump abnormality detection unit detects an abnormality of the booster pump.
9. Vacuum pump apparatus according to any of claims 1 to 6,
the vacuum pump device is provided with:
a main pump abnormality detection unit that detects an abnormality of the main pump; and
and an abnormality stop unit that stops the main pump and the booster pump when the main pump abnormality detection unit detects an abnormality of the main pump.
10. Vacuum pump apparatus according to any of claims 1 to 6,
the vacuum pump apparatus includes a signal input unit to which a signal for controlling the rotational speed of the main pump and/or the booster pump is input from the outside.
11. An operation control method for a vacuum pump apparatus including a main pump and a booster pump, the operation control method being characterized in that,
the main pump and the booster pump are respectively provided with an air inlet and an air outlet, the air inlet of the main pump is communicated with the air outlet of the booster pump, the air inlet of the booster pump is the air inlet side of the vacuum pump device, the air outlet of the main pump is the air outlet side of the vacuum pump device,
the operation control method includes:
a step of accepting a start instruction for starting the main pump; and
and a step of determining whether or not to start the booster pump based on the start instruction when the main pump is started upon receiving the start instruction, and outputting a signal for starting the booster pump from a main pump inverter to a booster pump inverter via a signal line, thereby starting the booster pump.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017078915A JP2018178846A (en) | 2017-04-12 | 2017-04-12 | Device and method for controlling operation of vacuum pump device |
| JP2017-078915 | 2017-04-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108691769A CN108691769A (en) | 2018-10-23 |
| CN108691769B true CN108691769B (en) | 2021-11-02 |
Family
ID=62528208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810321818.1A Active CN108691769B (en) | 2017-04-12 | 2018-04-11 | Vacuum pump device and operation control method for vacuum pump device |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP3388676B1 (en) |
| JP (1) | JP2018178846A (en) |
| KR (1) | KR102564312B1 (en) |
| CN (1) | CN108691769B (en) |
| TW (1) | TWI775832B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2755328A1 (en) * | 1977-03-08 | 1978-09-14 | Leybold Heraeus Sogev | OIL SEALED VACUUM PUMP |
| WO2006051260A1 (en) * | 2004-11-09 | 2006-05-18 | The Boc Group Plc | Vacuum pumping system |
| WO2006082366A1 (en) * | 2005-02-02 | 2006-08-10 | Edwards Limited | Method of operating a pumping system |
| WO2006109861A1 (en) * | 2005-04-08 | 2006-10-19 | Ebara Corporation | Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system |
| CN103711697A (en) * | 2012-10-05 | 2014-04-09 | 株式会社荏原制作所 | Dry vacuum pump apparatus and control apparatus for the same |
| CN106014999A (en) * | 2016-06-09 | 2016-10-12 | 中国石油大学(华东) | Efficient running control method for water ring vacuum pump unit and control system |
| CN106232992A (en) * | 2014-03-24 | 2016-12-14 | 阿特利耶博世股份有限公司 | Pumping method in vacuum pump system and vacuum pump system |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2621141B1 (en) * | 1987-09-25 | 1989-12-01 | Cit Alcatel | METHOD FOR STARTING SERIES COUPLED VACUUM PUMPS, AND DEVICE FOR CARRYING OUT SAID METHOD |
| JP2004324644A (en) * | 2003-04-10 | 2004-11-18 | Ebara Corp | Dry vacuum pump and its starting method |
| JP4218756B2 (en) | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | Vacuum exhaust device |
| JP4820304B2 (en) * | 2007-01-18 | 2011-11-24 | 株式会社荏原製作所 | Vacuum pump unit |
| TWI467092B (en) * | 2008-09-10 | 2015-01-01 | Ulvac Inc | Vacuum pumping device |
| GB2502134B (en) * | 2012-05-18 | 2015-09-09 | Edwards Ltd | Method and apparatus for adjusting operating parameters of a vacuum pump arrangement |
| JP6030384B2 (en) * | 2012-08-27 | 2016-11-24 | 株式会社荏原製作所 | Pump control device |
| CN104989621A (en) * | 2015-07-15 | 2015-10-21 | 陆铭 | Intelligent vacuum exhaust table |
-
2017
- 2017-04-12 JP JP2017078915A patent/JP2018178846A/en active Pending
-
2018
- 2018-04-10 TW TW107112242A patent/TWI775832B/en active
- 2018-04-11 CN CN201810321818.1A patent/CN108691769B/en active Active
- 2018-04-11 KR KR1020180042234A patent/KR102564312B1/en active IP Right Grant
- 2018-04-11 EP EP18166827.8A patent/EP3388676B1/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2755328A1 (en) * | 1977-03-08 | 1978-09-14 | Leybold Heraeus Sogev | OIL SEALED VACUUM PUMP |
| WO2006051260A1 (en) * | 2004-11-09 | 2006-05-18 | The Boc Group Plc | Vacuum pumping system |
| WO2006082366A1 (en) * | 2005-02-02 | 2006-08-10 | Edwards Limited | Method of operating a pumping system |
| WO2006109861A1 (en) * | 2005-04-08 | 2006-10-19 | Ebara Corporation | Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system |
| CN103711697A (en) * | 2012-10-05 | 2014-04-09 | 株式会社荏原制作所 | Dry vacuum pump apparatus and control apparatus for the same |
| CN106232992A (en) * | 2014-03-24 | 2016-12-14 | 阿特利耶博世股份有限公司 | Pumping method in vacuum pump system and vacuum pump system |
| CN106014999A (en) * | 2016-06-09 | 2016-10-12 | 中国石油大学(华东) | Efficient running control method for water ring vacuum pump unit and control system |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3388676A1 (en) | 2018-10-17 |
| TW201842272A (en) | 2018-12-01 |
| JP2018178846A (en) | 2018-11-15 |
| CN108691769A (en) | 2018-10-23 |
| KR102564312B1 (en) | 2023-08-07 |
| EP3388676B1 (en) | 2020-11-04 |
| TWI775832B (en) | 2022-09-01 |
| KR20180115229A (en) | 2018-10-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10284131B2 (en) | Motor-driven compressor for a vehicle | |
| EP2873865B1 (en) | Motor-driven compressor | |
| WO2001021959A1 (en) | Autonomous inverter driving hydraulic unit | |
| US8613600B2 (en) | Vacuum pump system | |
| US9929682B2 (en) | Motor control device | |
| CN108691769B (en) | Vacuum pump device and operation control method for vacuum pump device | |
| US10465677B2 (en) | Control method for compressor system | |
| EP1638201B1 (en) | Method for controlling and driving a pump for household appliances | |
| AU2018226492B2 (en) | Power-loss ridethrough system and method | |
| US20120100012A1 (en) | Method for controlling electric compressor | |
| CN112963336B (en) | Control method of water pump | |
| JP2012031832A (en) | Electric pump unit | |
| JP6374998B2 (en) | Self-priming pump operating device, liquid supply device, and self-priming pump operating method | |
| WO2016115428A1 (en) | Controller and method for detecting a blocked state of an electrical machine | |
| JP5003429B2 (en) | Inverter device | |
| TWI707534B (en) | Dry vacuum pump device, method of controlling same, and program of controlling same | |
| CN106067743A (en) | Control device for brushless direct current machine | |
| KR100887149B1 (en) | Outlet low-pressure detection system of inverter booster pump system | |
| WO2015194425A1 (en) | Liquid discharge device | |
| EP2363949B1 (en) | Motor device and pump equipped with the same | |
| JP2001263252A (en) | Inverter control device of pump | |
| US20230318500A1 (en) | Motor-driven compressor | |
| JP2008144602A (en) | Starting device of screw compressor | |
| CN204919688U (en) | Water supply facility | |
| JP2005291180A (en) | Pump device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |