CN108614395B - Parallel motion mechanism based on shaft flexible hinge adjusts device - Google Patents
Parallel motion mechanism based on shaft flexible hinge adjusts device Download PDFInfo
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- CN108614395B CN108614395B CN201810437683.5A CN201810437683A CN108614395B CN 108614395 B CN108614395 B CN 108614395B CN 201810437683 A CN201810437683 A CN 201810437683A CN 108614395 B CN108614395 B CN 108614395B
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- moving linearly
- parts moving
- type hinge
- deflection
- hinge
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention discloses a kind of straight line parallel movement mechanism adjustment device based on shaft flexible hinge；The device includes driven parts moving linearly and driven guiding mechanism, active parts moving linearly is assemblied on active guiding mechanism, two-dimension adjustment module is fixedly mounted with by fixing screws on active parts moving linearly, connecting base plate is assembled in two-dimension adjustment module by two mounting screws, connecting base plate clamps positioning by adjustment location nut above and below and connect with driven parts moving linearly, and two-dimension adjustment module is made of the deflection orthogonal lateral deflection chamfering type hinge in direction and longitudinal deflection chamfering type hinge assemblies；The present apparatus improves the reliability of exposure device and the positioning accuracy of movement mechanism, and the scanning accuracy of exposure window, and use scope light is structurally reasonable, simple, using reliable.
Description
Technical field
The invention belongs to Precision Instrument and Machinery technical field, in particular to a kind of parallel fortune based on shaft flexible hinge
Dynamic institutional adjustment device.
Background technique
Litho machine is that performance requirement highest is also most complicated equipment in IC manufacturing equipment, it is integrated with light
The key technologies such as, accurate measurement, control, machinery；Exposure system of photo-etching machine is the key equipment in litho machine, wherein blocking light-knife
The high speed of piece, high acceleration and high kinematic accuracy demand propose the requirement of high control precision to blade.In order to improve exposure system
The control precision of light-knife piece is blocked in vertical scanning in system, and the gravity that gravity-compensated device compensates vertical blade is additionally arranged in system.By
In system there are rigging error, gravity-compensated device cannot be always maintained at parallel with vertical blade movement device, and vertical scanning is blocked
Light-knife piece is not able to maintain smooth when with High acceleration motion.Therefore a kind of adjustment device is designed, vertical scanning is made to block light-knife piece
It is the key that guarantee the high kinematic accuracy of blade with gravity-compensated device keeping parallelism when with High acceleration motion.
Patent CN103438840A " the precision feeler pose adjustment frame based on two-dimensional space flexible hinge structure " is proposed
A kind of adjustment frame design scheme based on flexible hinge；The program adjusts between the big plate and platelet of device, platelet and preceding posture adjustment
It is all made of elastic piece between plate to be flexibly connected, and there are certain gaps to be used for adjustable inclination, be screwed by adjusting
Screw in serrated nut can carry out fine adjustment to the be loaded two-dimentional inclination angle of part of gauge head respectively.This invention can be adjusted effectively
Whole gauge head posture, but can not adjust in real time in a dynamic state, and structure is not compact enough.
Patent CN205618904U " a kind of oil pressure storage mould elevator parallel adjusting mechanism " proposes a kind of applied to oil pressure
Store up the parallel adjusting mechanism of mould bases elevator；The parallel adjusting mechanism includes a positioning seat, an adjustment stud and nut institute
It states and offers a hole on the pedestal of elevator, the positioning seat is set to the bottom of pedestal, and described one end for adjusting stud is worn
It crosses described hole to be fixed with the positioning seat, the other end spiral for adjusting stud is on nut, the nut welding
It is fixed on the surface of pedestal；This invention can effectively adjust the elevator depth of parallelism, but can not adjust in real time in a dynamic state.
The shortcoming of above-mentioned prior art is cannot to be adjusted when component is moved to the depth of parallelism of component.But
In exposure system of photo-etching machine, in order to guarantee the high kinematic accuracy of blade, blade needs to mend with gravity in High acceleration motion
Device keeping parallelism is repaid, this requires have one kind that can adjust space of components in real time in component motion process in exposure system
The device of the depth of parallelism.
Summary of the invention
The purpose of the present invention is to propose to a kind of, and the parallel motion mechanism based on shaft flexible hinge adjusts device, which will
Active parts moving linearly is connect with driven parts moving linearly by the two-dimension adjustment module based on shaft flexible hinge, is passed through
Ensure that active parts moving linearly is parallel with the space of driven parts moving linearly, and then that realizes driving and driven guide rail synchronizes height
Frequency high-speed motion achievees the purpose that solve exposure system of photo-etching machine high frequency sweep stability.
Above-mentioned purpose is achieved through the following technical solutions:
Parallel motion mechanism based on shaft flexible hinge adjusts device, including driven parts moving linearly and from action-oriented
Mechanism, the driven parts moving linearly are movably assemblied on driven guiding mechanism, and active parts moving linearly is removable
Be assemblied on active guiding mechanism, between active parts moving linearly and active guiding mechanism using static pressure air-bearing support and lead
To mode, be fixedly mounted with two-dimension adjustment module by fixing screws on the active parts moving linearly；It is set on connecting base plate
Two long holes are set, two mounting screw difference insertings are assembled connecting base plate by two mounting screws in two long holes
In two-dimension adjustment module, connecting base plate by raise the clamping location fit of whole location nut and the whole location nut of downward with it is driven
Parts moving linearly is located by connecting；The two-dimension adjustment module is by lateral deflection chamfering type hinge and longitudinal deflection chamfering type hinge
Assembly is constituted, and the deflection direction of the deflection direction of the lateral deflection chamfering type hinge and longitudinal deflection chamfering type hinge is mutually hung down
Directly.
The invention has the characteristics that and the utility model has the advantages that
1, it is machined with long hole on the connecting base plate in apparatus of the present invention, when device is installed, comes by adjusting 2 mounting screws
The mounting distance and tilt angle for ensuring active parts moving linearly Yu driven parts moving linearly, solve guide rail linear motion
The Caton problem generated when especially moving to the extreme position of two sides, improves the reliability of exposure device；
2, the two-dimension adjustment module in apparatus of the present invention by deflection the orthogonal lateral deflection chamfering type hinge in direction with
Longitudinal deflection chamfering type hinge composition, it is ensured that in active parts moving linearly high-speed high frequency motion process, adjust in real time
The space tilt angle of driven parts moving linearly has the function of reducing driven guide rail sliding friction, and is moved by improving
The positioning accuracy of mechanism improves the scanning accuracy of exposure window.
Apparatus of the present invention are widely used, are particularly suitable for vertical scanning in exposure system of photo-etching machine and block light-knife piece and gravity benefit
The connection of compensation structure.
Detailed description of the invention
Fig. 1 is the parallel motion mechanism adjustment apparatus structure schematic diagram based on shaft flexible hinge.
Fig. 2 is two-dimension adjustment modular structure schematic diagram.
Fig. 3 is connecting base plate structural schematic diagram.
In figure: 1, mounting screw；2, whole location nut is raised；3, whole location nut is lowered；4, connecting base plate；5, driven straight
Line moving component；6, driven guiding mechanism；7, fixing screws；8, two-dimension adjustment module；9, active parts moving linearly；10, main
Action-oriented mechanism；11, lateral deflection chamfering type hinge；12, longitudinal deflection chamfering type hinge；13, long hole.
Specific embodiment
It elaborates with reference to the accompanying drawing to embodiment of the present invention.
With reference to Fig. 1,2, a kind of parallel motion mechanism adjustment device based on shaft flexible hinge, including driven linear motion
Component 5 and driven guiding mechanism 6, the driven parts moving linearly 5 are movably assemblied on driven guiding mechanism 6, actively
Parts moving linearly 9 is movably assemblied on active guiding mechanism 10, passes through fixation on the active parts moving linearly 9
Screw 7 is fixedly mounted with two-dimension adjustment module 8；Two long holes 13 are set on connecting base plate 4, and two mounting screws 1 distinguish inserting two
In a long hole 13, connecting base plate 4 is assembled in two-dimension adjustment module 8 by two mounting screws 1, connecting base plate 4 passes through upper
Adjustment location nut 2 is located by connecting with the clamping location fit for lowering whole location nut 3 with driven parts moving linearly 5；It is described
Two-dimension adjustment module 8 is made of lateral deflection chamfering type hinge 11 and longitudinal deflection chamfering type hinge 12 assembly, and the transverse direction is inclined
The deflection direction in the deflection direction and longitudinal deflection chamfering type hinge 12 that turn chamfering type hinge 11 is mutually perpendicular to；Two-dimension adjustment module
Lateral deflection chamfering type hinge 11 and longitudinal deflection chamfering type hinge 12 on 8 include ball-type hinge, spring hinge or composite hinge
Chain.
With reference to Fig. 3, the long hole 13 on connecting base plate 4 can by adjusting 2 mounting screws 1 when device is installed or is calibrated
Ensure the mounting distance and tilt angle of active parts moving linearly 9 Yu driven parts moving linearly 5.
Straight line parallel movement mechanism adjustment device based on shaft flexible hinge is adjustment core with two-dimension adjustment module 8,
Realize the function of straight line parallel movement mechanism space depth of parallelism adjustment.
For straight line parallel movement mechanism adjustment device based on shaft flexible hinge in service stage, two-dimension adjustment module 8 can
Flexible adjustment is carried out to the space depth of parallelism of the two when active parts moving linearly 9 drives driven parts moving linearly 5 to move.
Claims (2)
1. a kind of parallel motion mechanism based on shaft flexible hinge adjusts device, including driven parts moving linearly (5) and from
Action-oriented mechanism (6), the driven parts moving linearly (5) are movably assemblied on driven guiding mechanism (6), and feature exists
In: active parts moving linearly (9) is movably assemblied on active guiding mechanism (10), active parts moving linearly (9) with
Between active guiding mechanism (10) in such a way that static pressure air-bearing supports and is oriented to, on the active parts moving linearly (9)
Two-dimension adjustment module (8) are fixedly mounted with by fixing screws (7)；Two long holes (13), two installation spiral shells are set on connecting base plate (4)
Following closely (1), connecting base plate (4) is assemblied in two-dimension adjustment by two mounting screws (1) in two long holes (13) by inserting respectively
In module (8), connecting base plate (4) by raise whole location nut (2) and lower the clamping location fit of whole location nut (3) with
Driven parts moving linearly (5) is located by connecting；The two-dimension adjustment module (8) is by lateral deflection chamfering type hinge (11) and longitudinal direction
It deflects chamfering type hinge (12) assembly to constitute, the deflection direction of the lateral deflection chamfering type hinge (11) and longitudinal deflection chamfering
The deflection direction of type hinge (12) is mutually perpendicular to.
2. the parallel motion mechanism according to claim 1 based on shaft flexible hinge adjusts device, it is characterised in that: two
Lateral deflection chamfering type hinge (11) in dimension adjustment module (8) and it is longitudinal deflect chamfering type hinge (12) include ball-type hinge,
Spring hinge or compound hinges.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810437683.5A CN108614395B (en) | 2018-05-09 | 2018-05-09 | Parallel motion mechanism based on shaft flexible hinge adjusts device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810437683.5A CN108614395B (en) | 2018-05-09 | 2018-05-09 | Parallel motion mechanism based on shaft flexible hinge adjusts device |
Publications (2)
| Publication Number | Publication Date |
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| CN108614395A CN108614395A (en) | 2018-10-02 |
| CN108614395B true CN108614395B (en) | 2019-03-26 |
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| CN201810437683.5A Active CN108614395B (en) | 2018-05-09 | 2018-05-09 | Parallel motion mechanism based on shaft flexible hinge adjusts device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114296322B (en) * | 2021-12-30 | 2022-10-04 | 哈尔滨工业大学 | Quasi-zero rigidity flexible guide structure based on composite structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101464554A (en) * | 2008-12-30 | 2009-06-24 | 上海微电子装备有限公司 | Micro-regulating mechanism for movable lens |
| CN103567954B (en) * | 2012-08-10 | 2016-09-28 | 上海微电子装备有限公司 | Two-dimensional adjusting mechanism and two-dimension adjustment method |
| CN103047352B (en) * | 2012-12-19 | 2014-06-11 | 哈尔滨工业大学 | Two-dimensional flexible hinge angle decoupling eddy current damping zero-rigidity vibration isolator |
| CN103163905B (en) * | 2013-02-06 | 2015-07-15 | 中国科学院西安光学精密机械研究所 | Tangent drive type microsecond-level high-precision angle adjusting mechanism |
| CN107290835B (en) * | 2016-03-30 | 2019-08-23 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
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