CN108591261B - Air floatation guide rail applied to ultra-precise gantry type detection platform - Google Patents
Air floatation guide rail applied to ultra-precise gantry type detection platform Download PDFInfo
- Publication number
- CN108591261B CN108591261B CN201810687534.4A CN201810687534A CN108591261B CN 108591261 B CN108591261 B CN 108591261B CN 201810687534 A CN201810687534 A CN 201810687534A CN 108591261 B CN108591261 B CN 108591261B
- Authority
- CN
- China
- Prior art keywords
- air
- float
- supporting
- cavity
- air floatation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 31
- 238000001179 sorption measurement Methods 0.000 claims description 21
- 238000005188 flotation Methods 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 238000012360 testing method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 11
- 230000005484 gravity Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2370/00—Apparatus relating to physics, e.g. instruments
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention provides an air floatation guide rail applied to an ultra-precise gantry type detection platform, which comprises the following components: the linear motor is arranged in a U-shaped mounting groove arranged on the portal frame, the air floatation sliding block is sleeved on the portal frame and comprises a lateral vacuum preloading air floatation supporting component and a top air floatation supporting component, and the top air floatation supporting component is fixed at the top of the lateral vacuum preloading air floatation supporting component through bolts and is fixedly connected with a rotor of the linear motor. The air floatation guide rail applied to the ultra-precise gantry type detection platform can realize friction-free contact between the air floatation slider and the portal frame, can ensure real-time braking and stopping of the air floatation slider through direct driving of the linear motor, and improves moving accuracy of the air floatation slider.
Description
Technical Field
The invention relates to an air-float guide rail, in particular to an air-float guide rail applied to an ultra-precise gantry type detection platform.
Background
The three-dimensional precision measurement technology is an accurate detection technology based on a precision motion platform, is an important part of the ultra-precision machining industry for ensuring the quality of workpieces, and has the characteristics of high measurement precision, good stability, strong universality (length, angle, form and position tolerance and the like can be measured), multi-dimensional measurement, high measurement efficiency and the like. In the aspect of structural design, according to the difference of applicable object and measurement accuracy requirement, current three-dimensional precision measurement air supporting platform main structure form has planer-type, bridge type, three types of cantilever type, and uses the mobile planer-type structure to be more, and modern mobile planer-type precision measurement motion platform adopts the linear rolling guide formula structure mostly, and linear rolling guide formula planer-type ultraprecise positioning platform is because the guide rail face is rigid contact, and shock resistance is poor, and resistance is big, and is strict to guide rail, roller material performance and machining accuracy requirement. In the field of ultra-precise measurement, due to the strict requirements for precision, the gantry structure of the linear rolling guide rail cannot meet the requirements of ultra-precise measurement due to the defects.
The conventional gantry type coordinate measuring machine and other measuring machines basically adopt that a driving device is arranged on a gantry cantilever beam, for a large measuring machine, the span and the height of the gantry frame are increased due to the increase of the stroke of the cantilever beam of the measuring machine, so that the mass of the gantry frame is increased greatly, the deformation of the gantry frame due to the dead weight is correspondingly increased, the dynamic performance of the measuring machine is deteriorated, and the defects of the measuring machine in terms of motion precision, abbe errors (the Abbe errors refer to the fact that the axis of a measuring instrument and the axis of a workpiece to be measured are on the same straight line, otherwise, errors are generated, and the errors are called Abbe errors) and the like are always a big problem.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the air-float guide rail applied to the ultra-precise gantry type detection platform, and the running structure of the air-float slide block driven by the linear motor can realize friction-free, real-time braking and stopping, and reduce Abbe errors during transverse measurement on the gantry.
The invention is realized by adopting the following scheme, and the air floatation guide rail applied to the ultra-precise gantry type detection platform comprises the following components: the linear motor is arranged in the U-shaped mounting groove, and comprises a linear stator and a rotor, wherein the linear stator is fixed at the bottom of the mounting groove, and the rotor is arranged on the linear stator; the air-float sliding block is sleeved on the portal frame and comprises a lateral vacuum preloading air-float supporting component and a top air-float supporting piece, wherein the lateral vacuum preloading air-float supporting component is formed by splicing three independent square vacuum preloading air-float supporting pieces, the three independent square vacuum preloading air-float supporting pieces correspond to the front side face, the bottom face and the rear side face of the portal frame respectively, the square vacuum preloading air-float supporting pieces comprise a shaft sleeve shell and a first air-float micropore cover plate, a first vacuum adsorption cavity is arranged in the shaft sleeve shell, a first air suction hole is formed in the center of the first vacuum adsorption cavity, a first air leakage hole is formed in the side wall of the shaft sleeve shell, the first air suction hole is connected with the first air leakage hole through a pipeline, a plurality of first air film cavities which are distributed in a shape like a Chinese character 'Hui' and gradually expand outwards are arranged on the periphery of the first vacuum adsorption cavity, a first air inlet hole is formed in the side wall of the shaft sleeve, the first air inlet hole is communicated with each first air film micropore cover plate, and the first air inlet hole is covered on the first air film cavity, and the first air inlet hole and the first air-float micropore cover plate are in sealing connection with the shaft sleeve; the top air supporting piece is fixed at the top of the lateral vacuum preloading air supporting component through a bolt, the top air supporting piece is fixedly connected with a rotor of the linear motor, the top air supporting piece comprises a shell, a cover plate covers the inner side of the shell, two air supporting cavities which are distributed at intervals in parallel are arranged on the shell, a second air film cavity is arranged in the air supporting cavity, a second air supporting micropore cover plate covers the surface of the second air film cavity, a second air inlet hole corresponding to the air supporting cavity is further arranged on the end edge of the shell, the second air inlet hole is communicated with the second air film cavity through an air inlet pipe, a second vacuum adsorption cavity is arranged at the left end and the right end of each air supporting cavity, a second air pumping hole is arranged in the center of each second vacuum adsorption cavity, a second air discharging hole is correspondingly arranged on the end edge of the shell, and the second air pumping holes are connected with the second air discharging holes through vacuum pumping pipes.
Preferably, the first air flotation micropore cover plate and the second air flotation micropore cover plate are graphite plates or ceramic plates with micropores with diameters of 1-5 μm uniformly arranged on the surfaces.
Preferably, a grating detection ruler is arranged on the side wall of the U-shaped mounting groove of the portal frame, and the grating detection ruler is arranged opposite to the linear motor.
Preferably, photoelectric limit switches are arranged on the left end edge and the right end edge of the grating detection ruler.
Preferably, a detection head is further installed at the bottom of the air floatation sliding rail.
The air floatation guide rail applied to the ultra-precise gantry type detection platform has the beneficial effects that: the air supporting guide rail that this is applied to ultra-precise planer-type testing platform adopts upper and lower, preceding, back four sides all can produce the air supporting slider structure of air film, can realize the friction-free contact of air supporting slider and portal frame to through linear electric motor direct drive, linear electric motor's start and stop is through the positive pressure and the real-time control of negative pressure that the air supporting slider produced, can ensure the real-time braking and the stop of air supporting slider, improves the accuracy that the air supporting slider removed, and adopts the air supporting structure, can reduce the bearing of portal frame, prevents that the portal frame warp, reduces the Abbe error when transversely measuring on the portal frame.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic exploded view of the present invention.
Fig. 3 is a schematic diagram of an installation structure of a portal frame, a linear motor and a grating detection ruler.
Fig. 4 is a schematic structural view of a linear motor according to the present invention.
FIG. 5 is a schematic diagram of an air slider structure according to the present invention.
Fig. 6 is a schematic perspective view of a square vacuum preloading air bearing in an air bearing slider in the invention.
FIG. 7 is a schematic view of the internal structure of a square vacuum preloading air bearing in an air bearing slider according to the present invention.
Fig. 8 is a schematic perspective view of a top air bearing according to the present invention.
Fig. 9 is a schematic view showing the internal structure of the top air bearing of the present invention.
In the figure: 1. a portal frame; 2. a linear motor; 3. an air-float sliding block; 4. a grating detection ruler; 5. a photoelectric limit switch; 6. a detection head; 21. a linear stator; 22. a mover; 31. a lateral vacuum preloading air bearing assembly; 32. a top air bearing; 311. a shaft sleeve; 312. a first air-bearing microporous cover plate; 313. a first vacuum adsorption chamber; 314. a first air extraction hole; 315. a first air inlet hole; 316. a first vent hole; 317. a first air film chamber; 321. a housing; 322. a cover plate; 323. a second vacuum adsorption chamber; 324. an air floatation cavity; 325. a second air-extracting hole; 326. a second vent hole; 327. vacuumizing the tube; 328. a second air inlet hole; 329. a second air film cavity; 330. a second air-float micropore cover plate; 331. an air inlet pipe; 332. and (5) a bolt.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art without making any inventive effort are within the scope of the present invention.
Examples: an air floatation guide rail applied to an ultra-precise gantry type detection platform.
Referring to fig. 1 to 9, an air-float guide rail applied to an ultra-precise gantry type detection platform, comprises:
The portal frame 1, portal frame 1 top is provided with "U" shape mounting groove, and linear electric motor 2 installs "U" shape mounting groove is interior, and grating detection chi 4 is installed on the lateral wall of "U" shape mounting groove and is just to setting up with linear electric motor 2, and photoelectric limit switch 5 is all installed to the end edge about grating detection chi 4, linear electric motor 2 includes linear stator 21 and active cell 22, and linear stator 21 is fixed in the mounting groove bottom, and active cell 22 is installed on linear stator 21 (see the fig. 4), and linear electric motor 2's theory of operation is: a movable gap is arranged between the upper surface and the lower surface of the linear stator 21 and the lower surface of the mover 22, the mover 22 is inserted into the linear stator 21 under the action of gravity, at the moment, the mover 22 cannot move on the linear stator 21 (in a locking state), when the mover 22 moves upwards against the gravity under the action of pulling force (or reverse pushing force), a gap (in an unlocking state) is generated between the mover 22 and the linear stator 21, at the moment, the mover 22 can move on the linear stator 21 in a linear manner under the driving of the linear stator 21, when the external force is removed, the mover 22 is reinserted into the linear stator 21 under the action of gravity, and the mover 22 is locked again; the grating detection ruler 4 is used for accurately detecting the moving coordinates of the mover 22, and the photoelectric limit switch 5 is used for limiting the maximum moving distance of the mover 22 on the left end side and the right end side;
The air-float sliding block 3 sleeved on the portal frame 1, the air-float sliding block 3 comprises a lateral vacuum preloading air-float supporting component 31 and a top air-float supporting piece 32, the lateral vacuum preloading air-float supporting component 31 is formed by welding three independent square vacuum preloading air-float supporting pieces (shown by referring to fig. 5), the three independent square vacuum preloading air-float supporting pieces respectively correspond to the front side surface, the bottom surface and the rear side surface of the portal frame 1, the square vacuum preloading air-float supporting pieces comprise a shaft 311 and a first air-float micropore cover plate 312, the first air-float micropore cover plate 312 is a graphite plate with the surface uniformly provided with micropores with the diameter of 5 mu m, a first vacuum adsorption cavity 313 is arranged inside a shaft sleeve shell 311, a first air-suction hole 314 is formed in the center of the first vacuum adsorption cavity 313, a first air-suction hole 316 is arranged on the side wall of the shaft sleeve shell 311, the first air-suction hole 314 is connected with the first air-suction hole 316 through a pipeline, the first air-suction hole 316 is connected with an external vacuum-suction device through the pipeline, a plurality of air-suction holes are distributed in a reverse-shaped manner, the circumferential side surface of the first air-suction hole cover plate 312 is arranged on the circumference of the first vacuum adsorption cavity 313 and is in contact with the first air-suction hole 317 through the first air-suction hole 315, and the first air-seal cover plate 315 is connected with the first air-suction hole 315 through the first air-seal cavity 6, and the first air-suction hole 315 is communicated with the first air-seal cavity 6 and the air inlet hole 315; in the actual use process, the external air inlet equipment is used for introducing high-pressure air into the first air inlet hole 315 through a pipeline, the high-pressure air is uniformly dispersed after entering the first air film cavity 317, and then is sprayed out through micropores on the first air floatation microporous cover plate 312 and forms an air film (positive pressure is generated) on the surface of the portal frame 1, so that the air floatation slider 3 has no friction with the surface of the portal frame 1 when sliding, when the grating detection ruler 4 detects that the air floatation slider 3 moves to an accurate position, the external air inlet equipment is controlled to stop ventilation to the first air inlet hole 315 through the central control device, and the external vacuumizing device is controlled to suck air (generate negative pressure) through the first air outlet hole 316, so that the surface of the first vacuum adsorption cavity 313 forms negative pressure through the first air outlet hole 314 formed in the center of the first vacuum adsorption cavity 313, and the aim of stopping at a fixed point is achieved;
The top air supporting piece 32 is fixed on the top of the lateral vacuum preloading air supporting component 31 through bolts, the top air supporting piece 32 is fixedly connected with the rotor 22 of the linear motor 2 through bolts, the top air supporting piece 32 comprises a shell 321, a cover plate 322 covers the inner side of the shell 321, the shell 321 is connected with the cover plate 322 through bolts 332, two parallel air supporting cavities 324 which are distributed at intervals are arranged on the shell 321, so that the middle part of the top air supporting piece 32 is conveniently and well connected with the rotor 22 in the linear motor 2, and the two air supporting cavities 324 are positioned right above the front end edge and the rear end edge of a portal frame 1"U' shaped mounting groove, so that an air film is formed; the second air film cavity 329 is arranged in the air flotation cavity 324, the surface of the second air film cavity 329 is covered with a second air flotation micropore cover plate 330, the surface of the second air flotation micropore cover plate 330 is uniformly provided with ceramic plates with micropores of 3 μm in diameter, the end edge of the shell 321 is also provided with a second air inlet hole 328 corresponding to the air flotation cavity 324, the second air inlet hole 328 is communicated with the second air film cavity 329 through an air inlet pipe 331, the outer end of the second air inlet hole 328 is connected with external air inlet equipment through a pipeline, the left end and the right end of each air flotation cavity 324 are respectively provided with a second vacuum adsorption cavity 323, the center of each second vacuum adsorption cavity 323 is provided with a second air suction hole 325, the end edge of the shell 321 is correspondingly provided with a second air discharge hole 326, the second air suction holes 325 are connected with the second air discharge holes 326 through air suction pipes 327, and the outer end of the second air discharge holes 326 are connected with the external air suction equipment (refer to fig. 8 and 9); in the actual use process, the external air inlet equipment is used for air inlet through the second air inlet holes 328, high-pressure air is uniformly distributed in the second air film cavity 329 and then sprayed out through the second air floatation microporous cover plate 330, an air film is formed on the surface of the air floatation cavity 324, the gravity of the mover 22 and the air floatation slider 3 is overcome under the action of counter thrust, a moving gap is generated between the mover 22 of the linear motor 2 and the linear stator 21, then the linear stator 21 drives the mover 22 to move linearly, after the grating detection ruler 4 detects that the air floatation slider 3 moves to an accurate position, the external air inlet equipment is controlled to stop air inlet to the second air inlet holes 328 through the central control device, the external vacuumizing device is controlled to suck air (generate negative pressure) through the second air outlet holes 326, and the negative pressure formed by the surfaces of the second vacuum adsorption cavities 323 is used for enabling the mover 22 to fall into the linear stator 21, so that the linear motor 2 stops moving in time, and the accurate positioning of the air floatation slider is realized; the detection head 6 is arranged at the bottom of the air-float slide block 3, can move along with the air-float slide block 3 accurately and transmits detected data to an industrial computer.
In this embodiment, when the air-float slider 3 needs to move along the portal frame 1, the air-float slider 3 is simultaneously ventilated into the lateral vacuum pre-pressing air-float supporting component 31 and the top air-float supporting piece 32 of the air-float slider 3 through the external air-inlet device, air films are formed on the front side surface, the rear side surface, the bottom side surface and the top side surface of the portal frame 1, under the action of the counter thrust of the top air-float supporting piece 32, the mover 22 fixed at the bottom of the top air-float supporting piece 32 moves upwards against the gravity and generates a moving gap with the linear stator 21, then under the driving of the linear stator 21, the mover 22 drives the air-float slider 3 to move linearly, when the grating detecting ruler 4 detects that the air-float slider 3 moves to the calibrated coordinate position, the external air-inlet device is controlled to stop air-inlet to the air-float slider 3 through the central control device, and the external vacuumizing device is controlled to outwards suck vacuum, and a negative pressure is formed on the vacuum adsorption cavity surface opened on the air-float slider 3, so that the mover 22 on the linear motor 2 falls into the linear stator 21, and the linear motor 2 stops moving precisely, thereby realizing accurate moving and positioning of the air-float slider 3.
In this embodiment, adopt the air supporting slider 3 structure that upper and lower, preceding, back four sides all can produce the air film, can realize the friction-free contact of air supporting slider 3 and portal frame 1, and through linear electric motor 2 direct drive, the positive pressure and the negative pressure real-time control that the opening and shutting that linear electric motor 2 produced through air supporting slider 3 can ensure the real-time braking and the stopping of air supporting slider 3, improve the accuracy that air supporting slider 3 removed, and adopt the air supporting structure, can reduce the bearing of portal frame 1, prevent portal frame 1 warp, abbe error when reducing on the portal frame 1 transverse measurement. The air-float guide rail for ultra-precise gantry type detection platform uses gas as lubricant, and generates air film between static guide rail surfaces, so that the two support elements can realize relative movement under the condition of no contact.
Standard parts used in the invention can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of the parts adopt conventional means such as mature bolts, rivets and welding in the prior art, the machines, the parts and the equipment adopt conventional models in the prior art, and the gas circuit and the circuit are connected in a conventional connection mode in the prior art, so that the detailed description is omitted.
The foregoing is a preferred embodiment of the present invention, but the present invention should not be limited to the embodiment and the disclosure of the drawings, so that the equivalents and modifications can be made without departing from the spirit of the disclosure.
Claims (3)
1. Be applied to ultraprecise portal type testing platform's air supporting guide rail, its characterized in that includes:
The linear motor is arranged in the U-shaped mounting groove, and comprises a linear stator and a rotor, wherein the linear stator is fixed at the bottom of the mounting groove, and the rotor is arranged on the linear stator;
The air-float sliding block is sleeved on the portal frame and comprises a lateral vacuum preloading air-float supporting component and a top air-float supporting piece, wherein the lateral vacuum preloading air-float supporting component is formed by splicing three independent square vacuum preloading air-float supporting pieces, the three independent square vacuum preloading air-float supporting pieces correspond to the front side face, the bottom face and the rear side face of the portal frame respectively, the square vacuum preloading air-float supporting pieces comprise a shaft sleeve shell and a first air-float micropore cover plate, a first vacuum adsorption cavity is arranged in the shaft sleeve shell, a first air suction hole is formed in the center of the first vacuum adsorption cavity, a first air leakage hole is formed in the side wall of the shaft sleeve shell, the first air suction hole is connected with the first air leakage hole through a pipeline, a plurality of first air film cavities which are distributed in a shape like a Chinese character 'Hui' and gradually expand outwards are arranged on the periphery of the first vacuum adsorption cavity, a first air inlet hole is formed in the side wall of the shaft sleeve, the first air inlet hole is communicated with each first air film micropore cover plate, and the first air inlet hole is covered on the first air film cavity, and the first air inlet hole and the first air-float micropore cover plate are in sealing connection with the shaft sleeve; the top air supporting piece is fixed at the top of the lateral vacuum preloading air supporting component through a bolt and is fixedly connected with a rotor of the linear motor, the top air supporting piece comprises a shell, a cover plate covers the inner side of the shell, two air supporting cavities which are distributed at intervals in parallel are arranged on the shell, a second air film cavity is arranged in the air supporting cavity, the surface of the second air film cavity is covered with a second air supporting micropore cover plate, a second air inlet hole corresponding to the air supporting cavity is also arranged on the end edge of the shell, the second air inlet hole is communicated with the second air film cavity through an air inlet pipe, a second vacuum adsorption cavity is arranged at the left end and the right end of each air supporting cavity, a second air pumping hole is arranged in the center of each second vacuum adsorption cavity, a second air discharging hole is correspondingly arranged on the end edge of the shell, and the second air pumping holes are connected with the second air discharging holes through vacuum pumping pipes; the first air flotation micropore cover plate and the second air flotation micropore cover plate are graphite plates or ceramic plates with micropores with diameters of 1-5 mu m uniformly arranged on the surfaces; and a grating detection ruler is arranged on the side wall of the U-shaped mounting groove of the portal frame, and the grating detection ruler is opposite to the linear motor.
2. The air floatation guide rail applied to an ultra-precise gantry type detection platform as claimed in claim 1, wherein: photoelectric limit switches are arranged on the left end edge and the right end edge of the grating detection ruler.
3. The air floatation guide rail applied to an ultra-precise gantry type detection platform as claimed in claim 1, wherein: the bottom of the air floatation sliding block is also provided with a detection head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810687534.4A CN108591261B (en) | 2018-06-28 | 2018-06-28 | Air floatation guide rail applied to ultra-precise gantry type detection platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810687534.4A CN108591261B (en) | 2018-06-28 | 2018-06-28 | Air floatation guide rail applied to ultra-precise gantry type detection platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108591261A CN108591261A (en) | 2018-09-28 |
| CN108591261B true CN108591261B (en) | 2024-04-26 |
Family
ID=63634826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810687534.4A Active CN108591261B (en) | 2018-06-28 | 2018-06-28 | Air floatation guide rail applied to ultra-precise gantry type detection platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108591261B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112596345B (en) * | 2020-12-03 | 2024-03-22 | 佛山市华道超精科技有限公司 | Rigid-flexible coupling multi-axis air floatation platform |
| CN113833756B (en) * | 2021-09-22 | 2022-05-13 | 哈尔滨工业大学 | Micro-motion platform supporting device based on air-magnetic combined leveling |
| TWI760287B (en) * | 2021-10-14 | 2022-04-01 | 銀泰科技股份有限公司 | Combined lubrication structure and lubrication module |
| CN114294330B (en) * | 2021-12-30 | 2022-09-23 | 哈尔滨工业大学 | High-precision rotating ring-shaped part inner supporting air-floating type static balancing device |
| CN116608208A (en) * | 2023-06-21 | 2023-08-18 | 苏州速易德工业装备***有限公司 | High-precision air-float guide rail |
| CN116989064B (en) * | 2023-09-26 | 2024-04-12 | 无锡星微科技有限公司杭州分公司 | High-precision air-floatation linear platform |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101874339A (en) * | 2007-11-30 | 2010-10-27 | 株式会社安川电机 | Slide stage, and slide stage movable in x- and y-directions |
| KR20100136660A (en) * | 2009-06-19 | 2010-12-29 | 이춘무 | The air bearing for linear stage |
| CN102255472A (en) * | 2011-07-29 | 2011-11-23 | 哈尔滨工业大学 | Permanent magnet linear synchronous motor with aerostatic slideways |
| CN102444670A (en) * | 2010-10-15 | 2012-05-09 | 上海微电子装备有限公司 | Gas floating structure |
| CN102528473A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Coaxial macro/micro combined linear motion platform device |
| CN103926031A (en) * | 2014-04-24 | 2014-07-16 | 中南大学 | Thrust detection method and system for linear motor |
| CN208503271U (en) * | 2018-06-28 | 2019-02-15 | 深圳市金园智能科技有限公司 | A kind of air-float guide rail applied to ultraprecise planer-type detection platform |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6428210B1 (en) * | 2000-07-11 | 2002-08-06 | Lintech Motion Control, Inc. | Precision air bearing slide and stage assembly for controlled linear motion |
-
2018
- 2018-06-28 CN CN201810687534.4A patent/CN108591261B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101874339A (en) * | 2007-11-30 | 2010-10-27 | 株式会社安川电机 | Slide stage, and slide stage movable in x- and y-directions |
| KR20100136660A (en) * | 2009-06-19 | 2010-12-29 | 이춘무 | The air bearing for linear stage |
| CN102444670A (en) * | 2010-10-15 | 2012-05-09 | 上海微电子装备有限公司 | Gas floating structure |
| CN102255472A (en) * | 2011-07-29 | 2011-11-23 | 哈尔滨工业大学 | Permanent magnet linear synchronous motor with aerostatic slideways |
| CN102528473A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Coaxial macro/micro combined linear motion platform device |
| CN103926031A (en) * | 2014-04-24 | 2014-07-16 | 中南大学 | Thrust detection method and system for linear motor |
| CN208503271U (en) * | 2018-06-28 | 2019-02-15 | 深圳市金园智能科技有限公司 | A kind of air-float guide rail applied to ultraprecise planer-type detection platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108591261A (en) | 2018-09-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108591261B (en) | Air floatation guide rail applied to ultra-precise gantry type detection platform | |
| CN108592839B (en) | Ultra-precise three-coordinate test platform | |
| US10175145B2 (en) | Online wheel run-out detecting device | |
| CN113319336B (en) | Aviation aluminum alloy curved surface shape work piece clamping device and milling system | |
| CN110095074B (en) | High-precision laser measurement system and method | |
| CN109737889B (en) | Intelligent detection system for whole roundness process of ultra-deep hole | |
| CN208620995U (en) | A kind of testing for level difference machine with positioning function | |
| CN115950330B (en) | Dimension measuring device | |
| CN110666485B (en) | Full-automatic miniature bearing press-fitting device and press-fitting method | |
| CN102003928A (en) | Detection device for center distance of circular arcs on two sides of inner wall of piston bridge and application method of detection device | |
| CN109323861B (en) | Radial high-temperature superconductive magnetic suspension bearing load-carrying performance testing device and testing platform | |
| CN208503271U (en) | A kind of air-float guide rail applied to ultraprecise planer-type detection platform | |
| CN206281474U (en) | A kind of positioner for tube-like piece measurement | |
| CN202614739U (en) | Surface mount technology (SMT) screen plate detecting device | |
| CN210293159U (en) | Workpiece length detection device | |
| US20190168326A1 (en) | Electrochemical machining apparatus for gear outline | |
| JP2019015612A (en) | Gate-shaped movement device and three-dimensional measurement machine | |
| CN114111499B (en) | Charging pile shell nut detection mechanism | |
| CN215413657U (en) | Measuring device for water pump belt pulley | |
| CN204988629U (en) | Measuring air bearing device of automobile -used booster turbine shaft part dynamic balance | |
| CN221147527U (en) | Detection device for bearing outer ring | |
| CN220708359U (en) | Form and position tolerance detection equipment of shafting assembly body | |
| CN219348103U (en) | Adjustable mobile phone tightness test fixture | |
| CN103217505A (en) | SMT screen plate detection device | |
| CN213688275U (en) | Three-coordinate detecting machine with auxiliary positioning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |